A processing method for ultra-thin perfluoroether rubber seal

Abstract

The application provides a processing method of an ultrathin perfluoroether rubber seal, which comprises the following steps: S1, preparing N sets of nested combination molds, cutting and installing a piece of perfluoroether elastomer rubber in one set of nested combination molds, and then placing the nested combination mold in the lower mold of a molding machine mold; S2, heating and molding, and meanwhile, installing perfluoroether elastomer rubber in N-1 sets of nested combination molds; S3, after the molding is completed, taking out the nested combination mold for cooling, and meanwhile, placing one of the N-1 sets of nested combination molds in the lower mold of the molding machine mold, wherein N is an integer greater than or equal to 2; S4, after the taken-out nested combination mold is cooled to be close to the ambient temperature, opening the nested combination mold, and taking out the product; and repeating steps S2-S4. The processing method of the ultrathin perfluoroether rubber seal solves the problem of adhesion between the sealing ring and the mold after the fluorine elastomer is molded, and meanwhile, the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of a sealing element, in particular to a processing method of an ultra-thin perfluoroether rubber sealing element. BACKGROUND

[0002] In different semiconductor processes, sealing materials play an important role.

[0003] An electrostatic chuck (ESC) is a mechatronic device that uses the electrostatic effect of an object surface to generate an electrostatic force to achieve adsorption. When the electrostatic chuck is close to the surface of an object to be adsorbed, the surface of the electrostatic chuck will adsorb the electrostatic charge on the surface of the object due to the electrostatic action between the electrostatic chuck and the surface of the object. The electrostatic chuck uses electrostatic force, the smaller the distance between the electrostatic chuck and the surface of the object, the more concentrated the electrostatic beam of the electrostatic chuck, and the greater the electrostatic force between the electrostatic chuck and the surface of the object. When the object is in contact with the electrostatic chuck, the electrostatic charge is distributed between the surfaces of the two, forming an electrostatic field. The electrostatic field generates an electrostatic force that adsorbs the object on the electrostatic chuck.

[0004] The electrostatic chuck has many advantages. It has no noise and no pollution, and no air flow is generated on the surface of the chuck and the surface of the object to be adsorbed. The electrostatic chuck can also adapt to adsorb objects of different materials, and the adsorption force will not be affected by the environmental temperature.

[0005] The electrostatic chuck is widely used in the fields of semiconductor production, electronic industry, glass production, and automated transportation. In the field of automated transportation, the electrostatic chuck can be used for robot adsorption of objects. In the field of semiconductor production, the electrostatic chuck can be used in chip production, component production, and other fields.

[0006] In the process of chip production, the use of voltage that causes electric arc discharge between bipolar electrodes to adsorb the substrate to the substrate carrier and the electrostatic chuck can cause damage to the electrostatic chuck and may release contaminants into the processing environment. Once the electrostatic chuck is damaged, the entire electrostatic chuck must be removed for expensive repair; the sealing material E-SEAL can effectively protect the electrostatic chuck.

[0007] The E-SEAL has a thickness of only 0.25-0.5 mm, a width of about 2.5 mm, and an inner diameter of about 290.5 mm. After fluorine elastomer molding, if the E-SEAL is taken out by opening the mold, the fluorine elastomer is in a viscous flow state due to the high temperature, the E-SEAL adheres to the mold, and the sealing ring is thin and easy to deform under stress during demolding; if the sealing ring E-SEAL is taken out after cooling to the ambient temperature, the problem of adhesion of the sealing ring to the mold during demolding can be solved, but the cooling process takes a long time and the production efficiency is reduced. SUMMARY

[0008] The purpose of the present application is to provide a processing method of ultra-thin perfluoroether rubber seal to solve the problems existing in the prior art.

[0009] To solve the above problems, the first aspect of the present application provides a processing method of ultra-thin perfluoroether rubber seal, comprising the following steps:

[0010] S1, prepare N sets of nested combination molds, install a piece of perfluoroether elastomer rubber in one set of nested combination molds, and then place the nested combination molds in the lower mold of the molding machine mold;

[0011] S2, heat and mold, and install N-1 pieces of perfluoroether elastomer rubber in the other N-1 sets of nested combination molds;

[0012] S3, after the molding is completed, remove the nested combination mold in the lower mold of the molding machine mold for cooling, and place one of the N-1 sets of nested combination molds with perfluoroether elastomer rubber in the lower mold of the molding machine mold, wherein N is an integer greater than or equal to 2;

[0013] S4, after the removed nested combination mold is cooled to near ambient temperature, open the nested combination mold and remove the perfluoroether elastomer product; repeat steps S2-S4.

[0014] In one embodiment, the nested combination mold comprises a nested mold upper mold and a nested mold lower mold, and the perfluoroether elastomer rubber is installed in the nested mold lower mold.

[0015] In one embodiment, in S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175℃, and the molding time is 5-16 min.

[0016] In one embodiment, N=Ceil(x)+1, x=cooling time / (molding time+installation time).

[0017] In one embodiment, the gap between the nested mold upper mold and the nested mold lower mold is between 0.25-0.5 mm.

[0018] In one embodiment, before molding, a release agent is applied to the surfaces of the nested mold upper mold and the nested mold lower mold.

[0019] In one embodiment, the release agent comprises any one of silicone oil, polyether modified polyorganosiloxane, and reaction type organosilicon polymer.

[0020] In one embodiment, in step S4, the cooling method adopts any one or combination of natural cooling, forced cooling, or programmed cooling.

[0021] Compared with the prior art, the application has the following advantages:

[0022] 1. The problem of adhesion between the sealing ring and the mold after the fluorine elastomer is molded is solved. In the traditional method, when the sealing ring is taken out, the fluorine elastomer is in a viscous flow state due to the high temperature, and the sealing ring is easy to adhere to the mold, resulting in deformation under force when demolding. The nested mold of the application is used to replace the mold while cooling the mold, so that the sealing ring is separated from the mold after cooling. Since the fluorine elastomer product is in a high-elastic state at ambient temperature, the adhesion phenomenon is avoided, and the quality stability of the product is ensured.

[0023] 2. The production efficiency is improved. The nested mold design of the application allows the next round of molding to be performed while the mold is being cooled. This saves the time waiting for cooling and improves the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a schematic diagram of a molding mold in an embodiment of the application;

[0025] Figure 2 is a schematic diagram of a molding mold and a nested combination mold in an embodiment of the application;

[0026] Figure 3 is an exploded schematic diagram of a mold and a product in the application;

[0027] Figure 4 is an assembly drawing of a product in a molding state in an embodiment of the application;

[0028] Figure 5 is Figure 4 is an enlarged view of part B in DETAILED DESCRIPTION

[0029] The embodiments of the application will be described in detail below with reference to the accompanying drawings.

[0030] The embodiments of the application will be described in detail below with reference to the accompanying drawings.

[0031] It is to be understood that the embodiments described herein are for illustrative purposes and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application and scope of the appended claims. It is also to be understood that the various aspects described herein can be implemented in any number of ways, and that the embodiments described herein

[0032] It is also to be understood that the drawings provided herein are for illustrative purposes and that the actual implementation can vary in terms of shape, size, and arrangement of components, and that the layout of components can be more complex.

[0033] In addition, in the following description, specific details are provided to thoroughly understand examples. However, one having ordinary skill in the art will understand that the aspects described herein can be practiced without these specific details.

[0034] The embodiment provides a nested replaceable mold, and a perfluoroether elastomer compound is molded in the nested replaceable mold. A dedicated molding device is used for molding operation. The molding device is a molding machine produced by Dongyu (Ningbo) Hydraulic Co., Ltd., and the model is TYC-V-18-PCD. The molding device comprises a molding machine body and a mold. Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 Figure 5 As shown in the drawings, the molding mold 10 comprises an upper mold 11 and a lower mold 12, and the nested combined mold 20 comprises a nested mold upper mold 21, a nested mold lower mold 22 and a positioning pin. The lower mold 12 is provided with a circular ring groove 121 matched with the nested mold lower mold 22. The perfluoroether elastomer compound is installed in the nested mold lower mold 22, and the nested mold lower mold 22 is arranged in the circular ring groove 121. The gap between the nested mold upper mold 21 and the nested mold lower mold 22 is between 0.25-0.5 mm. Before molding, a release agent is coated on the surfaces of the nested mold upper mold 21 and the nested mold lower mold 22. The release agent comprises any one of a silicone oil, a polyether modified polyorganosiloxane and a reactive silicone polymer. After molding, the product cooling mode adopts any one or a combination of natural cooling, forced cooling or programmed cooling.

[0035] A processing method of an ultra-thin perfluoroether rubber sealing element comprises the following steps:

[0036] S1, prepare N sets of nested combination molds, install a piece of perfluoroether elastomer rubber block in one set of nested combination molds, and then place the nested combination molds in the lower mold of the molding machine mold;

[0037] S2, heat and perform molding, and install N-1 pieces of perfluoroether elastomer rubber blocks in the other N-1 sets of nested combination molds respectively;

[0038] S3, after the molding is completed, remove the nested combination molds in the lower mold of the molding machine mold for cooling, and place one of the N-1 sets of nested combination molds with the perfluoroether elastomer rubber blocks in the lower mold of the molding machine mold, wherein N is an integer greater than or equal to 2;

[0039] S4, after the removed nested combination molds are cooled to near ambient temperature, open the nested combination molds and remove the perfluoroether elastomer products; repeat steps S2-S4.

[0040] In one embodiment, in S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175℃, and the molding time is 5-16 min.

[0041] In one embodiment, N=Ceil(x)+1, x=cooling time / (molding time+installation time).

[0042] In the embodiment, the molding conditions are 10 MPa, the molding temperature is 165℃, and the molding time is 10 min; the gap between the upper nested mold 21 and the lower nested mold 22 is 0.25 mm. Before molding, a release agent is applied to the surfaces of the upper nested mold 21 and the lower nested mold 22, and the release agent is silicone oil. After molding, the product is cooled in one of the following ways: natural cooling, forced cooling, and programmed cooling.

[0043] In the traditional method, after the fluorine elastomer is molded, if the mold is opened to remove the sealing ring product such as E-SEAL, the fluorine elastomer is in a viscous flow state due to the high temperature, and the sealing ring is easily adhered to the mold, resulting in deformation under stress during demolding. The nested mold of the present application can replace the mold while cooling the mold, so that the sealing ring is cooled and then separated from the mold. Since the fluorine elastomer product is in a high-elastic state at ambient temperature, the adhesion phenomenon is avoided, and the quality stability of the product is ensured.

[0044] The design of the nested replaceable mold of the present embodiment allows the next round of molding to be performed while the mold is being cooled. This can save the time waiting for cooling and improve production efficiency.

[0045] Example 1 ambient temperature cooling

[0046] The perfluoroether elastomer compound cut pieces are placed into the nest assembly mold; the release agent is silicone oil;

[0047] The E-SEAL has a thickness of 0.35 mm, a width of 2.5 mm, and an inner diameter of 290.5 mm;

[0048] The nest assembly mold is placed into the lower mold of the molding machine mold, and warm-up molding is performed at a temperature of 165°C, a molding pressure of 10 MPa, and a molding time of 10 min. The nest assembly mold containing the perfluoroether elastomer product is removed and cooled to about 50°C (detected by an infrared thermometer) at ambient temperature, and the mold is opened. The cooling time of the nest assembly mold is about 30 min.

[0049] At the same time that the nest assembly mold containing the perfluoroether elastomer product is removed, a new nest assembly mold is replaced, the perfluoroether elastomer compound cut pieces are placed into the new nest assembly mold, and the next round of molding is performed. The time required to replace the new mold is about 5 min.

[0050] That is, 30 / (10+5)+1=3 sets of nest assembly molds are required to complete continuous operation.

[0051] The product yield and other data are listed in Table 1.

[0052] Example 2 Cooling in a Cold Box

[0053] The perfluoroether elastomer compound cut pieces are placed into the nest assembly mold; the release agent is silicone oil;

[0054] The E-SEAL has a thickness of 0.35 mm, a width of 2.5 mm, and an inner diameter of 290.5 mm;

[0055] The nest assembly mold is placed into the lower mold of the molding machine mold, and warm-up molding is performed at a temperature of 165°C, a molding pressure of 10 MPa, and a molding time of 10 min. The nest assembly mold containing the perfluoroether elastomer product is removed and cooled to about 50°C (detected by an infrared thermometer) at ambient temperature, and the mold is opened. The cooling time of the nest assembly mold is about 30 min.

[0056] At the same time that the nest assembly mold containing the perfluoroether elastomer product is removed, a new nest assembly mold is replaced, the perfluoroether elastomer compound cut pieces are placed into the new nest assembly mold, and the next round of molding is performed. The time required to replace the new mold is about 5 min.

[0057] That is, Ceil(10 / (10+5))+1=2 sets of nest assembly molds are required to complete continuous operation.

[0058] The product yield and other data are listed in Table 1.

[0059] Example 3 Cooling in a Cold Box with Gradient Temperature Increase

[0060] Put the full fluorinated ether elastomer rubber compound into the nest assembly mold; the mold release agent is silicone oil;

[0061] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0062] Put the nest assembly mold into the lower mold of the molding machine mold, and heat to mold, temperature 165℃, molding pressure 10MPa, molding time 10min, take out the nest assembly mold containing the full fluorinated ether elastomer product in the gradient temperature cooling box, the initial temperature is-20℃, and the temperature is raised to 50℃ at a rate of 15℃ / min, and the nest assembly mold is cooled to about 50℃ (detected by infrared thermometer), and the mold is opened, wherein the cooling time of the nest assembly mold is 40min;

[0063] At the same time of taking out the nest assembly mold containing the full fluorinated ether elastomer product, replace a new nest assembly mold, put the full fluorinated ether elastomer rubber compound into the new nest assembly mold, and mold the next round, and the time required for replacing the new mold is about 5min.

[0064] That is, Ceil(40 / (10+5))+1=4 sets of nest assembly molds are needed to complete continuous operation.

[0065] The finished product rate and other data are listed in Table 1.

[0066] Comparative Example 1 Conventional Method

[0067] Put the full fluorinated ether elastomer rubber compound into the mold; the mold release agent is silicone oil;

[0068] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0069] Heat to mold, temperature 165℃, molding pressure 10MPa, molding time 10min, open the mold, the temperature in the mold is about 150℃, take out the sealing part, and mold the next round, which takes 5min.

[0070] The finished product rate and other data are listed in Table 1.

[0071] Comparative Example 2 In-situ cooling for 40min

[0072] Put the full fluorinated ether elastomer rubber compound into the mold; the mold release agent is silicone oil;

[0073] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0074] The temperature is raised for compression molding, the temperature is 165℃, the compression pressure is 10MPa, the compression time is 10min, the mold is opened after in-situ cooling for 40min, the temperature in the mold is about 85℃, the sealing part is taken out, the next round of compression is carried out, and the time is 5min.

[0075] The in-situ cooling is 80min for Comparative Example 3.

[0076] The perfluoroether elastomer compound is cut into pieces and placed into the mold; the mold release agent is silicone oil;

[0077] The E-SEAL has a thickness of 0.35mm, a width of 2.5mm, and an inner diameter of 290.5mm;

[0078] The temperature is raised for compression molding, the temperature is 165℃, the compression pressure is 10MPa, the compression time is 10min, the mold is opened after in-situ cooling for 80min, the temperature in the mold is about 65℃, the sealing part is taken out, the next round of compression is carried out, and the time is 5min.

[0079] The finished product rate and other data are listed in Table 1.

[0080]

[0081] From the above examples and comparative examples, it can be seen that:

[0082] 1. The nested combination mold is used, and the problem of adhesion of the sealing ring to the mold after the fluorine elastomer is compression molded is solved. The nested mold of the application is used to replace the mold while cooling the mold, so that the sealing ring is separated from the mold after cooling. Since the fluorine elastomer product is in a high elastic state at ambient temperature, the adhesion phenomenon is avoided, and the quality stability of the product is ensured.

[0083] 2. The production efficiency is improved. The nested mold design of the application enables the next round of compression to be carried out while the mold is being cooled. In this way, the time for waiting for cooling is saved, and the production efficiency is improved.

[0084] The above is only a specific embodiment of the application, but the protection scope of the application is not limited thereto. Any changes or replacements within the technical range disclosed in the application can be easily thought of by those skilled in the art, and should be covered within the protection scope of the application. Therefore, the protection scope of the application should be subject to the protection scope of the claims.

Claims

1. A method for processing an ultra-thin perfluoroether rubber seal, characterized in that: The following steps are involved: S1. Prepare N sets of nested modular molds, cut a piece of perfluoroether elastomer compound rubber into one set of nested modular molds, and then place the nested modular molds into the lower mold of a molding machine; S2, heating and performing compression molding, while simultaneously installing perfluoroether elastomer compound rubber blocks in another N-1 sets of nested combined molds; S3. After the compression molding is completed, the nested assembly mold in the lower mold of the molding machine is removed for cooling, and one of the N-1 sets of nested assembly molds containing the perfluoroether elastomer rubber mix blocks is placed in the lower mold of the molding machine, where N is an integer greater than or equal to 2; S4, after the nested assembled mold to be removed has cooled to a temperature close to the ambient temperature, the nested assembled mold is opened and the perfluoroether elastomer product is removed; and steps S2-S4 are repeated; Wherein, the nested combined mold comprises a nested mold upper mold and a nested mold lower mold, and the perfluoroether elastomer compound rubber is installed in the nested mold lower mold.

2. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: In S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175 °C, and the molding time is 5-16 min.

3. The processing method of the ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: N=Ceil(x)+1, x=cooling time / (sum of molding time and installation time).

4. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: The gap between the upper mold of the nested mold and the lower mold of the nested mold is between 0.25-0.5 mm.

5. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: Before molding, a release agent is applied to the surfaces of the upper mold and the lower mold of the nested mold.

6. The method for processing an ultra-thin perfluoroether rubber seal according to claim 5, characterized in that: The release agent is silicone oil or polyether-modified polyorganosiloxane.

7. The method for processing an ultra-thin perfluoroether rubber seal according to claim 5, characterized in that: The release agent is a reactive organic silicon polymer.

8. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: In step S4, the cooling method adopts any one or a combination of natural cooling and forced cooling.

9. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: In step S4, the cooling method adopts programmed cooling, or a combination of natural cooling and programmed cooling.

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