Detection device

Abstract

In order to detect a subject in a lensless manner, a detection device is provided with: a light guide unit which has a light entrance port and an exit port having a smaller opening than the entrance port, and which causes light incident from the entrance port to exit from the exit port; and a detection unit that detects the light emitted from the emission port.

Description

[0001] Reference-based citation

[0002] This application claims priority from Japanese patent application No. 2022-131239 filed on August 19, 2022, the contents of which are incorporated into this application by reference. Technical Field

[0003] The invention relates to a detection device. Background Art

[0004] An imaging device to which a technique for detecting a subject based on a signal from an imaging element is applied is known. There has been a demand for improving the accuracy of subject detection.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2006-197192 Summary of the invention

[0008] As one aspect of the disclosed technology, a detection device comprises: a light guide having a light inlet and an outlet having an opening smaller than the inlet, so that light incident from the inlet is emitted from the outlet; and a detection unit detecting light emitted from the outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is an explanatory diagram showing an example of a detection device according to the first embodiment.

[0010] Figure 2A This is an explanatory diagram showing Example 1 of the incident angle dependency of direct incident light to the detection device.

[0011] Figure 2B This is an explanatory diagram showing Example 2 of the incident angle dependency of the direct incident light to the detection device.

[0012] Figure 2C It is an explanatory diagram of Example 3 showing the incident angle dependency of the direct incident light to the detection device.

[0013] Figure 3 It is an explanatory diagram showing the dependency of direct incident light and reflected incident light on the detection device on the incident angle.

[0014] Figure 4 It is an explanatory diagram showing another example of the structure inside the frustum portion.

[0015] Figure 5A It is a partial side sectional view of the detection device of embodiment 2.

[0016] Figure 5B It is a diagram showing the appearance of two adjacent light guide parts.

[0017] Figure 6 This is a partial top view of the detection device according to the second embodiment.

[0018] Figure 7 It is an explanatory diagram showing an example 1 of arrangement intervals of a plurality of light guide portions.

[0019] Figure 8 It is a graph showing the MTF characteristics with respect to the arrangement angle and the incident angle of the incident light.

[0020] Fig. 9 It is an explanatory diagram showing example 2 of arrangement intervals of a plurality of light guide portions.

[0021] Fig.10 It is an explanatory diagram showing an example 3 of arrangement intervals of a plurality of light guide portions.

[0022] Fig.11 It is a partial top view of the detection device of embodiment 4.

[0023] Fig.12 This is a perspective view of a detection device according to a fifth embodiment.

[0024] Fig.13 It is a side view of the detection device of embodiment 5.

[0025] Fig.14 It is a top view and AB cross-sectional view of the first holding plate.

[0026] Fig.15 It is a top view and CD cross-sectional view of the second holding plate.

[0027] Fig.16 This is an explanatory diagram showing an example of a light guide component manufacturing system according to the sixth embodiment.

[0028] Fig.17 This is a perspective view showing an example of a light guide component manufactured by the manufacturing system.

[0029] Fig.18 It is an explanatory diagram showing an example of connection of light guide components.

[0030] Fig.19 It is an explanatory diagram showing an example of other processing objects.

[0031] Fig. 20 It is a front view and a top view showing another example of the light guide component manufactured by the manufacturing system.

[0032] Fig.21 The following are a front view and a bottom view showing another example of the light guide component manufactured by the manufacturing system.

[0033] Fig. 22 It is an explanatory diagram showing an example of connection of light guide components.

[0034] Fig.23 This is a stereoscopic diagram showing an example of a structure according to the seventh embodiment.

[0035] Fig.24 This is the first cross-sectional view of the structure of the seventh embodiment.

[0036] Fig.25 This is the second cross-sectional view of the structure of the seventh embodiment.

[0037] Fig.26 This is another first cross-sectional view of the structure of the seventh embodiment. DETAILED DESCRIPTION

[0038] [Implementation Method 1]

[0039] Figure 1 1 is an explanatory diagram showing an example of a detection device according to Embodiment 1. The detection device 100 includes a light guide unit 101 and a detection unit 110. The light guide unit 101 allows incident light from a subject to pass through the inside thereof and emits the light to the detection unit 110. The detection unit 110 includes a photodiode, which receives the light emitted from the light guide unit 101 and performs photoelectric conversion. The light guide unit 101 and the detection unit 110 are described in detail.

[0040] The light guide portion 101 includes a frustum portion 102 and a transmission portion 103. The frustum portion 102 and the transmission portion 103 may be connected together or may be formed integrally. The frustum portion 102 includes an incident portion 121 at one end and an exit portion 122 at the other end.

[0041] The incident portion 121 has an incident port 121a and an edge 121b. The incident port 121a is an opening for light to enter, and its center is set as O1, and the distance from the center O1 to the edge 121b, that is, the diameter is set as r1. The edge 121b is the outline of the incident port 121a. The incident light from the incident port 121a is incident on the inside of the frustum portion 102. The surface (opening surface) of the incident port 121a and the area of ​​the opening surface are expressed as S1.

[0042] The emission portion 122 has an opening 122a and an edge 122b connected to one end of the transmission portion 103. The center of the opening 122a is set as O2, and the distance from the center O2 to the edge 122b, that is, the diameter is set as r2 (<r1). The edge 122b is the outline of the opening 122a. The outgoing light from the opening 122a is incident on the inside of the transmission portion 103. The surface (opening surface) of the opening 122a and the area of ​​the opening surface are expressed as S2. The opening 122a has the same shape as the incident port 121a.

[0043] The inner peripheral surface of the frustum portion 102 may be an absorption surface for absorbing incident light, or a reflection surface for reflecting incident light. In addition, the interior of the frustum portion 102 may be hollow, or may be filled with a light-transmitting transparent body.

[0044] Here, the frustum portion 102 is a three-dimensional shape obtained by removing a cone whose vertex is O and whose bottom surface is the incident port 121a of the incident portion 121 from a cone whose vertex is O and whose bottom surface is the opening 122a of the exit portion 122. That is, the frustum portion 102 has a through hole 123 that passes through from the incident port 121a to the opening 122a. The vertex O does not necessarily need to be on the surface 111 of the detection portion 110, but Figure 1 For convenience, the vertex O is arranged at the center of the surface 111.

[0045] The line segment connecting points O, O1, and O2 is L. In addition, the generatrix of the cone whose vertex is point O and whose bottom surface is the incident port 121a of the incident portion 121 is M. The incident angle of the incident light with respect to the line segment L is θ. The angle between the line segment L and the generatrix M is The generatrix M is a line segment connecting the point O and the edge 121 b of the incident portion 121 .

[0046] The transmission part 103 is a hollow column, i.e., a cylinder. One end 131 of the transmission part 103 is connected to the emission part 122. The other end 132 of the transmission part 103 has an emission port 132a for emitting incident light to the detection part 110, and is connected to the detection part 110. The opening at one end 131 of the transmission part 103 and the opening at the other end 132 are of the same shape and size. The inner surface of the transmission part 103 repeatedly performs total reflection and internal reflection to efficiently transmit the incident light to the emission part 122. The through hole from one end 131 to the other end 132 of the transmission part 103 is called a transmission path 133.

[0047] The detection unit 110 is in the shape of a flat plate. The surface 111 of the detection unit 110 is connected to the other end 132 of the transmission unit 103. The inner surface of the surface 111 surrounded by the edge of the other end 132 is a light receiving surface 112 that receives light transmitted in the transmission unit 103. A photoelectric conversion unit is provided inside the light receiving surface 112.

[0048] The detection unit 110 uses a photodiode to perform photoelectric conversion on the light received by the light receiving surface 112 and output an electrical signal. The photodiode is composed of, for example, silicon or indium gallium arsenide. The electrical signal is output to an image processing unit (not shown). The image processing unit performs image processing based on the electrical signal and displays the subject image on a display unit (not shown). In addition, the image processing unit and the display unit can be provided in the detection device 100, or can be provided outside the detection device 100 in a computer that can communicate with the detection device 100. The detection unit 110 has the function of amplifying light.

[0049] In addition, since the transmission part 103 is a cylinder, the light receiving surface 112 is substantially the same plane and the same area as the opening 122a of the emission part 122. Therefore, S2 is sometimes referred to as the light receiving area for convenience. In addition, the relationship between the opening area S1 and the light receiving area S2 is expressed by the following formula (1).

[0050] D=S2 / S1···(1)

[0051] D is the light receiving surface ratio.

[0052] Figure 2A to Figure 2C 1 to 3 are explanatory diagrams showing the incident angle dependency of direct incident light to the detection device 100. Figure 2A to Figure 2C ( Figure 3 , Figure 4 Similarly, in FIG. 1 , the frustum 102 is shown in a cross section perpendicular to the circumferential direction of the incident port 121a and the opening 122a. A and B are points on the edge 121b, and when expressed as AB, they represent the area S1 or its surface. Figure 2A to Figure 2C In FIG. 2 , 200a to 200c are light beams. When 200a to 200c are not distinguished, it is expressed as light beam 200. 201a to 201c, 202a, and 202b are light rays defining the edge of light beam 200. When 201a to 201c are not distinguished, it is expressed as light ray 201. When light rays 202a and 202b are not distinguished, it is expressed as light ray 202.

[0053] A0 is the intersection of the light ray 201 of the direct incident light from the subject and the opening surface S1 of the incident port 121a, and B0 is the intersection of the light ray 202 of the direct incident light from the subject and the opening surface S1 of the incident port 121a. When expressed as A0B0, it indicates the area or surface where the light beams of the direct incident light A0 to B0 intersect with the opening surface S1. A' and B' are points on the edge 122b, and when expressed as A'B', it indicates the area S2 or its surface.

[0054] In addition, the subscript 0 of A0 and B0 represents the number of reflections of the light passing through A0 and B0 in the frustum portion 102. In general, the number of reflections is set to i and j (i and j are non-negative integers), and expressed as Ai , B j .

[0055] (a) indicates The incident angle dependence of the case, (b) represents The incident angle dependence of the case, (c) is expressed as In the case of (a), the light beam 200a of area A0B0 reaches the opening 122a without being reflected inside the frustum 102. That is, in (a), area A0B0 = S2. Therefore, the light receiving angle characteristic I0 (θ) under direct illumination in (a) is expressed by the following equation (2).

[0056] I0(θ)=A0B0 / AB=A′B′ / AB···(2)

[0057] exist Figure 2B In the case of Figure 2A The light beam 200a cannot be fully incident on the incident port 121a, and the light beam 200b with a part missing is incident on the incident port 121a. Therefore, if the light beam 202b is incident on the opening 122a, a halo is generated at B. The light beam 200b with area A0B0 is not reflected inside the frustum 102 and reaches the opening 122a. That is, at Figure 2B In the figure, the area A0B0<S2.

[0058] exist Figure 2C In the case of Figure 2A The light beam 200 cannot be completely incident on the incident port 121a, and the light beam 201c is incident on the incident port 121a. Then the light beam 200 cannot be incident on the opening 122 a.

[0059] Figure 3 1 is an explanatory diagram showing the incident angle dependency of the direct incident light and the reflected incident light to the detection device 100. The reflected light beams 300a-1u and 300a-1d (referred to as the reflected incident light 300a-1 when not distinguishing between them) are the reflected incident light that enters from the incident port 121a, reflects once inside the frustum portion 102, and reaches the opening 122a. The reflected light beam 300a-2 is the reflected incident light that enters from the incident port 121a, reflects twice inside the frustum portion 102, and reaches the opening 122a.

[0060] The reflected light beam 300a-1u passes through the surface A0A1. The reflected light beam 300a-1d passes through the surface B0B1. The reflected light beam 300a-2 passes through the surface A1A2.

[0061] The light receiving angle characteristic taking the reflected light into consideration is expressed by the following equation (3).

[0062]

Number 1

[0063]

[0064] In the above formula (3), R i is the reflectivity of the i-th reflection inside the frustum portion 102. j is the reflectivity of the jth reflection inside the frustum 102. As the number of reflections i and j increases, the reflectivity R i , R j reduce.

[0065] Figure 4 1 is an explanatory diagram showing another structural example of the inside of the frustum 102. A light-receiving prevention member 402 is provided on at least a portion of the inner circumferential surface 401 of the frustum 102. The light-receiving prevention member 402 reflects the incident light 400 and causes the incident light 400 to be emitted from the incident port 121a of the incident portion 121. Each of the light-receiving prevention members 402 is a ring-shaped or arc-shaped member extending in the circumferential direction of the incident port 121a or the opening 122a. The shape of the cross section of the light-receiving prevention member 402 perpendicular to the circumferential direction is, for example, similar to the shape of the cross section of the frustum 102 perpendicular to the circumferential direction.

[0066] like Figure 4 As shown, the light-receiving prevention member 402 has a first surface 421 and a second surface 422. The first surface 421 is a surface opposite to the incident port 121a, and reflects the incident light and emits it from the incident port 121a. The second surface 422 reflects the incident light and emits it to the first surface 421 of the other light-receiving prevention member 402 on the opening 122a side.

[0067] As described above, according to Embodiment 1, clear subject detection can be realized even without using a lens. In addition, according to Embodiment 1, subject detection with high directivity, that is, a deep depth of field and no focus concept can be realized.

[0068] In Embodiment 1, the shapes of the incident port 121a and the opening 122a are circular as an example, but they may be polygonal. In this case, the cross-sectional shapes of the frustum portion 102 and the transmission portion 103 perpendicular to the line segment L are also the same polygonal.

[0069] In Embodiment 1, a transparent member may be provided at the incident port 121a. As an example of a transparent member, the incident port 121a may be sealed with a transparent plastic member, thereby ensuring subject detection and improving dustproofness inside the frustum portion 102 and the transmission portion 103. In addition, as an example of a transparent member, by sealing the incident port 121a with a lens, subject detection may be ensured, and light collection of incident light and dustproofness inside the light guide portion 101 may be improved.

[0070] [Implementation Method 2]

[0071] Next, Embodiment 2 is described. In Embodiment 1, a case where there is one light guide unit 101 is described as an example, but in Embodiment 2, an example where there are multiple light guide units 101 is described. The same components as in Embodiment 1 are denoted by the same reference numerals, and their description is omitted.

[0072] Figure 5A 1 is a partial side cross-sectional view of the detection device of Embodiment 2. The detection device 500 has a hemispherical housing 501. The housing 501 has a hemispherical surface 502 and a bottom surface 503. The bottom surface 503 is a circular plate that seals the opening of the hemispherical surface 502. Inside the housing 501, a detection processing unit 510 is provided at the center of the bottom surface 503.

[0073] The detection processing unit 510 is a collection of detection units 110 connected to each of the plurality of light guide units 101. The areas on the surface of the detection processing unit 510 connected to each of the transmission units 103 constitute the detection unit 110, i.e., photodiodes, which are pixels. The photodiodes are arranged in two dimensions. In addition, the other end 132 of each transmission unit 103 is configured so that the end surface of the other end 132 is parallel to the surface of the detection processing unit 510.

[0074] The light guides 101 are arranged radially from the detection processing unit 510 toward the hemispherical surface 502. In FIG. 5 , five light guides 101 are arranged radially for ease of explanation. Adjacent frustum units 102 are arranged separately. The incident port 121a is located on the hemispherical surface 502. An opening may be formed at the position of the incident port 121a of the hemispherical surface 502. In addition, the hemispherical surface 502 may also be a structure in which the incident port 121a is sealed by a transparent member. The area other than the incident port 121a in the hemispherical surface 502 may also be formed by a light-shielding member.

[0075] Figure 5B 1 is a diagram showing the appearance of two adjacent light guides 101. Figure 5B In the embodiment, one of the two adjacent light guides 101 is set as the light guide 101A, and the other is set as the light guide 101B. In addition, the mutually adjacent busbars M between the light guides 101A and 101B are set as busbars MA and MB, respectively. With respect to the angle formed by the busbars MA and MB, the configuration angle between the light guides 101A and 101B is set as the configuration angle δ.

[0076] When a lens is added to the incident port 121a, the direction (limitation) of the incident light can be narrowed by the lens, and the configuration angle δ can be made smaller than when there is no lens. Therefore, more light guides 101 can be configured compared to when no lens is provided, and a high-resolution image can be obtained.

[0077] Figure 6 It is a partial top view of the detection device 500 of Embodiment 2. The edges 121b and 122b are both circles centered on the points O1 and O2. The distance from the point O1 to the first incident end, which is a position on the edge 121b, is the radius r1 of the edge 121b, and the distance from the point O1 to the second incident end, which is a position on the edge 121b (a position different from the first incident end), is also the radius r1 of the edge 121b. Similarly, the distance from the point O2 to the first emission end, which is a position on the edge 122b, is the radius r2 of the edge 122b, and the distance from the point O2 to the first emission end, which is a position on the edge 122b (a position different from the first emission end), is also the radius r2 of the edge 122b.

[0078] Figure 7 1 is an explanatory diagram showing an example 1 of the arrangement interval of the plurality of light guide units 101. The plurality of light guide units 101 are arranged radially from the surface 700 of the detection processing unit 510. The other end 132 of each transmission unit 103 is connected to the surface 700 of the detection processing unit 510.

[0079] Figure 8 800 is a graph showing the MTF characteristics with respect to the configuration angle δ and the incident angle θ of the incident light. In the graph 800, the horizontal axis is the incident angle θ of the incident light, and the vertical axis is the MFT (Modulation Transfer Function). Waveforms 801 to 803 are the MTF characteristics of each light guide portion 101. The light guide portion 101 of waveform 801 is adjacent to the light guide portion 101 of waveform 802, and the light guide portion 101 of waveform 801 is adjacent to the light guide portion 101 of waveform 803. Waveforms 801 to 803 are shown in FIG. Cycle formation. is the opening angle of the frustum portion 102 .

[0080] MTF is calculated by the following formula (4).

[0081] For example, the range of the incident angle θ of the peak 802p of the waveform 802 includes the incident angle θ of the skirt 801hR of the waveform 801 (the angular out-response from the adjacent light guide portion 101), but does not include the incident angle θ of the peak 801p of the waveform 801. Similarly, the range of the incident angle θ of the peak 803p of the waveform 803 includes the incident angle θ of the skirt 801hL of the waveform 801 (the angular out-response from the adjacent light guide portion 101), but does not include the incident angle θ of the peak 801p of the waveform 801.

[0082] That is, at each peak 801p to 803p, MTF=100%, so the incident light in the light guide portion 101 of the waveform 801 does not leak to the light guide portions 101 of the adjacent waveforms 802 and 803. By manufacturing the detection device 500 with respect to δ, it is possible to improve the detection accuracy of the subject.

[0083] [Implementation method 3]

[0084] Next, Embodiment 3 is described. In Embodiment 2, the length of the transmission unit 103 in the longitudinal direction is the same in each light guide unit 101, but in Embodiment 3, the length of each light guide unit 101 is different depending on the configuration position. The same reference numerals are given to the same structures as in Embodiments 1 and 2, and their descriptions are omitted.

[0085] Fig. 9 2 is an explanatory diagram showing an example 2 of the arrangement interval of the plurality of light guide portions 101. Fig. 9 In the example, each transmission part 103 is longer the closer it is to the inner side (center of the detection processing part 510) in the detection device 500, and shorter the closer it is to the outer side. Each transmission part 103 is perpendicularly connected to the surface 700 of the detection processing part 510. In this case, there is also a light guide part 101 in which the line segment L is bent at point O2, but in the transmission part 103, the incident light is reflected and guided to the light receiving surface 112. Thus, by Fig. 9 With such a configuration, the density of the transmission parts 103 can be reduced compared to the second embodiment, and the intrusion of incident light leaking from the adjacent light guide part 101 can be reduced.

[0086] Fig.10 3 is an explanatory diagram showing an example 3 of the arrangement interval of the plurality of light guide portions 101. Fig.10 In the structure, the transmission unit 103 is not provided in a part of the light guide unit 101, and the emission unit 122 of the light guide unit 101 is directly connected to the surface 700 of the detection processing unit 510. Fig.10 In the embodiment, the part of light guide 101 is defined as light guide 101L and 101R. Edge 122bL of emission portion 122 of light guide 101L is directly connected to surface 700. Similarly, edge 122bR of emission portion 122 of light guide 101R is also directly connected to surface 700.

[0087] That is, the light guide parts 101L and 101R are determined so that the emitted light from all the light guide parts 101 can be received by the flat surface 700. Fig.10 Such a configuration can reduce the number of components and miniaturize the detection device 500. Fig.10The structure of the light guide parts 101L and 101R can also be applied to the embodiment 1.

[0088] [Implementation Method 4]

[0089] Next, Embodiment 4 will be described. In Embodiments 1 to 3, the shapes of the edges 121b and 122b are circular, but in Embodiment 5, the shapes of the edges 121b and 122b are polygonal. The same reference numerals are used for the same structures as in Embodiments 1 to 3, and their description is omitted.

[0090] Fig.11 FIG. 5 is a partial top view of the detection device 500 according to Embodiment 4. Fig.11 In the figure, the shape of the edge 121b is not a circle but a regular hexagon.

[0091] The edges 121b and 122b are both regular hexagons centered at points O1 and O2. In Embodiment 6, the distance from point O1 to the first incident end portion, which is a vertex on the edge 121b, is set to r1, and the distance from point O1 to the second incident end portion, which is a side on the edge 121b, is set to s1 (<r1). Similarly, the distance from point O2 to the first emission end portion, which is a vertex on the edge 122b, is set to r2, and the distance from point O2 to the second emission end portion, which is a side on the edge 122b, is set to s2 (<r2).

[0092] In addition, Fig.11 In the embodiment 5, the shapes of the edges 121b and 122b are set to regular hexagons, but as long as s1<r1 and s2<r2 are satisfied, the shapes of the edges 121b and 122b other than regular hexagons may also be used. In addition, in the embodiment 5, the shapes of the edges 121b and 122b in the embodiments 2 to 4 are set to polygons, but the shapes of the edges 121b and 122b in the embodiment 1 may also be set to polygons.

[0093] In addition, the transmission part 103 is a hollow cylindrical body, but the inner peripheral surface of the cylindrical body may be processed by metal plating to reflect light. In addition, the transmission part 103 may be a cylindrical body having an optical fiber inside.

[0094] As described above, according to the first to fourth embodiments, one light guide unit 101 corresponds to one detection unit 110 as a single eye, and the detection unit 110 can detect the intensity of incident light from the light guide unit 101. The light guide units 101 are optically separated from each other, and incident light from one direction (the direction of the line segment L) is incident on one light guide unit 101, thereby enabling a wide range of images to be captured in the entirety of the plurality of light guide units 101. The closer the light guide units are, the higher the resolution is, and a more detailed image can be captured.

[0095] [Implementation method 5]

[0096] Next, Embodiment 5 will be described. In Embodiment 5, a configuration for holding a plurality of light guides 101 described in Embodiments 1 to 4 will be described. Configurations identical to those in Embodiments 1 to 4 are denoted by the same reference numerals, and description thereof will be omitted.

[0097] Fig.12 This is a perspective view of a detection device according to a fifth embodiment. Fig.13 is a side view of the detection device of Embodiment 5. Fig.13 The light guide portion 101 on the depth side is omitted. Fig.14 It is a top view and AB cross-sectional view of the first holding plate. Fig.15 It is a top view and CD cross-sectional view of the second holding plate.

[0098] The detection device 1200 includes a plurality of light guide units 101 (a frustum unit 102 and a transmission unit 103), a detection processing unit 510, a first holding plate 1201, a second holding plate 1202 (in Fig.12 The second holding plate 1202 is omitted for convenience. The plurality of light guides 101 are arranged in a matrix shape in such a way that the incident portions 121 are located on the same curved surface. The other end 132 of each transmission portion 103 is connected to the detection processing portion 510.

[0099] The first holding plate 1201 and the second holding plate 1202 respectively hold a plurality of light guides 101. The first holding plate 1201 and the second holding plate 1202 are plate-shaped members. The shapes of the first holding plate 1201 and the second holding plate 1202 are rectangular, but may also be polygonal or circular. In addition, the first surface 1201a and the second surface 1202a of the first holding plate 1201 and the second holding plate 1202 and the first back surface 1201b and the second back surface 1202b may be flat end surfaces or curved surfaces.

[0100] The first holding plate 1201 and the second holding plate 1202 are respectively arranged to intersect with the longitudinal direction of the light guide portion 101. Specifically, for example, in the first holding plate 1201, a first through hole 1301 is provided at a position intersecting with the frustum portion 102, and the frustum portion 102 can be inserted. In addition, in the second holding plate 1202, a second through hole 1302 is provided at a position intersecting with the transmission portion 103, and the transmission portion 103 can be inserted.

[0101] The detection device 1200 includes at least one of the first holding plate 1201 and the second holding plate 1202 .

[0102] The first holding plate 1201 has a plurality of first through holes 1301. The plurality of first through holes 1301 are provided at positions corresponding to insertion positions of the plurality of frustum portions 102 arranged in a matrix. The first through holes 1301 have a first upper edge 1301a and a first lower edge 1301b.

[0103] The first through hole 1301 is a hole that passes through the first upper edge 1301a and the first lower edge 1301b. The first upper edge 1301a is provided on the first surface 1201a, and the first lower edge 1301b is provided on the first back surface 1201b. The opening diameter of the first upper edge 1301a is larger than the opening diameter of the first lower edge 1301b.

[0104] Therefore, the emission portion 122 of the frustum portion 102 is inserted from the first upper edge 1301a and protrudes from the first lower edge 1301b, and the frustum portion 102 is held in the first through hole 1301. Then, the frustum portion 102 held by the first holding plate 1201 is connected to the transmission portion 103 through the first through hole 1301.

[0105] The second holding plate 1202 has a plurality of second through holes 1302. The plurality of first through holes 1301 are provided at positions corresponding to insertion positions of the plurality of transmission parts 103 arranged in a matrix. The second through holes 1302 have a second upper end edge 1302a and a second lower end edge 1302b.

[0106] The second through hole 1302 is a hole that passes through the second upper edge 1302a and the second lower edge 1302b. The second upper edge 1302a is provided on the second surface 1202a, and the second lower edge 1302b is provided on the second back surface 1202b. The opening diameter of the second upper edge 1302a is the same as the opening diameter of the second lower edge 1302b.

[0107] Therefore, before connection with the frustum portion 102 and the detection processing unit 510, the transmission unit 103 may be inserted from the second upper edge 1302a and protrude from the second lower edge 1302b, or may be inserted from the second lower edge 1302b and protrude from the second upper edge 1302a.

[0108] In addition, before the connection with the frustum part 102 and after the connection with the detection processing part 510, the transmission part 103 is inserted from the second upper edge 1302a and protrudes from the second lower edge 1302b. In addition, before the connection with the detection processing part 510 and after the connection with the frustum part 102, the transmission part 103 is inserted from the second upper edge 1302a and protrudes from the second lower edge 1302b.

[0109] Furthermore, the first holding plate 1201 and the second holding plate 1202 are held inside a housing (not shown) of the detection device 1200 .

[0110] In the detection device 1200 , the light guide unit 101 is composed of the frustum unit 102 and the transmission unit 103 , but the light guide unit 101 may be composed of only the frustum unit 102 . In this case, the detection processing unit 510 is connected to the emission unit 122 .

[0111] Furthermore, the frustum portion 102 is configured such that the opening diameter of the incident port 121a is larger than the opening diameter of the emission portion 122, but the opening diameter of the incident port 121a may be the same as the opening diameter of the emission portion 122. Thus, the frustum portion 102 has a cylindrical shape.

[0112] As described above, according to Embodiment 5, the plurality of light guides 101 are held by at least one of the first holding plate 1201 and the second holding plate 1202, thereby improving the positioning accuracy of the plurality of light guides 101. This facilitates the manufacture of the detection device 1200.

[0113] [Implementation Method 6]

[0114] Next, Embodiment 6 will be described. In Embodiment 6, a method for manufacturing a light guide portion will be described. The same reference numerals are given to the same configurations as in Embodiments 1 to 5, and description thereof will be omitted.

[0115] Fig.16 16 is an explanatory diagram showing an example of a manufacturing system for a light guide component according to Embodiment 6. The manufacturing system 1600 includes a laser processing machine 1601, an XY stage 1602, and a control device 1603. Fig.16 In the diagram, the X-axis, Y-axis, and Z-axis are orthogonal to each other.

[0116] The laser processing machine 1601 irradiates laser light onto the processing object 1610. The laser processing machine 1601 irradiates laser light having a predetermined pulse width (for example, a femtosecond pulse) onto the processing object 1610 in the Z-axis direction to process the processing object 1610 into a desired shape, thereby forming a groove.

[0117] The XY stage 1602 is a positioning stage that can move along the X axis and the Y axis that is orthogonal to the X axis. On the XY stage 1602, the processing object 1610 is fixedly mounted on a mounting surface 1620. The mounting surface 1620 is parallel to a plane extending along the X axis and the Y axis.

[0118] The control device 1603 controls the irradiation time of the laser from the laser processing machine 1601 and the movement of the XY stage 1602. For example, the control device 1603 adjusts the depth of the groove formed in the Z-axis direction by increasing or decreasing the irradiation time of the laser from the laser processing machine 1601. In addition, for example, the control device 1603 can form a groove long in the Y direction on the processing object 1610 using the laser from the laser processing machine 1601 by moving the XY stage 1602 in the Y direction, and can adjust the width of the groove long in the Y direction using the laser from the laser processing machine 1601 by moving the XY stage 1602 in the X direction.

[0119] In addition, the size of the groove can be controlled by the power of the laser (irradiation diameter), the number of irradiation pulses (time), and the position movement of the XY stage 1602.

[0120] The irradiation duration and its changing timing achieved by the irradiation time control of the laser from the laser processing machine 1601 and the movement amount and its timing achieved by the movement control of the XY stage 1602 are preset in the control device 1603 .

[0121] The object 1610 to be processed is a workpiece made of metal, glass or ceramic. The shape of the object 1610 is, for example, a plate-shaped workpiece whose cross section in the YZ plane direction is a trapezoid. The inclined surface 1611 and the back surface 1612 of the object 1610 are irradiated with the laser from the laser processing machine 1601. For example, after the surface 1611 is irradiated, it is fixedly mounted by a person or a mechanism (not shown) in such a manner that the back surface 1612 faces the laser processing machine 1601.

[0122] The thickness of the processing object 1610 in the Z-axis direction varies depending on the position in the Y-axis direction. Therefore, the control device 1603 controls so that the output of the laser processing machine 1601 is higher for the portion of the processing object 1610 that is thicker in the Z-axis direction, and controls the movement of the XY stage 1602 so that the width of the groove in the X-axis direction becomes larger.

[0123] Fig.17 17 is a perspective view showing an example of a light guide member manufactured by the manufacturing system 1600. The light guide member 1700 is manufactured by processing a processing object 1610 by the manufacturing system 1600. That is, first grooves 1711 and 1712 are formed on the surface 1611 of the light guide member 1700, and second grooves 1721 to 1723 are formed on the back surface 1612.

[0124] The first grooves 1711, 1712 and the second grooves 1721 to 1723 are, for example, substantially trapezoidal in shape and are processed so as to become smaller as going from the front end surface 1701 to the rear end surface 1702. The first grooves 1711, 1712 and the second grooves 1721 to 1723 may be semicircular in shape.

[0125] Fig.18 1700 is an explanatory diagram showing an example of connection of the light guide member 1700. Fig.18 , a structure 1800 in which six light guide members 1700 are stacked in the Z-axis direction is shown. Specifically, for example, surfaces 1611 or back surfaces 1612 of two light guide members 1700 adjacent in the Z-axis direction are connected to each other, so that the six light guide members 1700 are stacked in the Z-axis direction.

[0126] By connecting the surfaces 1611 of two light guide members 1700 adjacent to each other in the Z-axis direction, the first grooves 1711 and 1712 of each light guide member 1700 are opposite to each other, forming the first through hole 1801. Similarly, by connecting the back surfaces 1612 of two light guide members 1700 adjacent to each other in the Z-axis direction, the second grooves 1721 to 1723 of each light guide member 1700 are opposite to each other, forming the second through hole 1802. The structure 1800 is a structure in which the first through hole 1801 and the second through hole 1802 are provided as the light guide portion 101 or the frustum portion 102.

[0127] Two adjacent light guide components 1700 are connected, for example, by screw fastening or crimping. In the case of screw fastening, threaded holes are formed through the six light guide components 1700. In addition, the shorter the pulse width of the laser, the more burrs generated on the surface 1611 and the back surface 1612 of the processing object 1610 can be suppressed during processing, and the gap between two adjacent light guide components 1700 can be suppressed.

[0128] In the structure 1800, the front end face 1701 of each light guide member 1700 is the incident face of light, and the rear end face 1702 of each light guide member 1700 is the exit face of light.

[0129] Light is incident from the openings of the first through hole 1801 and the second through hole 1802 formed on the incident surface 1701 , and is emitted from the openings of the first through hole 1801 and the second through hole 1802 formed on the emission surface 1702 .

[0130] The structure 1800 is suitable for the detection device 100 as a plurality of light guides 101 as shown in the above-mentioned embodiments 1 to 4. Specifically, for example, the emission surface 1702 of the structure 1800 is connected to the detection processing unit 510. More specifically, the openings of the first through hole 1801 and the second through hole 1802 on the emission surface 1702 side are respectively connected to the detection unit 110. Thus, it is possible to receive light after passing through the first through hole 1801 and the second through hole 1802.

[0131] In addition, the structure 1800 may be applied to the detection device 100 as a plurality of frustum portions 102 as shown in the above-mentioned embodiments 1 to 4. In this case, the openings of the first through hole 1801 and the second through hole 1802 on the side of the emission surface 1702 are respectively connected to one end 131 of the transmission portion 103, and the other end 132 of the transmission portion 103 is respectively connected to the detection portion 110. Thus, it is possible to receive light that has passed through the first through hole 1801, the second through hole 1802, and the transmission portion 103.

[0132] Fig.19 1 is an explanatory diagram showing an example of another processing object. The processing object 1910 is a rectangular parallelepiped, and its shape is different from that of the processing object 1610. The surface 1911 and the back surface 1912 of the processing object 1910 are irradiated surfaces of the laser from the laser processing machine 1601. For example, after the surface 1911 is irradiated, it is fixedly mounted by a person or a mechanism (not shown) in a manner such that the back surface 1912 faces the laser processing machine 1601.

[0133] Fig. 20 16 and 17 are front views and top views showing other examples of light guide components manufactured by the manufacturing system 1600 . Fig.21 16 and 17 , which are front and bottom views showing another example of a light guide component manufactured by the manufacturing system 1600 .

[0134] The light guide member 2000 is manufactured by processing the object 1910 by the manufacturing system 1600. That is, the first grooves 2011 to 2013 are formed on the front surface 1911 of the light guide member 1900, and the second grooves 2021 to 2023 are formed on the back surface 1912.

[0135] The first grooves 2011 to 2013 and the second grooves 2021 to 2023 are, for example, substantially trapezoidal in shape, and are processed so that the shapes thereof become smaller as they go from the front end surface 2001 to the rear end surface 2002 .

[0136] The light guide member 2000 has U-shaped fitting grooves 2031 and 2032 formed on both sides of the surface 1911 along the Y axis. The light guide member 2000 has U-shaped fitting protrusions 2041 and 2042 formed on both sides of the back surface 1912 along the Y axis.

[0137] Fig. 22 2 is an explanatory diagram showing an example of connection of the light guide member 2000. Fig. 22 , a structure 2200 in which six light guide members 2000 are stacked in the Z-axis direction is shown. Specifically, for example, by connecting the surfaces 1911 and the back surfaces 1912 of two light guide members 2000 adjacent in the Z-axis direction, the six light guide members 2000 are stacked in the Z-axis direction. The structure 2200 is a structure in which the through hole 2201 is set as the light guide portion 101 or the frustum portion 102.

[0138] By connecting the surface 1911 and the back surface 1912 of two light guide components 2000 adjacent in the Z-axis direction, the first grooves 2011 to 2013 of each light guide component 2000 are opposite to the second grooves 2021 to 2023, thereby forming a through hole 2201. In addition, at this time, the engaging protrusions 2041 and 2042 provided on the back surface 1912 of the upper light guide component 2000 of the two adjacent light guide components 2000 in the Z-axis direction are engaged with the engaging grooves 2031 and 2032 provided on the surface 1911 of the lower light guide component 2000. As a result, the displacement of the light guide component 2000 in the X-axis direction and the Y-axis direction is restricted, and the positioning accuracy of the through hole 2201 is improved.

[0139] Two adjacent light guide components 2000 are connected, for example, by screw fastening or crimping. In the case of screw fastening, threaded holes are formed through the six light guide components 2000. In addition, the shorter the pulse width of the laser, the more burrs generated on the surface 1911 and the back surface 1912 of the processing object 1910 can be suppressed during processing, and the gap between two adjacent light guide components 2000 can be suppressed.

[0140] In the structure 2200, the front end face 2001 of each light guide member 2000 becomes the light incident face, and the rear end face 2002 of each light guide member 2000 becomes the light exit face.

[0141] Light is incident from the opening of the through hole 2201 formed on the incident surface 2001 , and is emitted from the opening of the through hole 2201 formed on the emission surface 2002 .

[0142] The structure 2200 is applicable to the detection device 100 as a plurality of light guides 101 as shown in the above-mentioned embodiments 1 to 4. Specifically, for example, the emission surface 2202 of the structure 2200 is connected to the detection processing unit 510. More specifically, the openings of the through holes 2201 on the emission surface 2202 side are respectively connected to the detection unit 110. Thus, it is possible to receive light passing through the through holes 2201.

[0143] [Implementation method 7]

[0144] Next, Embodiment 7 is described. Embodiment 7 shows a method for manufacturing a light guide by laminating plate-like members each having a plurality of through holes in the plate thickness direction. The same reference numerals are used for the same structures as Embodiments 1 to 4, and description thereof is omitted.

[0145] Fig.23 This is a perspective view showing an example of a structure 2300 according to the seventh embodiment. Fig.24 This is a first cross-sectional view of the structure 2300 according to the seventh embodiment. Fig.24 The cross-sectional view shown in Fig.23 A cross section when the structure 2300 is cut at the cross section 2340. Fig.25 This is a second cross-sectional view of the structure 2300 according to the seventh embodiment. Fig.25 The cross-sectional view shown in Fig.23 A cross section when the structure 2300 is cut at the cross section 2350.

[0146] The structure 2300 is produced by laminating the first plate-shaped member 2301 and the second plate-shaped member 2302. The lamination direction of the first plate-shaped member 2301 and the second plate-shaped member 2302 is defined as z. Two axes orthogonal to z are defined as x and y. x and y are defined as being orthogonal to each other.

[0147] exist Figure 23 to Figure 25 In the example, the first plate-like member 2301 is seven pieces, but it is not limited to seven pieces. The second plate-like member 2302 is six pieces, but it is not limited to six pieces. In addition, the thickness of the first plate-like member 2301 is arbitrary, and the thickness may be different in different first plate-like members 2301. Similarly, the thickness of the second plate-like member 2302 is arbitrary, and the thickness may be different in different second plate-like members 2302. In addition, the thickness of the first plate-like member 2301 and the thickness of the second plate-like member 2302 may be different.

[0148] First, the first plate-like member 2301 is described. Each of the first plate-like members 2301 has a plurality of first through holes 2311 penetrating substantially in the z direction. In addition, each of the first plate-like members 2301 has third through holes 2313 for positioning penetrating in the z direction at its four corners. In each of the first plate-like members 2301, 81 first through holes 2311 are provided in a matrix. In addition, the number of the first through holes 2311 is not limited to 81, but the number of the first through holes 2311 is the same in the plurality of first plate-like members 2301.

[0149] The opening diameter of the first through hole 2311 is larger for the first plate-shaped member 2301 arranged upward in the z direction, and smaller for the first plate-shaped member 2301 arranged downward. In addition, as the opening diameter decreases, the interval between adjacent first through holes 2311 also becomes narrower.

[0150] The bottom surface 2412 of the first plate-like member 2301 adjacent to one another in the z direction contacts the top surface 2411 of the first plate-like member 2301 disposed below the first plate-like member 2301. Thus, the first through hole 2311 of the first plate-like member 2301 of the first one is connected to the first through hole 2311 of the first plate-like member 2301 of the other one. Thus, the first light guide 2331 is formed. The first light guide 2331 is formed with the same number (81 in this example) as the number of first through holes 2311 provided in one first plate-like member 2301.

[0151] like Fig.23 and Fig.24 As shown, the first light guide 2331 is formed from the uppermost first plate-shaped member 2301 in the z direction to the center of the lowermost first plate-shaped member 2301. In addition, the first plate-shaped member 2301 is formed so that the opening diameter thereof becomes smaller as it approaches the center of the lowermost first plate-shaped member 2301 from the uppermost first plate-shaped member 2301 in the z direction.

[0152] Therefore, the first light guiding path 2331 has a structure similar to the space inside the frustum portion 102 shown in the first to fourth embodiments.

[0153] In addition, the third through hole 2313 is provided with the same opening diameter and the same position in the first plate-shaped member 2301. A thread groove is formed on the inner peripheral surface of the third through hole 2313. By stacking the first plate-shaped member 2301 in the z direction, a plurality of third through holes 2313 in the z direction are connected, thereby forming the first threaded hole 2501.

[0154] Next, the second plate-like member 2302 is described. Each of the second plate-like members 2302 has a plurality of second through holes 2322 penetrating in the z direction. In addition, each of the second plate-like members 2302 has a fourth through hole 2324 for positioning penetrating in the z direction at its four corners. In each of the second plate-like members 2302, 81 second through holes 2322 are provided in a matrix. In addition, the number of the second through holes 2322 is not limited to 81, but the number of the second through holes 2322 is the same in the plurality of second plate-like members 2302.

[0155] The second through holes 2322 are provided in the same opening diameter and the same position in the plurality of second plate-like members 2302. The bottom surface 2422 of the second plate-like member 2302 adjacent to one another in the z direction contacts the upper surface 2421 of the second plate-like member 2302 disposed below the second plate-like member 2302. Thus, the second through holes 2322 of the second plate-like member 2302 of the one side are connected to the second through holes 2322 of the second plate-like member 2302 of the other side in the z direction. Thus, the second light guide 2332 is formed. The second light guide 2332 is formed with the same number (81 in this example) as the number of the second through holes 2322 provided in one second plate-like member 2302.

[0156] In this manner, the second light guiding path 2332 has a structure similar to the cylindrical space inside the transmission unit 103 described in the first to fourth embodiments.

[0157] In addition, the fourth through hole 2324 is provided in the second plate-like member 2302 with the same opening diameter and the same position. The fourth through hole 2324 has the same shape and the same size as the third through hole 2313, and is provided at the four corners of the second plate-like member 2302, similarly to the third through hole 2313. A thread groove is formed on the inner circumferential surface of the fourth through hole 2324. By stacking the second plate-like member 2302 in the z direction, a plurality of fourth through holes 2324 in the z direction are connected, thereby forming the second threaded hole 2502.

[0158] Next, the boundary between the first plate-shaped member 2301 and the second plate-shaped member 2302 will be described. The first plate-shaped member 2301 at the bottom layer among the plurality of first plate-shaped members 2301 is connected to the second plate-shaped member 2302 at the top layer among the plurality of second plate-shaped members 2302. Specifically, for example, the bottom surface 2412 of the first plate-shaped member 2301 at the bottom layer is in contact with the upper surface 2421 of the second plate-shaped member 2302 at the top layer.

[0159] In addition, the opening diameter of the bottom surface 2412 side of the first through hole 2311 of the first plate-like member 2301 of the lowest layer is the same as the opening diameter of the second through hole 2322. The first through hole 2311 of the first plate-like member 2301 of the lowest layer is provided at a position that is connected to the second through hole 2322 when the second plate-like member 2302 of the highest layer is in contact with the first plate-like member 2301 of the lowest layer. Therefore, by stacking a plurality of first plate-like members 2301 and a plurality of second plate-like members 2302, the first light guide 2331 is connected to the second light guide 2332. Thus, the through hole 2330 is formed.

[0160] In addition, the third through hole 2313 of the first plate-like member 2301 of the lowest layer is provided at a position that is connected to the fourth through hole 2324 when the second plate-like member 2302 of the highest layer is in contact with the first plate-like member 2301 of the lowest layer. Therefore, by stacking a plurality of first plate-like members 2301 and a plurality of second plate-like members 2302, the first threaded hole 2501 is connected to the second threaded hole 2502. Thus, the fourth through hole 2314 is formed. Furthermore, by screwing screws (not shown) into the four fourth through holes 2314, the plurality of first plate-like members 2301 and the plurality of second plate-like members 2302 are fixed.

[0161] In addition, in addition to the connection based on screws, the structure 2300 can also be made by crimping between the first plate-like members 2301 adjacent in the z direction, between the second plate-like members 2302 adjacent in the z direction, and between the first plate-like members 2301 and the second plate-like members 2302 adjacent in the z direction.

[0162] The first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600 of Embodiment 6 and irradiated with laser light from the laser processing machine 1601, thereby forming the first through hole 2311 and the third through hole 2313. In this case, the XY stage 1602 may be tilted from the Z-axis direction so that the first plate-shaped member 2301 is tilted relative to the Z-axis direction, and / or the irradiation direction of the laser light from the laser processing machine 1601 may be tilted from the Z-axis direction.

[0163] Furthermore, the second plate-shaped member 2302 is placed on the XY stage 1602 of the manufacturing system 1600 and irradiated with laser light from the laser processing machine 1601 , thereby forming the second through-hole 2322 and the fourth through-hole 2324 .

[0164] The structure 2300 is applicable to the detection device 100 as a plurality of light guides 101 as shown in the above-mentioned embodiments 1 to 4. Specifically, for example, the bottom surface 2422 of the second plate-shaped member 2302 of the lowest layer of the structure 2300 is connected to the detection processing unit 510. More specifically, the openings of the second through holes 2322 on the bottom surface 2422 side of the second plate-shaped member 2302 of the lowest layer are respectively connected to the detection unit 110. Thus, it is possible to receive light after passing through the first light guide 2331 and the second light guide 2332.

[0165] In addition, the structure 2300 may be composed of a plurality of first plate-like members 2301 instead of a plurality of second plate-like members 2302. In this case, the bottom surface 2412 of the first plate-like member 2301 of the lowest layer of the structure 2300 is connected to the detection processing unit 510. More specifically, the openings of the first through holes 2321 on the bottom surface 2412 side of the first plate-like member 2301 of the lowest layer are respectively connected to the detection unit 110. Thus, the light passing through the first light guide 2331 can be received.

[0166] In the structure 2300 , the first light guide 2331 is configured to be inclined toward the center as it is located outside, but the inner peripheral surface of the first light guide 2331 may be parallel to the z-axis.

[0167] Fig.26 This is another first cross-sectional view of the structure 2300 according to the seventh embodiment. Fig.26 The cross-sectional view shown in Fig.23 The cross section of the structure 2300 is shown in FIG. Fig.26 In Fig.24 The explanation will focus on the differences.

[0168] First, the first plate-shaped member 2301 is described. Each of the first plate-shaped members 2301 has a plurality of first through holes 2611 penetrating substantially in the z direction. In each of the first plate-shaped members 2301, 81 first through holes 2611 are provided in a matrix. In addition, the number of the first through holes 2611 is not limited to 81, but the number of the first through holes 2611 is the same in the plurality of first plate-shaped members 2301.

[0169] The first through hole 2311 has a larger opening diameter for the first plate-shaped member 2301 disposed more upward in the z direction, and the first through hole 2311 has a smaller opening diameter for the first plate-shaped member 2301 disposed more downward in the z direction. Fig.23 and Fig.24 In contrast, in each of the first plate-shaped members 2301 , the opening diameter of the central first through-hole 2611 is larger than those of the other first through-holes 2611 .

[0170] Here, the first light guide paths 2631 formed by the first through holes 2611 at the centers of the plurality of first plate-shaped members 2301 are referred to as first light guide paths 2631A, and the other first light guide paths 2631 are referred to as first light guide paths 2631B.

[0171] In the first cross section of the first light guiding channel 2631A, generatrixes on both sides of the inner peripheral surface of the first through hole 2611 in the y direction are in a step shape.

[0172] In the first cross section, the generatrix of the first light guide 2631B on the inner circumferential surface of the first through hole 2611 away from the first light guide 2631A is stepped like the first light guide 2631A. In contrast, the generatrix of the inner circumferential surface of the first through hole 2611 on the inner circumferential surface close to the first light guide 2631A is a straight line.

[0173] Since the first light guiding paths 2631A and 2631B are provided with a step difference in this manner, the first light guiding paths 2631A and 2631B have the same function as the light receiving prevention member 402 in Embodiment 1. Therefore, incident light can be reflected as in the light receiving prevention member 402 .

[0174] The first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600 of the sixth embodiment and irradiated with laser light from the laser processing machine 1601, thereby forming the first through hole 2611 and the third through hole 2313. Similarly, the second plate-shaped member 2302 is placed on the XY stage 1602 of the manufacturing system 1600 and irradiated with laser light from the laser processing machine 1601, thereby forming the second through hole 2622 and the fourth through hole 2324.

[0175] Thus, the first through hole 2611 penetrates in a direction (z direction) perpendicular to the upper surface 2411 of the first plate-shaped member 2301. Therefore, in the manufacturing system 1600, the laser from the laser processing machine 1601 can be irradiated perpendicularly to the upper surface 2411, so that processing control in the manufacturing system 1600 is easy.

[0176] In addition to the laser processing, the first plate-shaped member 2301 may be drilled to form the first through hole 2611 and the third through hole 2313. Similarly, the second plate-shaped member 2302 may be drilled to form the second through hole 2612 and the fourth through hole 2314.

[0177] In addition, the present embodiment is not limited to the above contents, and they may be arbitrarily combined. In addition, other modes that can be imagined within the technical concept of the present embodiment are also included in the scope of the present embodiment.

[0178] Description of Reference Numerals

[0179] 100: detection device, 101: light guiding part, 102: frustum part, 103: transmission part, 110: detection part, 112: light receiving surface, 121: incident part, 121a: incident port, 123: through hole, 132a: exit port, 133: transmission path, 401: inner peripheral surface, 402: light-receiving prevention member, 500: detection device, 510: detection part.

Claims

1. A detection device, wherein: have: A light guide having a light entrance port and an exit port having an opening smaller than the entrance port, so that light incident from the entrance port is emitted from the exit port; and A detection unit detects the light emitted from the emission port.

2. The detection device according to claim 1, wherein: The light guide portion has a frustum-shaped through hole, the through hole having the incident port and the emission port, and the light guide portion allows light incident from the incident port to be emitted from the emission port via the through hole.

3. The detection device according to claim 1, wherein: The end edge of the incident port includes: an incident end portion located at a first distance from the center of the incident port; and other incident ends other than the incident end portion located at the first distance from the center of the incident port, The end edge of the exit port has: an exit end portion located at a second distance shorter than the first distance from the center of the exit port; and other exit ends other than the exit end portion located at the second distance from the center of the exit port.

4. The detection device according to claim 3, wherein: The shape of the incident port and the exit port is a circle.

5. The detection device according to claim 1, wherein: The end edge of the incident port includes: an incident end portion located at a third distance from the center of the incident port; and other incident ends other than the incident end portion located at a fourth distance from the center of the incident port that is shorter than the third distance, The end edge of the exit port has: an exit end portion located at a fifth distance shorter than the third distance from the center of the exit port; and other exit ends other than the exit end portion located at a sixth distance shorter than the fifth distance from the center of the exit port.

6. The detection device according to claim 5, wherein: The shapes of the incident port and the emission port are polygonal.

7. The detection device according to claim 6, wherein: The polygon is a hexagon.

8. The detection device according to claim 1, wherein: The inner peripheral surface of the light guide portion is a reflection surface that reflects light.

9. The detection device according to claim 1, wherein: The inner peripheral surface of the light guide portion has a member for reflecting light in the direction of the incident port.

10. The detection device according to claim 9, wherein: The detection unit is disposed at the emission port.

11. The detection device according to claim 1, wherein: The incident port has a member for focusing light toward the emission port.

12. The detection device according to claim 1, wherein: The light guiding portion includes a transmission portion that transmits light.

13. The detection device according to claim 12, wherein: The transmission portion has one end into which the light from the incident port is incident and the other end from which the light incident on the one end is emitted.

14. The detection device according to claim 13, wherein: The size of the opening at the one end of the transmission portion is substantially equal to the size of the opening at the other end.

15. The detection device according to claim 1, wherein: The detection unit is made of InGaAs.

16. The detection device according to claim 1, wherein: The incident ports of the plurality of light guide units are respectively arranged to be separated from each other.

17. The detection device according to claim 15, wherein: The plurality of light guide portions are arranged radially from the emission port toward the incidence port.

18. The detection device according to claim 16, wherein: The detection unit includes a photodiode, The photodiodes are arranged in two dimensions.

19. The detection device according to claim 16, wherein: The light guide portion includes a transmission portion, the transmission portion including one end for light from the incident port to be incident and another end for light incident on the one end to be emitted. A light guide portion located outside the light guide portion located at the center of the detection portion among the plurality of light guide portions has a shorter length of a transmission portion that transmits light from one end to the other end between the incident port and the emission port than the light guide portion located at the center of the detection portion.

20. The detection device according to claim 17, wherein: The light guide portion includes a transmission portion, the transmission portion including one end for light from the incident port to be incident and another end for light incident on the one end to be emitted. Among the plurality of light guide portions, a light guide portion located outside the light guide portion located at the center of the detection portion does not include the transmission portion.

21. The detection device according to claim 16, wherein: The plurality of light guide portions are arranged in a substantially hemispherical shape.

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