Gas shower head and vapor deposition apparatus

Abstract

The application provides a gas shower head and a vapor deposition device, the gas shower head comprising: a gas distribution plate and a cooling plate below the gas distribution plate; a plurality of gas transmission channels are arranged in the gas distribution plate and the cooling plate; a plurality of mounting grooves, each of which comprises a first groove arranged on the gas distribution plate and / or a second groove arranged on the cooling plate; the mounting grooves are located between two adjacent gas transmission channels conveying different reaction gases; a plurality of airtight components are respectively embedded in each of the mounting grooves, each of the airtight components comprising: an airtight body and a plurality of protruding parts arranged on the airtight body; the protruding parts are in elastic contact with the gas distribution plate or the cooling plate at all times, and prevent different reaction gases in adjacent gas transmission channels from flowing through the gap between the gas distribution plate and the cooling plate.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment, and more particularly to a gas spray head and a vapor deposition apparatus. Background Technology

[0002] In the semiconductor manufacturing field, vapor deposition (CVD) equipment is one of the most important vacuum processing devices. It generates plasma through radio frequency coupled discharge (RF-Coupled Discharge), and then uses the plasma for deposition, etching, sputtering, and other processing techniques. Generally, a CVD equipment is equipped with an upper electrode and a lower electrode positioned opposite it. A gas spray head can serve as the upper electrode, and the lower electrode holds the substrate to be processed. A source RF power supply is connected to either the upper or lower electrode, and a bias RF power supply is connected to the lower electrode. The gas spray head is connected to an external reactive gas source via a gas supply pipe, uniformly spraying reactive gas into the reaction area below. The reactive gas is dissociated by high-frequency RF power to generate plasma, thereby enabling the processing of the substrate.

[0003] like Figure 1 As shown, in the prior art, the gas spray head 110 includes a gas distribution plate 111 and a cooling plate 112, the edges of which are mechanically fixed. During processing, the cooling plate 112 deforms due to heat conduction from the substrate tray below, creating gaps between the gas distribution plate 111 and the cooling plate 112. This causes the reactive gas to flow along these gaps during transport, resulting in lateral cross-flow of the reactive gas, ultimately affecting the uniformity of the substrate and reducing processing efficiency. Therefore, there is an urgent need for a gas spray head that can prevent the lateral flow of reactive gas between the gas distribution plate 111 and the cooling plate 112 to improve the uniformity of reactive gas transport. Summary of the Invention

[0004] The purpose of this invention is to provide a gas spray head and a vapor deposition device to block the lateral flow of reactive gas in the gas spray head.

[0005] To achieve the above objectives, the present invention provides a gas spray head for conveying multiple reactive gases into a vapor deposition apparatus, comprising:

[0006] Gas distribution plate;

[0007] A cooling plate is located below the gas distribution plate and is detachably connected to the gas distribution plate; the gas distribution plate and the cooling plate are provided with a plurality of gas transmission channels;

[0008] A plurality of mounting slots, each mounting slot including a first groove disposed on the gas distribution plate and / or a second groove disposed on the cooling plate; the mounting slots are located between two adjacent gas transmission channels that transport different reactive gases;

[0009] Several airtight components are respectively embedded in each of the mounting slots. Each airtight component includes: an airtight body and several protrusions on the airtight body; the protrusions always maintain elastic contact with the gas distribution plate or cooling plate to prevent different reactive gases in adjacent gas transmission channels from flowing between the gas distribution plate and the cooling plate.

[0010] Optionally, the airtight component body is provided with at least one deformation groove; the vertical projection of at least one protrusion on the plane where the sidewall of the deformation groove is located is located in the sidewall area, and the deformation groove is used to provide space for the airtight component body to deform when the protrusion is squeezed.

[0011] Optionally, the protrusion is disposed on the surface of the airtight component body; and at least one protrusion is disposed between the airtight component body and the gas distribution plate, and at least one protrusion is disposed between the airtight component body and the cooling plate.

[0012] Optionally, when the mounting groove includes a first groove and a second groove, the airtight component body includes an upper part and a lower part, the upper part is embedded in the first groove of the gas distribution plate, the lower part is embedded in the second groove of the cooling plate, and the depth of the lower part embedded in the second groove is greater than the depth of the upper part embedded in the first groove.

[0013] Optionally, the protrusion is separately disposed from the airtight component body, and the protrusion is disposed between the airtight component body and the gas distribution plate or cooling plate. The airtight component body presses the protrusion so that it forms elastic contact with the gas distribution plate and the cooling plate respectively.

[0014] Optionally, the separate protrusions may include a sealing ring and / or a sealing strip.

[0015] Optionally, the airtight component body is provided with a receiving groove for installing the sealing ring and for providing deformation space for the sealing ring.

[0016] Optionally, the sealing strip has a U-shaped cross-section, and its opening groove provides deformation space for the sealing strip.

[0017] Optionally, the airtight component body is integrally formed with the gas distribution plate, and the airtight component body is embedded in the second groove of the cooling plate.

[0018] Optionally, the airtight component body is integrally formed with the cooling plate, and the airtight component body is embedded in the first groove of the gas distribution plate.

[0019] Optionally, the sidewall of the airtight component body is a non-vertical surface.

[0020] Optionally, the non-vertical surface may be composed of one or more of the following: inclined surface, stepped surface, and curved surface.

[0021] Optionally, the airtight component body is made of polytetrafluoroethylene or stainless steel.

[0022] Optionally, the protrusion is made of polytetrafluoroethylene or rubber.

[0023] Optionally, each of the gas transmission channels includes a first gas through hole disposed on a gas distribution plate and a second gas through hole disposed on a cooling plate, wherein the first gas through hole and the second gas through hole are aligned.

[0024] Furthermore, the present invention also provides a vapor deposition apparatus, comprising: a reaction chamber; a gas spray head disposed on the upper part of the reaction chamber as described in any of the preceding claims; a base disposed on the lower part of the reaction chamber, opposite to the gas spray head, for supporting the substrate to be processed; a plurality of gas sources connected to the gas spray head for supplying a plurality of reaction gases into the reaction chamber; and a heating device located below the base for bringing the process reaction to the required temperature.

[0025] In summary, compared with the prior art, the gas spray head and vapor deposition apparatus provided by the present invention have the following beneficial effects: by setting several protrusions on the surface of the airtight component body, the protrusions are compressed and always maintain elastic contact with the gas distribution plate or cooling plate, blocking the path of the reactant gas flowing laterally along the gap; in addition, by setting the side wall of the airtight component body as a non-vertical surface, the gas flow path is increased. Since the flow path is non-linear, the gas flow resistance also increases, thereby weakening the lateral flow of the gas and ensuring the stability of the reactant gas process parameters.

[0026] Furthermore, by providing a deformation groove on the airtight component body, and with the protrusion positioned opposite to the sidewall of the deformation groove, the deformation groove provides the deformation space required by the airtight component body when the protrusion is compressed. On the other hand, even if the cooling plate or gas distribution plate deforms during the process, increasing the gap between the gas distribution plate and the cooling plate, the deformation groove can provide an elastic force towards the cooling plate or gas distribution plate, ensuring that the protrusion always maintains elastic contact with the gas distribution plate and the cooling plate, preventing lateral gas flow between different gas transmission channels, and achieving the purpose of preventing lateral gas leakage. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a vapor deposition apparatus in the prior art.

[0028] Figure 2 for Figure 1 A magnified view of a portion of the gas spray head in the reaction chamber;

[0029] Figure 3 This is a partially enlarged side view of the gas spray head according to the first embodiment of the present invention;

[0030] Figure 4 This is a partially enlarged side view of the gas spray head according to the second embodiment of the present invention;

[0031] Figure 5 This is a partially enlarged side view of a gas spray head according to a third embodiment of the present invention;

[0032] Figure 6 This is a partially enlarged side view of another gas spray head according to the third embodiment of the present invention;

[0033] Figure 7 This is a partially enlarged side view of another gas spray head according to the second embodiment of the present invention;

[0034] Figure 8 This is a partially enlarged side view of another gas spray head according to the first embodiment of the present invention;

[0035] Figure 9 This is a partially enlarged side view of a gas spray head according to the fourth embodiment of the present invention;

[0036] Figure 10 This is a partially enlarged side view of another gas spray head according to the fourth embodiment of the present invention;

[0037] Figure 11 This is a partially enlarged side view of a gas spray head according to the fifth embodiment of the present invention;

[0038] Figure 12 This is a partially enlarged side view of another gas spray head according to the fifth embodiment of the present invention;

[0039] Figure 13 This is a top view schematic diagram of a gas spray head according to an embodiment of the present invention;

[0040] Figure 14 This is a top view schematic diagram of a gas spray head according to another embodiment of the present invention. Detailed Implementation

[0041] The following will be combined with the embodiments of the present invention. Figures 1 to 14 The technical solutions, structural features, objectives and effects achieved in the embodiments of the present invention will be described in detail.

[0042] It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions. They are only used to facilitate and clarify the purpose of illustrating the embodiments of the present invention, and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationship, or adjustments to the size should still fall within the scope of the technical content disclosed in the present invention, provided that they do not affect the effects and objectives that the present invention can produce.

[0043] It should be noted that, in this invention, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only the expressly listed elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0044] Figure 1 This is a schematic diagram of a prior art vapor deposition apparatus performing a deposition process, including a reaction chamber 100, a gas spray head 110 disposed at the upper part of the reaction chamber 100, and a rotatable base 120 disposed below the gas spray head 110, the base 120 being opposite to the gas spray head 110, and a substrate W placed on the base 120. Figure 1 Multiple substrates W are mounted on a base 120. Several heating devices 130 are located below the base 120 to heat the substrates W, bringing them to the reaction temperature. A gas spray head 110 is connected to an external reaction gas source via a gas supply pipe to deliver various reaction gases to the substrates for deposition. Typically, the gas spray head 110 includes a gas distribution plate 111 and a cooling plate 112. During the deposition reaction, heat from the base 120 radiates upwards to the cooling plate 112, causing it to expand. Because the edges of the cooling plate 112 and the gas distribution plate 111 are fixed, the cooling plate 112 forms a slight downward arch during expansion, creating a gap between the cooling plate 112 and the gas distribution plate 111.

[0045] Specifically, such as Figure 2 As shown, Figure 2This is a partially enlarged view of the gas spray head after thermal expansion. The gas spray head 110 has several gas transmission channels 113. Each gas transmission channel 113 includes a first gas through-hole 1131 on a gas distribution plate 111 and a second gas through-hole 1132 on a cooling plate 112. The first gas through-hole 1131 and the second gas through-hole 1132 are aligned to form a connected gas transmission channel 113. To ensure uniform reaction on the substrate below the gas spray head 110, multiple gas transmission channels 113 for introducing the same gas are arranged at intervals without being adjacent, while gas transmission channels 113 for conveying different reactive gases are arranged adjacently. When a reactive gas flows downward through one of the first gas through-holes 1131 to the junction of the cooling plate 112 and the gas distribution plate 111, due to the gap between the cooling plate 112 and the gas distribution plate 111, the reactive gas will flow laterally along the gap into the adjacent gas transmission channel 113.

[0046] In the prior art, a baffle 114 is installed between two adjacent gas transmission channels 113 to block the path of the reactant gas flowing laterally along the gap. However, as the usage time of the gas spray head 110 increases, the deformation of the cooling plate 112 increases, causing the gap between the baffle 114 and the gas distribution plate 111 to widen. The reactant gas then flows through this gap (e.g., ...). Figure 2 As indicated by the arrow in the diagram, lateral gas flow will still occur. On one hand, the reactive gas will react with other types of reactive gases transported by the adjacent gas transport channel 113, depositing polymers in the gap. The polymers will adhere to the sidewalls of the gas transport channel 113, affecting the gas flow rate. At the same time, the polymers may also follow the flow of the reactive gas from the gas transport channel 113 into the reaction chamber 100, falling onto the substrate W and causing contamination. On the other hand, after the reactive gas diffuses in the gap, the gas flow from the second gas through-hole 1132 will differ from the gas flow rate set by the process conditions, which will negatively affect the deposition rate and uniformity of the substrate, leading to fluctuations in process parameters and deposition effect.

[0047] like Figure 3The diagram shown is a partially enlarged side view of a gas spray head according to a first embodiment of the present invention. It includes a gas distribution plate 211. Reactive gases are transported to the gas distribution plate 211 via a gas supply pipe for initial diffusion, maintaining a relatively uniform gas flow rate as they are transported into multiple gas transmission channels 213. Each gas transmission channel 213 includes a first gas through-hole 2131 on the gas distribution plate 211 and a second gas through-hole 2132 on a cooling plate 212. The first gas through-hole 2131 and the second gas through-hole 2132 are aligned to form a connected gas transmission channel 213. Two adjacent rows of gas transmission channels 213 on the gas distribution plate 211 are used to transport different reactive gases. A cooling plate 212 is disposed below the gas distribution plate 211 to control the temperature of the gas spray head, maintaining a low temperature to prevent the reactive gases from decomposing before reaching the substrate surface. In some embodiments, the cooling plate 112 has several fluid channels into which a cooling medium is introduced for circulating cooling of the gas spray head. The cooling plate 212 and the gas distribution plate 211 are assembled together by a detachable mechanical method, facilitating individual replacement or repair. At least one mounting groove 214 is provided between two adjacent gas transmission channels 213 that transport different reactive gases. Each mounting groove 214 is embedded with an airtight component 215, which includes an airtight body 2151 and several protrusions 216 disposed on the airtight body 2151.

[0048] Specifically, in Figure 3 In the first embodiment, there is one mounting groove 214 between the gas transmission channels 213 that transport different reactive gases. The mounting groove 214 includes a first groove 2141 disposed on the gas distribution plate 211 and a second groove 2142 disposed on the cooling plate 212. Further, the airtight body 2151 includes an upper part and a lower part. The upper part is embedded in the first groove 2141 and has two first protrusions 2161 on its surface. The lower part is embedded in the second groove 2142 and has two second protrusions 2162 on its surface. The first protrusions 2161 are deformed by the pressure of the gas distribution plate 211 and always maintain elastic contact with the gas distribution plate 211. The second protrusions 2162 are deformed by the pressure of the gas distribution plate 212 and always maintain elastic contact with the cooling plate 212. This blocks the lateral gas transmission path between adjacent gas transmission channels and effectively prevents different reactive gases in adjacent gas transmission channels 213 from flowing between the gas distribution plate 211 and the cooling plate 212. It should be noted that, Figure 3 The adjacent columns of gas transmission channels 213 shown are not limited to linear columns. For ease of description, each ring with other annular spacing is also included in the column description. Figure 3 The two pairs of protrusions shown are respectively disposed on the left and right sides of the airtight component body 2151. In other embodiments, they may also be disposed on the upper and lower sides of the airtight component body 2151. Furthermore, the number of protrusions is not limited to two pairs; for example, multiple pairs may be disposed on the upper and lower, left and right sides of the airtight component body 2151 respectively.

[0049] The airtight component body 2151 can block the lateral flow of a single reactive gas to adjacent gas transmission channels when the cooling plate 212 is heated and arches downward to widen the gap between it and the gas distribution plate 211. At the same time, the protrusions 216 provided on the airtight component body 2151 can further block the transmission path of different reactive gases along the gap. The protrusions 216 are deformed by the pressure of the corresponding cooling plate 212 and gas distribution plate 211, so that the protrusions 216 and the corresponding cooling plate 212 or gas distribution plate 211 always maintain elastic contact, thereby blocking the gap between the airtight component body 2151 and the gas distribution plate 211 or between the airtight component body 2151 and the cooling plate 212. When the gap between the airtight component body 2151 and the cooling plate 212 or the gas distribution plate 211 increases, the deformation of the corresponding protrusion 216 decreases due to the reduced extrusion pressure, thus ensuring that the protrusion 216 always maintains elastic contact with the corresponding cooling plate 212 or the gas distribution plate 211, thereby preventing different reactive gases from flowing through the gap between the airtight component body 2151 and the cooling plate 212 or the gas distribution plate 211.

[0050] Furthermore, in a preferred embodiment, because the cooling plate 212 experiences greater heat radiation and thus undergoes greater deformation, the lower part of the airtight component body 2151 is embedded deeper into the second groove 2142 than the upper part of the airtight component body 2151 is embedded deeper into the first groove 2141. When the cooling plate 212 deforms downwards and arches due to heat, the lower part of the airtight component body 2151 extends deeper into the second groove 2142, thus maintaining its position within the second groove 2142 and effectively blocking the lateral transport path of the reactant gas.

[0051] In the second embodiment, the mounting groove disposed between two adjacent gas transmission channels 213 conveying different reactive gases is located on the gas distribution plate 211 or the cooling plate 212. Specifically, as shown... Figure 4As shown, when the mounting groove is set on the gas distribution plate 211, that is, the gas distribution plate 211 is provided with a first groove 2141, and the airtight component body 2151 is embedded in the first groove 2141. At least one protrusion 216 (two in this embodiment) is provided on the surface of the airtight component body 2151 opposite to the cooling plate 212. At least one protrusion 216 (two in this embodiment) is also provided on the surface of the airtight component body 2151 opposite to the side wall of the first groove 2141. The sidewall of the first groove 2141 and the cooling plate 212 respectively squeeze the corresponding protrusions 216 to deform them. When the gap between the airtight body 2151 and the cooling plate 212 or the sidewall of the first groove 2141 becomes larger, the deformation of the protrusions 216 that are opposite to the sidewall of the cooling plate 212 or the sidewall of the first groove 2141 becomes smaller, so that these protrusions 216 always maintain elastic contact with the sidewall of the cooling plate 212 or the sidewall of the first groove 2141, blocking the path of the reactant gas to be transmitted laterally along the gap. Similarly, when the mounting groove is placed on the cooling plate 212, that is, when the cooling plate 212 is provided with a second groove 2142, the airtight component body 2151 is embedded in the second groove 2142. At least one protrusion 216 (two in this embodiment) is provided on the surface of the airtight component body 2151 opposite to the gas distribution plate 211. At least one protrusion 216 (two in this embodiment) is also provided on the surface of the airtight component body 2151 opposite to the sidewall of the second groove 2142. The sidewalls of the groove 2142 and the gas distribution plate 211 respectively compress the corresponding protrusions 216, causing them to deform. When the gap between the airtight component body 2151 and the sidewall of the gas distribution plate 211 or the second groove 2142 increases, the deformation of the protrusions 216 opposite to the sidewalls of the gas distribution plate 211 or the second groove 2142 decreases, ensuring that these protrusions 216 always maintain elastic contact with the sidewall of the cooling plate 212 or the second groove 2142, blocking the path of lateral transmission of the reactive gas along the gap. In this embodiment, the mounting grooves are respectively set on the gas distribution plate or the cooling plate, and then the airtight component is embedded in the corresponding mounting groove (i.e., the first groove or the second groove). This installation process does not require aligning the first and second grooves on the gas distribution plate and the cooling plate before inserting the airtight component, making the installation more convenient and efficient. While ensuring the prevention of lateral gas leakage, it improves the installation efficiency of the gas spray head. Furthermore, in other embodiments, the mounting slots can be entirely set on the gas distribution plate 211 or entirely set on the cooling plate 212, with the airtight component 215 embedded in each mounting slot. With this configuration, when the deformation of the gas distribution plate 211 or the cooling plate 212 exceeds the allowable range, the gas distribution plate 211 or the cooling plate 212 can be replaced individually to reduce replacement costs.

[0052] Figure 5 The third embodiment provided by the present invention, such as Figure 5 As shown, at least one deformation groove 3152 is provided on the airtight body 3151 in the gas spray head; the protrusion 316 is provided on the surface of the airtight body 3151 opposite to the side wall of the mounting groove 314, and the protrusion 316 is disposed opposite to the side wall of the deformation groove 3152. That is, the vertical projection of the protrusion 316 on the plane where the side wall of the deformation groove is located is located in the area of ​​the side wall of the deformation groove, so that the deformation groove 3152 can provide the deformation space required by the airtight body 3151 when the protrusion 316 is squeezed.

[0053] Specifically, Figure 5 This is a partial enlarged view of a gas spray head according to a third embodiment. In this gas spray head, a deformation groove 3152 is vertically provided on the upper part of the airtight component body located in the first groove 3141 and the lower part of the airtight component body located in the second groove 3142. The opening of the deformation groove 3152 located in the upper part faces the bottom wall of the first groove 3141, and the opening of the deformation groove 3152 located in the lower part faces the bottom wall of the second groove 3142. Furthermore, a protrusion 316 is provided on the surface of the airtight component body 3151 opposite to the sidewall of each deformation groove 3152. When the airtight component body 3151 is embedded in the mounting groove 314, each protrusion 316 is squeezed by the sidewall of the first groove 3141 or the second groove 3142, causing the deformation groove 3152 to shrink inward, that is, the opening of the deformation groove 3152 becomes smaller, thereby making each protrusion 316 maintain a tight elastic contact with the sidewall of the first groove 3141 or the second groove 3142. These protrusions 316 block the gap between the airtight component body 3151 and the gas distribution plate 311 or the cooling plate 312, preventing the reaction gas from flowing laterally along the gap. When the deformation of the gas distribution plate 311 or the cooling plate 312 increases, the compressive force on the deformation groove 3152 decreases, and the deformation groove 3152 recovers outward, that is, the opening of the deformation groove 3152 increases, so that each protrusion 316 and the sidewall of the first groove 3141 or the second groove 3142 always maintain elastic contact, effectively avoiding the formation of gaps between the protrusion 316 and the mounting groove 314, which would cause the reaction gas to cross laterally.

[0054] like Figure 6 As shown, Figure 6This is a partial enlarged view of another gas spray head according to the third embodiment. In this gas spray head, two deformation grooves 4152 are respectively arranged laterally on the airtight component body 4151, and the opening of each deformation groove 4152 faces the side wall of the mounting groove 414. At the same time, at least one protrusion 416 (two in this embodiment) is provided on the surface of the airtight component body 4151 opposite to the bottom wall of the mounting groove 414, and the protrusion 416 is arranged opposite to the side wall of the deformation groove 4152. That is, the protrusion 416 is on the side wall of the deformation groove. The vertical projection of the plane is located within the sidewall area of ​​the deformation groove; when the airtight component body 4151 is embedded in the mounting groove 414, each protrusion 416 is squeezed by the bottom wall of the mounting groove 414, causing the deformation groove 4152 to contract inward, that is, the opening of the deformation groove 4152 becomes smaller, thereby making each protrusion 416 maintain a tight elastic contact with the bottom wall of the mounting groove 414. These protrusions 416 block the gap between the airtight component body 4151 and the gas distribution plate 411 or cooling plate 412, preventing the reactive gas from flowing laterally along the gap. In other embodiments, deformation grooves can be provided on the airtight component body both vertically and laterally, such as Figure 7 As shown, this ensures that the protrusions in all directions can maintain elastic contact with the gas distribution plate or cooling plate due to the elastic force provided by the deformation groove.

[0055] like Figure 7 As shown, Figure 7 This is a partial enlarged view of another gas spray head formed by combining the second and third embodiments. In this gas spray head, the mounting grooves between two adjacent gas transmission channels 213 that transport different reactive gases are located on the gas distribution plate 211 or cooling plate 212. Each mounting groove is embedded with an airtight component body 2151 whose surface has at least one protrusion 216. At the same time, each airtight component body 2151 is provided with at least one deformation groove 2152. In this embodiment, each airtight component body 2151 is provided with one vertical deformation groove 2152 and two horizontal deformation grooves 2152. The opening of the vertical deformation groove 2152 faces the gas distribution plate 211, and the opening of the horizontal deformation grooves faces the side wall of the second groove 2142. The protrusion 216 is disposed on the surface of the airtight body 2151 opposite to the sidewall of each deformation groove 2152, that is, the vertical projection of the protrusion 216 on the plane where the sidewall of the deformation groove is located is located in the area of ​​the sidewall of the deformation groove, so that each deformation groove 2152 can provide the deformation space required by the airtight body 2151 when the corresponding protrusion 216 is compressed.

[0056] Specifically, such as Figure 7As shown, when the gas distribution plate 211 and the cooling plate 212 are tightly attached, the gas distribution plate 211 presses the protrusion 216 located at the top of the airtight component body 2151. The protrusion 216 at the top is deformed after being pressed, and at the same time, the extrusion force is applied to the corresponding transverse deformation groove 2152. The opening of each transverse deformation groove 2152 becomes smaller, and the transverse deformation groove 2152 is in a compressed state, so that the protrusion 316 at the top of the airtight component body 2152 maintains a tight elastic contact with the gas distribution plate 211, blocking the transverse path of the reaction gas transmission along the gap. When the cooling plate 212 deforms downwards due to heat, the gap between the gas distribution plate 211 and the cooling plate 212 widens. At this time, the compressive force on the protrusion 216 and the transverse deformation groove 2152 decreases, the deformation of the protrusion 216 decreases, and the deformation of the transverse deformation groove 2152 also decreases. That is, the opening of the transverse deformation groove 2152 widens. The transverse deformation groove 2152 provides an upward elastic force to the protrusion 216 at the top of the airtight component body, so that these protrusions 216 always maintain elastic contact with the gas distribution plate 211, thereby blocking the transverse path of the reaction gas along the gap and effectively preventing the transverse gas leakage phenomenon of adjacent gas transmission channels. Similarly, the vertically arranged deformation groove 2152 and the corresponding protrusion 216 are deformed by the pressure of the side wall of the second groove 2142. The deformation groove 2152 provides the corresponding protrusion 216 with elastic force toward the side wall of the second groove 2142, so that the protrusion 216 and the side wall of the second groove 2142 always maintain elastic contact, blocking the flow path of the reactive gas along the gap between the airtight body 2151 and the second groove 2142.

[0057] Figure 8 A partially enlarged view of another gas spray head according to the first embodiment of the present invention, as shown below. Figure 8 As shown, in this gas spray head, the sidewall of the airtight component body 515, which is disposed in the mounting groove 514, is a non-vertical surface. The non-vertical surface includes one or more of the following: inclined surface, stepped surface, or curved surface. Specifically, as... Figure 8The airtight component body 5151 shown on the left has an upper sidewall that is inclined and a lower sidewall that is stepped. In other embodiments, both the upper and lower sidewalls of the airtight component body 5151 can be inclined, stepped, or curved. By making the sidewalls of the airtight component body non-vertical, the gas flow path can be increased. Since the flow path is non-linear, the air resistance of the gas flow also increases, thereby reducing the lateral flow of the gas. On the other hand, since the cooling plate 512 and the gas distribution plate 511 are fixedly connected at both ends of their edges, when the cooling plate 512 is subjected to heat radiation and arches downward, the gap between the cooling plate 512 and the gas distribution plate 511 forms a shape that is wide in the middle and narrow on both sides. This causes the airtight component body 5151 set in the mounting groove 514 to tilt, so that one of the top corners of the airtight component body 5151 contacts the side wall of the mounting groove 514, thereby blocking the gas flow gap between the airtight component body 5151 and the mounting groove 514 and preventing the reaction gas from flowing along the gap.

[0058] Furthermore, such as Figure 8 The airtight component body 5151 shown in the middle has an upper sidewall that is inclined and a lower sidewall that is stepped. The surface of the airtight component body 5151 is provided with protrusions 516. In this embodiment, the protrusions 516 are located at the top of the upper part and the lower sidewall of the airtight component body 5151, respectively. The protrusions 516 elastically contact the sidewall of the mounting groove 514, blocking the flow path of the reactant gas. By making the sidewall of the airtight component body 5151 a non-vertical surface, combined with the protrusions 516 on the surface of the airtight component body 5151, the gas flow resistance is increased and the gas flow path is blocked, further preventing lateral cross-contamination of adjacent reactant gases.

[0059] Furthermore, such as Figure 8 The airtight component body 5151 shown on the right has an upper inclined surface and a lower stepped surface. The airtight component body 5151 is provided with horizontal and vertical deformation grooves 5152. The top of the upper part and the lower side wall of the airtight component body 5151 opposite to the side wall of the deformation groove 5152 are respectively provided with protrusions 516. These protrusions 516 are subjected to the squeezing force of the mounting groove 514 and the elastic force of the deformation groove 5152, and always maintain elastic contact with the side wall of the mounting groove 514, blocking the flow path of the reaction gas. Even if the cooling plate 512 is subjected to heat radiation, causing the deformation of the mounting groove 514 to increase (such as the width or depth of the mounting groove to increase), the deformation groove 5152 provided on the airtight component body 5151 can provide elastic force towards the side wall of the mounting groove, thereby ensuring that the protrusion 516 and the side wall of the mounting groove 514 always maintain elastic contact, blocking the flow path of the reactive gas along the gap.

[0060] Figure 9 A partially enlarged view of a gas spray head according to the fourth embodiment of the present invention is shown below. Figure 9 As shown, in this gas spray head, the protrusion 616 and the airtight component body 6151 are separately disposed. The protrusion 616 is respectively disposed between the airtight component body 6151 and the gas distribution plate 611 or between the airtight component body 6151 and the cooling plate 612. The airtight component body 6151 presses the protrusion 616, so that it forms elastic contact with the gas distribution plate 611 or the cooling plate 612 respectively. Further, as... Figure 9 The airtight component body 6151 shown on the left has a receiving groove 6153 at its top end to accommodate the protrusion 616. The protrusion 616 along the receiving groove 6153 is a sealing ring with a circular cross-sectional shape. The receiving groove 6153 provides deformation space for the sealing ring. The protrusion 616 at the bottom of the airtight component body 6151 is a sealing strip with an open "U" shaped cross-section. Its opening groove 6161 provides deformation space for the sealing strip.

[0061] Specifically, when the separate airtight component body 6151 and protrusion 616 are embedded in the mounting groove 614, the sealing ring at the top of the airtight component body 6151 is compressed by the gas distribution plate 611, and the deformation of the sealing ring is contained by the receiving groove 6153, so that the sealing ring and the gas distribution plate 611 are in tight elastic contact. Similarly, the sealing strip below the airtight component body 6151 is deformed by the pressure of the cooling plate 612, and the opening groove 6161 of the sealing strip is compressed, that is, the opening of the opening groove 6161 becomes smaller, thereby ensuring that the sealing strip and the cooling plate are in tight elastic contact. When the cooling plate 612 arches downwards and deforms, on the one hand, the elastic properties of the sealing ring itself restore the deformation, while the receiving groove 6153 provides an upward elastic force to keep the sealing ring in elastic contact with the gas distribution plate 611; on the other hand, the deformation of the opening groove 6161 of the sealing strip decreases, keeping the sealing strip in elastic contact with the cooling plate 611, thereby always maintaining the blocking state of the gap between the gas distribution plate 611 and the cooling plate 612. In other embodiments, such as Figure 9 As shown in the middle and right sides, the protrusions 616 at the top and bottom of the airtight component body 6151 can have the same shape. For example, the middle protrusions 616 are all sealing rings, and the right protrusions 616 are all sealing strips. This embodiment separates the protrusions 616 and the airtight component body 6151, which has the advantage of convenient installation. At the same time, different elastic materials can be used to replace the protrusions according to process requirements to ensure that the deformation of the protrusions can keep the protrusions in elastic contact with the gas distribution plate or cooling plate, thereby blocking the lateral flow gaps of the reactant gas.

[0062] Figure 10 A partially enlarged view of another gas spray head according to the fourth embodiment of the present invention, as shown below. Figure 10 As shown, in this gas spray head, a receiving groove 6153 is disposed on the side wall of the airtight component body 6151, and a sealing ring is disposed within the receiving groove 6153; a sealing strip is disposed between the airtight component body 6151 and the side wall of the mounting groove 614. In this embodiment, the sealing ring and the sealing strip are respectively disposed on both sides of the airtight component body 6151. In other embodiments, the sealing ring and the sealing strip can also be disposed on the same side of the airtight component body 6151, as long as the sealing ring and the sealing strip (i.e., the protrusion 616) always maintain elastic contact with the gas distribution plate 611 and the cooling plate 612. Through the elastic contact between the sealing ring and the sealing strip and the gas distribution plate 611 and the cooling plate 612, the lateral gas leakage path of the reactive gas flowing along the gap is blocked.

[0063] Figure 11 A partially enlarged view of a gas spray head according to the fifth embodiment of the present invention is shown below. Figure 11 As shown, in this gas spray head, the airtight component body 7151 is integrally formed with the gas distribution plate 711. The lower part of the airtight component body 7151 extends through the interface between the gas distribution plate 711 and the cooling plate 712 into the second groove 7142 of the cooling plate 712. A protrusion 716 is provided on the lower side wall of the airtight component body 7151, and a deformation groove 7152 is vertically provided on the airtight component body 7151, with the opening of the deformation groove 7152 facing the bottom wall of the second groove 7142. This completely blocks the gap between the airtight component body 7151 and the gas distribution plate 711, and ensures that the protrusion 716 maintains elastic contact with the cooling plate 712 when the cooling plate 712 deforms, thus always blocking the flow gap of the reactive gas. Similarly, it can be used in... Figure 12 In the embodiment shown, the airtight component body 7151 is integrally formed with the cooling plate 712. The upper part of the airtight component body 7151 is inserted into the first groove 7141 of the gas distribution plate 711. A deformation groove 7152 is vertically provided on the airtight component body 7151, and the opening of the deformation groove 7152 faces the bottom wall of the first groove 7141.

[0064] Preferably, in any embodiment of the present invention, the protrusion is made of polytetrafluoroethylene (PTFE) or rubber, which has good compression resilience and can ensure elastic contact between the protrusion and the cooling plate or gas distribution plate. Meanwhile, the airtight component body can be made of a high-temperature and corrosion-resistant material, which can withstand upward heat radiation from the base below and lateral corrosion from the gas, maintaining a stable chemical state and not generating contaminating particles. For example, PTFE or stainless steel can be selected. Specifically, when the protrusion and the airtight component body are integrally molded, both can be made of PTFE; when the protrusion and the airtight component body are separate components, to ensure better sealing, the protrusion can be made of rubber, and the airtight component body can be made of stainless steel.

[0065] Figure 13 This is a partial top view of an embodiment of a gas spray head according to the present invention. Multiple gas transmission paths 817 are provided on the gas transmission channels 813A and 813B, indicated by dashed lines. The multiple gas transmission paths 817 on a single gas diffusion channel are formed by aligned and connected first and second gas through holes for introducing the same reactive gas. Figure 13 In this embodiment, the gas transmission path 817 is arranged along a long strip, and correspondingly, the airtight component 815 is a strip structure, disposed between the two rows of gas transmission channels 813A and 813B that transport different gases. The alternating arrangement of the columns of gas transmission channels described in this invention is not limited to a straight column arrangement; it can also be other shapes of column arrangement. For example... Figure 14 This is a partial top view of another embodiment of the gas spray head of the present invention. The difference from the above embodiment is that multiple gas transmission paths 917 are provided on the gas transmission channels 913A and 913B, indicated by dashed lines. The multiple gas transmission paths 917 on a single gas diffusion channel are also composed of aligned and connected first and second gas through holes for introducing the same reactive gas. Figure 14 In one embodiment, the gas transmission path is arranged in a circle, making the gas transmission channels 913A and 913B annular. Correspondingly, the airtight component 915 is also set as an annular structure and is disposed between the two annular gas transmission channels 913A and 913B that transport different gases.

[0066] Furthermore, the present invention also provides a vapor deposition apparatus, comprising: a reaction chamber; a gas spray head as provided in any of the above embodiments is disposed on the upper part of the reaction chamber; a base disposed on the lower part of the reaction chamber, opposite to the gas spray head, for supporting the substrate to be processed; multiple gas sources connected to the gas spray head, for supplying multiple reaction gases into the reaction chamber; and a heating device located below the base, the heating device being either resistance wire heating or coil heating, which heats the base by thermal radiation and utilizes the thermal conduction between the base and the substrate to bring the substrate to the temperature required for the process.

[0067] In summary, the gas spray head and vapor deposition apparatus of the present invention utilize a gas spray head with several protrusions on the surface of the airtight component. These protrusions are compressed and maintain elastic contact with the gas distribution plate or cooling plate, thus blocking the path of the reactant gas flowing laterally along the gaps. Furthermore, by setting the sidewall of the airtight component as a non-vertical surface, the gas flow path is increased. Since the flow path is non-linear, the gas resistance also increases, thereby reducing the lateral flow of the gas and ensuring the stability of the reactant gas process parameters.

[0068] Furthermore, by providing a deformation groove on the airtight component body, and with the protrusion positioned opposite to the sidewall of the deformation groove, the deformation groove provides the deformation space required by the airtight component body when the protrusion is compressed. On the other hand, even if the cooling plate or gas distribution plate deforms during the process, increasing the gap between the gas distribution plate and the cooling plate, the deformation groove can provide an elastic force towards the cooling plate or gas distribution plate, ensuring that the protrusion always maintains elastic contact with the gas distribution plate and the cooling plate, preventing lateral gas flow between different gas transmission channels, and achieving the purpose of preventing lateral gas leakage.

[0069] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A gas spray head for conveying multiple reactive gases into a vapor deposition apparatus, characterized in that, include: Gas distribution plate; A cooling plate is located below the gas distribution plate and is detachably connected to the gas distribution plate; the gas distribution plate and the cooling plate are provided with a plurality of gas transmission channels; A plurality of mounting slots, each mounting slot including a first groove disposed on the gas distribution plate and / or a second groove disposed on the cooling plate; the mounting slots are located between two adjacent gas transmission channels that transport different reactive gases; A plurality of airtight components are respectively embedded in each of the mounting slots. Each airtight component includes: an airtight body and a plurality of protrusions provided on the airtight body; the airtight body is provided with at least one deformation groove, and the opening of at least one deformation groove faces the mounting slot. At least one protrusion has its vertical projection on the plane of the deformation groove sidewall located within the sidewall region. The deformation groove is used to provide space for the airtight component body to deform when the protrusion is compressed, or to provide an elastic force toward the cooling plate or gas distribution plate, so that the protrusion and the gas distribution plate or cooling plate always maintain elastic contact, preventing different reactive gases in adjacent gas transmission channels from flowing between the gas distribution plate and the cooling plate.

2. The gas spray head as described in claim 1, characterized in that, The protrusion is provided on the surface of the airtight component body; Furthermore, at least one protrusion is provided between the airtight component body and the gas distribution plate. At least one protrusion is provided between the airtight component body and the cooling plate.

3. The gas spray head as described in claim 1, characterized in that, When the mounting groove includes a first groove and a second groove, the airtight component body includes an upper part and a lower part. The upper part is embedded in the first groove of the gas distribution plate, and the lower part is embedded in the second groove of the cooling plate. The depth of the lower part embedded in the second groove is greater than the depth of the upper part embedded in the first groove.

4. The gas spray head as described in claim 1, characterized in that, The protrusion is separately disposed from the airtight component body. The protrusion is disposed between the airtight component body and the gas distribution plate or cooling plate. The airtight component body presses the protrusion so that it makes elastic contact with the gas distribution plate and the cooling plate respectively.

5. The gas spray head as described in claim 4, characterized in that, The protruding parts of the separate components include a sealing ring and / or a sealing strip.

6. The gas spray head as described in claim 5, characterized in that, The airtight component body is provided with a receiving groove for installing the sealing ring and for providing deformation space for the sealing ring.

7. The gas spray head as described in claim 5, characterized in that, The sealing strip has a U-shaped cross-section, and its opening groove provides deformation space for the sealing strip.

8. The gas spray head as described in claim 1, characterized in that, The airtight component body is integrally formed with the gas distribution plate, and the airtight component body is embedded in the second groove of the cooling plate.

9. The gas spray head as described in claim 1, characterized in that, The airtight component body is integrally formed with the cooling plate, and the airtight component body is embedded in the first groove of the gas distribution plate.

10. The gas spray head as described in claim 1, characterized in that, The sidewall of the airtight component body is a non-vertical surface.

11. The gas spray head as described in claim 10, characterized in that, The non-vertical surface is composed of one or more of the following: inclined surface, stepped surface, and curved surface.

12. The gas spray head as described in claim 1, characterized in that, The airtight component body is made of polytetrafluoroethylene or stainless steel.

13. The gas spray head as described in claim 1, characterized in that, The protrusion is made of polytetrafluoroethylene or rubber.

14. The gas spray head as described in claim 1, characterized in that, Each of the gas transmission channels includes a first gas through hole disposed on a gas distribution plate and a second gas through hole disposed on a cooling plate, wherein the first gas through hole and the second gas through hole are aligned.

15. A vapor deposition apparatus, characterized in that, include: reaction chamber; A gas spray head as described in any one of claims 1 to 14 is disposed on the upper part of the reaction chamber; A base, located at the bottom of the reaction chamber and opposite to the gas spray head, is used to support the substrate to be processed. Multiple gas sources are connected to the gas spray head to deliver various reaction gases into the reaction chamber; a heating device is located below the base to bring the process reaction to the required temperature.

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