Alarm method and system based on grinding equipment

Abstract

The invention discloses an alarm method and system based on grinding equipment, and the method comprises the steps: obtaining state parameters of the grinding equipment, and judging whether the grinding equipment is in a grinding state or not; parameter information of the grinding equipment is collected and recorded, operation data of the grinding equipment in the current state are obtained, the grinding equipment is monitored, and monitoring data of a measuring instrument in the current state are collected; comparing the operation data with the monitoring data, and determining difference data; judging the difference data according to a preset value, and outputting alarm information; and forming a processing interface to prompt alarm information and operation guidance. According to the invention, accurate early warning of the equipment abnormity and abnormity processing after alarm are realized, and the maintenance effect of the equipment is improved.

Description

Technical Field

[0001] The invention relates to the technical field of system monitoring and alarm of grinding equipment, and in particular to an alarm method and system based on grinding equipment. Background Art

[0002] The existing alarm method for grinding equipment mainly relies on manual inspection of the current grinding thickness on the equipment status interface, and judging whether the current grinding is abnormal based on the process parameters input on the equipment. This method requires certain professional skills of the operator. Manual inspection of the current grinding thickness and judgment of whether there is an abnormality is time-consuming and labor-intensive, inefficient, and has a high error rate. At the same time, the existing equipment abnormality alarm method may result in false alarms or missed alarms, and cannot achieve accurate early warnings and abnormal handling after the alarm, resulting in low maintenance efficiency, and even production line interruptions and safety accidents. Summary of the invention

[0003] The present invention aims to provide an alarm method and system based on grinding equipment, which obtain the current process parameter grinding data and allowable deviation data as input data; obtain the current measuring instrument monitoring data; obtain the equipment status data to obtain the status of the equipment to be monitored; under a specific state, the grinding data, the measuring instrument data, and the allowable deviation data are compared, and if the comparison result is abnormal, an alarm notification is automatically sent, thereby reducing the manual checking of parameters during the production process, judging whether there are parameter abnormalities, and giving an alarm in time, and popping up a corresponding interface according to the result, prompting the user to operate according to the needs, ensuring the continuous and stable operation of the machine, and improving the maintenance effect.

[0004] In order to achieve the above object, according to one aspect of the present invention, an alarm method based on a grinding device is provided, the alarm method comprising:

[0005] Recording the operating status of the grinding device and obtaining operating data of the current status of the grinding device;

[0006] Monitoring the grinding equipment and collecting monitoring data of the measuring instrument in the current state;

[0007] Comparing the operating data and the monitoring data to determine difference data;

[0008] The difference data is judged according to the preset value and an alarm message is output.

[0009] In another optional embodiment, the operating data includes:

[0010] The current status, process parameters and preset grinding data of the grinding equipment.

[0011] In another optional embodiment, the monitoring data includes:

[0012] The measuring device monitors the process parameters and grinding data under the current state of the grinding equipment.

[0013] In another optional embodiment, the monitoring of the grinding equipment further comprises:

[0014] The grinding device is provided with a plurality of sensors, and the measuring instrument receives signals from the sensors and generates corresponding monitoring data.

[0015] In another optional embodiment, comparing the operating data and the monitoring data to determine the difference data further includes:

[0016] The operation data and the detection data of the current state are traversed respectively, data information of the same dimension in the operation data and the detection data are extracted, and the above data information is compared to determine whether there is difference data.

[0017] In another optional embodiment, the determining the difference data according to a preset value further includes:

[0018] Setting a preset value, wherein the preset value is a preset tolerance difference data range;

[0019] Comparing the preset value with the difference data to determine whether the difference data is within the preset value range;

[0020] If it is within the preset value range, continue to operate the grinding device;

[0021] If it exceeds the preset value range, the current state of the grinding equipment is stopped and an alarm signal is output.

[0022] In another optional embodiment, the grinding device further includes a visualization structure, and the visualization structure outputs alarm information.

[0023] In another optional embodiment, the outputting of alarm information further comprises:

[0024] The visualization structure receives the alarm signal, generates a comparison result and an exception handling interface, and outputs alarm information and operation instructions according to the comparison result.

[0025] According to another aspect of the present invention, there is also provided an alarm system based on a grinding device, which is prepared by using any of the above-mentioned alarm methods, and the alarm system comprises:

[0026] A recording module, the recording module is used to record the operating status of the grinding device and obtain the operating data of the current status of the grinding device;

[0027] A monitoring module, the monitoring module is used to monitor the grinding equipment and collect monitoring data of the measuring instrument in the current state;

[0028] A comparison module, the comparison module is used to compare the operation data and the monitoring data to determine difference data;

[0029] An alarm module is used to determine the difference data according to a preset value and output an alarm message.

[0030] In another optional embodiment, the alarm system further includes:

[0031] The display module is used to receive the alarm signal, generate the comparison result and the abnormality processing interface, and output the alarm information and operation guidance according to the comparison result.

[0032] Beneficial effects of the present invention:

[0033] The present invention provides an alarm method and system based on grinding equipment, which collects measuring instrument data and equipment status data during the equipment production process; compares parameters and measuring instrument data in real time during the grinding process to see if there is any abnormality, and prompts an alarm message if there is any abnormality, thereby avoiding the probability of manual parameter checking errors and reducing the risk of errors; and pops up a corresponding exception handling interface based on the alarm comparison result, prompting the user to operate according to the needs, thereby ensuring the real-time and stability of the equipment and improving the maintenance effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the steps of the alarm method based on grinding equipment of the present invention.

[0035] Figure 2 It is a schematic diagram of the principle flow of the alarm method based on grinding equipment of the present invention.

[0036] Figure 3 It is a schematic diagram of the structure of the alarm system based on grinding equipment of the present invention. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of this application clearer, the technical solution in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0038] Embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The terms "first", "second", "third", etc. (if any) in the specification and claims of the present invention and the accompanying drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the objects described in this way can be interchanged where appropriate. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. The directional terms mentioned in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only reference directions of the accompanying drawings. The embodiments described below by reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention. In addition, the present invention repeats reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but a person of ordinary skill in the art can recognize the application of other processes and / or the use of other materials.

[0039] The alarm method of the present invention is based on the technical problem that the alarm method of the existing grinding equipment mainly checks the current grinding thickness manually on the equipment status interface and determines whether the current grinding is abnormal based on the process parameters input on the equipment, thereby providing an alarm method based on grinding equipment.

[0040] The alarm method of the present invention comprises the following steps:

[0041] S100, obtaining state parameters of the grinding equipment to determine whether it is in a grinding state.

[0042] In this step, the grinding status of the equipment needs to be monitored in real time. Only when it is in the grinding state will the subsequent alarm process be formed.

[0043] Specifically, the current equipment operation status value of the grinding equipment is obtained according to the communication interaction information updated in real time.

[0044] Determine whether the grinding equipment is in the grinding state;

[0045] If it enters the grinding state, the subsequent processes will continue to run;

[0046] If the grinding state has not been entered, continue to obtain the equipment operation state value and perform state judgment.

[0047] S200, collecting and recording parameter information of the grinding equipment, obtaining operation data of the current state of the grinding equipment, monitoring the grinding equipment, and collecting monitoring data of a measuring instrument in the current state.

[0048] In this step, data collection is required for the grinding equipment, and the collected data is used as input data for the subsequent comparison procedure. At the same time, external instruments are used to monitor the operation of the grinding equipment and collect monitoring data.

[0049] Preferably, the parameter information includes but is not limited to the grinding thickness at the current moment, the spindle speed at the current moment, the wafer table speed at the current moment, the corresponding recipe parameters preset in the file, etc.

[0050] Specifically, the collected operation data includes at least:

[0051] The current state of the grinding device forms the current state data of the grinding device.

[0052] The process parameters of the grinding equipment form the currently set process parameters of the grinding equipment.

[0053] Preset grinding data during the grinding process.

[0054] The grinding equipment is monitored, and monitoring data of the measuring instrument in the current state is collected.

[0055] Specifically, the collected monitoring data includes at least:

[0056] Under the current state of the grinding equipment, the real-time process parameters and grinding data of the grinding equipment are collected and monitored.

[0057] Preferably, it may be the current grinding thickness.

[0058] Furthermore, measuring instruments can be used to monitor different grinding stages of the grinding equipment.

[0059] Optionally, a plurality of sensors are provided on the grinding device, and a measuring instrument is used to receive the signals of the sensors to generate corresponding monitoring data. In addition, current data is generated by receiving the signals of the sensors, and the current data may be the current spindle speed and wafer stage speed.

[0060] S300: Compare the operation data and monitoring data to determine difference data.

[0061] In this step, the operation data collected in step S200 is compared with the collected monitoring data, the difference value is calculated, and the difference data is determined.

[0062] Specifically, according to the status data, the current status of the grinding device is first determined.

[0063] Then, the operation data and detection data of the grinding equipment in the current state are traversed respectively, and the data information of the same dimension in the operation data and the monitoring data is extracted, preferably, the grinding thickness information, the rotation speed information, etc.

[0064] Compare the above data information, calculate the difference value, and determine whether there is any difference data.

[0065] S400, judging the difference data according to the preset value, and outputting an alarm message.

[0066] In this step, the difference data obtained in step S300 is compared with the preset value to determine whether there is a problem that requires alarm processing, and an alarm message is output.

[0067] Wherein, judging the difference data according to the preset value further includes:

[0068] A preset value is set in advance, and the preset value is a preset tolerance difference data range, which is used to determine whether an alarm processing is required for the difference data.

[0069] The preset value is compared with the difference data obtained in step S300 to determine whether the difference data is within the preset value range.

[0070] If it is within the preset value range, no alarm signal is generated, the grinding equipment continues to operate, and data collection and judgment are performed again in the subsequent stage.

[0071] If it exceeds the preset value range, the current state of the grinding equipment will be stopped and an alarm signal will be output.

[0072] S500: a processing interface is formed to prompt alarm information and operation instructions.

[0073] In this step, the alarm information and operation instructions may be prompted through a pop-up interface.

[0074] Preferably, the grinding device further comprises a visualization structure, which can receive an alarm signal and output alarm information.

[0075] Specifically, the visualization structure first receives the alarm signal, analyzes the alarm signal, generates the comparison result of the grinding equipment parameters and the data collected by the monitoring instrument, and displays the abnormality handling interface on the visualization structure. At the same time, according to the comparison result, it outputs the alarm information and the operation guidance and operation suggestions for the user.

[0076] According to another aspect of the present invention, the present invention further provides an alarm system based on a grinding device, the alarm system is prepared using the alarm method of the present invention, and the alarm system at least comprises:

[0077] The recording module 100 is used to record the operating status of the grinding equipment and obtain the operating data of the current status of the grinding equipment.

[0078] Monitoring module 200: Monitoring module 200 is used to monitor the grinding equipment and collect monitoring data of the measuring instrument in the current state.

[0079] The comparison module 300 is used to compare the operation data and the monitoring data to determine the difference data.

[0080] The alarm module 400 is used to determine the difference data according to the preset value and output the alarm information.

[0081] Furthermore, the alarm system also includes:

[0082] The display module 500 is used to receive the alarm signal, generate the comparison result and the abnormality processing interface, and output the alarm information and operation guidance according to the comparison result.

[0083] The alarm method and system based on grinding equipment of the present invention can collect measuring instrument data and extract equipment status data during the equipment production process; at the same time, in the grinding process, parameters and measuring instrument data are compared in real time to see if there are any abnormalities, and an alarm notification is automatically sent if there are any abnormalities, thereby reducing manual parameter checking during the production process, avoiding the probability of manual parameter checking errors, and reducing the risk of errors; and a corresponding exception handling interface can be popped up according to the alarm comparison result, prompting the user to operate according to the needs, thereby ensuring the continuous and stable operation of the machine, ensuring the real-time and stability of the equipment, and improving the maintenance effect.

[0084] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. An alarm method based on grinding equipment, characterized in that: The alarm method comprises: Obtain the state parameters of the grinding equipment to determine whether it is in the grinding state; Collect and record parameter information of the grinding equipment, obtain operation data of the current state of the grinding equipment, monitor the grinding equipment, and collect monitoring data of the measuring instrument in the current state; Comparing the operating data and the monitoring data to determine difference data; Determine the difference data according to the preset value and output alarm information; A processing interface is formed to prompt alarm information and operation instructions.

2. The alarm method according to claim 1, characterized in that: The obtaining of the state parameters of the grinding device and determining whether the grinding device is in a grinding state further comprises: According to the real-time updated communication interaction information, the current equipment operation status value of the grinding equipment is obtained; Determining whether the grinding device is in a grinding state; If it enters the grinding state, the subsequent processes will continue to run; If the grinding state has not been entered, continue to obtain the equipment operation state value and perform state judgment.

3. The alarm method according to claim 1, characterized in that: The operating data includes current equipment parameters, process parameters and preset grinding data of the grinding equipment; the monitoring data includes process parameters and grinding data monitored by the measuring instrument under the current state of the grinding equipment.

4. The method according to claim 1, characterized in that: The monitoring of the grinding equipment further comprises: The grinding device is provided with a plurality of sensors, and the measuring instrument receives signals from the sensors and generates corresponding monitoring data.

5. The alarm method according to claim 1, characterized in that: The comparing the operation data and the monitoring data to determine the difference data further includes: The operation data and the detection data of the current state are traversed respectively, data information of the same dimension in the operation data and the detection data are extracted, and the above data information is compared to determine whether there is difference data.

6. The alarm method according to claim 5, characterized in that: The step of determining the difference data according to the preset value further includes: Setting a preset value, wherein the preset value is a preset tolerance difference data range; Comparing the preset value with the difference data to determine whether the difference data is within the preset value range; If it is within the preset value range, continue to operate the grinding device; If it exceeds the preset value range, the current state of the grinding equipment is stopped and an alarm signal is output.

7. The alarm method according to claim 6, characterized in that: The grinding device further comprises a visualization structure, which outputs alarm information.

8. The alarm method according to claim 7, characterized in that: The outputting of alarm information further comprises: The visualization structure receives the alarm signal, generates a comparison result and an exception handling interface, and outputs alarm information and operation instructions according to the comparison result.

9. An alarm system based on grinding equipment, characterized in that: The alarm system is prepared by using the alarm method according to any one of claims 1 to 8, and comprises: A recording module, the recording module is used to record the operating status of the grinding device and obtain the operating data of the current status of the grinding device; A monitoring module, the monitoring module is used to monitor the grinding equipment and collect monitoring data of the measuring instrument in the current state; A comparison module, the comparison module is used to compare the operation data and the monitoring data to determine difference data; An alarm module is used to determine the difference data according to a preset value and output an alarm message.

10. The alarm system according to claim 9, characterized in that: The alarm system also includes: The exception handling module is used to receive the alarm signal, generate the comparison result and the exception handling interface, and output the alarm information and operation guidance according to the comparison result.

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