Flower basket wafer separator applied to quartz boat loading

Abstract

The invention relates to the technical field of silicon wafer loading, in particular to a flower basket wafer separator applied to quartz boat loading, which comprises a rack, a plurality of groups of vertical plates I, a plurality of groups of vertical plates II and a plurality of groups of guide plates are symmetrically and fixedly mounted at the top of the inner wall of the rack, a material conveying plate I and a material conveying plate II are arranged in the rack, and an electric push rod is fixedly mounted at the top of the rack. An inserting assembly is arranged below the rack and comprises a connecting rod and an overturning frame, a support is fixedly connected to one side of the bottom of the rack, one end of the overturning frame is rotationally connected with the support, and the output end of an electric push rod located in the rack is rotationally connected with the connecting rod; compared with the prior art, alternate transportation is achieved through vertical alternate operation of the first material conveying plate and the second material conveying plate, continuous separation and conveying of silicon wafers are achieved, the separation speed and the efficiency of the whole production process are improved, and follow-up assemblies can be matched to guarantee the process continuity from silicon wafer separation to quartz boat loading.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer loading, in particular to a flower basket slicer used for quartz boat loading. Background Art

[0002] In the field of semiconductor manufacturing, quartz boats are key devices for carrying and transporting silicon wafers. The process of loading silicon wafers has a vital impact on the efficiency and quality of the entire production process. However, the traditional silicon wafer separation process often relies on a single mechanical structure or a simple adsorption method to process silicon wafers one by one. Each operation must wait for the previous silicon wafer to complete separation, transportation and subsequent processes before the next operation can be carried out, which cannot meet the demand for rapid supply of silicon wafers in large-scale production. In terms of workflow continuity, the links between various links are not well connected and there are obvious time gaps. For example, in the process of silicon wafer separation and transmission to subsequent components, the equipment is frequently in a waiting state because continuous operation cannot be achieved. This not only reduces the overall utilization of the equipment, but may also cause the silicon wafers to be contaminated or shifted during the waiting process due to process interruptions and stagnation, further affecting the accuracy and stability of subsequent processes.

[0003] In view of the above technical defects, a solution is now proposed. Summary of the invention

[0004] The object of the present invention is to provide a flower basket slicer for loading quartz boats, so as to solve the technical defects proposed by the background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a flower basket slicer for loading quartz boats, comprising a frame, a plurality of sets of vertical plates 1, a plurality of sets of vertical plates 2 and a plurality of sets of guide plates are symmetrically fixedly installed on the top of the inner wall of the frame, a material transport plate 1 and a material transport plate 2 are arranged inside the frame, an electric push rod is fixedly installed on the top of the frame, and an insertion component is arranged below the frame; The installation component includes a connecting rod and a flip frame. A bracket is fixedly connected to one side of the bottom of the frame. One end of the flip frame is rotatably connected to the bracket. The output end of the electric push rod located inside the frame is rotatably connected to the connecting rod. The end of the connecting rod away from the electric push rod is rotatably connected to the flip frame. An electric lifting plate is provided on one side of the flip frame.

[0006] Furthermore, a slide groove is provided on one side wall of the flip frame, and one end of the electric lifting plate matches with the slide groove.

[0007] Furthermore, a slide plate is arranged above the second material transport plate, and a plurality of groups of pneumatic suction cups are fixedly installed on the bottom of the first and second material transport plates and the outer side of the electric lifting plate, and a plurality of groups of positioning plates are fixedly installed on the side walls of the first and second material transport plates.

[0008] Furthermore, multiple sets of limit slide bars are fixedly connected to both sides of the top of the second material transport plate, a linkage rod is fixedly connected to the midpoint of the top of the second material transport plate, the top of the linkage rod is movably connected to a rotating shaft through a bearing, both ends of the rotating shaft are fixedly connected to linkage rollers, and the adjacent side walls of the two guide plates are provided with guide grooves matching the linkage rollers.

[0009] Furthermore, guide blocks are fixedly installed on the top of the slide plate and on both sides of the linkage rod, and the two guide blocks are respectively provided with a thread groove and a sliding hole.

[0010] Furthermore, through grooves are provided on both sides of the top and the midpoint of the slide plate, and sleeve one and sleeve two are fixedly installed in the through grooves. The limiting slide rod and the linkage rod are respectively slidably connected in the corresponding sleeve one and sleeve two.

[0011] Furthermore, the bottom ends of the vertical plates 1 and 2 are fixedly connected with I-shaped rails, the top sides of the slide plates are symmetrically fixedly installed with I-shaped sliders, the I-shaped sliders are slidably connected in the I-shaped rails, and the top sides of the material transport plate 1 are fixedly installed with electric slides, the electric slides are slidably connected in the corresponding I-shaped rails.

[0012] The present invention also provides an operating method for a flower basket slicer for loading a quartz boat, comprising the following steps: Step 1: Drive and coordination of the material transport board: The slide plate, material transport board 1 and material transport board 2 slide back and forth along the I-shaped track under external drive, and cooperate with the guide groove and linkage roller to achieve alternating passage and continuous feeding of material transport board 1 and material transport board 2; Step 2: Insertion component operation: When the transport board 1 or transport board 2 carries the silicon wafer close to the insertion component, the electric push rod drives the connecting rod to flip the flip frame 90 degrees, and the pneumatic suction cup on the outside of the electric lifting plate adsorbs the bottom of the silicon wafer, and the pneumatic suction cup on the top releases the adsorption. After the flip frame deflects in the opposite direction, the electric lifting plate descends to place the silicon wafer into the quartz boat slot. The transport board and the insertion component cooperate with each other, combined with the continuous movement of the quartz boat, to achieve continuous slicing and precise placement of silicon wafers.

[0013] Compared with the prior art, the present invention has the following beneficial effects: 1. When the present invention is in use, alternating transportation is achieved by alternately passing the first and second transport plates up and down, thereby changing the low efficiency of separating silicon wafers in the traditional single mode. The alternating transportation of the present invention is operated at two different positions at the same time. For example, while the first transport plate rises to adsorb a silicon wafer, the second transport plate descends to release the previously adsorbed silicon wafer, thereby achieving continuous separation and transportation of silicon wafers, greatly improving the speed of silicon wafer separation, and effectively improving the efficiency of the entire production process. This alternating transportation method allows the separation, adsorption and transportation of silicon wafers to be closely connected. When one transport plate completes adsorption and starts to move the silicon wafer, the other transport plate is ready for the next adsorption, thereby reducing the waiting time of the equipment, improving the overall working efficiency of the equipment, and better cooperating with the work of the subsequent insertion components and the electric lifting plate to ensure the continuity of the entire process from silicon wafer separation to quartz boat loading.

[0014] 2. When the present invention is in use, the insertion component is used to accurately deflect the silicon wafers delivered by the transport plate 1 and the transport plate 2 by 90 degrees, which effectively solves the problem of poor compatibility between the silicon wafers and the quartz boat caused by the lack of precise angle adjustment, greatly improves the accuracy of silicon wafer placement, and enables the silicon wafers to accurately correspond to the internal structure of the quartz boat. The silicon wafers are accurately placed in the quartz boat through the electric lifting plate, further ensuring the position accuracy of the silicon wafers in the quartz boat, effectively avoiding undesirable phenomena such as silicon wafer collision and uneven arrangement caused by inaccurate placement, and significantly reducing the defect rate caused by silicon wafer loading problems in subsequent processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings; Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a structural schematic diagram of the material transport plate 1 and the material transport plate 2 of the present invention; Figure 3 It is a schematic diagram of the connecting rod structure in the present invention; Figure 4 It is a schematic diagram of the structure of the overturning frame in the present invention; Figure 5 It is a schematic diagram of the structure of the slide plate in the present invention; Figure 6 It is a schematic diagram of the linkage roller structure in the present invention; Figure 7 It is a schematic diagram of the structure of the pneumatic suction cup in the present invention; Figure 8 It is a schematic diagram of the guide groove structure in the present invention.

[0016] Figure numerals: 1, frame; 201, vertical plate one; 202, vertical plate two; 3, guide plate; 401, connecting rod; 402, turning frame; 403, electric lifting plate; 404, positioning plate; 501, pneumatic suction cup; 6, bracket; 7, guide groove; 8, electric push rod; 901, material transport plate one; 902, material transport plate two; 903, slide plate; 11, limit slide bar; 12, linkage rod; 13, linkage roller; 14, guide block. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] Embodiment 1: Figure 1-Figure 8 As shown, a flower basket slicer for loading quartz boats includes a frame 1, a plurality of sets of vertical plates 1 201, a plurality of sets of vertical plates 202 and a plurality of sets of guide plates 3 are symmetrically fixedly installed on the top of the inner wall of the frame 1, a material transport plate 1 901 and a material transport plate 2 902 are arranged inside the frame 1, and an electric push rod 8 is fixedly installed on the top of the frame 1; like Figure 1 As shown, an operating table is provided below the rack 1, and the top of one end of the operating table close to the bracket 6 is used to place the quartz boat horizontally, and the top of the other end of the operating table is used to place a flower basket, and a large number of silicon wafers in the flower basket are placed in a state of stacking each other. It should be explained here that the quartz boat is an existing device, which is used to place silicon wafers at intervals, increase the distance between adjacent silicon wafers, and enhance the air circulation and uniform heating between adjacent silicon wafers; A slide plate 903 is provided above the second material transport plate 902, multiple sets of pneumatic suction cups 501 are fixedly installed on the bottom of the first material transport plate 901 and the second material transport plate 902 and the outer side of the electric lifting plate 403, and multiple sets of positioning plates 404 are fixedly installed on the side walls of the first material transport plate 901 and the second material transport plate 902; The bottom ends of vertical plate 1 201 and vertical plate 202 are fixedly connected with I-shaped rails, and I-shaped sliders are symmetrically fixedly installed on both sides of the top of the slide plate 903. The I-shaped sliders are slidably connected in the I-shaped rails. Electric slides are fixedly installed on both sides of the top of the material transport plate 1 901, and the electric slides are slidably connected in the corresponding I-shaped rails. It needs to be explained here that the electric slide is an existing equipment, which is used to drive the material transport plate 1 901 to perform continuous reciprocating horizontal movement.

[0019] Both sides of the top of the second material transport plate 902 are fixedly connected to multiple groups of limit slide bars 11, the top midpoint of the second material transport plate 902 is fixedly connected to a linkage rod 12, the top of the linkage rod 12 is movably connected to a rotating shaft through a bearing, and both ends of the rotating shaft are fixedly connected to linkage rollers 13, and the adjacent side walls of the two guide plates 3 are provided with guide grooves 7 that match the linkage rollers 13, and the guide grooves 7 are as shown in FIG. Figure 8 As shown, through the cooperation between the linkage roller 13 and the linkage rod 12, the regular lifting and lowering of the material transporting plate 2 902 and the alternating material transport with the material transporting plate 1 901 are realized.

[0020] Guide blocks 14 are fixedly installed on the top of the slide 903 and on both sides of the linkage rod 12. The two guide blocks 14 are respectively provided with thread grooves and sliding holes. Two bearing frames are fixed on the top of the inner wall of the frame 1. A threaded rod and a long rod are provided between the two bearing frames. A motor for driving the threaded rod to rotate is provided on the outside of the bearing frame. The motor drives the threaded rod and cooperates with the thread groove provided on the outside of the guide block 14 to drive the slide 903 to slide horizontally along the I-shaped track. Through slots are provided on both sides of the top and the midpoint of the slide plate 903, in which sleeve 1 and sleeve 2 are fixedly installed, and the limiting slide rod 11 and the linkage rod 12 are slidably connected in the corresponding sleeve 1 and sleeve 2 respectively.

[0021] In the specific setting, the slide plate 903, the material transport plate 1 901 and the material transport plate 2 902 slide back and forth horizontally along the corresponding I-shaped track under the action of the external driving device, and the slide plate 903 drives the linkage roller 13 to slide in the guide groove 7 through the linkage rod 12. Figure 8 As shown, the guide groove 7 is composed of two flat grooves and two inclined grooves; When the linkage roller 13 moves from the flat groove to the inclined groove, the linkage rod 12 drives the second material transport plate 902 to rise synchronously under the action of the linkage roller 13. During the rising process of the second material transport plate 902, the limit slide bar 11 and the linkage rod 12 rise synchronously in the corresponding sleeve 1 and sleeve 2. When the second material transport plate 902 rises to the highest point, the first material transport plate 901 passes under the second material transport plate 902 and transports the flower silicon wafer to the position of the quartz boat. Through the mutual cooperation of the guide groove 7 and the linkage roller 13, the alternating passage and continuous feeding of the material transport plate 1 901 and the material transport plate 2 902 are realized. It should be explained here that when the material transport plate 1 901 and the material transport plate 2 902 are in the lowest position, the height of the pneumatic suction cup 501 at the bottom of the two is consistent.

[0022] When the second transport plate 902 moves from the highest point to the lowest position and gradually approaches the flower basket, the positioning piece 404 contacts the side wall of the silicon wafer to be taken out placed in the flower basket, and the position of the silicon wafer in the flower basket is corrected by the positioning piece 404. Then the pneumatic suction cup 501 adsorbs and fixes the top of the silicon wafer. Then the second transport plate 902 drives the silicon wafer to move in the opposite direction and passes alternately with the first transport plate 901 again, so as to realize continuous and accurate loading of the silicon wafers in the flower basket.

[0023] Embodiment 2: An insertion assembly is provided below the frame 1, and the insertion assembly includes a connecting rod 401 and a flip frame 402. A bracket 6 is fixedly connected to one side of the bottom of the frame 1, and one end of the flip frame 402 is rotatably connected to the bracket 6. The output end of the electric push rod 8 located inside the frame 1 is rotatably connected to the connecting rod 401, and the end of the connecting rod 401 away from the electric push rod 8 is rotatably connected to the flip frame 402; An electric lifting plate 403 is provided on one side of the flip frame 402. A slide groove is provided on one side wall of the flip frame 402. One end of the electric lifting plate 403 cooperates with the slide groove. It should be explained here that the electric lifting plate 403 is an existing device, and is lifted and moved in the slide groove provided on the side wall of the flip frame 402. In the specific setting, when the material transport plate 1 901 or the material transport plate 2 902 moves to the vicinity of the insertion assembly by carrying the silicon wafer through the pneumatic suction cup 501, the electric push rod 8 drives the connecting rod 401 to move downward and further drives the flip frame 402 to flip, and the flip frame 402 flips 90 degrees under the action of the electric push rod 8 and the connecting rod 401; The pneumatic suction cup 501 arranged on the outside of the electric lifting plate 403 contacts and adsorbs the bottom of the silicon wafer at this time, and the pneumatic suction cup 501 located on the bottom of the transport plate 1 901 or the transport plate 2 902 on the top of the silicon wafer immediately releases the adsorption of the silicon wafer, and then the flip frame 402 deflects in the opposite direction and drives the silicon wafer to deflect 90 degrees synchronously, and the electric lifting plate 403 drives the silicon wafer to descend and places the silicon wafer in the corresponding slot inside the quartz boat. The coordinated cooperation of the transport plate 1 901, the transport plate 2 902 and the insertion assembly, coupled with the continuous movement of the quartz boat, realizes the continuous slicing and continuous and precise placement of the silicon wafers.

[0024] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A basket slicing machine for loading quartz boats, comprising a frame (1), characterized in that: A plurality of sets of vertical plates 1 (201), a plurality of sets of vertical plates 2 (202) and a plurality of sets of guide plates (3) are symmetrically fixedly mounted on the top of the inner wall of the frame (1); a material transport plate 1 (901) and a material transport plate 2 (902) are arranged inside the frame (1); an electric push rod (8) is fixedly mounted on the top of the frame (1); and an insertion assembly is arranged below the frame (1); The insertion assembly comprises a connecting rod (401) and a turning frame (402); a bracket (6) is fixedly connected to one side of the bottom of the frame (1); one end of the turning frame (402) is rotatably connected to the bracket (6); an output end of an electric push rod (8) located inside the frame (1) is rotatably connected to the connecting rod (401); an end of the connecting rod (401) away from the electric push rod (8) is rotatably connected to the turning frame (402); and an electric lifting plate (403) is provided on one side of the turning frame (402).

2. The flower basket slicing machine for quartz boat loading according to claim 1, characterized in that: A sliding groove is provided on one side wall of the turning frame (402), and one end of the electric lifting plate (403) cooperates with the sliding groove.

3. The flower basket slicing machine for quartz boat loading according to claim 2, characterized in that: A slide plate (903) is arranged above the second material transport plate (902), and multiple groups of pneumatic suction cups (501) are fixedly installed on the bottom of the first material transport plate (901) and the second material transport plate (902) and the outer side of the electric lifting plate (403), and multiple groups of positioning plates (404) are fixedly installed on the side walls of the first material transport plate (901) and the second material transport plate (902).

4. The flower basket slicing machine for quartz boat loading according to claim 3, characterized in that: A plurality of limit slide bars (11) are fixedly connected to both sides of the top of the second material transport plate (902); a linkage rod (12) is fixedly connected to the midpoint of the top of the second material transport plate (902); the top of the linkage rod (12) is movably connected to a rotating shaft via a bearing; both ends of the rotating shaft are fixedly connected to linkage rollers (13); and the adjacent side walls of the two guide plates (3) are provided with guide grooves (7) that match the linkage rollers (13).

5. The flower basket slicing machine for quartz boat loading according to claim 4, characterized in that: Guide blocks (14) are fixedly mounted on the top of the slide plate (903) and on both sides of the linkage rod (12), and the two guide blocks (14) are respectively provided with a thread groove and a slide hole.

6. The basket slicing machine for quartz boat loading according to claim 5, characterized in that: Through slots are provided on both sides of the top and at the midpoint of the slide plate (903), and sleeves 1 and 2 are fixedly installed in the through slots. The limit slide rod (11) and the linkage rod (12) are slidably connected in the corresponding sleeves 1 and 2.

7. The flower basket slicing machine for quartz boat loading according to claim 6, characterized in that: The bottom ends of the vertical plate 1 (201) and the vertical plate 2 (202) are fixedly connected to the I-shaped rails, and the top two sides of the slide plate (903) are symmetrically fixedly installed with I-shaped sliders, which are slidably connected in the I-shaped rails. The top two sides of the material transport plate 1 (901) are fixedly installed with electric slides, which are slidably connected in the corresponding I-shaped rails.

8. An operating method of a flower basket slicer for loading quartz boats, as claimed in any one of claims 1 to 7, characterized in that: The following steps are involved: Step 1: driving and coordinating the material transporting plates: the slide plate (903), the material transporting plate 1 (901) and the material transporting plate 2 (902) slide back and forth along the I-shaped track under external drive, and cooperate with the guide groove (7) and the linkage roller (13) to achieve the alternate passage and continuous feeding of the material transporting plate 1 (901) and the material transporting plate 2 (902); Step 2: Insertion component inserting operation: When the transport plate 1 (901) or the transport plate 2 (902) brings the silicon wafer close to the insertion component, the electric push rod (8) drives the connecting rod (401) to flip the flip frame (402) 90 degrees, and the pneumatic suction cup (501) on the outside of the electric lifting plate (403) adsorbs the bottom of the silicon wafer, and the top pneumatic suction cup (501) releases the adsorption. After the flip frame (402) deflects in the opposite direction, the electric lifting plate (403) descends to place the silicon wafer into the quartz boat slot. The transport plate and the insertion component cooperate with each other, combined with the continuous movement of the quartz boat, to achieve continuous slicing and precise placement of silicon wafers.

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