Electrical contact

Abstract

[Problem] To provide an electrical contact in which an elastic body having a helical structure is integrally formed from a single material, which can be connected as a circuit without loss, and which does not cause jitter at a contact part. [Solution] The present invention is an electrical contact formed from a conductive plate-like member, the electrical contact being provided with: a first winding part which is formed by closely winding the plate-like member with the same diameter, and which has a first contact part at one end that comes into contact with a first contact object; a second winding part which is formed by tightly winding the plate-shaped member with the same diameter and has a second contact part in contact with a second contact object at one end part; and one or more elastic parts having a helical structure, the elastic parts being formed by winding the plate-shaped member with different diameters.

Description

Technical Field

[0001] The present invention relates to an electric contact and can be applied to, for example, an integrated circuit on a semiconductor wafer or an electric contact used in a current-carrying test of a test object. Background Art

[0002] The electrical characteristics of the inspected objects such as the integrated circuit formed on the semiconductor wafer and the packaged integrated circuit are inspected at their respective manufacturing stages. In the electrical inspection of the integrated circuit on the semiconductor wafer, an electrical connection device such as a probe card is used, and in the electrical inspection of the packaged integrated circuit, an electrical connection device such as a socket is used. In such an electrical connection device, an electrical contact that contacts a first contact object and a second contact object is used to conduct an electrical signal between the first contact object and the second contact object via the electrical contact.

[0003] In the past, there are various types of electrical contacts, and some are formed by combining multiple components. When an electrical contact formed by such multiple components is used to conduct an electrical signal between a first contact object and a second contact object, the resistance at the contact point between the components increases, which may affect the electrical conductivity.

[0004] Patent document 1 discloses a spring probe, which is formed by bending a thin-walled strip-shaped substrate to form a spiral cylindrical sleeve, a first terminal at one end of the cylindrical sleeve, and a second terminal at the other end of the cylindrical sleeve. Such a spring probe is formed integrally with the thin-walled strip-shaped substrate, so it has good conductivity. Prior art literature Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2011-12992 Patent Document 2: Japanese Patent Application Publication No. 2021-188984 Summary of the invention Problem that the invention aims to solve

[0006] However, when the spring probe described in Patent Document 1 is used to conduct an electrical signal between a first contact object and a second contact object, the electrical conduction path in the spring probe passes through a pair of helical coil springs, so the path length becomes long, and improvement in electrical conductivity is required.

[0007] Here, for example, a spiral spring (spring with a spiral structure) in which a part of an inner member spirally wound around a plate-shaped member is covered with an outer member may be used as an electrical contact as it is.

[0008] Since the electrical contact of the spiral structure is formed by winding a plate-like component, the contact portion between the constituent components can be eliminated. Therefore, the resistance value on the conduction path of the electrical contact of the spiral structure can be reduced. Furthermore, the path length of the conduction path of the electrical contact of the spiral structure can also be shortened, and good electrical conductivity can be expected.

[0009] However, in order to reliably make electrical contact between the electric contact and the first contact object and the second contact object when inspecting the object to be inspected, it is considered that the electric contact has an elastic body in the up-and-down direction. Therefore, on the electric contact, for example, it is considered that a spiral spring portion is formed above the axial center portion and a spiral spring portion is formed below the center portion (for example, Fig. 9 The connecting piece 100).

[0010] but, Fig. 9 When the connector 100 is inserted through the through hole 110 as a guide, since the connector 100 is tapered at the top and bottom, spaces (spaces S1 to S4) are generated in the through hole 110. Fig. 9 (A)) to contact load ( Fig. 9 (B)), the spaces S1 to S4 are further expanded due to the contraction of the spring. As such, the connector 100 may fall in the through hole 110 when the contact load is applied, resulting in an inclination (slope G) ( Fig. 9 (C)). If the inclination occurs, the contact point between the connector 100 and the contact object will vibrate.

[0011] Therefore, the present invention is proposed in view of the above-mentioned problems, and its object is to provide an electrical contact that is composed of an elastic body having a spiral structure integrally formed from a single material, can connect a circuit without loss, and does not generate jitter at the contact point. Technical means of solving problems

[0012] The present invention is an electrical contact formed by a conductive plate-like member, characterized in that it comprises: (1) a first coil, which is formed by tightly winding the plate-like member with the same diameter, and one end has a first contact portion that contacts a first contact object; (2) a second coil, which is formed by tightly winding the plate-like member with the same diameter, and one end has a second contact portion that contacts a second contact object; and (3) one or more elastic portions of a spiral structure, which are formed by winding the plate-like member with different diameters. Effects of the Invention

[0013] According to the present invention, it is possible to provide an electric contact having an elastic body having a spiral structure integrally formed of a single material, which can connect an electric circuit without loss and does not cause chattering at a contact point. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram showing the structure of the connector according to the embodiment. Figure 2 It is a structural diagram showing the structure of the electrical connecting device according to the embodiment. Figure 3 It is an explanatory diagram schematically showing a process of forming a connector according to an embodiment. Figure 4 It is an explanatory diagram showing a mounted state of a connector according to an embodiment. Figure 5 It is a structural diagram showing the structure of the connector before compression according to the embodiment. Figure 6 It is an explanatory diagram showing the effect of the connector according to the embodiment. Figure 7 This is a structural diagram (part 1) showing the structure of a connector according to a modified embodiment. Figure 8 This is a structural diagram (part 2) showing the structure of a connector according to a modified embodiment. Fig. 9 This is a structural diagram showing the structure of a conventional connector. DETAILED DESCRIPTION

[0015] (A) Main implementation methods Hereinafter, this embodiment of the electric contact of the present invention will be described in detail with reference to the drawings.

[0016] In this embodiment, as described later, the case where the electric contact of the present invention is applied to a connector mounted on an electric connection unit, which is a component of an electric connection device, is exemplified. The electric contact of the present invention can be applied to an electric contact that is electrically in contact with a first contact object and a second contact object, and can conduct an electrical signal between the first contact object and the second contact object. In addition, in this embodiment, the case where the electric contact of the present invention is applied to a connector of an electric connection unit is exemplified, but the present invention can also be applied to a probe connected to an electrode terminal of a body to be inspected, etc.

[0017] In addition, in this embodiment, the electrical connection device of the present invention is exemplified as an electrical connection device for electrical inspection of an integrated circuit formed on a semiconductor wafer as an object to be inspected. In addition, the electrical connection device of the present invention can be applied to a device that uses the electrical contact of the present invention to conduct an electrical signal between a first contact object and a second contact object to perform electrical connection.

[0018] (A-1) Configuration of Embodiment (A-1-1) Electrical connection device Figure 2It is a structural diagram showing the structure of the electrical connecting device according to the embodiment.

[0019] Figure 2 The electrical connection device 10 shows the main components, but is not limited to these components. Figure 2 In addition, the following focuses on Figure 2 The "up" and "down" are referred to in the up and down directions.

[0020] exist Figure 2 In the embodiment, the electrical connection device 10 includes: a flat supporting member 12; a flat wiring substrate 14, which is held on the lower surface 12a of the supporting member 12; an electrical connection unit 15, which is electrically connected to the wiring substrate 14; and a probe substrate 16, which is electrically connected to the electrical connection unit 15 and has a plurality of probes 20.

[0021] When the electrical connection device 10 is assembled with the support member 12, the wiring substrate 14, the electrical connection unit 15, and the probe substrate 16, a plurality of fixing members (for example, screw members such as bolts) are used. Figure 2 These fixing members are not shown in the figure.

[0022] The electrical connection device 10 uses, for example, a semiconductor integrated circuit formed on a semiconductor wafer as the object to be inspected 2, and performs electrical inspection of the object to be inspected 2. Specifically, by pressing the object to be inspected 2 against the probe substrate 16, the tip of each probe 20 of the probe substrate 16 is electrically contacted with the electrode terminal 2a of the object to be inspected 2, and an electrical signal is supplied from a tester (inspection device) not shown to the electrode terminal 2a of the object to be inspected 2, and the electrical signal from the electrode terminal 2a of the object to be inspected 2 is further supplied to the tester side, thereby performing electrical inspection of the object to be inspected 2.

[0023] The object to be inspected 2 is placed on the upper surface of the chuck top 3. The chuck top 3 can be adjusted in the horizontal X-axis direction, the Y-axis direction perpendicular to the X-axis direction on the horizontal plane, and the Z-axis direction perpendicular to the horizontal plane (XY plane), and can also be adjusted in the rotational posture in the θ direction around the Z-axis. When the electrical inspection of the object to be inspected 2 is performed, the chuck that can be raised and lowered in the up-and-down direction (Z-axis direction) is moved so that the electrode terminal 2a of the object to be inspected 2 is electrically contacted with the top end of each probe 20 of the probe substrate 16. Therefore, the lower surface of the probe substrate 16 of the electrical connection device 10 and the object to be inspected 2 on the upper surface of the chuck top 3 are moved in a relatively close manner.

[0024] [Supporting member] The support member 12 suppresses deformation (e.g., bending, etc.) of the wiring substrate 14. For example, since the probe substrate 16 has a plurality of probes 20, the weight of the probe substrate 16 mounted on the wiring substrate 14 side becomes larger. In addition, when performing electrical inspection of the object to be inspected 2, the probe substrate 16 is pressed by the object to be inspected 2 on the chuck top 3, whereby the top end of the probe 20 protruding from the lower surface of the probe substrate 16 is electrically contacted with the electrode terminal 2a of the object to be inspected 2. In this way, during electrical inspection, a reaction force (contact load) pushing upward from the bottom acts, and a large load is also applied to the wiring substrate 14. The support member 12 functions as a member that suppresses deformation (e.g., bending, etc.) of the wiring substrate 14.

[0025] In addition, a plurality of through holes 121 penetrating the upper surface and the lower surface are provided on the support member 12. The plurality of through holes 121 are provided at positions corresponding to the positions of the plurality of anchors 50 disposed on the upper surface of the probe substrate 16 described later, and at positions corresponding to the positions of the plurality of through holes 141 disposed on the wiring substrate 14.

[0026] In each through hole 121 of the support member 12, a spacer (hereinafter also referred to as a "supporting part") 51 is inserted from the upper side of the support member 12 to the lower side, so as to fix the lower end of the spacer (supporting part) 51 and the corresponding anchor 50. For example, the lower end of the spacer (supporting part) 51 is a male threaded part, and the substantially central part of the anchor 50 disposed on the upper surface of the probe base plate 16 is a female threaded part 501, which can be fixed by screwing the lower end (male threaded part) of the spacer (supporting part) 51 with the female threaded part of the anchor 50. Thus, the distance between the upper surface of the probe base plate 16 and the upper surface of the support member 12 can be maintained at a predetermined distance length.

[0027] [Wiring board] The wiring substrate 14 is formed of a resin material such as polyimide, for example, and is a printed circuit board formed in a substantially circular plate shape. A plurality of electrode terminals (not shown) for electrical connection with a test head (not shown) of a tester (inspection device) are arranged on the peripheral portion of the upper surface of the wiring substrate 14. In addition, a wiring pattern is formed on the lower surface of the wiring substrate 14, and the connection terminal 14a of the wiring pattern is electrically connected to the upper end of the connector 30 provided on the electrical connection unit 15.

[0028] In addition, a wiring circuit (not shown) is formed inside the wiring substrate 14, and the wiring pattern on the lower surface of the wiring substrate 14 and the electrode terminals on the upper surface of the wiring substrate 14 can be connected via the wiring circuit inside the wiring substrate 14. Therefore, the electrical signal can be conducted between each connector 30 of the electrical connection unit 15 and the test head via the wiring circuit inside the wiring substrate 14, each connector 30 of the electrical connection unit 15 is electrically connected to the connection terminal 14a of the wiring pattern on the lower surface of the wiring substrate 14, and the test head is connected to the electrode terminal on the upper surface of the wiring substrate 14. A plurality of electronic components required for electrical inspection of the object under inspection 2 are also arranged on the upper surface of the wiring substrate 14.

[0029] In addition, the wiring substrate 14 is provided with a plurality of through holes 141 penetrating the upper surface and the lower surface of the wiring substrate 14. The plurality of through holes 141 are respectively arranged at positions corresponding to the positions of the plurality of anchors 50 arranged on the upper surface of the probe substrate 16, and at positions corresponding to the positions of the plurality of through holes 121 of the support member 12.

[0030] The opening shape of each through hole 141 may correspond to the shape of the support portion 51 to be inserted therethrough. In order to allow the support portion 51 to be inserted therethrough, the inner diameter of each through hole 141 is approximately the same as or slightly larger than the outer diameter of the support portion 51.

[0031] In this embodiment, since the support portion 51 is a cylindrical member, the opening shape of the through hole 141 is substantially circular, but the present invention is not limited thereto. For example, the support portion 51 may be a member of a right prism having a substantially square cross-sectional shape or a member of a polygonal prism having a polygonal cross-sectional shape. In such an example, the opening shape of the through hole 141 may be a shape that allows the support portion 51 to be inserted.

[0032] [Electrical connection unit] The electrical connection unit 15 has a plurality of connectors 30. In the assembled state of the electrical connection device 10, the upper end of each connector 30 is electrically connected to the connection terminal 14a of the wiring pattern on the lower surface of the wiring substrate 14, and the lower end of each connector 30 is connected to the pad provided on the upper surface of the probe substrate 16. Since the top end of the probe 20 is in electrical contact with the electrode terminal of the object under inspection 2, the electrode terminal of the object under inspection 2 is electrically connected to the tester (inspection device) through the probe 20 and the connector 30, so that the object under inspection 2 can be electrically inspected by the tester (inspection device).

[0033] For example, the electrical connection unit 15 has a plurality of through holes (insertion holes) for inserting the connectors 30, and the upper and lower ends of the connectors 30 are protruded by inserting the connectors 30 through the through holes. In addition, in the electrical connection unit 15, the structure for installing the plurality of connectors 30 is not limited to the structure in which the through holes are provided, and various structures can be widely applied. A flange portion 151 is provided around the electrical connection unit 15.

[0034] [Probe substrate] The probe substrate 16 is a substrate having a plurality of probes 20, and is formed in a substantially circular or polygonal shape (e.g., a hexagonal shape). The probes 20 may be cantilever probes, for example, but are not limited thereto. In addition, the probe substrate 16 has a substrate member 161 formed of, for example, a ceramic plate and a multilayer wiring substrate 162 formed on the lower surface of the substrate member 161.

[0035] A plurality of conductive paths (not shown) penetrating in the plate thickness direction are formed inside the substrate member 161 as a ceramic substrate, and pads 161a are formed on the upper surface of the substrate member 161, and one end of the conductive path in the substrate member 161 is formed to be connected to the corresponding pad 161a on the upper surface of the substrate member 161. Furthermore, on the lower surface of the substrate member 161, the other end of the conductive path in the substrate member 161 is formed to be connected to a connection terminal provided on the upper surface of the multilayer wiring substrate 162.

[0036] The multilayer wiring substrate 162 is formed of, for example, a plurality of multilayer substrates formed of a synthetic resin member such as polyimide, and a wiring path (not shown) is formed between the plurality of multilayer substrates. One end of the wiring path of the multilayer wiring substrate 162 is connected to the other end of the conductive path on the side of the substrate member 161 as a ceramic substrate, and the other end of the multilayer wiring substrate 162 is connected to a probe provided on the lower surface of the multilayer wiring substrate 162. A plurality of probes 20 are arranged on the probe board provided on the lower surface of the multilayer wiring substrate 162, and the plurality of probes 20 of the probe substrate 16 are electrically connected to the corresponding connection terminals 14a of the wiring substrate 14 via the electrical connection unit 15.

[0037] (A-1-2) Connector (electrical contact) Figure 1 It is a structural diagram showing the structure of the connector according to the embodiment. Figure 1 (A) shows the appearance of the connector 30. Figure 1 (B) shows a vertical cross-sectional view of the connector 30. In addition, Figure 3 1 is an explanatory diagram showing a schematic diagram of a forming process of a connector according to an embodiment. Figure 4 It is an explanatory diagram showing a setting state of the connector according to the embodiment.

[0038] Figure 1 The connecting piece 30 is for Figure 3 The plate-like member M of (A) is formed into Figure 3 After the connector 30P is formed into the target shape (before compression) shown in (B), the compression and curing treatment described later is used to form Figure 3 A connecting piece 30 having a target shape (a spirally wound spring structure at the center) as shown in (C). Figure 3 The plate-like member M is Figure 1 The component of the connector 30 (connector 30P) before the forming process is a plate-like component formed of a conductive material. That is, the connector 30 is formed from a plate-like component through multiple processes, and is formed in an integral form with the upper and lower parts being cylindrical and the central part being spiral, so that the conductivity of the electrical signal can be stabilized. In other words, the electrical contact formed by combining multiple components conducts the electrical signal because the multiple components are in contact with each other, so the resistance at the contact point between the multiple components becomes large and the conductivity becomes unstable. In contrast, since the connector 30 formed by forming the plate-like component M has no contact point between the components, the resistance value can be reduced and the conductivity of the electrical signal can be stabilized.

[0039] like Figure 1 As shown, the connector 30 as an example of an electrical contact includes: a first contact portion 31, which contacts the connection terminal 14a of the wiring substrate 14 as the first contact object; an upper roll portion 32, which connects the first contact portion 31 and the central elastic portion 35; a second contact portion 33, which contacts the pad 161a of the substrate member 161 as the second contact object; a lower roll portion 34, which connects the second contact portion 33 and the central elastic portion 35; and a central elastic portion 35 of a spiral winding spring structure, which elastically applies force in the upward and downward directions via the upper roll portion 32 and the lower roll portion 34 when the first contact portion 31 and the second contact portion 33 are subjected to loads.

[0040] The first contact portion 31 has a top end surface that contacts the first contact object, and the top end surface extends obliquely upward. In addition, the second contact portion 33 has a top end surface that contacts the second contact object, and the top end surface extends obliquely downward. The shapes of the first contact portion 31 and the second contact portion 33 are not limited, and various processing can also be performed. In the connector 30, the positions of the top end surface of the first contact portion 31 and the top end surface of the second contact portion 33 are not particularly limited, and for example, they are arranged on the same axis in the up-down direction.

[0041] The upper roll portion 32 and the lower roll portion 34 are formed by winding the plate-like member M with the same diameter. Figure 1 As shown in (B), the wound layers of the upper roll portion 32 and the lower roll portion 34 are in close contact with each other.

[0042] The outer diameters of the upper roll portion 32 and the lower roll portion 34 are not particularly limited, but are preferably such that they can be relatively Figure 4 The through hole 60 (through hole for inserting the connector 30) provided on the electrical connection unit 15 shown is as close as possible to the value of the inner diameter of the through hole 60 (the same as the inner diameter of the through hole 60) to the extent that the connector 30 is inserted. This is to eliminate the space generated in the through hole 60 and prevent the connector 30 from tipping over (tilting).

[0043] The central elastic part 35 is formed by winding the plate-like member M into a spiral shape, and a part of the inner member of the winding is covered by the outer member. In addition, the central elastic part 35 is a structure in which the spiral shape is an upper and lower object. The central elastic part 35 acts as an elastic body (spring) through this spiral structure.

[0044] The connector 30 has a central elastic portion 35 with a spirally wound spring structure disposed at the center, so that the upper and lower coils 32 and 34 wound with the same diameter can be used as springs to guide the vertical stroke, thereby achieving stable contact with little vibration at the contact point.

[0045] exist Figure 3 In the plate-like component M shown in (A), various plate-like components such as plate-like components formed of conductive precious metals or metals can be used. For example, precipitation-hardening copper alloys such as Cu-Be alloys (beryllium copper) are suitable as materials with high elasticity. In precipitation-hardening copper alloys, by aging the supersaturated solid solution after solution treatment, fine precipitates are evenly dispersed, the strength of the alloy increases, and the amount of dissolved elements in copper is reduced, which can improve conductivity. In addition, palladium alloys are also suitable as plate-like components M, just like precipitation-hardening copper alloys.

[0046] Figure 3 The connector 30P shown in (B) is a connector before the plate-like member M is formed into a target shape. The connector 30P has a structure corresponding to each component of the above-mentioned connector 30. That is, Figure 3 As shown in FIG. 2 (B), the connection member 30P includes a first contact portion 31P, an upper roll portion 32P, a second contact portion 33P, a lower roll portion 34P, and a central elastic portion 35P.

[0047] The connection member 30 and the connection member 30P are different in that the connection member 30P is in a state where the wound plate-like members M are not overlapped in each layer (a state before compression).

[0048] In this embodiment, in order to form the connector 30 of the target shape (the central portion of which is a spirally wound spring structure), first, Figure 3 The plate-like member M shown in (A) is formed Figure 3After the connector 30P before compression shown in (B) is processed by compression and curing as described below, a connector 30P is produced. Figure 3 The connector 30 shown in (C) is shown in FIG.

[0049] [Manufacturing method of connector] First, as a step of manufacturing the connector 30, the method described in Patent Document 2 (paragraphs

[0048] to

[0065] ) can be applied. That is, first, the connector 30P is formed from the plate-like member M using a winding machine.

[0050] Figure 5 1 is an explanatory diagram showing the structure of the connector before compression according to the embodiment. Figure 5 (A) shows the appearance of the connector 30P. Figure 1 (B) shows a vertical cross-sectional view of the connector 30P.

[0051] like Figure 5 As shown in (B) of FIG. 1 , the roll-up portion 32P has a spiral structure (layered structure) in which the plate-like member M is wound with the same spiral diameter r1.

[0052] On the other hand, in the central elastic portion 35P, each time the plate-like member M is gradually wound, the spiral diameter r is gradually reduced from the spiral diameter r1 of the upper roll portion 32P (spiral shapes r2, r3, r4), and the spiral diameter r is gradually increased from the middle (for example, from the center point of the connector 30P). Figure 5 In the figure, the central elastic portion 35P shows a spiral structure with a symmetrical relationship from the center to the top and bottom, but the spiral diameter r of each layer can also be as follows Figure 5 That is not a vertically symmetrical relationship, and the layer structure of the spiral may also be different.

[0053] like Figure 5 As shown in (B) of FIG. 1 , the lower roll portion 34P has a spiral structure in which the plate-like member M is wound with the same spiral diameter r1.

[0054] The first contact portion 31 of the upper roll portion 32 and the second contact portion 33 of the lower roll portion 34P are processed to a predetermined length (for example, a spiral diameter r0 half the length of the spiral diameter r1) after the plate-like member M is separated from the winding machine.

[0055] In this embodiment, the connecting member 30P (upper roll 32P and lower roll 34P) forms a vertically symmetrical spiral structure via the central elastic portion 35P, but the upper roll 32P and lower roll 34P do not necessarily have to form a vertically symmetrical spiral structure. For example, the spiral diameters r of the upper roll 32P and the lower roll 34P may be different in the upper and lower parts, and the spiral hierarchical structures may also be different.

[0056] Next, the connector 30P is subjected to a curing treatment (heat treatment) while being compressed, thereby manufacturing the connector 30. The specific method of the compression and curing treatment is the same as the procedure described in Patent Document 2, and therefore a detailed description thereof will be omitted here.

[0057] (A-2) Effects of Implementation As described above, according to this embodiment, the following effects are achieved.

[0058] The connector 30 of this embodiment has a helical winding spring (central elastic portion 35) in the central portion and an upper roll portion 32 and a lower roll portion 34 that are tightly wound with the same diameter up and down. Thus, when an up and down stroke is performed through a contact action, the upper roll portion 32 and the lower roll portion 34, whose diameters are approximately the same as the inner diameter of the through hole 60, slide along the through hole 60, thereby obtaining stable and reproducible contact (capable of stable contact with little jitter).

[0059] Furthermore, since the connector 30 manufactured by the above-described manufacturing method has a spirally wound spring structure formed integrally from a single material, lossless connection can be performed as an electric circuit.

[0060] Figure 6 : is an explanatory diagram showing the effect of the connector according to the embodiment. Figure 6 In (A), the state where the connector 30 is inserted into the through hole 60 of the electrical connection unit 15 is shown. Figure 6 (B) shows a state where the central elastic portion 35 of the connector 30 is contracted by the contact load. Figure 6 In (C), it means from Figure 6 The contracted state (B) produces an inclined state (slope G) toward the connecting member 30. Figure 6 (B) Figure 6 In (C), in order to facilitate the observation of the drawings, the Figure 6 The symbols of the components of the connector 30 shown in (A) (the first contact portion 31, the upper roll portion 32, the second contact portion 33, the lower roll portion 34, and the central elastic portion 35 are omitted).

[0061] Figure 6 The connecting member 30 and the above Fig. 9 The size of the conventional connector 100 shown is similar. For example, the longitudinal length of the connector 30 and the conventional connector 100 is the same (the length of the stroke is also the same). The outer diameters of the upper roll 32 and the lower roll 34 of the connector 30 are the same as the outer diameter of the main body of the conventional connector 100. Figure 6 The diameter of the through hole 60 is the same as the through hole 110 of FIG. 11 .

[0062] And, it is shown that under the above conditions Figure 6 The slope G of the connecting member 30 (C) is greater than Fig. 9 The slope G of the conventional connector 100 of (C) is small. That is, Figure 6 The slope G of the connecting member 30 of (C) is at least Fig. 9 The slope G of the conventional connector 100 (C) is less than half of that of the conventional connector 100, so that a stable contact with less jitter between the contact parts can be achieved. This is because, in the connector 30, even when the contact load is applied, the gaps (spaces S1 to S4) generated in the through hole 60 are smaller than those in the conventional connector 100.

[0063] In addition, Figure 6 In (C), in order to illustrate the Fig. 9 Unlike the conventional connector 100 of (C), the outer diameters of the upper roll 32 and the lower roll 34 of the connector 30 are set to be the same as the outer diameter of the main body of the conventional connector 100, but the closer the outer diameters of the upper roll 32 and the lower roll 34 of the connector 30 are to the diameter of the through hole 60, the less the slope G is generated in the through hole 60. That is, if the outer diameters of the upper roll 32 and the lower roll 34 of the connector 30 are set to be the same as the diameter of the through hole 60, since no space gap is generated in the through hole 60, the slope G is substantially zero.

[0064] (B) Other Implementation Methods In the above-mentioned embodiment, modified embodiments of the present invention have been described, but the present invention can also be applied to the following embodiments.

[0065] (B-1) In the above embodiment, an example in which the outer diameters of the upper roll portion 32 and the lower roll portion 34 of the connector 30 are the same is shown, but the present invention is not limited thereto. Modifications will be shown below.

[0066] Figure 7 1 is a structural diagram showing the structure of a connector of a modified embodiment. The connector 30A has a structure corresponding to each component of the connector 30 described above. Figure 7 As shown, the connecting member 30A has a first contact portion 31A, an upper rolled portion 32A, a second contact portion 33A, a lower rolled portion 34A and a central elastic portion 35A.

[0067] The connection member 30 is different from the connection member 30A in that the outer diameters of the upper roll portion 32A and the lower roll portion 34A are different. That is, the outer diameter d2 of the lower roll portion 34A is larger than the outer diameter d1 of the upper roll portion 32a.

[0068] exist Figure 7In the example, a through hole 70 for inserting the connector 30A is provided on the electrical connection unit 15, and the connector 30A is inserted into the through hole 70. The inner diameter of the upper through hole 70 is slightly larger than or approximately the same as the outer diameter d1 of the upper roll portion 32a. In addition, the inner diameter of the lower portion of the through hole 70 is slightly larger than the inner diameter of the upper portion of the through hole 70, and a step 71 is provided on the inner surface of the through hole 70. The lower roll portion 34A of the inserted connector 30 is engaged with the step 71 on the inner surface of the through hole 70. The outer diameter d2 of the lower roll portion 34A is the same as the inner diameter of the lower through hole 70, so that the lower roll portion 34A is engaged (contacted) on the step 71.

[0069] As described above, the connector 30A of the deformed embodiment makes the outer diameter d2 of the lower roll portion 34A larger than the outer diameter d1 of the upper roll portion 32a, so that the lower roll portion 34A abuts (engages) with the step 71 of the through hole 70, thereby preventing the spring from falling off even during contact action.

[0070] (B-2) In addition, as a modification of the connector 30, it is possible to express Figure 8 The connector 30B is a connector 30A with a structure that is reversed in vertical direction (each component is different from the Figure 7 Therefore, detailed description is omitted). Figure 8 In the figure, a shell is shown in which the above-mentioned wiring substrate 14 is configured on the lower side. During the contact action, the lower rolled portion 34B is engaged with the step 71 to prevent the connector 30B from falling off to the lower side, and the connector 30B does not tilt. The first contact portion 31B can reliably contact the electrode pad 145 on the wiring substrate 14.

[0071] (B-3) In the above embodiment, an example is shown in which a coil spring winding structure is arranged at the center of the connecting member 30, but the present invention is not limited thereto. That is, there may be a plurality of coil spring winding structures as elastic bodies. In this case, a connecting portion having a structure wound with the same diameter as the upper coil 32 and the lower coil 34 may be provided between the coil spring winding structures. By setting such a configuration, the stroke length of the spring can be increased. Explanation of symbols

[0072] 30, 30P, 30A, 30B…connecting member, 31, 31P, 31A, 31B…first contact portion, 32, 32P, 32A, 32B…upper roll portion, 33, 33P, 33A, 33B…second contact portion, 34, 34P, 34A, 34B…lower roll portion, 35, 35P, 35A, 35B…central elastic portion, 60, 70…through hole, 71…step, M…plate-like member.

Claims

1. An electrical contact, which is formed by a conductive plate-shaped member, wherein the electrical contact is characterized by: A first rolled portion formed by closely rolling the plate-like member with the same diameter, one end of which has a first contact portion that contacts a first contact object; A second rolled portion formed by closely rolling the plate-like member with the same diameter, one end of which has a second contact portion that contacts a second contact object; and One or more elastic parts of a spiral structure are formed by winding the plate-like member with different diameters.

2. The electrical contact according to claim 1, characterized in that: The outer diameters of the first and second wrap portions are approximately the same as the inner diameter of the through hole through which the electrical contact is inserted.

3. The electrical contact according to claim 2, characterized in that: The inner diameter of one side of the through hole is larger than the inner diameter of the other side of the through hole, and a step for engaging the second roll portion is provided on the inner surface of the through hole. The outer diameter of the first coil is approximately the same as the inner diameter of one side of the through hole. The outer diameter of the second coil portion is substantially the same as the inner diameter of the other side of the through hole.

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