Test device, test system, test method, and test program

Abstract

The present invention provides a test apparatus comprising: an image data acquisition unit that acquires image data output by an image sensor, i.e., a device to be tested, on the basis of light of one or more light emission modes corresponding to a plurality of test items; an image processing control unit that transmits the one or more pieces of image data acquired by the image data acquisition unit to two or more image processing devices, and performs image processing according to each of the plurality of test items in parallel by each of the two or more image processing devices; a test result acquisition unit that acquires a test result of a test item according to the image processing derived from a result of the image processing; and a determination unit configured to determine whether the device to be tested is good or not based on the test result of each test item acquired by the test result acquisition unit.

Description

Technical Field

[0001] The invention relates to a test device, a test system, a test method and a test procedure. Background Art

[0002] Patent Document 1 states that "an image signal outputted from a terminal in contact with an image sensor to be tested is taken in ... and image processing is performed ... to determine whether the image is good or bad" (claim 1) and the like.

[0003] [Prior art literature]

[0004] [Patent Document]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 4-3686 Summary of the invention

[0006] In a first aspect of the present invention, a test device is provided, comprising: an image data acquisition unit, which acquires each image data output by an image sensor, i.e., a device to be tested, based on light of one or more light emission modes corresponding to a plurality of test items; an image processing control unit, which sends one or more image data acquired by the image data acquisition unit to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; a test result acquisition unit, which acquires a test result of the test item according to the image processing derived from the result of the image processing; and a determination unit, which determines whether the device to be tested is good or not based on the test results of each test item acquired by the test result acquisition unit.

[0007] In the test device, the image processing control unit may send the identification information of the device to be tested together with the image data to the two or more image processing devices; and the test result acquisition unit may acquire the identification information of the device to be tested together with the test result.

[0008] In any of the test devices, the image processing control unit may include: a detection unit that detects the state of each image processing device; a first selection unit that selects each test item in sequence as a test item to be executed; a second selection unit that selects, from a plurality of image processing devices, an image processing device excluding at least one of an image processing device in an execution state and an image processing device in a fault state according to the test item to be executed being selected; and an execution instruction unit that sends image data to the image processing device selected by the second selection unit among the plurality of image processing devices, and executes image processing according to the test item to be executed.

[0009] In the test device, the second selection unit may select, from among the plurality of image processing devices, an image processing device that performs image processing according to the test item to be executed, based at least on processing performance of each image processing device.

[0010] In the test device, the second selection unit may select the image processing device having the highest processing performance among the plurality of image processing devices.

[0011] In any of the test devices in which the image processing control unit includes the first selection unit, the first selection unit may preferentially select a test item corresponding to image processing requiring a long time from among the plurality of test items.

[0012] In any of the test devices wherein the image processing control unit includes the first selection unit, the first selection unit may select, in a discrete order, a test item corresponding to image processing that requires a longer time than a reference.

[0013] In any of the test devices, at least one of the two or more image processing devices may be installed in at least one server device; and the test device may further include a communication unit for communicating with each server device.

[0014] In the test device, any one of the at least one server device may be a cloud server.

[0015] Any of the test devices may further include an image processing unit as one of the two or more image processing devices for performing image processing on the image data. The image processing control unit may supply the image data acquired by the image data acquisition unit to the image processing unit and perform image processing according to a part of the plurality of test items.

[0016] In the test device, the image processing control unit may cause the image processing unit to perform image processing when a communication line between the image processing unit and each image processing unit different from the image processing unit among the two or more image processing units is busy.

[0017] Any of the test devices may further include a statistics unit for performing statistics on pixel values ​​in the image data acquired by the image data acquisition unit for each device under test. The determination unit may determine that a device under test is defective and invalidate image processing for the device under test based on the fact that the statistics result for the device under test does not meet the reference condition.

[0018] Any of the test devices may further include a light source for irradiating the device under test with light of the one or more light emission modes.

[0019] According to a second aspect of the present invention, there is provided a test system including: a plurality of test devices according to any one of the first aspects; and a plurality of image processing devices shared by the plurality of test devices.

[0020] In the test system, the image processing control unit of each test device may include: a detection unit that detects the state of each image processing device; a first selection unit that selects each test item in sequence as a test item to be executed; a second selection unit that selects, from the multiple image processing devices, an image processing device excluding at least one of an image processing device in an execution state and an image processing device in a fault state according to the test item to be executed being selected; and an execution instruction unit that sends image data to the image processing device selected by the second selection unit among the multiple image processing devices, and executes image processing according to the test item to be executed.

[0021] In the second aspect of the test system, a control device may be provided to control the test performed by each test device; each test device may include: a first selection unit that sequentially selects each test item as a test item to be executed; a first transmission unit that transmits a selection request signal of an image processing device to the control device in response to the selection of the test item to be executed; and an execution instruction unit that transmits image data to the image processing device selected by the control device among the plurality of image processing devices and executes image processing according to the test item to be executed. The control device may include: a detection unit that detects the state of each image processing device; a third acquisition unit that sequentially acquires the selection request signal from each test device; a third selection unit that selects an image processing device excluding at least one of an image processing device in an execution state and an image processing device in a fault state from the plurality of image processing devices in response to the acquisition of the selection request signal; and a second transmission unit that transmits identification information of the image processing device selected by the third selection unit to the test device that is the transmission source of the selection request signal.

[0022] In a third aspect of the present invention, a test method is provided, comprising: an image data acquisition stage, in which each image data output by an image sensor, i.e., a device to be tested, is acquired based on light of one or more light emission modes corresponding to a plurality of test items; an image processing control stage, in which one or more image data acquired in the image data acquisition stage are sent to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; a test result acquisition stage, in which a test result of the test item according to the image processing derived from the result of the image processing is acquired; and a judgment stage, in which the quality of the device to be tested is judged based on the test results of each test item acquired through the test result acquisition stage.

[0023] In a fourth aspect of the present invention, a test program is provided, which enables a computer to function as the following components: an image data acquisition unit, which acquires each image data output by an image sensor, that is, a device to be tested, based on light of one or more light emission modes corresponding to a plurality of test items; an image processing control unit, which sends one or more image data acquired by the image data acquisition unit to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; a test result acquisition unit, which acquires a test result of the test item according to the image processing derived from the result of the image processing; and a judgment unit, which judges whether the device to be tested is good or not based on the test results of each test item acquired by the test result acquisition unit.

[0024] In addition, the above-described invention does not list all the essential features of the present invention. Moreover, sub-combinations of these feature groups may also constitute inventions. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] [ Figure 1 ] represents a test system 1 related to an embodiment.

[0026] [ Figure 2 ] represents an example of the correspondence between the light emission mode, the test items and the image processing.

[0027] [ Figure 3 ] represents the action of the first processing related to the test device 2.

[0028] [ Figure 4 ] represents the action of the second processing related to the test device 2.

[0029] [ Figure 5 ] represents a test system 1A related to a variation.

[0030] [ Figure 6] The action of the first processing related to the test device 2A is represented together with the action of the control device 5.

[0031] [ Figure 7 ] represents an example of a computer 2200 in which various aspects of the present invention can be implemented in whole or in part. DETAILED DESCRIPTION

[0032] The present invention will be described below through the embodiments of the invention, but the following embodiments do not limit the invention of the claims. In addition, the solution means of the invention do not necessarily require all combinations of the features described in the embodiments.

[0033] <1. Test system 1>

[0034] Figure 1 The test system 1 according to the present embodiment is shown. The test system 1 includes a device under test 100 as a test object, a plurality of test devices 2, and a plurality of server devices 3 equipped with a plurality of image processing devices 30 shared by the plurality of test devices 2.

[0035] <1-1. Device to be tested 100>

[0036] The device under test 100 is an image sensor, for example, a complementary metal oxide semiconductor (CMOS) sensor or a charge coupled device (CCD) sensor. In this embodiment, as an example, a plurality of devices under test 100 are formed on a wafer, the wafer may be cut to form a single device under test, or the device under test may be further sealed and packaged.

[0037] The device to be tested 100 may have a terminal that can be externally connected, and image data according to the irradiated light may be output from the terminal. The image data may include a pixel value representing the shade and brightness of the color of each pixel. For example, the image data may be image data of a grayscale image, and each pixel may include a pixel value representing the shade of black and white. Alternatively, the image data may be image data of a color image, and each pixel may include a pixel value representing the shade of each color such as red, green, and blue (RGB).

[0038] <1-2. Test device 2>

[0039] Each test device 2 performs a test on one or more devices to be tested 100. In the present embodiment, as an example, each test device 2 can perform a test on each device to be tested 100 on a wafer. Each test device 2 can perform a test including two or more test items; in the present embodiment, as an example, a test of N test items (where N is a natural number greater than 2) can be performed. In the test of each test item, by irradiating the device to be tested 100 with light of one or more light emission modes corresponding to the test item, one or more image data output from the device to be tested 100 can be obtained, and image processing corresponding to the test item can be performed on the image data to obtain the test result. Although the details will be described later, the so-called image processing can be a process of extracting certain information from the image data.

[0040] Each test device 2 includes a light source 20 , an image data acquisition unit 21 , an image processing control unit 22 , an image processing unit 23 , a statistical unit 24 , a communication unit 28 , a test result acquisition unit 26 , and a determination unit 27 .

[0041] <1-2.1. Light source 20>

[0042] The light source 20 irradiates light of one or more luminous modes corresponding to the N test items to each device under test 100. The light source 20 may be disposed on a test head, and the test head is disposed opposite to the device under test 100. The light source 20 may irradiate light to each device under test 100 on the wafer. Thus, image data may be output from each device under test 100 irradiated with light.

[0043] One light emission pattern may be light that is irradiated only for a time that allows one image to be captured depending on the device under test 100. One light emission pattern may correspond to one or more test items and may be irradiated while performing a test of the one or more test items.

[0044] The light of the plurality of light emission modes may be light that is irradiated only for a time period that allows a plurality of images to be captured, depending on the device to be tested 100. The light of the plurality of light emission modes may have different intensities and wavelengths because at least one of the irradiation position and the irradiation time is different from each other. The light of the plurality of light emission modes may correspond to one or more test items, and may be irradiated while performing the test of the one or more test items.

[0045] The number of light emission patterns may be the same as the number of image data that should be output from the device under test 100 in order to perform the test of N test items, and may be the same as the number of image data acquired by the image data acquisition section 21 .

[0046] <1-2.2. Image data acquisition unit 21>

[0047] The image data acquisition unit 21 acquires image data outputted by the DUT 100 according to light of one or more light emission patterns corresponding to the N test items. The image data acquisition unit 21 can acquire image data outputted by each DUT 100 according to light irradiated from the light source 20 .

[0048] The image data acquisition unit 21 can supply the acquired image data to the execution instruction unit 223 described later in the image processing control unit 22. The image data acquisition unit 21 can supply the identification information of the device under test 100 to which the image data is outputted together with the image data to the execution instruction unit 223. Furthermore, the image data acquisition unit 21 can supply the identification information of the wafer included in the device under test 100 to which the image data is outputted together with the image data to the execution instruction unit 223.

[0049] <1-2.3. Image processing control unit 22>

[0050] The image processing control unit 22 sends one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30, so that each image processing according to the N test items is performed in the two or more image processing devices 30. The image processing control unit 22 can make the image processing according to each test item among the N test items be performed in parallel by each of the two or more image processing devices 30. In the present embodiment, as an example, the image processing control unit 22 can make the image processing according to M test items (where M is a natural number of 2≦M≦N) among the N test items be performed in parallel by each of the two or more image processing devices 30. The image processing control unit 22 can also make the image processing be performed in parallel in a plurality of test items corresponding to one light emission pattern, or can make the image processing be performed in parallel in a plurality of test items corresponding to a plurality of light emission patterns. In addition, the so-called two or more image processing being performed in parallel can be performed in a manner that at least a part of the processing time of the two or more image processing is overlapped. The number of image processing devices 30 to which the image data is transmitted from the image processing control unit 22 may be the same as or different from the number N, M of test items.

[0051] The image processing control unit 22 includes a detection unit 220 , a first selection unit 221 , a second selection unit 222 , and an execution instruction unit 223 .

[0052] <1-2.3.1. Detection Unit 220>

[0053] The detection unit 220 detects the state of each image processing device 30. The detection unit 220 can communicate with each image processing device 30 included in the test system 1 to detect the state of the image processing device 30. The detection unit 220 can detect the state of each image processing device 30 by a conventionally well-known method. The detection unit 220 can detect whether each image processing device 30 is in a standby state, an image processing execution state, or a fault state. The detection unit 220 can supply the detected state of each image processing device 30 to the second selection unit 222.

[0054] <1-2.3.2. First selection unit 221>

[0055] The first selection unit 221 sequentially selects each test item as a test item to be executed. The test item to be executed may be a test item for executing image processing.

[0056] The first selection unit 221 may select a test item to be executed from the N test items. The first selection unit 221 may preferentially select a test item corresponding to an image processing requiring a longer time from the N test items. The required time for the image processing may be measured in advance by performing the image processing using one or more image data previously acquired.

[0057] The first selection unit 221 may also obtain identification information of the light pattern irradiated on the device under test 100 from the light source 20 or the like, and select any one test item from the M test items corresponding to the light pattern. The first selection unit 221 may supply identification information of the selected test item to the second selection unit 222.

[0058] <1-2.3.3. Second selection unit 222>

[0059] The second selection unit 222 selects any one of the image processing devices 30 included in the test system 1, according to the test item to be executed selected by the first selection unit 221. The second selection unit 222 may select an image processing device 30 excluding at least one of the image processing device 30 in the execution state and the image processing device 30 in the failure state from the plurality of image processing devices 30 included in the test system 1. The second selection unit 222 may select the image processing device 30 in the standby state from the plurality of image processing devices 30. The second selection unit 222 may supply the identification information of the test item to be executed and the identification information of the selected image processing device 30 to the execution instruction unit 223.

[0060] <1-2.3.4. Execution instruction unit 223>

[0061] The execution instruction unit 223 transmits the image data to the image processing device 30 selected by the second selection unit 222 among the plurality of image processing devices 30, and executes the image processing according to the test item to be executed. The execution instruction unit 223 may execute the image processing in each image processing device 30 regardless of whether the test result of the test item according to the image processing is acquired by the test result acquisition unit 26. Thus, the image processing according to the M test items can be executed in parallel by two or more image processing devices 30.

[0062] The execution instruction unit 223 may transmit the identification information of the test item to be executed together with the image data to the image processing apparatus 30 selected by the second selection unit 222. Furthermore, the execution instruction unit 223 may transmit the identification information of the device under test 100 that has output the image data together with the image data to each image processing apparatus 30 that has performed image processing. Furthermore, the execution instruction unit 223 may transmit the identification information of the wafer included in the device under test 100 that has output the image data and the identification information of the test apparatus 2 included in the execution instruction unit 223 together with the image data to each image processing apparatus 30 that has performed image processing.

[0063] <1-2.4. Image processing unit 23>

[0064] The image processing unit 23 performs image processing on the image data. The image processing unit 23 may function as one of the plurality of image processing devices 30 included in the test system 1, and may be instructed to perform image processing by the image processing control unit 22. In this case, the image processing unit 23 may be supplied with the image data acquired by the image data acquisition unit 21 from the image processing control unit 22, and perform image processing according to a part of the N test items. The image processing unit 23 may be one of two or more image processing devices 30 that perform image processing in parallel by an instruction from the image processing control unit 22. The image processing unit 23 may perform image processing corresponding to the identification information of the test item supplied from the execution instruction unit 223.

[0065] Here, image processing may be processing for extracting certain information from image data. For example, image processing may be processing for calculating an average of pixel values, processing for calculating an index value of sensitivity of the device under test 100, processing for calculating an index value of uniformity of pixel values, processing for calculating an index value of noise characteristics of the device under test 100, processing for calculating a standard deviation of pixel values ​​in at least a part of an area of ​​image data, or processing for detecting points and lines of unintended pixel values.

[0066] Furthermore, the processing performance of the image processing unit 23 may be lower than the processing performance of the image processing device 30 outside the test device 2. As an example, the clock frequency of the image processing unit 23 may be lower than the clock frequency of the image processing device 30.

[0067] The image processing unit 23 may supply data indicating the result of the image processing and the identification information of the device under test 100 to the test result acquisition unit 26. When the identification number of the test item and the identification number of the wafer included in the device under test 100 are supplied from the execution instruction unit 223, the image processing unit 23 may further supply the identification information of the test item and the identification information of the wafer included in the device under test 100 to the test result acquisition unit 26 together with the data indicating the result of the image processing.

[0068] <1-2.5. Statistics Department 24>

[0069] The statistics section 24 performs statistics on the pixel values ​​in the image data acquired by the image data acquisition section 21 for each device under test 100. When the image data represents a grayscale image, the statistics section 24 can perform statistics on the pixel values ​​representing the shades of black and white. When the image data represents a color image, the statistics section 24 can perform statistics on the pixel values ​​for the constituent colors such as RGB. The statistics section 24 can calculate statistical results representing the dispersion and average of the pixel values. The statistics section 24 can supply the calculated statistical results to the determination section 27.

[0070] <1-2.6. Test result acquisition unit 26>

[0071] The test result acquisition unit 26 acquires the test result of the test item derived from the image processing result. When the identification information of the device under test 100 is sent to the image processing device 30 together with the image data, the test result acquisition unit 26 can acquire the identification information of the device under test 100 together with the test result.

[0072] The test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing. If the result of the image processing indicates the test result of the test item, the test result acquisition unit 26 may also acquire the result of the image processing as the test result.

[0073] The test result acquisition section 26 may supply the acquired test result to the determination section 27. The test result acquisition section 26 may supply the test result to the determination section 27 together with the identification information of the device to be tested 100 and the identification information of the wafer.

[0074] <1-2.7. Determination Unit 27>

[0075] The determination section 27 determines whether the device to be tested 100 is good or bad based on the test results of the test items acquired by the test result acquisition section 26. The determination section 27 may output the determination result to the outside of the test apparatus 2.

[0076] The determination unit 27 determines the quality of the device under test 100 based on the test results of at least a part of the N test items. In addition, the determination unit 27 can determine the quality of the device under test 100 based on the statistical results generated by the statistical unit 24. The determination unit 27 can determine that the device under test 100 is defective based on the fact that the statistical results on the device under test 100 do not meet the reference condition. The determination unit 27 can disable the image processing on the device under test 100 based on the fact that the statistical results on the device under test 100 do not meet the reference condition.

[0077] Here, the statistical result of the pixel value does not satisfy the reference condition, which means that the value representing the statistical result (for example, the dispersion and average of the pixel value) is outside the reference range. The image processing for the device under test 100 determined to be defective is invalidated, which means that the operation of the image processing control unit 22 for the device under test 100 is stopped, or the image processing in progress is stopped.

[0078] <1-2.8. Communications Department 28>

[0079] The communication unit 28 communicates with each server device 3. Thus, each unit of the test device 2 and each image processing device 30 of the server device 3 can communicate with each other. For example, the detection unit 220 can detect the state of each image processing device 30 via the communication unit 28. The execution instruction unit 223 can send image data to each image processing device 30 via the communication unit 28. The test result acquisition unit 26 can acquire the result of image processing, etc. via the communication unit 28.

[0080] The communication network between the communication unit 28 and the server device 3 may include various networks such as the Internet, a wide area network (WAN), a local area network (LAN), or a combination thereof. The communication network may include connection points via at least one of wired or wireless methods. The communication network may also be implemented by a dedicated line separated from a public line such as the Internet.

[0081] <1-3. Server device 3>

[0082] Each server device 3 provides various functions in response to a request from the test device 2. In each server device 3 according to the present embodiment, one or more image processing devices 30 are installed, and image processing is performed in response to a request from the test device 2.

[0083] Each server device 3 may be arranged near the test device 2 (as an example, arranged in the same device as the test device 2), or may be arranged remote from the test device 2 (as an example, arranged in a device different from the test device 2). Any of the plurality of server devices 3 may be a cloud server. As an example, the plurality of server devices 3 may be cloud servers respectively, and a part of the plurality of server devices 3 may be cloud servers. A cloud server may be a server constructed in a cloud environment.

[0084] <1-3.1. Image processing device 30>

[0085] Each image processing device 30 executes the image processing instructed by the execution instruction unit 223 on the image data supplied from the execution instruction unit 223 of each test device 2. The image processing instructed by the execution instruction unit 223 may be image processing corresponding to the identification information of the test item supplied from the execution instruction unit 223. Each image processing device 30 may store in advance the identification information of the test item and the correspondence information of the content of the image processing corresponding to the test item, and may detect the image processing corresponding to the identification information of the test item supplied from the execution instruction unit 223 from the correspondence information.

[0086] Each image processing device 30 can obtain information representing characteristics of the device under test 100 from image data by performing image processing. Each image processing device 30 can include a graphics processing unit (GPU) or a central processing unit (CPU).

[0087] Each image processing device 30 can supply data indicating the result of image processing and identification information of the device under test 100 to the test result acquisition unit 26. In addition, each image processing device 30 can supply identification information of the test item and identification information of the wafer included in the device under test 100 supplied from the execution instruction unit 223 to the test result acquisition unit 26 together with the data indicating the result of image processing.

[0088] Each image processing device 30 can transmit data indicating the result of image processing to the test device 2 including the execution instruction unit 223 as the transmission source of the image data. As an example, each image processing device 30 can transmit data indicating the result of image processing to the test device 2 indicated by the identification information of the test device 2 transmitted together with the image data.

[0089] According to the above test device 2, each image data outputted by the device under test 100 is sent to two or more image processing devices 30 according to the light of one or more light emission patterns corresponding to a plurality of test items, and the image processing according to the respective test items is performed in parallel. Then, the test results of the test items according to these image processing are obtained, and the quality of the device under test 100 is determined based on the test results of each test item. Therefore, compared with the case where a plurality of image processing is sequentially performed by the same image processing device 30, the time until the determination can be shortened.

[0090] Furthermore, the identification information of the device under test 100 is sent to the image processing device 30 together with the image data, so that the identification information of the device under test 100 and the test result can be acquired together, so that the test result can be correctly associated with the device under test 100 .

[0091] Furthermore, according to each test item selected as the test item to be executed, any one of the image processing devices 30 excluding at least one of the image processing device 30 in the execution state and the image processing device 30 in the failure state is selected from the plurality of image processing devices 30. Then, the image data is sent to the selected image processing device 30, and the image processing according to the test item to be executed is executed. Therefore, it is possible to reliably select the image processing device 30 that can be used to execute the image processing.

[0092] Furthermore, since the test items corresponding to the image processing that takes a long time are selected as the execution objects first, the test items that take a long time to process the image can be finished first. Therefore, it is possible to prevent the test items that take a long time to process the image from becoming a bottleneck and slowing down the determination, thereby speeding up the determination.

[0093] Furthermore, the plurality of image processing devices 30 are built into the plurality of server devices 3 , and the test device 2 communicates with each server device 3 , so that the image processing devices 30 built into the server devices 3 can be used for testing.

[0094] Furthermore, since any of the server devices 3 is a cloud server, the image processing device 30 built in the cloud server can be used for testing.

[0095] The test device 2 is further provided with an image processing unit 23, and the acquired image data is supplied to the image processing unit 23, so that image processing according to a part of the test items can be performed. Therefore, the image processing unit 23 in the test device 2 can be used for the test.

[0096] Furthermore, since the test device 2 is further provided with the light source 20 , the irradiation of light, the acquisition of image data, and the transmission of image data to the image processing device 30 are performed in conjunction with each other, and the test time can be further shortened.

[0097] Furthermore, statistics of pixel values ​​in the acquired image data are performed for each device under test 100, and based on the fact that the statistical result on one device under test 100 does not satisfy the reference condition, the one device under test 100 is determined to be defective, and thus the image processing on the one device under test 100 is invalidated. Therefore, it is possible to prevent the image processing on the device under test 100 determined to be defective based on the statistical result of the pixel values ​​from being wastefully performed.

[0098] Furthermore, since the test system 1 includes the plurality of test devices 2 and the plurality of image processing devices 30 shared by the plurality of test devices 2 , the number of image processing devices 30 can be reduced, unlike a case where the plurality of test devices 2 have their own image processing devices 30 and use them individually.

[0099] Furthermore, in the plurality of test devices 2, one image processing device 30 is selected from the plurality of test items according to the test items to be executed, and any one image processing device 30 is selected from the plurality of image processing devices 30 except at least one of the image processing device 30 in the execution state of image processing and the image processing device 30 in the failure state. Then, the image data is sent to the selected image processing device 30, and the instruction to execute the image processing according to the test item to be executed is executed. Therefore, the plurality of test devices 2 can respectively select the image processing device 30 that can be used to execute the image processing.

[0100] <2. Specific examples of light emission patterns, test items, and image processing>

[0101] Figure 2 An example of the correspondence between the light emission pattern of the light source 20, the test items, and the image processing is shown. Figure 2 The plurality of test items shown may be at least a part of the N test items to be performed in the test device 2. Figure 2 At least a portion of the plurality of test items shown may be M test items in which image processing is performed in parallel.

[0102] The light emission mode "ColorBar" of the light source 20 may correspond to the test item "ColorBar". The light emission mode of "ColorBar" may be a light emission mode that causes the device under test 100 to output image data of a color bar. In the test of the test item "ColorBar", the brightness level and color of the device under test 100 may be calculated by image processing of the image data.

[0103] The light emission mode "DARK" of the light source 20 can correspond to the test items of "Sensitivity", "Uniformity" and "Noise". As an example, the light emission mode of "DARK" can be a light emission mode that causes the device under test 100 to output image data with the entire surface being black. In the test of the test item of "Sensitivity", the output level (for example, average) of the pixel value can be calculated by image processing of the image data. In the test of the test item of "Uniformity", the index value of the uniformity of the device under test 100 can be calculated by image processing of the image data.

[0104] The light emission mode "STANDARD" of the light source 20 may correspond to the test items of "Sensitivity", "Sensitivity Ratio" and "Uniformity". The light emission mode of "STANDARD" may be a light emission mode that causes the device under test 100 to output a preset standard image data. In the test of the test item of "Sensitivity Ratio", the ratio of the pixel values ​​between the colors of the device under test 100 may be calculated by image processing of the image data.

[0105] <3. Action>

[0106] <3.1. First treatment>

[0107] Figure 3 The following is an operation related to the first process of the test apparatus 2. The test apparatus 2 acquires image data from the device under test 100 by executing the processes of step S11 to step S33, and causes the plurality of image processing apparatuses 30 to execute the image processing.

[0108] In step S11, the light source 20 irradiates light to one or more devices under test 100. In the present embodiment, as an example, the light source 20 irradiates light to a single device under test 100 in one step S11, or irradiates light to a plurality of devices under test 100 collectively.

[0109] The light source 20 can irradiate light of one or more luminous modes corresponding to the test of any one or more test items. Thus, by performing the process of step S11 at least once, light of one or more luminous modes corresponding to multiple test items (in this embodiment, as an example, M test items) is irradiated. In addition, when the light is irradiated to the device to be tested 100, the shutter (exposure time) and gain, image size, one time programmable memory (OTP), etc. can be appropriately set for the light source 20 and the device to be tested 100.

[0110] In step S13, the image data acquisition unit 21 acquires each image data outputted by the device under test 100 according to the irradiated light. Thus, by executing the process of step S13 at least once, each image data outputted by the device under test 100 can be acquired according to the light of one or more light emission patterns corresponding to the M test items executed in parallel with the image processing. In addition, in step S11, when a plurality of devices under test 100 are collectively irradiated with light, in step S13, the image data acquisition unit 21 can acquire image data for each device under test 100. In this case, the processes of steps S15 to S31 described later can be executed for each device under test 100 irradiated with light.

[0111] In step S15, the statistics section 24 performs statistics on the pixel values ​​in the acquired image data for each device under test 100. In the most recent step S11, when the device under test 100 is irradiated with light of multiple light emission modes, the statistics section 24 may perform statistics on each acquired image data. The statistics section 24 may calculate statistical results indicating dispersion and average of pixel values.

[0112] In step S17, the determination unit 27 determines whether the statistical result satisfies the reference condition. As an example, the determination unit 27 may determine whether the dispersion and average of the pixel values ​​are outside the reference range. When it is determined that the statistical result satisfies the reference condition (step S17 is "Yes"), the process may be transferred to step S23. When it is determined that the statistical result does not satisfy the reference condition (step S17 is "No"), the process may be transferred to step S19.

[0113] In step S19, the determination unit 27 invalidates the image processing for the device under test 100 that outputs the image data whose statistical results do not satisfy the reference condition. As an example, the determination unit 27 may stop the image processing for which the execution instruction has been executed in step S29 described later on the image data output from the device under test 100. Furthermore, the determination unit 27 may terminate the first processing after step S21 described later so as not to execute the processing after step S23 described later on the image data output from the device under test 100.

[0114] In step S21, the determination unit 27 determines that the device under test 100 outputting the image data whose statistical results do not satisfy the reference condition is defective. Once step S21 is completed, the first process may be completed or the first process may be repeated for another device under test 100.

[0115] In step S23, the first selection unit 221 selects a test item to be executed. Thus, by repeating the process of step S23, test items to be executed can be selected one by one. In step S23, the first selection unit 221 can select a single test item that has not been selected yet.

[0116] The first selection unit 221 may also obtain identification information of the light pattern irradiated on the device under test 100 from the light source 20, and select any one of the M test items corresponding to the light pattern. In this embodiment, as an example, the first selection unit 221 may select the test item corresponding to the image processing requiring the longest time from the M test items corresponding to the irradiated light pattern. Thus, the test item corresponding to the image processing requiring a long time may be preferentially selected from the M test items corresponding to the irradiated light pattern.

[0117] In step S25, the detection unit 220 detects the state of each image processing device 30. The detection unit 220 can detect whether each image processing device 30 included in the test system 1 is in any of a standby state, an image processing execution state, and a failure state.

[0118] In step S27, the second selection unit 222 selects any one of the image processing devices 30 included in the test system 1. The second selection unit 222 may select an image processing device 30 excluding at least one (in the present embodiment, both as an example) of the image processing device 30 in the state of executing image processing and the image processing device 30 in the state of failure from the plurality of image processing devices 30 included in the test system 1. The image processing device 30 in the state of executing image processing may be an image processing device 30 in the state of executing image processing by an instruction from the test device 2 including the second selection unit 222, or an image processing device 30 in the state of executing image processing by an instruction from another test device 2. The second selection unit 222 may select the image processing unit 23 as the image processing device 30.

[0119] The second selection unit 222 may select the image processing device 30 that performs the image processing according to the test item to be performed based on at least the processing performance of each image processing device 30. The so-called selecting the image processing device 30 based on the processing performance of each image processing device 30 may, for example, refer to preferentially selecting the image processing device 30 with high processing performance or the image processing device 30 with low processing performance. The second selection unit 222 may select a single image processing device 30. In the present embodiment, as an example, the second selection unit 222 may select the image processing device 30 with the highest processing performance among the plurality of image processing devices 30. The processing performance of the image processing device 30 may, for example, be at least one of a clock frequency, a thermal design power, a power efficiency, a memory capacity, and a memory bandwidth. In the case where the second selection unit 222 selects the image processing device 30 based on the processing performance of each image processing device 30, the processing performance of each image processing device 30 may be pre-stored in the second selection unit 222.

[0120] Furthermore, the second selection unit 222 may select an image processing device 30 based on at least one of the load of image processing according to the test item to be executed and the number of pixels of the device to be tested 100 in addition to the processing performance of each image processing device 30. For example, when the load of image processing of the test item to be executed is larger than the reference, the second selection unit 222 may select an image processing device 30 having a processing performance higher than the reference. Thus, even when the load of image processing is large, image processing can be reliably executed. When the number of pixels of the device to be tested 100 is larger than the reference, the second selection unit 222 may select an image processing device 30 having a processing performance (for example, memory capacity and memory bandwidth) higher than the reference. Thus, even when the amount of image data is large, image processing can be reliably executed. The load of image processing according to the test item to be executed may be the required time for image processing measured in advance by any image processing device 30, or the amount of data generated during the operation of image processing.

[0121] In the case where the second selection unit 222 selects the image processing device 30 based on the image processing load, the second selection unit 222 may store in advance corresponding information of the identification information of each test item and information indicating the image processing load corresponding to the test item; the second selection unit 222 may detect the image processing load corresponding to the identification information of the test item supplied from the first selection unit 221 from the corresponding information. In the case where the second selection unit 222 selects the image processing device 30 based on the number of pixels of the device under test 100, the information indicating the number of pixels may be acquired from the image data acquisition unit 21.

[0122] In step S29, the execution instruction unit 223 sends one or more image data acquired by the image data acquisition unit 21 to the image processing device 30, and executes the image processing according to the test item. In the present embodiment, as an example, the execution instruction unit 223 can send the image data to a single image processing device 30 in one step S29 and execute the image processing. As a result, the image data is sent to two or more image processing devices 30, namely, the image processing device 30 that is the target of the current step S29 and the image processing device 30 that is the target of one or more steps S29 before or after the previous time, so that the image processing according to the respective test items can be executed in parallel.

[0123] The execution instruction unit 223 may send the image data to the image processing unit 30 selected by the second selection unit 222 among the plurality of image processing units 30, and execute the image processing according to the test item to be executed. When the image processing unit 23 is selected as the image processing unit 30, the execution instruction unit 223 may also send the image data to the image processing unit 23 and execute the image processing.

[0124] In step S31, the first selection unit 221 determines whether all M test items corresponding to the light emission pattern irradiated on the device under test 100 in step S11 have been selected in step S23. If it is determined that at least one test item has not been selected (step S31 is "No"), the process can be transferred to the above-mentioned step S23. If it is determined that all test items have been selected (step S31 is "Yes"), the process can be transferred to step S33.

[0125] In step S33, it is determined whether the light source 20 has irradiated lights of all the luminous patterns corresponding to the N test items. In the case where it is determined that the lights of all the luminous patterns have not been irradiated (step S33 is "No"), the process can be transferred to step S11. In this case, before the test results of the test items corresponding to the luminous patterns irradiated in the previously executed step S11 are obtained in step S43 described later, in the next step S11, the lights of the luminous patterns corresponding to other test items can be irradiated. In addition, a device under test 100 different from the device under test 100 irradiated in the most recent step S11 can be irradiated in the next step S11. In this case, a device under test 100 on a wafer different from the device under test 100 irradiated in the most recent step S11 can be irradiated in the next step S11. In the case where it is determined that the lights of all the luminous patterns have been irradiated (step S33 is "Yes"), the first process can be terminated.

[0126] According to the above operation, the image processing device 30 for executing the image processing according to the test item to be executed can be selected based at least on the processing performance of each image processing device 30. Therefore, among the plurality of image processing devices 30, a more appropriate image processing device 30 can execute the image processing.

[0127] Furthermore, since the image processing device 30 having the highest processing performance can be selected from among the plurality of image processing devices 30 , the image processing device 30 having the highest processing performance can be caused to perform image processing.

[0128] In the above operation, the image processing is instructed to be performed on the image processing device 30 selected from the plurality of image processing devices 30 except for at least one of the image processing device 30 in the execution state and the image processing device 30 in the failure state. However, the image processing may be instructed to be performed on other image processing devices 30. For example, in step S29, the execution instruction unit 223 of the image processing control unit 22 may instruct the image processing unit 23 in the test device 2 to perform the image processing based on the fact that the communication line between the image processing device 30 and each image processing device 30 different from the image processing unit 23 in the test system 1 is busy. In this case, in step S25, the detection unit 220 may detect whether the communication line between each image processing device 30 is busy. In step S27, the second selection unit 222 of the image processing control unit 22 may select the image processing unit 23 in the test device 2, and in step S29, the execution instruction unit 223 may send the image data to the image processing unit 23 to perform the image processing. Alternatively, when the communication line is busy, the execution instruction unit 223 may send the image data to the image processing unit 23 in the test device 2 and execute the image processing in step S29, regardless of the image processing device 30 selected by the second selection unit 222 in step S27. Thus, even if the communication line is busy, the image processing can be executed and the test can proceed.

[0129] <3.2. Second treatment>

[0130] Figure 4 The second processing operation of the test device 2 is shown. The test device 2 performs the determination of the device under test 100 by performing the processing of step S41 to step S47. The second processing operation may be started based on the fact that the first processing operation has been started, or may be performed in parallel with the first processing. Furthermore, the second processing operation may be performed in parallel for each device under test 100 based on the identification information of the device under test supplied from the image processing device 30 together with the result of the image processing.

[0131] In step S41, the test result acquisition unit 26 determines whether the result of image processing has been received. The test result acquisition unit 26 may receive the result of image processing from the image processing device 30 outside the test device 2, or may receive the result of image processing from the image processing unit 23 inside the test device 2. In step S41, if it is determined that the result of image processing has not been received (step S41 is "No"), the process of step S41 may be repeated. In step S41, if it is determined that the result of image processing has been received (step S41 is "Yes"), the process may be transferred to step S43.

[0132] In step S43, the test result acquisition unit 26 acquires the test result of the test item according to the image processing derived from the result of the image processing. The test result acquisition unit 26 may derive the test result of the test item corresponding to the image processing from the data indicating the result of the image processing. In the case where the result of the image processing indicates the test result of the test item, the test result acquisition unit 26 may also acquire the result of the image processing as the test result.

[0133] In step S45, the determination unit 27 determines whether all test results for the N test items have been acquired. If it is determined that the test results for one or more of the N test items have not been acquired (step S45 is "No"), the process may be transferred to the above step S41. If it is determined that all test results for the N test items have been acquired (step S45 is "Yes"), the process may be transferred to step S47.

[0134] In step S47, the determination section 27 determines the quality of the device under test 100 based on the acquired test results of the respective test items. Once the process of step S47 is completed, the second process may be completed.

[0135] In addition, in the above operation, it is described that the quality of the device under test 100 is determined after all the test results for N test items have been obtained, but the quality may be determined before the test results for all the test items are obtained. For example, the determination unit 27 may determine that the device under test 100 that has output the image data as the object of the image processing is defective, based on the fact that the result of the image processing has not been received for a reference time since the execution of the image processing is instructed by the processing of step S29. The reason why the result of the image processing has not been received for a reference time may be that the image data is abnormal, or that the image processing device 30 that performs the image processing is abnormal. The reason why the image data is abnormal may be that the device under test 100 is abnormal, or that the light source 20 is abnormal. In the case where the result of the image processing has not been received, the device under test 100 is determined to be defective without retesting, thereby preventing the reduction of yield due to the extension of the test time.

[0136] Furthermore, in step S11, when a plurality of DUTs 100 are collectively irradiated with light, the determination unit 27 may further determine that a DUT 100 that has not received the image processing result for more than the reference time is defective together with the other DUTs 100 irradiated with light. This can reliably prevent a reduction in yield.

[0137] <2. Test system 1A related to the modified example>

[0138] Figure 5 FIG. 1 shows a test system 1A according to a variation. The test system 1A includes: one or more test devices 2A, and a control device 5. The test system 1A is different from the test system 1 mainly in that the control device 5 selects an image processing device 30 for performing image processing. Figure 1 The components having substantially the same structure as the test system 1 shown are denoted by the same reference numerals, and description thereof will be omitted.

[0139] <2-1. Test device 2A>

[0140] Each testing device 2A includes an image processing control unit 22A.

[0141] <2-1.1. Image Processing Control Unit 22A>

[0142] The image processing control unit 22A sends one or more image data acquired by the image data acquisition unit 21 to two or more image processing devices 30 so that each image processing according to N test items is executed in the two or more image processing devices 30. The image processing control unit 22A can make the image processing according to each test item in the N test items be executed in parallel by each of the two or more image processing devices 30. In this variation, as an example, the image processing control device 5A can make the image processing according to M test items in the N test items be executed in parallel by each of the two or more image processing devices 30. The number of image processing devices 30 to which the image data is sent can be the same as or different from the number N of test items. The image processing control unit 22A has a first sending unit 224A and an execution instruction unit 223A.

[0143] <2-1.1.1. First Transmitting Unit 224A>

[0144] The first transmitting unit 224A transmits a selection request signal of the image processing device 30 to the control device 5 in response to the test item to be executed being selected by the first selecting unit 221. The first transmitting unit 224A may transmit the selection request signal in response to the identification information of the test item to be executed being obtained from the first selecting unit 221. The selection request signal may include the identification information of the test device 2A, and may further include the identification information of the test item to be executed and the number of pixels of the device under test 100.

[0145] <2-2.1.2. Execution instruction unit 223A>

[0146] The execution instruction unit 223A transmits the image data to the image processing unit 30 selected by the control unit 5 among the plurality of image processing units 30, and executes the image processing according to the test item to be executed. The execution instruction unit 223 may transmit the identification information of the test item to be executed together with the image data to the image processing unit 30 selected by the control unit 5. Furthermore, the execution instruction unit 223A may transmit the identification information of the device under test 100 that outputs the image data together with the image data to each image processing unit 30 that performs the image processing. Furthermore, the execution instruction unit 223A may transmit the identification information of the wafer included in the device under test 100 that outputs the image data and the identification information of the test unit 2A included in the execution instruction unit 223A together with the image data to each image processing unit 30 that performs the image processing.

[0147] <2-2. Control device 5>

[0148] The control device 5 controls the test performed by each test device 2A. The control device 5 includes a detection unit 50 , a third acquisition unit 51 , a third selection unit 52 , a second transmission unit 53 , and a communication unit 54 .

[0149] <2-2.1. Detection unit 50>

[0150] The detection unit 50 detects the state of each image processing device 30. The detection unit 50 can communicate with each image processing device 30 included in the test system 1A to detect the state of the image processing device 30. The detection unit 50 can detect the state of each image processing device 30 by a conventionally well-known method. The detection unit 50 can detect that each image processing device 30 is in any one of a standby state, an image processing execution state, and a fault state. The detection unit 50 can supply the detected state of each image processing device 30 to the third selection unit 52.

[0151] <2-2.2. Third acquisition unit 51>

[0152] The third acquisition unit 51 successively acquires the selection request signal from each test device 2A. The third acquisition unit 51 may supply the acquired selection request signal to the third selection unit 52.

[0153] <2-2.3. Third selection unit 52>

[0154] The third selection unit 52 selects an image processing device 30 excluding at least one of an image processing device 30 in an image processing execution state and an image processing device 30 in a failure state from among the plurality of image processing devices 30 included in the test system 1A in response to receiving the selection request signal. The third selection unit 52 may supply the identification information of the test item to be executed and the identification information of the selected image processing device 30 to the second transmission unit 53.

[0155] <2-2.4. Second Transmitting Unit 53>

[0156] The second transmitting unit 53 transmits the identification information of the image processing device 30 selected by the third selecting unit 52 to the test device 2A that is the source of the transmission of the selection request signal. The second transmitting unit 53 can provide the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the test device 2A. Thus, in the test device 2A that has transmitted the selection request signal, the execution instruction unit 223A transmits the image data to the selected image processing device 30A, so that the image processing according to the test item to be executed is executed.

[0157] <2-2.5. Communications Department 54>

[0158] The communication unit 54 communicates with each test device 2A and each server device 3. Thus, each unit of the control device 5 can communicate with each image processing device 30 of each test device 2A and each server device 3. For example, the detection unit 50 can detect the state of each image processing device 30 via the communication unit 54. The third acquisition unit 51 can acquire the selection request signal from each test device 2A via the communication unit 54. The second transmission unit 53 can transmit the identification information of the selected image processing device 30 to the test device 2A via the communication unit 54.

[0159] The communication network between the communication unit 54 and each test device 2A and each server device 3 may include various networks such as the Internet, a wide area network (WAN), a local area network (LAN), or a combination thereof. The communication network may include connection points via at least one of wired and wireless methods. The communication network may also be implemented by a dedicated line separated from a public line such as the Internet.

[0160] According to the above test system 1A, in each of the plurality of test devices 2A, an image processing device 30 is selected from a plurality of test items according to the test items to be executed, and a selection request signal of the image processing device 30 is sent to the control device 5. In addition, in the control device 5, in response to the acquisition of the selection request signal, any image processing device 30 excluding at least one of the image processing device 30 in the execution state of image processing and the image processing device 30 in the failure state is selected from the plurality of image processing devices 30, and the identification information of the selected image processing device 30 is returned to the test device 2A. Then, in each test device 2A, the image data is sent to the image processing device 30 selected by the control device 5, and the image processing execution instruction according to the test item to be executed is executed. Therefore, it is possible to reliably select the image processing device 30 that can be used to execute the image processing.

[0161] <2-3. Operations of the test device 2A and the control device 5>

[0162] Figure 6 The operation of the first process of the test apparatus 2A is shown together with the operation of the control device 5. The test apparatus 2A and the control device 5 acquire image data from the device under test 100 by executing the processes of steps S61 to S83 and steps S91 to S97, and cause the plurality of image processing devices 30 to perform the image processing. In addition, the operation of the second process of the test apparatus 2A is the same as the operation of the second process of the test apparatus 2 in the above-described embodiment, and therefore the description thereof is omitted.

[0163] In step S61, the light source 20 irradiates light to one or more devices under test 100. The light source 20 may irradiate light in one or more light emission modes, similar to step S11 in the above embodiment.

[0164] In step S63, the image data acquisition unit 21 acquires each image data output by the device under test 100 based on the irradiated light. Thus, by executing the process of step S63 at least once, each image data output by the device under test 100 can be acquired based on the light of one or more emission patterns corresponding to the M test items executed in parallel with the image processing. The image data acquisition unit 21 can acquire image data in the same manner as step S13 in the above embodiment.

[0165] In step S65, the statistics unit 24 performs statistics on the pixel values ​​in the acquired image data for each device under test 100. The statistics unit 24 can perform statistics in the same manner as step S15 in the above embodiment.

[0166] In step S67, the determination unit 27 determines whether the statistical result satisfies the reference condition. The determination unit 27 may perform the determination in the same manner as step S17 in the above embodiment. If it is determined that the statistical result does not satisfy the reference condition (step S67 is "No"), the process may be transferred to step S19 (refer to Figure 3 ). When it is determined that the statistical result satisfies the reference condition (“Yes” in step S67), the process may be transferred to step S73.

[0167] In step S73, the first selection unit 221 selects a test item to be executed. The first selection unit 221 can select a test item in the same manner as step S23 in the above-described embodiment.

[0168] In step S75, the first transmission unit 224A transmits a selection request signal of the image processing device 30 to the control device 5. The selection request signal may include identification information of the test device 2A, and may further include identification information of the test item to be executed and the number of pixels of the device under test 100.

[0169] According to this, in step S91, the third acquisition unit 51 of the control device 5 acquires the selection request signal. In step S93, the detection unit 50 of the control device 5 detects the state of each image processing device 30. The detection unit 50 can detect whether each image processing device 30 included in the test system 1A is in any of the states of the standby state, the execution state of image processing, and the failure state.

[0170] In step S95, the third selection unit 52 of the control device 5 selects an image processing device 30 excluding at least one of the image processing device 30 in the execution state of image processing and the image processing device 30 in the failure state from the plurality of image processing devices 30 included in the test system 1A. The third selection unit 52 can select the image processing device 30 in the same manner as in step S27 in the above embodiment.

[0171] In step S97, the second transmission unit 53 of the control device 5 transmits the identification information of the selected image processing device 30 to the test device 2A that is the source of the selection request signal. The second transmission unit 53 can supply the identification information of the selected image processing device 30 and the identification information of the test item to be executed to the execution instruction unit 223A of the test device 2A.

[0172] Thus, in step S79, the execution instruction unit 223 of the test device 2A sends one or more image data acquired by the image data acquisition unit 21 to the image processing device 30, and executes the image processing according to the test item. The execution instruction unit 223 can send the image data to the image processing device 30 selected by the third selection unit 52, so as to execute the image processing according to the test item to be executed. The execution instruction unit 223 can execute the image processing in the same manner as step S29 in the above embodiment.

[0173] In step S81, the first selection unit 221 determines whether all the M test items corresponding to the light emission pattern irradiated on the device under test 100 in step S61 have been selected in step S73. If it is determined that at least one test item has not been selected (step S81 is "No"), the process can be transferred to the above-mentioned step S73. If it is determined that all the test items have been selected (step S81 is "Yes"), the process can be transferred to step S83.

[0174] In step S83, it is determined whether the light source 20 has irradiated lights of all the luminous patterns corresponding to the N test items. In the case where it is determined that the lights of all the luminous patterns have not been irradiated (step S83 is "No"), the process can be transferred to step S61. In this case, before the test result of the test item corresponding to the luminous pattern irradiated in the previously executed step S61 is obtained in step S43, the lights of the luminous patterns corresponding to other test items can be irradiated in the next step S61. In addition, a device under test 100 different from the device under test 100 irradiated in the most recent step S61 can be irradiated in the next step S61. In this case, a device under test 100 on a wafer different from the device under test 100 irradiated in the most recent step S61 can be irradiated in the next step S61. In the case where it is determined that the lights of all the luminous patterns have been irradiated (step S83 is "Yes"), the first process can be terminated.

[0175] In the above operation, the image processing is instructed to the image processing device 30 selected from the plurality of image processing devices 30 except for at least one of the image processing device 30 in the execution state and the image processing device 30 in the failure state, but the image processing may be instructed to the other image processing devices 30. For example, in step S79, the execution instruction unit 223 of the image processing control unit 22 may instruct the image processing unit 23 to execute the image processing when the communication line between the image processing device 30 and each image processing device 30 different from the image processing unit 23 in the test system 1A is busy. In this case, in step S93, the detection unit 50 may detect whether the communication line between each image processing device 30 and the test device 2A is busy. In step S95, the third selection unit 52 selects the image processing unit 23 in the test device 2A when the communication line is busy, and then in step S79, the execution instruction unit 223A may send the image data to the image processing unit 23 to execute the image processing. This allows image processing to be performed and the test to proceed even when the communication line is busy.

[0176] <3. Other examples of changes>

[0177] In addition, in the above-described embodiment and variation, the test device 2 and the test device 2A are described as having the light source 20, the image processing unit 23, and the statistical unit 24, but at least one of these components may be provided. In the case where the test device 2 and the test device 2A do not have the light source 20, the image data acquisition unit 21 may acquire the image data output by the device under test 100 by irradiating the device under test 100 with light of one or more light emission patterns from the light source as an external device. In the case where the test device 2 and the test device 2A do not have the image processing unit 23, the execution instruction unit 223 may send the image data to the image processing device 30 outside the test device 2 and the test device 2A and execute the image processing. In the case where the test device 2 and the test device 2A do not have the statistical unit 24, the process of step S23 may be performed after the process of step S13, or the process of step S73 may be performed after the process of step S63.

[0178] Furthermore, the first selection unit 221 has been described as preferentially selecting test items corresponding to image processing that requires a longer time from N (or M) test items, but other forms may be used to select test items. For example, the first selection unit 221 may select each test item according to the sequence of numbers pre-set in the test items. Alternatively, the first selection unit 221 may select test items corresponding to image processing that requires a longer time than a reference in a discrete order. The so-called test items that require a longer time than a reference may be test items that require a longer time than a reference time, or may be test items that require a longer time than a reference sequence. The reference time and the reference sequence may be set arbitrarily. The so-called selection of test items in a discrete order may be selecting test items in a non-continuous order, or may be selecting test items in a skipped order. Thus, unlike the case where test items corresponding to image processing that requires a longer time than a reference are selected in a continuous order, it is possible to easily enable the image processing device 30 with higher processing performance to perform image processing that requires a longer time. Thus, the image processing device 30 having high processing performance can be used to perform image processing that takes a long time, thereby making it possible to improve the efficiency of image processing and speed up determination.

[0179] Furthermore, the first selection unit 221 has been described as obtaining the identification information of the irradiated light pattern from the light source 20 and selecting any one of the test items corresponding to the light pattern as the execution object, but the test item to be executed may be selected without obtaining the identification information of the light pattern. For example, the first selection unit 221 may select any one of the N test items and supply the identification information of the light pattern corresponding to the selected test item to the light source 20, so that the light source 20 irradiates light in the light pattern.

[0180] Furthermore, the second selection unit 222 has been described as selecting the form of the image processing device 30 that performs the image processing of the test item to be executed based on at least the processing performance of each image processing device 30, but the image processing device 30 may be selected in another form. For example, the second selection unit 222 may give priority to the image processing device 30 on the cloud, or may give priority to the image processing unit 23 in the test device 2. Furthermore, the second selection unit 222 may give priority to the image processing unit 23 of the test device 2 for the test of the test item with a load lower than the reference.

[0181] Furthermore, although the test system 1 and the test system 1A are described as including a plurality of server devices 3 and these server devices 3 are equipped with one or more image processing devices 30, a single server device 3 may be provided in which one or more image processing devices 30 are equipped. ... each image processing device 30 is equipped in the server device 3, a single server device 3 may be provided in which at least one image processing device 30 is not equipped in the server device 3.

[0182] Furthermore, the first selection unit 221 and the second selection unit 222 (or the third selection unit 52) ​​have been described as independently selecting test items and the image processing device 30, but they may also select test items and the image processing device 30 in collaboration. For example, the first selection unit 221 and the second selection unit (or the third selection unit 52) ​​may also optimize the order of selecting test items and the image processing device 30 so that the time until the test of all test items is completed is minimized. As an example, the first selection unit 221 and the second selection unit (or the third selection unit 52) ​​may use a solution to the binpacking problem, which is well known in the past, to select test items and the image processing device 30 so that the time until the test is completed is minimized. Alternatively, the first selection unit 221 and the second selection unit (or the third selection unit 52) ​​can set a temporary target time until the end of the test, and then use the solution to the well-known knapsack problem to select test items and the image processing device 30 so that they converge to the temporary target time. If there is no convergence, the temporary target time is extended, and if it has converged, the selected order is adopted.

[0183] Furthermore, the image processing device 30 has been described as performing image processing according to the test item on the image data, but the test result can also be derived from the result of the image processing. As an example, when the test item is "Sensitivity", the image processing device 30 can extract certain average pixel values ​​from the image data through image processing, and further compare the average pixel value with the reference value to derive the test result. In this case, the test result acquisition unit 26 can acquire the test result from the image processing device 30.

[0184] Various embodiments of the present invention may be described with reference to flowcharts and block diagrams, where a block may represent: (1) a stage of a process in which an operation is performed, or (2) a segment of a device having the function of performing an operation. Specific stages and segments may be implemented by: dedicated circuits, programmable circuits supplied together with computer-readable instructions stored on a computer-readable medium, and / or processors supplied together with computer-readable instructions stored on a computer-readable medium. Dedicated circuits may include digital and / or analog hardware circuits, and may also include integrated circuits (ICs) and / or discrete circuits. Programmable circuits may include reconfigurable hardware circuits, wherein the reconfigurable hardware circuits include logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, flip-flops, registers, field programmable gate arrays (FPGAs), and memory elements such as programmable logic arrays (PLAs).

[0185] The computer-readable medium may include any tangible device that can store instructions that are executed by a suitable device, and as a result, the computer-readable medium having the instructions stored therein has a product that contains executable instructions to create the means required for the operations specified in the flowchart or block diagram. Examples of computer-readable media include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, etc. More specific examples of computer-readable media include: soft magnetic (registered trademark) disks, magnetic disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read only memory (EPROM or flash memory), electrically erasable programmable read only memory (EEPROM), static random access memory (SRAM), compact disc read-only memory (CD-ROM), digital versatile disc (DVD), Blu-ray (RTM) discs, memory sticks, integrated circuit cards, etc.

[0186] Computer-readable instructions may include any source code or object code described in any combination of one or more programming languages, including assembler translator instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or object-oriented programming languages ​​such as Smalltalk (registered trademark), JAVA (registered trademark), C++, and previous sequential programming languages ​​such as the "C" programming language or similar programming languages.

[0187] With respect to a processor or programmable circuit of a programmable data processing device such as a general-purpose computer, a special-purpose computer, or other computer, computer-readable instructions can be provided locally or via a wide area network (WAN) such as a local area network (LAN), the Internet, etc., and the computer-readable instructions are executed to create the means required to implement the operations specified in the flowchart or block diagram. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, and microcontrollers.

[0188] Figure 7The computer 2200 is an example of a computer that can be implemented in whole or in part in various aspects of the present invention. The program installed in the computer 2200 can cause the computer 2200 to function as an operation of a device related to an embodiment of the present invention or one or more sections of the device; or can execute the operation or one or more sections, and / or can cause the computer 2200 to execute a process of an embodiment of the present invention or a stage of the process. Such a program can cause the computer 2200 to execute, through the CPU 2212, to execute specific operations associated with some or all of the blocks in the flowcharts and block diagrams described in this specification.

[0189] The computer 2200 of this embodiment includes a CPU 2212, a RAM 2214, a graphic controller 2216, and a display device 2218, which are connected to each other via a host controller 2210. The computer 2200 also includes an input / output unit such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to the host controller 2210 via an input / output controller 2220. The computer also includes a conventional input / output unit such as a ROM 2230 and a keyboard 2242, which are connected to the input / output controller 2220 via an input / output chip 2240.

[0190] The CPU 2212 operates according to the programs stored in the ROM 2230 and the RAM 2214 to control each unit. The graphic controller 2216 acquires image data generated by the CPU 2212 in a frame buffer or the like provided in the RAM 2214 or itself, and the image data can be displayed on the display device 2218.

[0191] The communication interface 2222 communicates with other electronic devices via a network. The hard disk drive 2224 stores programs and data to be used by the CPU 2212 in the computer 2200. The DVD-ROM drive 2226 reads programs or data from the DVD-ROM 2201 and provides the programs or data to the hard disk drive 2224 via the RAM 2214. The IC card drive reads programs and data from an IC card and / or writes programs and data to an IC card.

[0192] The ROM 2230 stores therein a startup program to be executed by the computer 2200 when it is started, and / or stores a program that depends on the hardware of the computer 2200. The input / output chip 2240 can also connect various input / output units to the input / output controller 2220 via a parallel port, a serial port, a keyboard port, a mouse port, etc.

[0193] The program is provided via a computer-readable medium such as a DVD-ROM 2201 or an IC card. The program is read from the computer-readable medium and installed in a hard disk drive 2224, a RAM 2214, or a ROM 2230, which is also an example of a computer-readable medium, and is executed by a CPU 2212. The information processing described in these programs is read into the computer 2200, so that the programs and the various types of hardware resources described above cooperate with each other. The device or method can be constituted by the following content: the operation or processing of information is realized according to the use of the computer 2200.

[0194] For example, when communication is performed between the computer 2200 and an external device, the CPU 2212 executes the communication program loaded in the RAM 2214, and based on the processing described in the communication program, can instruct the communication interface 2222 to perform communication processing. Under the control of the CPU 2212, the communication interface 2222 reads the transmission data stored in the transmission buffer processing area provided in the recording medium such as the RAM 2214, the hard disk drive 2224, the DVD-ROM 2201, or the IC card, and transmits the read transmission data to the network, or writes the reception data received from the network to the reception buffer processing area provided on the recording medium.

[0195] Furthermore, the CPU 2212 can read all or a necessary part of a file or database stored in an external recording medium such as a hard disk drive 2224, a DVD-ROM drive 2226 (DVD-ROM 2201), or an IC card to the RAM 2214, and perform various types of processing on the data on the RAM 2214. The CPU 2212 then writes the processed data back to the external recording medium.

[0196] Various types of information such as various types of programs, data, tables, and databases can be stored in the recording medium and subjected to information processing. The CPU 2212 can perform various types of processing including various types of operations specified by the instruction sequence of the program, information processing, conditional judgment, conditional branching, unconditional branching, and information retrieval / replacement, etc., described in the present disclosure on the data read from the RAM 2214, and write the results back to the RAM 2214. In addition, the CPU 2212 can retrieve information in archives, databases, etc. in the recording medium. For example, when multiple entries having attribute values ​​of a first attribute each associated with an attribute value of a second attribute are stored in the recording medium, the CPU 2212 retrieves the entry that meets the condition specified by the attribute value of the first attribute from the multiple entries, and reads the attribute value of the second attribute stored in the entry, thereby obtaining the attribute value of the second attribute associated with the first attribute that meets the predetermined condition.

[0197] The program or software module described above may be stored in a computer-readable medium on or near the computer 2200. In addition, a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet may be used as a computer-readable medium, and the program may be provided to the computer 2200 via the network.

[0198] The present invention is described above using the embodiments, but the technical scope of the present invention is not limited to the scope described in the embodiments. A person familiar with the technical field of the present invention understands that various changes or improvements can be made to the embodiments. It can be seen from the description of the claims that such a changed or improved method can also be included in the technical scope of the present invention.

[0199] It should be noted that the execution order of each process such as actions, procedures, steps and stages in the devices, systems, programs and methods shown in the claims, specifications and drawings can be implemented in any order unless "before" or "before" is specifically stated, and the output of a previous process is not used in a subsequent process. Regarding the action flow in the claims, specifications and drawings, "first," "next," etc. are used for convenience, but it does not mean that it must be implemented in the described order.

[0200] Explanation of symbols

[0201] 1: Test system

[0202] 2: Test equipment

[0203] 3: Server device

[0204] 5: Control device

[0205] 20: Light Source

[0206] 21: Image data acquisition unit

[0207] 22: Image processing control unit

[0208] 23: Image processing department

[0209] 24: Statistics Department

[0210] 26: Test result acquisition department

[0211] 27: Judgment Department

[0212] 28: Ministry of Communications

[0213] 30: Image processing device

[0214] 50: Inspection Department

[0215] 51: Third acquisition section

[0216] 52: Third Selection Department

[0217] 53: Second sending unit

[0218] 54: Ministry of Communications

[0219] 100: Device under test

[0220] 220: Inspection Department

[0221] 221: First Choice Division

[0222] 222: Second Selection Department

[0223] 223: Implementation Instructions Department

[0224] 224: First sending unit

[0225] 2200: Computer

[0226] 2201: DVD-ROM

[0227] 2210: Host Controller

[0228] 2212: CPU

[0229] 2214: RAM

[0230] 2216: Graphics Controller

[0231] 2218: Display Devices

[0232] 2220: Input / Output Controller

[0233] 2222: Communication interface

[0234] 2224: Hard Drive

[0235] 2226: DVD-ROM drive

[0236] 2230: ROM

[0237] 2240: Input / output chip

[0238] 2242: Keyboard

Claims

1. A test device comprising: An image data acquisition unit acquires image data output by an image sensor, that is, a device to be tested, according to light of one or more light emission modes corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; A test result acquisition unit that acquires a test result of a test item according to the image processing derived from the result of the image processing; and, The determination unit determines whether the device to be tested is good or not based on the test results of the test items acquired by the test result acquisition unit.

2. The test device according to claim 1, wherein: The image processing control unit sends the identification information of the device under test together with the image data to the two or more image processing devices; The test result acquisition unit acquires identification information of the device to be tested together with the test result.

3. The test device according to claim 1, wherein: The image processing control unit comprises: A detection unit, detecting the status of each image processing device; A first selection unit selects each test item one by one as a test item to be executed; a second selection unit, which selects, from the plurality of image processing apparatuses, an image processing apparatus excluding at least one of an image processing apparatus in an image processing execution state and an image processing apparatus in a failure state, in response to the test item to be executed being selected; and, The execution instructing unit transmits the image data to the image processing apparatus selected by the second selecting unit among the plurality of image processing apparatuses, and executes image processing according to the test item to be executed.

4. The test device according to claim 3, wherein: The second selection unit selects, from among the plurality of image processing devices, an image processing device that executes image processing according to the test item to be executed, based at least on the processing performance of each image processing device.

5. The test device according to claim 4, wherein: The second selection unit selects an image processing device having the highest processing performance among the plurality of image processing devices.

6. The test device according to claim 3, wherein: The first selection unit preferentially selects, from among the plurality of test items, a test item corresponding to image processing that requires a long time.

7. The test device according to claim 3, wherein: The first selection unit selects a test item corresponding to an image processing requiring a longer time than a reference in a discrete order.

8. The test device according to claim 1, wherein: At least one of the two or more image processing devices is installed in at least one server device; The test device further includes a communication unit for communicating with each server device.

9. The test device according to claim 8, wherein: Any one of the at least one server device is a cloud server.

10. The test device according to claim 1, wherein: further comprising an image processing unit, as one of the two or more image processing devices, for performing image processing on the image data; The image processing control unit supplies the image data acquired by the image data acquisition unit to the image processing unit, and causes image processing according to a part of the test items among the plurality of test items to be executed.

11. The test device according to claim 10, wherein: The image processing control unit causes the image processing unit to perform image processing when a communication line between the image processing unit and each image processing unit different from the image processing unit among the two or more image processing units is busy.

12. The test device according to claim 1, wherein: The device further comprises a statistics unit for performing statistics on pixel values ​​in the image data acquired by the image data acquisition unit for each device to be tested; The determination section determines that the one device under test is defective based on the fact that the statistical result on the one device under test does not satisfy the reference condition, and invalidates the image processing on the one device under test.

13. The test device according to claim 1, wherein: A light source is further provided to irradiate the device under test with light of the one or more light emission modes.

14. A test system comprising: A plurality of test devices according to claim 1; and A plurality of image processing devices are shared by the plurality of test devices.

15. The test system according to claim 14, wherein: The image processing control unit of each test device includes: A detection unit, detecting the status of each image processing device; A first selection unit selects each test item one by one as a test item to be executed; a second selection unit, which selects, from the plurality of image processing apparatuses, an image processing apparatus excluding at least one of an image processing apparatus in an image processing execution state and an image processing apparatus in a failure state, based on the selection of the test item to be executed; and, The execution instructing unit transmits the image data to the image processing apparatus selected by the second selecting unit among the plurality of image processing apparatuses, and executes image processing according to the test item to be executed.

16. The test system according to claim 14, wherein: Equipped with control devices to control the tests conducted by various test devices; Each test device has: A first selection unit selects each test item one by one as a test item to be executed; a first sending unit that sends a selection request signal of an image processing device to the control device in response to the test item of the execution object being selected; and, an execution instruction unit that transmits the image data to the image processing device selected by the control device among the plurality of image processing devices and executes image processing according to the test item of the execution object; The control device has: A detection unit, detecting the status of each image processing device; a third acquisition unit, which successively acquires the selection request signal from each test device; a third selection unit, which selects, from the plurality of image processing apparatuses, an image processing apparatus excluding at least one of an image processing apparatus in an image processing execution state and an image processing apparatus in a failure state, in response to the selection request signal being acquired; and, The second transmitting unit transmits identification information of the image processing device selected by the third selecting unit to the testing device that is a transmission source of the selection request signal.

17. A test method comprising: In the image data acquisition stage, the image data output by the image sensor, i.e., the device to be tested, is acquired according to the light of one or more light emission modes corresponding to the multiple test items; In an image processing control stage, the one or more image data acquired in the image data acquisition stage are sent to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; The test result acquisition stage is to acquire the test result of the test item according to the image processing derived from the image processing result; and, In the determination stage, the quality of the device to be tested is determined based on the test results of each test item acquired in the test result acquisition stage.

18. A test program, the test program causing a computer to function as the following means: An image data acquisition unit acquires image data output by an image sensor, that is, a device to be tested, according to light of one or more light emission modes corresponding to a plurality of test items; an image processing control unit that transmits the one or more image data acquired by the image data acquisition unit to two or more image processing devices, so that image processing according to each of the plurality of test items is performed in parallel by each of the two or more image processing devices; A test result acquisition unit that acquires a test result of a test item according to the image processing derived from the result of the image processing; and, The determination unit determines whether the device to be tested is good or not based on the test results of the test items acquired by the test result acquisition unit.

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