Probe card for clamping straight needle in staggered manner and processing technology
By designing a probe card that clamps the straight needle by misaligningly, the synchronous bending of multiple probes is achieved using sliding connections and removable connections, the problem of difficult to finely control the degree of probe bend in the prior art is solved, and the consistency of needle pressure and detection efficiency are improved.
Patent Information
- Application Number
- CN202411859741.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-17
- Publication Date
- 2025-03-25
AI Technical Summary
When existing probe cards detect multiple different types of parts to be tested, it is difficult to finely control the bending degree of multiple probes, resulting in inconsistent needle pressure, affecting detection efficiency and accuracy.
A probe card that is misaligned and clamps the straight needle is designed, and the synchronous bending of multiple probes is achieved by superimposing the first connection plate, the second connection plate and the third connection plate arranged in sequence, and using sliding connections and removable connections. Specifically, there is a sliding connection between the first connecting plate and the second connecting plate. By moving the first connecting plate, the multiple connecting segments are driven to move in a synchronous manner, resulting in the bent segment being bent, thereby controlling the bending degree of the probe.
It realizes fine control of the bending degree of multiple probes, ensures consistency of needle pressure, broadens the application range of probe cards, and improves detection efficiency and accuracy.
Smart Images
Figure CN119689044A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of probe cards, and in particular to a probe card with staggered clamping straight needles and a processing technology thereof. Background Art
[0002] A probe card is a test interface instrument that is mainly used to test bare chips. Specifically, the probe card is an effective tool for electrically connecting to the corresponding channels of the test equipment that is testing on multiple contact pads of the device under test. Its testing of the device under test refers to detecting and sorting out bad or defective components that appear in the production stage. Currently, probe cards are commonly used for electrical testing by contacting electronic components integrated on semiconductors or silicon wafers before cutting and chip packaging of semiconductors and silicon wafers.
[0003] At present, with the design changes of semiconductor equipment, the number of chip pads that constitute the wafer has increased sharply, and the pad arrangements in the device to be tested are diverse. In response to this, in order to improve the detection efficiency, a vertical probe card is designed accordingly. This probe card usually consists of a mounting seat and a large number of straight probes on the mounting seat. When used in conjunction with an adapter board, a PCB board and other auxiliary components, the detection efficiency is effectively improved.
[0004] Typically, in actual testing, if the probe is directly pressed against the device to be tested, the probe may damage the structure of the device to be tested. Therefore, the probe usually has the ability to deform, and the user usually pre-fabricates the probe into a bent style. The end of this style of probe can move slightly when it presses against the component to be tested, but it can firmly press against the component to be tested under the action of elastic deformation. In addition, in order to ensure that the needle pressure of the probe pressing against the device to be tested is consistent and thus ensure that the detection method is qualified, multiple probes on the same probe card have the same bending degree. Of course, the needle pressure of probes with different bending degrees when they press against each other is different, and different needle pressures are suitable for different components to be tested.
[0005] Sometimes users want to control the bending degree of multiple probes to expand the application range of probe cards. Different needle pressures can be used to detect different types of components to be tested. The bending angle of pre-made bent probes is not easy to control when the bending degree is adjusted for the second time. Multiple probes on the same probe card cannot be guaranteed to be bent to the same angle again when they are bent for the second time one by one. Summary of the invention
[0006] In order to facilitate the control of the bending degree of multiple probes, the present application provides a probe card for staggered clamping of straight needles.
[0007] On the one hand, the present application provides a probe card for staggered clamping of straight needles using the following technical solution: A probe card for staggered clamping of straight needles, comprising a first connecting plate, a second connecting plate and a third connecting plate which are sequentially stacked, wherein the first connecting plate and the second connecting plate are slidably connected; the first connecting plate is provided with a plurality of first receiving holes, the second connecting plate is provided with a receiving notch, and the third connecting plate is provided with a plurality of second receiving holes; It also includes multiple probes, each of which includes a connecting section 1, a bending section and a connecting section 2 that are connected in sequence, the connecting section 1 is fitted and penetrated in the receiving hole 1, and the connecting section 1 and the receiving hole 1 are fixedly connected, the bending section is located in the accommodating notch, the connecting section 2 is fitted and penetrated in the receiving hole 2, and the connecting section 2 and the receiving hole 2 are slidably connected, and the first connecting plate is configured to be able to slide and drive the multiple connecting sections 1 to move, so as to synchronously bend the multiple bending sections to different degrees.
[0008] By adopting the above technical solution, the first connecting plate can be moved along the second connecting plate to drive the multiple fixedly connected connecting segments to move synchronously. The movement of the connecting segment will cause the bending segment located in the accommodating notch to be bent. By controlling the moving distance of the connecting plate, the degree of bending of the bending segment, i.e., the probe, can be controlled at any time.
[0009] Preferably, a slider is provided on the second connecting plate, a sliding groove is opened on the first connecting plate, the slider is clamped in the sliding groove and the slider and the sliding groove are slidingly connected; the connection between the slider and the sliding groove is also used to limit the first connecting plate to the second connecting plate in its own thickness direction.
[0010] By adopting the above technical solution, the first connecting plate can be guided when sliding by utilizing the matching connection between the slider and the slide groove. In addition, the connection between the slider and the slide groove also limits the first connecting plate to the second connecting plate in its own thickness direction, that is, the first connecting plate cannot move along the thickness direction.
[0011] Preferably, the first connecting plate is provided with a first connecting hole, the second connecting plate is provided with a second connecting hole, and the first connecting hole and the second connecting hole are detachably connected to each other with a locking piece.
[0012] By adopting the above technical solution, the locking member can lock the first connecting plate on the second connecting plate. This structure is used to ensure that the multiple probes will not move during testing.
[0013] Preferably, there are a plurality of the second connection holes, and the plurality of second connection holes are evenly arranged along the sliding direction of the first connection block, and any of the second connection holes can be connected to the locking piece together with the first connection hole.
[0014] By adopting the above technical solution, the first connecting plate is moved to make the connecting hole 1 dock with different connecting holes 2 so as to control the bending section to be bent to different degrees.
[0015] Preferably, the second connecting plate is provided with a first docking hole, the third connecting plate is provided with a second docking hole, and the first docking hole and the second docking hole are detachably connected to a locking member.
[0016] By adopting the above technical solution, the third connecting plate can be disassembled to inspect the bent section in the accommodating notch.
[0017] Preferably, the probe card for offset clamping straight needles further comprises a PCB board, which is mounted on an end of the first connecting plate away from the second connecting plate; the end surface of the PCB board away from the first connecting plate has a plurality of solder joints, each of which is connected to a probe.
[0018] By adopting the above technical solution, the PCB board is connected to a plurality of probes in advance to facilitate subsequent testing.
[0019] Preferably, the first connecting plate includes a ring plate portion and a filler portion, the ring plate portion is connected to the second connecting plate, and the filler portion is connected to the inner wall of the ring plate portion; the receiving hole 1 is opened on the filler portion, and the connecting section 1 and the filler portion, as well as the filler portion and the ring plate portion are fixedly connected.
[0020] Preferably, the material of the filler part is resin.
[0021] Preferably, the second connecting plate is further provided with a debugging notch connected to the accommodating notch, the debugging notch is provided with a blocking block, and the blocking block and the first connecting plate are detachably connected with a quick-release part.
[0022] By adopting the above technical solution, the quick-release parts can be disassembled to remove the blocking block, and the bending degree of individual bending sections in the accommodating gap can be adjusted conveniently by adjusting the gap.
[0023] On the other hand, the present application also provides a processing technology for the probe card with offset clamping straight needles, comprising the following steps: S1, aligning the receiving hole 1 and the receiving hole 2, and sequentially inserting a plurality of probes into the receiving hole 1, the receiving notch and the receiving hole 2; S2. Move the first connecting plate to drive the multiple connecting segments to move, and the multiple bending segments are bent in the accommodating notches.
[0024] By adopting the above technical solution, the bending degrees of the plurality of probes can be controlled by controlling the moving distance of the first connecting plate relative to the second connecting plate.
[0025] In summary, the present invention includes at least one of the following beneficial technical effects: 1. By moving the first connecting plate along the second connecting plate, the multiple connecting segments 1 that are fixedly connected can be driven to move synchronously. The movement of the connecting segment 1 will cause the bending segment located in the receiving notch to be bent. By controlling the moving distance of the connecting plate 1, the degree of bending of the bending segment, i.e., the probe, can be controlled at any time; 2. The third connecting plate can be disassembled to inspect the bending section in the receiving notch; or, the quick-release part can be disassembled to disassemble the blocking block, and the debugging notch can be used to adjust the bending degree of individual bending sections in the receiving notch. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 is a schematic diagram of the structure of the probe; Figure 2 is a cross-sectional view of a probe card with staggered clamping straight needles in an embodiment of the present application; Figure 3 yes Figure 2 A magnified view of part A; Figure 4 It is an exploded view used to show blockages.
[0027] Markings in the accompanying drawings: 1. first connecting plate; 11. slide groove; 12. receiving hole one; 13. ring plate portion; 14. filler portion; 15. connecting hole one; 16. receiving hole; 2. second connecting plate; 21. slider; 22. docking hole one; 23. receiving gap; 24. connecting hole two; 25. debugging gap; 3. third connecting plate; 31. docking hole two; 32. receiving hole two; 4. locking piece; 5. probe; 51. connecting section one; 52. bending section; 53. connecting section two; 6. locking piece; 7. blocking block; 71. quick release part; 8. PCB board; 81. solder joint. DETAILED DESCRIPTION
[0028] The present invention is further described in detail below in conjunction with the accompanying drawings.
[0029] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0030] The present application embodiment discloses a probe card for staggered clamping of straight needles. Figure 1 , used to be able to bend multiple probes 5 and make the bending degree controllable, Figure 1 Schematic diagrams of probes 5 with different bending degrees; in this embodiment, the bending of 6×6 probes 5 is taken as an example.
[0031] Reference Figure 1 A probe card for staggered clamping straight needles includes a first connecting plate 1, a second connecting plate 2 and a third connecting plate 3 which are stacked in sequence. The first connecting plate 1, the second connecting plate 2 and the third connecting plate 3 are arranged in sequence from top to bottom. The first connecting plate 1 and the second connecting plate 2 are slidably connected, and the second connecting plate 2 and the third connecting plate 3 are detachably connected.
[0032] Reference Figure 2 and Figure 3 Specifically, a slider 21 is provided at the upper end of the second connecting plate 2, and the slider 21 is arranged horizontally. The first connecting plate 1 has a slide groove 11, and the slider 21 is clamped in the slide groove 11 and the slider 21 and the slide groove 11 are slidably connected. The first connecting plate 1 can slide left and right on the second connecting plate 2. In addition, in order to limit the first connecting plate 1 on the second connecting plate 2 in its thickness direction, the slider 21 and the slide groove 11 are both T-shaped. The second connecting plate 2 has a docking hole 22, and the third connecting plate 3 has a docking hole 21. The docking hole 22 and the docking hole 2 31 are detachably connected to a locking member 4, which is a pin in this embodiment.
[0033] Reference Figure 2 and Figure 3 The first connecting plate 1 has a plurality of receiving holes 12, the second connecting plate 2 has a receiving notch 23, and the third connecting plate 3 has a plurality of receiving holes 2 32. In this embodiment, the receiving holes 12 and the receiving holes 2 32 are both set to 6×6. A probe card for staggered clamping straight needles also includes a plurality of probes 5. In this embodiment, the number of probes 5 is 36. Figure 1 Each probe 5 includes a connecting section 1 51, a bending section 52 and a connecting section 2 53 connected in sequence. The connecting section 1 51 fits and penetrates the receiving hole 12 and is fixedly connected to the receiving hole 12. The bending section 52 is located in the receiving notch 23. The connecting section 2 53 fits and penetrates the receiving hole 2 32 and is slidably connected to the receiving hole 2 32. Specifically, the first connecting plate 1 includes an annular plate portion 13 and a filler portion 14, the annular plate portion 13 is connected to the second connecting plate 2, and the filler portion 14 is connected to the inner wall of the annular plate portion 13; the receiving hole 12 is opened on the filler portion 14, the connecting section 1 51 and the filler portion 14 and the filler portion 14 and the annular plate portion 13 are fixedly connected, and the material of the filler portion 14 is resin.
[0034] First, ensure that the second connecting section 53 of the probe 5 is inserted into the second receiving hole 32, the bending section 52 is located in the receiving notch 23 and the first connecting section 51 is inserted into the first receiving hole 12, then move the first connecting plate 1 to drive the multiple connecting sections 1 51 to move so as to synchronously bend the multiple bending sections 52 to different degrees.
[0035] Reference Figure 3In order to prevent the first connecting plate 1 from malfunctioning after movement and thus affecting the detection effect, a connecting hole 15 is provided on the first connecting plate 1, and a connecting hole 24 is provided on the second connecting plate 2. The connecting hole 15 and the connecting hole 24 are detachably connected to a locking member 6, and the locking member 6 is preferably a pin. In addition, in order to facilitate the control of the bending degree of the probe 5, a plurality of connecting holes 24 are provided, and the plurality of connecting holes 24 are evenly arranged along the sliding direction of the first connecting block, and any connecting hole 24 can be connected to the locking member 6 together with the connecting hole 15.
[0036] Different bending degrees of the bending section 52 will result in different needle pressures when the chip is pressed at the lower end of the probe 5, and different needle pressures are suitable for different types of chip detection; when the actual needle pressure is less than the applicable needle pressure of the chip, the probe 5 has poor contact, which will cause the test results to have deviations or test failures, and when the actual needle pressure is greater than the applicable needle pressure of the chip, the probe 5 is very likely to damage the chip and cause the test to terminate.
[0037] Reference Figure 3 and Figure 4 In order to facilitate manual debugging of the bent section 52 bent in the accommodating gap 23, the second connecting plate 2 is also provided with a debugging gap 25 connected to the accommodating gap 23, and a blocking block 7 is inserted into the debugging gap 25. The first connecting plate 1 is provided with an accommodating hole 16. The blocking block 7 and the accommodating hole 16 are detachably connected with a quick-release part 71, and the quick-release part 71 is preferably a pin.
[0038] Reference Figure 2 A probe card for staggered clamping straight needles also includes a PCB board 8, which is installed on the end of the first connecting board 1 away from the second connecting board 2; the PCB board 8 has a plurality of solder joints 81 on the end surface away from the first connecting board 1. In this embodiment, there are 36 solder joints 81, and each solder joint 81 is connected to the probe 5.
[0039] The implementation principle of a probe card with staggered clamping straight needles in the embodiment of the present application is: First, ensure that the second connecting section 53 of the probe 5 is inserted into the second receiving hole 32, the bending section 52 is located in the accommodating notch 23 and the connecting section 1 51 is inserted into the receiving hole 12, then move the first connecting plate 1 to drive the multiple connecting sections 1 51 to move so as to synchronously bend the multiple bending sections 52 to different degrees, and then when the first connecting plate 1 moves until the connecting hole 15 is docked with its first connecting hole 24, insert the locking piece 6 to lock the first connecting plate 1 and the second connecting plate 2.
[0040] The present application also discloses a processing technology for a probe card for staggered clamping straight needles, comprising the following steps: S1, aligning the first receiving hole 12 and the second receiving hole 32, and sequentially inserting the plurality of probes 5 into the first receiving hole 12, the receiving notch 23 and the second receiving hole 32; Specifically, 36 probes 5 are inserted into the ring plate portion 13, and then the 36 straight probes 5 are arranged in a 6×6 pattern using external auxiliary tools, and resin fillers are filled into the ring plate portion 13 to form a filler portion 14, and the filler portion 14, the plurality of probes 5 and the ring plate portion 13 are fixedly connected. The positions of the above 36 probes 5 need to be ensured so that when the first connection is assembled to the second connection plate 2, the 36 probes 5 can be inserted into the 36 receiving holes 2 32, and at this time the first connection plate 1 and the second connection plate 2 are in a dislocated state, at this time the receiving hole 12 and the receiving hole 2 32 are aligned, the bending section 52 is located in the receiving notch 23, and the connecting section 2 53 is fitted and inserted into the receiving hole 2 32.
[0041] S2. Move the first connecting plate 1 to drive the multiple connecting segments 51 to move, and the multiple bending segments 52 are bent in the accommodating notches 23.
[0042] By controlling the moving distance of the first connecting plate 1, the bending degree of the multiple bending sections 52 can be controlled at any time, and this design broadens the scope of use. Specifically, after the multiple probes 5 are bent for the first time and applied to the test of a certain chip, the multiple probes 5 can be bent for the second time by moving the first connecting plate 1, and the multiple probes 5 after the second bending can be applied to the test of another chip.
[0043] S3, the first connecting plate 1 is moved until the first connecting hole 15 is docked with the second connecting hole 24, and the locking member 6 is inserted to lock the first connecting plate 1 and the second connecting plate 2 to ensure the stability of the multiple probes 5 during testing.
[0044] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.
Claims
1. A probe card for staggered clamping of straight needles, characterized in that: The invention comprises a first connecting plate (1), a second connecting plate (2) and a third connecting plate (3) which are sequentially stacked, wherein the first connecting plate (1) and the second connecting plate (2) are slidably connected to each other; the first connecting plate (1) is provided with a plurality of first receiving holes (12), the second connecting plate (2) is provided with a receiving notch (23), and the third connecting plate (3) is provided with a plurality of second receiving holes (32); The invention also comprises a plurality of probes (5), each of the probes (5) comprising a connecting section 1 (51), a bending section (52) and a connecting section 2 (53) which are connected in sequence, the connecting section 1 (51) being fitted and penetrated in the receiving hole 1 (12) and the connecting section 1 (51) and the receiving hole 1 (12) being fixedly connected, the bending section (52) being located in the receiving notch (23), the connecting section 2 (53) being fitted and penetrated in the receiving hole 2 (32) and the connecting section 2 (53) and the receiving hole 2 (32) being slidably connected, and the first connecting plate (1) being configured to be able to slide and drive the plurality of connecting sections 1 (51) to move so as to synchronously bend the plurality of bending sections (52) to different degrees.
2. The probe card for staggered clamping of straight needles according to claim 1, characterized in that: The second connecting plate (2) is provided with a sliding block (21), the first connecting plate (1) is provided with a sliding groove (11), the sliding block (21) is clamped in the sliding groove (11), and the sliding block (21) and the sliding groove (11) are slidably connected; the connection between the sliding block (21) and the sliding groove (11) is also used to limit the first connecting plate (1) on the second connecting plate (2) in its own thickness direction.
3. The probe card for staggered clamping of straight needles according to claim 2, characterized in that: The first connecting plate (1) is provided with a connecting hole 1 (15), the second connecting plate (2) is provided with a connecting hole 2 (24), and the connecting hole 1 (15) and the connecting hole 2 (24) are detachably connected to a locking member (6).
4. The probe card for staggered clamping of straight needles according to claim 3, characterized in that: There are a plurality of the second connection holes (24), and the plurality of the second connection holes (24) are evenly arranged along the sliding direction of the first connection block. Any of the second connection holes (24) can be connected to the locking member (6) together with the first connection hole (15).
5. The probe card for staggered clamping of straight needles according to claim 1, characterized in that: The second connecting plate (2) is provided with a first docking hole (22), the third connecting plate (3) is provided with a second docking hole (31), and the first docking hole (22) and the second docking hole (31) are detachably connected to a locking member (4).
6. The probe card for staggered clamping straight needles according to claim 1, characterized in that: The probe (5) card for staggered clamping of straight needles also includes a PCB board (8), wherein the PCB board (8) is mounted on an end of the first connecting board (1) away from the second connecting board (2); the end surface of the PCB board (8) away from the first connecting board (1) has a plurality of solder joints (81), and each of the solder joints (81) is connected to the probe (5).
7. The probe card for staggered clamping straight needles according to claim 1, characterized in that: The first connecting plate (1) comprises an annular plate portion (13) and a filling portion (14); the annular plate portion (13) is connected to the second connecting plate (2); the filling portion (14) is connected to the inner wall of the annular plate portion (13); the receiving hole (12) is provided on the filling portion (14); the connecting section (51) and the filling portion (14) as well as the filling portion (14) and the annular plate portion (13) are fixedly connected.
8. The probe card for staggered clamping straight needles according to claim 7, characterized in that: The material of the filler part (14) is resin.
9. The probe card for staggered clamping straight needles according to claim 1, characterized in that: The second connecting plate (2) is also provided with a debugging notch (25) connected to the accommodating notch (23); a blocking block (7) is inserted into the debugging notch (25); and the blocking block (7) and the first connecting plate (1) are detachably connected to each other via a quick-release part (71).
10. A processing technology for a probe card with offset clamping straight needles as claimed in any one of claims 1 to 9, characterized in that: The following steps are involved: S1, aligning the receiving hole 1 (12) and the receiving hole 2 (32), and sequentially inserting a plurality of probes (5) into the receiving hole 1 (12), the receiving notch (23) and the receiving hole 2 (32); S2. Move the first connecting plate (1) to drive the multiple connecting segments (51) to move, and the multiple bending segments (52) are bent in the accommodating notch (23).