Radio frequency power supply arc rapid detection method and system
By calculating the change rate of voltage and current signals in the RF power supply system to judge the arc phenomenon, the problem of difficulty in selecting thresholds in the prior art is solved, and high accuracy and fast response arc detection is achieved.
CN119689318AInactive Publication Date: 2025-03-25DEXIN DIGITAL TECH CORP LTD
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Patent Information
- Application Number
- CN202510206823.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-25
- Publication Date
- 2025-03-25
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Technical Problem
When the prior art detects arc ignition phenomenon in radio frequency power supply systems, it is difficult to select threshold values, resulting in inaccurate detection and easy to miss or false alarms.
Method used
By obtaining the coupler to sample and digital signal the voltage signal and current signal after the output radio frequency signal is coupled, the amplitude value and change rate of the voltage signal and current signal are calculated, and the change rate and the rated threshold value are compared to whether an arc occurs.
Benefits of technology
It avoids the difficulty of threshold selection, improves the accuracy and response speed of arc detection, and can accurately judge arc phenomena in a very short time and protect the workpiece.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention belongs to the technical field of radio frequency power supply detection, and discloses a radio frequency power supply arc rapid detection method and system, and the method comprises the steps: obtaining a voltage signal and a current signal after a coupler couples an output radio frequency signal; sampling the voltage signal and the current signal, performing digital signal processing, and calculating amplitude values of the voltage signal and the current signal; selecting a plurality of sampling points, and respectively calculating a voltage change rate and a current change rate; and the voltage change rate and the current change rate are compared with the threshold of the rated value to complete arc judgment. The FPGA is used as a main control chip, a sampling chip is a high-speed AD, the advantage of high real-time performance is achieved, whether the arc phenomenon occurs or not is judged by judging the change rate of the voltage and the current, and therefore the problem that threshold values of the voltage and the current are difficult to select can be avoided. The method has the advantages of short calculation delay, quick response and high judgment accuracy, and can obtain a judgment result in an extremely short time.
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