A high power two-dimensional galvanometer

Abstract

The invention relates to the technical field of two-dimensional galvanometer mirrors, and proposes a high-power two-dimensional galvanometer mirror. The high-power two-dimensional galvanometer mirror can realize fast and accurate adjustment of the mirror angle, is convenient for controlling the precise deflection of a laser beam, and has an operation detection function. Under the premise of ensuring the normal output of the light of the high-power two-dimensional galvanometer mirror, the operation accuracy and operation safety can be improved. The high-power two-dimensional galvanometer mirror comprises a galvanometer mirror base and an internal structure. The internal structure comprises an inner frame, an outer frame, two inner voice coil motors and four outer voice coil motors. The two inner voice coil motors and the four outer voice coil motors are all installed on the galvanometer mirror base. The inner frame and the outer frame are connected by high-precision bearings to form a universal joint structure. The two inner voice coil motors are all connected to the inner frame, and the four outer voice coil motors are all connected to the outer frame. The inner frame and the outer frame are both installed with reflective galvanometer mirrors. A mounting cover is fixedly connected to the galvanometer mirror base, and an inner detection unit and an outer detection unit are installed in the mounting cover.

Description

Technical Field

[0001] The invention relates to the technical field of two-dimensional galvanometers, and in particular to a high-power two-dimensional galvanometer. Background Art

[0002] As we all know, the two-dimensional galvanometer is an excellent vector scanning device, which is mainly composed of two single-axis vibrating galvanometers, namely the horizontal scanning galvanometer (X-axis galvanometer) and the vertical scanning galvanometer (Y-axis galvanometer). The two galvanometers use a pair of orthogonal optical axes to control the angles of laser beams pointing in different directions. Through electronic signal control, the laser beam can be irradiated at any position on a plane. The high-power two-dimensional galvanometer is a two-dimensional galvanometer that can achieve high-power laser output.

[0003] The traditional laser galvanometer structure uses two independent motors and lenses to form a beam deflection system, which has a complex structure and high cost. Another two-dimensional galvanometer is the fast-reflection mirror. Although it can also achieve a similar working mode as the single lens in this application, it uses a hinge to complete the relative mechanical connection, so it cannot carry a high-inertia high-laser power lens. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a high-power two-dimensional galvanometer, which can achieve fast and accurate mirror angle adjustment, facilitate the precise control of the deflection of the laser beam, and has an operation detection function. While ensuring the normal output of light from the high-power two-dimensional galvanometer, it can improve the operation accuracy and safety.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-power two-dimensional galvanometer, comprising a galvanometer base and an internal structure, wherein the internal structure comprises an inner frame, an outer frame, two inner voice coil motors and four outer voice coil motors, the two inner voice coil motors and the four outer voice coil motors are all mounted on the galvanometer base, the inner frame and the outer frame are connected by a high-precision bearing to form a universal joint structure, the two inner voice coil motors are all connected to the inner frame, the four outer voice coil motors are all connected to the outer frame, the inner frame and the outer frame are both equipped with reflective galvanometers, a mounting cover is fixedly connected to the galvanometer base, an inner detection unit and an outer detection unit are installed in the mounting cover, the inner detection unit matches the inner frame, the outer detection unit matches the outer frame, an end plate is fixedly connected to the mounting cover, a light exit hole is opened on the end plate, the light exit hole corresponds to the two reflective galvanometers, and an anti-collision unit is installed outside the galvanometer base.

[0006] Preferably, the internal detection unit and the external detection unit both include a posture sensor and a sleeve frame, the two posture sensors are respectively installed in the two sleeve frames, the two sleeve frames are fixedly connected in the mounting cover, the two sleeve frames are slidably connected with a force transmission frame, the two force transmission frames are provided with fan-shaped grooves, the two fan-shaped grooves are connected with fan-shaped plates, the two fan-shaped plates are fixedly connected with swing plates, the two swing plates are respectively connected with a first rotating shaft and a second rotating shaft, the first rotating shaft and the second rotating shaft are respectively connected to the outer frame and the inner frame.

[0007] Preferably, the anti-collision unit includes a fixed mounting frame and a magnetic mounting frame, the galvanometer base is connected to the magnetic mounting frame, the fixed mounting frame is fixedly connected to a permanent magnet block, the magnetic mounting frame is fixedly connected to an alignment block, an embedding groove is provided at one end of the alignment block close to the permanent magnet block, an iron block is fixedly connected in the embedding groove, the iron block matches the permanent magnet block, a pressure detection component is installed between the fixed mounting frame and the alignment block, and the pressure detection component is used to identify the relative position between the fixed mounting frame and the alignment block.

[0008] Preferably, the pressure detection assembly includes two pressure sensors and two spherical racks, two cylindrical grooves are provided on the fixed mounting rack, the two spherical racks are respectively slidably connected in the two cylindrical grooves, the two spherical racks are both fixedly connected with elastic springs, the two elastic springs are respectively fixedly connected in the two cylindrical grooves, the two spherical racks are both provided with mounting grooves, the two pressure sensors are respectively installed in the two mounting grooves, the alignment block is provided with two contacts, and the two contacts are respectively matched with the two pressure sensors.

[0009] Preferably, two hemispherical grooves are arranged on the magnetic mounting frame, the two contacts are arranged in the two hemispherical grooves respectively, and the two hemispherical grooves are matched with the two spherical frames respectively.

[0010] Preferably, the two spherical frames are each provided with a wiring hole, the two wiring holes are respectively connected to the two mounting grooves, the two pressure sensors are each equipped with an external lead, the two external leads pass through the two wiring holes respectively, and the fixed mounting frame is provided with an external lead hole matching the external lead.

[0011] Preferably, the magnetic mounting frame is fixedly connected to an external mounting plate, the external mounting plate is fixedly connected to an access mounting plate, a structural reinforcing rib plate is fixedly connected between the access mounting plate and the external mounting plate, and the galvanometer base is fixedly connected to the access mounting plate by a plurality of assembly bolts.

[0012] Preferably, an anti-drop rope is fixedly connected to the fixed mounting frame via protective bolts, the anti-drop rope is fixedly connected to a pressure ring, and the pressure ring is connected to the alignment block via connecting bolts.

[0013] Preferably, a cooling circulation water circuit is provided in the galvanometer base, and the cooling circulation water circuit is connected with a water inlet quick connector and a water discharge quick connector, and the water inlet quick connector and the water discharge quick connector are both fixedly connected to the galvanometer base.

[0014] Preferably, a stepped mounting flange is fixedly connected to the fixed mounting frame, an overhanging limit frame is fixedly connected to the stepped mounting flange, the overhanging limit frame is equipped with an external pressure frame, two side holes are provided on the external pressure frame, both side holes are provided with clamping bolts, and both clamping bolts are threadedly connected to the overhanging limit frame.

[0015] Compared with the prior art, the present invention provides a high-power two-dimensional galvanometer, which has the following beneficial effects:

[0016] (1) In the present invention, the core optical path unit of the high-power two-dimensional galvanometer is formed through the design of the internal structure, which can realize fast and accurate adjustment of the mirror angle, thereby facilitating the precise control of the deflection of the laser beam.

[0017] (2) In the present invention, the anti-collision unit is provided to facilitate the connection and installation of the galvanometer base relative to the external equipment, and has an operation detection function. Under the premise of ensuring the normal output of the high-power two-dimensional galvanometer light, the operation accuracy and operation safety can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0019] Figure 2 For the present invention Figure 1 A schematic diagram of the local enlarged structure at point A in the middle;

[0020] Figure 3 It is a schematic diagram of the three-dimensional structure of the fixed mounting frame, permanent magnet block and spherical frame of the present invention;

[0021] Figure 4 It is a schematic diagram of the exploded three-dimensional structure of the spherical frame and the elastic spring of the present invention;

[0022] Figure 5 It is a schematic diagram of the three-dimensional structure of the external mounting plate, the access mounting plate and the structural reinforcing rib plate of the present invention;

[0023] Figure 6 It is a schematic diagram of the three-dimensional structure of the internal structure of the present invention installed relative to the galvanometer base;

[0024] Figure 7 It is a schematic diagram of the three-dimensional structure of the galvanometer base, the water inlet quick connector and the water discharge quick connector of the present invention;

[0025] Figure 8 It is a schematic diagram of the three-dimensional structure of the present invention as a whole from another angle;

[0026] Fig. 9 It is a three-dimensional structural schematic diagram of another angle of the cooperation between the external mounting plate, the access mounting plate and the structural reinforcing rib plate of the present invention;

[0027] Fig.10 It is a schematic diagram of a three-dimensional structure of the spherical frame and the elastic spring in another exploded angle of the present invention;

[0028] Fig.11 It is a schematic diagram of the three-dimensional structure of the external pressing frame and the pressing bolts of the present invention;

[0029] Fig.12 It is a schematic diagram of the three-dimensional structure of the alignment block, iron block and contact points of the present invention;

[0030] Fig.13 It is a schematic diagram of the overall three-dimensional structure of the present invention when viewed from above;

[0031] Fig.14 It is a partially cutaway three-dimensional structural schematic diagram of the fixed mounting frame, the pressure sensor and the spherical frame of the present invention;

[0032] Fig.15 It is a schematic diagram of the three-dimensional structure of the step assembly flange and the overhanging limit frame of the present invention.

[0033] In the figure: 1, galvanometer base; 2, inner frame; 3, outer frame; 4, inner voice coil motor; 5, outer voice coil motor; 6, reflective galvanometer; 7, mounting cover; 8, end plate; 9, light outlet; 10, attitude sensor; 11, sleeve frame; 12, force transmission frame; 13, fan-shaped groove; 14, fan-shaped plate; 15, swing plate; 16, first rotating axis; 17, second rotating axis; 18, fixed mounting frame; 19, magnetic mounting frame; 20, permanent magnet block; 21, alignment block; 22, embedded groove; 23, iron block; 24, Pressure sensor; 25. Spherical frame; 26. Cylindrical groove; 27. Elastic spring; 28. Mounting groove; 29. ​​Contact; 30. Hemispherical groove; 31. Wiring hole; 32. External lead hole; 33. External mounting plate; 34. Access mounting plate; 35. Structural reinforcement plate; 36. Assembly bolt; 37. Anti-drop rope; 38. Pressing ring; 39. Connecting bolt; 41. Water inlet quick connector; 42. Drainage quick connector; 43. Step assembly flange; 44. Overhanging limit frame; 45. External pressure frame; 46. Tightening bolt. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] For examples, see Figure 1-Figure 15 A high-power two-dimensional galvanometer comprises a galvanometer base 1 and an internal structure, wherein the internal structure comprises an inner frame 2, an outer frame 3, two inner voice coil motors 4 and four outer voice coil motors 5, the two inner voice coil motors 4 and the four outer voice coil motors 5 are all mounted on the galvanometer base 1, the inner frame 2 and the outer frame 3 are connected by a high-precision bearing to form a universal joint structure, the two inner voice coil motors 4 are all connected to the inner frame 2, the four outer voice coil motors 5 are all connected to the outer frame 3, the inner frame 2 and the outer frame 3 are both equipped with a reflective galvanometer 6, a mounting cover 7 is fixedly connected to the galvanometer base 1, an inner detection unit and an outer detection unit are installed in the mounting cover 7, the inner detection unit matches the inner frame 2, and the outer detection unit matches the outer frame 3, an end plate 8 is fixedly connected to the mounting cover 7, a light exit hole 9 is opened on the end plate 8, and the light exit hole 9 corresponds to the two reflective galvanometers 6, and the core optical path unit of the high-power two-dimensional galvanometer is formed by the design of the internal structure, which can It is capable of realizing fast and accurate adjustment of the mirror angle, and is convenient for controlling the precise deflection of the laser beam. Both the inner detection unit and the outer detection unit include a posture sensor 10 and a sleeve frame 11. The two posture sensors 10 are respectively installed in the two sleeve frames 11, and the two sleeve frames 11 are fixedly connected in the mounting cover 7. The two sleeve frames 11 are slidably connected with a force transmission frame 12, and the two force transmission frames 12 are provided with a fan-shaped groove 13. The two fan-shaped grooves 13 are connected with a fan-shaped plate 14, and the two fan-shaped plates 14 are fixedly connected with a swing plate 15. The two swing plates 15 are respectively connected with a first rotating shaft 16 and a second rotating shaft 17. The first rotating shaft 16 and the second rotating shaft 17 are respectively connected to the outer frame 3 and the inner frame 2, so as to form a detection on the deflection direction of the outer frame 3 relative to the galvanometer base 1, so as to facilitate the recognition of the posture of the outer frame 3, and also form a detection on the deflection direction of the inner frame 2 relative to the galvanometer base 1, so as to facilitate the recognition of the posture of the outer frame 3.

[0036] It should be further explained that an anti-collision unit is installed outside the galvanometer base 1, and the anti-collision unit includes a fixed mounting frame 18 and a magnetic mounting frame 19. The galvanometer base 1 is connected to the magnetic mounting frame 19, and the fixed mounting frame 18 is fixedly connected to a permanent magnet block 20. A positioning block 21 is fixedly connected to the magnetic mounting frame 19, and an embedding groove 22 is provided at one end of the positioning block 21 close to the permanent magnet block 20. An iron block 23 is fixedly connected in the embedding groove 22, and the iron block 23 matches the permanent magnet block 20. A pressure detection component is installed between the fixed mounting frame 18 and the positioning block 21, and the pressure detection component is used for fixed installation The relative position between the frame 18 and the alignment block 21 is identified, and the pressure detection component includes two pressure sensors 24 and two spherical frames 25. Two cylindrical grooves 26 are provided on the fixed mounting frame 18. The two spherical frames 25 are respectively slidably connected in the two cylindrical grooves 26. The two spherical frames 25 are fixedly connected with elastic springs 27. The two elastic springs 27 are respectively fixedly connected in the two cylindrical grooves 26. The two spherical frames 25 are provided with mounting grooves 28. The two pressure sensors 24 are respectively installed in the two mounting grooves 28. The alignment block 21 is provided with two contacts 29. The two contacts 29 are respectively The two spherical frames 25 are matched with the two pressure sensors 24 respectively. Two hemispherical grooves 30 are arranged on the magnetic mounting frame 19. Two contacts 29 are arranged in the two hemispherical grooves 30 respectively. The two hemispherical grooves 30 are matched with the two spherical frames 25 respectively. The anti-collision unit is equipped to facilitate the connection and installation of the galvanometer base 1 relative to the external equipment, and has the operation detection function. Under the premise of ensuring the normal output of the high-power two-dimensional galvanometer light, the operation accuracy and operation safety can be improved. The two spherical frames 25 are both provided with wiring holes 31. The two wiring holes 31 are connected to the two mounting grooves 28 respectively. The two pressure sensors 24 are matched with the two hemispherical grooves 30 respectively. The two pressure sensors 24 are matched with the two spherical frames 25 respectively. The force sensors 24 are all equipped with external leads, and the two external leads pass through the two wiring holes 31 respectively. The fixed mounting frame 18 is provided with external lead holes 32 matching the external leads to provide a routing channel for the external leads. The magnetic mounting frame 19 is fixedly connected to an external mounting plate 33, and the external mounting plate 33 is fixedly connected to an access mounting plate 34. A structural reinforcement rib plate 35 is fixedly connected between the access mounting plate 34 and the external mounting plate 33. The galvanometer base 1 is fixedly connected to the access mounting plate 34 by a plurality of assembly bolts 36, which facilitates the alignment installation between the galvanometer base 1 and the magnetic mounting frame 19.

[0037] It should be further explained that an anti-drop rope 37 is fixedly connected to the fixed mounting frame 18 by a protective bolt, and a pressure ring 38 is fixedly connected to the anti-drop rope 37. The pressure ring 38 is connected to the alignment block 21 by a connecting bolt 39 to prevent the alignment block 21 from falling relative to the fixed mounting frame 18 after the relative magnetic attraction between the permanent magnet block 20 and the iron block 23 fails, thereby reducing the risk of falling of the galvanometer base 1 and the internal structure. A cooling circulation water circuit is arranged in the galvanometer base 1, and the cooling circulation water circuit is connected with a water inlet quick connector 41 and a drainage quick connector 42. The water inlet quick connector 41 and the drainage quick connector 42 are both fixedly connected to the galvanometer base 1. Through the arrangement of the water inlet quick connector 41 and the drainage quick connector 42, the water inlet quick connector 41 and the drainage quick connector 42 are conveniently connected to the external circulation water circuit. The external circulating water channel is connected to the cooling circulating water channel via the water inlet quick connector 41, and the cooling water that has completed the circulation in the cooling circulating water channel will be discharged from the drainage quick connector 42 to facilitate the cooling of the reflecting galvanometer 6. A stepped mounting flange 43 is fixedly connected to the fixed mounting frame 18. The holes on the stepped mounting flange 43 facilitate the connection and installation of the high-power two-dimensional galvanometer as a whole relative to external structures such as a robotic arm. An extended limit frame 44 is fixedly connected to the stepped mounting flange 43. The extended limit frame 44 is equipped with an external pressure frame 45. Two side holes are provided on the external pressure frame 45. Clamping bolts 46 are provided in the two side holes. The two clamping bolts 46 are both threadedly connected to the extended limit frame 44, which can form auxiliary clamping and positioning for the optical fiber and the circulating water channel pipeline.

[0038] The inner voice coil motor 4, the outer voice coil motor 5, the posture sensor 10 and the pressure sensor 24 in this embodiment are all conventional devices purchased on the market and known to those skilled in the art, and can also be customized according to actual needs. In the present invention, we only use them and do not improve their structure and function. For those skilled in the art, their setting method, installation method and electrical connection method only need to be debugged according to the requirements of their instruction manual, and will not be described in detail here.

[0039] To sum up, the working principle of the high-power two-dimensional galvanometer is as follows: when in use, the high-power two-dimensional galvanometer is first installed with the mobile terminal of the external equipment, and the installation is assisted by the holes opened on the stepped assembly flange 43, and the optical fiber connector on the galvanometer base 1 is used to form a supporting installation of the external laser, and finally the water inlet quick connector 41 and the drainage quick connector 42 are connected with the external circulating water circuit, and the control host is installed to match the inner voice coil motor 4, the outer voice coil motor 5, the posture sensor 10 and the pressure sensor 24. The control host can realize the power-on operation of the inner voice coil motor 4 and the outer voice coil motor 5, and can also realize the reading of the corresponding detection data of the posture sensor 10 and the pressure sensor 24. During the actual operation, the mobile terminal of the external equipment The end operation realizes the movement of the overall position of the high-power two-dimensional galvanometer and the detection of the relative posture relative to the object to be processed. After the high-power two-dimensional galvanometer has a suitable angle and distance relative to the object to be processed, the external laser is powered on to output laser, and the output laser is transmitted via the optical fiber connector and acts on the two reflective galvanometers 6 in turn. The two inner voice coil motors 4 are operated in combination to realize the posture adjustment of the inner frame 2 relative to the galvanometer base 1, and the four outer voice coil motors 5 are operated in combination to realize the posture adjustment of the outer frame 3 relative to the galvanometer base 1, and finally the posture adjustment of the two reflective galvanometers 6 is realized. Through the real-time posture adjustment of the two reflective galvanometers 6, the guidance and adjustment of the laser beam are realized, so as to facilitate the focusing of the laser beam relative to the object to be processed, and the processing of the object is actually The corresponding operation is now performed. During the operation, the mobile terminal of the external device drives the high-power two-dimensional galvanometer to operate as a whole to form an operation coverage of the object to be processed. During this process, the control host calls the detection data of the two posture sensors 10 and the detection data of the two pressure sensors 24 in real time. According to the detection data of the two posture sensors 10, the verification and judgment of the postures of the inner frame 2 and the outer frame 3 can be formed, so as to achieve the judgment and verification of the guidance and control state of the laser beam through the reflective galvanometer 6. Due to the relative magnetic attraction between the permanent magnet block 20 and the iron block 23, the relative position between the fixed mounting frame 18 and the alignment block 21 will be kept stationary. In this state, the two spherical frames 25 are respectively embedded in the two hemispherical grooves 30, and the two contacts 29 act on the two Under the action of the pressure sensors 24, the two pressure sensors 24 will form pressure readings. When the relative position between the fixed mounting frame 18 and the alignment block 21 does not change, the pressure readings of the two pressure sensors 24 will be the same or similar. When the relative position between the fixed mounting frame 18 and the alignment block 21 changes, the pressure readings of the two pressure sensors 24 will change relatively. According to the change in the readings of the two pressure sensors 24, a judgment is formed on the relative position stability state between the fixed mounting frame 18 and the alignment block 21 to form the operation control of the mobile terminal of the external device. When the pressure readings of the two pressure sensors 24 decrease synchronously and both tend to zero, it is also judged that the relative position between the fixed mounting frame 18 and the alignment block 21 has changed.After that, the control host controls the mobile terminal of the external device to form a stationary state, so as to improve the protection effect of the high-power two-dimensional galvanometer.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-power two-dimensional galvanometer, comprising a galvanometer base (1), characterized in that: The invention also includes an internal structure, wherein the internal structure includes an inner frame (2), an outer frame (3), two inner voice coil motors (4) and four outer voice coil motors (5), wherein the two inner voice coil motors (4) and the four outer voice coil motors (5) are all mounted on the galvanometer base (1), and the inner frame (2) and the outer frame (3) are connected via a high-precision bearing to form a universal joint structure, wherein the two inner voice coil motors (4) are all connected to the inner frame (2), and the four outer voice coil motors (5) are all connected to the outer frame (3), and the inner frame (2) and The outer frames (3) are each installed with a reflective galvanometer (6); a mounting cover (7) is fixedly connected to the galvanometer base (1); an inner detection unit and an outer detection unit are installed inside the mounting cover (7); the inner detection unit matches the inner frame (2); the outer detection unit matches the outer frame (3); an end plate (8) is fixedly connected to the mounting cover (7); a light exit hole (9) is formed on the end plate (8); the light exit hole (9) corresponds to the two reflective galvanometers (6); and an anti-collision unit is installed outside the galvanometer base (1); The inner detection unit and the outer detection unit both comprise a posture sensor (10) and a sleeve frame (11), the two posture sensors (10) are respectively mounted in the two sleeve frames (11), the two sleeve frames (11) are fixedly connected in the mounting cover (7), the two sleeve frames (11) are slidably connected to a force transmission frame (12), the two force transmission frames (12) are each provided with a fan-shaped groove (13), the two fan-shaped grooves (13) are each connected to a fan-shaped plate (14), the two fan-shaped plates (14) are fixedly connected to a swing plate (15), the two swing plates (15) are respectively connected to a first rotating shaft (16) and a second rotating shaft (17), the first rotating shaft (16) and the second rotating shaft (17) are respectively connected to the outer frame (3) and the inner frame (2); The anti-collision unit comprises a fixed mounting frame (18) and a magnetic mounting frame (19); the galvanometer base (1) is connected to the magnetic mounting frame (19); the fixed mounting frame (18) is fixedly connected to a permanent magnet block (20); the magnetic mounting frame (19) is fixedly connected to an alignment block (21); an embedding groove (22) is provided at one end of the alignment block (21) close to the permanent magnet block (20); an iron block (23) is fixedly connected in the embedding groove (22); the iron block (23) matches the permanent magnet block (20); a pressure detection component is installed between the fixed mounting frame (18) and the alignment block (21); the pressure detection component is used to identify the relative position between the fixed mounting frame (18) and the alignment block (21); The pressure detection assembly comprises two pressure sensors (24) and two spherical frames (25); the fixed mounting frame (18) is provided with two cylindrical grooves (26); the two spherical frames (25) are respectively slidably connected in the two cylindrical grooves (26); the two spherical frames (25) are both fixedly connected with elastic springs (27); the two elastic springs (27) are respectively fixedly connected in the two cylindrical grooves (26); the two spherical frames (25) are both provided with mounting grooves (28); the two pressure sensors (24) are respectively mounted in the two mounting grooves (28); the alignment block (21) is provided with two contacts (29); the two contacts (29) are respectively matched with the two pressure sensors (24).

2. A high-power two-dimensional galvanometer according to claim 1, characterized in that: Two hemispherical grooves (30) are arranged on the magnetic mounting frame (19), the two contacts (29) are respectively arranged in the two hemispherical grooves (30), and the two hemispherical grooves (30) are matched with the two spherical frames (25) respectively.

3. A high-power two-dimensional galvanometer according to claim 2, characterized in that: The two spherical frames (25) are each provided with a wiring hole (31), the two wiring holes (31) are respectively connected to the two mounting grooves (28), the two pressure sensors (24) are each provided with an external lead wire, the two external lead wires respectively pass through the two wiring holes (31), and the fixed mounting frame (18) is provided with an external lead wire hole (32) matching the external lead wire.

4. A high-power two-dimensional galvanometer according to claim 3, characterized in that: The magnetic mounting frame (19) is fixedly connected to an external mounting plate (33), the external mounting plate (33) is fixedly connected to an access mounting plate (34), a structural reinforcing rib plate (35) is fixedly connected between the access mounting plate (34) and the external mounting plate (33), and the galvanometer base (1) is fixedly connected to the access mounting plate (34) via a plurality of assembly bolts (36).

5. A high-power two-dimensional galvanometer according to claim 4, characterized in that: An anti-drop rope (37) is fixedly connected to the fixed mounting frame (18) via protective bolts, and a pressure ring (38) is fixedly connected to the anti-drop rope (37), and the pressure ring (38) is connected to the alignment block (21) via connecting bolts (39).

6. A high-power two-dimensional galvanometer according to claim 5, characterized in that: A cooling circulation water circuit is provided in the galvanometer base (1), the cooling circulation water circuit being connected to a water inlet quick connector (41) and a water discharge quick connector (42), and the water inlet quick connector (41) and the water discharge quick connector (42) are both fixedly connected to the galvanometer base (1).

7. A high-power two-dimensional galvanometer according to claim 6, characterized in that: The fixed mounting frame (18) is fixedly connected to a stepped mounting flange (43), the stepped mounting flange (43) is fixedly connected to an outward-extending limiting frame (44), the outward-extending limiting frame (44) is equipped with an external pressure frame (45), the external pressure frame (45) is provided with two side holes, and clamping bolts (46) are arranged in the two side holes, and the two clamping bolts (46) are threadedly connected to the outward-extending limiting frame (44).

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