Transformer and safety barrier

Abstract

The transformer comprises a first insulating layer, an intrinsic safety explosion-proof layer, a second insulating layer, a non-intrinsic safety explosion-proof layer and a third insulating layer which are sequentially arranged in a stacked mode, and the thickness of the second insulating layer is not smaller than 1 mm; the intrinsic safety explosion-proof layer is arranged on one side of the non-intrinsic safety explosion-proof layer, the transformer only needs to meet the requirement that the thickness of the second insulating layer is not smaller than 1 mm, the thickness of the first insulating layer can be smaller than 1 mm, and therefore the thickness of the transformer can be effectively reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a bellows assembly and semiconductor process equipment. Background Art

[0002] Many industries such as oil and gas extraction, oil refining, chemicals, pharmaceuticals, coal mining and even electronic device manufacturing are industrial fields with potential explosion hazards. In such occasions, safety barriers are needed to monitor or control signals. Safety barriers can limit the voltage and current of on-site energy to achieve explosion-proof effects. Explosion-proof transformers are one of the core components of safety barriers, and almost every safety barrier requires several explosion-proof transformers. In order to meet the requirements of intrinsic safety, conventional explosion-proof transformers have more layers and thicker plates, resulting in the design of the safety barrier shell cannot be less than 12mm, which increases the cost. Summary of the invention

[0003] In view of this, the present application provides a transformer, which can effectively reduce the thickness of the transformer through a unique lamination design, thereby facilitating the reduction of the volume of the safety barrier to reduce costs. In addition, the present application also provides a safety barrier including the above transformer.

[0004] In order to achieve the above objectives, this application provides the following technical solutions:

[0005] A transformer comprises a first insulating layer, an intrinsically safe explosion-proof layer, a second insulating layer, a non-intrinsically safe explosion-proof layer and a third insulating layer which are stacked in sequence;

[0006] Wherein, the thickness of the second insulating layer is not less than 1 mm.

[0007] Preferably, the thickness of the first insulating layer is consistent with the thickness of the third insulating layer, and both are not less than 0.5 mm.

[0008] Preferably, the non-intrinsically safe explosion-proof layer includes a non-intrinsically safe signal layer, a non-intrinsically safe power supply layer, and a fourth insulating layer arranged between the non-intrinsically safe signal layer and the non-intrinsically safe power supply layer;

[0009] Wherein, the non-intrinsically safe signal layer is located between the second insulating layer and the fourth insulating layer.

[0010] Preferably, the non-intrinsically safe signal layer, the non-intrinsically safe power supply layer and the intrinsically safe explosion-proof layer all include an insulating substrate, and coils for forming windings are provided on both surfaces of the insulating substrate;

[0011] Furthermore, the distance between the coil and the edge of the insulating substrate is greater than or equal to 0.5 mm.

[0012] Preferably, three groups of connection terminals are provided on the insulating substrate, and the three groups of connection terminals are respectively connected to the coil located at the intrinsically safe explosion-proof layer, the coil located at the non-intrinsically safe signal layer, and the coil at the non-intrinsically safe power supply layer;

[0013] Furthermore, each group of the connection terminals includes two sub-connection terminals.

[0014] Preferably, the transformer is provided with buried vias, and the buried vias are used to connect the coils located on the two board surfaces of the insulating substrate.

[0015] Preferably, the thickness of the fourth insulating layer and the thickness of the insulating substrate are both not less than 0.2 mm.

[0016] Preferably, the terminals of the transformer with the same name are marked by silk screen printing.

[0017] Preferably, positioning holes are provided on the insulating substrate.

[0018] A safety barrier comprises the above-mentioned transformer.

[0019] The present application provides a transformer with an intrinsically safe explosion-proof layer located on one side of a non-intrinsically safe explosion-proof layer. In this way, the only insulating layer directly disposed between the intrinsically safe explosion-proof layer and the non-intrinsically safe explosion-proof layer is the second insulating layer. Compared with the technical solution of disposing the intrinsically safe explosion-proof layer in the middle of the non-intrinsically safe explosion-proof layer, the above-mentioned transformer in the present application does not need to ensure that both the upper and lower layers of the intrinsically safe explosion-proof layer meet the intrinsic safety requirement of being greater than 1 mm. That is, the transformer in the present application only needs to meet the requirement that the thickness of the second insulating layer is not less than 1 mm, and the first insulating layer can be less than 1 mm. In this way, the thickness of the transformer can be effectively reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0021] Figure 1 A schematic diagram of a part of the structure of a semiconductor process equipment in the related art;

[0022] Figure 2 It is a schematic diagram of the structure of a bellows assembly in the related art.

[0023] exist Figure 1-Figure 2 middle:

[0024] 1-first insulating layer, 2-second insulating layer, 3-third insulating layer, 4-fourth insulating layer, 5-intrinsically safe explosion-proof layer, 6-non-intrinsically safe signal layer, 7-non-intrinsically safe power supply layer, 8-insulating substrate, 9-coil, 10-sub-terminal. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] like Figure 1-Figure 2 As shown, an embodiment of the present application provides a transformer, which includes a first insulating layer 1, an intrinsically safe explosion-proof layer 5, a second insulating layer 2, a non-intrinsically safe explosion-proof layer and a third insulating layer 3 which are stacked in sequence; that is, the transformer in the embodiment of the present application is a multi-layer structure, and in a first direction (i.e., a certain direction, such as the height direction of the transformer, or the direction toward the ground, etc.), the first insulating layer 1, the intrinsically safe explosion-proof layer 5, the second insulating layer 2, the non-intrinsically safe explosion-proof layer and the third insulating layer 3 are arranged in sequence.

[0027] It should be noted that the intrinsically safe explosion-proof layer 5 mentioned above refers to the part of the transformer where the intrinsically safe coil is arranged. The non-intrinsically safe explosion-proof layer refers to the part of the transformer where the non-intrinsically safe coil is arranged, including the non-intrinsically safe signal layer 6 and the non-intrinsically safe power supply layer 7 mentioned below.

[0028] In addition, the second insulating layer 2 mentioned above is a solid insulating layer used to isolate the intrinsically safe coils and non-intrinsically safe coils in the transformer, and the thickness of the second insulating layer 2 is not less than 1 mm; in this way, the thickness of the solid insulation between the intrinsically safe coils and non-intrinsically safe coils in the transformer meets the intrinsic safety requirements.

[0029] As described above, the transformer intrinsically safe explosion-proof layer 5 in the embodiment of the present application is located on one side of the non-intrinsically safe explosion-proof layer. In this way, the only insulating layer directly arranged between the intrinsically safe explosion-proof layer 5 and the non-intrinsically safe explosion-proof layer is the second insulating layer 2. Compared with the technical solution of setting the intrinsically safe explosion-proof layer 5 in the middle position of the non-intrinsically safe explosion-proof layer, the above-mentioned transformer in the present application does not need to ensure that the upper and lower layers of the intrinsically safe explosion-proof layer 5 meet the intrinsic safety requirements greater than 1 mm, that is, the transformer in the present application only needs to meet the thickness of the second insulating layer 2 is not less than 1 mm, and the first insulating layer 1 can be less than 1 mm. In this way, the thickness of the transformer can be effectively reduced.

[0030] In a further embodiment, the sum of the thickness of the first insulating layer 1 and the thickness of the third insulating layer 3 is not less than 1 mm, so that the first insulating layer 1 and the third insulating layer 3 can be used to prevent the intrinsically safe coil and the non-intrinsically safe coil from falling off, and can also avoid safety problems caused by insufficient insulation properties of the transformer core.

[0031] Further preferably, the thickness of the first insulating layer 1 is consistent with the thickness of the third insulating layer 3, and both are not less than 0.5 mm. By setting the thickness of the first insulating layer 1 and the thickness of the third insulating layer 3 to be consistent, it is avoided that the first insulating layer 1 or the third insulating layer 3 cannot effectively prevent the coil from falling off due to uneven thickness distribution.

[0032] In an exemplary embodiment, the thickness of the second insulating layer 2 is set to 1 mm, and the thickness of the first insulating layer 1 is consistent with the thickness of the third insulating layer 3, and both are 0.5 mm. Under this setting, it can ensure that the transformer meets the intrinsic safety requirements and minimize the thickness of the transformer.

[0033] In some embodiments, the non-intrinsically safe explosion-proof layer includes a non-intrinsically safe signal layer 6, a non-intrinsically safe power supply layer 7, and a fourth insulating layer 4 disposed between the non-intrinsically safe signal layer 6 and the non-intrinsically safe power supply layer 7; and the non-intrinsically safe signal layer 6 is located between the second insulating layer 2 and the fourth insulating layer 4. That is, the specific laminated structure of the transformer in this embodiment is that the first insulating layer 1, the intrinsically safe explosion-proof layer 5, the second insulating layer 2, the non-intrinsically safe signal layer 6, the fourth insulating layer 4, the non-intrinsically safe power supply layer 7 and the third insulating layer 3 are sequentially stacked in a certain direction.

[0034] Regarding the thickness of the fourth insulating layer 4, in the specific implementation process, it can be adaptively designed as needed, and it only needs to meet the insulation requirements. Exemplarily, the thickness of the fourth insulating layer 4 can be set to be no less than 0.2 mm, for example: 0.2 mm, 0.3 mm, etc.; but preferably 0.2 mm, so that the thickness of the transformer can be reduced to the greatest extent on the basis of meeting the insulation requirements.

[0035] Further, based on the above structure, the non-intrinsically safe signal layer 6, the non-intrinsically safe power layer 7 and the intrinsically safe explosion-proof layer 5 all include an insulating substrate 8, and the two board surfaces of the insulating substrate 8 are provided with coils 9 for forming windings; it should be noted that the board surface of the insulating substrate 8 refers to the largest surface in the insulating substrate 8. At the same time, in order to meet the process implementation requirements and insulation requirements, the distance between the coil 9 and the edge of the insulating substrate 8 is greater than or equal to 0.5mm. For example, the distance between the coil 9 and the edge of the insulating substrate 8 can be 0.5mm, 0.6mm, 0.7mm, etc.

[0036] It should be noted that the edge of the insulating substrate 8 includes an outer edge and an inner edge. The outer edge of the insulating substrate 8 refers to the outer edge of the plate surface of the insulating substrate 8, and the inner edge of the insulating substrate 8 refers to the edge of the hollow area on the insulating substrate 8. The hollow area is the area in the insulating substrate 8 for the magnetic core to pass through. In an exemplary embodiment, Figure 2 As shown, an annular wiring area is provided on the insulating substrate 8, the inner edge of the annular wiring area is the inner edge of the insulating substrate 8, and the outer edge is a part of the outer edge of the insulating substrate 8, and the radius of the inner edge of the annular wiring area is 3.65 mm; the radius of the outer edge is 7.45 mm. It should be understood that the above embodiment is only an exemplary description of the shape and size of the insulating substrate 8, but the present application is not limited thereto. In the specific implementation process, the shape and size of the insulating substrate 8 can be adaptively designed as needed.

[0037] In addition, regarding the thickness of the insulating substrate 8, during the specific implementation process, an adaptive design can be performed as needed, and it only needs to meet the insulation requirements. Exemplarily, the thickness of the insulating substrate 8 can be set to not less than 0.2 mm, for example: 0.2 mm, 0.3 mm, etc.; but preferably 0.2 mm, so that the thickness of the transformer can be reduced to the greatest extent while meeting the insulation requirements.

[0038] Furthermore, three groups of terminals are provided on the insulating substrate 8, which are respectively connected to the coil 9 located in the intrinsically safe explosion-proof layer 5, the coil 9 located in the non-intrinsically safe signal layer 6, and the coil 9 in the non-intrinsically safe power supply layer 7; and each group of terminals includes two sub-terminals 10. Such a setting is conducive to reducing the number of insulating substrates 8, and further conducive to reducing the thickness of the transformer.

[0039] To facilitate understanding of the layout of the coil 9 on the insulating substrate 8 and the connection between the coil 9 and the terminal, the following takes the example that the intrinsically safe explosion-proof layer 5 includes a first insulating substrate 8, the non-intrinsically safe signal layer 6 includes a second insulating substrate 8, the non-intrinsically safe power supply layer 7 includes a third insulating substrate 8, and the first insulating substrate 8, the second insulating substrate 8 and the third insulating substrate 8 are all the insulating substrates 8 with a ring-shaped wiring area mentioned above, and the layout of the coil 9 on the insulating substrate 8 and the connection between the coil 9 and the terminal are described in detail.

[0040] like Figure 2 As shown, six sub-terminals 10 formed by pads are provided on the insulating substrate 8. For the convenience of description, the six pads are defined as a first pad, a second pad, a third pad, a fourth pad, a fifth pad and a sixth pad. In addition, the coil 9 includes a first coil, a second coil, a third coil, a fourth coil, a fifth coil and a sixth coil, wherein:

[0041] The first pad and the second pad are a group, and the intrinsically safe explosion-proof layer 5 includes a first insulating substrate 8, and a first coil and a second coil respectively located on two surfaces of the first insulating substrate 8, wherein the line width of the first coil and the second coil are both set to 0.12mm, the number of turns are both 9 turns, and the spacing between two adjacent turns of the first coil and the second coil is 0.125mm. During the process implementation, the first coil is connected to the first pad, and is connected to the second coil after winding 9 turns on one surface of the first insulating substrate 8, and the second coil is also connected to the second pad after winding 9 turns on the other surface of the first insulating substrate 8, so as to form the winding of the intrinsically safe explosion-proof layer 5 of the transformer.

[0042] The third pad and the fourth pad form a group, and the non-intrinsically safe signal layer 6 includes a second insulating substrate 8, and a third coil and a fourth coil respectively located on two surfaces of the second insulating substrate 8, wherein the line width of the third coil and the fourth coil are both set to 0.12mm, the number of turns is 9, and the spacing between two adjacent turns of the third coil and the fourth coil is 0.125mm. During the process implementation, the third coil is connected to the third pad, and is connected to the fourth coil after winding 9 turns on one surface of the second insulating substrate 8, and the fourth coil is also connected to the fourth pad after winding 9 turns on the other surface of the second insulating substrate 8, so as to form the winding of the non-intrinsically safe signal layer 6 of the transformer.

[0043] The fifth pad and the sixth pad are a group, and the non-intrinsically safe power supply layer 7 includes a third insulating substrate 8, and a fifth coil and a sixth coil respectively located on two surfaces of the third insulating substrate 8, wherein the line width of the fifth coil and the sixth coil are both set to 0.2, the total number of turns of the fifth coil and the sixth coil are both 9 turns, and the spacing between two adjacent turns of the fifth coil and the sixth coil is 0.25mm. During the process implementation, the fifth coil is connected to the fifth pad, and is connected to the sixth coil after winding 4.5 turns on one surface of the third insulating substrate 8, and the sixth coil is also connected to the sixth pad after winding 4.5 turns on the other surface of the third insulating substrate 8, so as to form the winding of the non-intrinsically safe power supply layer 7 of the transformer.

[0044] Further, regarding the location of the pad on the insulating substrate 8, in an exemplary embodiment, Figure 2As shown, the above three groups of pads are respectively arranged at opposite ends of the insulating substrate 8, wherein two of the three groups of pads are arranged at one end of the insulating substrate 8, and the other group is arranged at the other end of the insulating substrate 8. In addition, the distance between the pads in each group of pads is greater than 0.508 mm, the distance between two adjacent groups of pads is greater than 2.54 mm, and the distance from the connection line of the pad at either end to the coil 9 is greater than 2.54 mm. In this way, the withstand voltage requirement is met. Of course, the above is only an exemplary description of the setting position of the pad, but the present application is not limited thereto. For example, in a specific implementation process, the three groups of pads can also be respectively arranged near different ends of the insulating substrate 8.

[0045] Furthermore, the above-mentioned pad is a stamp hole pad, and the size of the stamp hole can be adaptively designed according to needs. For example, the diameter of the stamp hole can be set to 1.5 mm.

[0046] It should be understood that the line width of the coil 9, the number of turns of each coil 9, and the distance between two adjacent turns of the coil 9 in the board surface of the same insulating substrate 8 are all exemplary implementations, but the present application is not limited thereto. In the specific implementation process, it can be adaptively designed as needed. Exemplarily, the line width of the first coil, the second coil, the third coil, and the fourth coil can be set to 0.15mm, the number of turns is 12 turns, and the distance between two adjacent turns of the first coil, the second coil, the third coil, and the fourth coil is 0.15mm; correspondingly, the line width of the fifth coil and the sixth coil can be set to 0.25mm, the total number of turns of the fifth coil and the sixth coil is 12 turns, and the distance between two adjacent turns of the fifth coil and the sixth coil is 0.25mm.

[0047] Furthermore, in some embodiments, buried vias and / or vias are provided to facilitate the connection of coils 9 on different surfaces of the insulating substrate 8. In a preferred embodiment, three buried vias are provided and are used to connect the first coil and the second coil on the two surfaces of the first insulating substrate 8, the third coil and the fourth coil on the two surfaces of the second insulating substrate 8, and the fifth coil and the sixth coil on the two surfaces of the third insulating substrate 8, respectively.

[0048] The size of the buried via and / or the via hole can be adaptively adjusted as needed during the specific implementation process. For example, the radius of the buried via and / or the via hole can be set to 0.25 mm or 0.5 mm, etc.

[0049] Furthermore, by setting a "teardrop line" to connect the coil 9 and the buried via, as well as the coil 9 and the pad, the reliability and stability of the circuit connection can be improved and the defect rate caused by the process can be reduced.

[0050] Furthermore, the same-named terminals of the transformer are marked by silk screen printing. This ensures the consistency of current direction, improves insulation level and safety performance, and quickly determines the phase relationship.

[0051] In some embodiments, the insulating substrate 8 is provided with positioning holes; during the transformer production process, the insulating substrate 8 is positioned using the positioning holes, thereby facilitating the implementation of the process. The number of positioning holes can be adaptively designed as needed. For example, the number of positioning holes can be 3, 4, etc. In addition, the size of the positioning holes is not specifically limited in the embodiments of the present application, but it should be ensured that it will not affect the strength of the insulating substrate 8 and will not interfere with the process of winding on the insulating substrate 8.

[0052] In addition, an embodiment of the present application further provides a safety barrier, and the safety barrier includes the above-mentioned transformer. It should be noted that since the safety barrier includes the above-mentioned transformer, the beneficial effects of the safety barrier brought by the transformer are discussed in detail above, and the present application will not repeat them here.

[0053] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, rather than limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0054] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0055] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0056] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0057] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only used to more clearly explain the technical solutions and cannot be used to limit the scope of protection of the present application.

[0058] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A transformer, characterized in that: It comprises a first insulating layer, an intrinsically safe explosion-proof layer, a second insulating layer, a non-intrinsically safe explosion-proof layer and a third insulating layer which are stacked in sequence; Wherein, the thickness of the second insulating layer is not less than 1 mm.

2. The transformer according to claim 1, characterized in that: The thickness of the first insulating layer is consistent with the thickness of the third insulating layer, and both are not less than 0.5 mm.

3. The transformer according to claim 1 or 2, characterized in that: The non-intrinsically safe explosion-proof layer includes a non-intrinsically safe signal layer, a non-intrinsically safe power supply layer, and a fourth insulating layer arranged between the non-intrinsically safe signal layer and the non-intrinsically safe power supply layer; Wherein, the non-intrinsically safe signal layer is located between the second insulating layer and the fourth insulating layer.

4. The transformer according to claim 3, characterized in that: The non-intrinsically safe signal layer, the non-intrinsically safe power supply layer and the intrinsically safe explosion-proof layer all include an insulating substrate, and coils for forming windings are arranged on both surfaces of the insulating substrate; Furthermore, the distance between the coil and the edge of the insulating substrate is greater than or equal to 0.5 mm.

5. The transformer according to claim 4, characterized in that: Three groups of connection terminals are arranged on the insulating substrate, and the three groups of connection terminals are respectively connected to the coil located at the intrinsically safe explosion-proof layer, the coil located at the non-intrinsically safe signal layer, and the coil located at the non-intrinsically safe power supply layer; Furthermore, each group of the connection terminals includes two sub-connection terminals.

6. The transformer according to claim 4, characterized in that: The transformer is provided with buried vias, and the buried vias are used to connect the coils located on the two board surfaces of the insulating substrate.

7. The transformer according to claim 4, characterized in that: The thickness of the fourth insulating layer and the thickness of the insulating substrate are both not less than 0.2 mm.

8. The transformer according to claim 1, characterized in that: The silk screen marks the terminals of the transformer with the same name.

9. The transformer according to claim 4, characterized in that: The insulating substrate is provided with positioning holes.

10. A safety barrier, characterized in that: Comprising the transformer according to any one of claims 1-9.

Images