A large-sized silicon wafer carrier structure

Abstract

The present invention relates to the technical field of silicon wafer carriers, and in particular to a large-size silicon wafer carrier structure, which includes a moving seat. A silicon wafer carrier seat is placed on the moving seat. Two placement roller shafts are rotatably connected to the silicon wafer carrier seat. An adjustable silicon wafer limiting mechanism is rotatably connected to the silicon wafer carrier seat. A rotating frame is rotatably connected to the adjusting block, and a silicon wafer driving mechanism is installed on the rotating frame. A protective cover is slidably fitted on the silicon wafer carrier seat. When the silicon wafer carrier seat is placed in a cleaning solution for silicon wafer cleaning, by using the silicon wafer driving mechanism, with the cooperation of the silicon wafer driving wheel and the placement roller shafts, the silicon wafers that rotate during cleaning can ensure that the cleaning solution evenly covers the entire surface of the silicon wafers, avoiding cleaning dead corners and improving the cleaning effect. Rotation can increase the flow contact between the silicon wafers and the cleaning solution, improving the cleaning rate. Rotation can prevent bubbles from staying on the surface of the silicon wafers, ensuring a better cleaning effect.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a large-size silicon wafer flower basket structure. Background Art

[0002] Silicon wafers are basic materials in the semiconductor industry and are widely used in integrated circuits (ICs), optoelectronic devices, solar cells, and other fields. The following are several important aspects about silicon wafers:

[0003] Silicon wafers are thin slices made of high-purity single-crystal silicon materials, usually with a thickness between 200 microns and 1 mm, and common diameters of 100 mm, 150 mm, 200 mm, 300 mm, etc. The surface of the silicon wafer is smooth and has a high degree of flatness and finish, which is convenient for subsequent processes such as lithography, deposition and etching.

[0004] Large wafer baskets usually refer to carriers used in the manufacturing process of integrated circuits (ICs) or other semiconductor devices composed of multiple silicon wafers. Large wafer baskets are a type of equipment used to store, transport and handle multiple silicon wafers, and are typically used in semiconductor manufacturing and testing processes. The basket is designed to minimize physical contact with the silicon wafers to avoid scratches and contamination. In the silicon wafer cleaning process, the basket structure plays a vital role, mainly used to load, protect and optimize the cleaning process.

[0005] When cleaning silicon wafers, the existing silicon wafer basket neatly places the silicon wafers in the separation grooves of the basket. At this time, a blind area may be formed where the silicon wafers contact the basket, resulting in the cleaning liquid not being able to evenly cover the entire surface of the silicon wafer. As a result, some areas may not be cleaned thoroughly, leaving contaminants or residues, affecting subsequent processing.

[0006] In summary, the prior art lacks a technology for driving a silicon wafer when cleaning a silicon wafer. Summary of the invention

[0007] The purpose of the present invention is to solve the shortcomings of the background technology and propose a large-size silicon wafer basket structure.

[0008] To achieve the above object, the technical solution adopted by the present invention is: a large-size silicon wafer carrier structure, including a moving seat, on which a silicon wafer carrier seat is placed. Two placement roller shafts are rotatably connected to the silicon wafer carrier seat. An adjustable silicon wafer limiting mechanism is rotatably connected to the silicon wafer carrier seat. One side of the silicon wafer carrier seat is fixedly connected with a fixed frame, and an electric push rod A is fixedly connected inside the fixed frame. The other end of the electric push rod A is fixedly connected with an adjustment block. One side of the upper end of the fixed frame is fixedly connected with an adjustment rack. An adjustment block is slidably matched inside the fixed frame. One end of the adjustment block is rotatably connected with a worm. One end of the worm close to the adjustment rack is fixedly connected with an adjustment wheel, and the adjustment wheel is meshed and driven with the adjustment rack. A rotating frame is rotatably connected to the adjustment block. One end of the rotating frame connected to the adjustment block is fixedly connected with a worm gear, and the worm gear is meshed and driven with the worm. A silicon wafer driving mechanism is installed on the rotating frame. The silicon wafer driving mechanism includes a U-shaped frame. Both ends of the U-shaped frame are fixedly connected with guide shafts, and the guide shafts are slidably matched with the rotating frame through penetration. One end of the guide shaft is fixedly connected with a spring, and the other end of the spring is fixedly connected with the rotating frame. A transmission rod is rotatably connected to the U-shaped frame. A plurality of silicon wafer driving wheels are fixedly connected to the transmission rod in a linear structure. One end of the U-shaped frame is fixedly connected with a motor cover, and a motor is fixedly installed inside the motor cover. The output end of the motor is fixedly connected with one end of the transmission rod. A protective cover is slidably matched on the silicon wafer carrier seat.

[0009] Preferably, one side of the moving seat is fixedly connected with a push handle. A plurality of insertion holes are opened on the moving seat, and a plurality of brake wheels are installed at the bottom of the moving seat.

[0010] Preferably, a plurality of insertion rods are fixedly connected to the bottom of the silicon wafer carrier seat. The bottom end of the insertion rod is arranged in a conical structure, and the insertion rod is movably inserted into the insertion hole. A bent guide groove is opened on one side of the silicon wafer carrier seat. Handle bars are fixedly connected to both sides of the silicon wafer carrier seat, and the bottom end of the silicon wafer carrier seat is arranged in an inclined plane structure.

[0011] Preferably, the adjustable silicon wafer limiting mechanism includes a bidirectional lead screw. The bidirectional lead screw is rotatably connected to the silicon wafer carrier seat through penetration. One end of the bidirectional lead screw is fixedly connected with a handle. A plurality of groups of double-threaded threads are linearly arranged on the bidirectional lead screw. A plurality of groups of silicon wafer limiting plates are threadedly connected to the bidirectional lead screw in a linear structure. Both ends of the silicon wafer limiting plate are slidably matched with the placement roller shaft. A scale is fixedly connected to the silicon wafer limiting plate on the side close to the handle, and the scale is slidably matched with the silicon wafer carrier seat through penetration.

[0012] Preferably, a guide head is fixedly connected to the bottom end of one side of the protective cover. The guide head is slidably engaged with the bent guide groove. A sliding rod is fixedly connected to the protective cover. A movable frame is slidably engaged with the sliding rod. An electric push rod B is fixedly connected to the bottom of the movable frame. The other end of the electric push rod B is fixedly connected to the silicon wafer carrier seat.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. When the silicon wafer carrier seat is placed in the cleaning solution for silicon wafer cleaning, by using the silicon wafer driving mechanism, with the cooperation of the silicon wafer driving wheel and the placing roller shaft, the silicon wafers that rotate during cleaning can ensure that the cleaning solution evenly covers the entire surface of the silicon wafers, avoiding cleaning dead corners and improving the cleaning effect. Through continuous rotation, the dirt and impurities on the surface of the silicon wafers can be removed by the cleaning solution more quickly, thus shortening the cleaning time. Rotation can increase the flow contact between the silicon wafers and the cleaning solution, improving the cleaning rate. Rotation can prevent the retention of bubbles on the surface of the silicon wafers, ensuring a better cleaning effect;

[0015] 2. By setting the adjusting block, the position of the silicon wafer driving mechanism can be adjusted and its direction can be changed, enabling the silicon wafer driving mechanism to drive silicon wafers of different sizes, increasing the versatility of the equipment. At the same time, turning the silicon wafer driving mechanism facilitates placing the silicon wafers onto the silicon wafer carrier seat, improving production efficiency;

[0016] 3. By setting the silicon wafer limit plates with adjustable spacing, it is convenient to limit silicon wafers of different thicknesses, thereby ensuring the stability of the silicon wafers during storage and transportation, preventing tilting or displacement. At the same time, by setting the protective cover, during the transportation of the silicon wafers, it provides additional protection, preventing the influence of external objects, dust or chemical substances on the silicon wafers, effectively preventing external contamination, reducing the risk during the transportation of the silicon wafers, and improving the safety and stability of the silicon wafer transportation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the overall structure during the transfer of a large-size silicon wafer carrier structure of the present invention;

[0018] Figure 2 It is a schematic overall structure diagram of a large-size silicon wafer carrier structure of the present invention;

[0019] Figure 3 It is a schematic structural diagram of the moving seat of a large-size silicon wafer carrier structure of the present invention;

[0020] Figure 4 It is a schematic structural diagram of the silicon wafer carrier seat of a large-size silicon wafer carrier structure of the present invention;

[0021] Figure 5Schematic diagram of the adjustable wafer limiting mechanism of a large-sized wafer carrier structure according to the present invention;

[0022] Figure 6 Schematic diagram of the fixing frame and other structures of a large-sized wafer carrier structure according to the present invention;

[0023] Figure 7 Partial cross-sectional unfolded schematic diagram of the wafer driving mechanism and other structures of a large-sized wafer carrier structure according to the present invention;

[0024] Figure 8 Schematic diagram of the protective cover structure of a large-sized wafer carrier structure according to the present invention.

[0025] The labels in the figure are: 1. Moving seat; 2. Wafer carrier seat; 3. Placing roller shaft; 4. Adjustable wafer limiting mechanism; 5. Fixing frame; 6. Adjusting block; 7. Rotating frame; 8. Wafer driving mechanism; 9. Protective cover; 101. Pusher; 102. Insertion hole; 103. Brake wheel; 201. Insertion rod; 202. Bent guide groove; 203. Handle; 401. Bidirectional lead screw; 402. Handle; 403. Wafer limiting plate; 404. Scale; 501. Electric push rod A; 502. Adjusting rack; 601. Worm; 602. Adjusting wheel; 701. Worm gear; 801. U-shaped frame; 802. Guide shaft; 803. Spring; 804. Transmission rod; 805. Wafer driving wheel; 806. Motor cover; 807. Motor; 901. Guide head; 902. Slide bar; 903. Moving frame; 904. Electric push rod B. Detailed implementation manners

[0026] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art can think of other obvious variations.

[0027] As Figures 1-8A large-sized silicon wafer carrier structure is shown, which includes a moving seat 1. A silicon wafer carrier seat 2 is placed on the moving seat 1. Two placing roller shafts 3 are rotatably connected to the silicon wafer carrier seat 2. An adjustable silicon wafer limiting mechanism 4 is rotatably connected to the silicon wafer carrier seat 2. A fixed frame 5 is fixedly connected to one side of the silicon wafer carrier seat 2. An electric push rod A501 is fixedly connected inside the fixed frame 5. The other end of the electric push rod A501 is fixedly connected to an adjusting block 6. An adjusting rack 502 is fixedly connected to one side of the upper end of the fixed frame 5. The adjusting block 6 is slidably fitted inside the fixed frame 5. One end of the adjusting block 6 is rotatably connected with a worm 601. One end of the worm 601 close to the adjusting rack 502 is fixedly connected with an adjusting wheel 602. The adjusting wheel 602 is meshed and driven with the adjusting rack 502. A rotating frame 7 is rotatably connected to the adjusting block 6. One end of the rotating frame 7 connected to the adjusting block 6 is fixedly connected with a worm gear 701. The worm gear 701 is meshed and driven with the worm 601. A silicon wafer driving mechanism 8 is installed on the rotating frame 7. The silicon wafer driving mechanism 8 includes a U-shaped frame 801. Guide shafts 802 are fixedly connected to both ends of the U-shaped frame 801. The guide shafts 802 are slidably fitted through the rotating frame 7. One end of the guide shaft 802 is fixedly connected with a spring 803. The other end of the spring 803 is fixedly connected with the rotating frame 7. A transmission rod 804 is rotatably connected to the U-shaped frame 801. A plurality of silicon wafer driving wheels 805 are linearly fixedly connected to the transmission rod 804. One end of the U-shaped frame 801 is fixedly connected with a motor cover 806. A motor 807 is fixedly installed inside the motor cover 806. The output end of the motor 807 is fixedly connected to one end of the transmission rod 804. A protective cover 9 is slidably fitted on the silicon wafer carrier seat 2.

[0028] As Figure 3 shown, a pusher 101 is fixedly connected to one side of the moving seat 1. A plurality of insertion holes 102 are formed on the moving seat 1. A plurality of brake wheels 103 are installed at the bottom of the moving seat 1.

[0029] As Figure 4 shown, a plurality of insertion rods 201 are fixedly connected to the bottom of the silicon wafer carrier seat 2. The bottom ends of the insertion rods 201 are tapered. The insertion rods 201 are movably inserted into the insertion holes 102. A bent guide groove 202 is formed on one side of the silicon wafer carrier seat 2. Handles 203 are fixedly connected to both sides of the silicon wafer carrier seat 2. The bottom end of the silicon wafer carrier seat 2 is beveled. After taking out the silicon wafer carrier seat 2 from the cleaning equipment, align the insertion rods 201 at its bottom with the insertion holes 102 on the moving seat 1 and insert them to fix the silicon wafer carrier seat 2 on the moving seat 1.

[0030] As Figure 5As shown in the figure, the adjustable silicon wafer limiting mechanism 4 includes a bidirectional lead screw 401. The bidirectional lead screw 401 is rotatably connected to the silicon wafer flower basket seat 2 through a penetration. One end of the bidirectional lead screw 401 is fixedly connected with a handle 402. A plurality of groups of bidirectional threads are linearly arranged on the bidirectional lead screw 401. A plurality of silicon wafer limiting plates 403 are threadedly connected to the bidirectional lead screw 401 in a linear structure. Both ends of the silicon wafer limiting plate 403 are slidably matched with the placing roller shaft 3. A scale 404 is fixedly connected to the silicon wafer limiting plate 403 on the side close to the handle 402. The scale 404 is slidably matched with the silicon wafer flower basket seat 2 through a penetration. Hold the handle 402 and rotate the bidirectional lead screw 401. At this time, the bidirectional lead screw 401 will drive the adjustment of the distance between the plurality of silicon wafer limiting plates 403. At this time, observe and determine the distance value through the scale 404.

[0031] As Figure 8 shown, a guide head 901 is fixedly connected to the bottom end of one side of the protective cover 9. The guide head 901 is slidably matched with the bent guide groove 202. A sliding rod 902 is fixedly connected to the protective cover 9. A moving frame 903 is slidably matched with the sliding rod 902. An electric push rod B904 is fixedly connected to the bottom of the moving frame 903. The other end of the electric push rod B904 is fixedly connected to the silicon wafer flower basket seat 2. Use the electric push rod B904 to drive the moving frame 903 to move downward. At this time, it will drive the protective cover 9 connected to the sliding rod 902 to move downward. At this time, under the action of the bent guide groove 202, the protective cover 9 will cover the silicon wafer flower basket seat 2 to protect the silicon wafers inside.

[0032] Working principle: When it is necessary to clean the silicon wafers, first adjust the distance between the silicon wafer limiting plates 403 according to the thickness of the silicon wafers. Hold the handle 402 and rotate the bidirectional lead screw 401. At this time, the bidirectional lead screw 401 will drive the adjustment of the distance between the plurality of silicon wafer limiting plates 403. At this time, observe and determine the distance value through the scale 404;

[0033] Then place the silicon wafers between the two silicon wafer limiting plates 403. Then use the electric push rod A501 to drive the adjusting block 6 to move downward. At this time, under the action of the adjusting rack 502, the adjusting wheel 602 will rotate, causing the adjusting wheel 602 to drive the connected worm 601 to rotate, causing the worm 601 to drive the rotating frame 7 connected to the worm gear 701 to be leveled. Then when the adjusting block 6 continues to move downward, the silicon wafer driving wheel 805 will contact the silicon wafers;

[0034] Then, through the handle 203, remove the silicon wafer flower basket seat 2 from the moving seat 1 and place it in the cleaning equipment. Then when cleaning the silicon wafers, use the motor 807 to drive the connected transmission rod 804 to rotate. At this time, when the silicon wafer driving wheel 805 on the transmission rod 804 rotates, it cooperates with the placing roller shaft 3 to drive the silicon wafers to rotate and clean;

[0035] After cleaning, take out the silicon wafer carrier seat 2 from the cleaning equipment, align the insertion rod 201 at the bottom of it with the insertion hole 102 on the moving seat 1 and insert it to fix the silicon wafer carrier seat 2 on the moving seat 1. Then drive the moving frame 903 to move down by the electric push rod B904. At this time, it will drive the protective cover 9 connected to the sliding rod 902 to move down. At this time, under the action of the bending guide groove 202, the protective cover 9 will cover the silicon wafer carrier seat 2 to protect the silicon wafers inside. Then push the moving seat 1 to realize the transfer of the silicon wafers.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification is only the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection required by the present invention is defined by the appended claims and their equivalents.

Claims

1. A large-size silicon wafer flower basket structure, comprising a moving seat (1), characterized in that: A silicon wafer basket seat (2) is placed on the movable seat (1), two placement rollers (3) are rotatably connected to the silicon wafer basket seat (2), an adjustable silicon wafer limiting mechanism (4) is rotatably connected to the silicon wafer basket seat (2), a fixing frame (5) is fixedly connected to one side of the silicon wafer basket seat (2), an electric push rod A (501) is fixedly connected to the inside of the fixing frame (5), the other end of the electric push rod A (501) is fixedly connected to the adjusting block (6), and one side of the upper end of the fixing frame (5) is fixedly connected to The fixing frame (5) is provided with an adjusting rack (502), an adjusting block (6) is slidably matched in the fixing frame (5), one end of the adjusting block (6) is rotatably connected with a worm (601), one end of the worm (601) close to the adjusting rack (502) is connected and fixed with an adjusting wheel (602), the adjusting wheel (602) is meshed with the adjusting rack (502) for transmission, a rotating frame (7) is rotatably connected on the adjusting block (6), and one end of the rotating frame (7) connected to the adjusting block (6) is connected and fixed with a worm wheel (701), the worm wheel (701) and the worm (601) are meshed and driven, a silicon wafer driving mechanism (8) is installed on the rotating frame (7), and the silicon wafer driving mechanism (8) includes a U-shaped frame (801), both ends of the U-shaped frame (801) are connected and fixedly provided with a guide shaft (802), the guide shaft (802) and the rotating frame (7) are slidably matched, one end of the guide shaft (802) is connected and fixedly provided with a spring (803), and the other end of the spring (803) is connected to the rotating frame (7). The U-shaped frame (801) is fixedly provided with a transmission rod (804) rotatably connected thereto, and a plurality of silicon wafer driving wheels (805) are fixedly connected thereto in a linear structure, one end of the U-shaped frame (801) is fixedly provided with a motor cover (806), a motor (807) is fixedly installed in the motor cover (806), an output end of the motor (807) is fixedly connected to one end of the transmission rod (804), and a protective cover (9) is slidably provided on the silicon wafer basket seat (2).

2. The large-sized silicon wafer carrier structure according to claim 1, wherein: A push handle (101) is fixedly connected to one side of the movable seat (1), a plurality of plug holes (102) are provided on the movable seat (1), and a plurality of brake wheels (103) are installed at the bottom of the movable seat (1).

3. The large-size silicon wafer carrier structure according to claim 1, characterized in that: A plurality of plug-in rods (201) are fixedly connected to the bottom of the silicon wafer flower basket seat (2); the bottom ends of the plug-in rods (201) are arranged in a conical structure; the plug-in rods (201) are movably plugged into the plug holes (102); a bending guide groove (202) is provided on one side of the silicon wafer flower basket seat (2); handles (203) are fixedly connected to both sides of the silicon wafer flower basket seat (2); and the bottom end of the silicon wafer flower basket seat (2) is arranged in an inclined structure.

4. A large-size silicon wafer carrier structure according to claim 1, wherein: The adjustable silicon wafer limiting mechanism (4) includes a bidirectional lead screw (401), the bidirectional lead screw (401) is rotatably connected to the silicon wafer flower basket seat (2) in a penetrating manner, one end of the bidirectional lead screw (401) is fixedly connected with a handle (402), a plurality of groups of double-threaded threads are linearly formed on the bidirectional lead screw (401), a plurality of groups of silicon wafer limiting plates (403) are threadedly connected to the bidirectional lead screw (401) in a linear structure, both ends of the silicon wafer limiting plate (403) are slidably matched with the placing roller shaft (3), a scale (404) is fixedly connected to the silicon wafer limiting plate (403) on the side close to the handle (402), and the scale (404) is slidably matched with the silicon wafer flower basket seat (2) in a penetrating manner.

5. A large-size silicon wafer carrier structure according to claim 1, characterized in that: A guide head (901) is fixedly connected to the bottom end of one side of the protective cover (9), the guide head (901) is slidably matched with the bent guide groove (202), a slide bar (902) is fixedly connected to the protective cover (9), a moving frame (903) is slidably matched with the slide bar (902), an electric push rod B (904) is fixedly connected to the bottom of the moving frame (903), and the other end of the electric push rod B (904) is fixedly connected to the silicon wafer flower basket seat (2).

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