A high power ultrafast laser shaping method, apparatus, medium and product

Abstract

The application discloses a high-power ultrafast laser shaping method, device, medium and product, relates to the technical field of lasers, and comprises the following steps: acquiring two-dimensional energy value distribution data of a light spot; setting target homogenization light spot data, laser beam data and transmission area width proportion to obtain DOE phase data; obtaining a homogenization light spot energy distribution curve diagram according to the two-dimensional energy value distribution data of the light spot and the DOE phase data; obtaining a homogenization degree index based on the homogenization light spot energy distribution curve diagram; determining whether the homogenization degree index meets target homogenization requirements; if not, resetting the transmission area width proportion, and returning to the step of obtaining the DOE phase data until the homogenization degree index meets the target homogenization requirements; and obtaining a homogenization light spot result according to the DOE phase data and the two-dimensional energy value distribution data of the light spot. The application can guarantee the consistency of homogenization light spot quality of different high-power picosecond lasers when the same design homogenization shaping DOE is used.

Description

Technical Field

[0001] The present application relates to the field of laser technology, and in particular to a high-power ultrafast laser shaping method, equipment, medium and product. Background Art

[0002] As laser processing technology is increasingly used in the photovoltaic, lithium battery, and semiconductor industries, market competition has intensified, quality and cost control have become more stringent, and the requirements for processing quality and efficiency have become increasingly higher. In order to improve processing efficiency and quality, the demand for shaping the Gaussian light emitted by the laser into a circular, square, or rectangular flat-top spot with uniform energy distribution is becoming more and more common. However, as the power of high-power picosecond lasers increases, the energy distribution of the output light spot deviates from the fundamental mode distribution, and beam shaping requires that the laser output light spot should meet the fundamental mode Gaussian distribution as much as possible, so that the homogenization effect will be better. In addition, there are differences between each high-power picosecond laser, which has a great impact on industrial batch applications. Therefore, there is an urgent need for a beam shaping method to ensure the consistency of the homogenized light spot quality when different high-power picosecond lasers use the same design homogenizing shaping diffraction optical element (DOE). Summary of the Invention

[0003] The purpose of this application is to provide a high-power ultrafast laser shaping method, equipment, medium and product that can ensure the consistency of the homogenized spot quality when different high-power picosecond lasers use the same design of homogenizing shaping DOE, while improving the homogenization degree and homogenization quality of the homogenized spot.

[0004] To achieve the above objectives, this application provides the following solutions:

[0005] In a first aspect, the present application provides a high-power ultrafast laser shaping method, comprising:

[0006] Acquire two-dimensional energy value distribution data of the light spot; the two-dimensional energy value distribution data of the light spot includes: wavelength, light spot diameter and intensity distribution value;

[0007] Setting target homogenized spot data, laser beam data, and transmission zone width ratio; the target homogenized spot data includes: the length and width of the target homogenized spot; the laser beam data includes: the initial wavelength and the initial spot diameter;

[0008] Obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio;

[0009] Obtaining a uniform spot energy distribution curve according to the two-dimensional energy value distribution data of the spot and the DOE phase data;

[0010] Obtaining a homogenization degree index based on the homogenized light spot energy distribution curve;

[0011] determining whether the homogenization degree index meets the target homogenization requirement; if not, resetting the transmission zone width ratio, and returning to the step of obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio, until the homogenization degree index meets the target homogenization requirement;

[0012] A homogenized light spot result is obtained according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

[0013] Optionally, before acquiring the two-dimensional energy value distribution data of the light spot, a beam quality analyzer is used to collect the two-dimensional energy value distribution data of the light spot emitted by the picosecond laser.

[0014] Optionally, obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio includes:

[0015] The target light field distribution inverse algorithm is adopted to obtain the DOE phase data based on the laser beam data, the target homogenized light spot data and the transmission area width ratio.

[0016] Optionally, the target light field distribution inverse algorithm is implemented based on the GS inverse algorithm program of MATLAB.

[0017] Optionally, a GS forward algorithm program of MATLAB is used to obtain a uniformed light spot energy distribution curve according to the two-dimensional energy value distribution data of the light spot and the DOE phase data.

[0018] Optionally, obtaining a homogenization degree index based on the homogenized light spot energy distribution curve diagram includes:

[0019] Obtaining a maximum value of the uniform light spot energy and a minimum value of the uniform light spot energy based on the uniform light spot energy distribution curve;

[0020] A homogenization degree index is obtained based on the maximum value of the homogenized light spot energy and the minimum value of the homogenized light spot energy.

[0021] Optionally, the homogenization degree index is expressed as:

[0022] Among them, I max Indicates the maximum value of the homogenized spot energy, I min Indicates the minimum value of the homogenized spot energy.

[0023] In a second aspect, the present application provides a computer device comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of any one of the above-described high-power ultrafast laser shaping methods.

[0024] In a third aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of any one of the above-mentioned high-power ultrafast laser shaping methods.

[0025] In a fourth aspect, the present application provides a computer program product, comprising a computer program, which, when executed by a processor, implements the steps of any one of the above-mentioned high-power ultrafast laser shaping methods.

[0026] According to the specific embodiments provided in this application, this application has the following technical effects:

[0027] The present application provides a high-power ultrafast laser shaping method, equipment, medium and product. By determining whether the homogenization degree index meets the target homogenization requirements, it is determined whether the transmission zone width ratio should be adjusted. By continuously adjusting the transmission zone width ratio, DOE phase data that can make the homogenization degree index meet the target homogenization requirements is obtained. This ensures the consistency of the homogenized light spot quality when different high-power picosecond lasers use the same design of homogenization shaping DOE phase data, and can also improve the homogenization degree and homogenization quality of the homogenized light spot. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 This is a flow chart of a high-power ultrafast laser shaping method in one embodiment of the present application;

[0030] Figure 2 This is a diagram showing the energy distribution of a light spot in an embodiment of the present application;

[0031] Figure 3 This is a DOE phase diagram in one embodiment of the present application;

[0032] Figure 4 This is the DOE homogenization effect diagram before implementing the laser shaping method;

[0033] Figure 5 This is a diagram showing the DOE homogenization effect in one embodiment of the present application;

[0034] Figure 6 A schematic diagram of the structure of a computer device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0036] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0037] In an exemplary embodiment, a high-power ultrafast laser shaping method is provided. The method is executed by a computer device, specifically, a computer device such as a terminal or a server, or a terminal and a server. In all the embodiments given in this application, the method is described by taking the application of the method to a high-power picosecond laser as an example. Figure 1 As shown, the method includes:

[0038] Step 1: Get the two-dimensional energy value distribution data of the light spot. The two-dimensional energy value distribution of the light spot is as follows: Figure 2 The two-dimensional energy distribution data of the light spot includes wavelength, spot diameter, and intensity distribution. Before obtaining the two-dimensional energy distribution data of the light spot, a beam quality analyzer can be used to collect high-power ultrafast laser light emitted by a high-power picosecond laser, that is, to collect the two-dimensional energy distribution data of the light spot emitted by the high-power picosecond laser.

[0039] Step 2: Set the target uniform spot data, laser beam data, and transmission zone width ratio. The target uniform spot data includes the length and width of the target uniform spot; the laser beam data includes the initial wavelength and initial spot diameter.

[0040] For example, the transmission region is defined as the width where the spot energy decreases from 90% to 13.5%, which is equivalent to the ratio of the diffraction-limited spot size.

[0041] Step 3: Obtain DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio.

[0042] For example, a target light field distribution inverse algorithm can be used to obtain DOE phase data based on the specified laser beam data, target homogenized spot data, and the transmission zone width ratio. Specifically, the target light field distribution inverse algorithm can be implemented using the GS inverse algorithm program in MATLAB. In the GS inverse algorithm, the transmission zone width ratio has a certain tolerance adjustment function for different incident beam energies. By adjusting the transmission zone width ratio, the homogenization effect is guaranteed to be around 70% when the incident light deviates from the fundamental mode Gaussian distribution.

[0043] Step 4: Obtain a uniform spot energy distribution curve according to the acquired two-dimensional energy value distribution data of the spot and the DOE phase data.

[0044] For example, by using the GS forward algorithm program of MATLAB, a uniform spot energy distribution curve can be obtained based on the acquired two-dimensional energy value distribution data of the spot and the DOE phase data.

[0045] Step 5: Obtain a homogenization index based on the homogenized spot energy distribution curve, and determine whether the homogenization index meets the target homogenization requirement. If not, reset the transmission area width ratio and return to step 3 until the homogenization index meets the target homogenization requirement.

[0046] Based on this step, the DOE phase data that meets the target homogenization requirements can be obtained. Among them, the DOE phase data that meets the target homogenization requirements is as follows: Figure 3 shown.

[0047] For example, based on the energy distribution curve of the uniform light spot, the maximum value and the minimum value of the uniform light spot energy are obtained, and based on the maximum value and the minimum value of the uniform light spot energy, the uniformity index is obtained. The uniformity index can be expressed as: I max Indicates the maximum value of the homogenized spot energy, I min Indicates the minimum value of the homogenized spot energy.

[0048] Step 6: Obtain a homogenized light spot result according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

[0049] In an exemplary embodiment, the DOE homogenization effect is obtained by using a conventional laser shaping method and a high-power ultrafast laser shaping method described in this application, respectively. Figure 4 and Figure 5 shown. Figure 4 The laser emitted by high-power picosecond laser is homogenized by conventional phase DOE. Figure 5 This is the DOE homogenization effect of the laser emitted by a high-power picosecond laser after laser shaping. Figure 4 and Figure 5It can be found that the homogenization effect is significantly improved by using the laser shaping method of the present application, with the homogenization degree increased from less than 50% to 70%.

[0050] In an exemplary embodiment, a computer device is provided. The computer device may be a server or a terminal. The internal structure diagram thereof may be as follows: Figure 6 As shown. The computer device includes a processor, a memory, an input / output interface (Input / Output, abbreviated as I / O) and a communication interface. The processor, memory and input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. The processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and computer program in the non-volatile storage medium. The database of the computer device is used to store relevant data in the laser shaping method. The input / output interface of the computer device is used to exchange information between the processor and an external device. The communication interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a high-power ultrafast laser shaping method is implemented.

[0051] Those skilled in the art will understand that Figure 6 The structure shown in the figure is merely a block diagram of a portion of the structure related to the solution of the present application and does not constitute a limitation on the computer device to which the solution of the present application is applied. A specific computer device may include more or fewer components than shown in the figure, or combine certain components, or have a different component arrangement. In an exemplary embodiment, a computer device is provided, including a memory and a processor. The memory stores a computer program, and the processor implements the steps of the above-mentioned method embodiments when executing the computer program.

[0052] In an exemplary embodiment, a computer-readable storage medium is provided, storing a computer program. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0053] In an exemplary embodiment, a computer program product is provided, including a computer program. When the computer program is executed by a processor, the steps in the above method embodiments are implemented.

[0054] Those skilled in the art will understand that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, database or other media used in the embodiments provided in this application may include at least one of non-volatile and volatile memory. Non-volatile memory may include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory may include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM may be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0055] The databases involved in the various embodiments provided herein may include at least one of a relational database and a non-relational database. Non-relational databases may include, but are not limited to, distributed databases based on blockchains. The processors involved in the various embodiments provided herein may include, but are not limited to, general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic units, data processing logic units based on quantum computing, and the like.

[0056] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] This document uses specific examples to illustrate the principles and implementation methods of this application. The description of the above examples is only intended to help understand the method and core concept of this application. At the same time, for those skilled in the art, based on the concept of this application, there may be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this application.

Claims

1. A high-power ultrafast laser shaping method, characterized in that: The high-power ultrafast laser shaping method comprises: Acquire two-dimensional energy value distribution data of the light spot; the two-dimensional energy value distribution data of the light spot includes: wavelength, light spot diameter and intensity distribution value; Setting target homogenized spot data, laser beam data, and transmission zone width ratio; the target homogenized spot data includes: the length and width of the target homogenized spot; the laser beam data includes: the initial wavelength and the initial spot diameter; Obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio; Obtaining a uniform spot energy distribution curve according to the two-dimensional energy value distribution data of the spot and the DOE phase data; Obtaining a homogenization degree index based on the homogenized light spot energy distribution curve diagram includes: obtaining a maximum value of the homogenized light spot energy and a minimum value of the homogenized light spot energy based on the homogenized light spot energy distribution curve diagram; obtaining a homogenization degree index based on the maximum value of the homogenized light spot energy and the minimum value of the homogenized light spot energy; the homogenization degree index is expressed as: Among them, I max Indicates the maximum value of the homogenized spot energy, I min Indicates the lowest value of the homogenized spot energy; determining whether the homogenization degree index meets the target homogenization requirement; if not, resetting the transmission zone width ratio, and returning to the step of obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio, until the homogenization degree index meets the target homogenization requirement; A homogenized light spot result is obtained according to the DOE phase data and the two-dimensional energy value distribution data of the light spot.

2. The high-power ultrafast laser shaping method according to claim 1, characterized in that: Before acquiring the two-dimensional energy value distribution data of the light spot, a beam quality analyzer is used to collect the two-dimensional energy value distribution data of the light spot emitted by the high-power picosecond laser.

3. The high-power ultrafast laser shaping method according to claim 1, characterized in that: Obtaining DOE phase data based on the laser beam data, the target homogenized spot data, and the transmission zone width ratio includes: The target light field distribution inverse algorithm is adopted to obtain the DOE phase data based on the laser beam data, the target homogenized light spot data and the transmission area width ratio.

4. The high-power ultrafast laser shaping method according to claim 3, characterized in that: The target light field distribution inverse algorithm is implemented based on the GS inverse algorithm program of MATLAB.

5. The high-power ultrafast laser shaping method according to claim 1, characterized in that: The GS forward algorithm program of MATLAB is used to obtain a uniform spot energy distribution curve according to the two-dimensional energy value distribution data of the spot and the DOE phase data.

6. A computer device comprising: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the high-power ultrafast laser shaping method according to any one of claims 1 to 5.

7. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the high-power ultrafast laser shaping method according to any one of claims 1 to 5 is implemented.

8. A computer program product comprising a computer program, characterized in that When the computer program is executed by a processor, the high-power ultrafast laser shaping method according to any one of claims 1 to 5 is implemented.

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