Liquid storage tank device and control method of liquid storage tank device

Abstract

The invention provides a liquid storage tank device and a control method of the liquid storage tank device. According to the liquid storage tank device, the first end of the liquid level column is communicated with the bottom of the liquid storage tank, the second end of the liquid level column is communicated with the top of the liquid storage tank, and the third end of the liquid level column is used for introducing preset gas, so that the amount of liquid hanging on the wall in the liquid level column is reduced, the purpose of preventing excessive liquid hanging on the wall on the inner wall of the liquid level column is achieved, and therefore mistaken sensing of a sensor is prevented; the problems that after the liquid level of a liquid storage tank of an existing wet method equipment liquid storage tank capacitive light sensing type liquid level sensor drops, due to the fact that water vapor can be left in a liquid level column, the sensor senses mistakenly, equipment crashes frequently, and the product yield is affected are solved.

Description

Technical Field

[0001] The present application relates to the field of wet equipment, and in particular, to a liquid storage tank device and a control method for the liquid storage tank device. Background Art

[0002] In the display production industry, wet equipment is a key manufacturing step for display panels. Common wet equipment includes cleaning machines used to remove impurities and organic matter on the surface of glass substrates before coating, or developers used to strip photoresist after coating and exposure of glass substrates to form the desired pattern.

[0003] Among them, in wet equipment, the liquid storage tank is one of the important components, which is mainly used to load the liquid used in the process steps, such as pure water or chemical liquid. In addition, when using wet equipment, a capacitive liquid level sensor is also installed on the outside of the liquid level column of the liquid storage tank to monitor the liquid level height.

[0004] However, in the process of measuring the liquid level height, the capacitive optical liquid level sensor on the outside of the liquid level column of the liquid storage tank in the existing wet process equipment may cause sensor missensing due to structural design problems, resulting in frequent equipment shutdowns and affecting product yield. Summary of the invention

[0005] The main purpose of the present application is to provide a liquid storage tank device and a control method for the liquid storage tank device, so as to at least solve the problem that the capacitive photosensitive liquid level sensor of the liquid storage tank of the existing wet process equipment may cause false sensing of the sensor due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0006] In order to achieve the above object, according to one aspect of the present application, a liquid storage tank device is provided, the liquid storage tank device comprising:

[0007] A liquid storage tank for storing liquid;

[0008] A liquid level column, wherein the first end of the liquid level column is connected to the bottom of the liquid storage tank, the second end of the liquid level column is connected to the top of the liquid storage tank, and the third end of the liquid level column is used to pass a preset gas to reduce the amount of liquid hanging on the wall of the liquid level column, and the preset gas will not chemically react with the liquid stored in the liquid storage tank.

[0009] According to another aspect of the present application, there is provided a control method for any one of the liquid storage tank devices, the method comprising: obtaining a current working stage of the liquid storage tank; when the current working stage of the liquid storage tank is a non-liquid replenishment stage, introducing a preset gas at least part of the time to reduce the amount of liquid hanging on the wall of the liquid level column, wherein the preset gas does not chemically react with the liquid stored in the liquid storage tank; when the current working stage of the liquid storage tank includes a liquid replenishment stage, determining not to introduce the preset gas.

[0010] By applying the technical solution of the present application, the first end of the liquid level column is connected to the bottom of the liquid storage tank, the second end of the liquid level column is connected to the top of the liquid storage tank, and the third end of the liquid level column is used to introduce a preset gas to reduce the amount of liquid hanging on the wall of the liquid level column, thereby achieving the purpose of preventing excessive liquid hanging on the inner wall of the liquid level column, thereby preventing the sensor from missensing, and further solving the problem of the existing wet equipment liquid storage tank capacitive photosensitive liquid level sensor missensing due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings constituting part of the present application are used to provide a further understanding of the present application. The exemplary embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0012] Figure 1 A schematic diagram of a liquid storage tank device provided in an embodiment of the present application is shown;

[0013] Figure 2 A schematic diagram of another liquid storage tank device provided according to an embodiment of the present application is shown;

[0014] Figure 3 A schematic diagram of another liquid storage tank device provided according to an embodiment of the present application is shown;

[0015] Figure 4 A schematic diagram of another liquid storage tank device provided according to an embodiment of the present application is shown;

[0016] Figure 5 A schematic flow chart of a control method of a liquid storage tank device provided according to an embodiment of the present application is shown;

[0017] Figure 6 A schematic flow chart of another method for controlling a liquid storage tank device according to an embodiment of the present application is shown;

[0018] Figure 7 A structural block diagram of a controller of a liquid storage tank device provided according to an embodiment of the present application is shown;

[0019] Figure 8 A schematic diagram of the overall structure of a pre-film forming cleaning machine provided according to an embodiment of the present application is shown.

[0020] The above drawings include the following reference numerals:

[0021] 100, liquid storage tank; 200, liquid level column; 310, first light-sensitive liquid level sensor; 320, second light-sensitive liquid level sensor; 330, third light-sensitive liquid level sensor; 340, fourth light-sensitive liquid level sensor; 410, valve; 420, solenoid valve; 430, PLC; 500, air compression filtration equipment; 510, air filtration device; 520, multi-stage filtration equipment. DETAILED DESCRIPTION

[0022] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0023] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0024] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0025] As introduced in the background technology, in the process of measuring the liquid level height, the capacitive photosensitive liquid level sensor on the outside of the liquid level column of the liquid storage tank in the existing wet process equipment may cause false sensing of the sensor due to structural design problems, resulting in frequent equipment shutdowns and affecting the product yield. In order to solve the problem that the capacitive photosensitive liquid level sensor in the liquid storage tank of the existing wet process equipment may cause false sensing of the sensor due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting the product yield, the embodiments of the present application provide a liquid storage tank device and a control method for the liquid storage tank device.

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0027] In this embodiment, a control method for a liquid storage tank device is provided. It should be noted that the steps shown in the flowchart of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and although a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0028] The present application provides a liquid storage tank device, such as Figure 1 As shown, the liquid storage tank device includes:

[0029] A liquid storage tank 100, used for storing liquid;

[0030] The liquid level column 200, the first end of the liquid level column is connected to the bottom of the liquid storage tank, the second end of the liquid level column is connected to the top of the liquid storage tank, and the third end of the liquid level column is used to introduce a preset gas (the preset gas can be clean air) to reduce the amount of liquid hanging on the wall of the liquid level column. By continuously introducing clean air, when the liquid level of the liquid storage tank drops, the water vapor remaining on the wall of the liquid level column sinks quickly without attachment or residue, and the preset gas will not chemically react with the liquid stored in the liquid storage tank.

[0031] In the above-mentioned liquid storage tank device, the first end of the above-mentioned liquid level column is connected to the bottom of the above-mentioned liquid storage tank, the second end of the above-mentioned liquid level column is connected to the top of the above-mentioned liquid storage tank, and the third end of the above-mentioned liquid level column is used to introduce a preset gas to reduce the amount of liquid hanging on the wall in the above-mentioned liquid level column, thereby achieving the purpose of preventing excessive liquid hanging on the inner wall of the liquid level column, thereby preventing the sensor from missensing, and further solving the problem of the existing wet equipment liquid storage tank capacitive photosensitive liquid level sensor missensing due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0032] In one embodiment of the present application, Figure 2As shown, the above-mentioned liquid storage tank device also includes: at least one photosensitive liquid level sensor (from top to bottom, the first photosensitive liquid level sensor 310, the second photosensitive liquid level sensor 320, the third photosensitive liquid level sensor 330 and the fourth photosensitive liquid level sensor 340 are installed on the outer wall of the part of the above-mentioned liquid level column along the vertical direction), the above-mentioned photosensitive liquid level sensor is installed to the outer wall of the above-mentioned liquid level column, and the above-mentioned photosensitive liquid level sensor is used to detect the liquid level height of the above-mentioned liquid level column.

[0033] Wherein, in the case that the above-mentioned liquid storage tank device includes a plurality of the above-mentioned light-sensitive liquid level sensors, the plurality of the above-mentioned liquid level sensors are installed at different heights of the outer wall of the portion of the above-mentioned liquid level column along the vertical direction.

[0034] Specifically, the model of the light-sensitive liquid level sensor is a diffuse emission type photoelectric switch. The detection head of the diffuse emission type photoelectric switch is equipped with a light emitter and a light receiver. Under normal circumstances, the light emitted by the light emitter cannot be found by the light receiver, but when the detection object (ie liquid) passes by, it blocks the light and reflects part of the light back. The light receiver receives the light signal and outputs a switch signal, and this switch signal is used to represent the liquid level height of the liquid level column.

[0035] By providing a plurality of light-sensitive liquid level sensors, the identification of the liquid level height of the present application can be made more accurate.

[0036] In one embodiment of the present application, Figure 3 As shown, the liquid storage tank device also includes: a valve 410, the first end of the valve is connected to the third end of the liquid level column, the second end of the valve is used to introduce the preset gas, and the valve is a manual valve or a pneumatic valve (when it is a pneumatic valve, the controller PLC opens or closes the pneumatic valve by controlling the solenoid valve).

[0037] Specifically, by setting a valve, the clean air flow in the liquid level column can be accurately adjusted through a manual valve (or through a pneumatic valve) to avoid excessive flow affecting the normal liquid level or liquid level splashing causing false alarms.

[0038] In one embodiment of the present application, the liquid storage tank device further includes: a controller, which communicates with the valve, wherein the controller is used to adjust the opening of the valve according to different heights of the liquid level of the liquid level column, or to keep the opening of the valve unchanged, so as to reduce the amount of liquid hanging on the wall in the liquid level column.

[0039] Specifically, the controller determines the different heights of the liquid level in the liquid level column according to the switch signals fed back by different optical liquid level sensors, and then adjusts the opening of the valve, or keeps the opening of the valve unchanged, so as to reduce the amount of liquid hanging on the wall in the liquid level column.

[0040] like Figure 3 As shown, during the refilling stage, PLC 430 controls the solenoid valve 420 to close the pneumatic valve (ie, valve 410 ) and prevent the introduction of clean air until the first optical liquid level sensor 310 feeds back a switch signal to stop refilling. The liquid in the refilling may be water.

[0041] In one embodiment of the present application, Figure 3 As shown, the liquid storage tank device includes: an air compression filter device 500, which is connected to the third end of the liquid level column. The air compression filter device is used to compress the preset gas, filter the compressed preset gas, and output the filtered preset gas.

[0042] Specifically, the air compression filter device 500 is connected to the second end of the valve 410, thereby achieving the purpose of blowing high-pressure clean air into the liquid level column, so that when the liquid level in the storage tank drops, the water vapor remaining on the wall of the liquid level column sinks quickly without attachment or residue.

[0043] In one embodiment of the present application, Figure 4 As shown, the above-mentioned air compression filtering equipment includes: an air filtering device 510, used to compress the above-mentioned preset gas and output the above-mentioned compressed preset gas; at least one filtering device, the input end of the above-mentioned filtering device is connected to the above-mentioned air filtering device, the output end of the above-mentioned filtering device is connected to the third end of the above-mentioned liquid level column, and the above-mentioned filtering device is used to filter the above-mentioned compressed preset gas and output the above-mentioned filtered preset gas.

[0044] Specifically, the above-mentioned air compression filtering equipment also includes a multi-stage filtering equipment 520, the first end of the multi-stage filtering equipment is connected to the second end of the valve, and the second end of the multi-stage filtering equipment is connected to the output end of the air filtering device. The step-by-step filtering can prevent the pollution caused by the filter element failing due to damage and causing polluted air to enter the equipment, thereby gradually improving the filtering effect, which is conducive to ensuring high air cleanliness and production quality. For example, when three-stage filtration is used, the filter particle size of each stage is 0.01μm.

[0045] Figure 5 FIG. 1 is a flow chart of a control method of a liquid storage tank device provided according to an embodiment of the present application. Figure 5 As shown, a control method applied to any of the above-mentioned liquid storage tank devices comprises the following steps:

[0046] Step S101, obtaining the current working stage of the liquid storage tank;

[0047] Step S102, when the current working stage of the liquid storage tank is a non-liquid replenishment stage, a preset gas is introduced at least part of the time to reduce the amount of liquid hanging on the wall of the liquid level column, and the preset gas does not chemically react with the liquid stored in the liquid storage tank;

[0048] Step S103, when the current working stage of the liquid storage tank includes a liquid replenishing stage, determining not to introduce the preset gas.

[0049] This prevents the rehydration process of the reservoir from being affected.

[0050] In the above steps, when the current working stage of the above-mentioned liquid storage tank is a non-liquid replenishment stage, at least part of the preset gas is introduced to reduce the amount of liquid hanging on the wall in the above-mentioned liquid level column, thereby achieving the purpose of preventing excessive liquid hanging on the inner wall of the liquid level column, thereby preventing the sensor from missensing, and further solving the problem that the capacitive optical liquid level sensor of the liquid storage tank of the existing wet process equipment missensed due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0051] Specifically, the above-mentioned liquid storage tank device also includes a valve, the first end of the above-mentioned valve is connected to the third end of the above-mentioned liquid level column, and the second end of the above-mentioned valve is used to introduce the above-mentioned preset gas; introducing the preset gas at least part of the time includes: opening the above-mentioned valve at least part of the time; determining not to introduce the above-mentioned preset gas includes: keeping the above-mentioned valve closed.

[0052] There are two ways to open the valve at least part of the time:

[0053] The first implementation method is: the valve is opened during the entire time when the current working phase of the liquid storage tank is not a liquid replenishment phase.

[0054] The second implementation method is: the liquid storage tank device includes n photosensitive liquid level sensors, and the above-mentioned photosensitive liquid level sensors are installed to the outer wall of the liquid level column; when the nth photosensitive liquid level sensor above-mentioned is illuminated, and the n+mth photosensitive liquid level sensor above-mentioned is illuminated, and the n+bth photosensitive liquid level sensor above-mentioned is not illuminated, the above-mentioned valve is opened, n, m, b are all positive integers, n+m>n+b, n+m>2.

[0055] Specifically, for example, there are four photosensitive liquid level sensors arranged in sequence from high to low along the vertical direction of the liquid level column, then the second highest photosensitive liquid level sensor is illuminated, the lowest photosensitive liquid level sensor is illuminated, but the other photosensitive sensors are not illuminated, then it is determined that the liquid level has reached the position of the lowest photosensitive liquid level sensor, and there is too much liquid hanging on the wall of the liquid level column on the second highest photosensitive liquid level sensor, thereby triggering the light-emitting mechanism of the second highest photosensitive liquid level sensor, then it is necessary to open the valve to pass clean air to reduce the amount of liquid hanging on the wall in the above-mentioned liquid level column.

[0056] Compared with the first implementation, the second implementation is safer and more energy-efficient in reducing the amount of liquid hanging on the wall of the liquid level column.

[0057] In one embodiment of the present application, the valve is opened at least part of the time, including: controlling the valve to open with different opening degrees according to the amount of liquid hanging on the wall of the liquid level column.

[0058] Specifically, for example, Figure 4 As shown, there are four photosensitive liquid level sensors arranged in sequence from high to low along the vertical direction of the liquid level column. When the first photosensitive liquid level sensor is illuminated, the valve is kept closed to prevent liquid splashing; when the second photosensitive liquid level sensor is illuminated and the first photosensitive liquid level sensor is not illuminated, the valve is controlled to be opened with a first preset opening; when the third photosensitive liquid level sensor is illuminated and the first photosensitive liquid level sensor and the second photosensitive liquid level sensor are not illuminated, the valve is controlled to be opened with a second preset opening; when the fourth photosensitive liquid level sensor is illuminated and the first photosensitive liquid level sensor, the second photosensitive liquid level sensor and the third photosensitive liquid level sensor are not illuminated, the valve is controlled to be opened with a third preset opening; the first preset opening, the second preset opening and the third preset opening are reduced in sequence, thereby improving the purging efficiency.

[0059] In one embodiment of the present application, during the process of opening the above-mentioned valve for at least part of the time, the above-mentioned method also includes: starting the air compression filter device to control the above-mentioned air compression filter device to filter the above-mentioned compressed preset gas, and output the above-mentioned filtered preset gas, and the above-mentioned air compression filter device is connected to the third end of the above-mentioned liquid level column.

[0060] Specifically, according to the amount of liquid hanging on the wall of the liquid level column, the air compression filtering device is controlled to start with different preset pressures.

[0061] For example, Figure 4As shown, there are four photosensitive liquid level sensors arranged in sequence from high to low along the vertical direction of the liquid level column. When the first photosensitive liquid level sensor emits light, the valve and the air compression filter device are kept closed to prevent liquid splashing; when the second photosensitive liquid level sensor emits light and the first photosensitive liquid level sensor does not emit light, the valve is controlled to be opened with the first preset opening, and the air compression filter device is controlled to start purging with the first preset pressure; when the third photosensitive liquid level sensor emits light and the first photosensitive liquid level sensor and the second photosensitive liquid level sensor do not emit light, the valve is controlled to be opened with the second preset opening, and the air compression filter device is controlled to start purging with the second preset pressure; when the fourth photosensitive liquid level sensor emits light and the first photosensitive liquid level sensor, the second photosensitive liquid level sensor and the third photosensitive liquid level sensor do not emit light, the valve is controlled to be opened with the third preset opening, and the air compression filter device is controlled to start purging with the third preset pressure; the first preset opening, the second preset opening and the third preset opening are reduced in sequence, and the first preset pressure, the second preset pressure and the third preset pressure are reduced in sequence, thereby improving the purging efficiency.

[0062] In order to enable those skilled in the art to more clearly understand the technical solution of the present application, the implementation process of the control method of the liquid storage tank device of the present application will be described in detail below in combination with specific embodiments.

[0063] For example, Figure 4 As shown, there are four optical liquid level sensors arranged in sequence from high to low along the vertical direction of the liquid level column. This embodiment relates to a specific control method of a liquid storage tank device, such as Figure 6 As shown, the following steps are included:

[0064] Get the current working stage of the reservoir;

[0065] When the first optical liquid level sensor emits light, keep the valve and air compression filter equipment closed to prevent liquid splashing;

[0066] When the second light-sensitive liquid level sensor emits light and the first light-sensitive liquid level sensor does not emit light, the valve is controlled to open with a first preset opening, and the air compression filter device is controlled to start purging with a first preset pressure;

[0067] When the third optical liquid level sensor emits light, and the first optical liquid level sensor and the second optical liquid level sensor do not emit light, the valve is controlled to open with a second preset opening, and the air compression filter device is controlled to start purging with a second preset pressure;

[0068] When the fourth photosensitive liquid level sensor emits light and the first photosensitive liquid level sensor, the second photosensitive liquid level sensor and the third photosensitive liquid level sensor do not emit light, the valve is controlled to open with the third preset opening, and the air compression filter equipment is controlled to start purging with the third preset pressure; the first preset opening, the second preset opening and the third preset opening are reduced in turn, and the first preset pressure, the second preset pressure and the third preset pressure are reduced in turn, thereby improving the purging efficiency.

[0069] It should be noted that the steps shown in the flowcharts of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and that, although a logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0070] The present application embodiment also provides a controller of a liquid storage tank device. It should be noted that the controller of the liquid storage tank device of the present application embodiment can be used to execute the control method for the liquid storage tank device provided by the present application embodiment. The controller is used to implement the above-mentioned embodiments and preferred embodiments, and the descriptions have been made and will not be repeated. As used below, the term "module" can implement a combination of software and / or hardware of a predetermined function. Although the device described in the following embodiments is preferably implemented in software, the implementation of hardware, or a combination of software and hardware is also possible and conceived.

[0071] The controller of the liquid storage tank device provided in the embodiment of the present application is introduced below.

[0072] Figure 7 is a structural block diagram of a controller of a liquid storage tank device provided according to an embodiment of the present application. Figure 7 As shown, the controller includes:

[0073] An acquisition unit 71 is used to acquire the current working stage of the liquid storage tank;

[0074] The first processing unit 72 is used for introducing a preset gas at least part of the time to reduce the amount of liquid hanging on the wall of the liquid level column when the current working stage of the liquid storage tank is a non-liquid replenishing stage, and the preset gas will not chemically react with the liquid stored in the liquid storage tank;

[0075] The second processing unit 73 is used to determine not to introduce the preset gas when the current working stage of the liquid storage tank includes a liquid replenishing stage.

[0076] In the above-mentioned controller, when the current working stage of the above-mentioned liquid storage tank is a non-liquid replenishment stage, at least part of the preset gas is introduced to reduce the amount of liquid hanging on the wall in the above-mentioned liquid level column, thereby achieving the purpose of preventing excessive liquid hanging on the inner wall of the liquid level column, thereby preventing the sensor from missensing, and further solving the problem that the capacitive optical liquid level sensor of the liquid storage tank of the existing wet process equipment missensed due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0077] In one embodiment of the present application, the liquid storage tank device also includes a valve, the first end of the valve is connected to the third end of the liquid level column, and the second end of the valve is used to introduce the preset gas; the first processing unit includes a first processing module, which is used to open the valve at least part of the time; the second processing unit includes a second processing module, which is used to keep the valve closed.

[0078] In one embodiment of the present application, the first processing module includes a first processing submodule, which is used to open the valve during the entire time when the current working stage of the liquid storage tank is a non-liquid replenishment stage.

[0079] In one embodiment of the present application, the liquid storage tank device includes n photosensitive liquid level sensors, which are installed on the outer wall of the liquid level column. The first processing module includes a second processing sub-module, which is used to open the valve when the nth photosensitive liquid level sensor is illuminated, the n+mth photosensitive liquid level sensor is illuminated, and the n+bth photosensitive liquid level sensor is not illuminated, where n, m, and b are all positive integers, n+m>n+b, and n+m>2.

[0080] In one embodiment of the present application, the first processing module includes a third processing sub-module. When the valve is opened for at least part of the time, the third processing sub-module is used to start an air compression filter device to control the air compression filter device to filter the compressed preset gas and output the filtered preset gas. The air compression filter device is connected to the third end of the liquid level column.

[0081] In one embodiment of the present application, the third processing submodule includes a fourth processing submodule, which is used to control the start-up of the air compression filtering device at different preset pressures according to the amount of liquid hanging on the wall of the liquid level column.

[0082] In one embodiment of the present application, the first processing submodule includes a fifth processing submodule, which is used to control the opening of the valve with different opening degrees according to the amount of liquid hanging on the wall of the liquid level column.

[0083] The controller of the liquid storage tank device includes a processor and a memory. The acquisition unit, the first processing unit, the second processing unit, etc. are all stored in the memory as program units, and the processor executes the program units stored in the memory to implement corresponding functions. The modules are all located in the same processor; or, the modules are located in different processors in any combination.

[0084] The processor includes a kernel, which retrieves the corresponding program unit from the memory. One or more kernels can be set, and the kernel parameters can be adjusted to solve the problem that the existing wet process equipment liquid storage tank capacitive optical liquid level sensor will cause the sensor to mis-sensing after the liquid level in the liquid storage tank drops due to residual water vapor in the liquid level column, resulting in frequent equipment downtime and affecting product yield.

[0085] The memory may include non-permanent memory in a computer-readable medium, random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM, and the memory includes at least one memory chip.

[0086] An embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium includes a stored program, wherein when the program is executed, the device where the computer-readable storage medium is located is controlled to execute the control method of the liquid storage tank device.

[0087] An embodiment of the present invention provides a processor, and the processor is used to run a program, wherein the control method of the liquid storage tank device is executed when the program is run.

[0088] The embodiment of the present invention provides a device, the device includes a processor, a memory, and a program stored in the memory and executable on the processor, and the processor implements at least the following steps when executing the program: obtaining the current working stage of the liquid storage tank; when the current working stage of the liquid storage tank is a non-liquid replenishment stage, introducing a preset gas at least part of the time to reduce the amount of liquid hanging on the wall in the liquid level column, and the preset gas will not chemically react with the liquid stored in the liquid storage tank; when the current working stage of the liquid storage tank includes a liquid replenishment stage, determining not to introduce the preset gas. The device in this article can be a server, a PC, a PAD, a mobile phone, etc.

[0089] The present application also provides a computer program product, which, when executed on a data processing device, is suitable for executing an initialization program having at least the following method steps: obtaining the current working stage of the liquid storage tank; when the current working stage of the liquid storage tank is a non-liquid replenishment stage, introducing a preset gas at least part of the time to reduce the amount of liquid hanging on the wall of the liquid level column, and the preset gas will not chemically react with the liquid stored in the liquid storage tank; when the current working stage of the liquid storage tank includes a liquid replenishment stage, determining not to introduce the preset gas.

[0090] In addition, Figure 8 As shown, the pre-film cleaning machine equipment specifically includes Sky CV (buffer unit), OUT CV (exit unit), Elevator (lifting unit), AK (drying unit), SWR2 (water washing unit), SWR1 (water washing unit), EUV (ultraviolet cleaning unit), and IN CV (inlet unit).

[0091] Among them, the entrance unit is used to receive the glass substrate; the ultraviolet cleaning unit is used to remove organic matter from the glass substrate using an ultraviolet cleaning device; the water washing unit is used to use a cleaning module to clean and replace dirt on the glass substrate; the drying unit is used to dry the glass substrate using a wind knife mechanism; the lifting unit is used to transport the glass substrate to the upper buffer unit; the buffer unit is used to transport the glass substrate to the exit unit; and the exit unit is used to send the glass substrate to the next station.

[0092] Obviously, those skilled in the art should understand that the above modules or steps of the present invention can be implemented by a general computing device, they can be concentrated on a single computing device, or distributed on a network composed of multiple computing devices, they can be implemented by a program code executable by a computing device, so that they can be stored in a storage device and executed by the computing device, and in some cases, the steps shown or described can be executed in a different order than here, or they can be made into individual integrated circuit modules, or multiple modules or steps therein can be made into a single integrated circuit module for implementation. Thus, the present invention is not limited to any specific combination of hardware and software.

[0093] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0094] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0095] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0096] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0097] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0098] The memory may include non-permanent memory in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0099] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0100] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0101] From the above description, it can be seen that the above embodiments of the present application achieve the following technical effects:

[0102] 1) The liquid storage tank device of the present application is connected to the bottom of the liquid storage tank through the first end of the liquid level column, the second end of the liquid level column is connected to the top of the liquid storage tank, and the third end of the liquid level column is used to introduce a preset gas to reduce the amount of liquid hanging on the wall of the liquid level column, thereby achieving the purpose of preventing excessive liquid hanging on the inner wall of the liquid level column, thereby preventing the sensor from missensing, and further solving the problem of the existing wet process equipment liquid storage tank capacitive optical liquid level sensor missensing due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0103] 2) The control method of the liquid storage tank device of the present application achieves the purpose of preventing excessive liquid from hanging on the inner wall of the liquid level column by at least partially introducing a preset gas when the current working stage of the above-mentioned liquid storage tank is a non-liquid replenishment stage, thereby preventing the sensor from missensing. This solves the problem that the capacitive optical liquid level sensor of the liquid storage tank of the existing wet process equipment missensed the sensor due to residual water vapor in the liquid level column after the liquid level in the liquid storage tank drops, resulting in frequent equipment shutdowns and affecting product yield.

[0104] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A liquid storage tank device, characterized in that: include: A liquid storage tank for storing liquid; A liquid level column, wherein the first end of the liquid level column is connected to the bottom of the liquid storage tank, the second end of the liquid level column is connected to the top of the liquid storage tank, and the third end of the liquid level column is used to pass a preset gas to reduce the amount of liquid hanging on the wall of the liquid level column, and the preset gas will not chemically react with the liquid stored in the liquid storage tank.

2. The liquid storage tank device according to claim 1, characterized in that: The liquid storage tank device also includes: At least one optical liquid level sensor is installed on the outer wall of the liquid level column, and the optical liquid level sensor is used to detect the liquid level height of the liquid level column.

3. The liquid storage tank device according to claim 2, characterized in that: In the case where the liquid storage tank device includes a plurality of the optical liquid level sensors, the plurality of the liquid level sensors are installed at different heights of the outer wall of the portion of the liquid level column along the vertical direction.

4. The liquid storage tank device according to claim 1, characterized in that: The liquid storage tank device also includes: A valve, wherein the first end of the valve is connected to the third end of the liquid level column, and the second end of the valve is used to introduce the preset gas.

5. The liquid storage tank device according to claim 4, characterized in that: The valve is a manual valve.

6. The liquid storage tank device according to claim 4, characterized in that: The liquid storage tank device also includes: A controller is in communication with the valve, wherein the controller is used to adjust the opening of the valve according to different heights of the liquid level of the liquid level column, or to keep the opening of the valve unchanged, so as to reduce the amount of liquid hanging on the wall of the liquid level column.

7. The liquid storage tank device according to claim 1, characterized in that: The liquid storage tank device comprises: An air compression filter device is connected to the third end of the liquid level column, and is used for compressing the preset gas, filtering the compressed preset gas, and outputting the filtered preset gas.

8. The liquid storage tank device according to claim 7, characterized in that: The air compression filtering equipment comprises: An air filtering device, used for compressing the preset gas and outputting the compressed preset gas; At least one filter device, the input end of the filter device is connected to the air filter device, the output end of the filter device is connected to the third end of the liquid level column, and the filter device is used to filter the compressed preset gas and output the filtered preset gas.

9. A control method for a liquid storage tank device according to any one of claims 1 to 8, characterized in that: include: Get the current working stage of the reservoir; When the current working stage of the liquid storage tank is a non-liquid replenishment stage, a preset gas is introduced at least part of the time to reduce the amount of liquid hanging on the wall of the liquid level column, and the preset gas does not chemically react with the liquid stored in the liquid storage tank; In a case where the current working phase of the liquid storage tank includes a liquid replenishing phase, it is determined that the preset gas is not introduced.

10. The method according to claim 9, characterized in that The liquid storage tank device further comprises a valve, a first end of the valve is connected to the third end of the liquid level column, and a second end of the valve is used to introduce the preset gas; When the current working stage of the liquid storage tank is a non-liquid replenishment stage, introducing a preset gas at least part of the time, including: opening the valve at least part of the time; In a case where the current working stage of the liquid storage tank includes a liquid replenishing stage, determining not to introduce the preset gas includes: keeping the valve closed.

11. The method according to claim 10, characterized in that Opening the valve at least part of the time comprises: The valve is opened during all the time when the current working stage of the liquid storage tank is a non-liquid replenishment stage.

12. The method according to claim 10, characterized in that The liquid storage tank device includes n optical liquid level sensors, which are mounted on the outer wall of the liquid level column, and the valve is opened at least part of the time, including: When the nth photosensitive liquid level sensor emits light, the n+mth photosensitive liquid level sensor emits light, and the n+bth photosensitive liquid level sensor does not emit light, the valve is opened, n, m, and b are all positive integers, n+m>n+b, and n+m>2.

13. The method according to claim 10, characterized in that During at least part of the time when the valve is open, the method further comprises: The air compression filter device is started to control the air compression filter device to filter the compressed preset gas and output the filtered preset gas, and the air compression filter device is connected to the third end of the liquid level column.

14. The method according to claim 13, characterized in that Start-up compressed air filtration equipment, including: According to the amount of liquid hanging on the wall of the liquid level column, the air compression filtering equipment is controlled to start with different preset pressures.

15. The method according to claim 10, characterized in that Opening the valve at least part of the time comprises: The valve is controlled to open with different opening degrees according to the amount of liquid hanging on the wall of the liquid level column.

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