Absolute position auxiliary adjusting device and adjusting method thereof

Abstract

The invention relates to the field of small-angle measurement, and discloses an absolute position auxiliary adjusting device and an adjusting method thereof, and the device comprises a collimation light source which comprises a light source, a cross reticle and an objective lens, the light source irradiates the objective lens after penetrating through the cross reticle and converges into parallel light to be output, and the parallel light serves as reference and measuring light of the whole device; and the beam splitter prism is arranged in a parallel light output light path of the collimation light source, and the beam splitter prism has the characteristic of enabling light to pass through and generate 90-degree deflection inside. By adopting the combination of the collimation light source, the beam splitter prism and the cube-corner prism, high-precision measurement of the absolute position is achieved, parallel light provided by the collimation light source serves as reference light and measurement light, and the absolute position is measured through accurate reflection and turning of the beam splitter prism and the cube-corner prism. The cross image finally imaged by the CCD camera of the receiving unit can accurately reflect the reference position and the measurement position, and high precision and stability of the measurement result are ensured.

Description

Technical Field

[0001] The invention relates to the field of small angle measurement, and in particular to an absolute position auxiliary adjustment device and an adjustment method thereof. Background Art

[0002] The electronic autocollimator is a commonly used metrological test instrument that uses the principle of optical autocollimation and cooperates with a reflector to measure tiny deflection angles. It can measure small angles or convert them into small angle measurements. The electronic autocollimator is the product of the combination of autocollimation technology and optoelectronic technology. It is a type of autocollimator with a relatively short development history but higher measurement accuracy. This technology has been used in various industries for decades, but it has not been improved and developed.

[0003] Traditional optical measurement equipment, such as laser interferometers and laser trackers, can provide high-precision measurement results, but their measurement accuracy is often limited by the quality of the equipment's optical components, environmental factors (such as temperature and humidity), and the operator's technical level. These factors may lead to the accumulation of errors in the measurement results, thereby affecting the overall measurement accuracy and reliability.

[0004] High-precision optical measurement equipment in the prior art usually adopts a complex optical path design, including the combination of multiple optical components and precise adjustment. This not only increases the manufacturing and maintenance costs of the equipment, but also increases the difficulty of operation. The complex optical path design is also susceptible to external interference, resulting in unstable measurement results.

[0005] In some application scenarios that require real-time position adjustment and feedback, traditional measurement equipment often cannot meet the needs. Due to the lack of real-time monitoring and adjustment mechanism, it is difficult for operators to accurately control the measurement position during the adjustment process, resulting in low adjustment efficiency and may affect the normal operation of the equipment and the accuracy of the measurement results.

[0006] Based on the above-mentioned deficiencies of the prior art, the present invention proposes an absolute position auxiliary adjustment device and an adjustment method thereof. Summary of the invention

[0007] In view of the deficiencies of the prior art, the present invention provides an absolute position auxiliary adjustment device and an adjustment method thereof, which solves the problems of traditional optical measurement equipment. The adjustment device provides a stable measuring optical axis, provides an idea of ​​absolute position adjustment, and solves the time-consuming, labor-intensive and system integration difficulties caused by the relative adjustment method of traditional optical measurement equipment. Optical adjustment belongs to the scope of precision adjustment. The adjustment accuracy required by the equipment is getting higher and higher, and the adjustment difficulty is getting greater and greater. The quality requirements for the adjustment personnel are very high. The adjustment device provides the angle information of the adjustment reference and adopts an intuitive adjustment method, which can greatly reduce the adjustment difficulty, effectively improve the efficiency of optical adjustment, and ensure the consistency of the adjustment products.

[0008] To achieve the above objectives, the present invention is implemented through the following technical solutions: an absolute position auxiliary adjustment device and an adjustment method thereof, comprising:

[0009] A collimated light source, comprising a light source, a cross-reticle plate and an objective lens. The light source is transmitted through the cross-reticle plate and irradiates the objective lens and converges into parallel light output. The parallel light serves as the reference light and measurement light of the entire device.

[0010] A beam splitter prism is installed in the parallel light output path of the collimated light source. The beam splitter prism has the characteristic of transmitting and refracting the incident light in a specific ratio, so that part of the collimated light can be transmitted and part of the collimated light can be refracted at 90° on the beam splitting surface, and the reference light can be divided into mutually perpendicular measurement light and reference light. The reference light is vertically incident on the corner cube prism, and the measurement light is reflected after being transmitted and irradiated on the surface of the measured object. After the reflected light is incident on the beam splitter prism, it is refracted at 90° on the beam splitting surface and then incident on the CCD camera of the receiving unit. The reflected light is finally displayed in the form of a cross image on the software interface. The cross image is displayed in the software interface as angle information. The angle information shows the relative position relationship between the measured object and the measuring device, and provides angle information for subsequent adjustment;

[0011] The corner cube prism is located on the left side of the beam splitter prism and has the function of reflecting the vertically irradiated light by 180°, so that the reference light deflected by the beam splitter prism is reflected back along the original path, and finally irradiates the receiving unit CCD camera through the beam splitter prism. The reference light is finally displayed in the form of a cross image on the software interface. The cross image is displayed as angle information on the software interface. The reference light is only deflected inside the device, and the position of the internal components of the device is absolutely unchanged. The position of the reference light finally irradiated on the receiving unit CCD camera remains unchanged. The position information of the reference light displayed in the software can be used as the adjustment reference of the device, providing a reference for subsequent angle adjustment;

[0012] A receiving unit includes an objective lens and a CCD camera. The objective lens is used to converge the incident parallel light to the CCD camera for imaging. The CCD camera is used to image and display the light converged by the objective lens. The receiving unit is located on the right side of the beam splitter prism and is used to receive the parallel light irradiated from the beam splitter prism and finally image and display it on the CCD camera. The CCD camera displays the image of the cross-reticle. Finally, the software interface displays two cross images, which are the optical reference and the image reflected by the measured component respectively.

[0013] Measuring computer: provides the operating environment for the measuring software, which is used to calculate the test data and display images.

[0014] Preferably, the collimated light source is a laser light source that outputs parallel light of a specific wavelength.

[0015] Preferably, the beam splitter prism is installed in the center of the optical path, and provides two beams of light to illuminate the CCD camera through its beam splitting characteristics, thereby providing an absolute reference datum and a measurement image.

[0016] Preferably, the corner cube prism is an optical element having a characteristic of reflecting incident light by 180°, and reflects the measuring light back to the CCD camera along the original path.

[0017] Preferably, the receiving unit is used to receive and display images of two paths of reflected light to assist in optical adjustment.

[0018] Preferably, the measuring computer is used to run measuring software to provide a visual operation process for assembly and adjustment.

[0019] Preferably, the components of the device are fixed in an optical path by mechanical connection, and the positional relationship of the collimated light source, the beam splitter, the corner cube and the receiving unit is:

[0020] The collimated light source and the beam splitter prism are coaxial;

[0021] The corner cube is located to the left of the beam splitter;

[0022] The receiving unit is located on the right side of the beam splitter prism;

[0023] The test component is placed at the light outlet where it is directly illuminated by the light source.

[0024] Preferably, the relative positions of the components of the adjustment device are fixed by precise adjustment to ensure that the relative position relationship of the components remains absolutely unchanged, and the reflected light of the corner cube prism and the output light of the light source are perpendicular to each other.

[0025] Preferably, a method for adjusting an absolute position auxiliary adjustment device comprises the following steps:

[0026] Fix the adjustment device to the measuring position and ensure that the state of the adjustment device remains unchanged during the measurement process;

[0027] Detecting the tested component and obtaining initial state information of the tested component;

[0028] Detect the position information of the measuring light reflected by the measured part, compare it with the angle information of the reference light, adjust the relative position of the measured part and the device, and adjust it based on the two angle differences in the software interface. Keep adjusting the angle state of the measured part until the two cross images in the software overlap, and the adjustment is completed;

[0029] The measurement software displays the current position and adjustment status on the CCD camera of the receiving unit in real time.

[0030] The cross image of the reference light in the software remains unchanged, providing a basis for subsequent contact adjustments.

[0031] The above is the adjustment method of the device.

[0032] Preferably, when the method obtains the initial position of the measured component, an optical reference whose absolute position remains unchanged is provided inside the adjustment device, and data processing is performed through software to finally display the angle information of the position data. When the method adjusts the position of the measured component, the angle information of its relative position is calculated through software. The software can provide an adjustment basis by calculating two angle information, and assist the operator to quickly make adjustments to complete the position adjustment of the measured component. The method displays the angle information of two cross images on the CCD camera in real time in the software, which are the reference point and the image of the reflected light of the measured component. When adjusting the position of the measured component, the software displays the current position and adjustment status information in real time. When calculating the working status of the adjustment device and the measured position data, the method performs data calculations through the software of the control unit.

[0033] Working principle: The collimated light source consists of a light source, a cross-reticle plate and an objective lens. The light emitted by the light source passes through the cross-reticle plate and is converged by the objective lens to form a parallel light beam, which serves as the reference light and the measuring light, ensuring the collimation and consistency of the output light. When the parallel light beam passes through the beam splitter prism, the beam splitter prism divides the light beam into two parts: one part of the light beam continues to propagate in the original direction through the beam splitter prism and irradiates the measured component as the measuring light; the other part of the light beam makes a 90° turn at the beam splitter surface of the beam splitter prism and irradiates the corner cube prism. After the measuring light is irradiated to the surface of the measured component, it is reflected (reflected light 2). The reflected light 2 is refracted 90° at the beam splitter surface of the beam splitter prism and irradiates the CCD camera. The controller software reads the CCD camera data and finally displays it as a cross image on the software interface. The software calculates and displays the angle information of the cross image, which is the relative angle between the measured object and the device. The light beam deflected by the beam splitter prism is irradiated to the corner cube prism and then 180° reflected (reflected light 1). Reflected light 1 is irradiated to the CCD camera through the beam splitter prism. The controller software reads the CCD camera data and finally displays it as a cross image on the software interface. The software calculates and displays the angle information of the cross image. At the same time, the cross image is generated by the refraction inside the adjustment device. During the measurement process, the position of the internal device of the adjustment device is absolutely unchanged, so the position of the image in the software interface is absolutely unchanged. The cross image can be used as the adjustment reference of the adjustment device. The CCD camera receives reflected light 1 and reflected light 2, and displays two cross images on the measurement software interface. The software in the controller calculates and finally gives the angle information of the two cross images, so that the relative angle relationship between the measured component and the adjustment device can be determined. The angle information can be used as the basis for adjusting the relative angle relationship between the measured component and the device. The ultimate goal of the adjustment is to adjust the two cross images to overlap, thus completing the relative vertical adjustment of the measured object and the adjustment device. The present invention realizes high-precision relative and absolute position measurement, has high stability and reliability, overcomes the shortcomings of the prior art, and the precise matching of various optical elements and the real-time feedback mechanism enable the device to provide reliable measurement and adjustment results in practical applications.

[0034] The present invention provides an absolute position auxiliary adjustment device and an adjustment method thereof, which have the following beneficial effects:

[0035] 1. The present invention realizes high-precision measurement of absolute position by adopting a combination of a collimated light source, a beam splitter and a corner cube prism. The parallel light provided by the collimated light source is used as the reference light and the measuring light. After precise reflection and deflection by the beam splitter and the corner cube prism, the cross image finally formed on the CCD detector can accurately reflect the measuring position, thereby ensuring the high precision and stability of the measurement result.

[0036] 2. In the design of the device of the present invention, the relative position relationship and functional coordination between the optical elements make the optical path design concise and clear. The central position of the beam splitter in the optical path and the 180-degree reflection characteristics of the corner cube prism effectively reduce the interference and complexity in the optical path, thereby improving the reliability and maintainability of the entire system.

[0037] 3. The present invention integrates various components into a fixed device and combines the imaging display of the CCD detector to achieve real-time position adjustment and feedback of the measuring light. The coordinated use of the display module and the control module enables the user to monitor and adjust the measuring position in real time, ensuring the efficiency and accuracy of the measurement and adjustment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a technical principle diagram of the absolute position adjustment device of the present invention;

[0039] Figure 2 It is a partial structural schematic diagram of the beam splitter prism of the present invention;

[0040] Figure 3 It is a process framework diagram of the present invention;

[0041] Figure 4 It is a structural diagram of a collimated light source of the present invention;

[0042] Figure 5 The schematic diagram of the beam splitter prism of the present invention;

[0043] Figure 6 This is a schematic diagram of the corner cube prism of the present invention;

[0044] Figure 7 It is the principle diagram of the receiving unit of the present invention;

[0045] Figure 8 It is the technical principle diagram of the electronic autocollimator of the present invention;

[0046] Fig. 9 It is a comparison diagram of the present invention;

[0047] Fig.10 Schematic diagram of lithography objective-assisted alignment. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] Embodiment 1:

[0050] Please refer to the attached Figure 1 -Attached Figure 3 , an embodiment of the present invention provides an absolute position auxiliary adjustment device, comprising:

[0051] A collimated light source, comprising a light source, a cross-reticle plate and an objective lens. The light source is transmitted through the cross-reticle plate and irradiates the objective lens and converges into parallel light output. The parallel light serves as the reference light and measurement light of the entire device.

[0052] A beam splitter prism is installed in the parallel light output path of the collimated light source. The beam splitter prism has the characteristic of transmitting and refracting the incident light in a specific ratio, so that part of the collimated light can be transmitted and part of the collimated light can be refracted at 90° on the beam splitting surface, and the reference light can be divided into mutually perpendicular measurement light and reference light. The reference light is vertically incident on the corner cube prism, and the measurement light is reflected after being transmitted and irradiated on the surface of the measured object. After the reflected light is incident on the beam splitter prism, it is refracted at 90° on the beam splitting surface and then incident on the CCD camera of the receiving unit. The reflected light is finally displayed in the form of a cross image on the software interface. The cross image is displayed in the software interface as angle information. The angle information shows the relative position relationship between the measured object and the measuring device, and provides angle information for subsequent adjustment;

[0053] The corner cube prism is located on the left side of the beam splitter prism and has the function of reflecting the vertically irradiated light by 180°, so that the reference light deflected by the beam splitter prism is reflected back along the original path, and finally irradiates the receiving unit CCD camera through the beam splitter prism. The reference light is finally displayed in the form of a cross image on the software interface. The cross image is displayed as angle information on the software interface. The reference light is only deflected inside the device, and the position of the internal components of the device is absolutely unchanged. The position of the reference light finally irradiated on the receiving unit CCD camera remains unchanged. The position information of the reference light displayed in the software can be used as the adjustment reference of the device, providing a reference for subsequent angle adjustment;

[0054] A receiving unit includes an objective lens and a CCD camera. The objective lens is used to converge the incident parallel light to the CCD camera for imaging. The CCD camera is used to image and display the light converged by the objective lens. The receiving unit is located on the right side of the beam splitter prism and is used to receive the parallel light irradiated from the beam splitter prism and finally image and display it on the CCD camera. The CCD camera displays the image of the cross-reticle. Finally, the software interface displays two cross images, which are the optical reference and the image reflected by the measured component respectively.

[0055] Measuring computer: provides the operating environment for the measuring software, which is used to calculate the test data and display images.

[0056] Specifically, after the light emitted by the collimated light source passes through the cross-graticule plate, it is converged by the objective lens to form a parallel light beam. The parallel light beam serves as the reference light and measurement light of the entire device, ensuring the collimation and consistency of the output light. The beam splitter prism is installed in the parallel light output light path of the collimated light source. It has the characteristics of allowing the light to pass through and deflect 90° on the internal beam splitting surface, ensuring the collimation of the measurement light and turning the reference light 90° at the same time. The corner cube prism is located on the left side of the beam splitter prism, and has the characteristic of reflecting the vertically incident light 180°, so that the reference light turned by the beam splitter prism is reflected and finally presents a cross image on the CCD camera through the beam splitter prism. The CCD camera is located on the right side of the beam splitter prism for receiving the reflected light. The reflected light is finally displayed as a cross image on the software interface and its angle information is displayed. During operation, the parallel light beam emitted by the collimated light source passes through the beam splitter prism. A part of the light beam is transmitted through the beam splitter prism as the measuring light to illuminate the measured component and is reflected back (radiated light 2). The reflected light 2 is irradiated to the CCD camera after a 90° turn on the beam splitter surface of the beam splitter prism. Finally, the cross image of the reflected light 2 is displayed on the software interface; the other part of the light beam is refracted 90° on the beam splitter surface of the beam splitter prism and then irradiates to the corner cube prism. The corner cube prism reflects the reflected light 180° (reflected light 1). The reflected light 1 passes through the beam splitter prism and illuminates the CCD camera. The cross image of the reflected light 1 is displayed on the software interface. The cross image is displayed on the software interface. Reflected light 1 is the image generated by the internal deflection of the adjustment device. The reflected light 1 and the reference light are at 90°. The absolute position of reflected light 1 remains unchanged during the measurement process, so this position can be used as the reference point of the adjustment device. Finally, the software interface displays two cross images, one of which serves as the adjustment reference and remains unchanged, and the other is the target to be adjusted. By observing the information of the two cross images on the software interface, the user can determine the relative position and absolute position of the object being measured, providing reference data for subsequent relative adjustment and absolute adjustment.

[0057] The collimated light source is a laser light source that outputs parallel light of a specific wavelength.

[0058] Specifically, the light emitted by the laser passes through the cross-reticle plate and is converged by the objective lens to form a parallel light beam. By adopting a laser light source with a specific wavelength, the stability and accuracy of the measurement light beam can be improved, thereby ensuring the reliability and consistency of the measurement results. The parallel light beam serves as the reference light and measurement light of the entire device, ensuring the collimation and consistency of the output light, thereby providing a stable optical basis for subsequent optical path splitting, reflection and imaging.

[0059] The beam splitter prism is installed in the center of the optical path, and provides two beams of light to illuminate the CCD camera through its beam splitting characteristics, thereby providing an absolute reference benchmark and measurement image.

[0060] Specifically, the beam splitter prism divides the light beam into two paths through its beam splitting characteristics. One beam passes through the beam splitter prism and directly irradiates the measured component to be reflected, and then irradiates the CCD camera after refracting 90° on the beam splitter surface of the beam splitter prism. The other beam is refracted 90° on the beam splitter surface of the beam splitter prism, and then passes through the beam splitter prism again after being reflected by the corner cube prism to irradiate the CCD camera. In this way, the beam splitter prism can provide two beams that irradiate the CCD camera, thereby displaying two cross images on the software interface. The two beams are used as the measurement beam and the reference beam respectively. In this way, the beam splitter prism realizes the setting of the absolute reference benchmark by providing a stable optical path, thereby improving the accuracy and stability of the measurement results.

[0061] The corner cube prism is an optical element with the characteristic of reflecting the incident light 180°, and reflects the measurement light back to the CCD camera along the original path

[0062] Specifically, the corner cube can reflect the vertically incident reference light back along the original path at 180 degrees. This feature allows the reference light, which has been deflected 90 degrees by the beam splitter, to be reflected 180 degrees after being irradiated by the corner cube, and then irradiated to the CCD camera through the beam splitter. In this way, the corner cube ensures the stability of the path of the reference light and the accuracy of the reflection, so that the CCD camera can receive the reference light returned along the original path, form an accurate cross image on the software interface, and provide a reliable optical reference.

[0063] The receiving unit includes an objective lens and a CCD camera for receiving and displaying images of two paths of reflected light to assist in optical adjustment.

[0064] Specifically, the CCD camera receives the light beam reflected from the measured component and the light beam reflected by the corner cube prism, and displays the two reflected light images on its software interface. By displaying the images of the two reflected light, the measurement software can display two cross images, which provide accurate measurement and reference information to assist users in optical adjustment, ensuring the accuracy of the measurement results and the efficiency of the adjustment process.

[0065] The various components of the device are fixed in an optical path by mechanical connection, and the positional relationship of the collimated light source, the beam splitter, the corner cube and the receiving unit is:

[0066] The collimated light source and the beam splitter prism are coaxial;

[0067] The corner cube is located to the left of the beam splitter;

[0068] The receiving unit is located on the right side of the beam splitter prism;

[0069] The test component is placed at the light outlet where it is directly illuminated by the light source.

[0070] Specifically, through this layout, after the light beam emitted by the collimated light source is split by the beam splitter, part of the light beam directly irradiates the measured component and is reflected, and the other part of the light beam is reflected by the corner cube prism and finally irradiates the CCD camera. Such mechanical connection and position arrangement ensure the accuracy of the optical path and the stability of the device, which helps to achieve high-precision measurement and adjustment.

[0071] The relative positions of the various components of the adjustment device are fixed through precise adjustment, ensuring that the relative position relationship of the various components remains absolutely unchanged, and that the reflected light of the corner cube prism and the reference light output by the light source are perpendicular to each other.

[0072] Specifically, the relative positions of the collimated light source, the beam splitter, the corner cube prism and the receiving unit are fixed and calibrated by a precision mechanical structure to ensure the stability of the optical path and the high accuracy of the measurement. In addition, the device design ensures that the reflected light of the corner cube prism and the reference light output by the light source are perpendicular to each other. This feature can ensure that the optical reference of the adjustment device remains absolutely unchanged, further improving the accuracy and stability of the measurement. Through the above-mentioned precise assembly and fixation, the relative position relationship of each component remains unchanged, ensuring the reliability and long-term stability of the entire optical system.

[0073] Embodiment 2:

[0074] Semiconductor industry applications

[0075] Optical inspection and processing equipment is required in the semiconductor chip manufacturing process. The optical inspection equipment needs to use a light source (usually a laser light source) to inspect the chip through a lens. The lens and chip need to be strictly aligned to ensure processing accuracy.

[0076] The chip manufacturing process has now reached the nanometer level, and a photolithography machine is required for exposure. During the entire exposure process, the photolithography machine needs to control its silicon wafer tray to always align with the lens. During the movement of the silicon wafer tray, not only the positioning accuracy of the XY (indicating the two-dimensional direction of the vertical optical lens) position must be guaranteed, but also the Z (direction perpendicular to the silicon wafer) position must be kept completely vertical. Only when the positioning and vertical accuracy meet the requirements can the final product meet the accuracy requirements. The absolute position adjustment device can assist in adjusting the verticality of the Z axis during its operation. The device provides a low-cost adjustment method, effectively reducing product costs and adjustment efficiency.

[0077] The absolute position adjustment device can provide a low-cost solution. The device can be installed on the objective lens of the lithography machine (or on the associated components. The technical principle is detailed below. Fig. 9Photolithography objective lens assisted alignment), uses the device to irradiate the silicon wafer, the end face of the silicon wafer will reflect the image, and finally display it on the control computer screen. At this time, two cross images are displayed on the control computer screen, and the angle difference between the two cross images can be fed back to the control unit. The control unit can adjust the vertical relationship between the silicon wafer and the photolithography objective lens in real time according to the angle position, thereby ensuring real-time vertical adjustment of the photolithography objective lens and the silicon wafer.

[0078] The advantages of this solution are low cost, only one set of equipment is needed, and vertical relationship can be guaranteed. If reliability needs to be improved, 2-3 image acquisition points can be appropriately configured;

[0079] The device can provide real-time image feedback. From the perspective of technical principles, the device can achieve a vertical accuracy of 0.2 arc seconds and provide angle information in real time, thereby ensuring that the lithography objective lens and the silicon wafer always maintain a small angle deviation and improving exposure energy.

[0080] It is easy to install. The device only needs to be installed on the photolithography objective lens to ensure that the two objective lens lenses are relatively parallel. It can realize modular production, simplify the installation and adjustment steps, and improve the installation and adjustment efficiency. It can effectively reduce the production difficulty, reduce the difficulty of the photolithography machine process, and improve the popularity of the product.

[0081] The test schematic and technical overview are as follows: If we want to adjust the perpendicularity between the lithography objective lens and the exposure stage, we only need to make the light output of our device parallel to the light output of the lithography objective lens, fix them firmly, and place a reflector on the exposure stage to adjust the perpendicularity between the lithography objective lens and the exposure stage, and monitor the angular relationship between the two in real time.

[0082] refer to Fig.10 :Lithography objective lens assisted alignment

[0083] Product application direction:

[0084] Optical testing equipment research and development

[0085] Optical inspection equipment uses optical imaging to inspect the product being tested.

[0086] Embodiment three:

[0087] Please see attached Figure 4 -Attached Fig. 9 The structure of the collimated light source includes a point radiation light source, a filter, a condenser, a graticule, an objective lens, a metal tube and other fixed metal parts.

[0088] The collimated light source provides the measurement light for the absolute position adjustment device. The measurement light must be a quasi-parallel light beam with a certain aperture. The parallel light beam can simulate an infinite reference target, which can ensure that the target image (the cross image displayed on the graticule) will not diffuse within the full output aperture range, and the image will remain clear. Finally, it can be clearly displayed on the CCD camera. At the same time, the beam splitter and corner cube in the optical path can be regarded as plane mirrors. The plane mirror only changes the direction of light beam transmission and has no effect on the light beam quality.

[0089] During the adjustment of the collimated light source, the accuracy of the relative angle deviation between the end face of the objective lens and the incident surface of the beam splitter prism must be ensured. This angle accuracy will affect the incident light angle of the beam splitter surface of the beam splitter prism, thereby affecting the subsequent optical path transmission.

[0090] The incident light is transmitted and reflected on the beam splitting surface. For different types of beam splitters, the product size and splitting ratio (reflected light R / transmitted light T) are different. The splitting ratio is an important parameter of the beam splitter, which indicates the ratio of the transmitted and reflected light intensity. The typical splitting ratios of the general beam splitter are: R / T=2 / 8, R / T=5 / 5 and R / T=8 / 2. In the absolute position adjustment device, the transmission and reflection of the light beam after the beam splitter prism are very important parameters. According to the application, the manufacturer can choose beam splitters with different splitting ratios. For example, if the reflectivity of the measured component is too low or the reflection surface is too small, the R / T=2 / 8 beam splitter can be used. After 80% of the light is transmitted, the reflected light intensity is high, which is conducive to the final CCD clear imaging and convenient for subsequent azimuth adjustment. The beam of the beam splitter prism can be incident in both directions and reflected in the same direction, ensuring that the reflected light of the measured component can be reflected on the beam splitting surface to meet the use of the device.

[0091] The structure of the beam splitter prism is formed by pasting two right-angle triangular prisms. From its structure, it can be seen that its light splitting and light transmission meet the optical characteristics of the refractive prism, and reflection occurs on the beam splitting surface, which meets the law of reflection. The beam splitter prism may cause the transmission light and the reflected light to shift. In order to ensure the reflection and transmission accuracy of the beam splitter prism in the light path, the processing requirements of the beam splitter prism are relatively high. The angle error of the triangular prism causes the reflected light of the beam splitter prism to shift, and the end face verticality and hypotenuse angle errors cause the transmitted light of the beam splitter prism to shift.

[0092] Before installing the beam splitter, the deviation error of the transmitted and reflected light needs to be detected. During installation, it is necessary to ensure that the vertical error between the incident light section and the incident light is as small as possible. During subsequent data processing, the angle of the transmitted and reflected light deviation needs to be compensated in the software to correct the landing point of the reference light in the CCD imaging to ensure the accuracy of the displayed data.

[0093] The corner cube can be regarded as a tetrahedron structure with three mutually perpendicular reflection surfaces. The biggest feature of the corner cube is that the light incident from the corner cube plane is reflected by three mutually perpendicular reflection surfaces, and then the light is emitted along the original path at 180°. When the corner cube is an ideal device, the incident light beam and the outgoing light beam remain absolutely parallel and in opposite directions, so it is an ideal retroreflector. The source of its error is the angular deviation of the three vertical end faces, which leads to an angular deviation between the outgoing light beam and the incident light beam.

[0094] The corner cube prism serves as the reflecting end of the reference light in the device. The error source of the corner cube prism to the device is mainly the output angle deviation of the corner cube itself. Before installation and adjustment, the output light deviation of the corner cube prism needs to be measured, and the deviation data is entered into the measurement software as calibration compensation data to correct the landing point position of the reference light in the CCD imaging.

[0095] The receiving unit comprises a receiving part and a data processing part. The receiving part comprises an objective lens and a CCD camera, and the data processing part comprises a computer and software.

[0096] The receiving part is used to receive the parallel light beam reflected from the outside. The parallel light is focused to the focal plane of the CCD camera through the focusing objective lens. In this device, the light beam irradiating the objective lens is the image of the cross target emitted by the light source, so the two reflected images finally present a cross pattern.

[0097] The data processing part is used to read the image information internally and process the data. The angle error data of each component mentioned above needs to be used for accuracy compensation in data processing to ensure the accuracy of the final measurement data. The measurement software can be redeveloped, and the angle can be adjusted using the measurement data of the device. The device can be used as an angle data reading unit for other devices to assist other devices in spatial posture adjustment.

[0098] The receiving part has a simple structure, with only the objective lens and CCD camera used for optical detection. The errors caused by this part are mainly the design error of the objective lens and the angle error between the objective lens and the incident light. Subsequent production requires adjustment to ensure the vertical adjustment between the incident light end face and the objective lens end face, so as to minimize the error of this part.

[0099] The absolute position adjustment device is used for absolute position adjustment, and the display result is the angular deviation. Finally, the CCD camera presents two cross images, and the angular error is finally superimposed on the position parameters of the displayed image.

[0100] The entire device is as described above. The reference light and the measuring light are reflected and transmitted in the optical path. As mentioned above, the transmission process occurs in the beam splitter prism. The parallel error of the end face of the beam splitter prism causes the deviation of the emission angle of the transmitted light. The reflection process occurs on the beam splitting surface of the beam splitter prism and the end face of the corner cube prism. The angular error of the two reflecting surfaces will cause the deviation of the reflected light. The errors generated in the transmission process and the reflection process will be superimposed on the final measurement result. Therefore, the component processing accuracy and assembly accuracy of the entire device have a great influence on the measurement result.

[0101] As a basic device of optical adjustment equipment, electronic autocollimator is widely used in angle adjustment fields such as optical detection, optical adjustment, and mechanical component detection. It adopts the principle of small angle measurement. From its principle, it can be seen that the autocollimator cannot use its own optical axis as the adjustment reference, but uses the landing point of external reflected light as the reference to adjust the relative positions of all components. The measurement process is complicated. At the same time, the non-visual adjustment has relatively high requirements for technical personnel and low adjustment efficiency.

[0102] The absolute position adjustment device is different from the traditional electronic autocollimator. It can be regarded as a functional combination of the electronic autocollimator and the collimated light source. Through technical comparison, the absolute position adjustment device can not only complete the traditional small angle measurement, but its biggest technical advantage is that it can use its own optical axis as the reference optical axis, and always provide a stable optical axis during the installation and measurement process. Because it can provide the reference optical axis itself, it can also expand the absolute position adjustment function. During the installation process, the computer screen is controlled to display two cross images: the reference image and the reflected image. By observing the angle relationship between the reference image and the reflector, the relative angle relationship between the current installation component and the optical axis can be known. By adjusting the relative angle relationship between the installation component and the optical axis, the position relationship between the two cross images can be changed. In this way, the installation component and the reference optical axis can be adjusted at any angle.

[0103] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Absolute position auxiliary adjustment device, characterized in that: include: A collimated light source, comprising a light source, a cross-reticle plate and an objective lens. The light source is transmitted through the cross-reticle plate and irradiates the objective lens and converges into parallel light output. The parallel light serves as the reference light and measurement light of the entire device. A beam splitter prism is installed in the parallel light output light path of the collimated light source. The beam splitter prism has the characteristic of transmitting and refracting the incident light in a specific ratio, so that part of the collimated light can be transmitted and part of the collimated light can be refracted 90° on the beam splitting surface, and the reference light can be divided into mutually perpendicular measurement light and reference light. The reference light is vertically incident on the corner cube prism, and the measurement light is transmitted and irradiated on the surface of the measured object and then reflected. After the reflected light is incident on the beam splitter prism, it is refracted 90° on the beam splitting surface and then incident on the CCD camera of the receiving unit. The reflected light is finally displayed in the form of a cross image on the software interface. The cross image is displayed in the software interface as angle information. The angle information shows the relative position relationship between the measured object and the measuring device, and provides angle information for subsequent adjustments. The corner cube prism is located on the left side of the dichroic prism and has the function of reflecting the vertically irradiated light by 180°, so that the reference light deflected by the dichroic prism is reflected back along the original path and finally illuminates the CCD camera of the receiving unit through the dichroic prism. The reference light is finally displayed in the form of a cross image on the software interface. The cross image is displayed as angle information on the software interface. The reference light is only deflected inside the device, and the position of the internal components of the device is absolutely unchanged. The position of the reference light that is finally irradiated on the CCD camera of the receiving unit remains unchanged. The position information of the reference light displayed in the software can be used as the adjustment reference of the device, providing a reference for subsequent angle adjustments. The receiving unit includes an objective lens and a CCD camera. The objective lens is used to converge the incident parallel light to the CCD camera for imaging. The CCD camera is used to image and display the light converged by the objective lens. The receiving unit is located on the right side of the beam splitter prism and is used to receive the parallel light irradiated from the beam splitter prism and finally image and display it on the CCD camera. The CCD camera displays the image of the cross-graticule plate. Finally, the software interface displays two cross images, which are respectively the images of the optical reference and the image reflected by the measured component. Measuring computer: provides the operating environment for the measuring software, which is used to calculate the test data and display images.

2. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The collimated light source is a laser light source that outputs parallel light of a specific wavelength.

3. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The beam splitter prism is installed in the center of the optical path, and provides two beams of light irradiating the CCD camera through its beam splitting characteristics, thereby providing reference light and measurement light for the entire device, and providing reference and measurement information for subsequent adjustments.

4. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The corner cube prism is an optical element with a 180-degree reflection characteristic, which reflects the reference light back to the CCD camera along the original path.

5. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The receiving unit includes an objective lens and a CCD camera. The objective lens has the function of converging incident parallel light, and can converge the reference light and the measuring light to the CCD camera. The CCD camera is used to receive and display images of the two reflected lights to assist in optical adjustment.

6. Add a description of the measurement computer. The measurement computer provides the software operating environment, provides data calculation and image display during the measurement process, and provides a visual adjustment method to ensure measurement accuracy and convenient operation.

7. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The various components of the device are fixed in an optical path by mechanical connection, and the positional relationship of the collimated light source, the beam splitter, the corner cube and the receiving unit is: The collimated light source and the beam splitter prism are coaxial; The corner cube is located to the left of the beam splitter; The receiving unit is located on the right side of the beam splitter prism; The test component is placed at the light outlet where it is directly illuminated by the light source.

8. The absolute position auxiliary adjustment device according to claim 1, characterized in that: The relative positions of the various components of the adjustment device are fixed through precise adjustment, ensuring that the relative position relationship of the various components remains absolutely unchanged, and that the reflected light of the corner cube prism and the output light of the light source are perpendicular to each other.

9. A method for adjusting an absolute position auxiliary adjustment device, comprising the absolute position auxiliary adjustment device according to claims 1 to 7, characterized in that: The following steps are involved: Fix the adjustment device to the measuring position and ensure that the state of the adjustment device remains unchanged during the measurement process; Detecting the tested component and obtaining initial state information of the tested component; Detect the position information of the measuring light reflected by the measured part, compare it with the angle information of the reference light, adjust the relative position of the measured part and the device, and adjust it based on the two angle differences in the software interface. Keep adjusting the angle state of the measured part until the two cross images in the software overlap, and the adjustment is completed; The measurement software displays the current position and adjustment status on the CCD camera of the receiving unit in real time. The cross image of the reference light in the software remains unchanged, providing a basis for subsequent contact adjustments.

10. The method for adjusting the absolute position auxiliary adjustment device according to claim 8, characterized in that: When the method obtains the initial position of the measured component, an optical reference with a constant absolute position is provided inside the adjustment device, and the angle information of the position data is finally displayed through data processing by software. When the method adjusts the position of the measured component, the angle information of its relative position is calculated by software. The software can provide an adjustment basis by calculating two angle information, and assist the operator to make adjustments quickly to complete the position adjustment of the measured component. The method displays the angle information of two cross images on the CCD camera in real time in the software, which are the reference point and the image of the reflected light of the measured component. When adjusting the position of the measured component, the software displays the current position and adjustment status information in real time. When calculating the working status of the adjustment device and the measured position data, the method performs data calculations through the software of the control unit.

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