Monitoring method and monitoring device of quartz furnace tube and furnace tube equipment

Abstract

The invention relates to a quartz furnace tube monitoring method, a quartz furnace tube monitoring device and furnace tube equipment. The method comprises the following steps: measuring radial deformation quantities of a quartz furnace tube at a plurality of moments, and generating deformation signals; and monitoring the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment. Whether the quartz furnace tube needs to be maintained or not can be judged according to the aging state of the quartz furnace tube, so that the planning and reasonability of maintenance work are improved, the utilization rate of the quartz furnace tube is improved, and the influence of blind replacement of the quartz furnace tube on the manufacturing cost of a solar cell is avoided.

Description

Technical Field

[0001] The present application relates to the technical field of processing devices, and in particular to a monitoring method and monitoring device for a quartz furnace tube, a furnace tube device, and a computer-readable storage medium. Background Art

[0002] In the preparation process of solar cells, the furnace tube equipment can perform a diffusion process for doping, perform an annealing process for crystallization of amorphous silicon, and perform a deposition process to form a preset material layer. Since the production process, use environment, and use frequency of the quartz furnace tubes in each furnace tube equipment are different, the service life of different quartz furnace tubes varies greatly. How to arrange corresponding maintenance according to the use of the quartz furnace tubes has become a problem that needs to be solved. Summary of the invention

[0003] Based on this, it is necessary to provide a quartz furnace tube monitoring method and monitoring device, furnace tube equipment and computer-readable storage medium to address the above technical problems, so as to achieve the purpose of performing maintenance of the quartz furnace tube in advance, improving the yield rate, and avoiding damage to the quartz furnace tube affecting the production capacity of the furnace tube equipment.

[0004] In a first aspect, the present application provides a monitoring method for a quartz furnace tube, wherein the quartz furnace tube is used to perform a preset process in preparing a solar cell, and the monitoring method comprises:

[0005] Measuring the radial deformation of the quartz furnace tube at multiple times and generating a deformation signal;

[0006] The aging state of the quartz furnace tube is monitored according to the deformation signal corresponding to each moment.

[0007] In one embodiment, measuring the radial deformation of the quartz furnace tube at multiple times includes:

[0008] Selecting a plurality of measuring positions on the outer side of the quartz furnace tube;

[0009] Measuring and obtaining intermediate radial deformation amounts of each of the measuring positions at multiple moments;

[0010] Obtaining the radial deformation amount of the quartz furnace tube at a preset time according to the intermediate radial deformation amount corresponding to each measuring position at a preset time;

[0011] Wherein, the plurality of measuring positions are arranged at intervals along the circumference of the quartz furnace tube, and / or the plurality of measuring positions are arranged at intervals along the axial direction of the quartz furnace tube.

[0012] In one embodiment, the quartz furnace tube includes a furnace mouth area, a furnace middle area and a furnace tail area arranged in sequence along the axial direction from the opening of the quartz furnace tube toward the bottom of the quartz furnace tube; at least the radial deformation of the furnace middle area at multiple times is measured.

[0013] In one embodiment, monitoring the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment includes:

[0014] When the deformation signal corresponding to the preset time is equal to the deformation threshold, it is determined that the quartz furnace tube is in the first aging state at the preset time, and the quartz furnace tube needs maintenance;

[0015] When the deformation signal corresponding to the preset time is less than the deformation threshold, it is determined that the quartz furnace tube is in the second aging state at the preset time, and the quartz furnace tube supports the execution of the preset process.

[0016] In one embodiment, the preset process includes a plurality of process menus, and the monitoring method further includes:

[0017] Measuring and obtaining the radial process deformation of the quartz furnace tube when executing different process menus;

[0018] According to the radial process deformation amount corresponding to each process menu, the order in which the quartz furnace tube executes the process menu is adjusted.

[0019] In one embodiment, a protective furnace tube is sleeved on the outer side of the quartz furnace tube, and a perspective window penetrating the protective furnace tube is provided on the protective furnace tube, and the radial deformation of the quartz furnace tube is measured through the perspective window.

[0020] In a second aspect, the present application provides a monitoring device for a quartz furnace tube, wherein the quartz furnace tube is used to perform a preset process in preparing a solar cell, and the monitoring device comprises:

[0021] A detection module is located outside the quartz furnace tube and is spaced apart from the quartz furnace tube; the detection module is used to measure the radial deformation of the quartz furnace tube at multiple moments and generate a deformation signal;

[0022] The control module is connected to the detection module and is used to monitor the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment.

[0023] In one embodiment, the control module is used to determine that the quartz furnace tube is in the first aging state at the preset time when the deformation signal corresponding to the preset time is equal to the deformation threshold, and the monitoring device further includes:

[0024] The alarm module is connected to the control module and is used to send out an alarm signal when the quartz furnace tube is in a first aging state, wherein the alarm signal is used to indicate that the quartz furnace tube needs maintenance.

[0025] In a third aspect, the present application provides a furnace tube device, comprising:

[0026] Quartz furnace tubes, used to perform the preset processes in solar cell preparation;

[0027] Such as the monitoring device of the quartz furnace tube mentioned above.

[0028] In one embodiment, it also includes:

[0029] A protection furnace tube is sleeved on the outer side of the quartz furnace tube, and a perspective window penetrating the protection furnace tube is provided on the protection furnace tube; the detection module is located on a side of the protection furnace tube away from the quartz furnace tube;

[0030] Wherein, the perspective window corresponds to the detection module.

[0031] In a fourth aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the above-mentioned quartz furnace tube monitoring method.

[0032] In the above-mentioned quartz furnace tube monitoring method, the aging state of the quartz furnace tube is monitored according to the deformation signal generated by the radial deformation of the quartz furnace tube at multiple times. According to the aging state of the quartz furnace tube, it can be determined whether the quartz furnace tube needs maintenance, thereby improving the planning and rationality of the maintenance work, improving the utilization rate of the quartz furnace tube, and avoiding the impact of blindly replacing the quartz furnace tube on the manufacturing cost of solar cells.

[0033] In the above-mentioned monitoring device for the quartz furnace tube, the detection module measures and generates deformation signals according to the radial deformation of the quartz furnace tube at multiple moments, and the control module monitors the aging state of the quartz furnace tube according to the deformation signals corresponding to each moment. The aging state of the quartz furnace tube can determine whether the quartz furnace tube needs to be maintained, thereby improving the planning and rationality of the maintenance work, improving the utilization rate of the quartz furnace tube, and avoiding the impact of blindly replacing the quartz furnace tube on the manufacturing cost of solar cells.

[0034] In the above furnace tube equipment, the detection module measures and generates deformation signals according to the radial deformation of the quartz furnace tube at multiple moments, and the control module monitors the aging state of the quartz furnace tube according to the deformation signals corresponding to each moment. The aging state of the quartz furnace tube can determine whether the quartz furnace tube in the furnace tube equipment needs to be maintained, thereby improving the planning and rationality of the maintenance work of the furnace tube equipment, improving the utilization rate of the furnace tube equipment, and avoiding the impact of blindly replacing the quartz furnace tube in the furnace tube equipment on the manufacturing cost of solar cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments of the present application or related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 Schematic diagram of a process for monitoring a quartz furnace tube in some embodiments;

[0037] Figure 2 is a schematic cross-sectional view of a quartz furnace tube in some embodiments;

[0038] Figure 3 Schematic cross-sectional view of a quartz furnace tube in some embodiments;

[0039] Figure 4 A schematic diagram of a process for measuring the radial deformation of a quartz furnace tube at multiple moments in some embodiments;

[0040] Figure 5 is a schematic diagram of a monitoring device for a quartz furnace tube in some embodiments;

[0041] Figure 6 Schematic diagram of a monitoring device for a quartz furnace tube in some other embodiments.

[0042] Description of reference numerals:

[0043] The quartz furnace tube 102 , the measuring position 104 , the protective furnace tube 106 , the perspective window 108 , the detection module 110 , the control module 112 , the alarm module 114 , the setting module 116 , the operation unit 202 , and the detection unit 204 . DETAILED DESCRIPTION

[0044] In order to facilitate understanding of the embodiments of the present disclosure, the embodiments of the present disclosure will be described more fully below with reference to the relevant drawings. The preferred embodiments of the embodiments of the present disclosure are shown in the drawings. However, the embodiments of the present disclosure can be implemented in many different forms and are not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the embodiments of the present disclosure more thorough and comprehensive.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the disclosed embodiments belong. The terms used herein in the specification of the disclosed embodiments are only for the purpose of describing specific embodiments and are not intended to limit the disclosed embodiments. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0046] In the description of the present disclosure, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically limited. In the description of the present disclosure, the meaning of "several" is at least one, such as one, two, etc., unless otherwise clearly and specifically limited.

[0047] Figure 1 is a schematic diagram of a process for monitoring a quartz furnace tube in some embodiments, Figure 2 is a schematic cross-sectional view of a quartz furnace tube in some embodiments, Figure 3 Schematic cross-sectional view of a quartz furnace tube in some embodiments, such as Figure 1 , Figure 2 , Figure 3 As shown, in this embodiment, a monitoring method for a quartz furnace tube is provided, wherein the quartz furnace tube 102 is used to perform a preset process in preparing a solar cell, wherein the preset process includes one or more of a diffusion process, a deposition process, and an annealing process, and the quartz furnace tube 102 extends along an axial direction X; the monitoring method for the quartz furnace tube 102 includes:

[0048] S102, measuring the radial deformation of the quartz furnace tube at multiple moments and generating a deformation signal.

[0049] The radial deformation of the quartz furnace tube 102 in the radial direction (the direction in the plane where the Y direction and the Z direction are located) is measured at multiple moments, and a corresponding deformation signal is generated according to the radial deformation; the multiple moments are different moments in the service life of the quartz furnace tube 102. For example, the time interval between two adjacent moments is the same, such as 1 hour, and the radial deformation is the change in the radial direction of the outer side of the quartz furnace tube compared with the initial state at the beginning of use. The state of the quartz furnace tube 102 includes before executing the preset process, during executing the preset process, and after executing the preset process. The states of the quartz furnace tube 102 corresponding to the multiple moments may be the same or different, which is related to the interval between two adjacent different moments and the time of executing the preset process.

[0050] S104, monitoring the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment.

[0051] According to the deformation signal corresponding to each moment, the aging state of the quartz furnace tube 102 is monitored. The aging state of the quartz furnace tube 102 is used to characterize the state of the quartz furnace tube 102 at different moments, and confirm whether the quartz furnace tube 102 can continue to perform the preset process. If the quartz furnace tube 102 can continue to perform the preset process, it is determined that the quartz furnace tube 102 does not need to be maintained. If the quartz furnace tube 102 cannot continue to perform the preset process, it is determined that the quartz furnace tube 102 needs to be maintained, and then the timing of maintaining the quartz furnace tube 102 is confirmed, so as to avoid the quartz furnace tube 102 from being damaged during the process of preparing solar cells, thereby increasing the scrap rate of solar cells, reducing production capacity, and increasing the manufacturing cost of solar cells. In the above-mentioned quartz furnace tube monitoring method, the aging state of the quartz furnace tube 102 is monitored according to the deformation signal generated by the radial deformation amount of the quartz furnace tube 102 at multiple times. According to the aging state of the quartz furnace tube, it can be determined whether the quartz furnace tube 102 needs to be maintained, thereby improving the planning and rationality of the maintenance work, improving the utilization rate of the quartz furnace tube 102, and avoiding the impact of blindly replacing the quartz furnace tube 102 on the manufacturing cost of the solar cell.

[0052] Figure 4 FIG. 1 is a schematic diagram of a process for measuring the radial deformation of a quartz furnace tube at multiple moments in some embodiments. Figure 2 , Figure 3 , Figure 4 As shown, in one embodiment, measuring the radial deformation of the quartz furnace tube 102 at multiple times includes steps S202-S206.

[0053] S202, selecting a plurality of measurement positions on the outer side of the quartz furnace tube.

[0054] Specifically, a plurality of measuring positions 104 are selected on the outer side of the quartz furnace tube 102, and the plurality of measuring positions 104 are arranged at intervals along the circumference of the quartz furnace tube 104 (eg, Figure 2 ), and / or the plurality of measuring positions 104 are arranged at intervals along the axial direction X of the quartz furnace tube 102 (as shown in Figure 3 as shown).

[0055] It can be understood that selecting multiple measurement positions 104 spaced apart along the circumferential direction or the axial direction can reduce the monitoring cost, reduce the data processed in the process of obtaining the radial deformation amount of the quartz furnace tube 102 at different times, and improve the speed of obtaining the radial deformation amount of the quartz furnace tube 102 at different times. Selecting multiple measurement positions 104 spaced apart along the circumferential direction and the axial direction can improve the accuracy of the radial deformation amount of the quartz furnace tube 102 at different times, and improve the accuracy of monitoring.

[0056] S204, measuring and obtaining the intermediate radial deformation amount of each measuring position at multiple moments.

[0057] The intermediate radial deformation amount corresponding to each measuring position 104 is measured at one time, and then the intermediate radial deformation amount corresponding to each measuring position 104 is measured at another time, until the measurement of the intermediate radial deformation amount corresponding to the measuring position 104 at multiple times is completed; wherein the multiple intermediate radial deformation amounts corresponding to each time correspond to the multiple measuring positions 104, respectively, the intermediate radial deformation amount refers to the radial deformation amount corresponding to the measuring position 104, and the radial deformation amount corresponding to each time is greater than or equal to the intermediate radial deformation amount corresponding to each measuring position 104 at that time. It can be understood that the measuring positions 104 corresponding to different times are the same.

[0058] S206, obtaining the radial deformation amount of the quartz furnace tube at a preset moment according to the intermediate radial deformation amounts corresponding to each of the measuring positions at a preset moment.

[0059] Specifically, the radial deformation of the quartz furnace tube 104 at the preset moment is obtained according to the intermediate radial deformation corresponding to each measuring position 104 at the preset moment; as an example, the radial deformation at the preset moment is the maximum value among the intermediate radial deformation corresponding to each measuring position 104 at the preset moment. Then, according to the intermediate radial deformation corresponding to different moments, the radial deformation corresponding to each moment is obtained, thereby improving the accuracy of the radial deformation. In the case where a plurality of the measuring positions 104 are arranged at intervals along the circumference of the quartz furnace tube 104, the radial deformation obtained according to the intermediate radial deformation corresponding to the plurality of measuring positions 104 can reflect the deformation difference of the quartz furnace tube 104 at different circumferential positions; in the case where a plurality of the measuring positions 104 are arranged at intervals along the axial direction of the quartz furnace tube 104, the radial deformation obtained according to the intermediate radial deformation corresponding to the plurality of measuring positions 104 can reflect the deformation difference of the quartz furnace tube 102 at different axial positions.

[0060] like Figure 3 As shown, in one embodiment, the quartz furnace tube 102 includes a furnace mouth area 1, a furnace middle area 2 and a furnace tail area 3 arranged in sequence along the axial direction X from the opening of the quartz furnace tube 102 toward the bottom of the quartz furnace tube 102; at least the radial deformation of the furnace middle area 2 at multiple times is measured.

[0061] Exemplarily, in the axial direction X, the distance between the measurement position 104 set in the furnace mouth area 1 and the opening of the quartz furnace tube 102 and the distance between the measurement position 104 set in the furnace tail area 3 and the bottom of the quartz furnace tube 102 are the same, for example, both are 40 cm, and the distance between the measurement position 104 in the furnace middle area 2 and the opening of the quartz furnace tube 102 and the bottom of the quartz furnace tube 102 are the same.

[0062] In one embodiment, monitoring the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment includes steps S302-S304.

[0063] S302: When the deformation signal corresponding to the preset time is equal to the deformation threshold, it is determined that the quartz furnace tube is in a first aging state at the preset time, and the quartz furnace tube needs maintenance.

[0064] S304: When the deformation signal corresponding to the preset time is less than the deformation threshold, it is determined that the quartz furnace tube is in the second aging state at the preset time, and the quartz furnace tube supports the execution of the preset process.

[0065] Steps S302-S304 are specifically to set a deformation threshold of the deformation signal. When the radial deformation of the quartz furnace tube 102 is the deformation threshold, the quartz furnace tube 102 will be damaged during the process of using the quartz furnace tube 102 to perform the preset process; when the deformation signal corresponding to the preset time in the use cycle of the quartz furnace tube 102 is equal to the deformation threshold, it is determined that the quartz furnace tube 102 is in the first aging state at the preset time, and it will be damaged if the preset process is continued to be performed, and the quartz furnace tube 102 needs to be maintained. The quartz furnace tube 102 is to be maintained. When the deformation signal corresponding to the preset time in the use cycle of the quartz furnace tube 102 is less than the deformation threshold, it is determined that the quartz furnace tube 102 is in the second aging state at the preset time, and the quartz furnace tube 102 will not be damaged if the preset process is continued to be performed, and can continue to be used. The quartz furnace tube 102 supports the execution of the preset process. In this way, the quartz furnace tube 102 will not be damaged during the process of preparing solar cells, which reduces the frequency of replacing the quartz furnace tube 102 and saves costs.

[0066] In one of the embodiments, the preset process includes a plurality of process menus, and the quartz furnace tube monitoring method further includes: steps S402-S404.

[0067] S402, measuring and obtaining the radial process deformation of the quartz furnace tube when executing different process menus.

[0068] S404, adjusting the order in which the quartz furnace tube executes the process menus according to the radial process deformation amount corresponding to each process menu.

[0069] Steps S402-S404 are specifically to measure and obtain the radial process deformation of the quartz furnace tube 102 when executing different process menus; wherein the process menu is a set of multiple process parameters set for the operation of the quartz furnace tube in the process of executing the preset process, and there is at least one different process parameter between two different process menus; the radial deformation of the quartz furnace tube 102 before the quartz furnace tube 102 executes the process menu A is A1, and the radial deformation of the quartz furnace tube 102 after executing the process menu A is A2, and the radial process deformation of the process menu A is A2-A1, and the radial process deformation corresponding to multiple process menus can be obtained by this method. Secondly, according to the radial process deformation corresponding to each process menu, the order of the quartz furnace tube 102 executing the process menu within the use period is adjusted, thereby increasing the use period of the quartz furnace tube 102, increasing the maintenance period of the quartz furnace tube 102, and reducing the manufacturing cost of solar cells.

[0070] like Figure 2 , Figure 3As shown, in one embodiment, a protective furnace tube 106 is sleeved on the outer side of the quartz furnace tube 102, and the protective furnace tube 106 also extends along the axial direction X. A perspective window 108 is provided on the protective furnace tube 106 and penetrates the protective furnace tube 106. The orthographic projection of the perspective window 108 on the quartz furnace tube 102 covers the position where the radial deformation amount of the outer side of the quartz furnace tube 102 is measured; the radial deformation amount of the quartz furnace tube 102 is measured through the perspective window 108, and the protective furnace tube 106 can protect the quartz furnace tube 102. The setting of the perspective window 108 can eliminate the influence of the protective furnace tube 106 on the measurement of the radial deformation amount of the quartz furnace tube 102.

[0071] In some embodiments, the monitoring method of the quartz furnace tube also includes: obtaining a deformation curve of the quartz furnace tube 102 according to the radial deformation of the quartz furnace tube 102 at multiple times, the deformation curve characterizing the change of the radial deformation of the quartz furnace tube 102 over time; evaluating the quality of the quartz furnace tube according to the deformation curves corresponding to different quartz furnace tubes 102, and in this way, the acceptance and evaluation of the quartz furnace tube 102 can be achieved.

[0072] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0073] Based on the same inventive concept, the embodiment of the present application also provides a quartz furnace tube monitoring device for implementing the quartz furnace tube monitoring method involved above. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme recorded in the above method, so the specific limitations of the embodiment of the monitoring device for one or more quartz furnace tubes provided below can refer to the limitations of the quartz furnace tube monitoring method above, and will not be repeated here.

[0074] Figure 5 Schematic diagram of a monitoring device for a quartz furnace tube in some embodiments, such as Figure 2 , Figure 3 and Figure 5As shown, in some embodiments, the present application provides a monitoring device for a quartz furnace tube, wherein the quartz furnace tube 102 is used to execute a preset process in the preparation of a solar cell, and the monitoring device for the quartz furnace tube includes: a detection module 110 and a control module 112, wherein the detection module 110 is located on the outside of the quartz furnace tube 102 and is spaced apart from the quartz furnace tube 102; the detection module 110 is used to measure the radial deformation of the quartz furnace tube 102 at multiple moments and generate a deformation signal; the control module 112 is connected to the detection module 110, and is used to monitor the aging state of the quartz furnace tube 102 according to the deformation signal corresponding to each moment.

[0075] Along the radial direction of the quartz furnace tube 102, the detection module 110 is located on the outside of the quartz furnace tube 102 and is spaced from the outer side of the quartz furnace tube 102 to avoid the influence of the quartz furnace tube 102 on the detection module 110. The detection module 110 measures the radial deformation of the quartz furnace tube 102 at multiple times and generates a deformation signal according to the measured radial deformation. The control module 112 receives the deformation signal corresponding to each moment generated by the detection module 110, and monitors the aging state of the quartz furnace tube 102 according to the deformation signal corresponding to each moment. The aging state of the quartz furnace tube 102 can be used to confirm the state of the quartz furnace tube 102 at different times, whether the preset process can continue to be executed, and then confirm the timing of maintenance of the quartz furnace tube 102, so as to avoid the quartz furnace tube 102 being damaged during the process of preparing solar cells, reducing production capacity, and increasing the manufacturing cost of solar cells.

[0076] In the above-mentioned monitoring device for the quartz furnace tube, the detection module 110 measures and generates deformation signals according to the radial deformation amount of the quartz furnace tube 102 at multiple moments, and the control module 112 monitors the aging state of the quartz furnace tube 102 according to the deformation signals corresponding to each moment. The aging state of the quartz furnace tube 102 can determine whether the quartz furnace tube 102 needs to be maintained, thereby improving the planning and rationality of the maintenance work, improving the utilization rate of the quartz furnace tube 102, and avoiding the impact of blindly replacing the quartz furnace tube 102 on the manufacturing cost of the solar cell.

[0077] Figure 6 Schematic diagram of a monitoring device for a quartz furnace tube in some other embodiments, such as Figure 2 , Figure 3 and Figure 6 As shown, in one embodiment, the detection module 110 includes a computing unit 202 and a plurality of detection units 204, the plurality of detection units 204 are respectively arranged corresponding to a plurality of measurement positions 104 on the outer side of the quartz furnace tube 102, and the plurality of detection units 204 are arranged at intervals along the circumference of the quartz furnace tube 104 (e.g. Figure 2 ), and / or the plurality of detection units 204 are arranged at intervals along the axial direction X of the quartz furnace tube 102 (as shown in Figure 3 As shown in FIG. 1 ), the detection unit 204 is used to measure the distance between the corresponding measurement position 104 and the detection unit 204 at multiple times and generate a distance signal. The operation unit 202 is connected to the detection unit 204 and is used to receive and obtain the corresponding radial deformation amount according to the distance signal generated by the detection unit 204, and generate a deformation signal according to the radial deformation amount. Exemplarily, the detection unit 204 includes a photoelectric sensor, and the operation unit 202 includes an operation unit and an analog-to-digital conversion element (AD conversion element).

[0078] like Figure 3 As shown, in some embodiments, the quartz furnace tube includes a furnace mouth area 1, a furnace middle area 2 and a furnace tail area 3 arranged in sequence along the axial direction from the opening of the quartz furnace tube toward the bottom of the quartz furnace tube; the detection module 110 is at least used to measure the radial deformation of the furnace middle area 2 at multiple times.

[0079] like Figure 6 As shown, in one embodiment, the control module 112 is used to determine that the quartz furnace tube 102 is in the first aging state at the preset time when the deformation signal corresponding to the preset time is equal to the deformation threshold, and the monitoring device also includes: an alarm module 114, connected to the control module 112, and used to send an alarm signal when the quartz furnace tube 102 is in the first aging state, and the alarm signal is used to indicate that the quartz furnace tube 102 needs maintenance. Exemplarily, the alarm module 114 includes an indicator light and / or a buzzer, and the alarm signal includes a sound signal and / or a light signal.

[0080] In some embodiments, the control module 112 is used to determine that the quartz furnace tube 102 is in the second aging state at the preset time when the deformation signal corresponding to the preset time is less than the deformation threshold, and the quartz furnace tube supports the execution of the preset process.

[0081] like Figure 6 As shown, in some embodiments, the monitoring device further includes: a setting module 116, which is used to set a deformation threshold and a frequency for measuring the radial deformation amount.

[0082] In some embodiments, the control module 112 is further configured to store the radial deformation of the quartz furnace tube 102 at multiple moments.

[0083] In some embodiments, the preset process includes multiple process menus, and the detection module 110 is also used to measure the radial process deformation of the quartz furnace tube when executing different process menus; the control module 112 is also used to adjust the order in which the quartz furnace tube executes the process menus according to the radial process deformation corresponding to each process menu, thereby improving the utilization rate of the quartz furnace tube 102.

[0084] In some embodiments, the control module 112 is also used to obtain a deformation curve of the quartz furnace tube 102 according to the radial deformation of the quartz furnace tube 102 at multiple times, and the deformation curve characterizes the change of the radial deformation of the quartz furnace tube 102 over time; and evaluate the quality of the quartz furnace tube according to the deformation curves corresponding to different quartz furnace tubes 102, and in this way, the acceptance and evaluation of the quartz furnace tube 102 can be achieved.

[0085] Each module in the above-mentioned quartz furnace tube monitoring device can be implemented in whole or in part by software, hardware and a combination thereof. Each of the above-mentioned modules can be embedded in or independent of a processor in a computer device in the form of hardware, or can be stored in a memory in a computer device in the form of software, so that the processor can call and execute operations corresponding to each of the above modules.

[0086] like Figure 2 , Figure 3 As shown, in some embodiments, the present application also provides a furnace tube device, including:

[0087] The quartz furnace tube 102 is used to execute a preset process in preparing a solar cell. The monitoring device of the quartz furnace tube 102 mentioned above and the parts that are the same as or corresponding to the embodiments of the monitoring device of the quartz furnace tube mentioned above will not be described in detail below.

[0088] In the above furnace tube equipment, the detection module 110 measures and generates deformation signals according to the radial deformation of the quartz furnace tube 102 at multiple moments, and the control module 112 monitors the aging state of the quartz furnace tube 102 according to the deformation signals corresponding to each moment. The aging state of the quartz furnace tube 102 can determine whether it is necessary to perform maintenance on the quartz furnace tube 102 in the furnace tube equipment, thereby improving the planning and rationality of the maintenance work of the furnace tube equipment, improving the utilization rate of the furnace tube equipment, and avoiding the impact of blindly replacing the quartz furnace tube 102 in the furnace tube equipment on the manufacturing cost of solar cells.

[0089] like Figure 3 As shown, in one embodiment, the furnace tube equipment also includes: a protective furnace tube 106, which is sleeved on the outer side of the quartz furnace tube 102, and is provided with a perspective window 108 that penetrates the protective furnace tube 106; the detection module 110 is located on the side of the protective furnace tube 106 away from the quartz furnace tube 102; wherein the perspective window 108 corresponds to the detection module 110.

[0090] In an exemplary embodiment, a computer device is provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above-mentioned quartz furnace tube monitoring method embodiment when executing the computer program.

[0091] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned quartz furnace tube monitoring method embodiment are implemented.

[0092] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above-mentioned quartz furnace tube monitoring method embodiment when executed by a processor.

[0093] A person of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment method can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, an artificial intelligence (AI) processor, etc., but are not limited to this.

[0094] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0095] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A method for monitoring a quartz furnace tube, wherein the quartz furnace tube is used to perform a preset process in the preparation of a solar cell, characterized in that: The monitoring method comprises: Measuring the radial deformation of the quartz furnace tube at multiple times and generating a deformation signal; The aging state of the quartz furnace tube is monitored according to the deformation signal corresponding to each moment.

2. The monitoring method according to claim 1, characterized in that: The measuring of the radial deformation of the quartz furnace tube at multiple moments comprises: Selecting a plurality of measuring positions on the outer side of the quartz furnace tube; Measuring and obtaining intermediate radial deformation amounts of each of the measuring positions at multiple moments; Obtaining the radial deformation amount of the quartz furnace tube at a preset time according to the intermediate radial deformation amount corresponding to each measuring position at a preset time; Wherein, the plurality of measuring positions are arranged at intervals along the circumference of the quartz furnace tube, and / or the plurality of measuring positions are arranged at intervals along the axial direction of the quartz furnace tube.

3. The monitoring method according to claim 1, characterized in that: The quartz furnace tube comprises a furnace mouth area, a furnace middle area and a furnace tail area which are arranged in sequence from the opening of the quartz furnace tube toward the bottom of the quartz furnace tube along the axial direction; at least the radial deformation amount of the furnace middle area at multiple times is measured.

4. The monitoring method according to claim 1, characterized in that: The step of monitoring the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment includes: When the deformation signal corresponding to the preset time is equal to the deformation threshold, it is determined that the quartz furnace tube is in the first aging state at the preset time, and the quartz furnace tube needs maintenance; When the deformation signal corresponding to the preset time is less than the deformation threshold, it is determined that the quartz furnace tube is in the second aging state at the preset time, and the quartz furnace tube supports the execution of the preset process.

5. The monitoring method according to claim 1, characterized in that: The preset process includes a plurality of process menus, and the monitoring method further includes: Measuring and obtaining the radial process deformation of the quartz furnace tube when executing different process menus; According to the radial process deformation amount corresponding to each process menu, the order in which the quartz furnace tube executes the process menu is adjusted.

6. The monitoring method according to claim 1, characterized in that: The outer side of the quartz furnace tube is sleeved with a protective furnace tube, and the protective furnace tube is provided with a perspective window penetrating the protective furnace tube, and the radial deformation amount of the quartz furnace tube is measured through the perspective window.

7. A monitoring device for a quartz furnace tube, wherein the quartz furnace tube is used to perform a preset process in the preparation of a solar cell, characterized in that: The monitoring device comprises: A detection module is located outside the quartz furnace tube and is spaced apart from the quartz furnace tube; the detection module is used to measure the radial deformation of the quartz furnace tube at multiple moments and generate a deformation signal; The control module is connected to the detection module and is used to monitor the aging state of the quartz furnace tube according to the deformation signal corresponding to each moment.

8. The monitoring device according to claim 7, characterized in that: The control module is used to determine that the quartz furnace tube is in the first aging state at the preset time when the deformation signal corresponding to the preset time is equal to the deformation threshold, and the monitoring device also includes: The alarm module is connected to the control module and is used to send out an alarm signal when the quartz furnace tube is in a first aging state, wherein the alarm signal is used to indicate that the quartz furnace tube needs maintenance.

9. A furnace tube device, characterized in that: include: Quartz furnace tubes, used to perform the preset processes in solar cell preparation; A monitoring device for a quartz furnace tube as claimed in claim 7 or 8.

10. The furnace tube equipment according to claim 9, characterized in that: Also includes: A protection furnace tube is sleeved on the outer side of the quartz furnace tube, and a perspective window penetrating the protection furnace tube is provided on the protection furnace tube; The detection module is located on a side of the protection furnace tube away from the quartz furnace tube; Wherein, the perspective window corresponds to the detection module.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method for monitoring the quartz furnace tube according to any one of claims 1 to 6 is implemented.

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