Rotation failure detection device and entry / exit failure detection device

Abstract

The invention relates to a rotation fault detection device and an in-out fault detection device. The rotation fault detection device comprises: a rotating shaft having a first end and a second end, a clamping part being formed at the first end of the rotating shaft, the clamping part being configured to be capable of being clamped with a member to be detected; a torsion detection part fixedly coupled to the second end of the rotating shaft via the sleeve, for detecting a torsion applied to the rotating shaft; and a bracket horizontally and rotatably holding the rotating shaft.

Description

Technical Field

[0001] The present invention generally relates to the field of semiconductor manufacturing, and more particularly, to a device for detecting FOUP door latch failures in a semiconductor production line, including a rotation failure detection device and an in-out failure detection device. Background Art

[0002] Semiconductor manufacturing has very strict requirements for the process environment, because wafers are very sensitive to contamination, and contaminants often cause defects in wafers, thereby reducing the product qualification rate. For example, dust particles, metal dust, etc. will have a great impact on chips. A dust particle with a diameter of several microns adsorbed on the chip may cause the chip to short-circuit or even damage it. Therefore, semiconductor manufacturing equipment must be placed in a clean room (also known as a dust-free room, etc.).

[0003] During semiconductor manufacturing, it is often necessary to transfer wafers between various processing devices and testing devices. In order to reduce contamination of the wafers, the wafers are usually placed in containers. A front-opening unified pod (FOUP) (also known as a front-opening wafer box, etc.) is a container used to protect, transport and store wafers on a semiconductor production line, which can usually accommodate multiple (for example, 25) wafers (for example, 300 mm (12-inch) wafers). Today, in advanced manufacturing production lines, FOUP is an important carrier container for the automated conveying system in a wafer fab (especially a 12-inch wafer fab). It is used to ensure that the wafers are not contaminated by dust in the external environment during the transfer between each production machine, thereby affecting the yield.

[0004] Figure 1 FIG. 1 is a schematic diagram of a common FOUP 100. Figure 1 As shown, FOUP 100 includes a front-opening container 101 capable of accommodating multiple wafers and a door 103 for opening and closing the front-opening container. A latch key 105 for releasing and locking the door is provided on the door, and its size is very small, about 15 mm×5 mm. When in use, by pressing and rotating the latch, the door can be tightly sealed to the front-opening container.

[0005] However, it is found in practice that sometimes the FOUP door falls off after the FOUP is taken out from the machine loading port. After research, the inventor believes that this is caused by abnormal changes in the rotation and in-and-out position of the door latch due to aging of parts or improper installation. Specifically, when the door latch rotates and the in-and-out position changes due to aging of parts, the machine locks the door latch as usual, but in fact the door latch is not locked. In this case, if the door falls off during the FOUP transfer process, the wafers in the FOUP will fall out and hit the staff or equipment in the wafer factory, causing safety problems.

[0006] Therefore, a convenient and reliable means for detecting FOUP door latch failure is desired. Summary of the invention

[0007] In view of the above problems, the present invention provides a device for detecting FOUP door latch failure.

[0008] According to one aspect of the present invention, a rotation fault detection device is provided, comprising: a rotating shaft having a first end and a second end, a snap-fitting portion being formed at the first end of the rotating shaft, the snap-fitting portion being configured to be snap-fitted with a member to be detected; a torque detection portion fixedly coupled to the second end of the rotating shaft via a sleeve, for detecting the torque applied to the rotating shaft; and a bracket for horizontally and rotatably holding the rotating shaft.

[0009] In some embodiments, an engaging portion is formed at the second end of the rotating shaft, a first groove matching the engaging portion is formed at the first end of the sleeve, and the engaging portion is fixedly engaged with the first groove of the sleeve.

[0010] In some embodiments, a boss is formed at the first end of the torque detection portion, a second groove is formed at the second end of the sleeve opposite to the first end, and the boss is fixedly engaged in the second groove of the sleeve.

[0011] In some embodiments, a stopper is provided on the rotating shaft in a manner opposite to the step portion.

[0012] In some embodiments, the rotation detection device further comprises a scale plate, which is fixed to the bracket and abuts against the engaging portion at the second end of the rotating shaft, and an indicating portion is provided at the engaging portion at the second end of the rotating shaft.

[0013] In some embodiments, the torque detection portion is configured to display the magnitude of the applied torque.

[0014] In some embodiments, the rotation fault detection device further includes a cylindrical rotation shaft holding portion, the rotation shaft holding portion is fixed to the bracket, and the rotation shaft passes through the rotation shaft holding portion, thereby being rotatably held in the bracket.

[0015] In some embodiments, the rotating shaft holding portion includes a main body portion, a flange is formed on one side of the main body portion, an orifice is formed on the bracket, the main body portion of the rotating shaft holding portion is inserted into the orifice and fixed to the bracket via the flange.

[0016] In some embodiments, the bracket includes a back plate, a bottom plate and side plates, the back plate is vertically fixed to the bottom plate, and the side plates connect the back plate and the bottom plate.

[0017] According to another aspect of the present invention, there is provided an entry and exit fault detection device, comprising: a frame portion, having a front plate and a rear plate arranged opposite to each other along the length direction; a bushing located between the front plate and the rear plate; a screw rod rotatably mounted on the frame portion in a manner that a first end is embedded in the front plate and a second end passes through the rear plate and extends to the outside of the rear plate, the screw rod passes through the bushing and is threadedly connected to the bushing; a guide rod, in a manner that passes through the bushing, with both ends respectively fixed to the front plate and the rear plate; and a thrust detection portion fixed to the bushing for detecting the thrust applied to the part to be detected.

[0018] In some embodiments, the entry and exit fault detection device further includes a displacement detection unit, which is fixed to the bushing and is used to detect the displacement of the bushing.

[0019] In some embodiments, the displacement detection portion and the thrust detection portion are located on the same side of the bushing.

[0020] In some embodiments, the displacement detection portion is configured to display a magnitude of the displacement of the bushing.

[0021] In some embodiments, the thrust detection portion is configured to display the magnitude of the applied thrust.

[0022] In some embodiments, a rotating portion is disposed at the second end of the screw rod and is used to rotate the screw rod.

[0023] In some embodiments, a stopper is provided on the inner side of the screw rod and the rear plate, and the stopper abuts against the inner side of the rear plate.

[0024] In some embodiments, two guide rods are provided, one on each side of the lead screw.

[0025] In some embodiments, the frame portion further includes one or more of a top plate, a bottom plate, and a side plate, and the one or more of the top plate, the bottom plate, and the side plate connect the front plate and the rear plate.

[0026] In some embodiments, a handle is provided on the frame portion.

[0027] According to the rotation fault detection device of the embodiment of the present invention, by applying reference torque to the door latch in clockwise and counterclockwise directions, measuring the rotation range of the rotating shaft, and comparing it with a predetermined threshold value, it is determined whether the door latch has a rotation loose problem. The device is simple and convenient to operate, can eliminate deviations caused by human factors, and is helpful for maintaining equipment on large-scale production lines.

[0028] According to the in-out fault detection device of the embodiment of the present invention, by applying a reference thrust to the door latch, measuring the displacement value of the bushing (the feed value of the screw rod), and comparing it with a predetermined threshold value, it is determined whether the door latch has an in-out loose problem. The device is simple and convenient to operate, can eliminate deviations caused by human factors, and is helpful for maintaining equipment on large-scale production lines. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The following is a detailed description of the embodiments of the present invention in conjunction with the accompanying drawings. The accompanying drawings are only exemplary and do not limit the embodiments. In the accompanying drawings, the same reference numerals refer to the same elements, wherein:

[0030] Figure 1 A schematic diagram of a common FOUP is shown.

[0031] Figure 2 A perspective view of an apparatus for detecting a rotation failure of a FOUP door latch according to an embodiment of the present invention is shown.

[0032] Figure 3 An exploded view of an apparatus for detecting a rotational failure of a FOUP door latch according to an embodiment of the present invention is shown.

[0033] Figure 4 A side view of an apparatus for detecting a rotational failure of a FOUP door latch according to an embodiment of the present invention is shown in use (eg, placed in front of a FOUP).

[0034] Figure 5 A perspective view of an apparatus for detecting an in-and-out failure of a FOUP door latch according to an embodiment of the present invention is shown.

[0035] Figure 6 An exploded view of an apparatus for detecting an ingress and egress failure of a FOUP door latch according to an embodiment of the present invention is shown.

[0036] Figure 7 A side view of a device for detecting an ingress and egress failure of a FOUP door latch according to an embodiment of the present invention is shown when in use (eg, placed in front of a FOUP).

[0037] It should be understood that, for the sake of simplicity and / or clarity of illustration, the elements shown in the drawings are not necessarily drawn to scale. For example, for the sake of clarity, the sizes of some elements may be exaggerated relative to other elements. In addition, in order to make the concept of the present invention easier to understand, elements known in the art are omitted in the drawings. The sizes of the drawings do not represent the exact sizes and / or size ratios of the various elements described herein. DETAILED DESCRIPTION

[0038] In the following description, several specific details are set forth. However, the embodiments described herein can be implemented without certain specific details. In specific embodiments, in order to avoid unclear understanding of the specification, well-known structures and technologies are not shown in detail.

[0039] In addition, the phrases "in one embodiment," "in an embodiment," and / or "in some embodiments" may be used repeatedly herein. The phrases generally do not refer to the same embodiment; however, they may. Unless the context indicates otherwise, the terms "including," "having," and "comprising" are synonymous. The phrases "A or B" and "A / B" mean "(A), (B), or (A and B)."

[0040] It should be understood that ordinal adjectives such as "first", "second", "third", etc. may be used in this document to refer to elements. Unless otherwise specified, these are only used to distinguish different elements and do not imply that the mentioned elements must be in a given order in time, space, or other aspects.

[0041] In addition, it should be understood that the words "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", etc. may be used in this document to describe the position of components. This is only for the convenience of explaining the relative position relationship between components, and the use of these words does not limit the components.

[0042] In addition, it should also be understood that the word "about" or "approximately" may be used herein to modify a numerical value, which means within the normal tolerance range in this field. For example, "about" or "approximately" can be understood as within 1% of the modified numerical value.

[0043] As mentioned above, due to the aging of parts, the door latch may become loose in rotation and in and out. At this time, if the machine locks the door latch as usual, the door latch may not be in the locked state. In this way, the FOUP door may fall during the transfer process, causing safety problems.

[0044] The present invention provides a device for detecting rotation failure of a FOUP door latch, which can conveniently detect whether the rotation of the FOUP door latch is loose, so that staff can find the problem in time and then correct the FOUP door latch.

[0045] The present invention also provides a device for detecting the in-and-out failure of a FOUP door latch, which can conveniently detect whether the in-and-out failure of the FOUP door latch is loose, so that the staff can find the problem in time and then correct the FOUP door latch.

[0046] Below, first, combined with Figure 2 to Figure 4 A device for detecting a rotation failure of a FOUP door latch according to an embodiment of the present invention is described.

[0047] Figure 2 A perspective view of an apparatus for detecting a rotation failure of a FOUP door latch according to an embodiment of the present invention is shown. Figure 3 An exploded view of an apparatus for detecting a rotational failure of a FOUP door latch according to an embodiment of the present invention is shown. Figure 4 A side view of an apparatus for detecting a rotational failure of a FOUP door latch according to an embodiment of the present invention is shown in use (eg, placed in front of a FOUP).

[0048] As shown in the figure, a device for detecting a rotation failure of a FOUP door latch according to an embodiment of the present invention (hereinafter referred to as a "rotation failure detection device") 200 includes a rotating shaft 201 (hereinafter, sometimes referred to as a "linear bearing") and a torque detection portion 203. The torque detection portion 203 is fixedly coupled to the rotating shaft 201 via a sleeve 205, whereby the rotating shaft 201 can rotate together with the torque detection portion 203.

[0049] The rotating shaft 201 has a first end and a second end. An engaging portion 207 is formed at the first end of the rotating shaft 201, and the engaging portion 207 is configured to engage with the part to be detected (in the context of this article, a door latch). In some embodiments, the engaging portion 207 can be a recess formed at the first end of the rotating shaft 201. An engaging portion 209 is formed at the second end of the rotating shaft 201. A first groove (not shown) matching the shape and size of the engaging portion 209 is provided at the first end of the sleeve 205, so that the engaging portion 209 at the second end of the rotating shaft 201 can be fixedly engaged with the first groove of the sleeve 205, thereby, the rotating shaft 201 can rotate together with the sleeve 205. In some embodiments, the engaging portion 209 at the second end of the rotating shaft 201 can be formed in a prism shape (that is, the cross section perpendicular to the axial direction is a polygon), such as Figure 3 It should be understood that although the above specifically describes the combination of the rotating shaft and the sleeve, the embodiments of the present invention are not limited thereto, and in other embodiments, other combination methods may be used as long as the rotating shaft can rotate together with the sleeve.

[0050] The torque detection part 203 is used to detect the magnitude of the torque applied to the rotating shaft 201. A boss 301 is provided at the first end of the torque detection part 203. A second groove 303 matching the shape and size of the boss 301 is provided at the second end of the sleeve 205 opposite to the first end, so that the boss 301 at the first end of the torque detection part 203 can be fixedly engaged in the second groove 303 of the sleeve 205, thereby, the sleeve 205 can rotate together with the torque detection part 203. It should be understood that although the combination of the sleeve and the torque detection part is specifically described above, the embodiments of the present invention are not limited thereto. In other embodiments, other combination methods can be adopted as long as the sleeve can rotate together with the torque detection part.

[0051] In some embodiments, torque may be applied to the rotating shaft 201 by manually rotating the torque detection portion 203 .

[0052] In some embodiments, the torque detection unit 203 may be configured to display the magnitude of the applied torque, thereby enabling an operator to accurately control the magnitude of the torque applied to the rotating shaft 201 .

[0053] In some embodiments, the torque detection unit 203 may be a digital torque meter.

[0054] In some embodiments, when a large torque needs to be applied, a ratchet wrench 211 can be used, for example, to apply torque to the rotating shaft 201. In this case, for example, a second groove can be provided at the second end of the torque detection portion opposite to the first end, and the second groove matches the ratchet head of the ratchet wrench, so that the ratchet head of the ratchet wrench can be fixedly engaged in the second groove of the second end of the torque detection portion, thereby being able to use the ratchet wrench to apply torque to the torque detection portion.

[0055] The rotation fault detection device 200 further includes a bracket 213. The bracket 213 is used to horizontally and rotatably hold the rotation shaft 201 so that the rotation fault detection device 200 can be stably and conveniently operated when in use.

[0056] In some embodiments, the bracket 213 may include a bottom plate 305, a side plate 307, and a back plate 309. The back plate 309 is vertically fixed to the bottom plate 305, and the side plate 307 connects the back plate 309 and the bottom plate 305 so as to stably support the back plate 309 on the bottom plate 305. In some embodiments, the bottom plate 305, the side plate 307, and the back plate 309 of the bracket 213 may be formed integrally.

[0057] The rotation fault detection device 200 further includes a rotation shaft holding portion 311. In some embodiments, the rotation shaft holding portion 311 has a cylindrical body portion 311a, and a flange 311b is formed on one side of the body portion 311a. The inner diameter of the cylindrical body portion 311a is formed to be slightly larger than the diameter of the rotation shaft 201, so that the rotation shaft 201 can pass therethrough.

[0058] In addition, a hole 313 is provided in the back plate 309 of the bracket 213. The height of the hole 313 can be determined according to the height of the door latch, so that when the rotation failure detection device 200 is placed in front of the FOUP, the rotation shaft 201 can be engaged with the door latch. The body 311a of the rotation shaft holding part 311 can be inserted into the hole 313 and fixed to the back plate 309 via the flange 311b. In this way, the rotation shaft 201 can be held horizontally and rotatably on the bracket 213.

[0059] It should be understood that although the above description describes the structure of the bracket and the rotating shaft holding portion, this is only an example, and the embodiments of the present invention are not limited thereto. As long as the bracket and the rotating shaft holding portion can horizontally and rotatably hold the rotating shaft on the bracket so that the rotation fault detection device can be stably and conveniently operated during use, it is also considered to fall within the protection scope of the present invention.

[0060] The rotation fault detection device 200 further includes a scale portion 215. The scale portion 215 is fixed to the bracket 213, and in some embodiments, is fixed to the rotation axis holding portion 311. The scale portion 215 is symmetrically marked with scales with the vertical direction as the symmetry axis (see Figure 3 In some embodiments, the scale portion 215 is formed as a disc-shaped scale plate with an opening in the center. The rotating shaft 201 can be inserted into the rotating shaft holding portion 311 through the opening.

[0061] In some embodiments, the cross-sectional area of ​​the engaging portion 209 on a plane perpendicular to the axial direction of the rotating shaft can be designed to be larger than the cross-sectional area of ​​the middle portion of the rotating shaft, thereby forming a step portion 315. When the rotating shaft 201 is inserted into the rotating shaft holding portion 311, the step portion 315 can abut against the scale portion 215.

[0062] In addition, a stopper 317 is provided on the rotating shaft 201 in a manner opposite to the step portion 315. In some embodiments, the stopper 317 may be a snap ring. With the snap ring and the step portion, the rotating shaft 201 can be fixed to (clamped on) the rotating shaft holding portion 311, so that the rotating shaft 201 does not move in the axial direction.

[0063] In addition, the engaging portion 209 at the second end of the rotating shaft 201 is provided with an indicating portion 319. In some embodiments, the indicating portion 319 may be a pointer, such as Figure 2 and Figure 3 As shown in . Since when the rotating shaft 201 rotates, the indicating portion 319 also rotates accordingly, the operator can know the degree of rotation of the rotating shaft according to the scale on the scale portion 215 pointed by the indicating portion 319 .

[0064] Hereinafter, the use of the rotation fault detection device is briefly described.

[0065] When in use, the rotation fault detection device is placed in front of the FOUP so that the front end of the rotating shaft (the first end described above) is engaged with the door latch. Then, by rotating the torque detection part (for example, the digital torque meter described above) in the clockwise direction, a reference torque is applied to the rotating shaft, and the applied torque can be read by the digital torque meter. A first reading is read from the scale part, and the first reading indicates the degree of rotation of the rotating shaft in the clockwise direction. Next, the torque detection part is rotated in the counterclockwise direction to apply a reference torque to the rotating shaft. A second reading is read from the scale part, and the second reading indicates the degree of rotation of the rotating shaft in the counterclockwise direction. By taking the difference between the first reading and the second reading, the rotation range of the door latch can be calculated. The rotation range is compared with a threshold value. If the threshold value is exceeded, it can be considered that the door latch is loose in rotation. At this time, the operator can perform rotation correction on the door latch in time. The above threshold value can be a pre-set value, or a value measured by applying a reference torque when the door latch is not loose in rotation.

[0066] According to the rotation fault detection device of the embodiment of the present invention, by applying reference torque to the door latch in clockwise and counterclockwise directions, measuring the rotation range of the rotating shaft, and comparing it with a predetermined threshold value, it is determined whether the door latch has a rotation loose problem. The device is simple and convenient to operate, can eliminate deviations caused by human factors, and is helpful for maintaining equipment on large-scale production lines.

[0067] Next, combine Figure 5 to Figure 7 A device for detecting an entry / exit failure of a FOUP door latch according to an embodiment of the present invention will be described.

[0068] Figure 5 A perspective view of an apparatus for detecting an in-and-out failure of a FOUP door latch according to an embodiment of the present invention is shown. Figure 6 An exploded view of an apparatus for detecting an ingress and egress failure of a FOUP door latch according to an embodiment of the present invention is shown. Figure 7 A side view of a device for detecting an ingress and egress failure of a FOUP door latch according to an embodiment of the present invention is shown when in use (eg, placed in front of a FOUP).

[0069] As shown in the figure, a device for detecting an in-and-out fault of a FOUP door latch according to an embodiment of the present invention (hereinafter referred to as "in-and-out fault detection device") 500 includes a frame portion 501. The frame portion 501 is used to support other main components of the in-and-out fault detection device described below. The frame portion 501 includes a front plate 501a and a rear plate 501b arranged opposite to each other in the length direction. In some embodiments, the frame portion 501 may also include one or more of a top plate, a bottom plate, and a side plate. One or more of the top plate, the bottom plate, and the side plate are configured to connect the front plate 501a and the rear plate 501b.

[0070] The in-and-out fault detection device 500 also includes a screw rod 503. The screw rod 503 is rotatably mounted on the frame portion 501 in a manner that the first end (i.e., the front end) is embedded in the front plate 501a, and the second end (i.e., the rear end) passes through the rear plate 501b. The second end of the screw rod 503 extends to the outside of the rear plate 501b. A stopper 601 is provided at the inner side of the screw rod 503 located at the rear plate 501b, and the stopper 601 abuts against the inner side of the rear plate 501b, whereby the screw rod 503 is positioned between the front plate 501a and the rear plate 501b. In other words, the screw rod 503 can rotate around the axis, but will not move along the axis direction. A rotating portion 505 is provided at the second end of the screw rod 503. By rotating the rotating portion 505, the screw rod 503 can be rotated.

[0071] The in-and-out fault detection device 500 further includes a bushing 507. The bushing 507 is located in the frame portion 501, between the front plate 501a and the rear plate 501b. The screw rod 503 passes through the bushing 507 and is coupled to the bushing 507 via a thread. That is, a thread is formed on the inner side of the hole through which the screw rod 503 of the bushing 507 passes. The thread cooperates with the thread of the screw rod 503, whereby, when the screw rod 503 is rotated, the bushing 507 moves along the axial direction of the screw rod 503 as the screw rod 503 rotates, but the screw rod 503 does not move along the axial direction because the screw rod 503 is positioned between the front plate 501a and the rear plate 501b, as described above.

[0072] In some embodiments, two bushings may be provided, such as Figure 6 As shown. However, the embodiments of the present invention are not limited thereto, and in some other embodiments, one or more than three bushings may be provided. However, from the viewpoint of simplifying the structure but being able to stably maintain the thrust detection portion and the displacement detection portion to be described below, it is preferred to provide two bushings, as described above.

[0073] The in-and-out fault detection device 500 further includes a guide rod 509. The guide rod 509 is fixed to the front plate 501a and the rear plate 501b of the frame portion 501 at both ends in a manner that the guide rod 509 passes through the bushing 507. Thus, the guide rod 509 can position the bushing 507 so that it cannot rotate, and guide the movement of the bushing 507 when the screw rod 503 rotates. In some embodiments, two guide rods can be provided, one on each side of the screw rod, such as Figure 6 However, the embodiments of the present invention are not limited thereto, and in some other embodiments, one guide rod or three or more guide rods may be provided. However, from the perspective of simplifying the structure but being able to stably guide the screw rod, it is preferred to provide two guide rods, arranged as described above.

[0074] The access fault detection device 500 further includes a thrust detection unit 511. The thrust detection unit 511 is configured to detect a thrust applied to a member to be detected (a door latch in the context of this article). In some embodiments, a push rod 513 is provided at one end of the thrust detection unit 511, and when the push rod 513 abuts against the member to be detected, a thrust is applied to the member to be detected. At this time, the thrust detection unit 511 can detect the magnitude of the thrust applied.

[0075] In some embodiments, the thrust detection unit 511 is configured to display the magnitude of the detected thrust.

[0076] In some embodiments, the thrust detection unit 511 may be a digital thrust meter.

[0077] The thrust detection part 511 is fixed to the bushing 507 and is located at one side of the frame part 501. Therefore, when the bushing 507 moves due to the rotation of the screw rod 503, the thrust detection part 511 also moves accordingly.

[0078] The in-and-out fault detection device 500 further includes a displacement detection unit 603. The displacement detection unit 603 is configured to detect the displacement of the bushing 507 (that is, the feed amount of the screw rod 503). The displacement detection unit 603 is fixed to the bushing 507. Therefore, when the bushing 507 moves due to the rotation of the screw rod 503, the displacement detection unit 603 also moves therewith, thereby being able to detect the displacement of the bushing 507.

[0079] In some embodiments, the displacement detection unit 603 can be fixed to the same side of the bushing 507 as the thrust detection unit 511, thereby making the overall structure of the entry and exit fault detection device 500 more compact. In addition, it is convenient for the operator to observe the thrust detection unit 511 and the displacement detection unit 603 at the same time.

[0080] In some embodiments, the displacement detection unit 603 is configured to display the displacement value.

[0081] In some embodiments, the displacement detection unit 603 may be a digital scale.

[0082] In some embodiments, a handle 515 is provided on the other side of the frame portion 501 opposite to the side where the thrust detection portion 511 is located. An operator can hold the handle to enter and exit the fault detection device for operation.

[0083] Additionally or alternatively, in some other embodiments, a bracket may be configured for the entry and exit fault detection device to support it on a workbench to facilitate operation by an operator.

[0084] Hereinafter, the use of the entry and exit fault detection device is briefly described.

[0085] When in use, the in-and-out fault detection device is placed in front of the FOUP so that the push rod of the thrust detection unit (for example, the digital thrust gauge described above) is aligned with the door latch. Then, the rotating part is rotated to rotate the screw rod, thereby driving the thrust detection unit forward via the bushing. When the push rod of the thrust detection unit contacts the door latch and the thrust detection unit begins to detect the thrust, the first position value is read from the displacement detection unit (for example, the digital scale described above). Then, the rotating part is continued to be rotated to apply thrust to the door latch. When the thrust reaches the reference thrust, the second position value is read from the displacement detection unit. By taking the difference between the first position value and the second position value, the displacement value (that is, the displacement value of the bushing) can be calculated. The displacement value is compared with the threshold value. If the displacement value exceeds the threshold value, it can be considered that the door latch is loose in and out. At this time, the operator can make in-and-out corrections to the door latch in time. The above threshold value can be a pre-set value, or a value measured by applying a reference thrust when the door latch is not loose in and out.

[0086] According to the in-out fault detection device of the embodiment of the present invention, by applying a reference thrust to the door latch, measuring the displacement value of the bushing (the feed value of the screw rod), and comparing it with a predetermined threshold value, it is determined whether the door latch has an in-out loose problem. The device is simple and convenient to operate, can eliminate deviations caused by human factors, and is helpful for maintaining equipment on large-scale production lines.

[0087] It should be understood that although the present invention is described with respect to specific embodiments, those skilled in the art may modify one or more features thereof after reading the specification without exceeding the spirit and scope of the present invention. Therefore, this specification is not intended to limit the present invention. On the contrary, the scope of the present invention is limited only by the attached claims and their equivalents.

Claims

1. A rotation fault detection device, characterized in that: include: A rotating shaft having a first end and a second end, wherein a clamping portion is formed at the first end of the rotating shaft, and the clamping portion is configured to be capable of clamping with the to-be-detected component; a torque detection portion, fixedly coupled to the second end of the rotating shaft via a sleeve, for detecting a torque applied to the rotating shaft; and The support holds the rotation axis horizontally and rotatably.

2. The rotation fault detection device according to claim 1, characterized in that: A fitting portion is formed at the second end of the rotating shaft, A first groove matching the engaging portion is formed at the first end of the sleeve. The fitting portion is fixedly fitted into the first groove of the sleeve.

3. The rotation fault detection device according to claim 2, characterized in that: A boss is formed at the first end of the torque detection portion. A second groove is formed at a second end of the sleeve opposite to the first end. The boss is fixedly engaged with the second groove of the sleeve.

4. The rotation fault detection device according to claim 2, characterized in that: A stopper portion is provided on the rotating shaft so as to face the step portion.

5. The rotation fault detection device according to claim 2, characterized in that: The rotation detection device further includes a scale plate, which is fixed to the bracket and abuts against the engaging portion at the second end of the rotating shaft. An indicator portion is provided at the fitting portion at the second end of the rotating shaft.

6. The rotation fault detection device according to claim 1, characterized in that: The torque detection portion is configured to display the magnitude of the applied torque.

7. The rotation fault detection device according to claim 1, characterized in that: The rotation failure detection device further includes a cylindrical rotation shaft holding portion, wherein the rotation shaft holding portion is fixed to the bracket. The rotation shaft passes through the rotation shaft holding portion, and is thereby rotatably held by the bracket.

8. The rotation fault detection device according to claim 1, characterized in that: The rotating shaft holding portion includes a main body portion, and a flange is formed on one side of the main body portion. The bracket has a hole formed therein, and the main body of the rotating shaft holding portion is inserted into the hole and fixed to the bracket via the flange.

9. The rotation fault detection device according to claim 1, characterized in that: The bracket includes a back plate, a bottom plate and side plates, the back plate is vertically fixed to the bottom plate, and the side plates connect the back plate and the bottom plate.

10. An in-and-out fault detection device, characterized in that: include: A frame portion having a front plate and a rear plate arranged opposite to each other in a length direction; a bushing, located between the front plate and the rear plate; A screw rod is rotatably mounted on the frame portion in a manner that a first end thereof is embedded in the front plate and a second end thereof passes through the rear plate and extends to the outside of the rear plate, the screw rod passes through the bushing and is threadedly coupled to the bushing; A guide rod, which passes through the bushing and has two ends fixed to the front plate and the rear plate respectively; and The thrust detection part is fixed to the bushing and is used for detecting the thrust applied to the part to be detected.

11. The entry and exit fault detection device according to claim 10, characterized in that: The entry and exit fault detection device further includes a displacement detection unit, which is fixed to the bushing and is used to detect the displacement of the bushing.

12. The entry and exit fault detection device according to claim 11, characterized in that: The displacement detection portion and the thrust detection portion are located on the same side of the bushing.

13. The entry and exit fault detection device according to claim 11, characterized in that: The displacement detecting portion is configured to display a magnitude of displacement of the bushing.

14. The entry and exit fault detection device according to claim 10, characterized in that: The thrust detection portion is configured to display the magnitude of the applied thrust.

15. The entry and exit fault detection device according to claim 10, characterized in that: The rotating part is arranged at the second end of the screw rod and is used to rotate the screw rod.

16. The entry and exit fault detection device according to claim 10, characterized in that: A stopper is provided on the inner side of the screw rod and the rear plate, and the stopper abuts against the inner side of the rear plate.

17. The entry and exit fault detection device according to claim 10, characterized in that: Two guide rods are provided, which are respectively located on both sides of the screw rod.

18. The entry and exit fault detection device according to claim 10, characterized in that: The frame portion further includes one or more of a top plate, a bottom plate, and a side plate, and the one or more of the top plate, the bottom plate, and the side plate connect the front plate and the rear plate.

19. The entry and exit fault detection device according to claim 10, characterized in that: The frame portion is provided with a handle.

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