Film box carrying manipulator mechanism, film coating equipment and film box carrying control method

Abstract

The invention provides a film magazine carrying manipulator mechanism, film coating equipment and a film magazine carrying control method. The manipulator mechanism comprises a plurality of synchronous belt modules, a gripper assembly and a lifting mechanism; wherein the lifting mechanism is used for driving the gripper assembly to move in the vertical direction, the synchronous belt modules are used for driving the gripper assembly to move in the transverse direction, and a gripper of the gripper assembly can support a wafer box located on a reacting furnace or a conveying mechanism when moving along with the lifting mechanism and the synchronous belt modules. And the wafer box is carried to the reaction furnace from the designated position of the conveying mechanism, or the wafer box is carried to the designated position of the conveying mechanism from the reaction furnace. The functions of a push boat and a manipulator of traditional film coating equipment are combined, and the number of moving parts in the film box carrying process is reduced; and a double-module synchronous belt translation transmission mechanism is adopted, and the feasibility of realizing long-distance carrying in a limited space is greatly improved through the laminated double-module synchronous belt translation transmission mechanism.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell film coating, and in particular to a multi-axis manipulator mechanism for transporting a film box loaded with solar cells in a solar cell film coating device and a system control method thereof. Background Art

[0002] With the continuous development of the photovoltaic industry, the technology of solar cells has been updated and iterated, and various types of coating equipment have accounted for an increasingly large proportion in the production process of solar cells. In the field of cell edge coating passivation, it is still in the early stages of market application, and the corresponding edge passivation coating equipment categories are also relatively small, and most of the market peers are in the research and development stage. There is no handling mechanism for the film box in the existing cell passivation process, and the efficiency of film box handling is low. In order to solve the problem of efficient and accurate transportation of the film box in and out of the reactor during the cell passivation process, it is necessary to invent a film box handling robot mechanism and its control method specifically for coating equipment to adapt to the corresponding coating equipment's own structure and functional application requirements. Summary of the invention

[0003] In order to solve the technical problem of low efficiency in film box transportation in the above-mentioned prior art, the present invention proposes a film box transportation robot mechanism, a coating device and a film box transportation control method.

[0004] The technical solution adopted by the present invention is:

[0005] The present invention proposes a film box handling robot mechanism, comprising: a plurality of synchronous belt modules, a gripper assembly and a lifting mechanism; wherein:

[0006] The lifting mechanism is used to drive the gripper assembly to move in the vertical direction, and the multiple synchronous belt modules are used to drive the gripper assembly to move in the horizontal direction. When the gripper of the gripper assembly follows the movement of the lifting mechanism and the synchronous belt module assembly, it can lift the film box located on the reaction furnace or the conveying mechanism, and transport the film box from the specified position of the conveying mechanism to the reaction furnace, or transport the film box from the reaction furnace to the specified position of the conveying mechanism.

[0007] In the first embodiment, the multiple synchronous belt modules are stacked, specifically including: a first synchronous belt module connected to a lifting slider of a lifting mechanism, a second synchronous belt module stacked below the first synchronous belt module and connected to the first slider of the first synchronous belt module, and the second slider of the second synchronous belt module is connected to the gripper assembly.

[0008] Furthermore, one side surface of the synchronous belt module faces the lifting mechanism, and a motor for driving the synchronous belt module is vertically arranged on the side surface, and the motor is arranged at the end of the synchronous belt module close to the reaction furnace.

[0009] Furthermore, fastening strips are provided on both sides of the profiles of the first synchronous belt module and the second synchronous belt module, and a connecting plate connecting the fastening strips on both sides is provided on the top of the profile, and the side edges of the fastening strips are provided with ribs embedded in the side grooves of the profile, the lifting slider of the lifting mechanism is connected to the connecting plate of the first synchronous belt module, and the first slider of the first synchronous belt module is connected to the connecting plate of the second synchronous belt module.

[0010] Furthermore, the gripper assembly comprises:

[0011] A vertical mounting plate is arranged vertically, and is provided with a transverse waist hole and a positioning pin hole located below the waist hole;

[0012] A pair of L-shaped grippers are arranged at intervals, and the two vertical parts of the grippers are respectively connected to the back side of the vertical mounting plate at two sides;

[0013] A photoelectric sensor is arranged at the bottom of the vertical mounting plate and is used to detect whether there is a film box between the two grippers.

[0014] Furthermore, a plurality of support blocks with adjustable heights are arranged on the transverse portion of the gripper, and the support blocks are used to support the support rods protruding from the side surfaces of the film box.

[0015] In the second embodiment, a plurality of synchronous belt modules are arranged in parallel, specifically including: a first synchronous belt module and a second synchronous belt module arranged in parallel on both sides of the lifting mechanism, the sliders of the first synchronous belt module and the second synchronous belt module are connected to the lifting mechanism through a transverse bracket, which can drive the lifting mechanism to move laterally, and the gripper assembly is connected to the lifting slider of the lifting mechanism.

[0016] Furthermore, the gripper assembly comprises:

[0017] A gripper frame, the back side of which is connected to the lifting slider of the lifting mechanism;

[0018] A pair of grippers are rotatably connected to the two sides of the bottom of the gripper frame, and the grippers are divided into a supporting section and an adjusting section from the rotating connection. The supporting section is provided with a guide structure corresponding to the film box support rod, and the gripper frame is provided with a top block assembly for pressing down or lifting the adjusting section;

[0019] The photoelectric sensor is arranged on the gripper frame and is used to detect whether there is a film box between the two grippers.

[0020] Furthermore, the adjusting section is provided with an arc groove, and the gripping frame is provided with a pin shaft which is inserted into the arc groove to limit the rotation angle of the supporting section.

[0021] Furthermore, a slider buffer structure is provided at the top of the guide rail of the lifting mechanism, and the slider buffer structure includes: a buffer plate installed on the top of the guide rail, a buffer block located at the top travel position of the lifting slider of the lifting mechanism, and a buffer pad installed on the buffer block, and screws connecting the buffer block and the buffer plate.

[0022] Furthermore, a retaining edge for limiting the installation position of the guide rail is vertically arranged on the guide rail installation plate of the lifting mechanism.

[0023] The present invention further provides a coating device, comprising: a reaction furnace, a conveying mechanism arranged on one side of the reaction furnace for conveying a film box, and the above-mentioned film box conveying robot mechanism.

[0024] The present invention also provides a film box transport control method, using the above-mentioned coating equipment, comprising the steps of:

[0025] When the reaction furnace sends a request for a box to be ejected, and there is no box at the designated position of the conveying mechanism and on the box transporting robot mechanism, the box transporting robot mechanism transports the processed box from the reaction furnace to the designated position of the conveying mechanism;

[0026] When the conveying mechanism sends a cassette entry request signal to the reaction furnace, and there is no cassette on the cassette transporting robot mechanism, the cassette transporting robot mechanism transports the cassette to be processed from the designated position of the conveying mechanism to the reaction furnace.

[0027] The film box handling robot mechanism transports the processed film box from the reaction furnace to the designated position of the conveying mechanism, and is specifically controlled as follows: the lifting mechanism drives the gripper assembly to rise, the second synchronous belt module drives the gripper assembly to advance toward the reaction furnace until the stroke is in place, the first synchronous belt module drives the second synchronous belt module to continue to advance, until the photoelectric sensor sends a film box signal, the lifting mechanism drives the gripper assembly to rise and grab the film box; the first synchronous belt module drives the second synchronous belt module back into place, the second synchronous belt module drives the gripper assembly back to above the designated position of the conveying mechanism, and the lifting mechanism drives the gripper assembly to descend to place the processed film box at the designated position of the conveying mechanism.

[0028] The film box handling robot mechanism transports the film box to be processed from the designated position of the conveying mechanism to the reaction furnace. The specific control is as follows: the lifting mechanism drives the gripper assembly to descend, and the second synchronous belt module drives the gripper assembly to advance to the film box grabbing position. When the photoelectric sensor sends a film box signal, the lifting mechanism drives the gripper assembly to rise and grab the film box; the second synchronous belt module drives the gripper assembly to continue to advance until the stroke is in place, the first synchronous belt module drives the second synchronous belt module to advance to the position to supplement the stroke, and the lifting mechanism drives the gripper assembly to descend to place the film box to be processed in the reaction furnace.

[0029] Compared with the prior art, the present invention has the following advantages:

[0030] 1. Combine the functions of the push boat and the manipulator of the traditional coating equipment to reduce the number of moving parts during the film box handling process;

[0031] 2. The dual-module synchronous belt translation transmission mechanism is adopted. The laminated dual-module synchronous belt translation transmission mechanism greatly improves the feasibility of long-distance transportation in a limited space;

[0032] 3. Various adjustment structures designed for the manipulator solve the problem of centering the manipulator with the linear conveying mechanism and the reactor, as well as the problem of horizontal cassette handling. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 It is a schematic diagram of the overall structure of the first embodiment of the present invention;

[0035] Figure 2 It is a structural schematic diagram of a handling robot in the first embodiment of the present invention;

[0036] Figure 3 A top view of a handling robot in an embodiment of the present invention;

[0037] Figure 4 It is a structural schematic diagram of the lifting mechanism in an embodiment of the present invention;

[0038] Figure 5 for Figure 4 The enlarged view of point E;

[0039] Figure 6 It is a schematic diagram of the partial structure of the lifting mechanism in the embodiment of the present invention;

[0040] Figure 7 This is a schematic diagram of the connection structure of the synchronous belt module in the first embodiment of the present invention;

[0041] Figure 8 It is a schematic diagram of the partial connection structure of the synchronous belt module in the first embodiment of the present invention;

[0042] Fig. 9 It is a structural schematic diagram of a gripper assembly in the first embodiment of the present invention;

[0043] Fig.10 It is a partial structural schematic diagram of the gripper assembly in the first embodiment of the present invention;

[0044] Fig.11 It is a schematic diagram of the partial structure of the supporting part of the gripper assembly in the first embodiment of the present invention;

[0045] Fig.12 is a control flow chart of the first embodiment of the present invention;

[0046] Fig.13 It is a schematic diagram of the overall structure of the second embodiment of the present invention;

[0047] Fig.14 It is a structural schematic diagram of a handling robot in a second embodiment of the present invention;

[0048] Fig.15 It is a partial structural schematic diagram of a handling robot in the second embodiment of the present invention;

[0049] Fig.16 FIG. 4 is a control flow chart of the second embodiment of the present invention.

[0050] 1. Reactor;

[0051] 3. Handling manipulator;

[0052] 31. lifting mechanism; 311. buffer plate; 312. buffer block; 313. buffer pad; 314. guide rail mounting plate; 315. retaining edge;

[0053] 32. First synchronous belt module; 320. Profile; 322. Connecting plate; 323. Fastening strip; 33. Second synchronous belt module;

[0054] 34. Gripper assembly; 341. Gripper; 3411. Horizontal part of gripper; 3412. Support block; 3413. Support top screw; 3402. Adjustment screw; 3401. Top block; 342. Photoelectric sensor; 343. Vertical mounting plate; 3431. Waist hole; 3432. Positioning pin hole; 344. Rib plate; 345. Alignment block; 3451. Alignment screw; 3452. Alignment top screw;

[0055] 4. Conveying mechanism; 5. Film box. DETAILED DESCRIPTION

[0056] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0057] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0058] There is no suitable film box handling robot system in the industry, so a new robot handling mechanism and its system and control method are urgently needed to meet the application requirements. It is necessary to combine the push boat and robot functions of traditional coating equipment to reduce the number of moving parts in the film box handling process, thereby reducing the failure frequency of moving parts.

[0059] In this regard, Figure 1 , 2 , 13, and 14, the present invention proposes a film box handling robot mechanism, which is specifically used to carry the film box 5 between the conveying mechanism 4 and the reaction furnace 1, and includes: a plurality of mutually cooperating synchronous belt modules, a gripper assembly 34, and a lifting mechanism 31; wherein the lifting mechanism 31 is directly connected to the gripper assembly 34, or indirectly connected to the gripper assembly 34 through the synchronous belt module, driving the gripper assembly 34 to move in the vertical direction; some of the synchronous belt modules are directly connected to the gripper assembly 34, or indirectly connected to the gripper assembly 34 through the lifting mechanism 31, and the lifting mechanism 31 is ... The lowering mechanism 31 is indirectly connected to the gripper assembly 34, and is used to drive the gripper assembly 34 to move in a lateral direction toward and away from the reactor 1; the gripper assembly 34 is driven to rise and fall by the lifting assembly and to move laterally by the synchronous belt module, and its gripper 341 can follow the movement of the lifting mechanism 31 and the synchronous belt module assembly to lift the film box 5 located on the reactor 1 or the conveying mechanism 4, and transport the film box 5 from the designated position of the conveying mechanism 4 to the reactor 1, or transport the film box 5 from the reactor 1 to the designated position of the conveying mechanism 4.

[0060] The manipulator mechanism of the present invention drives the gripper assembly 34 to translate horizontally by adopting a synchronous belt module, and the film box is smoothly and accurately transported; at the same time, there is no impact vibration and the transmission noise is small. In addition, by directly transporting the film box, the number of moving parts in the film box transportation process is reduced, such as reducing the push boat parts, and this transmission method has the characteristics of low manufacturing, installation and maintenance costs, convenient debugging, and strong compatibility. The film box transported by the conveying mechanism can be directly transported.

[0061] like Figure 7 As shown, the structure of the synchronous belt module is consistent with that of the existing conventional synchronous belt module, and mainly includes: a profile 320 as a shell, a core shaft arranged in parallel at intervals, a toothed synchronous belt sleeved on the core shaft, a guide rail, and a slider connected to the synchronous belt, and the slider can slide back and forth on the guide rail driven by the synchronous belt.

[0062] like Figure 2 , 7As shown, in the first embodiment, the plurality of synchronous belt modules specifically include two, namely, the first synchronous belt module 32 and the second synchronous belt module 33, and the first synchronous belt module 32 and the second synchronous belt module 33 are stacked up and down. Among them, the first synchronous belt module 32 is connected to the lifting slider of the lifting mechanism 31, and the first synchronous belt module 32 can be driven to move up and down by the lifting mechanism 31, and the second synchronous belt module 33 is stacked below the first synchronous belt module 32, specifically, the first slider on the bottom surface of the first synchronous belt module 32 is connected to the profile 320 of the second synchronous belt module 33, and when the first slider of the first synchronous belt module 32 is in the initial position (the initial position is the end of the first synchronous belt module 32 away from the reactor 1), the second synchronous belt module 33 is located directly below the first synchronous belt module 32, and the two ends of the second synchronous belt module 33 are flush with the two ends of the first synchronous belt module 32. The second slider of the second synchronous belt module 33 is located on its bottom surface, and the initial position of the second slider is the end of the second synchronous belt module 33 away from the reactor 1, and the gripper assembly 34 is connected below the second slider. Therefore, during operation, the second synchronous belt module 33 can first drive the gripper assembly 34 to move forward a distance in the direction of the reactor 1 through its second slider, and then the first synchronous belt module 32 drives the second synchronous belt module 33 to move forward a distance in the direction of the reactor 1, so that the gripper assembly 34 moves forward a complementary distance in the direction of the reactor 1.

[0063] That is, by stacking synchronous belt modules, the lateral translation stroke of the gripper assembly 34 can be increased when the installation space is limited, that is, long-distance precise positioning and transportation can be achieved in a limited space.

[0064] In a further embodiment, one side surface of the first synchronous belt module 32 and the second synchronous belt module 33 stacked up and down faces the lifting mechanism 31, one end of the first synchronous belt module 32 and the second synchronous belt module 33 is close to the reactor 1, and a motor for driving the synchronous belt module is vertically arranged on the side surface, and the motor is arranged at the end of the synchronous belt module close to the reactor 1.

[0065] like Figure 3 As shown, since the motor 321 of the synchronous belt module and the lifting mechanism 31 are arranged on the same side of the synchronous belt, and the motor is located at the end of the synchronous belt module close to the reactor 1, the motor will not interfere with the lifting mechanism 31 when the synchronous belt module is running, and the space occupied by the equipment can also be reduced (that is, the lifting mechanism and the motor are on the same side, and the installation space in the width direction is limited to X).

[0066] like Figure 7 , 8As shown, in a further embodiment, both sides of the profile 320 of the first synchronous belt module 32 and the second synchronous belt module 33 have grooves extending in the length direction (the grooves are structures that all existing synchronous belt modules have), and each synchronous belt module is provided with a module connection structure to facilitate the connection of the synchronous belt module with other components, avoiding drilling holes on the profile 320 to lock screws to connect the synchronous belt modules;

[0067] The module connection structure specifically includes:

[0068] The fastening strips 323 connected to both sides of the profile 320, and the connecting plate 322 located above the profile 320 and connected to the upper edge of the fastening strips 323, the side of the fastening strips 323 is provided with a retaining edge 315 embedded in the side groove of the profile 320, that is, the connecting plate 322 can be provided with screw holes, so that it can be directly connected to other components by screws or other connection methods.

[0069] Specifically: the lifting slider of the lifting mechanism 31 is connected to the connecting plate 322 of the first synchronous belt module 32 (specifically, it can be screwed), and the first slider of the second synchronous belt module 33 is connected to the connecting plate 322 of the second synchronous belt module 33 (specifically, it can be screwed).

[0070] like Figure 2 , 9 As shown in Figure 10, in a further embodiment, the gripper assembly 34 includes: a gripper frame, a gripper 341 and a photoelectric sensor 42. The top surface of the gripper frame is connected to the second slider of the second synchronous belt module 33, so that the gripper frame can be driven by the second synchronous belt module 33 to move toward the direction of the reactor 1; the grippers 341 are arranged at intervals and are L-shaped, divided into a vertical part and a horizontal part, the vertical parts of the two grippers 341 are respectively connected to the two sides of the back of the gripper frame, and the horizontal parts extend toward the direction of the reactor 1; the photoelectric sensor 42 is installed at the bottom of the gripper frame, located between the vertical parts of the two grippers 341, and its detection direction is parallel to the horizontal part of the gripper 341, and is used to detect whether there is a film box 5 between the two grippers 341.

[0071] Specifically, the gripper frame includes: a vertical mounting plate 343, a horizontal mounting plate, and a rib plate 344; the vertical mounting plate 343 and the horizontal mounting plate are vertically connected in an L shape (in an abutting state, not directly connected by screws), wherein the horizontal mounting plate is installed on the bottom surface of the second slider of the second synchronous belt module 33, and two rib plates 344 (i.e., triangular plates for improving the connection strength) with an overall roughly triangular profile are connected between the vertical mounting plate 343 and the horizontal mounting plate, and the rib plate 344 is located on the upper side of the top and is connected to the bottom surface of the horizontal mounting plate by screws. The vertical side edges on the side are connected to the vertical mounting plate 343. At the same time, waist holes 3431 and positioning pin holes 3432 are alternately provided on both sides of the vertical mounting plate 343 from top to bottom for positioning and connecting with the two rib plates 344. The position of the vertical mounting plate 343 can be adjusted through the waist holes 3431, so that the vertical mounting plate 343 can be fine-tuned in the direction of its left and right sides. The vertical parts of the gripper 341 are respectively connected to the left and right sides of the back side of the vertical mounting plate 343, so that the gripper 341 can be centered and adjusted to align with the chamber of the reactor 1.

[0072] Furthermore, a calibration block 345 is provided on the outer side of each rib plate 344. The calibration block 345 has a screw hole on the side facing away from the vertical mounting plate 343, which can be screwed to the vertical mounting plate 343. A screw hole and a calibration top screw 3452 are provided on the side facing away from the rib plate 344. The rib plate 344 can be locked to prevent loosening by pulling and pushing.

[0073] This adjustment and locking structure can solve the problem that the robot arm, the conveying mechanism 4 and the reaction furnace 1 cannot be aligned due to installation errors.

[0074] like Fig.11 As shown, specifically, two supporting blocks 3412 corresponding to the side support rods of the film box 5 are also provided on the lateral part of the L-shaped gripper 341. The middle part of the top surface of the supporting block 3412 is convex and provided with an arc-shaped groove, which is convenient for dragging the support rod on the side of the film box 5. The two sides of the top surface of the supporting block 3412 are provided with grippers 341 connected by screws, and supporting top screws 3413 are provided. By adjusting the top screws, the installation distance between the supporting block 3412 and the gripper 341 can be adjusted, that is, the height of the supporting block 3412 can be adjusted, which makes up for the sagging problem of the dual synchronous belt module, the gripper assembly 34 or other structures during installation or operation, so that the film box 5 is always in a relatively horizontal state during the transportation process.

[0075] like Fig.13 , 14As shown, in the second embodiment, a plurality of synchronous belt modules are arranged in parallel, specifically, the lifting mechanism 31 is located in the middle, and the first synchronous belt module 32 and the second synchronous belt module 33 are respectively located on both sides of the lifting mechanism 31. At the same time, the sliders of the first synchronous belt module and the second synchronous belt module are connected to the bracket part of the lifting mechanism 31 through a transverse bracket, which can drive the lifting mechanism 31 to move horizontally, and the gripper assembly 34 is connected to the lifting slider of the lifting mechanism 31.

[0076] This structure occupies more installation space, but because the two synchronous belt modules synchronously drive the machine gripper assembly 34 to operate, the operation accuracy and stability are better.

[0077] like Fig.15 As shown, in this embodiment, the gripper assembly 34 includes: a gripper frame, a pair of grippers 341 and a photoelectric sensor 42. The gripper frame has a side plate and a bottom plate. The front side plate of the gripper frame faces the direction of the reactor 1, and the back side plate is connected to the lifting slider of the lifting mechanism 31; a pair of grippers 341 are rotatably connected to the two sides of the bottom plate at the bottom of the gripper frame respectively, and the grippers 341 are divided into a supporting section and an adjusting section by their rotating connection. A guiding structure corresponding to the support rod of the film box 5 is provided on the supporting section, and a top block 3401 component for pressing down or lifting the adjusting section is provided on the bottom plate of the gripper frame; the photoelectric sensor 42 is arranged at a lower position on the front side plate of the gripper frame, and is used to detect whether there is a film box 5 between the two grippers 341.

[0078] like Fig.15 As shown, specifically, the top block 3401 assembly is a top block 3401 installed on the bottom plate and an adjustment screw 3402 installed on the bottom of the top block 3401 to support the side of the adjustment section of the gripper 341. By tightening and loosening the screw to change the extension length of the screw, the rotation angle of the adjustment section of the gripper 341 can be changed, so that the supporting section of the gripper 341 can be adjusted to a relatively horizontal state. In addition, an arc notch is provided on the adjustment section, and a screw that fits into the arc groove is provided on the bottom plate of the corresponding gripper frame. After the top block 3401 assembly adjusts the angle of the gripper 341, the gripper 341 is fixed by passing the screw through the arc notch to limit the movement of the gripper 341.

[0079] The guiding structure is similar to the structure of the supporting block 3412 , and is specifically a V-shaped groove or an arc-shaped groove provided on the upwardly protruding block of the gripper 341 , so as to facilitate alignment with the supporting rod on the side of the film box 5 for supporting.

[0080] like Figure 5 As shown, in a specific embodiment, a slider buffer structure is provided at the top of the guide rail of the lifting mechanism 31, and the slider buffer structure includes: a buffer plate 311 installed on the top of the guide rail, a buffer block 312 located at the top travel position of the lifting slider of the lifting mechanism 31, and a buffer pad 313 installed on the buffer block 312, and screws connecting the buffer block 312 and the buffer plate 311.

[0081] Before the lifting slider moves upward to the limit position, it will collide with the buffer pad 313 to prevent the lifting slider from directly hitting the components of the lifting mechanism 31 and causing damage to the components or the lifting slider.

[0082] like Figure 6 As shown, in a specific embodiment, a retaining edge 315 for limiting the installation position of the guide rail is vertically provided on the guide rail mounting plate 314 of the lifting mechanism 31, thereby preventing the guide rail from being offset when tightening the screws, resulting in unsmooth operation.

[0083] like Figure 1 , 13 As shown, the present invention also proposes a coating device, specifically comprising: a reaction furnace 1, a conveying mechanism 4 arranged on one side of the reaction furnace 1 for conveying a film box 5, and the above-mentioned film box conveying robot mechanism. The conveying mechanism 4 is a linear conveying mechanism 4, the lateral conveying direction of the film box conveying robot mechanism is perpendicular to the conveying direction of the conveying mechanism 4, and the reaction furnace 1 is located in the lateral conveying direction of the film box conveying robot mechanism.

[0084] The present invention also provides a film box transport control method, using the above-mentioned coating equipment, specifically comprising the steps of:

[0085] When the reaction furnace sends a request for a box to be ejected, and there is no box at the designated position of the conveying mechanism and on the box transporting robot mechanism, the box transporting robot mechanism transports the processed box from the reaction furnace to the designated position of the conveying mechanism;

[0086] When the conveying mechanism sends a cassette entry request signal to the reaction furnace, and there is no cassette on the cassette transporting robot mechanism, the cassette transporting robot mechanism transports the cassette to be processed from the designated position of the conveying mechanism to the reaction furnace.

[0087] like Fig.12 As shown, specifically in the first embodiment, the film box handling robot mechanism transports the processed film box from the reactor to the specified position of the conveying mechanism, and is specifically controlled as follows: the lifting mechanism (shown as the robot axis 1 in the flowchart) drives the gripper assembly to rise, and the second synchronous belt module (shown as the robot axis 3 in the flowchart) drives the gripper assembly to move forward in the direction of the reactor until the stroke is in place, and the first synchronous belt module (shown as the robot axis 2 in the flowchart) drives the second synchronous belt module to continue to move forward until the photoelectric sensor sends a film box signal, and the lifting mechanism drives the gripper assembly to rise and grab the film box; the first synchronous belt module drives the second synchronous belt module back into place, and the second synchronous belt module drives the gripper assembly back to above the specified position of the conveying mechanism, and the lifting mechanism drives the gripper assembly to descend to place the processed film box at the specified position of the conveying mechanism, and all moving parts of the robot return to their initial positions.

[0088] Specifically in the first embodiment, the film box handling robot mechanism transports the film box to be processed from the specified position of the conveying mechanism to the reaction furnace, and is specifically controlled as follows: the lifting mechanism drives the gripper assembly to descend, and the second synchronous belt module drives the gripper assembly to advance to the film box grabbing position (corresponding to the specified position of the conveying mechanism). When the photoelectric sensor sends a film box signal, the lifting mechanism drives the gripper assembly to rise and grab the film box; the second synchronous belt module drives the gripper assembly to continue to advance until the stroke is in place, the first synchronous belt module drives the second synchronous belt module forward to complete the stroke, the lifting mechanism drives the gripper assembly to descend and place the film box to be processed in the reaction furnace, and all moving parts of the robot return to their initial positions.

[0089] like Fig.13 As shown, specifically in the second embodiment, the film box handling robot mechanism transports the processed film box from the reactor to the specified position of the conveying mechanism, and is specifically controlled as follows: the lifting mechanism (shown as the robot axis 1 in the flowchart) drives the gripper assembly to rise, and the two synchronous belt modules drive the gripper assembly to advance toward the reactor until the stroke is in place, the photoelectric sensor sends a film box signal, and the lifting mechanism drives the gripper assembly to rise and grab the film box; the first synchronous belt module (shown as the robot axis 2 in the flowchart) and the second synchronous belt module drive the film box to retreat to the top of the specified position of the conveying mechanism, the lifting mechanism drives the gripper assembly to descend and place the processed film box at the specified position of the conveying mechanism, and all moving parts of the robot return to their initial positions.

[0090] Specifically in the second embodiment, the film box handling robot mechanism transports the film box to be processed from the specified position of the conveying mechanism to the reaction furnace. The specific control is as follows: the lifting mechanism drives the gripper assembly to descend, and the first and second synchronous belt modules drive the gripper assembly to advance to the film box grabbing position. When the photoelectric sensor sends a film box signal, the lifting mechanism drives the gripper assembly to rise and grab the film box; the first and second synchronous belt modules drive the gripper assembly to continue to move forward to the position, and the lifting mechanism drives the gripper assembly to descend to place the film box to be processed in the reaction furnace, and all moving parts of the robot return to their initial positions.

[0091] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0092] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0093] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0094] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0095] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0096] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A film box handling robot mechanism, characterized in that: include: Multiple synchronous belt modules, gripper assemblies and lifting mechanisms; among them, The lifting mechanism is used to drive the gripper assembly to move in the vertical direction, and the multiple synchronous belt modules are used to drive the gripper assembly to move in the horizontal direction. When the gripper of the gripper assembly follows the movement of the lifting mechanism and the synchronous belt module assembly, it can lift the film box located on the reaction furnace or the conveying mechanism, and transport the film box from the specified position of the conveying mechanism to the reaction furnace, or transport the film box from the reaction furnace to the specified position of the conveying mechanism.

2. The film box handling robot mechanism according to claim 1, characterized in that: The multiple synchronous belt modules are stacked and specifically include: a first synchronous belt module connected to the lifting slider of the lifting mechanism, a second synchronous belt module stacked below the first synchronous belt module and connected to the first slider of the first synchronous belt module, and the second slider of the second synchronous belt module is connected to the gripper assembly.

3. The film box handling robot mechanism according to claim 2, characterized in that: One side surface of the synchronous belt module faces the lifting mechanism, and a motor for driving the synchronous belt module is vertically arranged on the side surface, and the motor is arranged at the end of the synchronous belt module close to the reaction furnace.

4. The film box transport robot mechanism according to claim 2, characterized in that: Both sides of the profiles of the first synchronous belt module and the second synchronous belt module are provided with fastening strips, and a connecting plate connecting the fastening strips on both sides is provided on the top of the profile, and the side edges of the fastening strips are provided with ribs embedded in the side grooves of the profile, the lifting slider of the lifting mechanism is connected to the connecting plate of the first synchronous belt module, and the first slider of the first synchronous belt module is connected to the connecting plate of the second synchronous belt module.

5. The film box transport robot mechanism according to claim 2, characterized in that: The gripper assembly comprises: A gripper frame connected to the second slider of the second synchronous belt module; A pair of L-shaped grippers are arranged at intervals, and the two vertical parts of the grippers are respectively connected to the two sides of the back of the gripper frame; The photoelectric sensor is arranged at the bottom of the gripper frame and is used to detect whether there is a film box between the two grippers.

6. The film box transport robot mechanism according to claim 5, characterized in that: The grab frame comprises: A transverse mounting plate connected to the second slider of the second synchronous belt module; A vertical mounting plate is vertically connected to one end of the horizontal mounting plate, and waist holes and positioning pin holes are alternately provided on both sides of the vertical mounting plate from top to bottom, and the vertical parts of the gripper are respectively connected to both sides of the back of the vertical mounting plate; Two rib plates, the upper side of the rib plates is connected to the lower side of the horizontal mounting plate, the vertical side is against the front side of the vertical mounting plate, and is positioned and connected through the waist holes and positioning pin holes on the vertical mounting plate; The alignment block covers the outer sides of the two rib plates respectively, and a screw hole is arranged on the side facing away from the vertical mounting plate, and a screw hole and an alignment top screw are arranged on the side facing away from the rib plate.

7. The film box transport robot mechanism according to claim 5, characterized in that: A plurality of support blocks with adjustable heights are arranged on the transverse part of the gripper, and the support blocks are used to support the support rods protruding from the side surfaces of the film box.

8. The film box transport robot mechanism according to claim 1, characterized in that: The multiple synchronous belt modules are arranged in parallel, specifically including: a first synchronous belt module and a second synchronous belt module are arranged in parallel at the same height on both sides of the lifting mechanism, the sliders of the first synchronous belt module and the second synchronous belt module are connected to the lifting mechanism through a transverse bracket, which can drive the lifting mechanism to move horizontally, and the gripper assembly is connected to the lifting slider of the lifting mechanism.

9. The film box transport robot mechanism according to claim 8, characterized in that: The gripper assembly comprises: A gripper frame, the back side of which is connected to the lifting slider of the lifting mechanism; A pair of grippers are rotatably connected to the two sides of the bottom of the gripper frame, respectively. The grippers are divided into a supporting section and an adjusting section from the rotating connection. The gripper frame is provided with a top block assembly for pressing down or lifting the adjusting section. The photoelectric sensor is arranged on the gripper frame and is used to detect whether there is a film box between the two grippers.

10. The film box transport robot mechanism according to claim 9, characterized in that: The adjusting section is provided with an arc notch, and a screw can be passed through the arc notch to be fixedly connected with the gripping frame to limit the rotation of the supporting section.

11. The film box transport robot mechanism according to claim 1, characterized in that: A slider buffer structure is provided at the top of the guide rail of the lifting mechanism, and the slider buffer structure includes: a buffer plate installed on the top of the guide rail, a buffer block located at the top stroke position of the lifting slider of the lifting mechanism, and a buffer pad installed on the buffer block, and screws connecting the buffer block and the buffer plate.

12. The film box transport robot mechanism according to claim 1, characterized in that: A retaining edge for limiting the installation position of the guide rail is vertically arranged on the guide rail installation plate of the lifting mechanism.

13. A coating device, characterized in that: include: A reaction furnace, a conveying mechanism arranged on one side of the reaction furnace for conveying a film box, and a manipulator mechanism as claimed in any one of claims 1 to 12.

14. A film box transport control method, characterized in that: Using the coating device as claimed in claim 13, comprising the steps of: When the reaction furnace sends a box-out request signal, and there is no film box at the designated position of the conveying mechanism and on the manipulator mechanism, the manipulator mechanism moves the processed film box from the reaction furnace to the designated position of the conveying mechanism; When the conveying mechanism sends a box entry request signal to the reaction furnace, and there is no film box on the robot mechanism, the robot mechanism moves the film box to be processed from the designated position of the conveying mechanism to the reaction furnace.

15. The film box conveying control method according to claim 14, characterized in that: The robot mechanism carries the processed film box from the reactor to the designated position of the conveying mechanism under specific control as follows: the lifting mechanism drives the gripper assembly to rise, the second synchronous belt module drives the gripper assembly to advance toward the reactor until the stroke is in place, the first synchronous belt module drives the second synchronous belt module to continue to advance, until the photoelectric sensor sends a film box signal, the lifting mechanism drives the gripper assembly to rise and grab the film box; the first synchronous belt module drives the second synchronous belt module back into place, the second synchronous belt module drives the gripper assembly back to above the designated position of the conveying mechanism, and the lifting mechanism drives the gripper assembly to descend to place the processed film box at the designated position of the conveying mechanism.

16. The film box conveying control method according to claim 14, characterized in that: The robot mechanism transports the wafer box to be processed from the designated position of the conveying mechanism to the reaction furnace. The specific control is as follows: the lifting mechanism drives the gripper assembly to descend, the second synchronous belt module drives the gripper assembly to advance to the wafer box grabbing position, and when the photoelectric sensor sends a wafer box signal, the lifting mechanism drives the gripper assembly to rise and grab the wafer box; the second synchronous belt module drives the gripper assembly to continue to advance until the stroke is in place, the first synchronous belt module drives the second synchronous belt module to advance to the position to supplement the stroke, and the lifting mechanism drives the gripper assembly to descend to place the wafer box to be processed in the reaction furnace.

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