A helical resonator for use within a vacuum cavity

Abstract

The application provides a spiral resonator used in a vacuum cavity, which specifically comprises a mounting base, a shell, a power mechanism, a mutual inductance adjusting mechanism, a main coil and a coupling coil, wherein the mounting base is installed in a vacuum cavity of an ion trap system, the shell is fixed on the mounting base and used for fixing the spiral resonator, the mutual inductance adjusting mechanism, the main coil and the coupling coil are arranged in the interior of the shell, the power mechanism is arranged outside the vacuum cavity, and the power output end of the power mechanism penetrates into the interior of the vacuum cavity and is used for driving the mutual inductance adjusting mechanism to adjust the relative distance between the main coil and the coupling coil, so that the output impedance of the spiral resonator is changed. The distance between the main coil and the coupling coil is directly adjusted in the vacuum cavity, thereby avoiding radio frequency loss and Q factor reduction.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of resonators for ion traps, and particularly relates to a spiral resonator used in a vacuum cavity. BACKGROUND

[0002] In recent years, the field of quantum computing in China has developed rapidly, and innovative achievements have been reported frequently. Quantum computers can control qubits through ion traps, achieving computing efficiency far superior to traditional computers. Ion trap vacuum chambers are an important part of ion trap laboratories, which are an experimental environment with high vacuum, low temperature, and strong control ability, and can be used for laser cooling of ions and atoms, quantum computing, nuclear physics experiments, and other research. The design and generation of ion trap vacuum chambers have become one of the hotspots of ion trap technology research.

[0003] An ion trap vacuum chamber generally consists of a vacuum system and an ion trap. The vacuum system includes a vacuum pump, pneumatic valves, a spiral resonator, etc. In the ion trap, trapped ions are mainly achieved through two pairs of electrodes, namely DC electrodes and RF electrodes. The RF signal is amplified by a signal source through a RF amplifier, coupled into the spiral resonator in the vacuum chamber, and then applied to the RF electrode of the ion trap. The spiral resonator is mainly composed of a main coil and a coupling coil, and its main function is voltage gain and filtering, which is used to match the impedance of the RF source end with the circuit composed of the trap capacitor.

[0004] However, in the prior art, the distance between the main coil and the coupling coil in the spiral resonator of the vacuum chamber is fixed, so the mutual inductance between them is also fixed. However, in actual situations, the impedance matching between the main coil and the coupling coil requires adjusting the mutual inductance between them. The commonly used method is to use an external adjustable capacitor bank for impedance matching. However, this method causes RF loss and Q factor to decrease, thereby reducing the filtering effect of the spiral resonator and ultimately affecting the ion trapping effect. Therefore, it is urgent to design a spiral resonator for low-temperature traps to avoid RF loss and Q factor decrease. SUMMARY

[0005] To solve the above problems, the present application provides a spiral resonator used in a vacuum cavity, which comprises a mounting base, an outer shell, a power mechanism, a mutual inductance adjusting mechanism, a main coil and a coupling coil.

[0006] The mounting base is installed in the vacuum cavity of the ion trap system, and the outer shell is fixed on the mounting base to fix the spiral resonator.

[0007] The mutual inductance adjusting mechanism, the main coil and the coupling coil are all arranged inside the outer shell.

[0008] The power mechanism is arranged outside the vacuum cavity, and a power output end of the power mechanism penetrates into the inside of the vacuum cavity to drive the mutual inductance adjusting mechanism to adjust the relative distance between the main coil and the coupling coil, so that the output impedance of the spiral resonator is changed.

[0009] Further, the power mechanism is mounted on the outer side or the bottom of the vacuum cavity.

[0010] Further, the mutual inductance adjusting mechanism comprises a moving assembly and a coupling platform arranged on the moving assembly, wherein the coupling coil is arranged on the coupling platform.

[0011] Further, the mutual inductance adjusting mechanism comprises a connecting assembly for connecting the power output end of the power mechanism and the moving assembly.

[0012] Further, the upper surface of the mounting base is provided with a limiting seat, and a bottom rail groove is formed in the bottom of the limiting seat, and a bottom rail is arranged on each of the two opposite side walls of the bottom rail groove.

[0013] Further, when the power mechanism is mounted on the outer wall of the vacuum cavity, the upper surface of the limiting seat is provided with a ring platform with an opening, and the bottom rail groove is communicated with the opening of the ring platform.

[0014] Further, the moving assembly comprises a first sliding block and a connecting plate, wherein,

[0015] The first sliding block is arranged between the two bottom rails and can slide between the two bottom rails, the coupling platform is slidingly or fixedly connected with the first sliding block, the connecting plate is connected to one end of the first sliding block, and the other end of the connecting plate penetrates through the opening and is connected with the connecting assembly.

[0016] Further, when the coupling platform is fixedly connected with the first sliding block, the moving assembly further comprises a fine adjustment mechanism, the fine adjustment mechanism is used to enable the coupling platform to move in a second direction when the coupling platform is driven by the first sliding block to move in a first direction, so that the output impedance of the spiral resonator is changed, wherein the first direction and the second direction are different directions.

[0017] Further, when the coupling platform is slidingly connected with the first sliding block, the moving assembly comprises an inclined block, and the coupling platform is slidingly connected with the first sliding block through the inclined block.

[0018] When the first sliding block moves, the coupling platform moves, and the moving direction of the coupling platform is perpendicular to the moving direction of the first sliding block.

[0019] Further, the inclined block is mounted on the first sliding block, and a first sliding groove is formed in the inclined block, and a beveled groove is formed in the bottom of the coupling platform.

[0020] The connecting surface of the inclined groove is parallel to the groove bottom surface of the first sliding groove, the included angle between the groove bottom surface of the first sliding groove and the surface of the first sliding block is greater than 0, and the second sliding block is connected to the connecting surface and is installed in the first sliding groove;

[0021] The bottom of the coupling table is provided with a skirt, and the first guide rod is movably arranged on the skirt and fixedly connected between the bottom rails.

[0022] Further, when the power mechanism is installed at the bottom of the vacuum cavity, the bottom of the coupling table is arranged between the two bottom rails and connected to the output end of the power mechanism, and the outer periphery of the bottom of the coupling table is provided with a movable guide column which is fixedly connected between the bottom rails.

[0023] Further, the power mechanism comprises a vacuum bellows, a guide assembly and a power output assembly, the vacuum bellows and the power output assembly are both installed on the guide assembly, wherein,

[0024] The power output end of the power output assembly penetrates into the vacuum bellows and is sealed by the vacuum bellows, and further penetrates into the vacuum cavity and is in transmission connection with the mutual inductance adjusting mechanism, and the guide assembly is installed on the vacuum cavity.

[0025] Further, the connecting assembly comprises a connecting rod, a sleeve and a connecting block, the connecting rod is connected to the first sliding block, the sleeve is arranged on the connecting rod, the sleeve is sleeved on the connecting rod, the connecting block is arranged on the top of the sleeve, and a threaded hole is formed in the connecting block and connected to the power output end of the power mechanism.

[0026] Further, the fine adjustment structure is arranged between the coupling table and the first sliding block and comprises a boss, a third guide rod and a third sliding block, wherein,

[0027] The upper surfaces of the two bottom rails are both provided with the boss, and a first sliding groove is formed in the upper surface of the boss;

[0028] The lower side walls on both sides of the coupling table are provided with the third sliding block, the two third sliding blocks are respectively installed in the two first sliding grooves, the first sliding block is provided with a plurality of third guide rods, the coupling table is provided with a plurality of guide rod holes matched with the third guide rods, and the plurality of third guide rods are inserted into the plurality of guide rod holes.

[0029] Further, the fine adjustment structure comprises a first rack, a second rack and a coaxial double gear, wherein,

[0030] The first rack is arranged on the bottom rail, the second rack is arranged on the coupling table, the fourth guide rod is arranged on the first slider, the guide rod hole is arranged on the coupling table, the fourth guide rod is inserted into the guide rod hole, the coaxial double gear is arranged on one of the fourth guide rods, the coaxial double gear is engaged with the first rack, and the coaxial double gear can also be engaged with the second rack when the first slider moves to a specified position.

[0031] Further, the guide assembly comprises a fixing member, a second guide rod and a guide plate, wherein the fixing member is fixedly connected with the fixing plate through a plurality of second guide rods, one end of the vacuum bellows is fixed between the fixing member, and the one end of the vacuum bellows is arranged on the second guide rod and can slide on the second guide rod.

[0032] Further, the power output assembly comprises a first push plate, a threaded rod, a nut, a second push plate, a fixing plate and an extension rod, wherein,

[0033] The flange connected to the second push plate is connected to the other end of the vacuum bellows, the first push plate is connected to the flange, the guide plate is sleeved on the plurality of second guide rods and fixedly connected between the flange, one end of the threaded rod passes through the fixing plate and is fixedly connected with the first push plate, the other end of the threaded rod is sleeved with the nut, the nut can be limited by the fixing plate, the extension rod and the second push plate are located in the interior of the vacuum bellows, one end of the extension rod is connected to the second push plate, and the other end of the extension rod serves as a power output end of the power mechanism.

[0034] The application provides a spiral resonator in a vacuum cavity, the distance between the main coil and the coupling coil in the vacuum cavity is directly adjusted through the cooperation of the power mechanism and the mutual inductance adjusting structure, the radio frequency loss and the Q factor drop are avoided, and the coupling table can be moved up and down when moving in the transverse direction through the fine adjustment mechanism, so that the output impedance of the spiral resonator is changed.

[0035] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the application. The objects and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without any creative effort.

[0037] Figure 1A structural diagram of a vacuum cavity according to an embodiment of the present application is shown;

[0038] Figure 2 A structural diagram of a spiral resonator according to an embodiment of the present application is shown;

[0039] Figure 3 A structural diagram of a spiral resonator according to an embodiment of the present application is shown;

[0040] Figure 4 A structural diagram of a moving assembly in one direction according to an embodiment of the present application is shown;

[0041] Figure 5 A structural diagram of a moving assembly in another direction according to an embodiment of the present application is shown;

[0042] Figure 6 A structural diagram of a power mechanism according to an embodiment of the present application is shown;

[0043] Figure 7 A structural diagram of a power mechanism according to an embodiment of the present application is shown;

[0044] Figure 8 A structural diagram of example one according to an embodiment of the present application is shown;

[0045] Figure 9 A structural diagram of example two according to an embodiment of the present application is shown; Figure 8 A structural diagram of the left side direction is shown;

[0046] Figure 10 A structural diagram of example two according to an embodiment of the present application is shown;

[0047] Figure 11 A structural diagram of example two according to an embodiment of the present application is shown; Figure 10 A structural diagram of the middle B is shown;

[0048] Figure 12 A structural diagram of a moving assembly in one direction when the coupling table is in sliding connection with the first sliding block according to an embodiment of the present application is shown;

[0049] Figure 13 A structural diagram of a moving assembly on the back side according to an embodiment of the present application is shown; Figure 12 A structural diagram of a moving assembly on the back side according to an embodiment of the present application is shown;

[0050] Figure 14 A structural diagram of a power mechanism installed on the bottom of a vacuum cavity according to an embodiment of the present application is shown;

[0051] Figure 15 A structural diagram of a guide column when a power mechanism is installed on the bottom of a vacuum cavity according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0052] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some, but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0053] As shown in Figure 1 The present application provides a spiral resonator used in a vacuum cavity, which comprises a mounting base 2, an outer shell 3, an upper cover 4, a power mechanism 5, a mutual inductance adjusting mechanism 6, a main coil 7 and a coupling coil 8. The following will be described in detail.

[0054] As shown in Figure 2 The upper cover 4 and the mounting base 2 are respectively installed at the upper and lower ends of the outer shell 3, wherein the mounting base 2 is installed in the vacuum cavity 1 of the ion trap system and is used for fixing the spiral resonator, and the upper cover 4 is used for mounting the ion trap chip of the ion trap system.

[0055] In some embodiments of the present application, the mutual inductance adjusting mechanism 6, the main coil 7 and the coupling coil 8 are all arranged inside the outer shell 3; the power mechanism 5 is arranged outside the vacuum cavity 1 and is used for driving the mutual inductance adjusting mechanism to adjust the relative distance between the main coil 7 and the coupling coil 8, so that the output impedance of the spiral resonator is changed.

[0056] In addition, in some embodiments of the present application, the power mechanism is installed on the outer side or the bottom of the vacuum cavity. No matter whether the power mechanism is installed on the outer side or the bottom of the vacuum cavity, the mutual inductance adjusting mechanism 6 comprises a moving assembly 62 and a coupling table 61 arranged on the moving assembly 62, wherein the coupling table 61 is provided with the coupling coil 8, the coupling coil 8 is spirally wound on the coupling table 61, and the coupling coil 8 is coupled with the main coil 7 arranged inside the outer shell 3. The mutual inductance adjusting mechanism 6 comprises a connecting assembly 9 used for connecting the power output end of the power mechanism 5 and the moving assembly. The upper surface of the mounting base 2 is provided with a limiting seat 21, the bottom of the limiting seat 21 is provided with a bottom rail groove 22, and the two opposite side walls of the bottom rail groove 22 are respectively provided with bottom rails 621.

[0057] The following will describe the power mechanism installed on the outer side or the bottom of the vacuum cavity respectively. When the power mechanism is installed on the outer wall of the vacuum cavity, in some embodiments of the present application, as shown in Figure 3As shown, the upper surface of the mounting base 2 is provided with a limiting seat 21, the upper surface of the limiting seat 21 is provided with a ring table 23 with an opening 24, the bottom of the limiting seat 21 is provided with a bottom rail groove 22, and the bottom rail groove 22 is communicated with the opening 24 of the ring table 23. The following will be described in detail how to control the movement.

[0058] In some embodiments of the present application, as shown in Figure 4 and Figure 5 As shown, the moving assembly 62 comprises a first sliding block 622 and a connecting plate 623, wherein the first sliding block 622 is arranged between the two bottom rails 621 and can slide between the bottom rails 621, the connecting plate 623 is connected to one end of the first sliding block 622, the other end of the connecting plate 623 passes through the opening 24 and is connected to the connecting assembly 9, and the coupling table 61 is slidingly or fixedly connected with the first sliding block 622.

[0059] In some embodiments of the present application, the coupling table 61 is slidingly or fixedly connected with the first sliding block 622, and the moving assembly 62 further comprises a ball limiting plate 624 and a ball 625, wherein the ball limiting plate 624 is arranged on both sides of the first sliding block 622, one end of the ball limiting plate 624 is connected between the other end of the first sliding block 622, and the ball 625 is arranged on the ball limiting plate 624 and slides between the side wall of the corresponding bottom rail groove 22.

[0060] In some embodiments of the present application, when the coupling table 61 is fixedly connected with the first sliding block 622, the movement of the coupling table 61 can be controlled by controlling the movement of the first sliding block 622, so as to adjust the relative transverse distance between the main coil 7 and the coupling coil 8 and change the output impedance of the spiral resonator.

[0061] In addition, in the present application, the distance between the coupling coil 8 and the main coil 7 is adjusted by moving the coupling table 61, so as to finally adjust the mutual inductance between the two, but this adjustment may face the situation that the mutual inductance is not enough when the load of the spiral resonator is large, and therefore a more accurate adjustment method is needed, that is, by controlling the up-down movement of the coupling table 61 when the coupling table 61 is directly below the main coil 7, so as to finally adjust the distance between the coupling coil 8 and the main coil 7, and finally more accurately adjust the mutual inductance between the coupling coil 8 and the main coil 7. The way of controlling the distance between the coupling coil 8 and the main coil 7 will be described in detail below.

[0062] In some embodiments of the present application, the moving assembly 62 further comprises a fine adjustment mechanism, by which the distance between the coupling coil 8 and the main coil 7 can be more accurately adjusted. The fine adjustment mechanism will be described in more detail below.

[0063] In some embodiments of the present application, the fine adjustment mechanism is used to enable the coupling platform 61 to move up and down when moving laterally, so that the output impedance of the spiral resonator changes. Since the spiral resonator of the present application can be used in a vacuum cavity, the way to control the downward movement of the coupling platform 61 cannot be achieved by gravity, so the fine adjustment mechanism 10 that controls the up and down adjustment of the coupling platform 61 cannot be achieved by a spring. Based on this, the present application provides the following two ways, which are not limited to these two ways to enable the coupling platform 61 to move up and down when moving laterally.

[0064] Method one: the fine adjustment structure can be provided as shown in Figure 8 between the coupling platform 61 and the first sliding block 622, that is, it includes a boss 101, a third guide rod 102, and a third sliding block 103. The upper surfaces of the two bottom rails 621 are provided with the boss 101. The upper surface of the boss 101 is an arc shape that protrudes from both sides to the middle. The upper surface of the boss 101 is provided with a first sliding groove. The groove depth of the first sliding groove is uniformly set, that is, the first sliding groove is also an arc shape that protrudes from both sides to the middle.

[0065] As shown in Figure 9 , the lower side walls on both sides of the coupling platform 61 are provided with the third sliding block 103. The two third sliding blocks 103 are respectively installed in the two first sliding grooves. The first sliding block 622 is provided with a plurality of third guide rods 102. The coupling platform 61 is provided with a plurality of guide rod holes matched with the third guide rods 102. The plurality of third guide rods 102 can be inserted into the plurality of guide rod holes. Therefore, when the third sliding block 103 moves, under the action of the first sliding groove and the third sliding block 103, the coupling platform 61 can be lifted up when it moves to the position directly below the main coil 7, that is, it can move upwards, thereby adjusting the mutual inductance between the main coil 7 and the coupling coil 8.

[0066] Method two: in some other embodiments, as shown in Figure 10 and Figure 11 , the fine adjustment structure includes a first rack 621-1, a second rack 621-2, and a coaxial double gear 621-3. The first rack 621-1 is arranged on the bottom rail 621. The second rack 621-2 is arranged on the coupling platform 61. The first sliding block 622 is provided with a plurality of fourth guide rods 104. The coupling platform 61 is provided with a plurality of guide rod holes matched with the fourth guide rods 104. The plurality of fourth guide rods 104 are inserted into the plurality of guide rod holes. The coaxial double gear 621-3 is arranged on one of the fourth guide rods 104. The coaxial double gear 621-3 is engaged with the first rack 621-1 and can also be engaged with the second rack 621-2 when the first sliding block 622 moves to a specified position, thereby finally also achieving the effect that the coupling platform 61 can be lifted up when it moves to the position directly below the main coil 7.

[0067] In addition, since the temperature in the low-temperature cavity 1 is as low as below 4K, no elastic component can be used in the fine adjustment mechanism 10, and therefore the above two examples can also be used in the low-temperature trap, i.e., the ion trap is placed in an ultra-low-temperature environment to form a low-temperature trap.

[0068] In some embodiments of the application, as shown in Figure 12 When the coupling table 61 is in sliding connection with the first sliding block 622, the moving assembly 62 further comprises an inclined block 624, and the coupling table 61 is in sliding connection with the first sliding block 622 through the inclined block 624. When the first sliding block 622 moves, the coupling table 61 moves, and the moving direction is perpendicular to the moving direction of the first sliding block 622.

[0069] As shown in Figure 13 The inclined block 624 is installed on the first sliding block 622 and can also be integrally formed. A first sliding groove 624-1 is formed in the inclined block 624, and a beveled groove 611 is formed in the bottom of the coupling table 61. The connecting surface 612 of the beveled groove 611 is parallel to the groove bottom surface of the first sliding groove 624-1. The included angle between the groove bottom surface of the first sliding groove 624-1 and the surface of the first sliding block 622 is greater than 0. The second sliding block 614 is connected to the connecting surface 612 and is installed in the first sliding groove 624-1. A skirt is provided on the bottom outer periphery of the coupling table 61, and a movable first guide rod 613 is provided on the skirt. The first guide rod 613 is fixedly connected between the bottom rail 621. Therefore, when the coupling table 61 remains in the original position directly below the main coil 7, and the first sliding block 622 is controlled to move, the coupling table 61 only moves longitudinally, for example, moves up and down, that is, the coupling coil 8 on the coupling table 61 can penetrate into the main coil 7, so as to adjust the relative longitudinal distance between the main coil 7 and the coupling coil 8 to change the output impedance of the spiral resonator.

[0070] In some embodiments of the application, in the above case, the power transmission between the first sliding block 622 and the power mechanism 5 can be formed through the connecting assembly 9, that is, as shown in Figure 4 The connecting assembly 9 comprises a connecting rod 91, a sleeve 92, and a connecting block 93. The connecting rod 91 is connected with the first sliding block 622. The sleeve 92 is provided on the connecting rod 91 and is sleeved on the connecting rod 91. The connecting block 93 is provided on the top of the sleeve 92. A threaded hole 94 is formed in the connecting block 93, and the threaded hole 94 is connected with the power output end of the power mechanism 5.

[0071] In some embodiments of the application, for the shell 3, as shown in Figure 2As shown, a strip-shaped opening 31 is formed on the coupling assembly 9, and the connecting plate 623 in the connecting assembly 9 can pass through the strip-shaped opening, and the strip-shaped opening is communicated with the opening 24 of the ring table 23; one end of the bottom of the main coil 7 is connected to the shell 3 for grounding, and the other end passes through the upper cover 4 and is connected to the ion trap chip in the well for serving as the radio frequency signal input end of the ion trap chip.

[0072] In some embodiments of the application, when the power mechanism is installed on the bottom of the vacuum cavity, as shown in Figure 14 and 15 As shown, the bottom of the coupling table 61 is arranged between the two bottom rails 621 and is connected to the output end of the power mechanism, and the outer periphery of the bottom of the coupling table 61 (a skirt can also be arranged on the outer periphery of the bottom) is provided with a movable guide column 615, and the guide column 615 is also fixedly connected between the bottom rails 621, and the guide column 615 has the same effect as the guide rod. After the power output end of the power mechanism 5 passes into the vacuum cavity 1 from the bottom of the vacuum cavity and then passes through the bottom rail groove 22, it can be connected to the bottom of the coupling table 61 through the connecting assembly 9 (not shown in Figure 14 and Figure 15 ), so that the coupling table 61 can be directly controlled to move up and down, so that the coupling coil 8 on the coupling table 61 can pass into the main coil 7, the relative longitudinal distance between the main coil 7 and the coupling coil 8 is adjusted to change the output impedance of the spiral resonator. In this embodiment, the connecting assembly 9 can be a commonly used connecting piece such as a connecting sheet or a connecting block, and the bottom of the coupling table 61 is in contact with the upper surface of the bottom rail 621, and the skirt (not shown in Figure 14 and Figure 15 ) can be arranged to limit the position and prevent the coupling table 61 from moving downward excessively.

[0073] The power mechanism of the application will be described in detail below.

[0074] In some embodiments of the application, as shown in Figure 6 and Figure 7 The power mechanism comprises a vacuum bellows 50, a guide assembly and a power output assembly, wherein the vacuum bellows 50 and the power output assembly are both installed on the guide assembly, the power output end of the power output assembly passes into the vacuum bellows 50 and is sealed by the vacuum bellows 50, and further passes into the vacuum cavity and is in transmission connection with the mutual inductance adjusting mechanism 6, and the guide assembly is installed on the outer wall of the vacuum cavity.

[0075] The guide assembly comprises a fixing member 51, a second guide rod 52 and a guide plate 53, wherein the fixing member 51 is fixedly connected with the fixing plate 58 through a plurality of second guide rods 52, one end of the vacuum bellows 50 is fixed with the fixing member 51, and the other end of the vacuum bellows 50 is arranged on the second guide rod 52 and can slide on the second guide rod 52, and the fixing member 51 is installed on the outer side or the bottom of the vacuum cavity.

[0076] The power output assembly comprises a first push plate 54, a threaded rod 55, a nut 56, a second push plate 57, a fixed plate 58 and an extension rod 59, wherein a flange 571 connected to the second push plate 57 is connected to the other end of the vacuum bellows 50, the first push plate 54 is connected to the flange 571, and the guide plate 53 is sleeved on the plurality of second guide rods 52 and fixedly connected between the flange 571, so that the flange 571 can be stably moved under the pushing of the first push plate 54, and the stability of the extension of the vacuum bellows 50 during movement can be reduced.

[0077] In addition, one end of the threaded rod 55 passes through the fixed plate 58 and is fixedly connected to the first push plate 54, the other end of the threaded rod 55 is sleeved with the nut 56, and the nut 56 can be limited by the fixed plate 58, that is, the nut is prevented from moving when rotating. The extension rod 59 and the second push plate 57 are located in the interior of the vacuum bellows 50, one end of the extension rod 59 is connected to the second push plate 57, and the other end of the extension rod 59 serves as a power output end of the power mechanism 5. In this way, when the nut 56 is rotated, the threaded rod 55 can be displaced, so as to push the first push plate 54 to move, at the same time, the flange 571 moves to drive the second push plate 57 to move, and finally drives the extension rod 59 to move. Since the extension rod 59 and the second push plate 57 are located in the interior of the vacuum bellows 50, the movement of the extension rod 59 at this time is in a vacuum seal.

[0078] The other end of the extension rod 59 is provided with an external thread 581, which is engaged with the threaded hole 94 provided on the connecting block 93, so that the connecting block 93 can be moved under the control of the rotation of the nut 56, and finally the coupling table 61 on the first sliding block 622 can be controlled to move.

[0079] The vacuum bellows 51 is arranged, so that the transmission is realized in a vacuum transmission mode, the cost performance is high, the volume is smaller than that of an electric displacement table, and the cost can be reduced. In addition, in some other embodiments, a small electric device such as a servo motor can be used to control the rotation of the nut 56, so as to realize the final electric adjustment of the movement of the coupling table 61, and the movement of the extension rod 59 can be more accurately controlled.

[0080] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A spiral resonator for use in a vacuum cavity, characterized in that: The helical resonator comprises: a mounting base (2), a housing (3), a power mechanism (5), a mutual inductance adjustment mechanism (6), a main coil (7) and a coupling coil (8), wherein: The mounting base (2) is mounted in a vacuum chamber (1) of the ion trap system, and the housing (3) is fixed on the mounting base (2) and is used to fix the helical resonator; The mutual inductance adjustment mechanism (6), the main coil (7) and the coupling coil (8) are all arranged inside the housing (3); The power mechanism (5) is arranged outside the vacuum chamber (1), and the power output end of the power mechanism (5) penetrates into the interior of the vacuum chamber (1) to drive the mutual inductance adjustment mechanism to adjust the relative distance between the main coil (7) and the coupling coil (8), thereby changing the output impedance of the spiral resonator; The mutual inductance adjustment mechanism (6) includes a moving component (62) and a coupling platform (61) provided on the moving component (62), the coupling coil (8) being provided on the coupling platform (61), the moving component (62) including a first slider (622) and a connecting plate (623), the first slider (622) being provided between two bottom rails (621) and being able to slide between the bottom rails (621), the coupling platform (61) being slidably or fixedly connected to the first slider (622), the connecting plate (623) being connected to one end of the first slider (622), and the other end of the connecting plate (623) passing through the opening (24) and connected to the connecting component (9); When the coupling platform (61) is fixedly connected to the first slider (622), the moving assembly (62) further includes a fine adjustment mechanism for enabling the coupling platform (61) to move in a second direction when the first slider (622) drives the coupling platform (61) to move in a first direction, thereby changing the output impedance of the helical resonator, wherein the first direction and the second direction are different directions.

2. The spiral resonator for use in a vacuum cavity according to claim 1, characterized in that: The mutual inductance adjustment mechanism (6) comprises a connecting component (9) for connecting the power output end and the moving component of the power mechanism (5).

3. The spiral resonator for use in a vacuum cavity according to claim 2, characterized in that: A limit seat (21) is provided on the upper surface of the mounting base (2), a bottom rail groove (22) is provided at the bottom of the limit seat (21), and bottom rails (621) are respectively installed on two opposite side walls of the bottom rail groove (22).

4. The spiral resonator for use in a vacuum cavity according to claim 3, characterized in that: When the power mechanism is mounted on the outer wall of the vacuum chamber, the upper surface of the limit seat (21) is provided with a ring platform (23) having an opening (24), and the bottom rail groove (22) is in communication with the opening (24) of the ring platform (23).

5. The spiral resonator for use in a vacuum cavity according to claim 4, characterized in that: When the coupling platform (61) is slidably connected to the first slider (622), the moving assembly (62) includes a tilting block (624), and the coupling platform (61) is slidably connected to the first slider (622) via the tilting block (624), wherein: When the first slider (622) moves, the coupling platform (61) moves, and the direction of movement is perpendicular to the direction of movement of the first slider (622).

6. The spiral resonator for use in a vacuum cavity according to claim 5, characterized in that: The tilting block (624) is mounted on the first sliding block (622), and a first sliding groove (624-1) is provided on the tilting block (624), and a bevel groove (611) is provided on the bottom of the coupling platform (61); The connecting surface (612) of the inclined groove (611) and the groove bottom surface of the first slide groove (624-1) are parallel to each other, and the angle between the groove bottom surface of the first slide groove (624-1) and the surface of the first slider (622) is greater than 0. The connecting surface (612) is connected to the second slider (614), and the second slider (614) is installed in the first slide groove (624-1); A skirt is provided around the outer periphery of the bottom of the coupling platform (61), and a movable first guide rod (613) is provided on the skirt. The first guide rod (613) is also fixedly connected to the bottom rail (621).

7. A spiral resonator for use in a vacuum cavity according to any one of claims 2 to 6, characterized in that: The power mechanism includes: a vacuum bellows, a guide assembly and a power output assembly, wherein the vacuum bellows and the power output assembly are both mounted on the guide assembly, The power output end of the power output assembly penetrates into the vacuum bellows and is sealed by the vacuum bellows, and also penetrates into the vacuum cavity to be transmission-connected with the mutual inductance adjustment mechanism (6), and the guide assembly is mounted on the vacuum cavity.

8. A spiral resonator for use in a vacuum cavity according to claim 5 or 6, characterized in that: The connecting assembly (9) comprises a connecting rod (91), a sleeve (92) and a connecting block (93); the connecting rod (91) is connected to the first slider (622); the connecting rod (91) is provided with the sleeve (92); the sleeve (92) is sleeved on the connecting rod (91); the connecting block (93) is provided on the top of the sleeve (92); a threaded hole (94) is provided on the connecting block (93); the threaded hole (94) is connected to the power output end of the power mechanism (5).

9. The spiral resonator for use in a vacuum cavity according to claim 1, characterized in that: The fine adjustment mechanism is provided between the coupling platform (61) and the first slider (622), and comprises a boss (101), a third guide rod (102) and a third slider (103), wherein: The upper surfaces of the two bottom rails (621) are both provided with the aforementioned bosses (101), and the upper surfaces of the bosses (101) are provided with first sliding grooves; The third sliders (103) are provided on the lower side walls on both sides of the coupling platform (61), the two third sliders (103) are respectively installed in the two first slide grooves, and the first slider (622) is provided with a plurality of the third guide rods (102), and the coupling platform (61) is provided with a plurality of guide rod holes adapted to the third guide rods (102), and the plurality of third guide rods (102) are inserted into the plurality of guide rod holes.

10. The spiral resonator for use in a vacuum cavity according to claim 1, characterized in that: The fine adjustment mechanism comprises a first rack (621-1), a second rack (621-2) and a coaxial double gear (621-3), wherein: The first rack (621-1) is provided on the bottom rail (621), the second rack (621-2) is provided on the coupling platform (61), a plurality of fourth guide rods (104) are provided on the first slider (622), a plurality of guide rod holes adapted to the fourth guide rods (104) are provided on the coupling platform (61), the plurality of fourth guide rods (104) are inserted into the plurality of guide rod holes, a coaxial double gear (621-3) is provided on one of the fourth guide rods (104), the coaxial double gear (621-3) is engaged with the first rack (621-1), and can also engage with the second rack (621-2) when the first slider (622) moves to a specified position.

11. The spiral resonator for use in a vacuum cavity according to claim 7, characterized in that: The guide assembly comprises a fixing member (51), a second guide rod (52) and a guide plate (53), wherein the fixing member (51) and the fixing plate (58) are fixedly connected via a plurality of the second guide rods (52), one end of the vacuum bellows (50) is fixed to the fixing member (51), and one end of the vacuum bellows (50) is arranged on the second guide rod (52) and can slide on the second guide rod (52).

12. The spiral resonator for use in a vacuum cavity according to claim 11, characterized in that: The power output assembly includes a first push plate (54), a threaded rod (55), a nut (56), a second push plate (57), a fixing plate (58) and a telescopic rod (59), wherein: A flange (571) connected to the second push plate (57) is connected to the other end of the vacuum bellows (50), and the first push plate (54) is connected to the flange (571). The guide plate (53) is sleeved on the plurality of second guide rods (52) and fixedly connected to the flange (571). One end of the threaded rod (55) passes through the fixed plate (58) and is fixedly connected to the first push plate (54). The other end of the threaded rod (55) is sleeved with the nut (56), which can be limited by the fixed plate (58). The telescopic rod (59) and the second push plate (57) are located inside the vacuum bellows (50), and one end of the telescopic rod (59) is connected to the second push plate (57). The other end of the telescopic rod (59) serves as the power output end of the power mechanism (5).

13. A spiral resonator for use in a vacuum cavity, characterized in that: The helical resonator comprises: a mounting base (2), a housing (3), a power mechanism (5), a mutual inductance adjustment mechanism (6), a main coil (7) and a coupling coil (8), wherein: The mounting base (2) is mounted in a vacuum chamber (1) of the ion trap system, and the housing (3) is fixed on the mounting base (2) and is used to fix the helical resonator; The mutual inductance adjustment mechanism (6), the main coil (7) and the coupling coil (8) are all arranged inside the housing (3); The power mechanism (5) is arranged outside the vacuum chamber (1), and the power output end of the power mechanism (5) penetrates into the interior of the vacuum chamber (1) to drive the mutual inductance adjustment mechanism to adjust the relative distance between the main coil (7) and the coupling coil (8), thereby changing the output impedance of the spiral resonator; The mutual inductance adjustment mechanism (6) includes a moving component (62) and a coupling platform (61) disposed on the moving component (62). The bottom of the coupling platform (61) is disposed between two bottom rails (621) and connected to the output end of the power mechanism. A movable guide column (615) is disposed around the outer periphery of the bottom of the coupling platform (61), and the guide column (615) is fixedly connected to the bottom rail (621).

14. The spiral resonator for use in a vacuum cavity according to claim 13, characterized in that: The power mechanism includes: a vacuum bellows, a guide assembly and a power output assembly, wherein the vacuum bellows and the power output assembly are both mounted on the guide assembly, The power output end of the power output assembly penetrates into the vacuum bellows and is sealed by the vacuum bellows, and also penetrates into the vacuum cavity to be transmission-connected with the mutual inductance adjustment mechanism (6), and the guide assembly is mounted on the vacuum cavity.

15. The spiral resonator for use in a vacuum cavity according to claim 14, characterized in that: The guide assembly comprises a fixing member (51), a second guide rod (52) and a guide plate (53), wherein the fixing member (51) and the fixing plate (58) are fixedly connected via a plurality of the second guide rods (52), one end of the vacuum bellows (50) is fixed to the fixing member (51), and one end of the vacuum bellows (50) is arranged on the second guide rod (52) and can slide on the second guide rod (52).

Images