Loudspeaker structure

Abstract

The invention relates to the technical field of acoustoelectric, and discloses a loudspeaker structure, the loudspeaker structure comprises a substrate, a vibrating diaphragm, a driving part, a first transmission part and a second transmission part, the driving part comprises a first driving part and a second driving part, the first driving part extends from the first end of the substrate to the second end, and the second driving part extends from the first end of the substrate to the second end of the substrate. The first driving part extends from the first end to the second end, at least part of the first driving part is located above the cavity, the second driving part extends from the second end to the first end, at least part of the second driving part is located above the cavity, the first driving part and the second driving part located above the cavity are arranged in a crossed mode, and the first transmission component makes contact with the first driving part and the vibrating diaphragm. And the second transmission part is respectively contacted with the second driving part and the vibrating diaphragm.

Description

Technical Field

[0001] The present invention relates to the field of acoustic and electrical technology, and in particular to a loudspeaker structure. Background Art

[0002] A speaker is a transducer device that converts electrical signals into sound signals. The working principle of a speaker is that audio electrical energy vibrates the cone or diaphragm through electromagnetic, piezoelectric or electrostatic effects and resonates with the surrounding air to produce sound.

[0003] Sound is formed by the fluctuating changes in air pressure. The speaker pushes a certain amount of air to cause pressure changes and thus emits a certain amount of sound (sound pressure). Currently, based on the miniaturized structural design, the vibration amplitude of the diaphragm in the speaker is limited, which in turn limits the sound pressure level of the speaker. Summary of the invention

[0004] In view of the above problems, the main purpose of the present invention is to provide a speaker structure, which, on the basis of not changing the existing miniaturization, makes the length of the driving component in the speaker structure longer, and thus the vibration amplitude is larger, which drives the vibration amplitude of the diaphragm to be larger, thereby improving the sound pressure level.

[0005] To achieve the above-mentioned purpose, the technical solution of the present invention provides a loudspeaker structure, which includes: a base, the base having a first surface and a second surface arranged opposite to each other, the base having a first end and a second end arranged opposite to each other along a first direction; a diaphragm, the diaphragm is fixed to the first surface of the base, the diaphragm and the base are surrounded to form a cavity; a driving component, the driving component is located on the second surface, the driving component drives the diaphragm to vibrate; the driving component includes a first driving part and a second driving part, the first driving part extends from the first end to the second end, and at least a part of the first driving part is located above the cavity, and the second driving part A driving part extends from the second end to the first end, and at least a portion of the second driving part is located above the cavity, wherein the first driving part and the second driving part located above the cavity are arranged crosswise with each other; a first transmission component, the first transmission component is located in the cavity, the first transmission component corresponds to the first driving part, one end of the first transmission component contacts the first driving part, and the other end contacts the diaphragm; a second transmission component, the second transmission component is located in the cavity, the second transmission component corresponds to the second driving part, one end of the second transmission component contacts the second driving part, and the other end contacts the diaphragm.

[0006] Preferably, the first driving part includes: a first fixed part, which is in contact with the first end; a plurality of first suspension parts arranged at intervals, one end of each of the first suspension parts is connected to the first fixed part, and the other end of each of the first suspension parts is in contact with the first transmission part; the second driving part includes: a second fixed part, which is in contact with the second end, a plurality of second suspension parts arranged at intervals, one end of each of the second suspension parts is connected to the second fixed part, and the other end of each of the second suspension parts is in contact with the second transmission part; a plurality of the first suspension parts and a plurality of the second suspension parts are arranged crosswise with each other.

[0007] Preferably, the first transmission component is in contact with an end portion of the first suspension portion away from the first end; and the second transmission component is in contact with an end portion of the second suspension portion away from the second end.

[0008] Preferably, the orthographic projection of the first suspension portion on the diaphragm and the second end have a first preset range; the orthographic projection of the second suspension portion on the diaphragm and the first end have a second preset range.

[0009] Preferably, the diaphragm includes a first part, a second part and a third part which are connected in sequence, the first part is located on the first surface, the third part is in contact with the first transmission component and the second transmission component, and the second part is located between the first part and the third part; the second part protrudes from the first part in a direction toward the first driving part or protrudes from the first part in a direction away from the first driving part.

[0010] Preferably, the first part, the second part and the third part are an organic film formed in one piece.

[0011] Preferably, at least one of the first portion and the second portion is an organic film, and the third portion is a rigid film.

[0012] Preferably, it further comprises: a reinforcing diaphragm, wherein the reinforcing diaphragm is located on a side of the third portion away from the cavity.

[0013] Preferably, the first driving part comprises a stacked support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a protective layer.

[0014] The beneficial effects of the present invention are as follows: a driving component indirectly in contact with the diaphragm is provided in the speaker structure of the present invention, the driving component includes a first driving part and a second driving part, and the first driving part and the second driving part located above the cavity are cross-arranged with each other, so that within a limited area, the limited length of the first driving part and the second driving part is longer, that is, by maximally extending the beam length of the cantilever part, the cantilever end of the first driving part and the cantilever end of the second driving part can obtain a larger up and down movement amplitude, so a chip of the same size can push a larger volume of air and produce a higher sound pressure level. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0016] Figure 1 is a schematic structural diagram of a loudspeaker structure according to a first embodiment of the present invention;

[0017] Figure 2 yes Figure 1 A top view of the loudspeaker structure shown;

[0018] Figure 3 yes Figure 1 a bottom view of the loudspeaker structure shown;

[0019] Figure 4 yes Figure 1 A partial cross-sectional view of a first driving portion in the loudspeaker structure shown;

[0020] Figure 5 yes Figure 1 A cross-sectional view of the vibration state of the loudspeaker structure shown;

[0021] Figure 6 is a bottom view of a loudspeaker structure according to a second embodiment of the present invention;

[0022] Figure 7 yes Figure 6 A cutaway perspective view of the loudspeaker structure shown. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it can be understood by those skilled in the art that in the embodiments of the present invention, many technical details are provided to enable readers to better understand the present invention. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed in the present invention can be implemented.

[0024] In the embodiments of the present invention, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction.

[0025] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in the present invention can be understood according to specific circumstances.

[0026] In addition, the terms "installed", "set", "provided with", "opened", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0028] The following will describe the various embodiments of the present invention in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that, in the various embodiments of the present invention, many technical details are provided in order to enable the reader to better understand the present invention. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present invention can be implemented.

[0029] Combined with reference Figure 1 to Figure 5The first embodiment of the present invention provides a loudspeaker structure, the loudspeaker structure 100 comprises: a substrate 103, the substrate 103 comprises a first surface (not marked) and a second surface (not marked) arranged opposite to each other, the substrate 103 comprises a first end 1031 and a second end 1032 arranged opposite to each other along a first direction X; a diaphragm 101, the diaphragm 101 is fixed to the first surface of the substrate 103, the diaphragm 101 and the substrate 103 are surrounded to form a cavity 104; a driving component 110, the driving component 110 is located on the second surface, the driving component 110 drives the diaphragm 101 to vibrate; the driving component 110 comprises a first driving portion 111 and a second driving portion 112, the first driving portion 111 extends from the first end 1031 to the second end 1032, and at least a portion of the first driving portion 111 is located in the cavity 104. 4, the second driving portion 112 extends from the second end 1032 to the first end 1031, and at least a portion of the second driving portion 112 is located above the cavity 104, wherein the first driving portion 111 and the second driving portion 112 located above the cavity 104 are arranged crosswise with each other; a first transmission component 105, the first transmission component 105 is located in the cavity 104, the first transmission component 105 corresponds to the first driving portion 111, one end of the first transmission component 105 contacts the first driving portion 111, and the other end contacts the diaphragm 101; a second transmission component 106, the second transmission component 106 is located in the cavity 104, the second transmission component 106 corresponds to the second driving portion 112, one end of the second transmission component 106 contacts the second driving portion 112, and the other end contacts the diaphragm 101.

[0030] The base 103 of the speaker structure 100 of this embodiment is set to a square ring shape, and the diaphragm 101 and the base 103 are surrounded to form a cavity 104, and the cavity 104 runs through the base 103 as a vibration space of the speaker structure 100. Optionally, the base 103 can be a single crystal silicon base or other bases that meet design requirements.

[0031] Among them, when the base 103 is set to a square ring shape, the inner side and the connection of the base 103 are set to be chamfered, especially rounded chamfers, which can reduce the sharp structure inside the speaker structure 100, which is beneficial to the assembly of the product, and at the same time can avoid the sharp structure on the base 103 from contacting and damaging other internal components of the speaker structure 100.

[0032] The first driving part 111 includes: a first fixing part 1111, the first fixing part 1111 is in contact with the first end 1031; a plurality of first suspension parts 1112 are arranged at intervals along the second direction Y, one end of each first suspension part 1112 is connected to the first fixing part 1111, and the other end of each first suspension part 1112 is in contact with the first transmission component 105. A plurality of first suspension parts 1112 are provided, and each first suspension part 1112 can be used as a deformation area of ​​the first driving part 111, driving the first transmission component 105 and causing the diaphragm 101 to deform. The plurality of first suspension parts 1112 provide forces to multiple areas of the diaphragm 101, and the accumulated forces are relatively large, so that the vibration amplitude of the diaphragm 101 is large and the sound generated is large. Under a limited vibration area, the sound pressure level can be increased by increasing the effective amplitude.

[0033] The second driving part 112 includes: a second fixing part 1121, the second fixing part 1121 is in contact with the second end 1032, a plurality of second suspension parts 1122 arranged at intervals, one end of each second suspension part 1122 is connected to the second fixing part 1121, and the other end of each second suspension part 1122 is in contact with the second transmission component 106; a plurality of first suspension parts 1112 and a plurality of second suspension parts 1122 are arranged crosswise. Based on the crosswise arrangement of the first suspension parts 1112 and the second suspension parts 1122, within a limited area, the limited lengths of the first driving part 111 and the second driving part 112 are longer, and thus the vibration amplitudes of the first driving part 111 and the second driving part 112 are larger, driving the vibration amplitude of the diaphragm 101 to be larger, thereby improving the sound pressure level.

[0034] The first transmission component 105 contacts the end of the first suspension part 1112 away from the first end 1031. In this way, the vibration arm driven by the first driving part 111 is the length of the first driving part 111, and the vibration amplitude is also large, so that the diaphragm 101 is greatly deformed, thereby pushing the air and providing a higher sound pressure.

[0035] The second transmission component 106 contacts the end of the second suspension portion 1122 away from the second end 1032. The vibration arm of the second driving portion 112 is also the length of the second driving portion 112, which can improve the sound pressure level performance.

[0036] The orthographic projection of the first suspension part 1112 on the diaphragm 101 has a first preset range L1 with the second end 1032. Thus, there is a certain gap between the first suspension part 1112 and the base 103, which can prevent the first suspension part 1112 from contacting the base 103 and generating noise, thereby causing errors in the sound.

[0037] The first preset range L1 is 10 μm to 2000 μm. Optionally, the first preset range L1 may be 50 μm to 1000 μm. Further, the first preset range L1 may be 50 μm, 100 μm, 200 μm, 300 μm, 400 μm, 500 μm, 600 μm, 700 μm, 800 μm, 900 μm or 1000 μm.

[0038] The orthographic projection of the second suspension portion 1122 on the diaphragm 101 and the first end 1031 have a second preset range L2. The second preset range L2 can improve the accuracy of the sound.

[0039] The second preset range L2 is 10 μm to 2000 μm. Optionally, the second preset range L2 may be 50 μm to 1000 μm. Further, the second preset range L2 may be 50 μm, 80 μm, 130 μm, 250 μm, 410 μm, 520 μm, 610 μm, 710 μm, 820 μm, 910 μm or 1000 μm.

[0040] Optionally, the distance between the orthographic projection of the first suspension portion 1112 on the diaphragm 101 and the second end 1032 is equal to the distance between the orthographic projection of the second suspension portion 1122 on the diaphragm 101 and the first end 1031 .

[0041] Optionally, the first suspension part 1112 and the base 103 may be fixed by a spring structure to avoid a large movement of the first suspension part 1112. The second suspension part 1122 and the base 103 may be fixed by a spring structure to avoid a large movement of the second suspension part 1122.

[0042] The diaphragm 101 includes a first part 1011, a second part 1012 and a third part 1013 which are connected in sequence, the first part 1011 is located on the first surface, the third part 1013 is in contact with the first transmission component 105 and the second transmission component 106, and the second part 1012 is located between the first part 1011 and the third part 1013; the second part 1012 protrudes from the first part 1011 in a direction toward the first driving part 111 or protrudes from the first part 1011 in a direction away from the first driving part 111. In this way, since the second part 1012 protrudes from the first part 1011 toward the first driving part 111 or protrudes from the first part 1011 toward the direction away from the first driving part 111, that is, the cross-section of the second part 1012 is an arched fold ring with a longer circumference, under the same Poisson's ratio, the arched deformation is larger than the flat one, so that the first suspension part 1112 is freer and can obtain a larger amplitude, thereby allowing the diaphragm 101 to push a larger volume of air and produce a higher sound pressure level.

[0043] The first part 1011, the second part 1012 and the third part 1013 are an organic film formed in one piece. The organic film may be made of polydimethylsiloxane (PDMS) or polyimide.

[0044] Optionally, the third part 1013 further has a reinforcing diaphragm 1014 on one side away from the cavity 104, and the reinforcing diaphragm 1014 is fixedly connected to the overlapping portion of the third part 1013. The yield strength of the reinforcing diaphragm 1014 is greater than the yield strength of the third part 1013, thereby improving the mechanical strength of the diaphragm 101 and extending the life of the diaphragm 101.

[0045] refer to Figure 4 The first driving unit 111 includes a stacked support layer 125, a bottom electrode layer 124, a piezoelectric layer 123, a top electrode layer 122 and a protective layer 121. The material of the support layer 125 can be SOI (Silicon On Insulato, an insulating material of crystalline silicon). The material of the support layer 125 can be silicon dioxide or other insulating materials. The material of the bottom electrode layer 124 can be platinum.

[0046] The material of the piezoelectric layer 123 can be PZT (Lead Zirconate Titanate). The PZT film has a high piezoelectric constant, which can improve the electromechanical conversion efficiency and the speaker driving speed. The material of the top electrode layer 122 can be gold and platinum alloy. The material of the protective layer 121 can be silicon nitride.

[0047] An insulating layer 109 is provided between the first driving part 111 and the substrate 103 . The insulating layer 109 is made of silicon dioxide, which can reduce the parasitic capacitance between the first driving part 111 and the substrate 103 compared with the parasitic capacitance of a structure without an insulating layer.

[0048] The second driving unit may also include a stacked support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a protective layer. There is also an insulating layer between the second driving unit and the substrate. The stacked structure of the second driving unit is the same as the stacked structure of the first driving unit, which will not be described here. For details, please refer to the stacked structure of the first driving unit.

[0049] refer to Figure 5 Under the drive of the audio signal, the first driving part 111 causes the cantilever where the first suspension part 1112 is located to move up and down, thereby driving the first transmission component 105 to vibrate, and the diaphragm 101 connected to the first transmission component 105 also moves together, thereby generating sound pressure.

[0050] Driven by the audio signal, the second driving part 112 moves the cantilever where the second suspension part 1122 is located up and down, thereby driving the second transmission part 106, and the diaphragm 101 connected to the second transmission part 106 also moves together, thereby generating sound pressure. In this embodiment, by maximally extending the beam length of the cantilever part, the end of the cantilever can obtain a larger up and down movement amplitude, so the chip with the same size can push a larger volume of air and generate a higher sound pressure level.

[0051] The loudspeaker structure 100 provided by the present invention is provided with a driving component 110 that is indirectly in contact with the diaphragm 101, and the driving component 110 includes a first driving part 111 and a second driving part 112, and the first driving part 111 and the second driving part 112 located above the cavity 104 are cross-arranged with each other, so that within a limited area, the limited length of the first driving part 111 and the second driving part 112 is longer, that is, by maximally extending the beam length of the cantilever part, the cantilever end of the first driving part 111 and the cantilever end of the second driving part 112 can obtain a larger up and down movement amplitude, so the chip of the same size can push a larger volume of air and produce a higher sound pressure level.

[0052] See also Figure 6-7 The second embodiment of the present invention provides a speaker structure, which is different from the first embodiment in that the first part, the second part and the third part of the diaphragm in the first embodiment are made of the same material, while the material of the third part of the diaphragm in the second embodiment is different from the materials of the first part and the second part, and the other features are the same. The same parts as the above embodiments are not described in detail here.

[0053] It should be noted that, since the first embodiment and the second embodiment differ only in the diaphragm, the structural schematic diagram and top view of the speaker structure are not shown, and only the bottom view and the cross-sectional stereogram of the speaker structure are shown. The features of the speaker structure provided in the second embodiment that are not shown can refer to the first embodiment.

[0054] refer to Figure 6-7The speaker structure 200 includes: a substrate 203, the substrate 203 has a first surface (not marked) and a second surface (not marked) arranged opposite to each other, and the substrate 203 has a first end and a second end arranged opposite to each other along a first direction; a diaphragm 201, the diaphragm 201 is fixed to the first surface of the substrate 203, and the diaphragm 201 and the substrate 203 are surrounded to form a cavity 204; a driving component, the driving component is located on the second surface, and the driving component drives the diaphragm 201 to vibrate; the driving component includes a first driving part 211 and a second driving part, the first driving part 211 extends from the first end to the second end, and at least a part of the first driving part 211 is located above the cavity 204, and the second The driving part extends from the second end to the first end, and at least part of the second driving part is located above the cavity 204, wherein the first driving part 211 located above the cavity 204 and the second driving part are arranged crosswise with each other; the first transmission component 205, the first transmission component 205 is located in the cavity 204, the first transmission component 205 corresponds to the first driving part, one end of the first transmission component 205 contacts the first driving part 211, and the other end contacts the diaphragm 201; the second transmission component, the second transmission component is located in the cavity 204, the second transmission component corresponds to the second driving part, one end of the second transmission component contacts the second driving part, and the other end contacts the diaphragm 201.

[0055] The diaphragm 201 includes a first part 2011, a second part 2012 and a third part 2013 which are connected in sequence, the first part 2011 is located on the third surface, the third part 2013 is in contact with the first transmission component 205 and the second transmission component, and the second part 2012 is located between the first part 2011 and the third part 2013; the second part 2012 protrudes from the first part 2011 in a direction toward the first driving part 211 or protrudes from the first part 2011 in a direction away from the first driving part 211.

[0056] At least one of the first part 2011 and the second part 2012 is an organic film, and the third part 2013 is a rigid film; the third part 2013 is fixedly connected to a portion of the second part 2012. The third part 2013 has a greater rigidity than the organic film, so that the diaphragm area corresponding to the third part 2013 can move up and down flatly as a whole without other vibration shapes.

[0057] The loudspeaker structure 200 provided by the present invention is provided with a driving component that is indirectly in contact with the diaphragm 201, and the driving component includes a first driving part 211 and a second driving part, and the first driving part 211 and the second driving part located above the cavity 204 are cross-arranged with each other, so that within a limited area, the limited length of the first driving part 211 and the second driving part is longer, that is, by maximally extending the beam length of the cantilever part, the cantilever end of the first driving part 211 and the cantilever end of the second driving part can obtain a larger up and down movement amplitude, so the chip of the same size can push a larger volume of air and produce a higher sound pressure level.

[0058] Those skilled in the art will appreciate that the above-mentioned embodiments are specific embodiments for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A speaker structure, characterized in that: include: A substrate, the substrate having a first surface and a second surface arranged opposite to each other, and the substrate having a first end and a second end arranged opposite to each other along a first direction; A diaphragm, wherein the diaphragm is fixed to the first surface of the substrate, and the diaphragm and the substrate are arranged to form a cavity; a driving component, the driving component is located on the second surface, and the driving component drives the diaphragm to vibrate; the driving component includes a first driving portion and a second driving portion, the first driving portion extends from the first end to the second end, and at least a portion of the first driving portion is located above the cavity, the second driving portion extends from the second end to the first end, and at least a portion of the second driving portion is located above the cavity, wherein the first driving portion and the second driving portion located above the cavity are arranged crosswise with each other; a first transmission component, the first transmission component is located in the cavity, the first transmission component corresponds to the first driving part, one end of the first transmission component is in contact with the first driving part, and the other end of the first transmission component is in contact with the diaphragm; A second transmission component, wherein the second transmission component is located in the cavity, the second transmission component corresponds to the second driving portion, one end of the second transmission component contacts the second driving portion, and the other end contacts the diaphragm.

2. The loudspeaker structure according to claim 1, characterized in that: The first driving part includes: a first fixing part, the first fixing part is in contact with the first end; a plurality of first suspension parts arranged at intervals, one end of each of the first suspension parts is connected to the first fixing part, and the other end of each of the first suspension parts is in contact with the first transmission component; The second driving part includes: a second fixed part, the second fixed part is in contact with the second end, and a plurality of second suspension parts are arranged at intervals, one end of each of the second suspension parts is connected to the second fixed part, and the other end of each of the second suspension parts is in contact with the second transmission component; a plurality of the first suspension parts and a plurality of the second suspension parts are arranged crosswise with each other.

3. The loudspeaker structure according to claim 2, characterized in that: The first transmission component contacts an end portion of the first suspension portion away from the first end; and the second transmission component contacts an end portion of the second suspension portion away from the second end.

4. The speaker structure according to claim 2, characterized in that: The orthographic projection of the first suspension portion on the diaphragm and the second end have a first preset range; the orthographic projection of the second suspension portion on the diaphragm and the first end have a second preset range.

5. The loudspeaker structure according to claim 4, characterized in that: The first preset range is 10um to 2000um; the second preset range is 10um to 2000um.

6. The loudspeaker structure according to claim 1, characterized in that: The diaphragm includes a first part, a second part and a third part which are connected in sequence, the first part is located on the first surface, the third part is in contact with the first transmission component and the second transmission component, and the second part is located between the first part and the third part; the second part protrudes from the first part toward the first driving part or protrudes from the first part toward a direction away from the first driving part.

7. The loudspeaker structure according to claim 6, characterized in that: The first part, the second part and the third part are organic films formed in one piece.

8. The loudspeaker structure according to claim 6, characterized in that: At least one of the first portion and the second portion is an organic film, and the third portion is a rigid film.

9. The loudspeaker structure according to claim 6, characterized in that: Also includes: A reinforced diaphragm is located at a side of the third portion away from the cavity.

10. The loudspeaker structure according to claim 1, characterized in that: The first driving part includes a stacked support layer, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a protective layer.

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