Filter cloth, manufacturing method thereof and chemical filter
By embedding zeolite molecular sieve into the fiber fabric to form a composite filter cloth, the problems of low adsorption efficiency and high cost in the prior art are solved, and efficient adsorption and regeneration of filter cloth are achieved.
Patent Information
- Application Number
- CN202411688965.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-25
- Publication Date
- 2025-04-01
AI Technical Summary
Chemical filters used in existing clean rooms for controlling insoluble organic gases (RC) are costly and have a short lifespan, cannot be recycled and used, and have low adsorption efficiency.
A filter cloth composed of zeolite molecular sieve and fiber fabric is used to embed the zeolite molecular sieve into the fiber fabric through a needle puncture process to form a filter cloth with good breathability and efficient adsorption ability.
Highly efficient adsorption of low-concentration RC gas is achieved, and the regeneration and reuse of the filter cloth is achieved through desorption of inorganic media, reducing operating costs.
Smart Images
Figure CN119733306A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of clean rooms, and in particular to a filter cloth and a manufacturing method thereof, and a chemical filter. Background Art
[0002] Photolithography is a key process in chip manufacturing, and this process has very strict requirements on the cleanliness of the gas in the environment. During the photolithography process, pollutants in the gas will affect the efficiency of photolithography and the yield of the chip. Among them, insoluble organic gases (Refractory Compounds, referred to as RC) are one of the most difficult gas pollutants to deal with and are the focus of environmental gas control in photolithography machines. At present, the concentration of RC is mainly controlled by densely pleated chemical filters composed of non-woven fabrics and activated carbon filter materials in clean rooms. This type of chemical filter is expensive, short-lived, and cannot be recycled, making the operating cost very high. In addition, due to the low concentration of RC, adsorption is difficult, resulting in low adsorption efficiency. Summary of the invention
[0003] The present application discloses a filter cloth and a manufacturing method thereof, and a chemical filter, which can realize efficient adsorption of RC gas and can be regenerated and reused.
[0004] In order to achieve the above objectives, this application provides the following technical solutions:
[0005] In a first aspect, the present application provides a filter cloth, comprising a zeolite molecular sieve and a fiber fabric;
[0006] The zeolite molecular sieve is uniformly dispersed inside the fiber fabric, and the fiber fabric covers the zeolite molecular sieve; the fiber fabric is interwoven with flame-retardant fibers.
[0007] The filter cloth comprises a zeolite molecular sieve and a fiber fabric, that is, the filter cloth is composited by the zeolite molecular sieve and the fiber fabric. The zeolite molecular sieve is used as an adsorbent, and its particles have micropores, which can make the gas molecules entering the micropores adsorbed in the micropores by a large molecular force, and are not easy to desorb, so as to achieve the adsorption of pollutants in the gas. The fiber fabric is used as a matrix to carry the zeolite molecular sieve, and the zeolite molecular sieve is evenly dispersed inside the fiber fabric, and the fiber fabric is coated with the zeolite molecular sieve; the fiber fabric is interwoven with flame-retardant fibers. The composite of the zeolite molecular sieve and the fiber fabric can make the filter cloth have good air permeability, thereby increasing the flow time of the gas molecules in the filter cloth, and then realizing the adsorption of the gas molecules by the zeolite molecular sieve in the filter cloth. The structure of the filter cloth of the present application can achieve efficient adsorption of low-concentration gas, and the zeolite molecular sieve is an inorganic medium, which can easily achieve the desorption of pollutant gas and realize the regeneration and reuse of the filter cloth.
[0008] In some embodiments, the content of the zeolite molecular sieve in the filter cloth is 500 g / m 2-1000g / m 2 .
[0009] In some embodiments, the zeolite molecular sieve has a pore size of 30 mesh to 60 mesh.
[0010] In some embodiments, the pore diameter of the fiber fabric is 0.1 mm-0.25 mm.
[0011] In some embodiments, the filter cloth has a thickness of 1.5 mm to 3.5 mm.
[0012] In some embodiments, the flame retardant fiber includes one of glass fiber, ceramic fiber or metal fiber.
[0013] In a second aspect, the present application provides a method for manufacturing a filter cloth, comprising:
[0014] embedding zeolite molecular sieves into fiber fabrics;
[0015] The fiber fabric is needle-punched by a needle-punching process to obtain a filter cloth.
[0016] In some embodiments, after the needle punching process, the pores of the flame retardant fiber are smaller than the particle size of the zeolite molecular sieve.
[0017] In some embodiments, before the needling process, the pore diameter of the fiber fabric is 0.25 mm-0.65 mm; after the needling process, the pore diameter of the fiber fabric is 0.1 mm-0.25 mm.
[0018] In a third aspect, the present application provides a chemical filter comprising the filter cloth as described in the first aspect. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 A schematic diagram of the structure of a filter cloth provided in an embodiment of the present application;
[0020] Figure 2 A schematic diagram of a process for manufacturing a filter cloth provided in an embodiment of the present application;
[0021] Figure 3 A schematic diagram of a manufacturing process of a filter cloth provided in an embodiment of the present application;
[0022] Figure 4 A schematic diagram of a manufacturing process of a filter cloth provided in an embodiment of the present application;
[0023] Icons: 1. Zeolite molecular sieve; 2. Fiber fabric; 3. Needle-punched base plate; 4. Needle-punched board. DETAILED DESCRIPTION
[0024] The following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application. Among them, in the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in the text is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" refers to two or more than two.
[0025] The terms "first" and "second" are used for descriptive purposes only and should not be understood as suggesting or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.
[0026] First, as Figure 1 As shown, an embodiment of the present application provides a filter cloth, including a zeolite molecular sieve 1 and a fiber fabric 2;
[0027] The zeolite molecular sieve 1 is uniformly dispersed inside the fiber fabric 2, and the fiber fabric 2 covers the zeolite molecular sieve 1; the fiber fabric 2 is interwoven with flame-retardant fibers.
[0028] The filter cloth comprises a zeolite molecular sieve 1 and a fiber fabric 2, that is, the filter cloth is composited by the zeolite molecular sieve 1 and the fiber fabric 2. The zeolite molecular sieve 1 is used as an adsorbent, and its particles have micropores, which can make the gas molecules entering the micropores adsorbed in the micropores by a large molecular force and not easy to desorb, so as to achieve the adsorption of pollutants in the gas. The fiber fabric 2 is used as a matrix to carry the zeolite molecular sieve 1, and the zeolite molecular sieve 1 is evenly dispersed inside the fiber fabric 2, and the fiber fabric 2 covers the zeolite molecular sieve 1; the fiber fabric 2 is interwoven with flame-retardant fibers, and the flame-retardant fibers can be flame-retardant fluffy cotton. The composite of the zeolite molecular sieve 1 and the fiber fabric 2 can make the filter cloth have good air permeability, thereby increasing the flow time of gas molecules in the filter cloth, and then achieving the adsorption of gas molecules by the zeolite molecular sieve 1 in the filter cloth. The structure of the filter cloth in the embodiment of the present application can achieve efficient adsorption of low-concentration gases to achieve the purpose of effectively treating RC in the clean room; and the zeolite molecular sieve 1 and the flame-retardant fiber are both inorganic media, which can easily achieve the desorption of pollutant gases and realize the regeneration and reuse of the filter cloth.
[0029] In some embodiments, the content of zeolite molecular sieve 1 in the filter cloth is 500 g / m 2 -1000g / m 2 .
[0030] In a possible implementation, the content of zeolite molecular sieve 1 per square meter of filter cloth can be 500g-1000g, for example, 500g, 510g, 520g, 530g, 540g, 550g, 560g, 570g, 580g, 590g, 600g, 620g, 640g, 660g, 680g, 700g, 750g, 800g, 850g, 900g, 950g, 1000g, etc. The content of zeolite molecular sieve 1 in the filter cloth of the embodiment of the present application is relatively high, which is conducive to the efficient adsorption of pollutant gases, so as to achieve the purpose of effectively treating RC in the clean room.
[0031] In some embodiments, the pore size of the zeolite molecular sieve 1 is 30 mesh to 60 mesh.
[0032] In one possible implementation, the pore size of the zeolite molecular sieve 1 is 30-60 meshes, such as 30 meshes, 35 meshes, 40 meshes, 45 meshes, 50 meshes, 55 meshes, 60 meshes, etc. In order to achieve the adsorption of gas molecules, the micropore size of the zeolite molecular sieve 1 needs to be slightly larger than the particle size of the gas to be adsorbed. For example, the micropore size of the zeolite molecular sieve 1 is 20%-30% larger than the particle size of the gas to be adsorbed. The embodiment of the present application can select a zeolite molecular sieve 1 with a suitable micropore size according to the different target adsorbed gases to achieve efficient adsorption of the corresponding pollutant gases.
[0033] In some embodiments, the pore diameter of the fiber fabric 2 is 0.1 mm-0.25 mm.
[0034] In one possible implementation, the pore diameter of the fiber fabric 2 is 0.1 mm-0.25 mm, for example, 0.1 mm, 0.12 mm, 0.14 mm, 0.16 mm, 0.18 mm, 0.2 mm, 0.21 mm, 0.22 mm, 0.23 mm, 0.24 mm, 0.25 mm, etc. Figure 1 As shown, the pore size of the fiber fabric 2 is smaller than the particle size of the zeolite molecular sieve 1. In other words, the fiber fabric 2 uses friction to tightly coat the zeolite molecular sieve 1, and the fiber fabric 2 is tightly combined with the zeolite molecular sieve 1, so that the zeolite molecular sieve 1 is not easy to fall off, thereby making the structure of the filter cloth more stable.
[0035] In some embodiments, the filter cloth has a thickness of 1.5 mm to 3.5 mm.
[0036] In one possible implementation, the thickness of the filter cloth is 1.5-3.5 mm, for example, 1.5 mm, 1.6 mm, 1.7 mm, 1.8 mm, 1.9 mm, 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, 3.1 mm, 3.2 mm, 3.3 mm, 3.4 mm, 3.5 mm, etc. The filter cloth of the embodiment of the present application has a larger thickness, which can carry more zeolite molecular sieves 1 on the one hand, and increase the flow time of gas molecules in the filter cloth on the other hand, thereby facilitating efficient adsorption of pollutant gases.
[0037] In some embodiments, the flame retardant fiber includes but is not limited to one of glass fiber, ceramic fiber or metal fiber. Since the zeolite molecular sieve 1 and the flame retardant fiber in the embodiment of the present application are both inorganic media, it is easy to desorb pollutant gases and regenerate and reuse the filter cloth.
[0038] Second, as Figure 2 As shown, the embodiment of the present application provides a method for manufacturing a filter cloth, comprising the following steps:
[0039] S201, embedding the zeolite molecular sieve into the fiber fabric;
[0040] S202, using a needle punching process to punch the fiber fabric to obtain a filter cloth.
[0041] like Figure 3 and Figure 4 As shown, the method for making the filter cloth of the embodiment of the present application is specifically as follows: first, a fiber fabric 2 with suitable pores is selected according to the target adsorbed gas; then, a zeolite molecular sieve 1 with a matching mesh size is sprinkled into the fiber fabric 2; then, the two are placed on a needle punching bottom plate 3, and the fiber fabric 2 is needle punched by a needle punching plate 4. During the needle punching process, the fiber fabric 2 becomes dense from fluffy, and the zeolite molecular sieve 1 is evenly dispersed during the needle punching process. The fiber fabric 2 tightly wraps the zeolite molecular sieve 1 through friction, and the two are tightly combined to finally obtain a filter cloth. Among them, the fiber fabric 2 can be a flame retardant fiber. The composite of the zeolite molecular sieve 1 and the fiber fabric 2 in the filter cloth of the embodiment of the present application has the advantages of high processing efficiency, low pollution, low energy consumption, and simple operation. The filter cloth obtained by the needle punching process has low air permeability resistance, which is beneficial to increase the flow time of gas molecules in the filter cloth, thereby realizing the efficient adsorption of low-concentration gas by the zeolite molecular sieve 1 in the filter cloth, so as to achieve the purpose of effectively treating RC in the clean room; and the zeolite molecular sieve 1 and the flame-retardant fiber are both inorganic media, and the two are composited to form a filter cloth in a non-bonding manner. The filter cloth has good high temperature resistance and flame retardancy, and can easily realize the desorption of pollutant gases and realize the regeneration and reuse of the filter cloth.
[0042] In some embodiments, after the needle punching process, the pores of the flame retardant fiber are smaller than the particle size of the zeolite molecular sieve. In other words, the fiber fabric uses friction to tightly coat the zeolite molecular sieve, the fiber fabric is tightly combined with the zeolite molecular sieve, and the zeolite molecular sieve is not easy to fall off, thereby making the structure of the filter cloth more stable.
[0043] In some embodiments, before the needling process, the pore diameter of the fiber fabric is 0.25 mm-0.65 mm; after the needling process, the pore diameter of the fiber fabric is 0.1 mm-0.25 mm.
[0044] In one possible implementation method, before the needling process, the pore diameter of the fiber fabric is 0.25mm-0.65mm, such as 0.25mm, 0.30mm, 0.35mm, 0.40mm, 0.45mm, 0.50mm, 0.55mm, 0.60mm, 0.65mm, etc. The pores of the fiber fabric before needling are relatively large, which is conducive to embedding the zeolite molecular sieve into the fiber fabric. After the needling process, the pore diameter of the fiber fabric is 0.1mm-0.25mm, such as 0.1mm, 0.12mm, 0.14mm, 0.16mm, 0.18mm, 0.2mm, 0.22mm, 0.24mm, 0.25mm, etc. That is, the fiber fabric can be made denser by the needling process, which is conducive to achieving a tight coating of the zeolite molecular sieve, making the zeolite molecular sieve not easy to fall off, and making the structure of the filter cloth more stable.
[0045] In a third aspect, the present application provides a chemical filter, including the filter cloth of the first aspect. Since the chemical filter includes all the technical features of the filter cloth, the chemical filter also includes all the beneficial effects of the filter cloth, which will not be described in detail here.
[0046] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.
Claims
1. A filter cloth, characterized in that: Including zeolite molecular sieves and fiber fabrics; The zeolite molecular sieve is uniformly dispersed inside the fiber fabric, and the fiber fabric covers the zeolite molecular sieve; the fiber fabric is interwoven with flame-retardant fibers.
2. The filter cloth according to claim 1, characterized in that: The content of the zeolite molecular sieve in the filter cloth is 500 g / m 2 -1000g / m 2 .
3. The filter cloth according to claim 2, characterized in that: The pore size of the zeolite molecular sieve is 30 meshes to 60 meshes.
4. The filter cloth according to claim 3, characterized in that: The pore diameter of the fiber fabric is 0.1 mm-0.25 mm.
5. The filter cloth according to claim 1, characterized in that: The filter cloth has a thickness of 1.5 mm to 3.5 mm.
6. The filter cloth according to claim 1, characterized in that: The flame retardant fiber includes one of glass fiber, ceramic fiber or metal fiber.
7. A method for making a filter cloth, characterized in that: include: embedding zeolite molecular sieves into fiber fabrics; The fiber fabric is needle-punched by a needle-punching process to obtain a filter cloth.
8. The method according to claim 7, characterized in that: After the needle punching process, the pores of the fiber fabric are smaller than the particle size of the zeolite molecular sieve.
9. The manufacturing method according to claim 7, characterized in that: Before the needling process, the pore diameter of the fiber fabric is 0.25 mm-0.65 mm; after the needling process, the pore diameter of the fiber fabric is 0.1 mm-0.25 mm.
10. A chemical filter, characterized in that: The invention comprises the filter cloth according to any one of claims 1 to 6.