An intelligent ultra-clean sampling device suitable for anti-riot areas

Abstract

The present application relates to an intelligent ultra-clean sampling device suitable for anti-riot areas, and relates to the technical field of semiconductor sampling equipment. An intelligent ultra-clean sampling device suitable for anti-riot areas comprises a body and an air intake pipe connected to the body; a filter for intercepting dust is arranged inside the air intake pipe, a settling component for settling dust is arranged inside the air intake pipe, and a cleaning component for cleaning the filter is arranged inside the air intake pipe. The present application has the effect of efficiently filtering the air entering the sampling device.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor sampling equipment, and in particular to an intelligent ultra-high clean sampling equipment suitable for riot-proof areas. Background Art

[0002] Ultra-high clean sampling equipment uses advanced air purification technology to ensure extremely high cleanliness during the sampling process in some extreme environments, thereby ensuring product quality and safety. Therefore, ultra-high clean sampling equipment is in great demand in the fields of semiconductors, electronic manufacturing, biomedicine, etc.

[0003] In the related technology, an intelligent ultra-high clean sampling equipment includes a body for sampling and testing and an induced draft fan connected to the body. An air filter for purifying air, a humidifier and a dehumidifier for regulating the ambient humidity are installed between the induced draft fan and the body. An intelligent control device is installed on the body through a sensor to monitor environmental parameters in real time.

[0004] With respect to the above-mentioned related technologies, the inventors found that: when the sampling environment contains a large amount of dust, in order to reduce the impact of external dust on the sampling results, the air entering the sampling equipment needs to be filtered. However, if only the air filter is used to filter the large amount of dust in the air, the air filter will be overloaded, and the user needs to clean the air filter regularly, so there is room for improvement. Summary of the invention

[0005] In order to efficiently filter the air entering the interior of a sampling device, the present application provides an intelligent ultra-high clean sampling device suitable for riot-proof areas.

[0006] The present application provides an intelligent ultra-high clean sampling device suitable for anti-riot areas, which adopts the following technical solutions: An intelligent ultra-clean sampling device suitable for anti-riot areas comprises a body and an air intake pipe connected to the body; a filter for intercepting dust is arranged inside the air intake pipe, a sedimentation component for settling dust is arranged inside the air intake pipe, and a cleaning component for cleaning the filter is arranged inside the air intake pipe.

[0007] By adopting the above technical scheme, the filter screen filters the dust in the air inside the intake pipe, and the sedimentation component sediments the dust in the air inside the intake pipe, thereby achieving pre-filtration treatment of the air entering the body and reducing the load of the air filter inside the body; and the cleaning component is used to clean the dust stains attached to the filter screen, thereby ensuring the filtering effect of the filter screen, thereby achieving efficient filtration of the air entering the sampling device.

[0008] Preferably, the sedimentation assembly includes a water supply pipe, a fixed pipe, a pressure pump and several groups of spray heads; the water supply pipe is arranged on the outside of the air intake pipe, the fixed pipe is arranged on the inside of the air intake pipe, and the fixed pipe is located on the side of the filter screen away from the machine body; the pressure pump is connected and arranged between the water supply pipe and the fixed pipe, and all the spray heads are connected and arranged on the fixed pipe.

[0009] By adopting the above technical solution, the water supply pipe supplies water to the fixed pipe, the pressure pump pressurizes the water inside the fixed pipe, and sprays water mist through the sprinkler head, so that the dust in the air inside the intake pipe combines with the water mist, thereby settling the dust in the air.

[0010] Preferably, a plurality of groups of material blocking plates are arranged at intervals inside the air intake pipe along the length direction of the air intake pipe, adjacent material blocking plates are staggered with each other, and all the material blocking plates are located on the side of the filter screen facing the sedimentation assembly.

[0011] By adopting the above technical solution, the staggered distribution of the baffle plates slows down the circulation speed of the air inside the intake pipe, so that the sedimentation component can more efficiently sediment the air inside the intake pipe, further reducing the dust content in the air.

[0012] Preferably, the cleaning assembly includes a cleaning plate, a mounting frame and a lifting member; the cleaning plate is slidably arranged on the side wall of the filter screen facing away from the machine body, the mounting frame is arranged on the air inlet pipe, and the lifting member is arranged on the mounting frame to drive the cleaning plate to move up and down.

[0013] By adopting the above technical solution, the output end of the lifting member performs telescopic movement, driving the cleaning plate to move up and down, and cleans the dust and stains attached to the side wall of the filter screen away from the machine body, so as to ensure the filtering function of the filter screen and reduce the occurrence of filter screen clogging requiring manual maintenance and cleaning.

[0014] Preferably, the cleaning plate is provided with a guide rod parallel to the length direction of the cleaning plate, a moving block is slidably arranged on the guide rod, scraper plates abutting against the side walls of the cleaning plate are arranged on both sides of the moving block, and a traction component for driving the scraper plate to move along the length direction of the cleaning plate is arranged on the cleaning plate.

[0015] By adopting the above technical solution, the traction assembly drives the moving block to drive the scraper plate to move along the length direction of the guide rod to scrape off the stains attached to both sides of the cleaning plate, thereby ensuring the normal cleaning work of the cleaning plate on the filter screen and reducing the phenomenon of stains attached to the cleaning plate re-attaching to the filter screen.

[0016] Preferably, the traction assembly includes a traction rope and a guide ring; the traction rope is arranged on both sides of the moving block in the thickness direction, and the guide ring is arranged on both ends of the cleaning plate in the length direction, the traction rope and the guide ring are arranged in a one-to-one correspondence, and each end of the traction rope away from the moving block passes through the corresponding guide ring, one end of the traction rope away from the moving block is connected to the top of the air intake pipe, and the other end of the traction rope away from the moving block is connected to the bottom of the air intake pipe, so as to be used to pull the moving block to move.

[0017] By adopting the above technical solution, when the lifting member drives the cleaning plate to move downward, the traction rope connected to the top of the air inlet pipe pulls the moving block and drives another set of traction ropes to move, so that the moving block moves and the scraper plate scrapes off the stains attached to the cleaning plate; When the lifting member drives the cleaning plate to move upward, the traction rope connected to the bottom of the air inlet pipe pulls the moving block and drives another set of traction ropes to move, so that the moving block moves and resets, and the cleaning plate is cleaned by the scraper plate.

[0018] Preferably, the side wall of the cleaning plate facing the filter is provided with cleaning bristles for cleaning the filter, and a cleaning comb for combing the cleaning bristles is provided between the two scraper plates.

[0019] By adopting the above technical solution, during the movement of the cleaning plate, the cleaning bristles clean the stains attached to the inside of the filter holes; during the movement of the scraper plate driven by the moving block, the cleaning comb cleans the stains attached to the inside of the cleaning bristles.

[0020] Preferably, a collecting box is provided at the bottom of the air intake pipe, and the collecting box is located on the side of the filter screen away from the machine body; and a shock assembly for shocking the air intake pipe is provided on the air intake pipe.

[0021] By adopting the above technical solution, the collection box collects the sewage and stains inside the intake pipe, and the shock assembly shocks the intake pipe, so that the sewage and stains attached to the inner wall of the intake pipe flow to the inside of the collection box more quickly, and reduces the sewage and stains attached to the inner wall of the intake pipe, the cleaning plate, the cleaning brush bristles, the scraper plate and the cleaning brush.

[0022] Preferably, the shock assembly includes a fixed frame, a rotating rod, a shock block, a gravity block and a pull rope; the fixed frame is arranged on the top of the air inlet pipe, the rotating rod is rotatably arranged on the fixed frame, the shock block is arranged at the end of the rotating rod away from the filter, and the gravity block is arranged on the side wall of the rotating rod away from the shock block; the pull rope is arranged at the end of the rotating rod away from the shock block, the air inlet pipe is penetrated by a through hole for the pull rope to pass through, and the end of the pull rope away from the rotating rod passes through the through hole and is connected to the cleaning plate.

[0023] By adopting the above technical solution, the lifting member drives the cleaning plate to move downward quickly, and the cleaning plate is lifted up by pulling the rotating rod installed with a shock block and a gravity block through the pull rope. The lifting member drives the cleaning plate to rise quickly and is stretched in a relaxed state. The gravity block drives the rotating rod through its own gravity to drive the shock block to hit the intake pipe, causing the intake pipe to vibrate.

[0024] Preferably, a sterilization lamp for sterilization is provided inside the air inlet pipe, the sterilization lamp is arranged on the side of the filter screen facing the body, and a reflection pipe for reflecting light is provided between the sterilization lamp and the filter screen.

[0025] By adopting the above technical solution, the sterilization lamp sterilizes the air inside the air inlet pipe, further reducing the impact of external bacteria on the sampling process. The reflective pipe reflects the sterilization light of the sterilization lamp, increasing the sterilization range of the sterilization light, so as to sterilize the air more efficiently.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. The dust in the air inside the air intake pipe is filtered by setting the filter net, and the dust in the air inside the air intake pipe is settled by the sedimentation component, so that the air entering the machine body is pre-filtered and the load of the air filter inside the machine body is reduced; and the dust stains attached to the filter net are cleaned by the cleaning component, so as to ensure the filtering effect of the filter net, thereby realizing efficient filtration of the air entering the sampling device; 2. By setting a traction component to drive the moving block to drive the scraper plate to move along the length direction of the guide rod, the stains attached to both sides of the cleaning plate can be scraped off, ensuring the normal cleaning work of the cleaning plate on the filter screen; 3. By arranging the cleaning bristles, the cleaning bristles can clean the stains attached to the inside of the filter mesh holes during the movement of the cleaning plate; the cleaning comb can clean the stains attached to the inside of the cleaning bristles during the movement of the scraper plate driven by the moving block. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of an intelligent ultra-high clean sampling device suitable for anti-riot areas according to an embodiment of the present application.

[0028] Figure 2 It is a structural diagram used to reflect the connection relationship between the intake pipe and the sedimentation component.

[0029] Figure 3 It is a cross-sectional schematic diagram used to reflect the internal structure of the intake pipe.

[0030] Figure 4 It is used to reflect Figure 3A magnified schematic diagram of the structure in the middle.

[0031] Figure 5 It is a structural schematic diagram used to reflect the connection relationship between the cleaning plate, the moving block and the traction component.

[0032] Description of reference numerals: 1. Machine body; 11. Air inlet pipe; 111. Passage hole; 12. Filter; 13. Material blocking plate; 14. Collecting box; 15. Sterilization lamp; 16. Reflection pipe; 2. Sedimentation assembly; 21. Water supply pipe; 22. Fixed pipe; 23. Pressure pump; 24. Sprinkler head; 3. Cleaning assembly; 31. Cleaning plate; 311. Cleaning brush; 32. Mounting frame; 33. Lifting member; 4. Guide rod; 41. Moving block; 42. Scraper plate; 43. Cleaning comb; 5. Traction assembly; 51. Traction rope; 52. Guide ring; 6. Shock assembly; 61. Fixed frame; 62. Rotating rod; 63. Shock block; 64. Gravity block; 65. Pull rope. DETAILED DESCRIPTION

[0033] The following is combined with Figure 1-5 This application is described in further detail.

[0034] The embodiment of the present application discloses an intelligent ultra-high clean sampling device suitable for riot-proof areas, which is used to efficiently filter the air entering the sampling device.

[0035] Reference Figure 1 , Figure 2 and Figure 3 An intelligent ultra-high clean sampling device suitable for anti-riot areas includes a body 1 and an air intake pipe 11 connected and installed on the body 1 for extracting air from the outside. A filter 12 is installed inside the air intake pipe 11 to filter dust from the air entering the air intake pipe 11. In this embodiment, a high-efficiency air filtration system HEPA is used inside the body 1, which can further efficiently filter the air blown into the body 1, thereby ensuring the high cleanliness of the air inside the sampling cabinet inside the body 1.

[0036] Reference Figure 2 and Figure 3 A settling assembly 2 is installed inside the air intake pipe 11 to drive the dust inside the air intake pipe 11 to settle. The settling assembly 2 includes a water supply pipe 21, a fixed pipe 22, a pressure pump 23 and a plurality of spray heads 24; the fixed pipe 22 is fixedly installed inside the air intake pipe 11, and the fixed pipe 22 is located on the side of the filter screen 12 away from the machine body 1.

[0037] Reference Figure 2 and Figure 3The booster pump 23 is fixedly connected to the air inlet pipe 11, and the output end of the booster pump 23 is fixedly connected to the fixed pipe 22. The water supply pipe 21 is fixedly connected to the input end of the booster pump 23 through a pipeline, and the water supply pipe 21 is fixedly connected to an external water source to transport clean water to the booster pump 23 and the fixed pipe 22. All the spray heads 24 are connected and installed on the fixed pipe 22, and all the spray heads 24 are distributed along the length direction of the fixed pipe 22 to spray water mist inside the air inlet pipe 11, thereby settling dust.

[0038] Reference Figure 2 and Figure 3 Several groups of material blocking plates 13 are installed inside the air intake pipe 11. All the material blocking plates 13 are staggered and distributed along the length direction of the air intake pipe 11, and all the material blocking plates 13 are located on the side of the filter screen 12 facing the fixed pipe 22 to slow down the flow speed of the air inside the air intake pipe 11.

[0039] Reference Figure 2 and Figure 3 , a cleaning assembly 3 for cleaning the filter 12 is installed inside the air intake pipe 11, and the cleaning assembly 3 includes a cleaning plate 31, a mounting frame 32 and a lifting member 33. In this embodiment, the lifting member 33 can be a lifting cylinder. The mounting frame 32 is fixedly connected to the top of the air intake pipe 11, and the lifting member 33 is fixedly connected to the mounting frame 32, and the output end of the lifting member 33 passes through the air intake pipe 11. The cleaning plate 31 is located inside the filter 12, and the cleaning plate 31 is located on the side wall of the filter 12 facing the fixed pipe 22. The side wall of the cleaning plate 31 facing the filter 12 is adhesively connected with a cleaning bristle 311 that abuts against the filter 12. The lifting members 33 are located at both ends of the cleaning plate 31 in the length direction, and the output end of each group of lifting members 33 is fixedly connected to the cleaning plate 31, thereby driving the cleaning plate 31 to move up and down.

[0040] Reference Figure 2 and Figure 4 A guide rod 4 is installed on the side wall of the cleaning plate 31 away from the filter screen 12, and the length direction of the guide rod 4 is parallel to the length direction of the cleaning plate 31. A moving block 41 is slidably sleeved on the guide rod 4, and the moving block 41 can slide along the length direction of the cleaning plate 31. Scraping plates 42 are installed on both sides of the moving block 41 in the width direction, and the side walls of the two groups of scraping plates 42 facing each other are against the side walls of the cleaning plate 31. A cleaning comb 43 is fixedly installed between the ends of the two groups of scraping plates 42 away from the moving block 41 to comb out the stains attached to the cleaning bristles 311.

[0041] Reference Figure 4 and Figure 5A traction assembly 5 is installed on the cleaning plate 31 to drive the scraper plate 42 to move along the length direction of the cleaning plate 31. The traction assembly 5 includes a traction rope 51 and a guide ring 52; the traction rope 51 is fixedly glued to both sides of the moving block 41 in the thickness direction, and the guide ring 52 is fixedly installed at both ends of the cleaning plate 31 in the length direction.

[0042] Reference Figure 4 and Figure 5 In this embodiment, the traction ropes 51 and the guide rings 52 are respectively arranged in a one-to-one correspondence. The end of one set of traction ropes 51 away from the moving block 41 passes through the corresponding guide ring 52 and is glued to the top of the air inlet pipe 11. The end of the other set of traction ropes 51 away from the moving block 41 passes through the corresponding guide ring 52 and is glued to the bottom of the air inlet pipe 11, so as to traction the moving block 41 to move along the length direction of the cleaning plate 31.

[0043] Reference Figure 2 and Figure 3 A collecting box 14 connected to the inside of the air inlet pipe 11 is mounted at the bottom of the air inlet pipe 11 , and the collecting box 14 is located on the side of the filter screen 12 away from the body 1 to collect sewage inside the air inlet pipe 11 .

[0044] Reference Figure 2 and Figure 3 , a shock assembly 6 for shocking the air intake pipe 11 is installed on the air intake pipe 11, and the shock assembly 6 includes a fixed frame 61, a rotating rod 62, a shock block 63, a gravity block 64 and a pull rope 65. The fixed frame 61 is installed on the top of the air intake pipe 11, and the rotating rod 62 is rotatably installed on the fixed frame 61 through a rotating shaft. In this embodiment, the shock block 63 can be made of soft rubber, and the gravity block 64 can be made of a metal block. The shock block 63 is glued and installed on the end of the rotating rod 62 away from the filter screen 12, and the shock block 63 is located on the side wall of the rotating rod 62 facing the air intake pipe 11; the gravity block 64 is installed on the side wall of the rotating rod 62 away from the shock block 63, so as to drive the shock block 63 to hit the air intake pipe 11.

[0045] Reference Figure 2 and Figure 5 The pull rope 65 is glued to the end of the rotating rod 62 away from the shock block 63, and a through hole 111 is formed on the air intake pipe 11 to allow the end of the pull rope 65 away from the rotating rod 62 to pass through the through hole 111, and the end of the pull rope 65 away from the rotating rod 62 is glued to the cleaning plate 31 inside the air intake pipe 11. In this embodiment, the inner diameter of the through hole 111 is larger than the diameter of the pull rope 65, so that the pull rope 65 can move quickly.

[0046] Reference Figure 2 and Figure 3A sterilization lamp 15 for sterilization is installed inside the air inlet pipe 11. In this embodiment, the sterilization lamp 15 can be an ultraviolet lamp, and the sterilization lamp 15 is located on the side of the filter 12 facing the body 1. A reflection pipe 16 for reflecting light is installed inside the air inlet pipe 11 between the sterilization lamp 15 and the filter 12. In this embodiment, the reflection pipe 16 can be a telescopic pipe with a light-reflecting coating inside.

[0047] The implementation principle of an intelligent ultra-high clean sampling device suitable for anti-riot areas in the embodiment of the present application is as follows: The external air enters the air intake pipe 11 , the pressure pump 23 pressurizes the water inside the water supply pipe 21 , and sprays water mist through the fixed pipe 22 and the sprinkler head 24 , so that the dust in the air inside the air intake pipe 11 contacts the water mist, condenses and settles, and gradually falls into the collection box 14 .

[0048] The filter 12 filters the dust and water mist in the air inside the air inlet pipe 11, and the filtered air enters the body 1 for sampling, thereby reducing the influence of dust in the outside air on the sampling work.

[0049] The output end of the lifting member 33 performs telescopic movement, driving the cleaning plate 31 to move up and down to clean the dust attached to the filter screen 12 to ensure the filtering effect of the filter screen 12, thereby efficiently pre-filtering the air entering the sampling device.

[0050] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An intelligent ultra-clean sampling device suitable for anti-riot areas, characterized by: The invention comprises a machine body (1) and an air intake pipe (11) which is arranged on the machine body (1) and in communication therewith; a filter screen (12) for intercepting dust is arranged inside the air intake pipe (11); a settling component (2) for settling dust is arranged inside the air intake pipe (11); and a cleaning component (3) for cleaning the filter screen (12) is arranged inside the air intake pipe (11).

2. According to claim 1, the intelligent ultra-high clean sampling equipment suitable for anti-riot areas is characterized by: The sedimentation assembly (2) comprises a water supply pipe (21), a fixed pipe (22), a pressure pump (23) and a plurality of groups of spray heads (24); the water supply pipe (21) is arranged outside the air intake pipe (11), the fixed pipe (22) is arranged inside the air intake pipe (11), and the fixed pipe (22) is located on a side of the filter screen (12) away from the machine body (1); the pressure pump (23) is arranged in communication between the water supply pipe (21) and the fixed pipe (22), and all the spray heads (24) are arranged in communication on the fixed pipe (22).

3. According to claim 1, the intelligent ultra-high clean sampling equipment suitable for anti-riot areas is characterized by: A plurality of groups of material blocking plates (13) are arranged at intervals inside the air intake pipe (11) along the length direction of the air intake pipe (11), adjacent material blocking plates (13) are arranged in a staggered manner, and all of the material blocking plates (13) are located on the side of the filter screen (12) facing the sedimentation assembly (2).

4. According to claim 1, the intelligent ultra-high clean sampling equipment suitable for anti-riot areas is characterized by: The cleaning assembly (3) comprises a cleaning plate (31), a mounting frame (32) and a lifting member (33); the cleaning plate (31) is slidably arranged on a side wall of the filter screen (12) facing away from the machine body (1), the mounting frame (32) is arranged on the air inlet pipe (11), and the lifting member (33) is arranged on the mounting frame (32) to drive the cleaning plate (31) to move upward and downward.

5. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 4 is characterized in that: The cleaning plate (31) is provided with a guide rod (4) which is parallel to the length direction of the cleaning plate (31); a moving block (41) is slidably provided on the guide rod (4); scraper plates (42) which abut against the side walls of the cleaning plate (31) are provided on both sides of the moving block (41); and a traction component (5) for driving the scraper plate (42) to move along the length direction of the cleaning plate (31) is provided on the cleaning plate (31).

6. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 5 is characterized in that: The traction assembly (5) comprises a traction rope (51) and a guide ring (52); the traction rope (51) is arranged on both sides of the moving block (41) in the thickness direction, and the guide ring (52) is arranged on both ends of the cleaning plate (31) in the length direction; the traction rope (51) and the guide ring (52) are arranged in a one-to-one correspondence, and the end of each traction rope (51) away from the moving block (41) passes through the corresponding guide ring (52); the end of one traction rope (51) away from the moving block (41) is connected to the top of the air intake pipe (11), and the end of the other traction rope (51) away from the moving block (41) is connected to the bottom of the air intake pipe (11), so as to traction the moving block (41) to move.

7. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 5 is characterized by: The side wall of the cleaning plate (31) facing the filter screen (12) is provided with cleaning bristles (311) for cleaning the filter screen (12), and a cleaning comb (43) for combing the cleaning bristles (311) is provided between the two scraper plates (42).

8. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 4 is characterized by: The bottom of the air intake pipe (11) is connected to a collecting box (14), and the collecting box (14) is located on the side of the filter screen (12) facing away from the machine body (1); and a shock component (6) for shocking the air intake pipe (11) is provided on the air intake pipe (11).

9. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 8, characterized in that: The shock assembly (6) comprises a fixed frame (61), a rotating rod (62), a shock block (63), a gravity block (64) and a pull rope (65); the fixed frame (61) is arranged on the top of the air inlet pipe (11), the rotating rod (62) is rotatably arranged on the fixed frame (61), the shock block (63) is arranged at the end of the rotating rod (62) away from the filter (12), and the gravity block (64) is arranged on the side wall of the rotating rod (62) away from the shock block (63); the pull rope (65) is arranged at the end of the rotating rod (62) away from the shock block (63), and a passage hole (111) for the pull rope (65) to pass through is opened on the air inlet pipe (11), and the end of the pull rope (65) away from the rotating rod (62) passes through the passage hole (111) and is connected to the cleaning plate (31).

10. The intelligent ultra-high clean sampling equipment suitable for anti-riot areas according to claim 1, characterized in that: A sterilization lamp (15) for sterilization is arranged inside the air inlet pipe (11); the sterilization lamp (15) is arranged on the side of the filter (12) facing the machine body (1), and a reflection pipe (16) for reflecting light is arranged between the sterilization lamp (15) and the filter (12).

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