An intelligent molecular pump unit

Abstract

The present invention discloses an intelligent molecular pump unit, which uses a molecular pump as a main pump to exhaust all the gas in a confined space to form a high vacuum environment that meets preset requirements, uses a mechanical pump as a pre-pump to evacuate the confined space before the molecular pump is started, and collects the vacuum degree in the confined space in real time through a vacuum gauge, and controls the molecular pump to start when the vacuum degree in the confined space reaches a preset vacuum degree threshold, and controls the molecular pump to start when the molecular pump reaches full speed, and controls the molecular pump to stop when the speed of the molecular pump drops to 0, thereby overcoming the defect that the mechanical pump can only meet low vacuum degree, and solving the problem of long startup time of the molecular pump, having the advantages of fast startup, high vacuum degree, etc., and being able to realize one-key startup, the molecular pump unit starts or stops according to a preset working logic, and is convenient to use, highly automated, safe and reliable.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum pumps and relates to a molecular pump, in particular to an intelligent molecular pump unit. Background Art

[0002] In the fields of mass spectrometry, surface analysis, sputtering and evaporation coating, many analytical instruments, testing equipment, production process lines, etc. need to have a certain clean vacuum environment to realize their functions. Among them, mechanical vacuum pumps or molecular pumps can be used to create a vacuum environment.

[0003] A mechanical vacuum pump is a machine that creates vacuum. It can discharge or absorb air in a closed or semi-closed space to achieve relative vacuum in a local space. It has fast startup, low cost, economical and durable, but can only meet the working requirements of low vacuum. A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, so that they obtain a directional speed, are compressed, and are driven to the exhaust port to be drawn away by the front stage. It extracts gas from the system through the principle of molecular flow to achieve extremely low air pressure, and can be used to produce a high vacuum environment.

[0004] Since the molecular pump rotor speed reaches 20000r / min, the molecular pump startup time is relatively long, and the gas in the molecular pump is in a molecular flow state, so it needs to be equipped with a fore-stage pump, and a mechanical pump is generally used as a fore-stage pump. The molecular pump unit is a series combination of a molecular pump and a fore-stage pump, which can integrate the advantages of the two pumps and work in a wide pressure range. However, the same type of unit products on the market currently only use the fore-stage mechanical pump and the molecular pump in simple series, with a simple structure, low degree of automation, and poor safety and reliability. Summary of the invention

[0005] In order to solve the technical problems existing in the background technology, the present invention proposes an intelligent molecular pump unit, which can realize one-key start-up. The molecular pump unit starts or stops according to a predetermined working logic, is easy to use, highly automated, safe and reliable.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] An intelligent molecular pump unit is used to evacuate a confined space, comprising: a molecular pump, a mechanical pump, a vacuum gauge, and a controller;

[0008] Molecular pump: The molecular pump is used as the main pump. The air inlet of the molecular pump is sealed and connected to the confined space to exhaust all the gas in the confined space to form a high vacuum environment that meets the preset requirements.

[0009] Mechanical pump: The mechanical pump is sealed and connected to the exhaust port of the molecular pump through a bellows. The mechanical pump serves as a pre-pump to evacuate the confined space before the molecular pump is started, so that the confined space reaches a preset vacuum threshold;

[0010] Vacuum gauge, which is set at the air inlet of the molecular pump to collect the vacuum degree in the confined space in real time and upload the vacuum degree data to the controller;

[0011] The controller is respectively connected to the molecular pump, mechanical pump and vacuum gauge for controlling the mechanical pump to start first when the vacuum is started, and obtaining the vacuum degree data uploaded by the vacuum gauge in real time. When the vacuum degree in the confined space reaches the preset vacuum degree threshold, the molecular pump is controlled to start.

[0012] Furthermore, the controller includes: a start-stop control button, a first signal acquisition module, an intelligent management module, a first control module, a second control module, and a display screen;

[0013] A start / stop control module is used to collect the start / stop signal of the molecular pump unit and output it to the intelligent management module;

[0014] A first signal acquisition module, the first signal acquisition module is used to receive vacuum degree data uploaded by the vacuum gauge and output it to the intelligent management module;

[0015] A first control module, the first control module controls the mechanical pump to start or stop according to the control instruction of the intelligent management module;

[0016] A second control module, the second control module controls the molecular pump to start or stop according to the control instruction of the intelligent management module;

[0017] An intelligent management module, the intelligent management module receives the on / off signal output by the start / stop control module and the vacuum degree data output by the first signal acquisition module, and when receiving the on signal, controls the mechanical pump to start through the first control module, and when the vacuum degree data reaches a preset vacuum degree threshold, controls the molecular pump to start through the second control module, and when receiving the off signal, controls the molecular pump to stop through the second control module, and controls the mechanical pump to stop through the first control module;

[0018] Display screen, the display screen is connected to the intelligent management module through communication, and displays the working status of the molecular pump, the working status of the mechanical pump and the vacuum degree data collected by the vacuum gauge in real time.

[0019] Furthermore, the controller also includes a second signal acquisition module, which is used to collect the speed data of the molecular pump and output it to the intelligent management module. When the molecular pump reaches full speed, the intelligent management module controls the molecular pump to shut down through the second control module. When the speed of the molecular pump drops to 0, the intelligent management module controls the mechanical pump to shut down through the first control module.

[0020] Furthermore, an electromagnetic pressure differential valve is connected between the molecular pump and the mechanical pump, and the electromagnetic pressure differential valve is communicatively connected to the controller. The controller also includes a third signal acquisition module, which is used to collect current data when the mechanical pump is working and output it to the intelligent management module. When the current data exceeds a preset range, the intelligent management module controls the electromagnetic pressure differential valve to disconnect.

[0021] Furthermore, an electromagnetic baffle valve is connected to the air inlet of the molecular pump, and the electromagnetic baffle valve is communicatively connected to the controller. When the vacuum degree data exceeds a preset range, the intelligent management module controls the electromagnetic baffle valve to disconnect.

[0022] Furthermore, the controller further includes: a mode switching module, a first switch button, and a second switch button;

[0023] A first switch button, the first switch button is in communication connection with the first control module, and when the first switch button is turned on / off, the mechanical pump is controlled to start / stop through the first control module;

[0024] A second switch button, the second switch button is in communication connection with the second control module, and when the second switch button is turned on / off, the molecular pump is controlled to start / stop through the second control module;

[0025] The mode switching module is communicatively connected with the intelligent management module and is used to switch the working state of the molecular pump unit. When switched to the automatic mode, the intelligent management module starts and stops the molecular pump unit according to a predetermined working logic. When switched to the manual mode, the start and stop of the molecular pump unit are manually controlled by the first switch button and the second switch button respectively.

[0026] Furthermore, the predetermined working logic includes the following steps:

[0027] Step 1, receiving a start signal for starting the molecular pump unit, and outputting a control instruction for starting the mechanical pump;

[0028] Step 2, receiving vacuum degree data, and when the vacuum degree data reaches a preset vacuum degree threshold, outputting a control instruction to start the molecular pump;

[0029] Step 3, receiving and displaying the working status data of the molecular pump, and when the molecular pump reaches full speed, outputting a prompt signal indicating that the pumping is completed;

[0030] Step 4, receiving a shutdown signal for shutting down the molecular pump unit, and outputting a control instruction for stopping the molecular pump;

[0031] Step 5: When the speed of the molecular pump drops to 0, a control instruction to stop the mechanical pump is output.

[0032] Furthermore, the display screen is a touch screen, and the mode switching module, the first switch button, and the second switch button are all virtual buttons arranged on the touch screen.

[0033] Beneficial effects of the present invention: the intelligent molecular pump unit provided by the present invention uses a molecular pump as a main pump to exhaust all the gas in the confined space to form a high vacuum environment that meets the preset requirements, and uses a mechanical pump as a pre-pump to evacuate the confined space before the molecular pump is started, and the vacuum degree in the confined space is collected in real time through a vacuum gauge. When the vacuum degree in the confined space reaches a preset vacuum degree threshold, the molecular pump is controlled to start, and when the molecular pump reaches full speed, the air extraction is completed and the molecular pump is controlled to stop. When the speed of the molecular pump drops to 0, the mechanical pump is controlled to stop, which overcomes the defect that the mechanical pump can only meet low vacuum degrees and solves the problem of long startup time of the molecular pump. It has the advantages of fast startup and high vacuum degree, and can achieve one-button startup. The molecular pump unit starts or stops according to a predetermined working logic, is easy to use, has a high degree of automation, and is safe and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the structure of the present invention.

[0035] Figure 2 Schematic diagram of the controller of the present invention. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] like Figure 1As shown, the present invention provides an intelligent molecular pump unit for evacuating a confined space, including: a molecular pump 1, a mechanical pump 2, a vacuum gauge 3, and a controller 4. The molecular pump 1 serves as a main pump, and the air inlet of the molecular pump 1 is sealed and connected to the confined space, and all the gas in the confined space is discharged to form a high vacuum environment that meets the preset requirements, wherein the molecular pump 1 adopts a molecular pump of the HiPace80 and HiPace300 series. The mechanical pump 2 is sealed and connected to the exhaust port of the molecular pump 1 through a bellows 5. The mechanical pump 2 serves as a pre-pump, and evacuates the confined space before the molecular pump 1 is started, so that the confined space reaches a preset vacuum threshold, wherein the mechanical pump 2 adopts a vortex dry pump of the HiScroll 6, HiScroll 12, and HiScroll 18 series. The vacuum gauge 3 is arranged at the air inlet of the molecular pump 1 to collect the vacuum degree in the confined space in real time, and upload the vacuum degree data to the controller 4, wherein the vacuum gauge 3 adopts a vacuum gauge of the MPT200 and PKR251 series. The controller 4 is respectively connected to the molecular pump 1, the mechanical pump 2, and the vacuum gauge 3 for controlling the mechanical pump 2 to start first when the vacuum is started, and obtaining the vacuum degree data uploaded by the vacuum gauge 3 in real time. When the vacuum degree in the confined space reaches the preset vacuum degree threshold, the molecular pump 1 is controlled to start. The controller adopts a PLC controller.

[0038] Among them, Figure 2 As shown, the controller 4 includes: a start / stop control button, a first signal acquisition module, an intelligent management module, a first control module, a second control module, and a display screen. The start-stop control module is communicatively connected to the intelligent management module, and is used to collect the start / stop signal of starting or shutting down the molecular pump unit, and output it to the intelligent management module; the first signal acquisition module is communicatively connected to the intelligent management module, and is used to receive the vacuum data uploaded by the vacuum gauge 3, and output it to the intelligent management module; the first control module is communicatively connected to the intelligent management module, and controls the mechanical pump 2 to start or stop according to the control instruction of the intelligent management module; the second control module is communicatively connected to the intelligent management module, and controls the molecular pump 1 to start or stop according to the control instruction of the intelligent management module; the intelligent management module receives the start / stop signal output by the start-stop control module and the vacuum data output by the first signal acquisition module, and when receiving the start signal, controls the mechanical pump 2 to start through the first control module, and when the vacuum data reaches the preset vacuum threshold, controls the molecular pump 1 to start through the second control module, and when receiving the shutdown signal, controls the molecular pump 1 to stop through the second control module, and controls the mechanical pump 2 to stop through the first control module at the same time; the display screen is communicatively connected to the intelligent management module, and displays the working status of the molecular pump 1, the working status of the mechanical pump 2 and the vacuum data collected by the vacuum gauge 3 in real time.

[0039] In addition, the controller 4 also includes a second signal acquisition module, which is communicatively connected to the intelligent management module. The second signal acquisition module is used to collect the working status data of the molecular pump 1 and output it to the intelligent management module. The working status data of the molecular pump 1 includes speed, temperature, current, and power. When the molecular pump 1 reaches full speed, the intelligent management module controls the molecular pump 1 to shut down through the second control module. When the speed of the molecular pump 1 is 0, the intelligent management module controls the mechanical pump 2 to shut down through the first control module.

[0040] An electromagnetic pressure differential valve 6 is connected between the molecular pump 1 and the mechanical pump 2 to open and close the exhaust port of the molecular pump 1. The electromagnetic pressure differential valve 6 is communicated with the controller 4. The controller 4 also includes a third signal acquisition module, which is communicated with the intelligent management module. The third signal acquisition module is used to collect current data when the mechanical pump 2 is working and output it to the intelligent management module. When the current data exceeds a preset range, the intelligent management module controls the electromagnetic pressure differential valve 6 to disconnect, thereby playing an intelligent protection role.

[0041] An electromagnetic baffle valve 7 is connected to the air inlet of the molecular pump 1 to open and close the air inlet of the molecular pump 1. The electromagnetic baffle valve 7 is communicated with the controller 4. When the vacuum data exceeds the preset range, the intelligent management module controls the electromagnetic baffle valve 7 to disconnect, and automatically protects the molecular pump 1 when the vacuum degree of the air inlet is abnormal.

[0042] The controller 4 also includes: a mode switching module, a first switch button, and a second switch button. The first switch button is connected to the first control module in communication. When the first switch button is turned on / off, the mechanical pump 2 is controlled to start / stop through the first control module; the second switch button is connected to the second control module in communication. When the second switch button is turned on / off, the molecular pump 1 is controlled to start / stop through the second control module; the mode switching module is connected to the intelligent management module in communication, and is used to switch the working state of the molecular pump unit. When switched to the automatic mode, the intelligent management module starts and stops the molecular pump unit according to the predetermined working logic. When switched to the manual mode, the molecular pump unit is manually controlled to start and stop through the first switch button and the second switch button respectively. Specifically, the display screen is a touch screen, and the mode switching module, the first switch button and the second switch button are virtual buttons set on the touch screen.

[0043] The predetermined working logic includes the following steps:

[0044] Step 1, receiving a start signal for starting the molecular pump unit, and outputting a control instruction for starting the mechanical pump;

[0045] Step 2, receiving vacuum degree data, and when the vacuum degree data reaches a preset vacuum degree threshold, outputting a control instruction to start the molecular pump;

[0046] Step 3, receiving and displaying the working status data of the molecular pump, and when the molecular pump reaches full speed, outputting a prompt signal indicating that the pumping is completed;

[0047] Step 4, receiving a shutdown signal for shutting down the molecular pump unit, and outputting a control instruction for stopping the molecular pump;

[0048] Step 5: When the speed of the molecular pump drops to 0, a control instruction to stop the mechanical pump is output.

[0049] The above contents are merely examples and explanations of the structure of the present invention. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they should all fall within the protection scope of the present invention.

Claims

1. An intelligent molecular pump unit for evacuating a confined space, characterized in that: include: Molecular pump (1), mechanical pump (2), vacuum gauge (3), controller (4); A molecular pump (1), the molecular pump (1) serves as a main pump, the air inlet of the molecular pump (1) is sealed and connected to the enclosed space, and all the gas in the enclosed space is discharged to form a high vacuum environment that meets the preset requirements; A mechanical pump (2), the mechanical pump (2) is sealedly connected to the exhaust port of the molecular pump (1) through a bellows (5), and the mechanical pump (2) serves as a pre-pump to evacuate the enclosed space before the molecular pump (1) is started, so that the enclosed space reaches a preset vacuum threshold; A vacuum gauge (3), which is arranged at the air inlet of the molecular pump (1) to collect the vacuum degree in the enclosed space in real time and upload the vacuum degree data to the controller (4); The controller (4) is respectively connected to the molecular pump (1), the mechanical pump (2), and the vacuum gauge (3) for controlling the mechanical pump (2) to start when the vacuum is pumped, and obtaining vacuum degree data uploaded by the vacuum gauge (3) in real time. When the vacuum degree in the enclosed space reaches a preset vacuum degree threshold, the molecular pump (1) is controlled to start.

2. The molecular pump unit according to claim 1, characterized in that: The controller (4) comprises: a start / stop control button, a first signal acquisition module, an intelligent management module, a first control module, a second control module, and a display screen; A start / stop control module is used to collect the start / stop signal of the molecular pump unit and output it to the intelligent management module; A first signal acquisition module, the first signal acquisition module is used to receive vacuum degree data uploaded by the vacuum gauge (3) and output it to the intelligent management module; A first control module, the first control module controls the mechanical pump (2) to start or stop according to the control instruction of the intelligent management module; A second control module, which controls the molecular pump (1) to start or stop according to the control instruction of the intelligent management module; An intelligent management module, the intelligent management module receives the on / off signal output by the start / stop control module and the vacuum degree data output by the first signal acquisition module, and when receiving the on signal, controls the mechanical pump (2) to start through the first control module, and when the vacuum degree data reaches a preset vacuum degree threshold, controls the molecular pump (1) to start through the second control module, and when receiving the off signal, controls the molecular pump (1) to stop through the second control module, and at the same time controls the mechanical pump (2) to stop through the first control module; The display screen is connected to the intelligent management module through communication, and displays the working status of the molecular pump (1), the working status of the mechanical pump (2) and the vacuum degree data collected by the vacuum gauge (3) in real time.

3. The molecular pump unit according to claim 2, characterized in that: The controller (4) further comprises a second signal acquisition module, the second signal module being used to acquire rotation speed data of the molecular pump (1) and output the data to the intelligent management module; when the molecular pump (1) reaches full rotation speed, the intelligent management module controls the molecular pump (1) to stop via the second control module; when the rotation speed of the molecular pump (1) drops to 0, the intelligent management module controls the mechanical pump (2) to stop via the first control module.

4. The molecular pump unit according to claim 2, characterized in that: An electromagnetic pressure differential valve (6) is connected between the molecular pump (1) and the mechanical pump (2), and the electromagnetic pressure differential valve (6) is in communication connection with the controller (4). The controller (4) further comprises a third signal acquisition module, and the third signal acquisition module is used to collect current data when the mechanical pump (2) is working, and output it to the intelligent management module. When the current data exceeds a preset range, the intelligent management module controls the electromagnetic pressure differential valve (6) to disconnect.

5. The molecular pump unit according to claim 2, characterized in that: An electromagnetic baffle valve (7) is connected to the air inlet of the molecular pump (1), and the electromagnetic baffle valve (7) is in communication connection with the controller (4). When the vacuum degree data exceeds a preset range, the intelligent management module controls the electromagnetic baffle valve (7) to disconnect.

6. The molecular pump unit according to claim 2, characterized in that: The controller (4) also includes: a mode switching module, a first switch button, and a second switch button; A first switch button, the first switch button is in communication with the first control module, and when the first switch button is turned on / off, the mechanical pump (2) is controlled to start / stop via the first control module; A second switch button, the second switch button is in communication connection with the second control module, and when the second switch button is turned on / off, the molecular pump (1) is controlled to start / stop via the second control module; The mode switching module is communicatively connected with the intelligent management module and is used to switch the working state of the molecular pump unit. When switched to the automatic mode, the intelligent management module starts and stops the molecular pump unit according to a predetermined working logic. When switched to the manual mode, the start and stop of the molecular pump unit are manually controlled by the first switch button and the second switch button respectively.

7. The molecular pump unit according to claim 6, characterized in that: The predetermined working logic includes the following steps: Step 1, receiving a start signal for starting the molecular pump unit, and outputting a control instruction for starting the mechanical pump; Step 2, receiving vacuum degree data, and when the vacuum degree data reaches a preset vacuum degree threshold, outputting a control instruction to start the molecular pump; Step 3, receiving and displaying the working status data of the molecular pump, and when the molecular pump reaches full speed, outputting a prompt signal indicating that the pumping is completed; Step 4, receiving a shutdown signal for shutting down the molecular pump unit, and outputting a control instruction for stopping the molecular pump; Step 5: When the speed of the molecular pump drops to 0, a control instruction to stop the mechanical pump is output.

8. The molecular pump unit according to claim 6, characterized in that: The display screen is a touch screen, and the mode switching module, the first switch button, and the second switch button are all virtual buttons arranged on the touch screen.

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