Pneumatic shovel and method for physically removing film by using vibration technology

Abstract

The invention provides a pneumatic shovel and a method for physically removing a film by using a vibration technology, and relates to the field of material regeneration, the pneumatic shovel comprises an air source system, an air inlet valve, an exhaust valve, a dust exhauster, an air inlet, a piston, an air cylinder body, a cushion pad and a shovel head, the pneumatic shovel drives the shovel head to move through air pressure so as to remove a metal surface film layer of the vacuum chamber equipment component. After the metal film layer of the vacuum chamber equipment part is abraded and corroded, various attached film layers on the surface of the regenerated part are physically removed, the defect rate is reduced, the part is regenerated, the service life of the part is effectively prolonged, and the film removing effect and efficiency are remarkably improved. Therefore, the regeneration period of parts of the liquid crystal panel and the chip manufacturing equipment is greatly prolonged, the product yield is improved, and the production cost is reduced.

Description

Technical Field

[0001] The invention relates to the field of material recycling, and in particular to a pneumatic shovel and a method for physically removing films by using vibration technology. Background Art

[0002] Against the backdrop of global industrial chain transfer and in-depth implementation of the localization substitution strategy, industries such as LCD panels and semiconductor chip manufacturing are experiencing unprecedented rapid development. This rapid development has directly led to a significant increase in the demand for recycled equipment parts, especially in the key components of these core manufacturing equipment. Customers are also increasingly demanding on the quality standards and performance requirements of recycled parts, requiring not only high precision and high stability of parts, but also high requirements for their surface quality that meet or even exceed the original production standards.

[0003] Therefore, physical film removal technology plays a vital role in the field of equipment parts regeneration. However, although there are many physical film removal technologies on the market, the research and development and application of regeneration technology for specific equipment parts, especially those with extremely high requirements for precision and stability, are still insufficient. In particular, in solving key problems such as wear and corrosion of metal film layers, traditional physical film removal technology often fails to achieve ideal regeneration effects, which undoubtedly becomes a major obstacle to the continuous improvement of equipment performance and the maintenance of overall production efficiency.

[0004] Therefore, it is particularly important to conduct in-depth research on the physical film removal technology of surface metal film regeneration components and to improve the service life of regeneration components and the overall performance of vacuum chamber equipment through technological innovation. Summary of the invention

[0005] In view of the problems existing in the prior art, the present invention provides a pneumatic shovel and a method for physical film removal using vibration technology, specifically using the pneumatic shovel's efficient vibration technology to achieve the removal of the metal film layer. Based on the scientific research on the wear and corrosion mechanism of the metal film layer, the method aims to provide an accurate and efficient method for the regeneration of the metal film layer, while overcoming the limitations of the traditional chemical film removal method to achieve an efficient, environmentally friendly, and non-destructive film removal effect.

[0006] In a first aspect, the present invention provides a pneumatic shovel, which includes an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment components.

[0007] As a further improvement of the present invention, the gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

[0008] As a further improvement of the present invention, when the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward;

[0009] The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

[0010] As a further improvement of the present invention, the upper portion of the shovel head is configured as a truncated cone.

[0011] As a further improvement of the present invention, the upper part of the shovel head is configured as a cylinder.

[0012] As a further improvement of the present invention, the lower part of the shovel head is constructed as a flat chisel body with a diameter of 5 to 10 mm.

[0013] As a further improvement of the present invention, the movement mode of the shovel head is up and down reciprocating motion.

[0014] In a second aspect, the present invention provides a method for physically removing the film using vibration technology, using the pneumatic shovel described in the first aspect, comprising the following steps:

[0015] The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer;

[0016] The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

[0017] As a further improvement of the present invention, the air pressure of the pneumatic shovel is 5.5-7MPa, and the vibration impact force of the pneumatic shovel is 4500BPM.

[0018] As a further improvement of the present invention, the thickness of the metal surface film layer is above 0.3 cm.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] Traditional chemical film removal methods use chemical immersion corrosion, which can cause serious damage to the surface of vacuum chamber equipment components. The present invention provides a pneumatic shovel and a method for physical film removal using vibration technology. After the metal film layer of the vacuum chamber equipment components is worn and corroded, various attached film layers on the surface of the regenerated parts are physically removed to reduce the defect rate, regenerate the parts and effectively extend the service life of the parts, significantly improving the film removal effect and efficiency. This greatly increases the regeneration cycle of liquid crystal panel and chip manufacturing equipment parts, improves product yield, and reduces production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of a pneumatic shovel provided in Example 1 of the present invention;

[0022] Figure 2 A top view and an operation path diagram of the pneumatic shovel provided in Example 1 of the present invention. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] In the specific implementation of the present invention, the wear and corrosion mechanism of the metal film layer is first analyzed to understand the root cause of its failure due to wear and corrosion during use, laying a theoretical foundation for the physical film removal technology and equipment provided by the present invention. Among them, the wear of the metal film layer refers to the phenomenon that the surface of the metal base material is damaged or destroyed under the action of friction, which seriously affects the service life of the parts, and the metal corrosion refers to the phenomenon that the metal is oxidized or dissolved by chemical reactions under specific environments, which also affects the service life and cost of parts.

[0025] In a first aspect, the present invention provides a pneumatic shovel, which includes an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment components.

[0026] Preferably, the gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

[0027] Preferably, when the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward;

[0028] The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

[0029] During the movement, the shovel head splits and cleans the parts under the impact. In actual operation, the parts are placed flat and the force of hand pressure on the pneumatic shovel is controlled.

[0030] Preferably, the upper portion of the shovel head is configured as a truncated cone.

[0031] Preferably, the upper portion of the shovel head is configured as a cylinder.

[0032] Preferably, the lower part of the shovel head is configured as a flat chisel body with a diameter of 5 to 10 mm.

[0033] Preferably, the shovel head moves in an up and down reciprocating manner.

[0034] It should be noted that the shovel head is a key component for directly contacting the metal surface of the component to remove the film layer, and shovel heads of different shapes and materials can be selected according to different film layer materials and removal requirements. Based on the embodiments of the present invention, all other shovel head embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0035] In a second aspect, the present invention provides a method for physically removing the film using vibration technology, using the pneumatic shovel described in the first aspect, comprising the following steps:

[0036] The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer;

[0037] The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

[0038] like Figure 2 As shown, since the contamination conditions of each component are different, the components are moved clockwise and at intervals in a targeted manner during the film removal process according to the actual contamination conditions, specific contaminant deposition areas and the texture shape of the film layer attached to the components. The components are advanced in sections to form a ring-shaped operation path, which makes the film removal efficient and effective.

[0039] Preferably, the air pressure of the pneumatic shovel is 5.5-7 MPa, and the vibration impact force of the pneumatic shovel is 4500 BPM.

[0040] Preferably, the thickness of the metal surface film layer is above 0.3 cm.

[0041] It should be noted that when using the method provided by the present invention, due to different film layers and thicknesses, it is necessary to select appropriate pneumatic shovel parameters through experiments. Based on the embodiments of the present invention, all other shovel head embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0042] The present invention further provides the following specific embodiments:

[0043] Example 1

[0044] like Figure 1 As shown, this embodiment provides a pneumatic shovel, which includes an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The piston and the cylinder body together form Figure 1 In the polishing gun shown, the pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment component.

[0045] The gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

[0046] When the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward;

[0047] The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

[0048] During the movement, the shovel head splits and cleans the parts under the impact. In actual operation, the parts are placed flat and the force of hand pressure on the pneumatic shovel is controlled.

[0049] The upper part of the shovel head is configured as a truncated cone.

[0050] The lower part of the shovel head is configured as a flat chisel body with a diameter of 5 mm.

[0051] The movement mode of the shovel head is up and down reciprocating motion.

[0052] Example 2

[0053] The present embodiment provides a pneumatic shovel, which includes an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment components.

[0054] The gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

[0055] When the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward;

[0056] The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

[0057] During the movement, the shovel head splits and cleans the parts under the impact. In actual operation, the parts are placed flat and the force of hand pressure on the pneumatic shovel is controlled.

[0058] The upper part of the shovel head is configured as a cylinder.

[0059] The lower part of the shovel head is configured as a flat chisel body with a diameter of 7.5 mm.

[0060] The shovel head moves in an up-and-down reciprocating manner.

[0061] Example 3

[0062] The present embodiment provides a pneumatic shovel, which includes an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment components.

[0063] The gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

[0064] When the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward;

[0065] The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

[0066] During the movement, the shovel head splits and cleans the parts under the impact. In actual operation, the parts are placed flat and the force of hand pressure on the pneumatic shovel is controlled.

[0067] The upper part of the shovel head is configured as a cylinder.

[0068] The lower part of the shovel head is configured as a flat chisel body with a diameter of 10 mm.

[0069] The movement mode of the shovel head is up and down reciprocating motion.

[0070] Example 4

[0071] This embodiment provides a method for physically removing the film using vibration technology, using the pneumatic shovel provided in Example 1, including the following steps:

[0072] The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer;

[0073] The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

[0074] The air pressure of the pneumatic shovel is 5.5-7MPa, and the vibration impact force of the pneumatic shovel is 4500BPM.

[0075] The thickness of the metal surface film layer is 0.3 cm.

[0076] The time for physically vibrating and removing the film layer on the metal surface of the component by using the pneumatic shovel is 1.5 minutes.

[0077] The flatness of the component after film removal is within 0.9mm.

[0078] Example 5

[0079] This embodiment provides a method for physically removing the film using vibration technology, using the pneumatic shovel provided in Example 2, including the following steps:

[0080] The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer;

[0081] The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

[0082] The air pressure of the pneumatic shovel is 5.5-7 MPa, and the vibration impact force of the pneumatic shovel is 4500 BPM.

[0083] The thickness of the metal surface film layer is 1.2 cm.

[0084] The time for physically vibrating and removing the film layer on the metal surface of the component by using the pneumatic shovel is 2 minutes.

[0085] The flatness of the component after film removal is within 0.9mm.

[0086] Example 6

[0087] This embodiment provides a method for physically removing the film using vibration technology, using the pneumatic shovel provided in Example 3, including the following steps:

[0088] The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer;

[0089] The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

[0090] The air pressure of the pneumatic shovel is 5.5-7 MPa, and the vibration impact force of the pneumatic shovel is 4500 BPM.

[0091] The thickness of the metal surface film layer is 1.2 cm.

[0092] The time for physically vibrating and removing the film layer on the metal surface of the component by using the pneumatic shovel is 2 minutes.

[0093] The flatness of the component after film removal is within 0.9mm.

[0094] The roughness of the components treated in Example 5 was tested using a 310 roughness meter. The test results are shown in Table 1.

[0095] Table 1

[0096]

[0097] It can be seen from Table 1 that after the pneumatic shovel of the present invention is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component, the surface roughness of the component is uniform and meets the standard.

[0098] The components after film removal in Example 5 were subjected to post-process sandblasting and spraying to obtain regenerated components. The roughness of the regenerated components after post-process sandblasting and spraying in Example 5 was tested using a 310 roughness meter. The test results are shown in Table 2.

[0099] Table 2

[0100]

[0101] As can be seen from Table 2, after the pneumatic shovel of the present invention is used to physically vibrate and remove the metal surface film layer of the vacuum chamber equipment component, the roughness of the regenerated component surface obtained by subsequent sandblasting and spraying is very uniform, within the range of 15±1μm, which meets the use standard.

[0102] Traditional chemical film removal methods use chemical immersion corrosion, which can cause serious damage to the surface of vacuum chamber equipment components. The present invention provides a pneumatic shovel and a physical film removal method using vibration technology. After the metal film layer of the vacuum chamber equipment components is worn and corroded, various attached film layers on the surface of the regenerated parts are physically removed, the defect rate is reduced, the parts are regenerated and the service life of the parts is effectively extended, and the film removal effect and efficiency are significantly improved. This greatly increases the regeneration cycle of liquid crystal panel and chip manufacturing equipment parts, improves product yield, and reduces production costs.

[0103] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, a person having ordinary knowledge in the art can still modify the technical solutions recorded in the aforementioned embodiments, or replace part or all of the technical features therein with equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

Claims

1. A pneumatic shovel, characterized in that: The pneumatic shovel comprises an air source system, an air inlet valve, an exhaust valve, a dust collector, an air inlet, a piston, a cylinder body, a buffer pad and a shovel head. The pneumatic shovel drives the shovel head to move by air pressure to remove the metal surface film layer of the vacuum chamber equipment components.

2. The pneumatic shovel according to claim 1, characterized in that: The gas source system is used to provide and adjust a stable gas pressure source, and the shovel head is used to directly contact the metal surface to remove the film layer.

3. The pneumatic shovel according to claim 1, characterized in that: When the pneumatic shovel is working, the air inlet valve is opened, and compressed gas enters the cylinder body to push the piston forward; The exhaust valve opens, and the compressed gas is discharged from the cylinder body. At this time, the piston retreats to complete a reciprocating motion.

4. The pneumatic shovel according to claim 1, characterized in that: The upper part of the shovel head is configured as a truncated cone.

5. The pneumatic shovel according to claim 1, characterized in that: The upper part of the shovel head is configured as a cylinder.

6. The pneumatic shovel according to claim 1, characterized in that: The lower part of the shovel head is configured as a flat chisel body.

7. The pneumatic shovel according to claim 1, characterized in that: The movement mode of the shovel head is up and down reciprocating motion.

8. A method for physical film removal using vibration technology, characterized in that: Using the pneumatic shovel according to any one of claims 1-7 comprises the following steps: The pneumatic shovel is used to physically vibrate and remove the film layer on the metal surface of the vacuum chamber equipment component. According to the actual pollution status of the component, the specific pollution deposition area and the texture shape of the film layer attached to the component, the component is gradually operated in a clockwise and spaced ring shape, and the pneumatic shovel is kept in uniform and stable motion to loosen and separate the component and the film layer; The loosely separated film layer is peeled off from the component to obtain the de-filmed component.

9. The method for physical film removal using vibration technology according to claim 8, characterized in that: The air pressure of the pneumatic shovel is 5.5-7MPa, and the vibration impact force of the pneumatic shovel is 4500BPM.

10. The method for physical film removal using vibration technology according to claim 8, characterized in that: The thickness of the metal surface film layer is above 0.3 cm.

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