A gas distribution device with a heating pipe and a preparation method thereof

Abstract

The present invention provides a gas distribution device with a heating tube and a preparation method thereof, the preparation method comprising: (I) providing a distribution body, a cover plate and at least one heating tube; (II) the distribution body has an extension portion, an end of the extension portion away from the distribution body is provided with a lap block, at least one limiting groove is opened circumferentially on the surface of the distribution body, and at least two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove; (III) the heating tube is filled into the limiting groove, and the cover plate is buckled on the distribution body, and the lead-out hole and the cover plate are not connected to obtain a distribution component; (IV) the distribution component is placed in a vacuum environment, and an electron beam is used to weld the distribution component, and after the weld reaches the lap block, the direction of the electron beam is changed to align with the lead-out hole for compensation welding. The present invention solves the risk of collapse at the port during welding and improves the qualified rate of the product.

Description

Technical Field

[0001] The invention belongs to the technical field of gas distribution equipment manufacturing, and relates to a gas distribution device with a heating tube and a preparation method thereof. Background Art

[0002] In the semiconductor manufacturing process, a gas distribution device with a heating function is usually required to form a heating channel to heat the wafer. The gas distribution device is generally composed of a main body, a heating tube and a cover plate. The heating tube is fixed to the main body and then the cover plate is welded and fixed. However, when the main body and the cover plate are welded, pits are prone to appear in the weld, which affects the bonding strength of the product and even causes the product to be scrapped. In addition, when the welding process reaches the end of the product, a sag phenomenon will occur, causing the product welding to fail, which directly affects the normal use of the heating tube.

[0003] In the prior art, although the main body of the gas distribution device is extended to ensure the continuous performance of the welding process, the defects at the port cannot be effectively eliminated, and a subsequent leveling process is required, which prolongs the production time and reduces production efficiency.

[0004] Therefore, how to solve the defects of welding ports is very important for the product qualification rate. Summary of the invention

[0005] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a gas distribution device with a heating tube and a preparation method thereof, which solves the problem of port collapse during welding, improves the product qualification rate, and effectively improves work efficiency.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a method for preparing a gas distribution device with a heating tube, the method comprising:

[0008] (I) providing a distribution body, a cover plate and at least one heating tube;

[0009] (II) The distribution body has an extension portion, and a lap block is provided at one end of the extension portion away from the distribution body. At least one limiting groove is opened along the circumferential direction on the surface of the distribution body, and at least two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0010] (III) filling the limiting groove with a heating tube, and buckling the cover plate onto the distribution body, with the outlet hole not being connected to the cover plate, to obtain a distribution assembly;

[0011] (IV) placing the distribution assembly in a vacuum environment, and performing weld welding on the distribution assembly using an electron beam. After the weld reaches the overlap block, changing the direction of the electron beam so that it is aligned with the lead-out hole for compensation welding, thereby obtaining a gas distribution device.

[0012] The preparation method provided by the present invention is simple to operate. By arranging a lap block at the port of the extension part, the lead-out hole does not penetrate the upper end surface of the lap block, so that the cover plate and the lead-out hole are not connected, thereby forming an effective lap joint, reducing the risk of welding collapse or breakdown at the edge of the port during electron beam welding. By improving the direction of electron beam welding, there is no need to adjust the electron beam welding procedure, thus avoiding the problem of electron beam welding exceeding the welding range, shortening the preparation time, improving the bonding strength between the distribution body and the cover plate, and improving the stability of the gas distribution device.

[0013] As a preferred technical solution of the present invention, in step (I), the distribution body, cover plate and overlap block are all made of aluminum alloy.

[0014] Preferably, the resistance value of the heating tube is 10.7-11.4Ω, for example, it can be 10.7Ω, 10.8Ω, 10.9Ω, 11Ω, 11.1Ω, 11.2Ω, 11.3Ω or 11.4Ω, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0015] As a preferred technical solution of the present invention, in step (II), the linear length of the extension portion in the radial direction of the distribution body is 3 to 5 mm, for example, it can be 3 mm, 3.2 mm, 3.5 mm, 3.6 mm, 3.8 mm, 4 mm, 4.2 mm, 4.5 mm, 4.8 mm or 5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0016] Preferably, the thickness of the overlap block is 0.2-1 mm, for example, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm or 1 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0017] As a preferred technical solution of the present invention, in step (III), after the filling is completed, the spacing between the heating tube and the side wall of the inner cavity of the limiting groove is 0 to 0.03 mm, for example, it can be 0 mm, 0.005 mm, 0.008 mm, 0.01 mm, 0.012 mm, 0.015 mm, 0.018 mm, 0.02 mm, 0.025 mm, 0.028 mm or 0.03 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] Preferably, after the cover plate is buckled, the heating tube is not connected to the cover plate.

[0019] As a preferred technical solution of the present invention, in step (IV), the pressure in the vacuum environment is 20 to 80 mbar, for example, it can be 20 mbar, 25 mbar, 30 mbar, 35 mbar, 40 mbar, 45 mbar, 50 mbar, 55 mbar, 60 mbar, 65 mbar, 70 mbar, 75 mbar or 80 mbar, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0020] As a preferred technical solution of the present invention, in step (IV), the acceleration voltages of the weld welding and the compensation welding are independently 60 to 90 kV, for example, 60 kV, 65 kV, 68 kV, 70 kV, 75 kV, 78 kV, 80 kV, 85 kV, 88 kV or 90 kV, but are not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] Preferably, the acceleration current of the weld welding and compensation welding is independently 150-600mA, for example, it can be 150mA, 180mA, 200mA, 250mA, 280mA, 300mA, 350mA, 380mA, 400mA, 450mA, 500mA, 550mA or 600mA, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] Preferably, the welding speeds of the weld seam welding and the compensation welding are independently 6 to 12 mm / s, for example, 6 mm / s, 6.5 mm / s, 7 mm / s, 7.5 mm / s, 8 mm / s, 8.5 mm / s, 9 mm / s, 9.5 mm / s, 10 mm / s, 10.5 mm / s, 11 mm / s, 11.5 mm / s or 12 mm / s, but are not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] Preferably, aluminum solder is used for the weld welding and compensation welding.

[0024] As a preferred technical solution of the present invention, in step (IV), after the compensation welding is completed, the gas distribution device is placed under vacuum and kept warm for 5 to 12 minutes, for example, it can be 5 minutes, 5.5 minutes, 6 minutes, 6.5 minutes, 7 minutes, 8 minutes, 9 minutes, 10 minutes, 11 minutes, 11.5 minutes or 12 minutes, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] As a preferred technical solution of the present invention, the preparation method further comprises: before the filling heating tube, the distribution body and the cover plate are cleaned and vacuum dried in sequence.

[0026] Preferably, the specific method of the cleaning treatment is: ultrasonic cleaning using a cleaning liquid.

[0027] Preferably, the cleaning solution comprises ethanol and / or isopropanol.

[0028] Preferably, the frequency of the ultrasonic cleaning is 30-40 kHz, for example, 30 kHz, 31 kHz, 32 kHz, 33 kHz, 34 kHz, 35 kHz, 36 kHz, 37 kHz, 38 kHz, 39 kHz or 40 kHz, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] Preferably, the ultrasonic cleaning time is 8 to 15 minutes, for example, it can be 8 minutes, 9 minutes, 10 minutes, 11 minutes, 12 minutes, 13 minutes, 14 minutes or 15 minutes, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] Preferably, the vacuum degree of the vacuum drying is 0.005-0.03 Pa, for example, it can be 0.005 Pa, 0.0055 Pa, 0.01 Pa, 0.012 Pa, 0.015 Pa, 0.018 Pa, 0.02 Pa, 0.022 Pa, 0.025 Pa, 0.028 Pa or 0.03 Pa, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0031] Preferably, the vacuum drying time is 90 to 150 min, for example, it can be 90 min, 95 min, 100 min, 110 min, 115 min, 120 min, 125 min, 130 min, 135 min, 140 min, 145 min or 150 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0032] As a preferred technical solution of the present invention, the preparation method further comprises: transferring the gas distribution device to a CNC machine tool for fine machining so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0033] In a second aspect, the present invention provides a gas distribution device with a heating tube, and the gas distribution device with a heating tube is manufactured by the manufacturing method described in the first aspect.

[0034] The gas distribution device provided by the present invention has high stability, no collapse occurs at the port of the internal groove, a high pass rate, high bonding force between the distribution body and the cover plate, a long service life and low manufacturing cost.

[0035] In order to help those skilled in the art better understand the overall technical solution and working process of the present invention, the present invention exemplarily provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0036] (1) Providing a distribution body, a cover plate and at least one heating tube;

[0037] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 3 to 5 mm, a lap block is provided at one end of the extension portion away from the distribution body, the thickness of the lap block is 0.2 to 1 mm, at least one limiting groove is opened along the circumferential direction on the surface of the distribution body, and at least two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0038] (3) Cleaning and vacuum drying the distribution body and the cover plate respectively;

[0039] (4) Filling the limiting groove with a heating tube, and buckling the cover plate onto the distribution body, wherein the outlet hole is not connected to the cover plate, and the heating tube is not connected to the cover plate, thereby obtaining a distribution assembly;

[0040] (5) placing the distribution assembly in a vacuum environment, performing weld welding on the distribution assembly using an electron beam, and after the weld reaches the overlap block, changing the direction of the electron beam so that it is aligned with the lead-out hole for compensation welding, thereby obtaining a gas distribution device;

[0041] (6) The gas distribution device is placed under vacuum to keep warm, then taken out and transferred to a CNC machine tool for fine machining, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0042] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The present invention provides a gas distribution device with a heating tube and a preparation method thereof. The process is simple to operate. By arranging an overlap block at the port of the extension part, the cover plate and the lead-out hole are not connected to form an effective overlap, thereby reducing the risk of welding collapse or breakdown at the edge of the port during electron beam welding. By improving the direction of electron beam welding, there is no need to adjust the electron beam welding procedure, thus avoiding the problem of electron beam welding exceeding the welding range, reducing the preparation time by 20%, improving the bonding strength between the distribution body and the cover plate, achieving a welding qualification rate of ≥95%, and improving the stability of the gas distribution device. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 A schematic diagram of the structure of the distribution subject provided in Example 1 of the present invention;

[0046] Figure 2 A schematic diagram of the structure of the cover plate after being buckled provided in Embodiment 1 of the present invention;

[0047] Figure 3 This is a schematic diagram of the structure of the distribution body provided in Comparative Example 1 of the present invention.

[0048] Among them, 1-distribution body; 2-cover plate; 3-extension part; 4-limiting groove; 5-lap block; 6-lead-out hole. DETAILED DESCRIPTION

[0049] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0050] In a specific embodiment, the present invention provides a method for preparing a gas distribution device with a heating tube, which specifically comprises the following steps:

[0051] (1) providing a distribution body, a cover plate and at least one heating tube with a resistance value of 10.7 to 11.4 Ω;

[0052] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 3 to 5 mm, a lap block is provided at one end of the extension portion away from the distribution body, the thickness of the lap block is 0.2 to 1 mm, at least one limiting groove is opened along the circumferential direction on the surface of the distribution body, and at least two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0053] (3) The distribution body and the cover plate are respectively ultrasonically cleaned with a cleaning liquid, and then vacuum dried, wherein the cleaning liquid is ethanol and / or isopropanol, the frequency of ultrasonic cleaning is 30 to 40 kHz, the time is 8 to 15 minutes, and the vacuum degree of vacuum drying is 0.005 to 0.03 Pa, and the time is 90 to 150 minutes;

[0054] (4) Filling the limiting groove with a heating tube so that the spacing between the heating tube and the inner wall of the limiting groove is 0 to 0.03 mm, and buckling the cover plate onto the distribution body, the lead-out hole and the cover plate are not connected, and the heating tube and the cover plate are not connected, thereby obtaining a distribution assembly;

[0055] (5) placing the distribution assembly in a vacuum environment with a pressure of 20 to 80 mbar, performing seam welding on the distribution assembly using an electron beam, and after the seam welding reaches the overlap block, changing the direction of the electron beam so that it is aligned with the lead-out hole for compensation welding, thereby obtaining a gas distribution device;

[0056] Wherein, the weld welding and compensation welding are both performed with aluminum solder, the acceleration current is independently 150-600 mA, and the welding speed is independently 6-12 mm / s;

[0057] (6) The gas distribution device is placed in a vacuum and kept warm for 5 to 12 minutes, then taken out and transferred to a CNC machine tool for fine machining, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0058] In another specific embodiment, the present invention provides a gas distribution device with a heating tube. The gas distribution device with a heating tube is made by the preparation method described in a specific embodiment, has high stability, no collapse at the port of the internal groove, high pass rate, high bonding force between the distribution body and the cover plate, long service life, and low manufacturing cost.

[0059] Example 1

[0060] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0061] (1) providing a distribution body 1, a cover plate 2 and a heating tube with a resistance value of 11Ω;

[0062] (2) Figure 1 As shown, the distribution body 1 has an extension portion 3, the linear length of the extension portion 3 in the radial direction of the distribution body 1 is 4 mm, and a lap block 5 with a thickness of 0.5 mm is provided at one end of the extension portion 3 away from the distribution body. A limiting groove 4 is opened along the circumferential direction on the surface of the distribution body 1, and two lead-out holes 6 are provided on the lap block 5, and the two lead-out holes are respectively connected to the two ends of the limiting groove 4;

[0063] (3) The distribution body 1 and the cover plate 2 are respectively ultrasonically cleaned with ethanol at a frequency of 35 kHz for 10 min, and then vacuum dried at a vacuum degree of 0.01 Pa for 120 min;

[0064] (4) Fill the limiting groove 4 with a heating tube so that the heating tube fits perfectly with the inner wall of the limiting groove 4 without any gap. Figure 2 As shown, the cover plate 2 is buckled onto the distribution body 1, the lead-out hole 6 is not connected to the cover plate 2, and the heating pipe is not connected to the cover plate 2, so as to obtain a distribution assembly;

[0065] (5) placing the distribution assembly in a vacuum environment with a pressure of 50 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block 5, the direction of the electron beam is changed so that it is aligned with the lead-out hole 6 for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 400 mA, and the welding speed is 10 mm / s;

[0066] (6) The gas distribution device is then placed in a vacuum and kept warm for 10 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0067] 40 gas distribution devices were prepared by the method provided in this embodiment, and no collapse occurred at the three ends of the extension parts, the welding qualification rate was 100%, and the time consumption was reduced by 20%.

[0068] Example 2

[0069] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0070] (1) Provide a distribution body, a cover plate and a heating tube with a resistance value of 10.7Ω;

[0071] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 3 mm, a lap block with a thickness of 0.2 mm is provided at one end of the extension portion away from the distribution body, a limiting groove is opened along the circumferential direction on the surface of the distribution body, and two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0072] (3) The distribution body and the cover plate are ultrasonically cleaned with isopropyl alcohol at a frequency of 30 kHz for 12 min, followed by vacuum drying at a vacuum degree of 0.02 Pa for 110 min;

[0073] (4) Fill the limiting groove with a heating tube so that the heating tube is completely fitted with the inner wall of the limiting groove without any gap, and snap the cover plate onto the distribution body, so that the lead-out hole is not connected to the cover plate, and the heating tube is not connected to the cover plate, thereby obtaining a distribution assembly;

[0074] (5) placing the distribution assembly in a vacuum environment with a pressure of 20 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 200 mA, and the welding speed is 6 mm / s;

[0075] (6) The gas distribution device is then placed in a vacuum and kept warm for 5 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0076] 40 gas distribution devices were prepared by the method provided in this embodiment. No collapse occurred at the ports of the extension parts, the welding qualification rate was 100%, and the time consumption was reduced by 20%.

[0077] Example 3

[0078] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0079] (1) Provide a distribution body, a cover plate and a heating tube with a resistance value of 11.4Ω;

[0080] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 5 mm, a lap block with a thickness of 1 mm is provided at one end of the extension portion away from the distribution body, a limiting groove is opened along the circumferential direction on the surface of the distribution body, and two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0081] (3) The distribution body and the cover plate are ultrasonically cleaned with isopropyl alcohol at a frequency of 40 kHz for 8 min, followed by vacuum drying at a vacuum degree of 0.005 Pa for 130 min;

[0082] (4) Fill the limiting groove with a heating tube so that the heating tube is completely fitted with the inner wall of the limiting groove without any gap, and snap the cover plate onto the distribution body, so that the lead-out hole is not connected to the cover plate, and the heating tube is not connected to the cover plate, thereby obtaining a distribution assembly;

[0083] (5) placing the distribution assembly in a vacuum environment with a pressure of 60 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 500 mA, and the welding speed is 12 mm / s;

[0084] (6) The gas distribution device is then placed in a vacuum and kept warm for 12 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0085] 40 gas distribution devices were prepared by the method provided in this embodiment. One gas distribution device needed to be repaired and a leveling operation was performed on it. The welding qualification rate was 97.5%, which reduced the time consumption by 15%.

[0086] Example 4

[0087] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0088] (1) Provide a distribution body, a cover plate and a heating tube with a resistance value of 11.2Ω;

[0089] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 4.5 mm, a lap block with a thickness of 0.8 mm is provided at one end of the extension portion away from the distribution body, a limiting groove is opened along the circumferential direction on the surface of the distribution body, and two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0090] (3) The distribution body and the cover plate were ultrasonically cleaned with ethanol at a frequency of 38 kHz for 14 min, followed by vacuum drying at a vacuum degree of 0.008 Pa for 150 min;

[0091] (4) Fill the limiting groove with a heating tube so that the spacing between the heating tube and the inner wall of the limiting groove is 0.005 mm, and buckle the cover plate onto the distribution body so that the lead-out hole and the cover plate are not connected, and the heating tube and the cover plate are not connected, thereby obtaining a distribution assembly;

[0092] (5) placing the distribution assembly in a vacuum environment with a pressure of 40 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 150 mA, and the welding speed is 7 mm / s;

[0093] (6) The gas distribution device is then placed in a vacuum and kept warm for 6 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0094] 40 gas distribution devices were prepared by the method provided in this embodiment. One gas distribution device needed to be repaired and a leveling operation was performed on it. The welding qualification rate was 97.5%, which reduced the time consumption by 15%.

[0095] Example 5

[0096] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0097] (1) Provide a distribution body, a cover plate and a heating tube with a resistance value of 10.8Ω;

[0098] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 3.5 mm, a lap block with a thickness of 0.6 mm is provided at one end of the extension portion away from the distribution body, a limiting groove is opened along the circumferential direction on the surface of the distribution body, and two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove;

[0099] (3) The distribution body and the cover plate were ultrasonically cleaned with ethanol at a frequency of 33 kHz for 9 minutes, followed by vacuum drying at a vacuum degree of 0.006 Pa for 90 minutes;

[0100] (4) Fill the limiting groove with a heating tube so that the spacing between the heating tube and the inner wall of the limiting groove is 0.01 mm, and snap the cover plate onto the distribution body, so that the lead-out hole and the cover plate are not connected, and the heating tube and the cover plate are not connected, thereby obtaining a distribution assembly;

[0101] (5) placing the distribution assembly in a vacuum environment with a pressure of 55 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 250 mA, and the welding speed is 10 mm / s;

[0102] (6) The gas distribution device is then placed in a vacuum and kept warm for 11 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0103] 40 gas distribution devices were prepared by the method provided in this embodiment. Two gas distribution devices needed to be repaired and leveling operations were required. The welding qualification rate was 95%, which reduced the time consumption by 12%.

[0104] Example 6

[0105] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0106] (1) providing a distribution body, a cover plate, a first heating tube with a resistance value of 11Ω, and a first heating tube with a resistance value of 10.7Ω;

[0107] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 4 mm, a lap block with a thickness of 0.5 mm is provided at one end of the extension portion away from the distribution body, two limiting grooves are provided along the circumferential direction on the surface of the distribution body, which are denoted as the first limiting groove and the second limiting groove, the first limiting groove is located on the inner side of the area surrounded by the second limiting groove, and four lead-out holes are provided on the lap block, the two lead-out holes located on the inner side are connected to the two ends of the first limiting groove, and the two lead-out holes located on the outermost side are connected to the two ends of the second limiting groove;

[0108] (3) The distribution body and the cover plate were ultrasonically cleaned with ethanol at a frequency of 40 kHz for 10 min, followed by vacuum drying at a vacuum degree of 0.01 Pa for 100 min;

[0109] (4) Filling the first heating tube into the first limiting groove and the second heating tube into the second limiting groove, so that the heating tube is completely fitted with the inner cavity side wall of the limiting groove without any gap, and buckling the cover plate onto the distribution body, so that the lead-out hole is not connected to the cover plate, and the heating tube is not connected to the cover plate, and the distribution assembly is obtained;

[0110] (5) placing the distribution assembly in a vacuum environment with a pressure of 50 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 400 mA, and the welding speed is 10 mm / s;

[0111] (6) The gas distribution device is then placed in a vacuum and kept warm for 10 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0112] 40 gas distribution devices were prepared by the method provided in this embodiment. No collapse occurred at the end of the extension portion, the welding pass rate was 100%, and the time consumption was reduced by 20%.

[0113] Example 7

[0114] This embodiment provides a method for preparing a gas distribution device with a heating tube, which specifically includes the following steps:

[0115] (1) providing a distribution body, a cover plate, a first heating tube with a resistance value of 11.4Ω, and a first heating tube with a resistance value of 10.8Ω;

[0116] (2) The distribution body has an extension portion, the linear length of the extension portion in the radial direction of the distribution body is 3.5 mm, a lap block with a thickness of 0.2 mm is provided at one end of the extension portion away from the distribution body, two limiting grooves are provided along the circumferential direction on the surface of the distribution body, denoted as the first limiting groove and the second limiting groove, the first limiting groove is located on the inner side of the area surrounded by the second limiting groove, four lead-out holes are provided on the lap block, the two lead-out holes located on the inner side are connected to the two ends of the first limiting groove, and the two lead-out holes located on the outermost side are connected to the two ends of the second limiting groove;

[0117] (3) The distribution body and the cover plate were ultrasonically cleaned with ethanol at a frequency of 35 kHz for 12 min, followed by vacuum drying at a vacuum degree of 0.01 Pa for 120 min;

[0118] (4) Filling the first heating tube into the first limiting groove and the second heating tube into the second limiting groove, so that the heating tube is completely fitted with the inner cavity side wall of the limiting groove without any gap, and buckling the cover plate onto the distribution body, so that the lead-out hole is not connected to the cover plate, and the heating tube is not connected to the cover plate, and the distribution assembly is obtained;

[0119] (5) placing the distribution assembly in a vacuum environment with a pressure of 65 mbar, and performing seam welding on the distribution assembly using an electron beam. After the seam welding reaches the overlap block, the direction of the electron beam is changed so that it is aligned with the lead-out hole for compensation welding to obtain a gas distribution device, wherein aluminum solder is used for both the seam welding and the compensation welding, the acceleration current is 240 mA, and the welding speed is 8 mm / s;

[0120] (6) The gas distribution device is then placed in a vacuum and kept warm for 8 minutes, then taken out and transferred to a CNC machine tool for fine processing, so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

[0121] 40 gas distribution devices were prepared by the method provided in this embodiment. One gas distribution device needed to be repaired and a leveling operation was performed on it. The welding qualification rate was 97.5%, which reduced the time consumption by 15%.

[0122] Example 8

[0123] This embodiment provides a method for preparing a gas distribution device with a heating tube. The difference from Embodiment 1 is that the linear length of the extension portion in the radial direction of the distribution body is 2 mm, and the remaining operating steps and process parameters are the same as those of Embodiment 1.

[0124] 40 gas distribution devices were prepared by the method provided in this embodiment, and 3 gas distribution devices needed to be repaired, which needed to be leveled. The welding pass rate was 92.5%, which reduced the time consumption by 12%. Compared with Example 1, the extension part in this embodiment was too short, which made the welding tail unstable and reduced the welding pass rate.

[0125] Example 9

[0126] This embodiment provides a method for preparing a gas distribution device with a heating tube. The difference from Embodiment 1 is that the linear length of the extension portion in the radial direction of the distribution body is 6 mm, and the remaining operating steps and process parameters are the same as those of Embodiment 1.

[0127] 40 gas distribution devices were prepared by the method provided in this embodiment, and no collapse occurred at the port, the welding pass rate was 100%, and the time consumption was reduced by 15%. Compared with Example 1, the extension part in this embodiment was too long, which prolonged the welding finishing time and reduced the production efficiency.

[0128] Example 10

[0129] This embodiment provides a method for preparing a gas distribution device with a heating tube. The difference from Embodiment 1 is that the thickness of the overlap block is 0.1 mm, and the remaining operation steps and process parameters are the same as those of Embodiment 1.

[0130] 40 gas distribution devices were prepared by the method provided in this embodiment, and 4 gas distribution devices needed to be repaired, and the welding qualified rate was 90%, which reduced the time consumption by 10%. Compared with Example 1, the thickness of the overlap block in this embodiment was too small, and the overlap block was easily punctured, resulting in welding failure.

[0131] Embodiment 11

[0132] This embodiment provides a method for preparing a gas distribution device with a heating tube. The difference from Embodiment 1 is that the thickness of the overlap block is 1.2 mm, and the remaining operation steps and process parameters are the same as those of Embodiment 1.

[0133] 40 gas distribution devices were prepared by the method provided in this embodiment, and no collapse occurred at the ports, the welding pass rate was 100%, and the time consumption was reduced by 15%. Compared with Example 1, the thickness of the overlap block in this embodiment is too large, which prolongs the welding time and is not conducive to improving production efficiency.

[0134] Comparative Example 1

[0135] This comparative example provides a method for preparing a gas distribution device with a heating tube, which is different from Example 1 in that: Figure 3As shown, the outlet 6 passes through the upper end surface of the lap block 5. After the cover plate 2 is buckled, the lap block 5 is connected to the cover plate 2. The remaining operation steps and process parameters are the same as those in Example 1.

[0136] 40 gas distribution devices were prepared by the method provided in this comparative example, and the number of gas distribution devices that needed to be repaired was 6, and they needed to be leveled. The welding pass rate was 85%, and the time consumption was extended by 20%. Compared with Example 1, the preparation method of this comparative example had the problem of collapse or breakdown when welding to the port, which increased the number of products that needed to be leveled, thereby extending the production time.

[0137] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A method for preparing a gas distribution device with a heating tube, characterized in that: The preparation method comprises: (I) providing a distribution body, a cover plate and at least one heating tube; (II) The distribution body has an extension portion, and a lap block is provided at one end of the extension portion away from the distribution body. At least one limiting groove is opened along the circumferential direction on the surface of the distribution body, and at least two lead-out holes are provided on the lap block, and the two lead-out holes are respectively connected to the two ends of the limiting groove; (III) filling the limiting groove with a heating tube, and buckling the cover plate onto the distribution body, with the outlet hole not being connected to the cover plate, to obtain a distribution assembly; (IV) placing the distribution assembly in a vacuum environment, and performing weld welding on the distribution assembly using an electron beam. After the weld reaches the overlap block, changing the direction of the electron beam so that it is aligned with the lead-out hole for compensation welding, thereby obtaining a gas distribution device.

2. The preparation method according to claim 1, characterized in that: In step (I), the distribution body, cover plate and lap block are all made of aluminum alloy; Preferably, the resistance value of the heating tube is 10.7-11.4Ω.

3. The preparation method according to claim 1 or 2, characterized in that: In step (II), the linear length of the extension portion in the radial direction of the distribution body is 3 to 5 mm; Preferably, the thickness of the overlapping block is 0.2-1 mm.

4. The preparation method according to any one of claims 1 to 3, characterized in that: In step (III), after the filling is completed, the distance between the heating tube and the inner wall of the limiting groove is 0 to 0.03 mm; Preferably, after the cover plate is buckled, the heating tube is not connected to the cover plate.

5. The preparation method according to any one of claims 1 to 4, characterized in that: In step (IV), the pressure in the vacuum environment is 20 to 80 mbar.

6. The preparation method according to any one of claims 1 to 5, characterized in that: In step (IV), the acceleration voltages of the weld seam welding and the compensation welding are independently 60 to 90 kV; Preferably, the acceleration currents of the weld seam welding and the compensation welding are independently 150-600 mA; Preferably, the welding speeds of the weld seam welding and the compensation welding are independently 6 to 12 mm / s; Preferably, aluminum solder is used for the weld welding and compensation welding.

7. The preparation method according to any one of claims 1 to 6, characterized in that: In step (IV), after the compensation welding is completed, the gas distribution device is placed under vacuum and kept warm for 5 to 12 minutes.

8. The preparation method according to any one of claims 1 to 7, characterized in that: The preparation method further comprises: before the filling heating tube, the distribution body and the cover plate are respectively cleaned and vacuum dried in sequence; Preferably, the specific method of the cleaning treatment is: ultrasonic cleaning using a cleaning liquid; Preferably, the cleaning solution comprises ethanol and / or isopropanol; Preferably, the frequency of the ultrasonic cleaning is 30 to 40 kHz; Preferably, the ultrasonic cleaning time is 8 to 15 minutes; Preferably, the vacuum degree of the vacuum drying is 0.005-0.03 Pa; Preferably, the vacuum drying time is 90 to 150 minutes.

9. The preparation method according to any one of claims 1 to 8, characterized in that: The preparation method further includes: transferring the gas distribution device to a CNC machine tool for fine machining so that the flatness of the outer surface of the gas distribution device is ≤0.05 mm.

10. A gas distribution device with a heating tube, characterized in that: The gas distribution device with a heating tube is prepared by the preparation method described in any one of claims 1-9.

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