Sealing valve and scanning electron microscope

Abstract

The invention discloses a sealing valve and a scanning electron microscope, the sealing valve comprises a sealing member, a force applying member and an adjusting member, and the sealing member comprises a sealing surface for plugging and a mounting recess formed in the back surface of the sealing surface; the force applying part is used for providing pressure for the sealing part and comprises a cantilever extending towards the opening, the cantilever can extend into the mounting concave part, and the surface of the free end of the cantilever is a curved surface protruding towards the sealing part; and the adjusting piece is arranged in the mounting concave part in a rolling manner and is in rolling fit with the curved surface of the free end. According to the sealing valve and the scanning electron microscope, the installation angle of the sealing element can be adjusted in a large range, it is guaranteed that the sealing element meets the levelness requirement, and the vacuum sealing effect is guaranteed.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor detection equipment, and in particular, relates to a sealing valve and a scanning electron microscope. Background Art

[0002] In semiconductor equipment, most manufacturing or testing equipment needs to be in a vacuum environment. Among them, the scanning electron microscope in the wafer defect detection equipment has high requirements for the vacuum environment. It is necessary to ensure that the inside of the scanning electron microscope is in a high vacuum environment to avoid damage to internal parts.

[0003] In order to ensure the high vacuum requirement inside the SEM, a sealing valve is usually used to seal the SEM housing. The current sealing valve is usually a customized part that needs to be assembled with the SEM. The sealing structures of the sealing valve are pressed and sealed, and the relative level between adjacent sealing structures cannot be guaranteed. When adjusting the sealing structure inside the housing, the adjustment range is too small to meet the sealing level requirement, or the level cannot be adjusted, so that a complete vacuum seal cannot be performed, resulting in contamination of internal parts. Summary of the invention

[0004] The present application provides a sealing valve and a scanning electron microscope, which can adjust the installation angle of the sealing component within a wide range, thereby ensuring that the sealing component meets the sealing horizontality requirement and ensures the vacuum sealing effect.

[0005] The present application provides a sealing valve, which includes a sealing member for sealing an opening to be sealed, the sealing member including a sealing surface for sealing and a mounting recess opened on the back side of the sealing surface; a force-applying member for providing pressure to the sealing member, the force-applying member including a cantilever extending toward the opening, the cantilever being able to extend into the mounting recess, and the surface of the free end of the cantilever being a curved surface convex toward the sealing member; and an adjusting member being rollably arranged in the mounting recess and rollingly matched with the curved surface of the free end.

[0006] As in the sealing valve above, the mounting recess includes a connecting portion and a transmission portion which are connected to each other, the connecting portion is a hole-shaped structure extending along the first direction, one end of the connecting portion is opened on the back side of the sealing surface, and the other end is connected to the transmission portion, and the surface of the transmission portion is an arc-shaped concave structure for rolling cooperation with the adjusting member.

[0007] In the sealing valve as above, the adjusting member is in a spherical structure, the surface of the transmission part is in a partially spherical concave structure, and the adjusting member is rollingly installed in the transmission part.

[0008] In the sealing valve as above, the free end is in a partially spherical structure, so that the regulating member can roll with the free end within the spherical concave surface of the transmission part.

[0009] In the sealing valve as above, the radius of the sphere of the regulating member is 30% to 50% of the radius of the spherical concave surface of the transmission part.

[0010] As in the sealing valve above, the force-applying member further includes a force-applying body, the cantilever further includes a connecting portion, the free end is connected to the force-applying body via the connecting portion, and the force-applying body is movably arranged along a first direction to drive the free end to move along the first direction in the mounting recess.

[0011] The sealing valve as above, wherein the sealing valve also includes: a packaging component, which is detachably mounted on the side of the sealing component having a mounting recess, the packaging component has a connecting hole opposite to the mounting recess, the connecting portion is penetrated in the connecting hole along a first direction, and the aperture of the connecting hole is smaller than the diameter of the free end to limit the free end from detaching from the mounting recess.

[0012] As in the sealing valve above, the sealing member further comprises a sealing groove provided on the sealing surface, the sealing groove being an annular groove, and the sealing valve further comprises: a sealing ring having an annular structure, the sealing ring being installed in the sealing groove, and at least a portion of the sealing ring protruding from the sealing surface.

[0013] In the sealing valve as above, the cross section of the sealing groove perpendicular to its own extension direction is trapezoidal, and the width of the trapezoid gradually decreases along the direction from the bottom wall of the sealing groove to the opening of the sealing groove.

[0014] The sealing valve as above, wherein the adjusting member is made of zirconium oxide material.

[0015] On the other hand, the present application also provides a sealing valve as described above, wherein the scanning electron microscope further comprises: a sealing plate having air holes for vacuuming, and the openings of the air holes are arranged toward the sealing surface of the sealing valve.

[0016] The sealing valve of the present application includes a sealing member, an adjusting member and a force-applying member. The sealing member has a sealing surface for sealing an opening and a mounting recess provided on the back side of the sealing surface. The cantilever of the force-applying member can extend into the mounting recess, and the free end of the cantilever can provide pressure to the adjusting member in the mounting recess. Therefore, the setting of the adjusting member can transmit the pressure of the free end to the sealing member. Moreover, since the adjusting member is rollingly arranged in the mounting recess and can roll with the curved surface of the free end of the cantilever, the rolling adjusting member can transmit the pressure of the free end to different positions of the mounting recess, so that the sealing surface of the sealing member rotates relative to the plane of the opening after being subjected to the applied pressure, thereby expanding the angle adjustment range of the force-applying member for the sealing surface, thereby realizing the adjustment of the sealing surface angle, so that the sealing surface of the sealing member can meet the horizontality requirement required for sealing, thereby ensuring the vacuum sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 This is a schematic diagram of the overall structure of the sealing valve according to an embodiment of the present application;

[0019] Figure 2 This is a schematic diagram of the cooperation between the sealing member, the adjusting member and the force applying member of the sealing valve according to the embodiment of the present application.

[0020] Description of Figure Numbers:

[0021] 10. Sealing member; 11. Sealing surface; 12. Mounting recess; 121. Connecting portion; 122. Transmission portion; 13. Sealing groove; 20. Adjusting member; 30. Force-applying member; 31. Cantilever; 311. Free end; 312. Connecting portion; 32. Force-applying body; 40. Packaging member; 41. Connecting hole; 50. Sealing ring; 60. Sealing plate; 61. Air hole;

[0022] X, first direction. DETAILED DESCRIPTION

[0023] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0024] like Figure 1 and Figure 2 As shown, an embodiment of the present application provides a sealing valve, which includes a sealing member 10, an adjusting member 20 and a force-applying member 30, which are used to seal the opening to be sealed, and the sealing member 10 includes a sealing surface 11 for sealing and a mounting recess 12 opened on the back side of the sealing surface 11; the force-applying member 30 is used to provide pressure to the sealing member 10, and the force-applying member 30 includes a cantilever 31 extending toward the opening, the cantilever 31 can be extended into the mounting recess 12, and the surface of the free end 311 of the cantilever 31 is a curved surface convex toward the sealing member 10; the adjusting member 20 can be rotatably arranged in the mounting recess 12 and rollingly matched with the curved surface of the free end 311.

[0025] In a specific implementation, the sealing valve of the present application includes a sealing member 10, an adjusting member 20 and a force member 30. The sealing member 10 has a sealing surface 11 for blocking an opening and a mounting recess 12 provided on the back of the sealing surface 11. The cantilever 31 of the force member 30 can extend into the mounting recess 12, and the free end 311 of the cantilever 31 can provide pressure to the adjusting member 20 in the mounting recess 12. Therefore, the setting of the adjusting member 20 can transmit the pressure of the free end 311 to the sealing member 10, and since the adjusting member 20 is rolled and arranged in the mounting recess The adjusting member 20 is in the part 12 and can roll with the curved surface of the free end 311 of the cantilever 31. The rolling adjusting member 20 can transmit the pressure of the free end 311 to different positions of the mounting recess 12, so that the sealing surface 11 of the seal 10 rotates relative to the opening plane after being subjected to the applied pressure, thereby expanding the angle adjustment range of the sealing surface 11 by the force-applying member 30, thereby realizing the adjustment of the angle of the sealing surface 11, so that the sealing surface 11 of the seal 10 can meet the horizontality requirement required for sealing, thereby ensuring the vacuum sealing effect.

[0026] Therefore, based on the sealing range of the sealing surface 11 itself, the setting of the adjustment member 20 expands the angle adjustment range of the force member 30 with respect to the sealing surface 11, so that the sealing surface 11 of the seal 10 can meet the horizontality requirement for sealing, thereby ensuring the vacuum sealing effect.

[0027] Specifically, the orthographic projection of the free end 311 on the sealing surface 11 is a circle, the orthographic projection of the mounting recess 12 on the sealing surface 11 is a circle concentric with the orthographic projection of the free end 311, and the circular diameter of the mounting recess 12 is larger than the circular diameter of the free end 311, so that it can cover the circle of the free end 311. When adjusting the force range, the adjusting member 20 can be rolled in different directions in the mounting recess 12 according to the actual required angle adjustment, so that the sealing surface 11 is level with the opening, thereby achieving complete sealing of the opening.

[0028] like Figure 1 and Figure 2 As shown, the sealing valve of the embodiment of the present application, wherein the mounting recess 12 includes a connecting portion 121 and a transmission portion 122 that are connected to each other, the connecting portion 121 is a hole-like structure extending along the first direction X, one end of the connecting portion 121 is opened on the back side of the sealing surface 11, and the other end is connected to the transmission portion 122, and the surface of the transmission portion 122 is an arc-shaped concave structure for rolling cooperation with the adjusting member 20.

[0029] In specific implementation, the transmission part 122 of the installation recess 12 is close to the sealing surface 11 and is spaced from the sealing surface 11, and the connecting part 121 is close to the back of the sealing surface 11 and is arranged through the back of the sealing surface 11 to provide a passing space for the installation of the force-applying member 30. After the force-applying member 30 is installed, when the adjusting member 20 is used to perform transmission cooperation with the installation recess 12, the connecting part 121 provides a movable space for the cantilever 31 of the force-applying member 30, so that the cantilever 31 can move freely in the connecting part 121, thereby driving the rolling cooperation between the free end 311 and the adjusting member 20, and allowing the adjusting member 20 to roll freely in the transmission part 122, so as to achieve the angle adjustment of the sealing surface 11.

[0030] The surface of the transmission part 122 is an arc-shaped concave structure. When the adjustment member 20 rolls in the transmission part 122, it can generate pressure on the contact position, thereby pressing the corresponding sealing surface 11 downward until it is completely fitted to the opening, thereby achieving angle adjustment of the sealing surface 11.

[0031] Furthermore, the edge of the arc-shaped concave transmission portion 122 can have a certain blocking effect on the rolling of the adjusting member 20 , so as to reduce the probability of the adjusting member 20 being separated from the transmission portion 122 .

[0032] like Figure 1 and Figure 2 As shown, in the sealing valve of the embodiment of the present application, the adjusting member 20 is in a spherical structure, the surface of the transmission part 122 is in a partially spherical concave structure, and the adjusting member 20 is rollingly installed in the transmission part 122.

[0033] In specific implementation, the adjusting member 20 with a spherical structure can roll freely in the transmission part 122 with a partially spherical concave surface to achieve angle adjustment in all directions, thereby increasing the adjustment range and making the sealing surface 11 have a completely sealed effect after adjustment.

[0034] The surface of the connecting portion 121 is a cylindrical structure extending along the first direction X, and the surface of the transmission portion 122 is a hemispherical concave structure. The surface of the connecting portion 121 is connected to the surface of the transmission portion 122 and the two are tangentially connected. Moreover, since the connecting portion 121 has a certain height in the first direction X, the adjusting member 20 will not roll to completely detach from the mounting recess 12, and it can always roll within the hemispherical concave range of the transmission portion 122, thereby applying pressure to the sealing member 10.

[0035] Optionally, the adjusting member 20 may also be a cylindrical structure or an elliptical structure, etc., which can roll in the mounting recess 12 and is suitable for angle adjustment in a fixed direction.

[0036] like Figure 1 and Figure 2As shown, in the sealing valve of the embodiment of the present application, the free end 311 is in a partial spherical structure, so that the regulating member 20 can roll with the free end 311 within the spherical concave range of the transmission part 122 .

[0037] In a specific implementation, the free end 311 is a partial spherical structure, which is compatible with the transmission part 122 whose surface is a partial spherical concave surface. When the adjusting member 20 with a spherical structure rolls, the free ends 311 and the transmission part 122 on the corresponding sides roll relative to it in opposite directions, thereby realizing the motion transmission from the force-applying member 30 to the sealing member 10.

[0038] When the free end 311 and the adjusting member 20 roll relative to each other until they come into contact with the edge of the hemispherical structure, the adjusting member 20 also rolls to the edge of the hemispherical concave surface in the transmission part 122; when the free end 311 and the adjusting member 20 roll relative to each other until they come into contact with the middle of the hemispherical structure, the adjusting member 20 also rolls to the middle of the hemispherical concave surface in the transmission part 122. Therefore, the free end 311 of the hemispherical structure can adapt to the adjustment range of the adjusting member 20 in the transmission part 122, so that the adjusting member 20 can achieve balance at all positions of the transmission part 122.

[0039] like Figure 1 and Figure 2 As shown, in the sealing valve of the embodiment of the present application, the spherical radius of the adjusting member 20 is 30% to 50% of the spherical concave radius of the transmission part 122. Within this range, the spherical radius of the adjusting member 20 is less than half of the spherical concave radius of the transmission part 122, so that the diameter of the adjusting member 20 can be smaller than the radius of the spherical concave of the transmission part 122, so that the adjusting member 20 can be accommodated in the transmission part 122 as a whole, and the function of rolling adjustment can be achieved; and the spherical radius of the adjusting member 20 can be greater than 30% of the spherical concave radius of the transmission part 122, so that the adjusting member 20 has a sufficient volume, and when the free end 311 moves up and down along the first direction X, it does not need to move too much, that is, the adjusting member 20 can be freely rolled in the transmission part 122, thereby reducing the difficulty of adjustment.

[0040] like Figure 1 and Figure 2 As shown, the sealing valve of an embodiment of the present application, wherein the force-applying member 30 also includes a force-applying body 32, the cantilever 31 also includes a connecting portion 312, the free end 311 and the force-applying body 32 are connected via the connecting portion 312, and the force-applying body 32 is movably arranged along the first direction X to drive the free end 311 to move along the first direction X in the mounting recess 12.

[0041] In specific implementation, the force-applying body 32 drives the free end 311 to move downward along the first direction X, which can generate pressure on the adjusting member 20 of the spherical structure, and the transmission part 122 of the adjusting member 20 and the mounting recess 12 can also generate pressure. When the sealing surface 11 is relatively inclined with the plane where the opening is located, the pressure will cause the sealing surface 11 to rotate toward an angle parallel to the opening plane. When the sealing member 10 rotates, the adjusting member 20 and the free end 311 and the transmission part 122 will all roll relative to each other. Therefore, by moving the force-applying body 32 along the first direction X, the angle of the sealing surface 11 can be achieved, so that the sealing surface 11 can meet the horizontality requirement required for sealing. This adjustment method is simple to operate, and there is no need to specifically control the adjustment direction of the force-applying member 30, which simplifies the adjustment and operation steps.

[0042] like Figure 1 and Figure 2 As shown, the sealing valve of an embodiment of the present application, wherein the sealing valve also includes: a packaging component 40, which is detachably mounted on the side of the sealing component 10 having the mounting recess 12, the packaging component 40 has a connecting hole 41 opposite to the mounting recess 12, the connecting portion 312 is penetrated in the connecting hole 41 along the first direction X, and the aperture of the connecting hole 41 is smaller than the diameter of the free end 311 to limit the free end 311 from detaching from the mounting recess 12.

[0043] During specific implementation, when the force-applying body 32 drives the cantilever 31 to move up and down along the first direction X, the connecting portion 312 of the cantilever 31 moves along the first direction X in the connecting hole 41 of the package 40, and the free end 311 can move freely along the first direction X in the mounting recess 12, so the installation of the package 40 will not affect the overall movement of the cantilever 31.

[0044] Moreover, the aperture of the connecting hole 41 is smaller than the diameter of the free end 311. When the free end 311 moves in a direction away from the sealing surface 11, the package 40 will restrict the free end 311 at the exit of the mounting recess 12. The plane of the free end 311 of the hemispherical structure will abut against the package 40, thereby preventing the free end 311 from detaching from the mounting recess 12, and further preventing the adjusting member 20 of the spherical structure from detaching from the mounting recess 12, thereby eliminating the need for reassembly after detachment.

[0045] like Figure 1 and Figure 2 As shown, the sealing valve of the embodiment of the present application, wherein the sealing member 10 further has a sealing groove 13 opened on the sealing surface 11, the sealing groove 13 is an annular groove, and the sealing valve also includes a sealing ring 50 in an annular structure, the sealing ring 50 is installed in the sealing groove 13, and at least part of the sealing ring 50 protrudes from the sealing surface 11.

[0046] In a specific implementation, the sealing ring 50 is installed in the sealing groove 13. When the sealing surface 11 seals the opening, the sealing ring 50 can be arranged around the opening. Since at least part of the sealing ring 50 protrudes from the sealing surface 11, the contact between the sealing ring 50 and the surface where the opening is located is closer, thereby improving the sealing effect of the opening.

[0047] Specifically, the cross-section of the sealing groove 13 perpendicular to its own extension direction is trapezoidal, and the width of the trapezoid gradually decreases along the direction from the bottom wall of the sealing groove 13 to the opening of the sealing groove 13, that is, the lower bottom of the trapezoid is the bottom wall of the sealing groove 13, the two sides of the trapezoid are the two side walls of the sealing groove 13, and the upper bottom of the trapezoid is the opening of the sealing groove 13. Therefore, the width of the sealing groove 13 at the opening of the sealing surface 11 is the smallest. Such a shape setting can make most of the sealing ring 50 tightly clamped therein, thereby preventing the sealing ring 50 from falling off therein and affecting the sealing effect.

[0048] Specifically, the sealing ring 50 is made of an elastic rubber material. When the sealing ring 50 is sleeved inside the sealing groove 13, it can be tightened to achieve a stable connection with the sealing groove 13. When the sealing ring 50 is squeezed downward along the first direction X, the sealing ring 50 can undergo elastic deformation, thereby tightly abutting against the surface where the opening is located, further improving the sealing effect.

[0049] In the sealing valve of the embodiment of the present application, the cross-sectional shape of the sealing ring 50 perpendicular to its own circumference is one of a circle, an ellipse and a trapezoid. Figure 2 As shown, a sealing ring 50 with a circular cross-section is adopted, so that it is convenient to be clamped between the sealing ring 50 and the trapezoidal sealing groove 13, thereby ensuring the fixing effect of the sealing ring 50; while a sealing ring 50 with an elliptical or trapezoidal cross-section is adopted, the portion of the sealing ring 50 protruding from the sealing groove 13 tends to gradually decrease in width, that is, along the direction from the sealing surface 11 to the opening, the cross-sectional width of the protruding portion of the sealing ring 50 gradually decreases, so that when the sealing ring 50 is squeezed, the required pressure is smaller, and the overall compression of the sealing ring 50 is larger, thereby improving the sealing effect.

[0050] In the sealing valve of the embodiment of the present application, the adjusting member 20 is made of zirconium oxide material.

[0051] The adjustment member 20 made of zirconia material has a high hardness and will not be easily deformed under the extrusion of the sealing member 10 and the force member 30, thereby ensuring the adjustment accuracy of the horizontality of the sealing surface 11, thereby ensuring the sealing effect of the sealing surface 11 on the opening. In addition, the surface of the adjustment member 20 made of zirconia material is relatively smooth, which can meet the requirements of rolling cooperation between it and the sealing member 10 and the force member 30, avoiding the situation in which the adjustment member 20 cannot roll during the adjustment process and cannot be adjusted.

[0052] Optionally, the adjusting member 20 may be made of metal materials such as steel, which needs to meet the requirements of smooth surface and high hardness.

[0053] The embodiment of the present application further provides a sealing valve as described above, wherein the scanning electron microscope further comprises: a sealing plate 60, wherein the sealing plate 60 has an air hole 61 for vacuuming, and the opening of the air hole 61 is arranged toward the sealing surface 11 of the sealing valve.

[0054] In a specific implementation, the sealing plate 60 has an air hole 61 for vacuuming, and the air hole 61 runs through the sealing plate 60. The scanning electron microscope vacuumizes the internal environment through the air hole 61 of the sealing plate 60. Both ends of the air hole 61 have openings, and the opening toward the sealing member 10 can be blocked by the sealing surface 11, so that the air hole 61 is completely sealed.

[0055] The sealing valve in the embodiment of the present application is used to seal the air hole 61. The sealing valve includes a sealing member 10, an adjusting member 20 and a force member 30. The sealing member 10 has a sealing surface 11 for blocking the air hole 61 and a mounting recess 12 provided on the back of the sealing surface 11. The cantilever 31 of the force member 30 can extend into the mounting recess 12. The free end 311 of the cantilever 31 can provide pressure to the adjusting member 20 in the mounting recess 12. Therefore, the setting of the adjusting member 20 can transmit the pressure of the free end 311 to the sealing member 10, and because the adjusting member 20 is The adjusting member 20 is arranged in the mounting recess 12 and can be rollingly matched with the curved surface of the free end 311 of the cantilever 31. The rolling adjusting member 20 can transmit the pressure of the free end 311 to different positions of the mounting recess 12, so that the sealing surface 11 of the sealing member 10 rotates relative to the opening plane after being subjected to the applied pressure, thereby expanding the angle adjustment range of the force applying member 30 for the sealing surface 11, thereby realizing the adjustment of the angle of the sealing surface 11, so that the sealing surface 11 of the sealing member 10 can meet the horizontality requirement required for sealing, and ensure the vacuum sealing effect.

[0056] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0057] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A sealing valve, characterized in that: include: A sealing member (10) for sealing an opening to be blocked, the sealing member (10) comprising a sealing surface (11) for blocking and a mounting recess (12) provided on the back side of the sealing surface (11); a force-applying member (30) for applying pressure to the sealing member (10), the force-applying member (30) comprising a cantilever (31) extending toward the opening, the cantilever (31) being capable of extending into the mounting recess (12), and a surface of a free end (311) of the cantilever (31) being a curved surface convex toward the sealing member (10); The adjusting member (20) is rollably disposed in the mounting recess (12) and is rollingly engaged with the curved surface of the free end (311).

2. The sealing valve according to claim 1, characterized in that: The mounting recess (12) comprises a communicating portion (121) and a transmission portion (122) which are connected to each other; the communicating portion (121) is a hole-shaped structure extending along a first direction (X); one end of the communicating portion (121) is opened on the back side of the sealing surface (11), and the other end is connected to the transmission portion (122); the surface of the transmission portion (122) is an arc-shaped concave structure, which is used for rolling cooperation with the adjusting member (20).

3. The sealing valve according to claim 2, characterized in that: The adjusting member (20) is in a spherical structure, the surface of the transmission part (122) is in a partially spherical concave structure, and the adjusting member (20) is rollingly installed in the transmission part (122).

4. The sealing valve according to claim 3, characterized in that: The free end (311) is in a partially spherical structure, so that the adjusting member (20) can be rollingly matched with the free end (311) within the range of the spherical concave surface of the transmission part (122).

5. The sealing valve according to claim 4, characterized in that: The spherical radius of the adjusting member (20) is 30% to 50% of the spherical concave radius of the transmission part (122).

6. The sealing valve according to claim 1, characterized in that: The force-applying member (30) further includes a force-applying body (32), and the cantilever (31) further includes a connecting portion (312), wherein the free end (311) is connected to the force-applying body (32) via the connecting portion (312), and the force-applying body (32) is movably arranged along a first direction (X) to drive the free end (311) to move along the first direction (X) in the mounting recess (12).

7. The sealing valve according to claim 6, characterized in that: The sealing valve further comprises: The packaging component (40) is detachably mounted on the side of the sealing component (10) having the mounting recess (12); the packaging component (40) has a connecting hole (41) opposite to the mounting recess (12); the connecting portion (312) is penetrated in the connecting hole (41) along the first direction (X); the aperture of the connecting hole (41) is smaller than the diameter of the free end (311) so as to limit the free end (311) from being separated from the mounting recess (12).

8. The sealing valve according to claim 1, characterized in that: The sealing member (10) further comprises a sealing groove (13) formed on the sealing surface (11), wherein the sealing groove (13) is an annular groove. The sealing valve further comprises: The sealing ring (50) is an annular structure, and the sealing ring (50) is installed in the sealing groove (13), and at least a part of the sealing ring (50) protrudes from the sealing surface (11).

9. The sealing valve according to claim 8, characterized in that: The cross section of the sealing groove (13) perpendicular to its own extension direction is trapezoidal, and the width of the trapezoid gradually decreases along the direction from the bottom wall of the sealing groove (13) to the opening of the sealing groove (13).

10. The sealing valve according to claim 1, characterized in that: The adjusting member (20) is made of zirconium oxide material.

11. A scanning electron microscope, characterized in that: The sealing valve according to any one of claims 1 to 10, wherein the scanning electron microscope further comprises: A sealing plate (60), wherein the sealing plate (60) has an air hole (61) for vacuuming, and the opening of the air hole (61) is arranged toward the sealing surface (11) of the sealing valve.

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