Evaporation device

Abstract

The present invention relates to an evaporation device for evaporating evaporation materials onto a substrate, comprising an evaporation chamber; an evaporator unit, comprising an evaporator, the evaporator being arranged in the evaporation chamber, and the evaporation material being contained in the evaporator; and an evaporation source, which is arranged in the evaporator, the evaporation source comprising a line source component, the line source component comprising a first heating component, a second heating component and a temperature compensation component arranged in the evaporator, wherein the first heating component is arranged at the top of the evaporator, the second heating component and the temperature compensation component are arranged at the bottom of the evaporator, and the length of the temperature compensation component is 10%-30% of the length of the second heating component. The present invention can adjust the bottom heating temperature of the evaporator, avoid excessive temperature difference at various places in the bottom of the evaporator, effectively regulate the heating temperature to the target temperature range, realize fine control of the line source temperature, and the control process is simple and fast, which is convenient for operators to operate, and thus can also ensure the stability of the evaporation effect, and effectively improve product quality.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, in particular to an evaporation device. Background Art

[0002] Vacuum coating refers to a method in which organic or inorganic materials are heated by a heating wire using various physical or chemical methods under high vacuum conditions. The evaporation material evaporates due to heat, and atoms or molecules escape from the surface to form a vapor flow, which is incident on the surface of the substrate and condenses to form a solid film. Vacuum coating technology is divided into physical vapor deposition (PVD) and chemical vapor deposition (CVD). Physical vapor deposition is mainly divided into vacuum evaporation coating, vacuum sputtering coating, and vacuum ion coating. In the preparation of perovskite layers, the mainstream method is evaporation coating, referred to as evaporation. The evaporation source of the evaporation chamber generally includes three types: point source, line source, and surface source. When a line source is used as the evaporation source, a resistance wire is usually used as a heater so that the evaporation material reaches the target temperature, forming a vapor flow that is incident on the surface of the substrate, and then condenses to form a solid film. In the prior art, heating wires are arranged in the crucible of the cavity to heat the evaporation material. Specifically, the heating wires are arranged around the material to be evaporated so that the material to be evaporated can be heated evenly. During the heating process, it is necessary to ensure that the heating temperature of the bottom is consistent with that of the surroundings. In the prior art, three groups of heating wires are usually arranged in the evaporator, one group at the top and two groups at the bottom. It is necessary to ensure that the heating temperature of the bottom is uniform, so the heating temperature of the heating wires at the bottom needs to be consistent.

[0003] However, a defect in the prior art is that in actual production, during the heating process of the evaporation material, the heating temperatures of the two groups of heating wires located at the bottom of the evaporator have slight differences, and this difference will also affect the evaporation effect, thereby reducing product quality. Summary of the invention

[0004] To this end, the technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide an evaporation device that can more accurately control the temperature of the evaporation source, thereby ensuring the consistency of the bottom heating temperature and the side heating temperature of the evaporator, thereby ensuring the stability of the evaporation effect and effectively improving product quality.

[0005] In order to solve the above technical problems, the present invention provides an evaporation device for evaporating an evaporation material onto a substrate, comprising: Evaporation chamber; an evaporator unit, comprising an evaporator, wherein the evaporator is disposed in the evaporation chamber, and the evaporation material is contained in the evaporator; An evaporation source is arranged in the evaporator, the evaporation source comprises a line source component, the line source component comprises a first heating component, a second heating component and a temperature compensation component arranged in the evaporator, wherein the first heating component is arranged at the top of the evaporator, the second heating component and the temperature compensation component are arranged at the bottom of the evaporator, and the length of the temperature compensation component is 10%-30% of the length of the second heating component; A temperature detection unit connected to the line source component to detect the temperature of the line source component; A control unit is connected to the evaporation source and the temperature monitoring unit to obtain the temperature of the evaporation source and to control the consistency of the heating temperature of the evaporator by adjusting the temperature of the temperature compensation component.

[0006] In one embodiment of the present invention, the length of the temperature compensation component is 10% of the length of the second heating component.

[0007] In one embodiment of the present invention, the first heating component includes at least one first heating wire, which is straight and extends along the side wall of the evaporator; the second heating component includes a second heating wire and a third heating wire, which are bent; the temperature compensation component includes a fourth heating wire and a fifth heating wire, which are bent.

[0008] In one embodiment of the present invention, the bottom of the evaporator has a first area and a second area, the second heating wire is located in the first area, and the third heating wire is located in the second area.

[0009] In one embodiment of the present invention, the fourth heating wire is located in the first area, and the fifth heating wire is located in the second area; the length of the fourth heating wire is 10% of the length of the second heating wire, and the length of the fifth heating wire is 10% of the length of the third heating wire.

[0010] In one embodiment of the present invention, the projections of the second heating wire and the fourth heating wire along the depth direction of the evaporator overlap with each other; the projections of the third heating wire and the fifth heating wire along the depth direction of the evaporator overlap with each other.

[0011] In one embodiment of the present invention, the first region and the second region have the same area.

[0012] In one embodiment of the present invention, the temperature detection unit includes a temperature sensor, and the temperature sensor is connected to the line source component.

[0013] In one embodiment of the present invention, a heating power supply is further included, and the heating power supply is electrically connected to the line source assembly.

[0014] In one embodiment of the present invention, the evaporator comprises a crucible.

[0015] The above technical solution of the present invention has the following advantages compared with the prior art: The evaporation device of the present invention is provided with an evaporation chamber, an evaporator unit, an evaporation source, a temperature detection unit and a control unit, wherein the evaporation source is arranged in the evaporator for heating the evaporation material in the evaporator. Specifically, the evaporation source includes a first heating component, a second heating component and a temperature compensation component, wherein the first heating component is arranged at the top of the evaporator, the second heating component is arranged at the bottom of the evaporator, and the temperature compensation component is arranged at the bottom of the evaporator and adjacent to the second heating component, so that, based on the temperature detection result of the line source component by the temperature detection unit, when the heating temperature does not reach the specified temperature range, the heating temperature of the second heating component is compensated by the temperature compensation component, so that the heating temperature of the bottom of the evaporator can be kept within the specified temperature range, so that the bottom heating temperature of the evaporator can be more finely adjusted to ensure the uniformity of the bottom heating temperature, and the temperature compensation component cooperates with the second heating component to avoid excessive temperature difference at various places in the bottom of the evaporator, effectively adjust the heating temperature to the target temperature range, and realize the fine control of the line source temperature, and the control process is simple and fast, which is convenient for operators to control, and thus can also ensure the stability of the evaporation effect, and effectively improve product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein:

[0017] Figure 1 It is a schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0018] Figure 2 It is a cross-sectional schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0019] Figure 3 It is a schematic diagram of the structure of the second heating wire and the fourth heating wire in a preferred embodiment of the present invention.

[0020] Figure 4 It is a schematic structural diagram of the third heating wire and the fifth heating wire of the preferred embodiment of the present invention.

[0021] Figure 5 These are the test results of 10 temperature tests using the evaporation device of the present invention.

[0022] Figure 6 yes Figure 5 Schematic diagram of temperature test results when the target temperature is set to 50 degrees.

[0023] Figure 7 yes Figure 5 Schematic diagram of temperature test results when the target temperature is set to 200 degrees.

[0024] Explanation of the reference numerals in the specification: 1. evaporator; 11. first area; 12. second area; 2. first heating component; 20. first heating wire; 30. second heating wire; 31. third heating wire; 40. fourth heating wire; 41. fifth heating wire. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0026] Reference Figure 1 and Figure 2 As shown, the present invention discloses an evaporation device for evaporating a evaporation material onto a substrate. The evaporation device includes an evaporation chamber. It should be noted that the evaporation chamber is set to a vacuum environment.

[0027] The evaporation device also includes an evaporator unit, which includes an evaporator 1. The evaporator 1 is arranged in the evaporation chamber, and the evaporation material is contained in the evaporator 1, so that the evaporation material is heated in the evaporator 1 to reach a specified temperature, thereby forming a vapor flow that is incident on the surface of the substrate and condensed to form a thin film.

[0028] The evaporation device further includes an evaporation source, which is disposed in the evaporator 1 . The evaporation source includes a line source component, which includes a first heating component 2 , a second heating component, and a temperature compensation component disposed in the evaporator 1 .

[0029] The first heating component is arranged at the top of the evaporator 1, and the second heating component is arranged at the bottom of the evaporator 1, so that the first heating component 2 and the second heating component cooperate with each other to uniformly heat the evaporation material.

[0030] The temperature compensation component is arranged at the bottom of the evaporator 1, and is used to compensate the heating temperature of the second heating component, so that the heating temperature of the bottom of the evaporator 1 can be maintained within a specified temperature range, thereby avoiding the reduction of the evaporation quality and evaporation effect due to the temperature difference. In detail, the length of the temperature compensation component is 10%-30% of the length of the temperature compensation component.

[0031] The evaporation device further includes a temperature detection unit, which is connected to the line source component in the evaporator 1 to detect the temperature of the line source component.

[0032] The evaporation device also includes a control unit, which is connected to the evaporation source and the temperature monitoring unit to obtain the temperature of the line source component, and to control the consistency between the bottom heating temperature of the evaporator 1 and the target temperature by adjusting the temperature of the temperature compensation component.

[0033] From this, it can be known that the evaporation device to be protected by the present invention is provided with an evaporation chamber, an evaporator unit, an evaporation source, a temperature detection unit and a control unit, wherein the evaporation source is arranged in the evaporator for heating the evaporation material in the evaporator. Specifically, the evaporation source includes a first heating component, a second heating component and a temperature compensation component. The first heating component is arranged at the top of the evaporator, the second heating component is arranged at the bottom of the evaporator, and the temperature compensation component is arranged at the bottom of the evaporator and is adjacent to the second heating component. Therefore, based on the temperature detection result of the line source component by the temperature detection unit, when the heating temperature does not reach the specified temperature range, the heating temperature of the second heating component is compensated by the temperature compensation component, so that the heating temperature of the bottom of the evaporator can be maintained within the specified temperature range, so that the bottom heating temperature of the evaporator can be adjusted more finely to ensure the uniformity of the bottom heating temperature. The temperature compensation component cooperates with the second heating component to avoid excessive temperature difference at various places in the bottom of the evaporator, effectively adjust the heating temperature to the target temperature range, realize fine control of the line source temperature, and the control process is simple and fast, which is convenient for operators to operate, thereby ensuring the stability of the evaporation effect and effectively improving product quality.

[0034] As a preferred embodiment, the first heating assembly 2 includes at least one first heating wire 20, the first heating wire 20 is linear, and the first heating wire 20 is extended along the side wall of the evaporator 1. Preferably, the first heating wire 20 is arranged around the side wall of the evaporator 1, so as to be stacked to form a heating loop.

[0035] Further, refer to Figure 1 as well as Figure 2 As shown, the second heating assembly includes a second heating wire 30 and a third heating wire 31, and the second heating wire 30 and the third heating wire 31 are arranged in a bent shape.

[0036] The temperature compensation component includes a fourth heating wire 40 and a fifth heating wire 41, and the fourth heating wire 40 and the fifth heating wire 41 are arranged in a curved shape. The fourth heating wire 40 and the fifth heating wire 41 are arranged independently and can be temperature-controlled separately.

[0037] From the details, combined Figure 1 as well as Figure 2 As shown, the bottom of the evaporator 1 has a first area 11 and a second area 12, the second heating wire 30 is located in the first area 11, and the third heating wire 31 is located in the second area 12. The fourth heating wire 40 is located in the first area 11, and the fifth heating wire 41 is located in the second area 12.

[0038] Such a configuration can realize the zoning control of the first area 11 and the second area, thereby realizing more precise temperature control. For example, when the temperature of the second heating wire 30 located in the first area 11 is slightly higher than the third heating wire 31 in the second area 12, the temperature of the fifth heating wire 41 located in the second area 12 can be adjusted to achieve the effect of temperature compensation, so that the heating temperatures of the first area 11 and the second area 12 can always be kept consistent.

[0039] As a preferred embodiment, in order to facilitate temperature control and calculation of temperature compensation value, and to improve the accuracy of temperature compensation, the length of the temperature compensation component is set to 10% of the length of the second heating component. It should be noted that, without changing the properties (material and size) of the heating wire itself, the heating efficiency of the heating wire with a length ratio of 10% is equivalent to 10% of the heating efficiency of the original heating wire.

[0040] Specifically, the length of the fourth heating wire 40 is configured to be 10% of the length of the second heating wire 30 , and the length of the fifth heating wire 41 is configured to be 10% of the length of the third heating wire 31 .

[0041] As a preferred embodiment, combined with Figure 3 and Figure 4 From the perspective of FIG. 1 , the first heating wire 20 located at the top is fixedly installed on the upper part of the evaporator 1; the second heating wire 30 and the third heating wire 31 are installed on the bottom of the evaporator 1, and the second heating wire 30 and the third heating wire 31 are symmetrically arranged with each other; the fourth heating wire 40 is arranged below the second heating wire 30, and the fifth heating wire 41 is arranged below the third heating wire 31.

[0042] In order to further improve the thermal stability of the evaporated material and improve the uniformity of the evaporation temperature, the projections of the second heating wire 30 and the fourth heating wire 40 along the depth direction of the evaporator 1 overlap with each other; the projections of the third heating wire 31 and the fifth heating wire 41 along the depth direction of the evaporator 1 overlap with each other.

[0043] As a preferred embodiment, the areas of the first region 11 and the second region 12 are equal. This arrangement can facilitate the control of the heating temperature of the second heating component and improve the uniformity of the evaporation temperature.

[0044] Specifically, the temperature detection unit includes a temperature sensor, which is installed in the evaporator 1 and connected to the line source component to detect the temperature of the line source component. As a preferred embodiment, the temperature sensor is connected to the second heating component to detect the temperature of the second heating wire 30 and the third heating wire 31 in the second heating component. Of course, in some other embodiments, in order to fully control the temperature of the line source component, multiple temperature sensors can be set, and they are respectively connected to the first heating wire 20, the fourth heating wire 40 and the fifth heating wire 41. In this way, the temperatures of the first heating component, the second heating component and the temperature compensation component can be detected, and the temperature data obtained by the detection can be sent to the control unit to monitor the temperature of the evaporation source more comprehensively.

[0045] It should be noted that the evaporation device further includes a heating power supply, and the heating power supply is electrically connected to the line source assembly to provide electrical energy to the line source assembly. In this embodiment, the line source assembly uses a resistance wire as the heating wire.

[0046] As a preferred embodiment, the evaporator 1 includes but is not limited to a crucible.

[0047] As a preferred embodiment, the evaporator unit includes a plurality of the evaporators 1, and the plurality of the evaporators 1 are arranged at intervals in the evaporation chamber.

[0048] The following is a verification of the line source temperature control method of the evaporation device of the present invention through specific test data. Figure 5 , Figure 6 as well as Figure 7 As shown: Figure 5 To set the temperature compensation component, adjust the comparison results of 10 temperature tests; Figure 6 This is a schematic diagram of the temperature test results when the target temperature is set to 50 degrees; Figure 7This is a schematic diagram of the temperature test results when the target temperature is set to 200 degrees; From this, we can know that through 10 temperature adjustment tests, by comparing the temperature readings before and after the new heating wire was added, it can be clearly found that after the new heating wire was added, the temperature change was significantly smaller, and it was faster and more convenient to adjust to the target temperature.

[0049] In the description of the embodiments of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0051] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A vapor deposition device for evaporating a deposition material onto a substrate, characterized in that: include, Evaporation chamber; an evaporator unit, comprising an evaporator, wherein the evaporator is disposed in the evaporation chamber, and the evaporation material is contained in the evaporator; An evaporation source is arranged in the evaporator, the evaporation source comprises a line source component, the line source component comprises a first heating component, a second heating component and a temperature compensation component arranged in the evaporator, wherein the first heating component is arranged at the top of the evaporator, the second heating component and the temperature compensation component are arranged at the bottom of the evaporator, and the length of the temperature compensation component is 10%-30% of the length of the second heating component; A temperature detection unit connected to the line source component to detect the temperature of the line source component; A control unit is connected to the evaporation source and the temperature monitoring unit to obtain the temperature of the evaporation source and to control the consistency of the heating temperature of the evaporator by adjusting the temperature of the temperature compensation component.

2. The evaporation device according to claim 1, characterized in that: The length of the temperature compensation component is 10% of the length of the second heating component.

3. A vapor deposition device according to claim 1 or 2, characterized in that: The first heating component includes at least one first heating wire, which is straight and extends along the side wall of the evaporator; the second heating component includes a second heating wire and a third heating wire, which are bent; the temperature compensation component includes a fourth heating wire and a fifth heating wire, which are bent.

4. The evaporation device according to claim 3, characterized in that: The bottom of the evaporator has a first area and a second area, the second heating wire is located in the first area, and the third heating wire is located in the second area.

5. The evaporation device according to claim 4, characterized in that: The fourth heating wire is located in the first area, and the fifth heating wire is located in the second area; the length of the fourth heating wire is 10% of the length of the second heating wire, and the length of the fifth heating wire is 10% of the length of the third heating wire.

6. The evaporation device according to claim 4, characterized in that: The projections of the second heating wire and the fourth heating wire along the depth direction of the evaporator overlap with each other; the projections of the third heating wire and the fifth heating wire along the depth direction of the evaporator overlap with each other.

7. The evaporation device according to claim 4, characterized in that: The first region and the second region have the same area.

8. The evaporation device according to claim 1, characterized in that: The temperature detection unit includes a temperature sensor, and the temperature sensor is connected to the line source component.

9. The evaporation device according to claim 1, characterized in that: It also includes a heating power supply, which is electrically connected to the line source assembly.

10. The evaporation device according to claim 1, characterized in that: The evaporator includes a crucible.

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