A vacuum transmission valve

Abstract

The present invention discloses a vacuum transmission valve, including a sealing drive source, a housing, a pressing plate, a sealing plate and a connecting rod mechanism; the housing is provided with a receiving chamber and a first opening and a second opening connected to the receiving chamber, the first opening is used to connect with the sample transfer chamber, and the second opening is used to connect with the sample chamber; the pressing plate and the sealing plate are movably connected through a connecting rod mechanism, the sealing drive source is located outside and below the housing, and is used to drive the pressing plate to reciprocate in the vertical direction in the receiving chamber; when the pressing plate moves upward, it drives the sealing plate to move and move toward the second opening, and after the pressing plate moves into place, the sealing plate closes the second opening, and the connecting rod mechanism is at a dead point position at this time; when the pressing plate moves downward, it drives the sealing plate to move and move away from the second opening, so as to realize the opening of the second opening. The present invention can improve the sealing reliability of the sealing plate.

Description

Technical Field

[0001] The invention relates to the field of vacuum technology, and in particular to a vacuum transmission valve. Background Art

[0002] A vacuum valve is an instrument or device used to control fluids or gases in a vacuum or high vacuum environment. In environments such as PVD, CVD, photolithography machines, and etcher that have high requirements for particle size, chamber cleanliness, and low vibration, a vacuum transfer valve is used to cut off or connect the pipeline.

[0003] A sealing device and a scanning electron microscope system (CN 116576265 A) involves a vacuum transmission valve, which has the following problems:

[0004] 1. When the sealing plate and the second opening are squeezed, the sealing plate will give thrust to the connecting rod in the reverse direction, and the connecting rod will give thrust to the pressure plate in the axial direction of the second opening. This thrust will cause the pressure plate or the drive shaft connected to the pressure plate to deform, and the sealing effect will be poor.

[0005] 2. When the sealing plate moves toward the second opening, the connecting rod is tilted relative to the first direction. When the connecting rod is parallel to the axial direction of the second opening, the force on the pressure plate is the largest, and the pre-pressure on the sealing plate is also the largest. However, this solution does not mention that if the connecting rod is not in a dead angle position, then the driving shaft needs to continuously apply thrust to ensure that the sealing plate is in a sealed state. Once the driving force on the driving shaft fails, the sealing plate will lose its sealing effect, resulting in poor sealing reliability. Summary of the invention

[0006] In view of this, the present invention provides a vacuum transmission valve, which can improve the sealing reliability of the sealing plate.

[0007] The technical solution adopted by the present invention is as follows:

[0008] A vacuum transmission valve comprises a sealing drive source, a housing, a pressure plate, a sealing plate and a connecting rod mechanism;

[0009] The shell is provided with a accommodating chamber and a first opening and a second opening connected to the accommodating chamber, the first opening is used to connect with the sample transfer chamber, and the second opening is used to connect with the sample chamber; the pressing plate and the sealing plate are movably connected by a connecting rod mechanism, and the sealing driving source is located at the lower outside of the shell, and is used to drive the pressing plate to reciprocate in the vertical direction in the accommodating chamber; when the pressing plate moves upward, it drives the sealing plate to move and move toward the second opening, and after the pressing plate moves into place, the sealing plate closes the second opening, and at this time, the connecting rod mechanism is in a dead point position; when the pressing plate moves downward, it drives the sealing plate to move and move away from the second opening, so that the second opening is opened.

[0010] Furthermore, the connecting rod mechanism includes four connecting rods, which are arranged at intervals along the upper and lower directions of both ends of the pressure plate; when the second opening is opened, the connecting rod is in an inclined state, and the position of the connecting end of the connecting rod and the sealing plate is higher than the position of the connecting end of the connecting rod and the pressure plate;

[0011] When the second opening is closed and the connecting rod mechanism is at a dead point, the connecting rod is in an inclined state, and the position of the connecting end of the connecting rod and the sealing plate is lower than the position of the connecting end of the connecting rod and the pressure plate.

[0012] Furthermore, when the connecting rod mechanism is at a dead point position, the angle between the connecting rod and the horizontal plane is greater than 0° and less than 10°.

[0013] Furthermore, both ends of the connecting rod are rotatably connected to the pressure plate and the sealing plate through bearings, and the bearings are installed on the pressure plate and the sealing plate through pins.

[0014] Furthermore, a guide rod is respectively provided at both ends of the pressure plate, the pressure plate slides linearly along the guide rod, and the guide rod is vertically fixed inside the shell.

[0015] Furthermore, the sealing plate includes a sealing bottom plate, a sealing panel and a sealing pressing sheet, and the sealing pressing sheet fixes the sealing panel to the sealing bottom plate.

[0016] Further, the sealing drive source includes a driving cylinder, a connecting tube, a guide sleeve, a driving plate, a guide plate, an elastic sealing member and a driving rod;

[0017] The connecting cylinder is fixed to the bottom of the shell, the guide sleeve is fixed to the middle of the connecting cylinder, the driving rod is located in the guide sleeve, one end of which extends into the shell and is fixedly connected to the pressure plate, and the other end is fixedly connected to the driving plate through the connecting flange; the elastic sealing member is sleeved on the outer circumference of the driving rod and abuts between the connecting flange and the guide sleeve; the two guide plates are arranged on both sides of the elastic sealing member, one end of which is fixedly connected to the driving plate, and the other end of which is sleeved on the outer circumference of the elastic sealing member through the connecting plate, and the guide plate is slidably matched with the inner wall of the connecting cylinder;

[0018] The two driving cylinders are arranged on both sides of the connecting tube, and the pistons of the driving cylinders extend downward and are respectively fixed on the two ends of the driving plate.

[0019] Furthermore, the sealing drive source includes an outer support housing, a motor, a coupling I, a magnetic fluid sealing device, a coupling II, a screw rod, a nut sleeve rod and a limit column;

[0020] The outer support shell is fixed at the bottom of the shell, the magnetic fluid sealing device is arranged at the end of the outer support shell, the output end of the motor is connected to the magnetic fluid sealing device through a coupling I, and the magnetic fluid sealing device is connected to the screw inside the outer support shell through a coupling II. The rotation of the screw drives the nut sleeve rod to move axially, and the nut sleeve rod extends into the shell and is fixedly connected to the pressure plate; a sliding groove is provided on the nut sleeve rod, and the limit column is fixed on the inner wall of the outer support shell. At the same time, the limit column extends into the sliding groove to limit the rotation of the nut sleeve rod.

[0021] Beneficial effects:

[0022] 1. After the pressure plate of the present invention moves into position and the sealing plate closes the second opening, the connecting rod mechanism is in a dead point position, the driving source does not need to continuously output force, and the sealing plate can also achieve a self-sealing effect, that is, when the driving force on the driving source is lost, the sealing plate can still achieve a sealing effect, and can maintain a sealed state without the need for continuous output force from the driving source. At this time, the driving source is dispensable, can cope with unexpected situations, and improves the sealing reliability of the sealing plate.

[0023] 2. The sealing panel used in the sealing plate of the present invention is a whole-piece integrated structure, which increases the effective sealing area and is easy to disassemble, and can realize the opening and closing of the valve under any pressure difference between 0Pa and 0.1MPa in the vacuum chamber.

[0024] 3. The piston of the driving cylinder of the present invention extends downward, and the reverse thrust of the cylinder is used to drive the driving rod to move, which occupies a small space and has a compact structure.

[0025] 4. The sealing drive source of the present invention adopts a magnetic fluid sealing device + a motor driving device to form an electric push rod mechanism, which realizes the single-degree-of-freedom movement of the pressure plate by driving the nut sleeve to move, and has a good sealing effect. Moreover, since the magnetic fluid sealing device is contactless and frictionless, it can reduce wear and improve the reliability and service life of the entire electric push rod mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of the present invention installed between the sample transfer cavity and the sample chamber.

[0027] Figure 2 It is a schematic diagram of the overall structure of the present invention.

[0028] Figure 3 It is the front view of the present invention.

[0029] Figure 4 It is a structural diagram of the transmission valve of the present invention when it is opened, wherein (a) is a rear view and (b) is a DD-direction cross-sectional view of (a).

[0030] Figure 5 It is a schematic diagram of the connecting rod mechanism state when the transmission valve of the present invention is opened.

[0031] Figure 6 Schematic diagram of the internal structure of the present invention, wherein (a) is a top view, (b) is a cross-sectional view of (a) along the CC direction, and (c) is a cross-sectional view of (a) along the DD direction.

[0032] Figure 7 It is a schematic diagram of the state of the spring when the transmission valve of the present invention is opened.

[0033] Figure 8 This is a partial enlarged schematic diagram of the spring state.

[0034] Fig. 9 This is a structural diagram of the transmission valve of the present invention when it is closed.

[0035] Fig.10 for Fig. 9 EE direction cross-sectional view.

[0036] Fig.11 It is a schematic diagram of the state of the spring when the transmission valve of the present invention is closed.

[0037] Fig.12 It is a schematic diagram of the valve core structure of the present invention.

[0038] Fig.13 It is a schematic diagram of the structure of the main part of the valve core.

[0039] Fig.14 It is a cross-sectional view of the valve core body.

[0040] Fig.15 Schematic diagram of the sealed drive source structure for cylinder reverse thrust.

[0041] Fig.16 It is a schematic diagram of the structure of another electrically driven sealed drive source.

[0042] Among them, 1-sample transfer chamber, 2-transfer valve, 3-sample chamber, 4-guide rod, 5-shell, 6-driving rod, 7-sealing pressure piece, 8-pressure plate, 9-driving cylinder, 10-guide plate, 11-elastic seal, 12-driving plate, 13-connecting rod, 14-sealing bottom plate, 15-sealing panel, 16-spring, 17-bearing, 18-connecting cylinder, 19-guide sleeve, 20-pressure plate back plate, 21-pin shaft, 22-motor, 23-coupling I, 24-magnetic fluid sealing device, 25-coupling II, 26-screw, 27-nut sleeve rod, 28-limiting column, 29-outer support shell. DETAILED DESCRIPTION

[0043] The present invention is described in detail below with reference to the accompanying drawings and embodiments.

[0044] The present invention provides a vacuum transmission valve, such as Figure 1As shown, the transfer valve 2 is installed between the sample transfer chamber 1 and the sample chamber 3. The transfer valve 2 includes a sealing drive source, a housing 5, a pressing plate 8, a sealing plate and a connecting rod mechanism.

[0045] like Figure 2 , Figure 3 As shown, the housing 5 is provided with a receiving chamber and a first opening and a second opening connected with the receiving chamber, the first opening is used to connect with the sample transfer chamber 1, and the second opening is used to connect with the sample chamber 3; the pressing plate 8 is movably connected with the sealing plate through a connecting rod mechanism, and the sealing driving source is located outside and below the housing 5, which is used to drive the pressing plate 8 to reciprocate in the vertical direction in the receiving chamber; when the pressing plate 8 moves upward, it drives the sealing plate to move and move toward the second opening, and after the pressing plate 8 moves into place, the sealing plate closes the second opening, and the sample transfer chamber 1 is not connected with the sample chamber 3, and the connecting rod mechanism is at a dead point position at this time; it can be seen that when the transmission valve 2 is closed, the entire movement process of the sealing plate belongs to an "L-shaped motion trajectory", that is, the sealing plate first moves vertically, and then moves horizontally to close the second opening. When the transmission valve 2 is opened, when the pressing plate 8 moves downward, it drives the sealing plate to move and move away from the second opening, so that the second opening is opened, and the sample transfer chamber 1 is connected with the sample chamber 3.

[0046] It can be seen that the pressure plate 8 can only move along a single degree of freedom (vertical direction in this embodiment), and cannot move in a direction perpendicular to this degree of freedom, that is, cannot move in the horizontal direction. Therefore, when the pressure plate 8 and the sealing plate move vertically together, the roller on the sealing plate touches the top plate inside the shell 5, and the sealing plate moves horizontally, while the pressure plate 8 continues to move upward. When the sealing plate contacts the second opening and generates pre-pressure, the reaction force will be given to the pressure plate 8. The pressure plate 8 is rigid in the horizontal direction, and the driving shaft of the sealing drive source does not bear the deflection force. Then when the sealing plate is in the maximum pre-tightening force, the connecting rod mechanism of the present invention is in the dead point position. At this time, when the driving force on the driving shaft of the sealing drive source is lost, the sealing plate can still achieve the sealing effect, and the sealing state can be maintained without the continuous output force of the driving shaft.

[0047] Specifically, Figure 4 , Figure 5 As shown, the connecting rod mechanism includes four connecting rods 13, which are arranged at intervals along the upper and lower directions of both ends of the pressure plate 8; when the transmission valve 2 is opened, that is, the second opening is opened, the connecting rod 13 is in an inclined state, and the position of the connecting end of the connecting rod 13 and the sealing plate is higher than the position of the connecting end of the connecting rod 13 and the pressure plate 8;

[0048] like Fig. 9 , Fig.10As shown, when the transfer valve 2 is closed, that is, the second opening is closed, and the connecting rod mechanism is at a dead point, the connecting rod 13 is in an inclined state, and the position of the connecting end of the connecting rod 13 and the sealing plate is lower than the position of the connecting end of the connecting rod 13 and the pressure plate 8. Preferably, when the connecting rod mechanism is at a dead point, the angle between the connecting rod 13 and the horizontal plane is greater than 0° and less than 10°.

[0049] In the process of the transmission valve 2 changing from opening to closing, the state change process of the connecting rod 13 is tilted-horizontal-tilted. When the connecting rod 13 changes from the initial tilted state to the horizontal state, it will push the sealing plate to move in the direction of the second opening until it is closed. When the connecting rod 13 changes from the horizontal state to the next tilted state, the connecting rod mechanism is in the dead point position.

[0050] In this embodiment, Fig.12 As shown, a guide rod 4 is provided at each end of the pressure plate 8 . The pressure plate 8 slides linearly along the guide rod 4 driven by the sealing driving source, and the guide rod 4 is vertically fixed inside the housing 5 .

[0051] As an improvement, Figure 6 , Fig.13 As shown, both ends of the connecting rod 13 are rotatably connected to the pressing plate 8 and the sealing plate through bearings 17, and the bearings 17 are installed on the pressing plate 8 and the sealing plate through pins 21. Specifically, a pressing plate back plate 20 is also provided, the pressing plate back plate 20 is connected to the pressing plate 8, and the pins 21 are installed on the pressing plate back plate 20 through the bearings 17.

[0052] like Figure 7 , Figure 8 , Fig.11 As shown, a spring 16 is provided between the pressure plate 8 and the sealing plate. The spring 16 is in a stretched state. When the transmission valve 2 is switched from a closed state to an open state, the pressure plate 8 drives the sealing plate to move. Under the elastic force of the spring 16, the sealing plate can automatically avoid the sealing surface, i.e., the second opening.

[0053] In order to further improve the sealing performance of the sealing plate, the sealing plate in this embodiment includes a sealing bottom plate 14, a sealing panel 15 and a sealing pressing sheet 7, and the sealing pressing sheet 7 fixes the sealing panel 15 on the sealing bottom plate 14. Fig.14 As shown, the sealing panel 15 is a one-piece integral structure, which increases the effective sealing area.

[0054] like Fig.15 As shown, the sealing driving source adopts a cylinder reverse thrust structure, and the sealing driving source includes a driving cylinder 9, a connecting tube 18, a guide sleeve 19, a driving plate 12, a guide plate 10, an elastic sealing member 11 and a driving rod 6.

[0055] The connecting tube 18 is fixed at the bottom of the shell 5, the guide sleeve 19 is fixed at the middle of the connecting tube 18, the driving rod 6 is located in the guide sleeve 19, one end of which extends into the shell 5 and is fixedly connected to the pressure plate 8, and the other end is fixedly connected to the driving plate 12 through a connecting flange; the elastic seal 11 is sleeved on the outer circumference of the driving rod 6, abutting between the connecting flange and the guide sleeve 19; the two guide plates 10 are arranged on both sides of the elastic seal 11, one end of which is fixedly connected to the driving plate 12, and the other end is sleeved on the outer circumference of the elastic seal 11 through a connecting plate, and at the same time, the guide plate 10 is slidably matched with the inner wall of the connecting tube 18; the two driving cylinders 9 are arranged on both sides of the connecting tube 18, and the pistons of the driving cylinders 9 extend downward and are respectively fixed at both ends of the driving plate 12.

[0056] The elastic sealing member 11 is a welded bellows, which can realize dynamic sealing in a vacuum environment and realize static sealing in combination with an O-ring disposed inside.

[0057] like Fig.16 As shown, the sealing drive source can also adopt an electric drive structure, which includes an outer support shell 29, a motor 22, a coupling I 23, a magnetic fluid sealing device 24, a coupling II 25, a screw 26, a nut sleeve rod 27 and a limit column 28.

[0058] The outer support shell 29 is fixed at the bottom of the shell 5, and the magnetic fluid sealing device 24 is arranged at the end of the outer support shell 29. The output end of the motor 22 is connected to the magnetic fluid sealing device 24 through the coupling I 23. The magnetic fluid sealing device 24 is connected to the screw rod 26 inside the outer support shell 29 through the coupling II 25. The rotation of the screw rod 26 drives the driving nut sleeve rod 27 to move axially. The nut sleeve rod 27 extends into the shell 5 and is fixedly connected to the pressure plate 8; a slide groove is provided on the nut sleeve rod 27, and a limit column 28 is fixed on the inner wall of the outer support shell 29. At the same time, the limit column 28 extends into the slide groove to limit the rotation of the nut sleeve rod 27.

[0059] During operation, the motor 22 acts as a driving source to drive the coupling I 23, and the coupling I 23 drives the sealing shaft of the magnetic fluid sealing device 24 to rotate, and the sealing shaft drives the coupling II 25, and the coupling II 25 drives the screw rod 26 to rotate, and the screw rod 26 drives the nut sleeve rod 27 to rotate, but the nut sleeve rod 27 is restricted by the limit column 28 and can only perform linear motion. Therefore, the rotational motion of the driving source is converted into linear motion through the screw, and then drives the nut sleeve rod 27 at the front end to move forward and backward, thereby realizing the push and pull of the valve core inside the transmission valve 2 in a single degree of freedom direction, that is, driving the pressure plate 8 in the housing 5 to move back and forth vertically.

[0060] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum transmission valve, characterized in that: It includes a sealing driving source, a housing, a pressure plate, a sealing plate and a connecting rod mechanism; The shell is provided with a accommodating chamber and a first opening and a second opening connected to the accommodating chamber, the first opening is used to connect with the sample transfer chamber, and the second opening is used to connect with the sample chamber; the pressing plate and the sealing plate are movably connected by a connecting rod mechanism, and the sealing driving source is located at the lower outside of the shell, and is used to drive the pressing plate to reciprocate in the vertical direction in the accommodating chamber; when the pressing plate moves upward, it drives the sealing plate to move and move toward the second opening, and after the pressing plate moves into place, the sealing plate closes the second opening, and at this time, the connecting rod mechanism is in a dead point position; when the pressing plate moves downward, it drives the sealing plate to move and move away from the second opening, so that the second opening is opened.

2. The vacuum transmission valve according to claim 1, characterized in that: The connecting rod mechanism includes four connecting rods, which are arranged at intervals along the upper and lower directions of both ends of the pressure plate; when the second opening is opened, the connecting rod is in an inclined state, and the position of the connecting end of the connecting rod and the sealing plate is higher than the position of the connecting end of the connecting rod and the pressure plate; When the second opening is closed and the connecting rod mechanism is at a dead point, the connecting rod is in an inclined state, and the position of the connecting end of the connecting rod and the sealing plate is lower than the position of the connecting end of the connecting rod and the pressure plate.

3. The vacuum transmission valve according to claim 2, characterized in that: When the connecting rod mechanism is at the dead point position, the angle between the connecting rod and the horizontal plane is greater than 0° and less than 10°.

4. The vacuum transmission valve according to claim 2, characterized in that: Both ends of the connecting rod are rotatably connected to the pressure plate and the sealing plate through bearings, and the bearings are installed on the pressure plate and the sealing plate through pins.

5. The vacuum transmission valve according to claim 2, characterized in that: A guide rod is respectively arranged at both ends of the pressing plate, and the pressing plate slides linearly along the guide rod, and the guide rod is vertically fixed inside the shell.

6. The vacuum transmission valve according to claim 2, characterized in that: The sealing plate comprises a sealing bottom plate, a sealing panel and a sealing pressing sheet, and the sealing pressing sheet fixes the sealing panel on the sealing bottom plate.

7. The vacuum transmission valve according to any one of claims 2 to 6, characterized in that: The sealing drive source includes a driving cylinder, a connecting tube, a guide sleeve, a driving plate, a guide plate, an elastic sealing member and a driving rod; The connecting cylinder is fixed to the bottom of the shell, the guide sleeve is fixed to the middle of the connecting cylinder, the driving rod is located in the guide sleeve, one end of which extends into the shell and is fixedly connected to the pressure plate, and the other end is fixedly connected to the driving plate through the connecting flange; the elastic sealing member is sleeved on the outer circumference of the driving rod and abuts between the connecting flange and the guide sleeve; the two guide plates are arranged on both sides of the elastic sealing member, one end of which is fixedly connected to the driving plate, and the other end of which is sleeved on the outer circumference of the elastic sealing member through the connecting plate, and the guide plate is slidably matched with the inner wall of the connecting cylinder; The two driving cylinders are arranged on both sides of the connecting tube, and the pistons of the driving cylinders extend downward and are respectively fixed on the two ends of the driving plate.

8. The vacuum transmission valve according to any one of claims 2 to 6, characterized in that: The sealing drive source includes an outer support shell, a motor, a coupling I, a magnetic fluid sealing device, a coupling II, a screw rod, a nut sleeve rod and a limit column; The outer support shell is fixed at the bottom of the shell, the magnetic fluid sealing device is arranged at the end of the outer support shell, the output end of the motor is connected to the magnetic fluid sealing device through a coupling I, and the magnetic fluid sealing device is connected to the screw inside the outer support shell through a coupling II. The rotation of the screw drives the nut sleeve rod to move axially, and the nut sleeve rod extends into the shell and is fixedly connected to the pressure plate; a sliding groove is provided on the nut sleeve rod, and the limit column is fixed on the inner wall of the outer support shell. At the same time, the limit column extends into the sliding groove to limit the rotation of the nut sleeve rod.

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