System for prioritizing collection and analysis of liquid samples

Abstract

Systems and methods to determine a priority schedule for processing samples by a system having a plurality of remote sampling systems are described. A system embodiment includes, but is not limited to: an analysis system at a first location; one or more remote sampling systems at a location remote from the first location, the one or more remote sampling systems configured to receive the liquid segment and deliver the liquid segment to the analysis system via a delivery line; and a controller communicatively coupled with the analysis system and the one or more remote sampling systems, the controller configured to impart priority values to samples for analysis by the analysis system and to manage a sequence of samples received from the one or more remote sampling systems based on the imparted priority values.

Description

[0001] This application is a divisional application of a Chinese patent application with an application date of June 14, 2019, application number 201980040219.5 and name “System for Prioritizing Collection and Analysis of Liquid Samples”. Background Art

[0002] In many laboratory settings, it is often necessary to analyze a large number of chemical or biological samples at once. In order to simplify this process, the manipulation of samples has been mechanized. This mechanized sampling may be referred to as automatic sampling and may be performed using an automatic sampling device or autosampler.

[0003] Inductively coupled plasma (TCP) spectrometry is an analytical technique that is commonly used to determine trace element concentrations and isotope ratios in liquid samples. ICP spectrometry uses an electromagnetically generated partially ionized argon plasma that reaches temperatures of up to about 7,000 K. When a sample is introduced into the plasma, the high temperatures cause the sample atoms to ionize or emit light. Since each chemical element produces a characteristic mass or emission spectrum, measuring the spectrum of the emitted mass or light can determine the elemental composition of the original sample.

[0004] The sample introduction system can be used to introduce the liquid sample into an ICP spectrometer (e.g., an inductively coupled plasma mass spectrometer (ICP / ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), etc.) or other sample detector or analytical instrument for analysis. For example, the sample introduction system can remove an aliquot of the liquid sample from a container and then transport the aliquot to a nebulizer, which converts the aliquot into a multiphase dispersed aerosol suitable for ionization in a plasma through an ICP spectrometer. The aerosol is then classified in a spray chamber to remove larger aerosol particles. Once out of the spray chamber, the aerosol is introduced into the plasma for analysis through the plasma spray gun assembly of the ICP-MS or ICP-AES instrument. Summary of the invention

[0005] Systems and methods for determining a priority schedule for samples processed by a system having multiple remote sampling systems are described. System embodiments include, but are not limited to: an analysis system at a first location; one or more remote sampling systems located at a location remote from the first location, the one or more remote sampling systems configured to receive a liquid segment and deliver the liquid sample to the analysis system via a delivery line; and a controller communicatively coupled to the analysis system and the one or more remote sampling systems, the controller configured to assign priority values ​​to samples for analysis by the analysis system and to manage a queue of samples received from the one or more remote sampling systems based on the assigned priority values.

[0006] This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The detailed description is described with reference to the accompanying drawings. Any dimensions included in the drawings are provided as examples only and are not intended to limit the present disclosure.

[0008] Figure 1 is a partial circuit diagram illustrating a system configured to analyze a sample transported remotely according to an exemplary embodiment of the present disclosure.

[0009] Figure 2A is an environmental view showing a remote sampling device used in a remote sampling system according to an exemplary embodiment of the present disclosure.

[0010] Figure 2B is an environmental view showing a remote sampling device used in a remote sampling system according to an exemplary embodiment of the present disclosure.

[0011] Figure 3A is an environmental view showing an analysis device used in an analysis system according to an exemplary embodiment of the present disclosure.

[0012] Figure 3B is an environmental view showing an analysis device used in an analysis system according to an exemplary embodiment of the present disclosure.

[0013] Figure 4 is a partial circuit diagram illustrating an analysis system within a system configured to analyze a remotely transported sample according to an exemplary embodiment of the present disclosure.

[0014] Figure 5 is a diagram showing an exemplary embodiment of the present disclosure that can be used in Figure 4 A partial circuit diagram of a detector used in the analysis system shown in FIG.

[0015] Figure 6 is an environmental view showing an analysis system having a plurality of analysis devices for analyzing samples received from a remote sampling system according to an exemplary embodiment of the present disclosure.

[0016] Figure 7 is a schematic diagram of a system including a sample receiving line and detectors configured to determine when the sample receiving line contains a continuous liquid segment between the detectors according to an exemplary embodiment of the present disclosure.

[0017] Figure 8is a partial cross-section of a sample transport line including a plurality of sample segments obtained by a remote sampling system according to an exemplary embodiment of the present disclosure.

[0018] Fig. 9 is a timeline showing a plurality of liquid sample segments supplied to a sample receiving line and recorded by two detectors according to an exemplary embodiment of the present disclosure.

[0019] Fig.10 is a flow chart illustrating a method for determining when a sample receiving line contains a continuous liquid segment between detectors according to an exemplary embodiment of the present disclosure.

[0020] Fig.11 is a process flow diagram of a control system for monitoring and controlling process operations based on chemical detection limits according to an exemplary embodiment of the present disclosure.

[0021] Fig.12 is a schematic diagram of a processing facility incorporating multiple remote sampling systems according to an exemplary embodiment of the present disclosure.

[0022] Fig.13 is a graph showing metal contamination of a chemical bath over time according to an exemplary embodiment of the present disclosure, wherein data points represent manual sampling and data points are obtained using an automated system.

[0023] Fig.14 is a table showing a priority list of priority values ​​for sample identities according to an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0024] Rough reference Figures 1 to 13, describes an exemplary system configured to analyze samples transported over long distances. In an exemplary embodiment, one or more samples may be analyzed by multiple analysis systems, wherein such analysis systems may include different analysis techniques. System 100 includes an analysis system 102 at a first location. System 100 may also include one or more remote sampling systems 104 at a second location away from the first location. For example, the one or more remote sampling systems 104 may be placed near a chemical reagent source (e.g., a chemical reagent storage tank, a chemical treatment tank (e.g., a chemical bath), a chemical reagent delivery line or pipeline, etc. (e.g., a second location)) to be analyzed by the analysis system 102, wherein the analysis system 102 may be placed away from the remote sampling system 104 (e.g., an analysis center for a production facility (e.g., a first location)). System 100 may also include one or more remote sampling systems 104 at a third location, a fourth location, etc., wherein the third location and / or the fourth location are away from the first location. In an embodiment, the third location, the fourth location, and other locations of the remote sampling system 104 may be away from each other location of other remote sampling systems 104. For example, one remote sampling system 104 may be located in a waterway (e.g., a deionized water delivery line), while one or more other remote sampling systems 104 may be located in a chemical storage tank, a chemical processing tank (e.g., a chemical bath), a chemical delivery line or pipeline, etc. In some embodiments, the system 100 may also include one or more remote sampling systems 104 at a first location (e.g., near the analysis system 102). For example, the sampling system 104 at the first location may include an automatic sampler coupled to the analysis system 102. The one or more sampling systems 104 may be operable to receive samples from the first location, the second location, the third location, the fourth location, etc., and the system 100 may be operable to deliver the samples to the analysis system 102 for analysis.

[0025] The remote sampling system 104 may be configured to receive a sample 150 and prepare the sample 150 for delivery (e.g., to the analysis system 102) and / or analysis. In an embodiment, the remote sampling system 104 may be arranged at multiple distances (e.g., 1m, 5m, 10m, 30m, 50m, 100m, 300m, 1000m, etc.) from the analysis system 102. In an embodiment, the remote sampling system 104 may include a remote sampling device 106 and a sample preparation device 108. The sample preparation device 108 may also include a valve 148, such as a flow valve. In an embodiment, the remote sampling device 106 may include a device configured to collect a sample 150 from a sample stream or source (e.g., a liquid such as wastewater, rinse water, chemical reagents, industrial chemicals, etc., a gas such as an air sample to be contacted with the liquid and / or a pollutant therein). The remote sampling device 106 may include components such as pumps, valves, pipes, sensors, etc. suitable for obtaining a sample from a sample source and transporting the sample to the analysis system 102 over a long distance. The sample preparation device 108 may include a device configured to prepare the sample 150 collected from the remote sampling device 106 using a diluent 114 , an internal standard reagent 116 , a carrier 154 , etc. to provide a specific sample concentration, a spiked sample, a calibration curve, etc. and may be rinsed with a rinse solution 158 .

[0026] In some embodiments, the sample 150 (e.g., prepared sample 152) for delivery and / or analysis may be prepared using one or more preparation techniques, including, but not limited to, dilution, pre-concentration, addition of one or more calibration standard reagents, etc. For example, a viscous sample 150 may be remotely diluted (e.g., by a sample preparation device 108) before being delivered to the analysis system 102 (e.g., to prevent the sample 150 from separating during delivery). As described herein, a sample that has been delivered from a remote sampling system 104 may be referred to as a sample 150, wherein the sample 150 may also be referred to as a prepared sample 152. In some embodiments, the sample dilution may be dynamically adjusted (e.g., automatically adjusted) to move the sample 150 through the system at a desired rate. For example, when the sample 150 moves too slowly through the system 100 (e.g., as measured by the delivery time from the second location to the first location), the diluent 114 added to a particular sample or a particular type of sample is increased. In another example, one liter (1L) of seawater may be remotely pre-concentrated before being delivered to the analysis system 102. In another example, electrostatic concentration is used on material from an air sample to pre-concentrate possible airborne contaminants. In some embodiments, online dilution and / or calibration is automatically performed by the system 100. For example, the sample preparation device 108 can add one or more internal standard reagents to a sample delivered to the analysis system 102 to calibrate the analysis system 102.

[0027] In an embodiment of the present disclosure, the analysis system 102 may include a sample collector 110 and / or a sample detector 130 configured to collect a sample 150 from a sample transport line 144 coupled between the analysis system 102 and one or more remote sampling systems 104. The sample collector 110 and / or the sample detector 130 may include components such as pumps, valves, pipes, ports, sensors, etc. to receive the sample 150 from the one or more remote sampling systems 104 (e.g., via one or more sample transport lines 144). For example, where the system 100 includes multiple remote sampling systems 104, each remote sampling system may include a dedicated sample transport line 144 to couple to a separate portion of the sample collector 110 or to a separate sample collector 110 of the analysis system 102. Additionally, the analysis system 102 may include a sampling device 160 (e.g., a local autosampler) configured to collect a sample 150 that is local to the analysis system 102.

[0028] The analysis system 102 also includes at least one analysis device 112, which is configured to analyze the sample to determine the concentration of trace elements (e.g., in a liquid sample), isotope ratios, etc. For example, the analysis device 112 may include a TCP spectrometer, which includes but is not limited to an inductively coupled plasma mass spectrometer (ICP / ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), etc. In an embodiment, the analysis system 102 includes a plurality of analysis devices 112 (i.e., more than one analysis device). For example, the system 100 and / or the analysis system 102 may include a plurality of sample loops, each sample loop introducing a portion of the sample into a plurality of analysis devices 112. As another example, the system 100 and / or the analysis system 102 may be configured with a multi-position valve so that a single sample can be quickly and continuously introduced into a plurality of analysis devices 112. For example, Figure 6 A remote sampling system 104 is shown in fluid communication with an analysis system 102, wherein the analysis system 102 includes a multi-position valve 600 coupled to three analysis devices (shown as an ICPMS 602, an ion chromatograph (IC) column 604, and a Fourier transform infrared spectrometer (FTIR) 606) for analyzing samples received from the remote sampling system 104. Figure 6An embodiment in which the analysis system 102 includes three analysis devices is shown, and the analysis system 102 may include fewer (e.g., less than three) or more (e.g., more than three) analysis devices 112. In an embodiment, the analysis device 112 may include, but is not limited to, ICPMS (e.g., for trace metal determination), ICPOES (e.g., for trace metal determination), ion chromatograph (e.g., for anion and cation determination), liquid chromatograph (LC) (e.g., for organic pollutant determination), FTIR infrared spectroscopy (e.g., for chemical composition and structural information determination), particle counter (e.g., for detecting undissolved particles), moisture meter (e.g., for detecting water in a sample), gas chromatograph (GC) (e.g., for detecting volatile components), etc. In an embodiment, multiple analysis devices 112 may be located at the same location as the remote sampling device 104, and the system 100 may include one or more additional analysis devices 112 located away from the remote sampling system 104 for performing additional sample analysis or sample analysis different from those performed by the multiple analysis devices 112. Alternatively or additionally, the plurality of analysis devices 112 may be located at a different location than the remote sampling system 104 .

[0029] The system 100 and / or the analysis system 102 may be configured to report the concentration of an analyte at a location over time (see below). Fig.13 Further shown). In some embodiments, the analysis device 112 can be configured to detect one or more trace metals in the sample 150. In other embodiments, the analysis device 112 can be configured for ion chromatography. For example, ions and / or cations can be collected in the sample 150 and then transported to the chromatographic analysis device 112. In other embodiments, organic molecules, proteins, etc. can be collected in the sample and transported to the high-resolution time-of-flight (HR-ToF) mass spectrometry analysis device 112 (for example, using a nebulizer 156). Therefore, the system described herein can be used for a variety of applications, including but not limited to: pharmaceutical applications (for example, the central spectral analysis device is connected to multiple pharmaceutical reactors), waste monitoring of one or more waste streams, semiconductor manufacturing facilities, etc. For example, the waste stream can be continuously monitored for contaminants and transferred to a storage tank when a contaminant is detected. As another example, one or more chemical reagent streams can be continuously monitored by analyzing samples obtained by one or more remote sampling systems 104 linked to the analysis system 102, so that contamination limits can be set for each chemical reagent stream. Once a contaminant is detected that exceeds the contamination limit of a specific stream, the system 100 can provide an alarm.

[0030] The remote sampling system 104 can be configured to selectively couple with at least one sample transport line 144, such that the remote sampling system 104 is operable to fluidly communicate with the sample transport line 144, thereby supplying a continuous liquid sample segment 150 to the sample transport line 144. For example, the remote sampling system 104 can be configured to collect the sample 150 and supply the sample 150 to the sample transport line 144 using, for example, a flow-through valve 148, thereby coupling the remote sampling system 104 to the sample transport line 144. The supply of the sample 150 to the sample transport line 144 can be referred to as a "pitch". The sample transport line 144 can be coupled to a gas source 146 and can be configured to deliver gas from a second location (and possibly a third location, a fourth location, etc.) to a first location. In this manner, the liquid sample segment supplied by the remote sampling system 104 is collected in a gas stream and delivered to a location of the analysis system 102 using pneumatic sample delivery.

[0031] In some embodiments, the gas in the sample delivery line 144 may include an inert gas, including but not necessarily limited to: nitrogen, argon, etc. In some embodiments, the sample delivery line 144 may include an unsegmented or minimally segmented tube having an inner diameter of eight tenths of a millimeter (0.8 mm). However, the inner diameter of eight tenths of a millimeter is provided only as an example and is not meant to limit the present disclosure. In other embodiments, the sample delivery line 144 may include an inner diameter greater than eight tenths of a millimeter and / or an inner diameter less than eight tenths of a millimeter. In some embodiments, the pressure in the sample delivery line 144 may be in the range of at least about four (4) bars to ten (10) bars. However, this range is provided only as an example and is not meant to limit the present disclosure. In other embodiments, the pressure in the sample delivery line 144 may be greater than ten bars and / or less than four bars. In addition, in some specific embodiments, the pressure in the sample delivery line 144 can be adjusted so that the sample 150 is distributed in a generally upward direction (e.g., vertically). This vertical orientation may facilitate transport of samples collected at a location below the analysis system 102 (eg, where one or more sample sources and one or more remote sampling systems are positioned “downstairs” relative to the analysis system 102 ).

[0032] In some examples, the sample delivery line 144 can be coupled to the remote sampling system 104 and the analysis system 102, wherein the remote sampling system 104 is in fluid communication with the first liquid bath (or chemical bath) and the analysis system 102 is in fluid communication with the second liquid bath (or chemical bath). In an embodiment of the present disclosure, the system 100 may include one or more leak sensors (e.g., mounted in a tank) to prevent or minimize overflow at a first location and / or one or more remote locations (e.g., a second location, a third location, a fourth location, etc.). A pump such as a syringe pump or a vacuum pump can be used to load the sample into the sampling device 106. A valve 148 can be used to select a sample 150 at the remote sampling system 104, and the sample 150 can be supplied to the sample delivery line 144, which can deliver the sample 150 to the analysis system 102 located at the first location. Another pump such as a diaphragm pump can be used to pump the effluent to the analysis system 102 and extract the sample 150 from the sample delivery line 144.

[0033] The system 100 can be implemented as a closed sampling system, wherein the gas and sample in the sample delivery line 144 are not exposed to the surrounding environment. For example, a housing and / or a sheath can surround one or more components of the system 100. In some embodiments, one or more sample lines of the remote sampling system 104 can be cleaned between sample deliveries. In addition, the sample delivery line 144 can be cleaned between samples 150 (e.g., using a cleaning solution).

[0034] The sample delivery line 144 can be configured to selectively couple with a sample receiving line 162 (e.g., a sample loop 164) at a first location, such that the sample loop 164 is operable to be in fluid communication with the sample delivery line 144 to receive a continuous liquid sample segment. Delivery of a continuous liquid sample segment to the sample loop 164 can be referred to as "catching". The sample loop 164 is also configured to selectively couple with the analysis device 112, such that the sample loop 164 is operable to be in fluid communication with the analysis device 112 to supply the continuous liquid sample segment to the analysis device 112 (e.g., when the system 100 has determined that sufficient liquid sample segments are available for analysis by the analysis system 102). In embodiments of the present disclosure, the analysis system 102 can include one or more detectors configured to determine that the sample loop 164 contains a sufficient amount of the continuous liquid sample segment to be analyzed by the analysis system 102. In one example, the sufficient amount of the continuous liquid sample can include sufficient liquid sample to be delivered to the analysis device 112. Another example of a continuous liquid sample of sufficient volume may include a continuous liquid sample (e.g., Figure 7). In an embodiment, the first detector 126 and / or the second detector 128 may include an optical analyzer 132, an optical sensor 134, a conductivity sensor 136, a metal sensor 138, a conductive sensor 140, and / or a pressure sensor 142. It is contemplated that the first detector 126 and / or the second detector 128 may include other sensors. For example, the first detector 126 may include an optical analyzer 132 that detects when the sample 150 enters the sample ring 164, and the second detector 128 may include another optical analyzer 132 that detects when the sample ring 164 is filled. This example may be referred to as "successful capture". It should be noted that the optical analyzer 132 is provided as an example only and is not meant to limit the present disclosure. Other exemplary detectors include, but are not limited to, optical sensors, conductivity sensors, metal sensors, conductive sensors, pressure sensors, etc.

[0035] refer to Figure 7 , describes a system 100 that can determine when a continuous liquid sample segment is contained in a sample receiving line 162 and / or when a sample loop 164 contains a sufficient amount of the continuous liquid sample segment for analysis (e.g., by an analysis system 102). In an exemplary embodiment, the first detector 126 can be configured to determine two or more states, which can indicate the presence of liquid (e.g., the liquid sample segment) at a first location in the sample receiving line 162, the absence of liquid in the sample receiving line 162, etc. For example, a first state (e.g., represented by a first logic level, such as a high state) can be used to indicate the presence of a liquid sample segment at a first location in the sample receiving line 162 (e.g., near the sample detector 126), and a second state (e.g., represented by a second logic level, such as a low state) can be used to indicate the absence of a liquid sample segment at a first location in the sample receiving line 162 (e.g., a void or gas in the sample receiving line 162).

[0036] In some embodiments, the first detector 126 including the pressure sensor 142 can be used to detect the presence of liquid at a first location in the sample receiving line 162 (e.g., by detecting an increase in pressure near the first location in the sample receiving line 162 when the liquid is present). The first detector 126 can also be used to detect the absence of liquid at the first location in the sample receiving line 162 (e.g., by detecting a decrease in pressure near the first location in the sample receiving line 162). However, the pressure sensor is provided as an example and is not meant to limit the present disclosure. In other embodiments, the first detector 126 including the optical sensor 134 can be used to detect the presence of liquid at a first location in the sample receiving line 162 (e.g., by detecting a decrease in light passing through the sample receiving line 162 near the first location when the liquid is present). The first detector 126 can also be used to detect the absence of liquid at the first location in the sample receiving line 162 (e.g., by detecting an increase in light passing through the sample receiving line 162 near the first location). In these examples, the first detector 126 may report the presence of the liquid sample at the first location as a high state and the absence of the liquid sample at the first location as a low state.

[0037] In some embodiments, the system 100 may further include one or more additional detectors, such as a second detector 126, a third detector, etc. For example, the second detector 126 may also be configured to determine two or more states, which may indicate the presence of liquid (e.g., a liquid sample segment) at a second location in the sample receiving line 162, the absence of liquid at the second location in the sample receiving line 162, etc. For example, a first state (e.g., represented by a first logic level, such as a high state) may be used to indicate the presence of a liquid sample segment at a second location in the sample receiving line 162 (e.g., near the sample detector 126), and a second state (e.g., represented by a second logic level, such as a low state) may be used to indicate the absence of a liquid sample segment at the second location in the sample receiving line 162.

[0038] In some embodiments, a second detector 126 including a pressure sensor 142 may be used to detect the presence of liquid at a second location in the sample receiving line 162 (e.g., by detecting an increase in pressure near the second location in the sample receiving line 162 when liquid is present). The second detector 126 may also be used to detect the absence of liquid at the second location in the sample receiving line 162 (e.g., by detecting a decrease in pressure near the second location in the sample receiving line 162). However, the pressure sensor is provided as an example and is not meant to limit the present disclosure. In other embodiments, a second detector 126 including an optical sensor 134 may be used to detect the presence of liquid at a second location in the sample receiving line 162 (e.g., by detecting a decrease in light passing through the sample receiving line 162 near the second location when liquid is present). The second detector 126 may also be used to detect the absence of liquid at the second location in the sample receiving line 162 (e.g., by detecting an increase in light passing through the sample receiving line 162 near the second location). In these examples, the second detector 126 may report the presence of the liquid sample at the second location as a high state and the absence of the liquid sample at the second location as a low state.

[0039] The controller 118 may be communicatively coupled to the one or more detectors 126 and configured to record liquid at a first location in the sample receiving line 162, a second location in the sample receiving line 162, another location in the sample receiving line 162, etc. For example, the controller 118 initiates a detection operation using the first detector 126, and liquid at a first location in the sample receiving line 162 may be recorded by the controller 118 (e.g., when the controller 118 records a change in state from low to high as determined by the first detector 126). The first detector 126 may then be monitored (e.g., continuously, at least substantially continuously), and the controller 118 may subsequently record the absence of liquid at the first location in the sample receiving line 162 (e.g., when the controller 118 records a change in state from high to low as determined by the first detector 126).

[0040] Likewise, the controller 118 may also initiate a detection operation using the second detector 126, and the presence of liquid at the second location in the sample receiving line 162 may be recorded by the controller 118 (e.g., when the controller 118 records a change in state from low to high as determined by the second detector 126). The second detector 126 may then be monitored (e.g., continuously, at least substantially continuously), and the controller 118 may subsequently record the absence of liquid at the second location in the sample receiving line 162 (e.g., when the controller 118 records a change in state from high to low as determined by the second detector 126).

[0041] The controller 118 and / or one or more detectors 126 may include or affect the operation of timers to provide the system 100 with the times of certain events (e.g., the presence or absence of liquid at various locations in the sample receiving line 162 at a particular time). As an example, the controller 118 may monitor the times at which changes in state are recorded by various detectors to determine whether to allow the liquid sample to be directed to the analysis system 102 (e.g., as opposed to directing the liquid to waste or a holding loop). As another example, the controller 118 may monitor the time that liquid spends in the sample receiving line 162 and / or the sample loop 164 based on the changes in state recorded by the controller 118 via the detectors 126. Liquid sample segment interruption and applicable liquid Segment determination

[0042] Typically, when a sample is obtained in the vicinity of an associated analytical device (e.g., an autosampler in close proximity to the analytical device), the sample can span the entire distance between the sample source and the analytical device without requiring a large amount of sample. However, for long-distance delivery of the sample, using the remote sampling system 104 to fill the entire delivery line 144 between the remote sampling system 104 and the analytical system 102 (e.g., a sample length of up to hundreds of meters) may be prohibitively expensive or undesirable, for example, due to the environmental impact involved in handling the unused sample portion, the viscosity of the sample, etc. Therefore, in multiple embodiments, the remote sampling system 104 does not fill the entire delivery line 144 with the sample, but instead, a liquid sample segment representing a portion of the total volume of the delivery line 144 is sent through the delivery line 144 for analysis by the analytical system 102. For example, although the delivery line 144 may be hundreds of meters long, at any given time during delivery to the analytical system 102, the sample may occupy one meter of the delivery line 144 or less. Although passing the liquid sample segment through the line can reduce the amount of sample delivered from the remote sample system 104, the sample can create bubbles or gaps / voids in the sample delivery line 144 during delivery to the analysis system 102. Such bubbles or gaps / voids can form due to conditions associated with the remote delivery of the sample (e.g., changes in orifice between tubes during delivery), due to interaction with residual cleaning fluid used to clean the line between samples, due to reaction with residual fluid in the line, due to pressure differences along the span of the delivery line, etc. For example, Figure 8 As shown in FIG. 1 , liquid sample 800 can be delivered from remote sampling system 104 to a first location where analysis system 102 is located through delivery line 144. The total volume of the sample obtained by remote sampling system 104 is Figure 8 V TOTAs shown, during delivery from the remote sampling system 104, gaps or voids 802 may form in the delivery line 144. The gaps or voids 802 divide a number of sample segments 804 that do not contain a sufficient amount or volume of sample to be analyzed by the analysis system 102. Such sample segments 804 may be located in a volume (shown as V) sufficient for analysis by the analysis system 102. SAMPLE ) before and / or after the larger sample segment 806. In various embodiments, the sample volume (e.g., V) collected by the remote sampling system 104 is TOT ) is adjusted to provide a sufficient amount of sample 150 to be analyzed by the analysis device 112. For example, the volume ratio of the "volume" of the "delivered" sample 150 to the amount of the "captured" sample 150 (e.g., V TOT / V SAMPLE ) is at least about one and one quarter (1.25). However, this ratio is provided only as an example and is not meant to limit the present disclosure. In some embodiments, the ratio is greater than one and one quarter, while in other embodiments, the ratio is less than one and one quarter. In one example, two and one-half milliliters (2.5 mL) of sample 150 (e.g., concentrated sulfuric acid or nitric acid) are dropped, and one milliliter (1 mL) of sample 150 is captured. In another example, one and one-half milliliters (1.5 mL) of sample 150 are dropped, and one milliliter (1 mL) of sample 150 is captured. In embodiments of the present disclosure, the amount of sample 150 "dropped" is adjusted to account for the distance between the first position and the second position, the amount of sample delivery line between the first position and the second position, the pressure in the sample delivery line 144, etc. Typically, V TOT / V SAMPLE The ratio of may be greater than 1 to account for the formation of gaps / voids 802 and sample segments 804 in the sample delivery line 144 during delivery.

[0043] The system 100 can select which of the multiple remote sampling systems 104 should deliver its corresponding sample to the analysis system 102 (e.g., "drop"), whereby the detector 126 helps determine whether there is enough sample (e.g., V in the sample loop 164). SAMPLE ) for delivery to the analysis system 102 (e.g., "capture"), or whether there is a void or gap in the line (e.g., between the detectors 126) such that the sample should not be sent to the analysis system 102 at that particular time. If there will be an air bubble or gap (e.g., in the sample loop 164), the presence of the air bubble or gap may compromise the accuracy of the sample analysis, particularly if the sample will be diluted or further diluted at the analysis system 102 prior to introduction to the analysis device 112, as the analysis device 112 may analyze a "blank" solution.

[0044] In some embodiments, the system 100 can be configured to determine when a continuous liquid sample segment (e.g., sample segment 806) is contained in the sample receiving line 162 and / or the sample loop 164, so that the system 100 can avoid delivering gaps or voids 802 or smaller sample segments 804 to the analysis device 112. For example, the system 100 may include a first detector 126 at a first position along the sample receiving line 162 and a second detector 126 at a second position along the sample receiving line 162 (e.g., downstream of the first position). The system 100 may also include a sample loop 164 between the first detector 126 and the second detector 126. In embodiments, the system 100 may be configured to detect when a continuous liquid sample segment (e.g., sample segment 806) is contained in the sample receiving line 162 and / or the sample loop 164. Figure 3A A first flow path configuration of valve 148 shown in; Figure 3B 148, etc.) can be positioned between the first detector 126 and the sample loop 164 and between the second detector 126 and the sample loop 164. In an embodiment of the present disclosure, the system 100 can determine that a continuous liquid sample segment is contained in the sample receiving line 162 and / or the sample loop 164 by simultaneously recording liquid at both the first position and the second position without recording a state change from high to low via the first detector 126 at the first position. In other words, the liquid sample has been continuously transported from the first detector 126 to the second detector 126, wherein the first detector 126 does not detect a state change until the second detector 126 confirms the presence of the liquid sample.

[0045] In an exemplary embodiment using two or more detectors to determine when a sample receiving line contains a continuous liquid segment between the detectors, the liquid segment is received in the sample receiving line. Figure 7 , the sample receiving line 162 receives the liquid sample segment. Then, a detection operation is initiated by using a first detector configured to detect the presence or absence of the liquid segment at the first position in the sample receiving line, and the liquid segment is recorded at the first position in the sample receiving line. For example, referring to Figure 7 , the first detector 126 detects the liquid sample segment at the first location in the sample receiving line 162 as a state change from low to high. Fig. 9 , a liquid sample segment can be detected at a first position at time t1 and t5. Then, after recording the liquid segment at the first position, the first detector is monitored. For example, referring to Figure 7 , the first detector 126 is monitored by the controller 118, and the first detector 126 detects the absence of the liquid sample segment at the first location in the sample receiving line 162 as a state change from high to low. Fig. 9The first position may be monitored starting from times t1 and t5 (eg, continuously, at least substantially continuously), and the absence of the liquid sample segment may be detected at the first position at times t3 and t6.

[0046] Likewise, the liquid segment at the second location in the sample receiving line is recorded by initiating a detection operation using a second detector configured to detect the presence or absence of the liquid segment at the second location in the sample receiving line. Figure 7 , the second detector 126 detects the liquid sample segment at the second location in the sample receiving pipeline 162 as a state change from low to high. Fig. 9 , the liquid sample segment can be detected at the second position at time t2 and t7. Then, after recording the liquid segment at the second position, the second detector is monitored. For example, referring to Figure 7 , the second detector 126 is monitored by the controller 118, and the second detector 126 detects the absence of the liquid sample segment at the second location in the sample receiving line 162 as a state change from high to low. Fig. 9 The second position may be monitored starting from times t2 and t7 (eg, continuously, at least substantially continuously), and the absence of the liquid sample segment may be detected at the second position at times t4 and t8.

[0047] When recording liquid at the first location and the second location simultaneously, a continuous segment of liquid in the sample receiving line between the first detector and the second detector is recorded. Figure 7 , when the high state indicates that a liquid sample segment is present at each of the first detector 126 and the second detector 126, the controller 118 records a continuous liquid sample segment in the sample receiving line 162 (e.g., as indicated between the first detector 126 and the second detector 126). Fig. 9 , when the liquid sample segment is detected at the second position, a continuous liquid sample segment may be recorded at time t2.

[0048] In some embodiments, a logical AND operation can be used to determine when a continuous liquid segment in the sample receiving line is recorded and to initiate the delivery of the continuous liquid segment from the sample receiving line to the analytical device. Figure 7, the controller 118 may use a logical AND operation when each of the first detector 126 and the second detector 126 are in the high state, and use the valve 148 to initiate the selective coupling of the sample loop 164 with the analytical device 112, so that the sample loop 164 is operable to be in fluid communication with the analytical device 112, thereby supplying the continuous liquid sample segment to the analytical device 112. In some embodiments, the controller 118 may only determine whether to switch the valve 148 so as to supply the continuous liquid sample segment to the analytical device 112 when a state change from low to high is recorded at the first detector 126 or the second detector 126. In some embodiments, the system 100 requires that the high state at the second detector 126 be maintained for a period of time (e.g., 5 seconds) before initiating the selective coupling of the sample loop 164 with the analytical device. Fig. 9 The t shown in △ ). For example, a timer or timing function of the controller 118 and / or the processor 120 can verify the time period that the second detector 126 has been in the high state, thereby once the second detector 126 has been in the high state for a period of time t △ (eg, threshold time), and if the first detector is in a high state, the controller 118 may determine that enough liquid sample segments have been captured (eg, Figure 8 The duration t is t20. The duration t is t30. The duration t is t40. The duration t is t50. △ It may correspond to a time period beyond which the second detector is less likely to measure voids or bubbles, which may vary depending on the flow rate or other delivery conditions of the sample.

[0049] In some embodiments, the controller 118 may monitor the time that the first detector 126 is in the high state and / or the low state. For example, in embodiments where the flow characteristics of the sample being delivered from the remote sampling system 104 are known, the first detector 126 may be monitored to determine the length of time spent in the high state to approximate whether there will be enough liquid sample present in the sample receiving line 162 and / or the sample loop 164 to cause the controller 118 to send the sample to the analysis device 112 regardless of whether the high state at the second detector 126 is confirmed. For example, for a given flow rate of the sample, by monitoring the length of time that the first detector 126 has been in the high state, the volume of the sample may be roughly estimated. However, due to fluctuations in pump function, type of sample being delivered, viscosity of the sample, duration of delivery, distance delivered, ambient temperature conditions, temperature conditions of the delivery line 144, etc., the flow rate of the sample may not be easily known, and thus, the function of the second detector 126 may be to provide information.

[0050] In embodiments of the present disclosure, the systems and techniques described herein may be used to determine that a portion of a sample receiving line (e.g., a sample loop) between a first detector 126 and a second detector 126 is not filled with bubbles. Fig. 9 As described above, the absence of liquid sample at the first location between times t3 and t5 may correspond to the presence of bubbles in the sample receiving line 162. When the system 100 has reached a condition where no bubbles will be present in the sample receiving line 162, the controller 118 switches the valve 148 to allow fluid in the sample loop 164 to reach the analysis device 112 (for analysis or sample conditioning prior to analysis).

[0051] Exemplary Methods

[0052] Fig.10 Process 810 in an exemplary embodiment is depicted in which two detectors are used to determine when a sample receiving line contains a sufficient amount of sample in a continuous liquid sample segment for analysis by an analytical system, wherein there are no gaps or voids in the continuous liquid sample segment. As shown, a liquid segment is received in the sample receiving line (box 812). For example, the sample receiving line 162 can receive a sample obtained by the remote sampling system 104 and delivered through the delivery line 144. Process 810 also includes recording the liquid segment at a first location in the sample receiving line using a first detector, the first detector being configured to detect the presence or absence of the liquid segment as the liquid segment travels through the first location (box 814). For example, the first detector 126 can measure the presence of the liquid sample segment at the first location in the sample receiving line 162. Reference Fig. 9 , a liquid sample segment is detected at the first position at times t1 and t5.

[0053] Next, after recording the liquid segment at the first location, the first detector is monitored (block 816). For example, the first detector 126 may be monitored by the controller 118 to determine whether a liquid segment is not present at the first location in the sample receiving line 162 (e.g., whether the first detector 126 has switched from a high state (indicating that sample fluid is detected) to a low state (wherein sample fluid is not detected). Fig. 9 , monitoring the first location (e.g., continuously, at least substantially continuously) from times t1 and t5. Then, recording a continuous liquid segment in the sample receiving line when the absence of a liquid segment at the first location in the sample receiving line is not recorded before recording a liquid segment at a second location in the sample receiving line downstream of the first location by performing a detection operation with a second detector, wherein the second detector is configured to detect the presence or absence of the liquid segment at the second location (block 818). For example, referring to Fig. 9, the first detector 126 detects the presence of the sample fluid at times t1 and t5, while the second detector 126 detects the presence of the sample fluid at times t2 and t7. Only the liquid sample segment at the first detector between times t1 and t3 will be recorded by the second detector (starting from time t2), wherein the first detector 126 did not detect the presence of the sample segment during the intermittent time before the second detector detected the sample segment. In this case, the controller 118 can instruct the valve 148 to switch to send the sample contained in the sample loop 164 to the analysis device 112. Although the first detector 126 recorded the presence of the liquid sample at t5, the first detector also detected the absence of the liquid sample at t6 before the second detector 126 subsequently detected the presence of the liquid sample at t7. In this way, the system 100 will determine that there is a gap or void (e.g., gap / void 802) in the sample loop 164, and will not switch the valve 148 for analysis, but instead allow the inappropriate sample segment (e.g., liquid segment 804) to be sent to waste. As described herein, once the second detector 126 has maintained a high state for a specific period of time (eg, t △ ), a timer (eg, implemented by controller 118) may be used to cause valve 148 to switch.

[0054] Control System

[0055] System 100 (including some or all of its components) can be operated under computer control. For example, processor 120 may be included in system 100 or include system 100 to control the components and functions of the system described herein using software, firmware, hardware (e.g., fixed logic circuits), manual processing, or a combination thereof. The terms "controller", "function", "service", and "logic" as used herein generally represent software, firmware, hardware, or a combination of software, firmware, or hardware used in conjunction with a control system. In the case of a software embodiment, a module, function, or logic represents a program code that implements a specified task when executed on a processor (e.g., one or more central processing units (CPUs)). The program code may be stored in one or more computer-readable storage devices (e.g., internal memory and / or one or more tangible media), etc. The structures, functions, methods, and techniques described herein may be implemented on a variety of commercial computing platforms with a variety of processors.

[0056] For example, one or more components of the system, such as the analysis system 102, the remote sampling system 104, the valve 148, the pump, and / or the detector (e.g., the first detector 126, the second detector 126, the sample detector 130) may be coupled to the controller 118 for controlling the collection, delivery, and / or analysis of the sample 150. For example, the controller 118 may be configured to switch the valve 148 that couples the sample loop 164 to the analysis system 102 and direct the sample 150 from the sample loop 164 to the analysis system 102 when a successful "capture" is indicated by the first detector 126 and the second detector 126 (e.g., when both sensors detect liquid). In addition, the controller 118 may implement the functionality of determining "unsuccessful capture" (e.g., when the sample loop 164 is not filled with enough sample 150 to be completely analyzed by the analysis system 102). In some embodiments, "unsuccessful capture" is determined, for example, based on a change in the signal strength of a signal received from a sensor such as the first detector 126 or the second detector 126. In other embodiments, “unsuccessful capture” is determined when the first detector 126 has indicated a sample 150 in the sample receiving line 162 and a predetermined amount of time has passed where the second detector 126 has not indicated a sample 150 in the sample receiving line 162 .

[0057] In some embodiments, the controller 118 is communicatively coupled to the indicator at a remote location such as a second location, and provides an indication (e.g., an alarm) at the second location when an underfilled sample 150 is received at the first location. The indication can be used to (e.g., automatically) initiate additional sample collection and delivery. In some embodiments, the indicator provides an alarm to the operator (e.g., via one or more indicator lights, via a display readout, a combination thereof, etc.). In addition, the indication can be timed and / or initiated based on one or more predetermined conditions (e.g., only when multiple samples have been missed). In some embodiments, the indicator can also be activated based on conditions measured at the remote sampling location. For example, the detector 130 at the second location can be used to determine when to provide a sample 150 to the remote sampling system 104, and the indicator can be activated when the sample 150 is not collected.

[0058] In some embodiments, the controller 118 is operable to provide different times for collecting samples from different remote locations and / or for different types of samples 150. For example, when the remote sampling system 104 is ready to deliver the sample 150 to the sample delivery line 144, an alert can be issued to the controller 118, and the controller 118 can initiate delivery of the sample 150 to the sample delivery line 144. The controller 118 can also be communicatively coupled to one or more remote sampling systems 102 to receive (and potentially log / record) information identifying the sample 150 and / or control the order in which the samples 150 are delivered in the system 100. For example, the controller 118 can queue multiple samples 150 remotely and coordinate their delivery through one or more sample delivery lines 114. In this way, the delivery of samples 150 along multiple simultaneous flow paths (e.g., through multiple sample delivery lines 144) can be coordinated, one or more samples 150 can be delivered while one or more additional samples 150 are being acquired, and so on. For example, Fig.11 An exemplary control flow diagram for the system 100 is shown, wherein the analysis system 102 is shown in fluid communication with two remote sample locations, shown as sample location 900 and sample location 902, via two remote sampling systems 104a and 104b and associated delivery lines 144a and 114b. In the illustrated embodiment, the analysis system 102 sends commands to each of the remote sampling systems 104a and 104b, which are shown as 904a and 904b, respectively. The remote sampling systems 104a and 104b each deliver samples obtained at the corresponding sampling locations (sampling location 900 for the remote sampling system 104a, sampling location 902 for the remote sampling system 104b) to the analysis system 102 via delivery lines 144a and 144b, respectively. The analysis system 102 then processes these samples to determine the amounts of various chemical substances contained therein. The analysis system 102 then determines whether any of the amounts of these chemical substances exceeds element-specific limits (e.g., limits for specific contaminants in the sample). In an embodiment, the system 100 may set contamination limits for each sampling location individually and for a specific chemical at each sampling location individually. For example, tolerance to a specific metal contaminant may be reduced during processing, so a downstream chemical sample may have a lower limit for a specific chemical than a chemical sample obtained upstream. Fig.11, the analysis system 102 determines that no chemical exceeds any element-specific limit for the sample obtained at the sampling location 900 by the remote sampling system 104a. The analysis system 102 then sends an indication, shown as 908a, to the CIM host 906 to allow the processing applications to continue at the sampling location 900 due to the operation of the processing applications being below the element-specific limits. The analysis system 102 has determined that at least one of the chemical substances present in the sample obtained at the sampling location 902 by the remote sampling system 104b exceeds the element-specific limit (e.g., a limit for contamination in the sample). The analysis system 102 then sends an indication, shown as 908b, to the CIM host 906 to send an alert related to the processing application at the sampling location 902 due to the operation of the processing application exceeding the element-specific limit. The CIM host 906 then instructs the processing at the sampling location 902 to stop operation based on the analysis of the sample obtained at the sampling location 902 by the remote sampling system 104b via the stop processing command 910. In an embodiment, communication between the CIM host 906 and components of the system 100 may be facilitated by SECS / GEM protocols. In an embodiment, when an element is determined to be above an element-specific limit in a sample for a particular sample location, the system 100 may include context-specific actions, wherein such context-specific actions may include, but are not limited to, ignoring the alarm and continuing the processing operation, stopping the processing operation, running a system calibration and then rerunning the out-of-limit sample, etc. For example, upon a first alarm, the analysis system 102 may perform a calibration (or another calibration) and then rerun the sample, while a subsequent alarm (e.g., a second alarm) will cause the CIM host 906 to command the process at the problematic sampling location to stop operating.

[0059] The controller 118 may include a processor 120, a memory 122, and a communication interface 124. The processor 120 provides processing functionality for the controller 118 and may include any number of processors, microcontrollers, or other processing systems, as well as resident or external memory for storing data and other information accessed or generated by the controller 118. The processor 120 may execute one or more software programs that implement the techniques described herein. The processor 120 is not limited by the materials from which it is formed or the processing mechanisms employed therein, and may therefore be implemented by semiconductors and / or transistors (e.g., using electronic integrated circuit (IC) components), etc.

[0060] The memory 122 is an example of a tangible computer-readable storage medium that provides storage functionality to store various data associated with the operation of the controller 118, such as software programs and / or code segments or other data used to instruct the processor 120 and possibly other components of the controller 118 to perform the functions described herein. Thus, the memory 122 can store data, such as instruction programs for operating the system 100 (including its components), etc. It should be noted that although a single memory is described, multiple types of memory (e.g., tangible, non-transitory memory) and combinations thereof may be utilized. The memory 122 may be integrated with the processor 120, may include independent memory, or may be a combination of both.

[0061] The memory 122 may include, but is not necessarily limited to, removable and non-removable memory components, such as random access memory (RAM), read-only memory (ROM), flash memory (e.g., secure digital (SD) memory card, mini SD memory card, and / or micro SD memory card), magnetic memory, optical memory, universal serial bus (USB) storage device, hard disk storage, external memory, etc. In an embodiment, the system 100 and / or the memory 122 may include a removable integrated circuit card (ICC) memory, such as the memory 122 provided by a subscriber identity module (SIM) card, a universal subscriber identity module (USIM) card, a universal integrated circuit card (ICC), etc.

[0062] The communication interface 124 is operatively configured to communicate with components of the system. For example, the communication interface 124 may be configured to send data for storage in the system 100, retrieve data from a memory in the system 100, etc. The communication interface 124 is also communicatively coupled to the processor 120 to facilitate data transfer between components of the system 100 and the processor 120 (e.g., for sending input received from a device communicatively coupled to the controller 118 to the processor 120). It should be noted that although the communication interface 124 is described as a component of the controller 118, one or more components of the communication interface 124 may be implemented as external components communicatively coupled to the system 100 via wired and / or wireless connections. The system 100 may also include and / or be connected (e.g., via the communication interface 124) to one or more input / output (I / O) devices, including but not limited to: a display, a mouse, a touchpad, a keyboard, etc.

[0063] The communication interface 124 and / or the processor 120 may be configured to communicate with a variety of different networks, including, but not limited to: a wide area cellular telephone network, such as a 3G cellular network, a 4G cellular network, or a global mobile communication (GSM) network system; a wireless computer communication network, such as a Wi-Fi network (e.g., a wireless local area network (WLAN) operating using the IEEE 802.11 network standard); the Internet; the Internet; a wide area network (WAN); a local area network (LAN); a personal area network (PAN) (e.g., a wireless personal area network (WPAN) operating using the IEEE 802.15 network standard); a public telephone network; an extranet; an intranet; etc. However, this list is provided only as an example and is not meant to limit the present disclosure. In addition, the communication interface 124 may be configured to communicate with a single network or multiple networks across different access points.

[0064] Example 1 - Exemplary Monitoring System

[0065] In general, the system 100 described herein may be combined with any number of remote sampling systems 104 to obtain samples from any number of sampling locations. Fig.12In one embodiment shown in FIG. 1 , system 100 includes five remote sampling systems 104 (shown as 104A, 104B, 104C, 104D, 104E) disposed at five different locations of a processing facility utilizing chemical baths, bulk chemicals, environmental effluents, and other liquid samples. The remote sampling systems 104 acquire samples at different locations for delivery to an analysis system 102 remote from each of the five remote sampling systems 104. The first remote sampling system 104A is positioned near a deionized water line 1000 and spaced apart from the analysis system 102 by a distance of approximately forty meters (40 m) (shown as d5). The second remote sampling system 104B is positioned near a dispensing valve point 1002 and spaced apart from the analysis system 102 by a distance of approximately eighty meters (80 m) (shown as d4). The third remote sampling system 104C is positioned near the chemical supply tank 1004 and is spaced apart from the analysis system 102 by a distance of about eighty meters (80 m), which is shown as d3. The chemical supply tank 1004 is positioned away from the chemical storage tank 1008 and is supplied with chemicals from the chemical storage tank 1008. The fourth remote sampling system 104D is positioned near the chemical supply tank 1006 and is spaced apart from the analysis system 102 by a distance of about eighty meters (80 m), which is shown as d2. The chemical supply tank 1006 is positioned away from the chemical storage tank 1008 and is supplied with chemicals from the chemical storage tank 1008. The fifth remote sampling system 104E is positioned near the chemical storage tank 1004 and is spaced apart from the analysis system 102 by a distance of about three hundred meters (300 m), which is shown as d1. Although five remote sampling systems 104 are shown, the system 100 can utilize more than five remote sampling systems 104 to monitor ultra-trace impurities throughout the processing facility, for example, at other process streams, chemical baths, bulk chemical storage, environmental effluents, and other liquid samples. In one embodiment, sample delivery from the remote sampling systems 104 to the analysis system is provided at a rate of about 1.2 meters per second (1.2 m / s), thereby providing near real-time analysis (e.g., ICPMS analysis) of ultra-trace impurities throughout the processing facility.

[0066] Example 2 - Reproducibility

[0067] In one embodiment, the analysis system 102 is placed one hundred meters (100 m) away from the remote sampling system 104. The remote sampling system 104 obtains twenty discrete samples and transmits them to the analysis system 102 to determine the signal intensity of each chemical substance present in each of the twenty discrete samples. Each discrete sample contains the following chemical substances: lithium (Li), beryllium (Be), boron (B), sodium (Na), magnesium (Mg), aluminum (Ai), calcium (Ca), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), germanium (Ge), strontium (Sr), silver (Ag), cadmium (Cd), indium (In), tin (Sn), antimony (Sb), barium (Ba), cerium (Ce), hafnium (Hf), tungsten (W), and lead (Pb). When analyzed by the analysis system 102, it is determined that for all chemical substances, the relative standard deviation (RSD) is less than three percent (<3%) in all twenty discrete samples. Thus, exemplary system 100 at one hundred meters between analysis system 102 and remote sampling system 104 provides reliable reproducibility by obtaining a sample, transporting the sample one hundred meters to analysis system 102 (eg, via transport line 144 ), and analyzing the sample using analysis system 102 .

[0068] Example 3 - Comparison with Manual Sampling - Semiconductor Process Example

[0069] Reference Fig.13, a graph showing metal contaminants of a chemical bath (SC-1 bath) used in a semiconductor manufacturing process over time is provided. The graph includes a portion 1100, which shows data points for metal contaminants measured from manual samples obtained at three time points. The graph also includes a portion 1102, which shows data points for metal contaminants measured from manual samples from portion 1100, which are superimposed on data points for metal contaminants measured from samples obtained from system 100 (e.g., from remote sampling system 104) at a sampling frequency exceeding the sampling frequency of the manual sampling method (e.g., at least 16 to 17 times more frequent). As shown in portion 1102, in the semiconductor manufacturing process, contaminants gradually increase over time. Lifetime or life counting methods (e.g., manual sampling techniques from portion 1100) that determine when to replace chemicals in a particular semiconductor process are generally unable to address the particularity of metal contaminants over time. As a result, chemicals are often replaced without knowing the metal contaminants in the bath. This may result in over-replacement, where the chemical bath may actually provide additional wafer processing but is replaced anyway (e.g., resulting in a loss of process uptime) or under-replacement, where the chemical bath actually has unacceptable metal contamination but is replaced until a later time (e.g., potentially jeopardizing wafers produced by the process). As can be seen in section 1102, the system 100 may be used to automatically track metal contamination at a higher frequency. A contaminant limit 1104 is set to alert the CTM host 906 when the contaminant limit for the chemical bath is reached. The system 100 may thus automatically stop process operation when the contaminant limit 1104 is reached (e.g., thereby avoiding under-replacement), while allowing the process to continue when the contaminant limit 1104 has not yet been reached, thereby providing process uptime when feasible (e.g., thereby avoiding over-replacement).

[0070] Dynamic sample prioritization

[0071] In general, the system 100 described herein may be combined with any number of remote sampling systems 104 to obtain samples from any number of sampling locations, such as Fig.12 , which includes five remote sampling systems 104 (shown as 104A, 104B, 104C, 104D, 104E) located at five different locations of a processing facility that uses chemical baths, bulk chemicals, environmental effluents, and other liquid samples. The system 100 can thus collect, transport, prepare multiple samples, etc. at any given moment within the system 100, while the remote sampling system 104 switches between multiple operating modes (e.g., sample transport operation, flushing operation, waiting operation, etc.).

[0072] In an embodiment, the system 100 (e.g., through operation of a system controller) tracks the status and progress of samples received or expected to be received from the remote sampling system 104 through the analysis system 102, and provides a priority value to each sample to determine the queue priority of the sample to be analyzed by the analysis system 102. For example, the sample to be analyzed by the analysis system 102 can be identified as a standard calibration sample, a matrix calibration sample, a quality check sample, a sample, or a priority sample using a sample identifier. The sample identifier is generally related to the function of the sample of the system 100. For example, a sample identified as a standard calibration sample is used to generate a standard reagent calibration curve for comparative sample analysis, a sample identified as a matrix calibration sample is used to generate a matrix calibration curve for comparative sample analysis, a sample identified as a quality check sample is used as an internal check to determine the accuracy of the current system operation, a sample identified as a sample is a sample to be analyzed with an unknown concentration of an analyte, and a priority sample is a sample that is processed by the system 100 as a priority. For example, a priority sample may be a sample that may be time sensitive, may be provided by a temporary source within the processing facility (e.g., a delivery truck carrying new solution for use in the processing facility), or may be an unplanned sample that requires analysis that is not typically scheduled for analysis within system 100.

[0073] Each sample may also be identified using a priority value to provide an identifier to the system 100 to determine how to process the sample relative to other samples within the system 100. When the system 100 identifies a sample with a higher priority to be analyzed, the system 100 may take action with reference to other samples with lower priority based on the current status of the analysis of the lower priority sample. Such actions may include, but are not limited to, canceling delivery from the remote sampling system 104, allowing delivery from the remote sampling system 104, allowing the current analysis to be completed, stopping additional analysis of the sample, discarding incomplete calibration points, keeping the sample at the remote sampling system 104, etc. In an embodiment, the system 100 assigns priority values ​​to samples based on sample identity, but the system 100 may also assign priority values ​​based on manual input from an individual.

[0074] exist Fig.14An exemplary priority list of priority values ​​is shown in FIG. For a particular sequence of operation of the system 100 (e.g., when initializing the system 100, resetting the system 100, etc.), the highest priority sample is a sample used for the initial or primary calibration of the analytical system 102 (e.g., the first calibration curve for a sequence given a priority value of 1; the first sample matrix calibration curve sample for a sequence given a priority value of 2). The second highest priority sample is a sample associated with a sample being actively transported from the remote sampling system 104 through the sample delivery line 144 (e.g., a sample from the remote sampling system 104 in the sample delivery mode given a priority value of 10). The second highest priority sample is a sample associated with a priority sample (e.g., a higher priority sample given a priority value of 11 to 50). A priority sample can be a sample associated with the desire to perform on-demand analysis on a sample that is not currently associated with the sample schedule. Priority values ​​can be assigned to priority samples to distinguish the priority of one priority sample from another priority sample. For example, in a case where a first chemical truck having a first chemical for delivery and a second chemical truck having a second chemical for delivery are positioned at a loading dock, the first chemical sample may be given a first priority value (e.g., 11) and the second chemical sample may be given a second priority value (e.g., 12) to indicate that the first chemical sample is a priority sample with a higher priority than the second chemical sample. Thus, when the system 100 reaches the first chemical sample in the priority queue, the remote sampling system 104 associated with sampling the second chemical is directed to deliver the first chemical to the analysis system 102 for analysis before directing the remote sampling system 104 associated with sampling the second chemical to deliver the second chemical to the second analysis system 102 for analysis. The next highest priority sample is a sample associated with a first quality check of a particular sequence of operations (e.g., a first quality check given a priority value of 51). The next highest priority sample is a sample associated with a sample that failed analysis (e.g., a sample with an analyte value exceeding a threshold, such as for a contaminant concentration). Such samples at this priority are processed according to their original priority value and according to their order in the analysis queue. For example, if the fourth sample in the queue and the seventh sample in the queue each contain an analyte concentration that exceeds the threshold concentration limit, the fourth sample will be rerun, and then the seventh sample will be rerun before continuing with samples having a priority value of 53 or higher.

[0075] In the sample Fig.14The sample priority list of the sample rerun after the second highest priority is due to the quality control check beyond the expected value and the sample associated with the primary calibration curve rerun (for example, in the case of a given priority value of 53, the primary calibration curve is rerun). For example, a quality check (QC) can be arranged to determine whether the analysis system 102 generates a result in the expected range of the quality check sample (for example, a sample with a known concentration). When the quality check is outside the expected threshold, the primary calibration curve can be rerun to provide an updated calibration curve for the current operating status of the analysis system 102. The sample with the second highest priority is due to the quality control check exceeding the expected value (in the case of a given priority of 54, the primary calibration single point is rerun) and the sample is associated with a single point of the rerun calibration curve. Similarly, due to the quality control check exceeding the expected value and rerunning for the matrix calibration curve or point is given the second highest priority (for example, in the case of a given priority value of 56, the matrix calibration curve is rerun, and in the case of a given priority value of 57, the matrix calibration single point is rerun). The sample with the second highest priority is the sample associated with the planned calibration curve (for example, the planned calibration curve in the case of a priority value of 58). For example, the planned calibration curve is associated with a sample with a known concentration according to a predetermined time operation, which is contrasted with the curve implemented after the failed QC result. The second highest priority sample is a sample associated with a planned quality check (e.g., a planned QC check in the case of a given priority of 60). The second highest priority sample is a sample associated with an emergency sample (e.g., an emergency sample in the case of a given priority value of 65). For example, an emergency sample may include a sample manually brought to the analysis system 102 to be sampled by a local automatic sampler (e.g., a sampling device 160) at the analysis system 102. The second highest priority sample is those samples (e.g., samples with lower priority in the case of a given priority value of 66 to 100) marked as priority samples in the conventional samples in the queue. These priority samples are samples to be used with a higher priority than the conventional samples in the queue, but have not risen to a higher priority sample level (e.g., a priority value of 11 to 50). Therefore, these samples are processed after the calibration curve sample and the quality control sample. The next highest priority samples are those samples that are associated with the planned samples (eg, based on their order in the sample planning table, which gives the planned samples the lowest priority value).

[0076] When the system 100 receives a priority sample for entering into the sampling queue, the system 100 checks the priority value assigned to the priority sample. If the planned queue has any sample associated with one or more first calibration curves or first sample matrix calibration curves, the system 100 allows those samples to proceed uninterruptedly (e.g., the sample is introduced into the analysis system 102 and data on the composition of the sample is collected). Similarly, if any one of the remote sampling systems 104 is currently transporting a sample to the analysis system 102 in the sample delivery line 144, the system 100 allows these samples to proceed uninterruptedly (e.g., the remote sampling system 104 continues to transport the sample in the sample delivery line 144, introduces the sample into the analysis system 102, and collects data on the composition of the sample). For other samples analyzed by the analysis system 102 in the queue, the system 100 checks the sample identity to determine which operations are suitable for the system 100 to indicate how those other samples will be processed. One such operation includes interrupting remote sampling systems 104 that have samples in the queue with a lower priority than the priority sample to delay the time at which the remote sampling systems 104 extract the samples from their respective sample sources. For example, before the priority sample is entered into the queue, a particular remote sampling system 104 may have been scheduled to extract a sample from its local sample source at a first moment in time so that the sample can be delivered to the analysis system 102 via the delivery line 144 (e.g., taking into account the delivery time of the sample in the delivery line 144). Once a higher priority sample enters the queue, the system 100 interrupts the remote sampling system 104 to delay sampling the sample from the local sample source to a (later) second moment in time so as to allow for sampling and analysis of the higher priority sample. In one embodiment, the remote sampling system 104 may have already extracted the sample from the sample source and is in the process of preparing to deliver the sample (e.g., introducing diluents, standard reagents, chemical spikes, etc.), but has not yet introduced the sample into the sample delivery line 144. When a higher priority sample enters the queue, the system 100 may interrupt the remote sampling system 104 to retain the collected sample in the remote sampling system 104, introduce waste, flush it from the remote sampling system 104, etc.

[0077] Another such operation includes allowing a sample currently being sampled and present at the analysis system 102 to be completed and measured by the analysis system 102. For example, a local autosampler (e.g., sampling device 160) at the analysis system 102 that is currently operating to introduce a sample from a local sample source (e.g., a vial present on an autosampler platform of the analysis system 102) may be allowed to complete an operation to introduce the sample into the analysis system 102 for measurement and data collection.

[0078] As another example of operation, the system 100 may take steps to change the queue of a higher priority sample to discard incomplete calibration points for calibration samples that have a lower priority than the higher priority sample. Such samples may include samples for calibration sample reruns as a result of QC, scheduled calibration samples, etc. For example, the system 100 may maintain data for calibration samples that have been analyzed by the analysis system 102, which have been completed or are in the process of being completed by the system when a higher priority sample enters the queue but the uncompleted calibration samples are delayed (e.g., reorganized into an updated queue) or discarded to consider the higher priority sample.

[0079] Exemplary Dynamic Sample Prioritization

[0080] In an exemplary operation, a chemical delivery truck arrives for Fig.12 , and a person interacts with a user interface at a remote sampling system 104 (e.g., a remote sampling system 104E near a chemical storage tank 1008) to indicate the presence of a priority sample so that a sample from a chemical delivery vehicle is tested to clear the delivery of chemicals for use by the processing facility. The system 100 assigns priority values ​​to the priority samples based on input from the person via the user interface. In this case, the sample is a higher priority sample and is assigned a priority value of 12 to indicate that the sample has received priority in the analysis performed by the analysis system 102 over samples with priority values ​​exceeding 12 (e.g., samples that are not associated with the first calibration curve for a given sequence and samples that are not currently being transported in the sample delivery line 144). The system 100 organizes the priority samples into a sample queue where the system 100 has been processing samples for a portion of the day (e.g., the first calibration curve and the first matrix calibration curve have been completed), which currently has samples being delivered from the remote sampling system 104B, samples for a primary calibration single point rerun due to a previous QC, and samples scheduled for delivery from the remote sampling system 104A and the remote sampling system 104D. The system 100 allows the samples currently being delivered from the remote sampling system 104B to complete delivery and analysis by the analysis system 102. The system 100 interrupts the scheduling of sampling by the local autosampler (e.g., sampling device 160) at the analysis system 102 for a primary calibration single point rerun due to a previous QC until after the higher priority samples are sampled by the remote sampling system 104E, delivered to the analysis system 102 via the sample delivery line 144, and analyzed. The system also interrupts the scheduling of sampling by remote sampling system 104A and remote sampling system 104D until each of the higher priority samples and primary calibration single point reruns are sampled and analyzed.

[0081] In another exemplary operation, an individual manually brings in a sample to Fig.12 104D. The system 100 is used to analyze the sample of the processing facility of the present invention ... After completing the analysis of the samples associated with the first calibration curve and the first matrix curve, the individual input at the remote sampling system 104D is assigned a lower priority sample with a priority value of 66, while the individual input at the remote sampling system 104E is assigned a higher priority sample with a priority value of 11. Although the sample queue previously had an urgent sample in the queue for sampling and analysis after processing the initial calibration sample, in addition to interrupting the remote sampling system 104A and the remote sampling system 104D to delay sampling and delivery from the respective remote sampling systems 104, the system 100 now interrupts the sampling of the urgent sample by the automatic sampler of the analysis system and instead obtains the higher priority sample from the remote sampling system 104E. The system 100 allows the urgent sample to be processed before the lower priority sample (e.g., priority value 65<priority value 66) from the remote sampling system 104D.

[0082] Although the above examples provide exemplary operating environments, it is understood that many different operating environments for samples and prioritized schedules for samples are possible.

[0083] in conclusion

[0084] In embodiments, various analytical devices may utilize the structures, techniques, methods, etc. described herein. Thus, although a system is described herein, a variety of analytical instruments may utilize the described techniques, methods, structures, etc. These devices may be configured to have limited functionality (e.g., a thin device) or to have robust functionality (e.g., a thick device). Thus, the functionality of a device may be related to the software or hardware resources of the device, such as processing power, memory (e.g., data storage capacity), analytical capabilities, etc.

[0085] Typically, any of the functions described herein can be implemented using hardware (e.g., fixed logic circuits such as integrated circuits), software, firmware, manual processing, or a combination thereof. Therefore, the blocks discussed in the above disclosure typically represent hardware (e.g., fixed logic circuits such as integrated circuits), software, firmware, or a combination thereof. In the case of hardware configuration, each block discussed in the above disclosure may be implemented as an integrated circuit together with other functions. Such an integrated circuit may include all functions of a given block, system, or circuit or a portion of the functions of the block, system, or circuit. In addition, the elements of a frame, system, or circuit may be implemented across multiple integrated circuits. Such an integrated circuit may include a variety of integrated circuits, including but not limited to: a monolithic integrated circuit, a flip chip integrated circuit, a multi-chip module integrated circuit, and / or a mixed signal integrated circuit. In an example of a software implementation, each block discussed in the above disclosure represents an executable instruction (e.g., a program code) that performs a specified task when executed on a processor. These executable instructions may be stored in one or more tangible computer-readable media. In some such instances, its software or firmware equivalents may be used to implement the entire system, block, or circuit. In other cases, portions of a given system, module, or circuit may be implemented in software or firmware, while other portions are implemented in hardware.

[0086] Although the subject matter has been described in language specific to structural features and / or process operations, it will be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as exemplary forms of implementing the claims.

Claims

1. A method for prioritizing samples for analysis by a sample analysis system, the method comprising: receiving a first sample identifier associated with a first sample for analysis by the sample analysis system, the first sample identifier being associated with a function of the first sample; receiving a second sample identifier associated with a second sample for analysis by the sample analysis system, the second sample identifier being associated with a function of the second sample; assigning a first sample priority value to the first sample based on the first sample identifier; assigning a second sample priority value to the second sample based on the second sample identifier; determining, based on the first sample priority value and the second sample priority value, a queue priority for analysis of the first sample and the second sample by the sample analysis system; as well as The first sample or the second sample is analyzed by the sample analysis system based on the determined queue priority.

2. The method of claim 1, wherein: Receiving the first sample identifier includes receiving the first sample identifier from a first remote sampling system, the first remote sampling system configured to acquire the first sample; as well as Receiving the second sample identifier includes receiving the second sample identifier from a second remote sampling system configured to obtain the second sample.

3. The method of claim 1, wherein: The plurality of different sample types include standard calibration samples, matrix calibration samples, quality check samples, universal samples, and priority samples.

4. The method of claim 1, wherein: The plurality of different sample types include a first primary calibration curve sample type, a first matrix calibration curve sample type, a sample type actively delivered from a remote sampling system, a priority sample type, a first quality check sample type, a failed analysis sample type, a failed quality check primary calibration curve rerun sample type, a failed quality check primary calibration single point rerun sample type, a failed quality check matrix calibration curve rerun sample type, a failed quality check matrix calibration single point rerun sample type, a planned calibration curve sample type, a planned quality check sample type, an emergency sample type, a lower priority sample type, and a planned sample type.

5. The method of claim 1, wherein: The method further comprises: receiving an indication that the first sample is scheduled to be delivered from a remote sampling system to the sample analysis system; receiving, after receiving an indication that the first sample is scheduled for delivery, a second sample identifier associated with the second sample; determining whether the second sample priority value is higher than the first sample priority value; and Based on the determination, one of delivering the first sample from the remote sampling system to the sample analysis system is implemented and delivering the first sample from the remote sampling system to the sample analysis system is canceled.

6. The method of claim 1, wherein: The method further comprises: receiving an indication that the first sample has been received for analysis at the sample analysis system; receiving, after receiving an indication that the first sample has been received at the sample analysis system, the second sample identifier associated with the second sample; determining whether the second sample priority value is higher than the first sample priority value; and Based on the determination, one of analyzing the first sample by the sample analysis system and stopping analyzing the first sample by the sample analysis system is performed.

7. The method of claim 1, wherein: The method further comprises: receiving a third sample identifier associated with a third sample for analysis by the sample analysis system; assigning a third sample priority value to the third sample based on user input received via the user interface; determining a queue priority for analysis of the first sample, the second sample, and the third sample by the sample analysis system based on the first sample priority value, the second sample priority value, and the third sample priority value; and The first sample, the second sample, or the third sample is analyzed by the sample analysis system based on the determined queue priority.

8. A system controller for prioritizing samples for analysis by a sample analysis system, the system controller comprising: at least one processor; and at least one memory, the at least one memory comprising computer program code, the at least one memory and the computer program code being configured to, with the at least one processor, cause the system controller to: receiving a first sample identifier associated with a first sample for analysis by the sample analysis system, the first sample identifier being associated with a function of the first sample; receiving a second sample identifier associated with a second sample for analysis by the sample analysis system, the second sample identifier being associated with a function of the second sample; assigning a first sample priority value to the first sample based on the first sample identifier; assigning a second sample priority value to the second sample based on the second sample identifier; determining, based on the first sample priority value and the second sample priority value, a queue priority for analysis of the first sample and the second sample by the sample analysis system; as well as The first sample or the second sample is analyzed by the sample analysis system based on the determined queue priority.

9. The system controller of claim 8, wherein: The at least one processor causes the system controller to: receiving the first sample identifier from a first remote sampling system, the first remote sampling system configured to obtain the first sample; as well as The second sample identifier is received from a second remote sampling system configured to obtain the second sample.

10. The system controller of claim 8, wherein: The at least one processor causes the system controller to: receiving the first sample identifier, the first sample identifier comprising the first sample type among the plurality of different sample types, the first sample type comprising a standard calibration sample, a matrix calibration sample, a quality check sample, a universal sample, and a priority sample; as well as The second sample identifier is received, the second sample identifier comprising the second sample type of the plurality of different sample types, the second sample type comprising a standard calibration sample, a matrix calibration sample, a quality check sample, a universal sample, and a priority sample.

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