A processing method for two-side graphic plate register and lamination

Abstract

The application discloses a processing method for two-side graphic plate register lamination, and relates to the technical field of optical component processing, and comprises the following processing steps: step S1, a master plate drawing is designed, the master plate drawing has a graphic area and a non-graphic area, and a positioning mark is arranged in the non-graphic area; step S2, the master plate drawing is transferred to a graphic plate, a graphic is formed on the graphic plate, and a positioning structure is arranged on the graphic plate; step S3, glue is applied to two graphic plates which need to be laminated, and the offset between the positioning marks on the two graphic plates is checked after the two graphic plates are laminated; step S4, when the offset is within a set range, the two graphic plates are locked by using the positioning structure, and the graphic plate is irradiated by using a UV lamp for curing and gluing; and step S5, the offset between the positioning marks on the two graphic plates is checked again. According to the processing method for two-side graphic plate register lamination, the register precision of the two-side graphic plate is higher, and the consistency of the two-side graphic plate is good.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical component processing, in particular to a processing method for aligning and laminating two-sided pattern plates. BACKGROUND

[0002] A two-sided pattern plate is a kind of photomask plate and belongs to optical components. The two-sided pattern plate is made by laminating two pattern plates together. In some cases, such as three-dimensional integrated circuits, two pattern plates are laminated and then exposed. Compared with a single pattern plate, the two-sided pattern plate has higher accuracy requirements for the pattern after lamination. If the pattern deviation of the two-sided pattern plate after lamination is large, the two-sided pattern plate cannot be applied to semiconductor manufacturing.

[0003] At present, the alignment of the two-sided pattern plate is mostly manually operated under a microscope. The alignment error of the pattern plate is large, the operation is difficult, and the consistency of the two-sided pattern plate produced is poor. SUMMARY

[0004] The present application aims to at least solve one of the technical problems in the prior art. To this end, the present application provides a processing method for aligning and laminating two-sided pattern plates. The alignment accuracy of the two-sided pattern plate is higher, and the consistency of the two-sided pattern plate produced is good.

[0005] The processing method for aligning and laminating two-sided pattern plates according to the embodiment of the present application comprises the following processing steps:

[0006] Step S1, designing a master plate drawing, the master plate drawing having a pattern area and a non-pattern area, and setting a positioning mark in the non-pattern area;

[0007] Step S2, transferring the master plate drawing to a pattern plate to form a pattern on the pattern plate, and providing a positioning structure on the pattern plate;

[0008] Step S3, gluing two pattern plates that need to be laminated, and checking the offset between the positioning marks on the two pattern plates after lamination of the two pattern plates;

[0009] Step S4, when the offset is within a set range, locking the two pattern plates using the positioning structure, and curing and gluing the pattern plates using a UV lamp;

[0010] Step S5, checking the offset between the positioning marks on the two pattern plates again.

[0011] According to the processing method for two-sided graphic plate register lamination provided by the embodiment of the present application, the positioning mark and the graphic are designed together in the master plate drawing paper, so that the processing error between the positioning mark and the graphic can be reduced as much as possible; after the two graphic plates are glued, the offset is checked first, and the positioning structure is used to lock the two graphic plates only when the offset is within the set value range; the positioning structure is used to lock the two graphic plates so as to reduce the new offset of the graphic plate in the curing and gluing process; after the curing and gluing of the graphic plate, the offset is checked again, and the register accuracy of the two-sided graphic plate is higher through the above processing method, and the consistency of the two-sided graphic plate is good.

[0012] According to some embodiments of the present application, in the step S1, the master plate drawing paper is provided with a plurality of same graphics, and the processing method for two-sided graphic plate register lamination further comprises a step S6 of cutting the graphic plate to form a plurality of optical elements, each of which has a single graphic.

[0013] According to some embodiments of the present application, in the step S3, it further comprises a step S3.1 of checking the offset between the positioning marks on the two graphic plates, and when the offset exceeds the set range, any one of the graphic plates is moved and adjusted, and the offset between the positioning marks on the two graphic plates is checked again, and the step S3.1 is repeated until the offset is within the set range.

[0014] According to some embodiments of the present application, the set range of the offset is 0-2 μm.

[0015] According to some embodiments of the present application, in the step S2, the positioning structure is a positioning hole, and in the step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

[0016] According to some embodiments of the present application, in the step S2, the master plate drawing paper is transferred to the graphic plate by means of laser direct writing.

[0017] According to some embodiments of the present application, in the step S2, the position deviation between the graphic on the graphic plate and the positioning structure is less than or equal to 0.5 μm.

[0018] According to some embodiments of the present application, in the step S4, the power of the UV lamp is less than or equal to 5 watts, and the time for the UV lamp to irradiate the graphic plate is 1.5-2.5 hours.

[0019] According to some embodiments of the present application, in the step S4, it further comprises a step S4.1 of placing the graphic plate in a constant temperature environment for constant temperature curing after the graphic plate is irradiated by the UV lamp.

[0020] According to some embodiments of the present application, in the step S4.1, the temperature of the constant temperature environment is 50-60℃, and the time of constant temperature curing is 11.5-12.5 hours.

[0021] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0022] The present application will be further described with reference to the accompanying drawings and examples, in which:

[0023] Figure 1 The first flowchart of the processing method of the two-sided graphic plate registration and lamination of the embodiment of the present application;

[0024] Figure 2 The second flowchart of the processing method of the two-sided graphic plate registration and lamination of the embodiment of the present application. DETAILED DESCRIPTION

[0025] The embodiments of the present application will be described in detail below, examples of which are shown in the accompanying drawings, in which the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0026] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0027] In the description of the present application, the plural refers to two or more. If there is a description of the first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the sequence of technical features indicated.

[0028] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0029] Generally, the two-sided graphic plate is formed by superimposing two graphic plates, and the graphics on each graphic plate are different. After superimposing, a new graphic is formed. Therefore, it is necessary to reduce the offset between the graphics as much as possible when superimposing the two graphic plates, so as to ensure that the new graphic formed by the two-sided graphic plate meets the design requirements.

[0030] As described in the background, the manual way of aligning the two-sided graphic plate under the microscope has a large error, and only a single two-sided graphic plate, i.e. a single optical element, can be made at a time. In some examples, the two-sided graphic plate is manually aligned, and the offset between the graphics of the two graphic plates is more than 0.05 mm, and the edge of the two-sided graphic plate is prone to leaving residual glue, which needs to be repaired manually, which greatly affects the processing efficiency of the two-sided graphic plate.

[0031] Referring to Figure 1 The processing method for aligning and superimposing the two-sided graphic plate according to an embodiment of the present application includes the following processing steps:

[0032] Step S1, designing a master plate paper, the master plate paper having a graphic area and a non-graphic area, and setting a positioning mark in the non-graphic area;

[0033] Step S2, transferring the master plate paper to the graphic plate to form a graphic on the graphic plate, and providing a positioning structure on the graphic plate;

[0034] Step S3, gluing two graphic plates that need to be superimposed, and checking the offset between the positioning marks on the two graphic plates after superimposing the two graphic plates;

[0035] Step S4, when the offset is within the set range, locking the two graphic plates using the positioning structure, and curing the glue by irradiating the graphic plate with a UV lamp;

[0036] Step S5, checking the offset between the positioning marks on the two graphic plates again.

[0037] The positioning mark and the graphic are designed together in the master plate paper, which can minimize the processing error between the positioning mark and the graphic. For example, after the master plate paper is imported into the computer, the graphic and the positioning mark are transferred to the graphic plate in one operation by laser direct writing. It should be understood that the positioning structure on the graphic plate can be made before the master plate paper is transferred, or can be made after the master plate paper is transferred.

[0038] The transferred graphic plate is glued, and after the two graphic plates are glued and attached, the offset between the graphics of the two graphic plates is first checked. It should be understood that after the graphic plate is glued, it is not cured and glued, and the graphic plates can still move. Only when the offset between the graphics of the two graphic plates is within the set value range, the positioning structure is used to lock the two graphic plates. Because the graphic plates can still move before curing and gluing, the positioning structure is used to lock the two graphic plates to minimize the new offset generated during the curing and gluing process.

[0039] Because the graphic plate shrinks during curing and gluing, it may move and generate a new offset, so after the two graphic plates are cured and glued, the offset is checked again. Through the above method, the register accuracy of the two-sided graphic plate is higher, and the consistency of the two-sided graphic plate produced is good. The graphic plate is cured by irradiation using a UV lamp, wherein the UV lamp is an ultraviolet lamp.

[0040] The two-sided graphic plate is manually registered under a microscope in an artificial manner, and generally only a single two-sided graphic plate can be produced at a time.

[0041] Referring to Figure 2 It should be understood that in step S1, the master graphic paper has a plurality of identical graphics, and the method for processing the two-sided graphic plate registered and attached further includes step S6 of cutting the graphic plate to form a plurality of optical elements, each optical element having a single graphic.

[0042] The two-sided graphic plate is produced by the above-mentioned method for processing the two-sided graphic plate registered and attached, and the register accuracy of the two-sided graphic plate is higher, so a larger two graphic plates can be registered and attached, and finally cut to obtain a plurality of optical elements, i.e. a single graphic two-sided graphic plate, which can greatly improve the production efficiency of the two-sided graphic plate.

[0043] It should be understood that in order to improve the accuracy of cutting the graphic plate, a cutting line can be designed between the plurality of identical graphics in the master graphic paper.

[0044] It should be understood that in step S3, step S3.1 is further included, which checks the offset between the positioning marks on the two graphic plates. When the offset exceeds the set range, any one of the graphic plates is moved and adjusted, and the offset between the positioning marks on the two graphic plates is checked again. Step S3.1 is repeated until the offset is within the set range.

[0045] Before the two graphic plates are cured and glued, they can be moved and adjusted. When the offset between the graphics of the two graphic plates exceeds the set range, moving the graphic plate can change the offset, and the offset can be corrected to be within the set range while adjusting and checking. It should be understood that the set range of the offset is preferably 0-2 pm.

[0046] It should be understood that the offset is the distance of deviation between the patterns of the two graphic plates, and the distance between the positioning mark of one of the graphic plates and the positioning mark of the other graphic plate is the offset. Therefore, the offset is always positive. When the offset is 0, the two graphic plates are in an ideal alignment state.

[0047] In some embodiments, it should be understood that in step S2, the positioning structure is a positioning hole, and in step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

[0048] The positioning hole is easier to process. Preferably, at least two positioning holes are provided on each graphic plate. When the two graphic plates are stacked and attached, and the offset is checked to be within the set range, the positioning pin is inserted into the positioning hole, which can limit the movement of the graphic plate in two mutually perpendicular directions in the plane, thereby minimizing the generation of new offsets of the graphic plate.

[0049] It should be understood that in step S2, the master pattern is transferred to the graphic plate by laser direct writing.

[0050] Laser direct writing is a process of using a laser beam with variable intensity to expose the resist material on the surface of the graphic plate with variable doses. After development, a required relief profile is formed on the surface of the resist layer. It should be understood that laser direct writing is a relatively mature technology, and will not be described here. By laser direct writing, the master pattern can be transferred to the graphic plate, and the positional accuracy between the pattern on the graphic plate and the positioning structure can be ensured, i.e., the positional deviation can be controlled within a very small range.

[0051] For example, it should be understood that in step S2, the positional deviation between the pattern on the graphic plate and the positioning structure is less than or equal to 0.5 μm.

[0052] It should be understood that in step S4, the power of the UV lamp is less than or equal to 5 watts, and the UV lamp irradiates the graphic plate for 1.5 to 2.5 hours.

[0053] By controlling the irradiation power and duration of the UV lamp on the graphic plate, the shrinkage speed of the glue during curing can be slowed down as much as possible, and the increase in the offset of the graphic plate caused by the rapid shrinkage of the glue during curing can be avoided.

[0054] It should be understood that in step S4, step S4.1 is further included, and after the graphic plate is irradiated by the UV lamp, the graphic plate is placed in a constant temperature environment for constant temperature curing.

[0055] Further, after the UV lamp irradiation, the two graphic plates are placed in a constant temperature environment for a longer time to allow better curing between the two graphic plates. It can be understood that in step S4.1, the temperature of the constant temperature environment is 50-60℃, and the time for constant temperature curing is 11.5-12.5 hours.

[0056] In some embodiments, a master graphic paper is designed, the master graphic paper has a graphic area and a non-graphic area, and a positioning mark is arranged in the non-graphic area, the positioning mark is a target, and the master graphic paper is provided with a plurality of identical graphics. The master graphic paper is transferred to a graphic plate by laser direct writing to form a graphic on the graphic plate, and a positioning structure is arranged on the graphic plate, the positioning structure is a positioning hole. The two graphic plates to be attached are glued, and after the two graphic plates are attached, the offset between the targets on the two graphic plates is checked. When the offset exceeds 2μm, any one of the graphic plates is moved and adjusted, and the offset between the targets on the two graphic plates is checked again, and the process is repeated until the offset is within 2μm.

[0057] When the offset is within 2μm, a positioning pin is inserted into the positioning hole to lock the two graphic plates, and a UV lamp is used to irradiate the graphic plate for curing. The power of the UV lamp is 5 watts, and the time for the UV lamp to irradiate the graphic plate is 2 hours. After the graphic plate is irradiated by the UV lamp, the graphic plate is placed in a constant temperature environment for constant temperature curing. The temperature of the constant temperature environment is 50-60℃, and the time for constant temperature curing is 12 hours. The offset between the targets on the two graphic plates is checked again to ensure that the offset is within 2μm. Finally, the graphic plate is cut to form a plurality of optical elements, each of which has a single graphic.

[0058] The embodiments of the application are described in detail above with reference to the accompanying drawings, but the application is not limited to the above-described embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the application.

Claims

1. A method of processing two-sided graphic plate register laminating, characterized in that, The method comprises the following steps: S1, designing a master drawing paper, the master drawing paper having a graphic area and a non-graphic area, and a positioning mark is arranged in the non-graphic area; S2, transferring the master drawing paper to a graphic plate to form a graphic on the graphic plate, and a positioning structure is arranged on the graphic plate; S3, gluing two graphic plates to be laminated, and checking the offset between the positioning marks on the two graphic plates; S4, when the offset is within a set range, locking the two graphic plates by using the positioning structure, and curing and gluing the graphic plates by using a UV lamp; S5, checking the offset between the positioning marks on the two graphic plates again.

2. The process for collating and laminating two-sided graphic plates according to claim 1, wherein In the step S1, the master drawing paper is provided with a plurality of same graphics, and the method further comprises the step S6 of cutting the graphic plate to form a plurality of optical elements, each of which has a single graphic.

3. The process for collating and laminating two-sided graphic plates according to claim 1, wherein In the step S3, the step S3.1 of checking the offset between the positioning marks on the two graphic plates is further included, when the offset exceeds the set range, moving and adjusting any one of the graphic plates, and checking the offset between the positioning marks on the two graphic plates again, and repeating the step S3.1 until the offset is within the set range.

4. The process for collating and laminating two-sided graphic plates according to claim 3, wherein The set range of the offset is 0-2 μm.

5. The process for collating and laminating two-sided graphic plates according to claim 1, wherein In the step S2, the positioning structure is a positioning hole, and in the step S4, a positioning pin is inserted into the positioning hole to lock the two graphic plates.

6. The process for the collating and laminating of two-sided graphic plates according to claim 1, characterized in that, In the step S2, the master drawing paper is transferred to the graphic plate by laser direct writing.

7. The process for the collating and laminating of two-sided graphic plates according to claim 6, characterized in that, In the step S2, the position deviation between the graphic on the graphic plate and the positioning structure is less than or equal to 0.5 μm.

8. The process for the collating and laminating of two-sided graphic plates according to claim 1, characterized in that, In the step S4, the power of the UV lamp is less than or equal to 5 W, and the time for which the UV lamp irradiates the graphic plate is 1.5-2.5 hours.

9. The process for the collating and laminating of two-sided graphic plates according to claim 1, characterized in that, In the step S4, the step S4.1 of placing the graphic plate in a constant-temperature environment for constant-temperature curing after the graphic plate is irradiated by the UV lamp is further included.

10. The process for processing two-sided graphic plate register laminating according to claim 9, characterized by, In the step S4.1, the temperature of the constant-temperature environment is 50-60℃, and the time for constant-temperature curing is 11.5-12.5 hours.

Images