A deformation-resistant flexible thin-film electrode structure and its preparation method

Abstract

This invention discloses a deformation-resistant flexible thin-film electrode structure and its fabrication method. The structure includes a polymer flexible substrate and a flexible thin-film electrode deposited on the polymer flexible substrate using screen printing. The flexible thin-film electrode has a curved structure with a rotation angle of 270 degrees. Due to its curved structure and 270-degree rotation angle, the flexible thin-film electrode's deformation resistance is effectively enhanced structurally. Simultaneously, the polymer flexible substrate imparts excellent flexibility to the entire electrode structure, enabling it to adapt to various complex curved surfaces and deformations. This characteristic allows the electrode to maintain stability and reliability during bending, stretching, and other deformation processes.

Description

Technical Field

[0001] This invention belongs to the technical field of flexible thermoelectric energy harvesting devices, specifically relating to a deformation-resistant flexible thin-film electrode structure and its preparation method. Background Technology

[0002] Deformation-resistant flexible thin-film electrodes have broad application prospects in fields such as battery manufacturing, sensor manufacturing, biomedicine, and electrochemical analysis. Thanks to their superior deformation resistance, they can maintain comprehensive performance under complex external mechanical environments, ensuring the stable test performance of sensors assembled from deformation-resistant flexible thin-film electrodes, reducing sensor maintenance costs, and providing strong support for device manufacturing and application under complex mechanical environments.

[0003] Existing flexible thin-film electrodes and devices are prone to bending and deformation under external pressure, resulting in micro-cracks. These cracks can affect their original factory performance, leading to a series of problems such as decreased test accuracy and increased drift, ultimately making it difficult for them to maintain reliable and stable operation in complex mechanical environments.

[0004] Therefore, there is an urgent need for a flexible thin-film electrode that can work stably in complex mechanical environments, is thin and lightweight, easy to process, and flexible and conformable to resist deformation. Flexible thin-film sensors based on or composed of this electrode can maintain stable measurement characteristics in complex mechanical environments. Summary of the Invention

[0005] The purpose of this invention is to provide a deformation-resistant flexible thin-film electrode structure and its preparation method, in order to solve the technical defects of existing traditional flexible thin-film electrodes and devices, which are prone to bending and deformation under external pressure, resulting in micro-cracks. These cracks affect their original factory performance, causing a series of problems such as decreased testing accuracy and increased drift, ultimately making it difficult for them to maintain reliable and stable operation in complex mechanical environments.

[0006] To achieve the above objectives, the present invention employs the following technical solution:

[0007] In a first aspect, a deformation-resistant flexible thin-film electrode structure is provided, comprising:

[0008] Polymer flexible substrate;

[0009] The flexible thin-film electrode is deposited on the polymer flexible substrate by screen printing.

[0010] The flexible thin-film electrode has a curved structure with a rotation angle of 270 degrees.

[0011] Furthermore, the polymer flexible substrate is made of one of polyimide, polyester, polyvinyl alcohol, or polyethylene naphthalate.

[0012] Furthermore, the cross-section of the polymer flexible substrate is rectangular.

[0013] Furthermore, the flexible thin-film electrode is composed of a mixture of powder material and fiber material;

[0014] The powder material has a block structure, and each block structure of powder material is wrapped with the fiber material. Adjacent powder materials are connected by overlapping fiber materials.

[0015] Furthermore, the powder material includes alumina, zirconium oxide, indium oxide, zinc oxide, or indium tin oxide.

[0016] Furthermore, the fiber material is a fiber powder with a large aspect ratio.

[0017] Furthermore, the fiber material includes multi-walled carbon nanotubes, single-walled carbon nanotubes, silica fibers, or high-silica fibers.

[0018] Secondly, a method for fabricating a deformation-resistant flexible thin-film electrode structure is provided, including:

[0019] The structure of the flexible thin-film electrode was designed by optimizing the structure using Peano curves.

[0020] Terpineol solvent, epoxy resin and polyetheramine are mixed with powder material and fiber material in a certain proportion to obtain printing paste;

[0021] The polymer flexible substrate is cleaned, and the printing paste is patterned according to the designed flexible thin film electrode structure using a screen printing mask.

[0022] The prepared pattern is cured, and the cured pattern is sintered at high temperature to obtain a flexible thin film electrode.

[0023] Furthermore, the cleaning of the polymer flexible substrate specifically includes:

[0024] The polymer flexible substrate was cleaned sequentially with acetone, ethanol and deionized water, and then the surface of the polymer flexible substrate was treated with an oxygen ion cleaner.

[0025] Further, the prepared pattern is cured, and the cured pattern is sintered at high temperature to obtain a flexible thin film electrode, specifically including:

[0026] The prepared pattern is placed on a hot platform at a temperature of 60℃-80℃ for curing;

[0027] The solidified graphic sample is then sintered in a high-temperature atmospheric environment.

[0028] The high temperature ranges from 200℃ to 300℃, and the sintering time is 1 to 5 hours.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] 1. Because the flexible thin film electrode has a curved structure and a rotation angle of 270 degrees, it effectively enhances the deformation resistance of the flexible electrode from a structural perspective. At the same time, the polymer flexible substrate gives the entire electrode structure excellent flexibility, enabling it to adapt to various complex curved surfaces and deformations. This characteristic allows the electrode to maintain stability and reliability during bending, stretching and other deformation processes.

[0031] 2. Using these high-performance polymer materials as flexible substrates can significantly improve the flexibility, conductivity, and stability of flexible electronic devices.

[0032] 3. The rectangular cross-section design makes it easier to control the cutting, trimming and molding of the polymer flexible substrate, improving processing accuracy and efficiency; moreover, the rectangular shape facilitates standardization and large-scale production, which helps to reduce production costs and improve production efficiency.

[0033] 4. Powder materials provide the necessary conductivity for the electrode, while fiber materials enhance its flexibility and stretchability. When combined, the electrode maintains good conductivity while adapting to various deformations. Adjacent powder materials are interlocked by fiber materials; this structure allows the fibers to distribute stress when the electrode is stretched or bent, preventing breakage or detachment, thus improving the electrode's durability and reliability.

[0034] 5. Using them in flexible thin-film electrodes can significantly improve the electrode's conductivity, hardness, wear resistance, high-temperature resistance, and chemical stability.

[0035] 6. Fiber powder with a large aspect ratio can form a continuous fiber network in the electrode. This network structure allows the electrode to disperse stress when it is bent or stretched, thereby maintaining the flexibility and integrity of the electrode.

[0036] 7. Using them as fiber materials for flexible thin-film electrodes can significantly improve the electrode's conductivity, mechanical strength, thermal stability, chemical stability, and optical properties.

[0037] 8. In the preparation of printing paste, the powder material is fully mixed with the fiber powder with a large aspect ratio to form a block-fiber cross-interconnected structure, which effectively enhances the binding between the block functional powders and maintains the stability of the electrochemical characteristics of the electrode under external force. From the material and structure perspective, this ensures the electrode's flexibility, conformability, and functional stability. Attached Figure Description

[0038] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 A schematic diagram of the deformation-resistant flexible thin film electrode structure provided by the present invention;

[0040] Figure 2 Comparison of mechanical simulations of the deformation-resistant flexible thin-film electrode structure provided for this invention;

[0041] Figure 3 This is a schematic diagram of the electrode material structure in the deformation-resistant flexible thin film electrode structure provided by the present invention;

[0042] Figure 4 The figure shows the electrode test results in the deformation-resistant flexible thin film electrode structure provided by this invention;

[0043] Figure 5 Flowchart of the method for fabricating the deformation-resistant flexible thin film electrode structure provided by the present invention;

[0044] The components include: 1. a polymer flexible substrate; 2. a flexible thin film electrode; 3. a powder material; and 4. a fiber material. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0047] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0048] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0049] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0050] Deformation-resistant flexible thin-film electrodes have broad application prospects in fields such as battery manufacturing, sensor manufacturing, biomedicine, and electrochemical analysis. Thanks to their superior deformation resistance, they can maintain comprehensive performance under complex external mechanical environments, ensuring the stable test performance of sensors assembled from deformation-resistant flexible thin-film electrodes, reducing sensor maintenance costs, and providing strong support for device manufacturing and application under complex mechanical environments.

[0051] Existing flexible thin-film electrodes and devices are prone to bending and deformation under external pressure, resulting in micro-cracks. These cracks can affect their original factory performance, leading to a series of problems such as decreased test accuracy and increased drift, ultimately making it difficult for them to maintain reliable and stable operation in complex mechanical environments.

[0052] Therefore, there is an urgent need for a flexible thin-film electrode that can work stably in complex mechanical environments, is thin and lightweight, easy to process, and flexible and conformable to resist deformation. Flexible thin-film sensors based on or composed of this electrode can maintain stable measurement characteristics in complex mechanical environments.

[0053] To address the aforementioned technical deficiencies, the inventors have provided a deformation-resistant flexible thin-film electrode structure and its fabrication method.

[0054] The present invention will now be described in further detail with reference to the accompanying drawings:

[0055] like Figures 1-3As shown in the embodiment of the present invention, a first aspect provides a deformation-resistant flexible thin-film electrode structure, including a polymer flexible substrate 1; and a flexible thin-film electrode 2, which is deposited on the polymer flexible substrate 1 by screen printing; wherein the flexible thin-film electrode 2 has a curved structure with a rotation angle of 270 degrees. In this process, the structure of the flexible thin-film electrode 2 is optimized by using a "Peano curve" to make it a curved structure with a rotation angle of 270 degrees, replacing the traditional linear electrode structure design. Under the same stress or deformation conditions, this effectively reduces the internal stress value of the flexible thin-film electrode 2 and enhances its deformation resistance. At the same time, the polymer flexible substrate 1 endows the entire electrode structure with excellent flexibility, enabling it to adapt to various complex curved surfaces and deformations. This characteristic allows the electrode to maintain stability and reliability during bending, stretching, and other deformation processes. Furthermore, the polymer flexible substrate 1 is made of one of polyimide, polyester, polyvinyl alcohol, or polyethylene naphthalate. Using these high-performance polymer materials as flexible substrates can significantly improve the flexibility, conductivity, and stability of the deformation-resistant flexible thin film electrode structure. At the same time, by using the above different materials, the deformation-resistant flexible thin film electrode structure can be applied to a wider range of application fields, such as wearable devices, biomedicine, or flexible display technologies.

[0056] In this embodiment, the polymer flexible substrate 1 has a rectangular cross-section. This rectangular cross-section design makes the polymer flexible substrate 1 easier to control during cutting, trimming, and molding, improving processing accuracy and efficiency. Furthermore, the rectangular shape facilitates standardization and large-scale production, reducing production costs and increasing efficiency. Additionally, the rectangular cross-section helps to evenly distribute stress on the polymer flexible substrate 1, reducing the risk of deformation or breakage due to stress concentration. Simultaneously, the rectangular structure of the polymer flexible substrate 1 provides better tensile, bending, and torsional resistance, thereby enhancing its mechanical strength and stability. In applications, the rectangular cross-section makes it easier to interface the polymer flexible substrate 1 with other components or devices, such as connecting it to electronic components, sensors, or connectors. It also facilitates precise assembly and alignment, improving the overall assembly efficiency and reliability of the equipment. During operation, by adjusting the size and proportions of the rectangle, the performance of the polymer flexible substrate 1, such as conductivity, flexibility, and thermal stability, can be optimized.

[0057] like Figure 3As shown, the flexible thin-film electrode 2 is composed of a mixture of powder material 3 and fiber material 4. The powder material 3 has a block structure, and each block structure of powder material 3 is wrapped with fiber material 4. Adjacent powder materials 3 are connected by overlapping fiber material 4. Specifically, the powder material 3 provides the required conductivity for the flexible thin-film electrode 2, while the fiber material 4 enhances the flexibility and stretchability of the flexible thin-film electrode 2. After mixing, the flexible thin-film electrode 2 maintains good conductivity while adapting to various deformations. The overlapping of adjacent powder materials 3 with fiber material 4 allows the fibers to disperse stress when the flexible thin-film electrode 2 is stretched or bent, preventing breakage or detachment, thereby improving the durability and reliability of the flexible thin-film electrode 2. The powder material 3 itself has good conductivity and is the main carrier of conductivity in the flexible thin-film electrode 2. By optimizing the type and proportion of powder material 3, the conductivity of the flexible thin-film electrode 2 can be further improved. The fiber material 4 stabilizes the powder material 3 in the flexible thin-film electrode 2, preventing it from detaching or agglomerating during long-term use, thus ensuring the stability of the conductivity of the flexible thin-film electrode 2. In application, the mixture of powder material 3 and fiber material 4 makes the flexible thin-film electrode 2 easier to process and shape, allowing for the fabrication of various shapes and sizes through processes such as screen printing and spraying. Furthermore, the presence of fiber material 4 in the flexible thin-film electrode 2 provides it with a degree of plasticity, enabling customized design to meet diverse application requirements. In this scheme, the fiber material 4 acts as a bridge between the flexible thin-film electrode 2 and the polymer flexible substrate 1, enhancing their adhesion and preventing detachment or peeling during use. Additionally, by selecting appropriate powder material 3 and fiber material 4, good compatibility between the flexible thin-film electrode 2 and various polymer flexible substrate materials can be achieved, ensuring stable operation of the flexible thin-film electrode 2 on the polymer flexible substrate 1. The combined use of powder material 3 and fiber material 4 improves material utilization, reduces waste, and thus lowers production costs. Furthermore, depending on the types of powder material 3 and fiber material 4 selected, the flexible thin film electrode 2 can be prepared and used in an environmentally friendly manner, reducing environmental pollution.

[0058] In this embodiment, the powder material 3 includes aluminum oxide, zirconium oxide, indium oxide, zinc oxide, or indium tin oxide. Each of these powder materials has unique properties. Using them in the flexible thin film electrode 2 can significantly improve the conductivity, hardness, wear resistance, high temperature resistance, and chemical stability of the flexible thin film electrode 2.

[0059] like Figure 3As shown, the fiber material 4 is a fiber powder with a large aspect ratio. This large aspect ratio fiber powder 4 can form a continuous fiber network in the flexible thin-film electrode 2. This network structure allows the flexible thin-film electrode 2 to disperse stress when subjected to bending or stretching, thereby maintaining its flexibility and integrity. Simultaneously, fibers with a large aspect ratio are less prone to breakage during stretching, maintaining good conductivity and resulting in better performance of the flexible thin-film electrode 2 in stretchable applications. Furthermore, the large aspect ratio fiber powder 4 forms a denser conductive network in the flexible thin-film electrode 2, improving its conductivity. The overlapping and entanglement between fibers reduce resistance, making current transmission in the flexible thin-film electrode 2 smoother and improving its conductivity efficiency. Regarding connectivity, the large aspect ratio fibers act as a skeleton in the flexible thin-film electrode 2, enhancing its structural stability and making it less prone to deformation or damage under external forces. Moreover, the interweaving and entanglement between fibers improves the tear resistance of the flexible thin-film electrode 2, making it more durable during use. During processing, the fiber powder 4 with a large aspect ratio is easier to disperse and mix evenly, which improves the preparation efficiency and consistency of the flexible thin film electrode 2. This allows the fiber powder 4 with a large aspect ratio to form a mechanical locking effect between the flexible thin film electrode 2 and the polymer flexible substrate 1, which enhances the bonding force between the flexible thin film electrode 2 and the polymer flexible substrate 1 and prevents the polymer flexible substrate 1 from falling off or peeling off during use.

[0060] In this embodiment, the fiber material 4 includes multi-walled carbon nanotubes, single-walled carbon nanotubes, silica fibers, or high-silica fibers. The characteristics of different materials enable the flexible thin-film electrode 2 to adapt to more diverse application scenarios, such as wearable devices, flexible displays, high-temperature sensors, or biomedical sensors.

[0061] Secondly, a method for fabricating a deformation-resistant flexible thin-film electrode structure is provided, including:

[0062] S101. The flexible thin film electrode structure is designed by using the Peano curve to optimize the structure. For example, in the structural design of the flexible thin film electrode 2, the traditional linear electrode structure design is replaced by the Peano curve to optimize the structure, making it a curved structure with a structural rotation angle of 270 degrees. Under the same stress or deformation conditions, the internal stress value of the flexible thin film electrode 2 is effectively reduced, and the deformation resistance of the flexible thin film electrode 2 is effectively enhanced.

[0063] S102. The terpineol solvent, epoxy resin, and polyetheramine are mixed with the powder material and fiber material in a certain proportion to obtain a printing paste; exemplarily, the terpineol solvent, epoxy resin, and polyetheramine are mixed with powder material 3 and fiber material 4 in a certain proportion to obtain a printing paste. A schematic diagram of the internal structure of the paste is shown below. Figure 3 As shown, the powder material 3 has a particle size of 20-50 micrometers, and the fiber material 4 has a diameter of 10-50 nanometers and a length of 30-100 micrometers. The fiber material 4 achieves a series of physical binding effects such as wrapping, winding, overlapping, and entanglement of the powder material 3, forming a bulk-fiber cross-interconnected structure. This effectively enhances the binding between the bulk functional powder materials 3, enabling the flexible thin film electrode 2 to maintain stable electrochemical properties while possessing flexibility within the service temperature range of room temperature to 400℃, exhibiting characteristics such as flexible conformability and functional stability.

[0064] S103. Clean the polymer flexible substrate and use a screen printing mask to pattern the printing paste according to the designed flexible thin film electrode structure; for example, the polymer flexible substrate 1 is cleaned in sequence with acetone, ethanol and deionized water, and then the surface of the polymer flexible substrate 1 is treated with an oxygen ion cleaner.

[0065] S104. The prepared pattern is cured, and the cured pattern is sintered at a high temperature to obtain a flexible thin film electrode. Exemplarily, the prepared pattern is cured on a hot platform at a temperature of 60℃-80℃; the cured pattern sample is then sintered in a high-temperature atmospheric environment; wherein the high temperature is 200℃~300℃, and the sintering time is 1~5 hours. Then, a bending fatigue test is performed on the flexible thin film electrode 2, i.e., reciprocating motion is achieved using a stepper motor combined with a lead screw. The test results are as follows... Figure 4 As shown, during the 4-hour test, the maximum change rate of resistance of the prepared flexible thin film electrode 2 was ≤5%, demonstrating excellent resistance to deformation.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit its scope of protection. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that after reading the present invention, they can still make various changes, modifications or equivalent substitutions to the specific implementation of the invention, but these changes, modifications or equivalent substitutions are all within the scope of protection of the pending claims of the invention.

Claims

1. A deformation-resistant flexible thin-film electrode structure, characterized in that, include: Polymer flexible substrate (1); The flexible thin-film electrode (2) is deposited on the polymer flexible substrate (1) by screen printing; The flexible thin-film electrode (2) has a curved structure with a rotation angle of 270 degrees. The flexible thin-film electrode (2) is composed of a mixture of powder material (3) and fiber material (4); The powder material (3) is a block structure, and each block structure of powder material (3) is wrapped with the fiber material (4). Adjacent powder materials (3) are connected by the fiber material (4). The powder material (3) includes aluminum oxide, zirconium oxide, indium oxide, zinc oxide or indium tin oxide; The fiber material (4) is a fiber powder with a large aspect ratio; The fiber material (4) includes multi-walled carbon nanotubes, single-walled carbon nanotubes, silica fibers or high-silica fibers.

2. The deformation-resistant flexible thin-film electrode structure according to claim 1, characterized in that, The polymer flexible substrate (1) is made of one of polyimide, polyester, polyvinyl alcohol or polyethylene naphthalate.

3. The deformation-resistant flexible thin-film electrode structure according to claim 2, characterized in that, The cross-section of the polymer flexible substrate (1) is rectangular.

4. A method for fabricating an anti-deformation flexible thin-film electrode structure according to any one of claims 1-3, characterized in that, include: The structure of the flexible thin-film electrode was designed by optimizing the structure using Peano curves. Terpineol solvent, epoxy resin and polyetheramine are mixed with powder material and fiber material in a certain proportion to obtain printing paste; The polymer flexible substrate is cleaned, and the printing paste is patterned according to the designed flexible thin film electrode structure using a screen printing mask. The prepared pattern is cured, and the cured pattern is sintered at high temperature to obtain a flexible thin film electrode.

5. The method for preparing the deformation-resistant flexible thin-film electrode structure according to claim 4, characterized in that, The cleaning of the polymer flexible substrate specifically includes: The polymer flexible substrate was cleaned sequentially with acetone, ethanol and deionized water, and then the surface of the polymer flexible substrate was treated with an oxygen ion cleaner.

6. The method for preparing the deformation-resistant flexible thin-film electrode structure according to claim 4, characterized in that, The prepared pattern is cured, and the cured pattern is sintered at high temperature to obtain a flexible thin film electrode, specifically including: The prepared pattern is placed on a hot platform at a temperature of 60℃-80℃ for curing; The solidified graphic sample is then sintered in a high-temperature atmospheric environment. The high temperature ranges from 200℃ to 300℃, and the sintering time is 1 to 5 hours.

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