Aerosol jet printing device and method with high start-stop responsivity

Abstract

The invention belongs to the field of additive manufacturing, and discloses an aerosol jet printing device and method with high start-stop responsivity, the jet printing device comprises a device body, the upper part of the device body is provided with a carrier gas inlet, an aerosol outlet and a sheath gas inlet, the interior of the device body is provided with a sheath gas chamber, and the carrier gas inlet and the aerosol outlet are communicated to form a carrier gas flow channel; the sheath gas inlet is communicated with the sheath gas chamber to form a sheath gas channel; the sheath gas chamber is communicated with the carrier gas flow channel, and a gas collecting chamber is formed at the communication junction; a sliding cavity and a lower aerosol runner are arranged in the lower part of the device body, a start-stop valve is mounted in the sliding cavity and is positioned between the carrier gas runner and the lower aerosol runner, and a deposition nozzle is arranged at an outlet of the lower aerosol runner; a first channel and a second channel are formed in the start-stop valve, and an outlet of the second channel is provided with a recovery nozzle facing the direction different from that of an outlet of the deposition nozzle. According to the invention, rapid switching of aerosol flowing paths can be realized in the jet printing device, and high-precision start-stop control of aerosol beams can be realized.

Description

Technical Field

[0001] The present invention belongs to the field of additive manufacturing, and more specifically, relates to an aerosol printing device and method with high start-stop responsiveness. Background Art

[0002] Aerosol printing technology is an emerging non-contact additive manufacturing technology. Compared with traditional screen printing, inkjet printing, micro-pen direct writing and other technologies, aerosol printing technology has the advantages of high manufacturing precision, wide range of raw material viscosity, and high utilization rate. Therefore, it has great application prospects in the fields of printed electronics. It has been successfully applied to the manufacture of electronic components such as conformal antennas, radio frequency circuits, and micro sensors.

[0003] The printing accuracy of aerosol printing technology is not only related to the line deposition accuracy caused by the printing process, but also related to the start-stop control responsiveness of the printing process. The aerosol printing process is generally stopped by cutting off the aerosol beam. The typical method is to achieve it through an external mechanical baffle with a response time of about 2ms. Its main working process is: when the aerosol beam is cut off, the system sends an electrical signal to the baffle control system to move the baffle to the bottom of the nozzle, cut off the aerosol beam, and prevent it from depositing on the substrate surface; when printing starts, the external baffle moves away from the bottom of the aerosol beam to achieve the deposition of the aerosol beam on the substrate surface. There are many problems with this solution: first, the aerosol beam will impact the mechanical baffle, and the aerosol particles after the impact may be dispersed in multiple directions, causing contamination to the substrate; second, the physical baffle area is limited, and due to multiple starts and stops, the baffle moves repeatedly, and the inertia during acceleration and deceleration may cause the residual raw materials on the baffle to leak or be thrown onto the substrate, causing contamination; third, the existence of the external baffle requires the distance between the nozzle and the substrate to be ≥5mm during printing, which exceeds the optimal focusing height of the aerosol beam and will affect the forming accuracy of the printed line to a certain extent; finally, the large-volume baffle control system is distributed on the side of the nozzle, which greatly limits the application of aerosol printing technology on special-shaped curved substrates. Another type of aerosol beam cutoff solution is achieved through pneumatic blocking inside the print head. For example, Chinese patent documents CN116320818A and CN111655382B, through the design of the internal flow channel, in conjunction with the pneumatic conversion valve and the corresponding control system, the aerosol beam is turned inside the print head when the printing stops, thereby realizing the aerosol beam cutoff. However, the above scheme has the following problems: when the aerosol beam is cut off, the turned sheath gas enters from the sheath boost port at the bottom of the confluence chamber, and while reversing the aerosol beam, part of the sheath gas will also be ejected from the nozzle, which may affect the printed pattern; in addition, the sheath gas (and pre-sheath gas) entering from the sheath boost port reverses the aerosol beam, which may cause the pressure distribution in the flow channel inside the print head to change, thereby affecting the response time and pattern printing quality when the aerosol printing is restarted. Summary of the invention

[0004] In view of the defects of the prior art, the purpose of the present application is to provide an aerosol printing device and method with high start-stop responsiveness, aiming to solve the problems of cumbersome operation, low start-stop responsiveness and poor pattern printing quality caused by the complex structure of the existing aerosol printing device.

[0005] To achieve the above-mentioned purpose, the present application provides an aerosol printing device with high start-stop responsiveness, which includes a device body and a start-stop valve. The upper part of the device body is provided with a carrier gas inlet, an aerosol outlet and a sheath gas inlet, and a sheath gas chamber is provided inside. The carrier gas inlet and the aerosol outlet are connected to form a carrier gas flow path, and the sheath gas inlet is connected to the sheath gas chamber to form a sheath gas channel; the sheath gas chamber is connected to the carrier gas flow path, and the connection intersection forms an air converging chamber; the lower part of the device body is provided with a sliding cavity and an aerosol lower flow path, the start-stop valve is installed in the sliding cavity, and is located between the carrier gas flow path and the aerosol lower flow path. The start-stop valve is provided with a first channel and a second channel, and the outlet of the second channel is provided with a recovery nozzle, and the direction of the recovery nozzle is different from that of the deposition nozzle; the start-stop valve can translate in the forward direction so that the carrier gas flow channel, the first channel, the lower aerosol flow channel and the deposition nozzle are connected in sequence to print the aerosol, and the inlet of the second channel is blocked by the device body; the start-stop valve can translate in the reverse direction so that the carrier gas flow channel, the second channel and the recovery nozzle are connected to recover the aerosol, and the first channel is blocked by the device body to stop printing.

[0006] Compared with the prior art, the above technical solution conceived by the present application, since a fast-moving start-stop valve is provided inside the printing device, the aerosol flow path can be quickly switched inside the printing head, thereby realizing high-responsiveness start-stop control of the aerosol beam.

[0007] Furthermore, the recovery nozzle has the same size as the deposition nozzle.

[0008] Furthermore, the carrier gas flow channel is a linear flow channel, and the sheath gas chamber is annularly wrapped around the carrier gas flow channel.

[0009] Furthermore, the sheath gas chamber also includes a converging flow channel located inside the ring shape, and the converging flow channel is connected and converges with the carrier gas flow channel to form a converging gas chamber.

[0010] Furthermore, the angle between the moving direction of the start-stop valve and the carrier gas flow channel is greater than 0° and less than or equal to 90°.

[0011] Furthermore, the aerosol printing device also includes a mechanical drive module and a control unit, the mechanical drive module is connected to the start-stop valve, and the control unit is connected to the mechanical drive module for controlling the mechanical drive module to drive the start-stop valve to perform reciprocating motion.

[0012] Furthermore, the maximum movement stroke of the start-stop valve is equal to the sum of the diameter of the first channel and the distance between the first channel and the second channel.

[0013] Further, the diameters of the carrier gas flow channel, the first channel and the second channel are the same; or, the diameters of the carrier gas flow channel and the first channel are the same, and the diameter of the second channel is larger than the diameter of the first channel; and / or, the longitudinal section of the second channel is L-shaped.

[0014] Furthermore, the outlet end of the recovery nozzle is connected to an aerosol recovery device, and the aerosol recovery device is provided with a vent hole connected to the external environment; and the total area of ​​the vent holes is greater than or equal to the outlet end area of ​​the recovery nozzle.

[0015] According to another aspect of the present application, there is also disclosed an aerosol printing method implemented by using the aerosol printing device as described above, comprising: S1 continuously introduces carrier gas and sheath gas carrying aerosol particles into the carrier gas inlet and the sheath gas inlet respectively, so that an aerosol beam flow is generated in the gas collection chamber; S2 controls the start-stop valve to translate forward until the second channel is connected to the carrier gas flow channel, the first channel is blocked and printing stops, the aerosol beam flows from the gas collection chamber into the second channel, and flows out from the recovery nozzle before executing the next step; S3 controls the start-stop valve to move in the reverse direction until the first channel is connected to the carrier gas channel, the second channel is blocked, and the aerosol beam flows from the gas collection chamber into the first channel and is ejected from the deposition nozzle for printing; during the printing process, when the aerosol beam needs to be stopped, step S2 is repeated; S4 repeats steps S2-S3 until printing is completed.

[0016] Furthermore, the sheath gas flow rate of the sheath gas inlet is not greater than 1000 sccm, and the carrier gas flow rate of the carrier gas inlet is not greater than 500 sccm; and / or, the diameter of the aerosol beam flowing out of the deposition nozzle is less than or equal to the line width value of the set printing pattern; and / or, the printing speed of the deposition nozzle is 0.1 mm / s~100 mm / s.

[0017] In general, the technical solution conceived in this application has the following technical advantages compared with the prior art: 1. By setting a fast-moving start-stop valve inside the printing device, the aerosol flow path can be quickly switched inside the printing head, thereby realizing high-responsiveness start-stop control of the aerosol beam. The overall device has a simple structure and convenient operation. It does not need to add or assemble any external mechanical components near the deposition nozzle to achieve arbitrary switching between the printing state and the stop state, and the switching responsiveness is high; the start-stop valve is sealed with the upper and lower device bodies, and there is no risk of pollution caused by raw material leakage.

[0018] 2. The aerosol printing device and method provided in the present application, through the internal structure design of the start-stop valve, that is, a recovery nozzle with the same inner diameter as the aerosol deposition nozzle is connected to the end of the second channel of the start-stop valve, thereby ensuring that the pressure distribution in the carrier gas flow channel of the entire printing head remains unchanged when the aerosol printing is started and stopped, so that when the printing process is restarted, the line morphology obtained by the printing has no gradual change or accumulation, and the printing quality is stable and unchanged, thereby ensuring the consistency of the aerosol printing quality.

[0019] 3. In the aerosol printing device provided in the present application, the distance between the nozzle and the substrate can be adjusted within 0mm-5mm according to the focusing effect without restriction, which also increases the compatibility of the aerosol printing technology with non-planar substrates.

[0020] 4. In the aerosol printing device provided in the present application, when the aerosol printing stops, the aerosol beam is introduced into the aerosol recoverer from the second channel of the start-stop valve, and there is no airflow output from the deposition nozzle, which will not cause airflow impact on the substrate and will not have any impact on the printed pattern, thereby ensuring the molding shape and molding accuracy of the printed pattern. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the initial state structure of the printing device provided in Example 1 of the present application after being turned on; Figure 2 It is a schematic diagram of the printing state structure of the printing device provided in Example 1 of the present application; Figure 3 It is a schematic diagram of the structure of the printing device provided in Example 1 of the present application when the aerosol beam flow is stopped during the printing process; Figure 4 It is a schematic diagram of various shapes of the start-stop valve provided in Example 1 of the present application when viewed from the side; Figure 5 It is a schematic diagram of the overall structure of the printing device provided in Example 2 of the present application; Figure 6 It is a schematic diagram of the printing state structure of the printing device provided in Example 2 of the present application; Figure 7 It is a schematic diagram of the structure of the printing device provided in Example 2 of the present application when the aerosol beam is stopped during the printing process; Figure 8 It is a schematic diagram of the longitudinal cross-sectional structure of the start-stop valve provided in Example 2 of the present application.

[0022] Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein: 1-carrier gas inlet, 2-sheath gas inlet, 3-sheath gas chamber, 4-gas collection chamber, 5-aerosol middle flow channel, 6-aerosol lower flow channel, 7-start-stop valve, 8-first channel, 9-second channel, 10-recovery nozzle, 11-aerosol recoverer, 12-mechanical drive module, 13-deposition nozzle, 14-substrate, 15-control unit, 16-aerosol outlet, 17-vent, 18-sliding chamber. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0024] In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the feature. In the description of the present application, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0025] In addition, references throughout this specification to "one embodiment"; "one embodiment", "an example" or similar language indicate that a particular feature, structure, or characteristic described in conjunction with the embodiment is included in at least one embodiment of the present application. Thus, appearances of the phrase "in one embodiment"; "in one embodiment" and similar language throughout this specification may, but do not necessarily, all refer to the same embodiment.

[0026] Example 1 This embodiment provides an aerosol printing device with high start-stop responsiveness, such as Figure 1-4 As shown, it includes a device body and a start-stop valve 7. A carrier gas inlet 1, an aerosol outlet 16 and a sheath gas inlet 2 are provided on the surface of the upper part of the device body, and a sheath gas chamber 3 is provided inside. The carrier gas inlet 1 and the aerosol outlet 16 are connected to form a carrier gas flow channel; the sheath gas inlet 2 is connected to the sheath gas chamber 3 to form a sheath gas channel; the sheath gas chamber 3 is also connected to the carrier gas flow channel, and the connecting intersection forms a gas confluence chamber 4.

[0027] Specifically, when the aforementioned gas collection chamber 4 is located in the middle of the carrier gas flow channel, it divides the carrier gas flow channel into two parts, wherein the flow channel between the carrier gas inlet 1 and the gas collection chamber 4 serves as the upper channel for the carrier gas and aerosol, and the flow channel between the gas collection chamber 4 and the aerosol outlet 16 is the middle flow channel 5 of the aerosol obtained after merging with the sheath gas.

[0028] A sliding cavity 18 and an aerosol lower flow channel 6 are provided in the lower part of the device body. The sliding cavity 18 is a through cavity with openings at both ends. The start-stop valve 7 is embedded in the sliding cavity 18 and is located between the aerosol lower flow channel 6 and the carrier gas flow channel. The start-stop valve 7 can also slide bidirectionally in the sliding cavity 18 along the connecting line direction of the openings at both ends of the sliding cavity. When sliding, the start-stop valve 7 is sealed and connected to the contact surface of the sliding cavity 18 to prevent aerosol overflow during printing.

[0029] The above-mentioned start-stop valve 7 is provided with a first channel 8 and a second channel 9, the inlets of the first channel 8 and the second channel 9 are coplanar, and the outlets of the first channel 8 and the second channel 9 are in different directions; a deposition nozzle 13 is passed through the device body, and a recovery nozzle 10 is provided at the outlet of the second channel 9, and the spraying directions of the deposition nozzle 13 and the recovery nozzle 10 are perpendicular to each other; the start-stop valve 7 can translate in the forward and reverse directions relative to the device body until the carrier gas channel, the first channel 8 and the deposition nozzle 13 are connected in sequence for printing, and the inlet of the second channel 9 is blocked by the device body; or until the carrier gas channel, the second channel 9 and the recovery nozzle 10 are connected in sequence to recover the aerosol, and the inlet of the first channel 8 is blocked to stop printing.

[0030] The maximum movement stroke of the aforementioned start-stop valve 7 is equal to the sum of the width at the inlet of the second channel 9 and the distance between the first channel 8 and the second channel 9 .

[0031] The size of the recovery nozzle 10 is the same as that of the deposition nozzle 13 , and both have conical outlet ends, and the inlet ends have the same diameter as the outlet ends of the corresponding first channel 8 and second channel 9 .

[0032] The aforementioned carrier gas flow channel is a linear cylindrical flow channel, and the aforementioned sheath gas chamber 3 is annularly wrapped outside the carrier gas flow channel. The sheath gas chamber 3 can be cylindrical, cubic, etc., and is preferably cylindrical in this embodiment. A connecting port is opened in the middle of the carrier gas flow channel to communicate with the sheath gas chamber 3. The carrier gas flow channel area at the connecting port serves as a gas converging chamber 4, where the sheath gas and the carrier gas meet, and the intersecting gas is sent into the middle flow channel 5 of the aerosol under the action of external force. The sheath gas inlet 2 of the sheath gas chamber 3 is located on the upper side of the device body, and the sheath gas inlet 2 is connected to the sheath gas chamber 3 to form a sheath gas flow channel, and the internal size of the sheath gas flow channel is the same as the size of the sheath gas inlet 2.

[0033] like Figure 4As shown, the longitudinal section of the start-stop valve 7 along the central axis of the carrier gas flow channel can be of any shape, such as circular, rectangular, trapezoidal, triangular, regular polygonal, etc. The cross section of the second channel 9 is located at the exact center of the above-mentioned arbitrary shape, and the inner wall of the sliding cavity 18 is adapted to the appearance shape of the start-stop valve 7 and is sealed when sliding. Therefore, the angle θ between the moving direction of the start-stop valve 7 and the carrier gas flow channel is greater than 0° and less than or equal to 90°. In this embodiment, it is preferably 90°, that is, the upper and lower surfaces of the sliding cavity 18 in sealing contact with the start-stop valve 7 are parallel, and the upper and lower surfaces of the sliding cavity 18 are perpendicular to the carrier gas flow channel.

[0034] The first channel 8 and the second channel 9 are both cylindrical channels, and the longitudinal section of the second channel 9 is L-shaped. The diameters of the middle flow channel 5 of the aerosol, the lower flow channel 6 of the aerosol and the first channel 8 are the same. The diameter of the inlet end of the second channel 9 is larger than the diameter of the first channel 8, and the diameter of the outlet end of the second channel 9 is the same as the diameter of the first channel 8.

[0035] The outlet end of the aforementioned recovery nozzle 10 is connected to an aerosol recovery device 11, and a pair of micro-vents 17 connected to the external environment are provided on the aerosol recovery device 11, with a diameter of 0.5 mm, and the total area of ​​the pair of vents 17 is greater than or equal to the outlet end area of ​​the recovery nozzle 10, ensuring that the internal pressure of the aerosol recovery device 11 is the same as the atmospheric pressure to avoid obstruction of the aerosol flow.

[0036] The aerosol printing device further includes a mechanical drive module 12 and a control unit 15. The mechanical drive module 12 is connected to the start-stop valve 7. The control unit 15 is connected to the mechanical drive module 12 and is used to drive the mechanical drive module 12 to drive the start-stop valve 7 to reciprocate in the sliding chamber 18. Specifically, the mechanical drive module 12 is electrically connected to the control unit 15. The control unit 15 controls the mechanical drive module 12 to drive the start-stop valve 7 to reciprocate through electrical signals. The control unit 15 may also be equipped with a pre-set control program to control the mechanical drive module 12 to drive the start-stop valve to reciprocate according to the control program instructions.

[0037] In this embodiment, the width of the sliding cavity 18 in the movement direction of the start-stop valve 7 is 20 mm, which is greater than the width of the start-stop valve 7 in its movement direction, and can meet the maximum movement stroke requirement while reducing the processing cost.

[0038] The distance between the second channel 9 and the first channel 8 is set to be no greater than 1 mm, and is selected to be 0.75 mm in this embodiment. If the distance is too large, the start-stop response time of the start-stop valve 7 at the same moving speed will be too long, affecting the printing quality.

[0039] The diameters of the first channel 8, the middle flow channel 5 of the aerosol, and the lower flow channel 6 of the aerosol are all selected to be no greater than 3 mm. In this embodiment, 2.5 mm is selected to ensure high responsiveness of printing start and stop, that is, the maximum movement stroke of the start and stop valve 7 is 3.25 mm.

[0040] The deposition nozzle 13 is connected to the lower aerosol flow channel 6, and the diameter of the outlet end of the deposition nozzle 13 is selected to be 0.3 mm. The diameter of the second channel 9 can be greater than or equal to the diameter of the carrier gas flow channel, so it is selected to be 3 mm in this embodiment. The diameter of the outlet end of the recovery nozzle 10 connected to the second channel 9 is taken as 0.3 mm. The distance between the aforementioned deposition nozzle 13 and the substrate 14 is adjustable between 0-5 mm, and can be selected to be 3 mm in this embodiment (in order to clearly show the position of the substrate in the accompanying drawings, the distance between the deposition nozzle 13 and the substrate 14 is larger).

[0041] Based on the above dimensions, the carrier gas flow rate and the sheath gas flow rate are reasonably controlled. Since the spacing between the first channel 8 and the second channel 9 is very small, the start-stop valve 7 can quickly open and close the first channel 8 or the second channel 9 when it moves, thereby achieving high-quality printing effects.

[0042] Example 2 like Figure 5-8 As shown, one difference between this embodiment and embodiment 1 is that the shape of the sheath gas chamber 3 is different. In this embodiment, the aforementioned sheath gas chamber 31 is an annular cylindrical chamber, and is wrapped around the outside of the carrier gas flow channel. An intersection flow channel 31 is arranged on the inner side of the ring, and the intersection flow channel 31 can be a plurality of cylindrical straight channels in a scattered shape, or an annular plate-shaped channel wrapped around the outside of the carrier gas flow channel, and the angle between the intersection flow channel 31 and the carrier gas flow channel is greater than 0° and less than or equal to 90°. The longitudinal section of the intersection flow channel 31 can be V-shaped, straight-line or inverted V-shaped along the aerosol flow direction in the carrier gas flow channel. Different shapes correspond to different carrier gas flow rates and sheath gas flow rates, ensuring that the aerosol flows from the carrier gas inlet 1 to the aerosol outlet 16. The height of the aforementioned sheath gas chamber 3 along the central axis of the carrier gas flow channel (i.e., the diameter of the cylindrical sheath gas chamber) is greater than or equal to the diameter of the intersection flow channel 31, so that the sheath gas chamber 3 has a larger volume, which can store a large amount of sheath gas, and combined with the smaller intersection flow channel 31 to better control the flow rate of the sheath gas and the uniformity of the distribution of the sheath gas in the direction perpendicular to the central axis of the carrier gas flow channel.

[0043] Another difference between this embodiment and embodiment 1 is that the width D3 of the sliding cavity 18 in the direction of movement of the start-stop valve 7 is 25 mm, which is greater than the width of the start-stop valve 7 in the direction of movement. The carrier gas channel, the first channel 8 and the second channel 9 are all cylindrical linear channels, and the diameters of the three are the same, that is, the diameter D4 of the middle flow channel 5 of the aerosol, the diameter W2 of the first channel 8, the diameter W1 of the second channel 9 and the diameter D5 of the lower flow channel 6 of the aerosol are all the same, which is 3 mm; the distance L1 between the second channel 9 and the first channel 8 is 1 mm, then the maximum movement stroke L2 of the start-stop valve 7 is the sum of W1 and L1, that is, 4 mm. The outlet diameters D2 and D1 of the recovery nozzle 10 and the deposition nozzle 13 are both 0.5 mm.

[0044] Another difference between this embodiment and embodiment 1 is that the diameter of the vent hole 17 opened on the aerosol recovery device 11 and communicating with the external environment is 1 mm.

[0045] Example 3 With respect to the aerosol printing devices disclosed in Embodiment 1 and Embodiment 2, this embodiment provides an aerosol printing method using any of the above-mentioned aerosol printing devices, including: S1 continuously introduces carrier gas and sheath gas into the carrier gas inlet and the sheath gas inlet respectively, so that an aerosol beam is generated in the gas collection chamber.

[0046] Specifically, the sheath gas inlet 2 and the carrier gas inlet 1 are opened, the sheath gas enters from the sheath gas flow channel, and the carrier gas transporting aerosol enters the carrier gas flow channel from the carrier gas inlet 1. The sheath gas surrounds and constrains the aerosol in a ring shape from the outside of the aerosol, and forms an aerosol beam in the gas collection chamber 4.

[0047] S2 controls the start-stop valve 7 to move forward until the second channel 9 is connected to the carrier gas flow channel, the first channel 8 is blocked, the aerosol beam flows from the gas collection chamber 4 into the second channel 9, and flows out from the recovery nozzle 10 until the flow rate stabilizes and the next step is executed.

[0048] S3 controls the start-stop valve 7 to move in the opposite direction until the first channel 8 is connected to the carrier gas flow channel and the second channel 9 is blocked. The aerosol beam flows from the gas collection chamber 4 into the first channel 8 and sprays aerosol from the deposition nozzle 13 to the substrate 14 directly below it for printing. During the printing process, when the aerosol beam needs to be stopped, the movement of the start-stop valve in step S2 is repeated to close the first channel 8.

[0049] During the printing process, according to the trajectory requirements of the pattern to be printed, when it is necessary to cut off the aerosol beam, the start-stop valve 7 is controlled by the mechanical drive module 12 to switch the working channel, so that the second channel 9 is switched to the middle flow channel 5 of the aerosol, and the aerosol beam flows from the middle flow channel 5 of the aerosol into the second channel 9 in the start-stop valve 7, and flows out from the side recovery nozzle 10 to the aerosol recovery device 11, so that the aerosol printing is stopped. Afterwards, according to the trajectory requirements of the pattern to be printed, when it is necessary to start the aerosol beam, the start-stop valve 7 is controlled by the mechanical drive module 12 to switch the channel in the opposite direction, and the first channel 8 of the start-stop valve 7 is switched to the middle flow channel 5 of the aerosol, and the aerosol beam flows into the first channel 8, flows out from the deposition nozzle 13 and is deposited on the surface of the substrate 14, so that the aerosol printing is started.

[0050] S4 repeats steps S2-S3 until the workpiece printing is completed.

[0051] During the printing process, the sheath gas flow rate of the aforementioned sheath gas inlet is 0 sccm~1000 sccm; the carrier gas flow rate of the carrier gas inlet is 0 sccm~500 sccm; the diameter of the aerosol beam flowing out of the deposition nozzle is less than or equal to the line width value of the set printing pattern; the printing speed of the deposition nozzle is 0.1 mm / s~100 mm / s; the distance between the deposition nozzle and the printing substrate 14 is greater than 0 and less than 5 mm.

[0052] When the printing device in Example 1 is used for printing, in step S1, the sheath gas flow rate is adjusted to 100 sccm, the carrier gas flow rate is adjusted to 10 sccm, the distance between the deposition nozzle 13 and the substrate 14 is adjusted to 5 mm, and the printing speed is adjusted to 2 mm / s. After the printing effect is stable, the preset pattern is printed.

[0053] When printing using the printing device in Example 2, the sheath gas flow rate is adjusted to 100 sccm, the carrier gas flow rate is adjusted to 30 sccm, the distance between the deposition nozzle 13 and the substrate 14 is adjusted to 3 mm, and the printing speed is adjusted to 5 mm / s. After the printing effect is stable, the preset pattern is printed.

[0054] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An aerosol printing device with high start-stop responsiveness, characterized in that: It comprises a device body and a start-stop valve (7), wherein: The upper part of the device body is provided with a carrier gas inlet (1), an aerosol outlet (16) and a sheath gas inlet (2), and a sheath gas chamber (3) is provided inside the device body. The carrier gas inlet (1) and the aerosol outlet (16) are connected to form a carrier gas flow channel, and the sheath gas inlet (2) is connected to the sheath gas chamber (3) to form a sheath gas channel; the sheath gas chamber (3) is connected to the carrier gas flow channel, and the connecting intersection forms a gas converging chamber (4); the lower part of the device body is provided with a sliding cavity (18) and an aerosol lower flow channel (6), the start-stop valve (7) is installed in the sliding cavity (18) and is located between the carrier gas flow channel and the aerosol lower flow channel (6), and the outlet of the aerosol lower flow channel (6) is provided with a deposition nozzle (13 The start-stop valve (7) is provided with a first channel (8) and a second channel (9), the outlet of the second channel (9) is provided with a recovery nozzle (10), and the recovery nozzle (10) and the deposition nozzle (13) are oriented in different directions; the start-stop valve (7) can be translated in a positive direction so that the carrier gas flow channel, the first channel (8), the lower aerosol flow channel (6) and the deposition nozzle (13) are connected in sequence to print the aerosol, and the inlet of the second channel (9) is blocked by the device body; the start-stop valve (7) can be translated in a reverse direction so that the carrier gas flow channel, the second channel (9) and the recovery nozzle (10) are connected to recover the aerosol, and the first channel (8) is blocked by the device body to stop printing.

2. The aerosol printing device according to claim 1, characterized in that: The recovery nozzle (10) is the same as the deposition nozzle (13).

3. The aerosol printing device according to claim 1, characterized in that: The carrier gas flow channel is a linear flow channel, and the sheath gas chamber (3) is annularly wrapped around the carrier gas flow channel.

4. The aerosol printing device according to claim 3, characterized in that: The sheath gas chamber (3) further comprises a converging flow channel (31) located inside the ring, the converging flow channel (31) being connected and converging with the carrier gas flow channel to form a converging gas chamber (4).

5. The aerosol printing device according to claim 3, characterized in that: The included angle θ between the moving direction of the start-stop valve (7) and the carrier gas flow channel is greater than 0° and less than or equal to 90°.

6. The aerosol printing device according to claim 1, characterized in that: The aerosol printing device further comprises a mechanical drive module (12) and a control unit (15), wherein the mechanical drive module (12) is connected to the start-stop valve (7), and the control unit (15) is connected to the mechanical drive module (12) and is used to control the mechanical drive module (12) to drive the start-stop valve (7) to perform reciprocating motion; and / or the maximum movement stroke of the start-stop valve (7) is equal to the sum of the diameter of the first channel (8) and the distance between the first channel (8) and the second channel (9).

7. The aerosol printing device according to claim 1, characterized in that: The diameters of the carrier gas flow channel, the first channel (8) and the second channel (9) are the same; or, the diameters of the carrier gas flow channel and the first channel (8) are the same, and the diameter of the second channel (9) is larger than the diameter of the first channel (8); and / or, the longitudinal section of the second channel (9) is L-shaped.

8. The aerosol printing device according to claim 1, characterized in that: The outlet end of the recovery nozzle (10) is connected to an aerosol recovery device (11), and the aerosol recovery device (11) is provided with a vent hole (17) that communicates with the external environment, and the total area of ​​the vent holes (17) is greater than or equal to the outlet end area of ​​the recovery nozzle (10).

9. An aerosol printing method implemented by using the aerosol printing device according to any one of claims 1 to 8, characterized in that: include: S1 continuously introduces carrier gas and sheath gas carrying aerosol particles into the carrier gas inlet (1) and the sheath gas inlet (2), respectively, so that an aerosol beam flow is generated in the gas collection chamber (4); S2 controls the start-stop valve (7) to translate forward until the second channel (9) is connected to the carrier gas channel, the first channel (8) is blocked and printing stops, the aerosol beam flows from the gas collection chamber (4) into the second channel (9), and flows out from the recovery nozzle (10) before executing the next step; S3 controls the start-stop valve (7) to move in the reverse direction until the first channel (8) is connected to the carrier gas channel, the second channel (9) is blocked, and the aerosol beam flows from the gas collection chamber (4) into the first channel (8) and is ejected from the deposition nozzle (13) for printing; During the printing process, when the aerosol beam needs to be stopped, step S2 is repeated; S4 repeats steps S2-S3 until printing is completed.

10. The aerosol printing method according to claim 9, characterized in that: The sheath gas flow rate of the sheath gas inlet (2) is not greater than 1000 sccm, and the carrier gas flow rate of the carrier gas inlet (1) is not greater than 500 sccm; and / or the diameter of the aerosol beam flowing out of the deposition nozzle (13) is less than or equal to the line width value of the set printing pattern; and / or the printing speed of the deposition nozzle (13) is 0.1 mm / s~100 mm / s.

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