Vacuum pump

Abstract

The invention provides a vacuum pump and belongs to the technical field of vacuum pumps. The vacuum pump comprises a stator, the stator comprises at least one stage of pumping chamber, and the pumping chamber is provided with a gas inlet and a gas outlet; the rotor comprises at least one stage of rotor component, and the rotor component is accommodated in the corresponding pumping chamber to rotate and drives gas to be pumped from the gas inlet to the gas outlet; the at least one energy-saving structure is arranged in the at least one stage of pumping cavity, the energy-saving structure is provided with a high-speed fluid inlet pipeline, a gas inlet pipeline and a mixed gas exhaust pipeline which are communicated with one another, and the gas inlet pipeline is connected with a gas outlet of the pumping cavity; when high-speed fluid is introduced into the high-speed fluid inlet pipeline, negative pressure is formed at the joint of the three pipelines, and gas in the pumping cavity can be exhausted to the mixed gas exhaust pipeline through the gas inlet pipeline. By arranging the energy-saving structure on the vacuum pump, energy consumption of the vacuum pump can be reduced, the temperature of the vacuum pump is reduced, and the service life of the vacuum pump is prolonged.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum pumps, and in particular relates to a vacuum pump. Background Art

[0002] In industrial machinery, vacuum pumps are devices used to generate, improve, and maintain vacuum. Vacuum pumps have been applied to many industries in the national economy, including defense science and technology, steel industry, coating, microelectronics information, semiconductors, biomedicine, chemical industry, food, environmental protection and other industries. With the widespread application of vacuum pumps, problems such as high energy consumption and energy shortage have emerged. Since vacuum pumps exhaust gas through various physical or mechanical means, the closer to the exhaust end of the vacuum pump, the greater the gas pressure, and the greater the energy consumption required to exhaust the gas. Summary of the invention

[0003] The present disclosure aims to solve at least one of the technical problems existing in the prior art and provide a vacuum pump.

[0004] The present disclosure provides a vacuum pump, comprising:

[0005] A stator, the stator comprising at least one pumping chamber, the pumping chamber having a gas inlet and a gas outlet;

[0006] a rotor, the rotor comprising at least one rotor component, the rotor component being accommodated in the corresponding pumping chamber and rotating to drive the gas to be pumped from the gas inlet to the gas outlet;

[0007] At least one energy-saving structure is arranged in at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipeline, an air inlet pipeline, and a mixed gas outlet pipeline that are connected, and the air inlet pipeline is connected to the gas outlet of the pumping chamber;

[0008] When high-speed fluid is introduced into the high-speed fluid inlet pipeline, negative pressure is formed at the connection of the three pipelines, so that the gas in the pumping chamber can be discharged to the mixed gas discharge pipeline through the air inlet pipeline.

[0009] Optionally, the outlet cross-sectional area of ​​the high-speed fluid entering the pipeline is smaller than the inlet cross-sectional area.

[0010] Optionally, when the stator includes a primary pumping chamber and the rotor includes a primary rotor component, the number of the energy-saving structure is one, and the energy-saving structure is arranged at the outlet end of the pumping chamber.

[0011] Optionally, a one-way valve is provided between the inlet of the air intake pipeline and the outlet of the mixed gas exhaust pipeline.

[0012] Optionally, when the stator includes a multi-stage pumping chamber and the rotor includes a multi-stage rotor component, the number of the energy-saving structures is multiple, and each energy-saving structure corresponds to one pumping chamber; wherein,

[0013] The air inlet pipeline is connected to the gas outlet of the previous stage pumping chamber, and the mixed gas discharge pipeline is connected to the gas inlet of the next stage pumping chamber.

[0014] Optionally, the energy-saving structure includes a plurality of air intake pipelines and / or a plurality of mixed gas exhaust pipelines; wherein,

[0015] A plurality of gas inlet pipes are connected to the gas outlet of the previous stage pumping chamber;

[0016] The plurality of mixed gas exhaust pipelines are connected to the gas inlet of the next-stage pumping chamber.

[0017] Optionally, the stator comprises a plurality of stator components, each of which has a pumping chamber disposed therein;

[0018] The side wall of each stator component is penetrated by a connected high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline;

[0019] The air inlet pipeline is connected to the gas outlet of the previous stage of pumping chamber, and the mixed gas discharge pipeline is connected to the gas inlet of the current stage of pumping chamber.

[0020] Optionally, a high-speed fluid inlet structure communicating with the high-speed fluid inlet pipeline is arranged outside the side wall of the stator component.

[0021] Optionally, the stator is formed by an upper shell and a lower shell, and the upper shell and the lower shell are arranged to form a plurality of pumping chambers;

[0022] The upper shell or the lower shell side wall corresponding to the pumping chamber is penetrated with a high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline;

[0023] The air inlet pipeline is connected to the gas outlet of the previous stage of pumping chamber, and the mixed gas discharge pipeline is connected to the gas inlet of the current stage of pumping chamber.

[0024] Optionally, a high-speed fluid inlet structure communicating with the high-speed fluid inlet pipeline is disposed outside the upper shell or the lower shell.

[0025] The present disclosure provides a vacuum pump, which includes: a stator, which includes at least one pumping chamber, and the pumping chamber has a gas inlet and a gas outlet; a rotor, which includes at least one rotor component, which is accommodated in the corresponding pumping chamber and rotates and drives the gas to be pumped from the gas inlet to the gas outlet; at least one energy-saving structure is arranged in at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline that are connected, and the air intake pipeline is connected to the gas outlet of the pumping chamber; when a high-speed fluid is introduced into the high-speed fluid inlet pipeline, a negative pressure is formed at the connection of the three pipelines, and the gas in the pumping chamber can be discharged to the mixed gas exhaust pipeline through the air intake pipeline. At the same time, the high-speed fluid introduced in the energy-saving structure of the present application also has the function of purging the pipeline, thereby diluting the process gas, reducing the deposition of process material particles and dust, etc. The vacuum pump disclosed herein is integrated with an energy-saving structure, which can reduce the energy consumption of the vacuum pump and thus reduce the temperature of the vacuum pump. At the same time, high-speed fluid can purge the pipeline and the pump body, dilute the process gas, and prevent the deposition of process material particles in the pipeline and the pump body, thereby extending the service life of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of a first energy-saving structure integrated in a Roots pump or a screw pump according to Embodiment 1 of the present disclosure;

[0027] Figure 2 It is a schematic diagram of a second energy-saving structure integrated in a stator component according to Embodiment 2 of the present disclosure;

[0028] Figure 3 It is a schematic diagram of a second energy-saving structure integrated in a stator component according to Embodiment 2 of the present disclosure;

[0029] Figure 4 It is a cross-sectional view of the second energy-saving structure integrated in the lower shell of Example 3 of the present disclosure. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solution of the present disclosure, the present disclosure is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0031] In some descriptions of the present disclosure, the terms "include" or "comprises" and the like neither limit the mentioned shapes, numbers, steps, actions, operations, components, originals and / or their groups, nor exclude the presence or addition of one or more other different shapes, numbers, steps, actions, operations, components, originals and / or their groups.

[0032] In some descriptions of the present disclosure, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number and order of the indicated technical features.

[0033] In some descriptions of the present disclosure, terms such as "installed", "connected", "connected" or "fixed" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect through an intermediate medium, and may be internal connections between two elements or mutual interactions between two elements.

[0034] In some descriptions of the present disclosure, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or position relationships based on the orientations or position relationships shown in the accompanying drawings and are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0035] The present disclosure proposes a vacuum pump, comprising: a stator, a rotor and at least one energy-saving structure, wherein the stator and the rotor form a pump body, the stator comprises at least one pumping chamber, the pumping chamber has a gas inlet and a gas outlet, the rotor comprises at least one rotor component, the rotor component is accommodated in the corresponding pumping chamber and rotates and drives the gas to be pumped from the gas inlet of the vacuum pump to the gas outlet. At least one energy-saving structure is arranged corresponding to at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline that are connected, and the air intake pipeline is connected to the gas outlet of the pumping chamber. When a high-speed fluid is introduced into the high-speed fluid inlet pipeline, a negative pressure is formed at the connection between the high-speed fluid inlet pipeline, the air intake pipeline, and the mixed gas exhaust pipeline. Based on the negative pressure, the gas in the pumping chamber can be discharged to the mixed gas exhaust pipeline through the air intake pipeline.

[0036] In this embodiment, by integrating an energy-saving structure into the vacuum pump, the exhaust pressure of the vacuum pump can be reduced, thereby effectively reducing the power consumption of the vacuum pump, reducing the load of the vacuum pump, and achieving the effect of energy saving and consumption reduction.

[0037] It should be noted that the outlet cross-sectional area of ​​the high-speed fluid entering the pipeline needs to be smaller than its inlet cross-sectional area. According to the incompressible gas continuity equation A1V1=A2V2, when the cross-section of the pipeline increases, the fluid flow rate in the pipeline decreases; when the cross-section of the pipeline decreases, the fluid flow rate in the pipeline increases. According to Bernoulli's principle, the flow rate increases and the pressure decreases. When the flow rate increases to a certain value, the pressure will be less than one atmosphere, that is, negative pressure is generated. Therefore, when a high-speed fluid is introduced into the high-speed fluid inlet pipeline, the cross-sectional area of ​​the high-speed fluid entering the pipeline decreases, and the pressure drops sharply, prompting a vacuum to be generated at the air inlet of the air inlet pipeline, thereby reducing the exhaust pressure of the pumping chamber.

[0038] It should be further explained that the present embodiment does not specifically limit the location of the energy-saving device, which can be determined according to the stator structure. When the stator structure includes a first-stage pumping chamber, the energy-saving device is arranged at the outlet end of the pumping chamber. When the stator structure includes multiple-stage pumping chambers, the energy-saving structure can be arranged in one or more of the pumping chambers.

[0039] In some preferred embodiments, when the vacuum pump is a single-stage Roots pump or a screw pump, its stator includes a first-stage pumping chamber, and the rotor includes a first-stage rotor component. An energy-saving structure is arranged at the outlet end of the pumping chamber. In this case, the gas outlet of the pumping chamber is equivalent to the exhaust port of the vacuum pump, and the gas inlet of the pumping chamber is equivalent to the air inlet of the vacuum pump. The energy-saving structure is equivalent to being integrated in the outlet end of the vacuum pump body, the air intake pipeline is connected to the gas outlet of the pumping chamber, and the mixed gas exhaust pipeline is connected to the outside to discharge the gas of the pump body to the outside, so as to reduce the tail exhaust pressure of the vacuum pump.

[0040] As a further preferred solution, when the energy-saving structure is integrated at the outlet end of the vacuum pump body, the energy-saving structure should include an energy-saving shell, in which the high-speed fluid inlet pipeline, the air intake pipeline, and the mixed gas exhaust pipeline are accommodated, and the inlet of the high-speed fluid inlet pipeline and the outlet of the mixed gas exhaust pipeline are exposed to the outside of the energy-saving shell, and in order to prevent the exhaust gas from flowing back, a one-way valve can be arranged between the inlet of the air intake pipeline and the outlet of the mixed gas exhaust pipeline.

[0041] In other preferred embodiments, when the vacuum pump is a multi-stage Roots pump or a claw pump, the stator includes a multi-stage pumping chamber, the rotor includes a multi-stage rotor component, and the number of energy-saving structures is multiple, each energy-saving structure corresponds to a pumping chamber, that is, the energy-saving structure can be set in one or more stages of the pumping chambers. Among them, the air inlet pipeline of the energy-saving structure is connected to the gas outlet of the previous stage of the pumping chamber, and the mixed gas exhaust pipeline is connected to the gas inlet of the next stage of the pumping chamber to reduce the exhaust pressure of each stage, thereby effectively reducing the power consumption of the vacuum pump, and achieving energy saving and consumption reduction.

[0042] It should be understood that the energy-saving structure should be set from the second-stage pumping chamber, the air intake pipeline of the energy-saving structure is connected to the gas outlet of the first-stage pumping chamber, and the mixed gas exhaust pipeline is connected to the gas inlet of the second-stage pumping chamber. When the energy-saving structure is set in other stages of pumping chambers, the connection method of its air intake pipeline and mixed gas exhaust pipeline is the same as given above. Of course, when the energy-saving structure is set in the last stage of pumping chamber, its air intake pipeline is connected to the gas outlet of the previous stage of pumping chamber, and the mixed gas exhaust pipeline should be directly connected to the outside.

[0043] It should be noted that the present embodiment does not specifically limit the location of the energy-saving structure in the pumping chamber, and can be arranged according to the specific structure of the stator, which can be a split stator structure or an integral stator structure of upper and lower shells. For example, when the stator is a split stator structure formed by multiple stages of stator components, the energy-saving structure can be arranged on the side wall of each stage of the stator components, and when the stator is an integral stator structure formed by upper and lower shells, the energy-saving structure can be arranged on the side wall of the upper shell or the lower shell.

[0044] Exemplarily, the stator includes a plurality of stator components, each of which is provided with a pumping chamber and an air inlet channel and an air outlet channel connected to the pumping chamber, wherein the air inlet channel forms the gas inlet of the pumping chamber, and the air outlet channel forms the gas outlet of the pumping chamber. When one or more stages of the pumping chambers are provided with energy-saving structures, the energy-saving structures are located on the side walls of the stator components. For example, the side walls of the stator components are provided with interconnected high-speed fluid inlet pipelines, at least one air inlet pipeline, and at least one mixed gas exhaust pipeline; wherein the air inlet pipeline is connected to the air outlet channel of the previous stage of the pumping chamber, and the mixed gas exhaust pipeline is connected to the air inlet channel of the pumping chamber of this stage. In this way, when a high-speed fluid is introduced into the high-speed fluid inlet pipeline, a negative pressure is formed at the connection of the three pipelines, which prompts the gas in the previous stage of the pumping chamber to be discharged to the pumping chamber of this stage through the air inlet pipeline to the mixed gas exhaust pipeline, thereby reducing the exhaust pressure of the previous stage of the pumping chamber.

[0045] Exemplarily, the stator is formed by an upper shell and a lower shell, which enclose a plurality of pumping chambers, and an air inlet channel and an air outlet channel connected to the pumping chambers, wherein the air inlet channel forms a gas inlet of the pumping chamber, and the air outlet channel forms a gas outlet of the pumping chamber. When one or more pumping chambers are provided with energy-saving structures corresponding thereto, the energy-saving structures are located on the side walls of the upper shell or the lower shell. For example, a high-speed fluid inlet pipeline, at least one air intake pipeline, and at least one mixed gas exhaust pipeline are penetrated through the side walls of the upper shell or the lower shell corresponding to the connection area between the previous pumping chamber and the pumping chamber of this stage; the air intake pipeline is connected to the air outlet channel of the previous pumping chamber, and the mixed gas exhaust pipeline is connected to the air intake channel of the pumping chamber of this stage. When high-speed fluid is introduced into the high-speed fluid inlet pipeline, negative pressure is formed at the connection points of the three pipelines, so that the gas in the previous pumping chamber is discharged to the mixed gas exhaust pipeline to the pumping chamber of this stage through the air intake pipeline, thereby reducing the exhaust pressure of the previous pumping chamber.

[0046] It should be noted that the energy-saving structure of this embodiment can be set in the upper shell or the lower shell, without specific limitation, and can be specifically set according to the air inlet and outlet channels distributed in the upper shell and the lower shell.

[0047] It should also be understood that since the energy-saving structure is arranged in the side wall of the stator component or the side walls of the upper and lower shells, it is necessary to provide a high-speed fluid inlet structure connected to the high-speed fluid inlet pipeline on the outside of the stator component side wall, or to provide a high-speed fluid inlet structure connected to the high-speed fluid inlet pipeline on the outside of the upper shell or the lower shell to facilitate the introduction of high-speed fluid.

[0048] It should also be noted that the present embodiment does not specifically limit the number of air intake pipelines and mixed gas exhaust pipelines, and can be specifically set according to actual needs. For example, each energy-saving structure can include an air intake pipeline and a mixed gas exhaust pipeline, and multiple air intake pipelines and multiple mixed gas exhaust pipelines can be set according to the pressure values ​​at different positions of the pumping chamber, and the pressure conditions at different levels can be matched by adjusting the working gas pressure and flow rate to reduce the pressure at different levels. In other words, one end of the multiple air intake pipelines is simultaneously connected to the gas outlet of the previous stage pumping chamber, and the other end is simultaneously connected to the high-speed fluid inlet pipeline and the mixed gas exhaust pipeline, and one end of the multiple mixed gas exhaust pipelines is simultaneously connected to the gas inlet of the next stage pumping chamber, and the other end is simultaneously connected to the high-speed fluid inlet pipeline and the air intake pipeline.

[0049] The present invention integrates an energy-saving structure at the outlet end of a vacuum pump or at each stage of pumping chambers, and reduces the exhaust pressure of the pumping chamber by adjusting the parameters of a high-speed fluid, thereby improving the terminal pressure of the vacuum pump, reducing the load of the vacuum pump, and lowering the temperature of the vacuum pump, thereby achieving power saving and consumption reduction, and extending the service life of the vacuum pump. The vacuum pump has the advantages of simple structure, low cost, and significant energy-saving effect.

[0050] Furthermore, since the working gas of the vacuum pump may be highly corrosive or there may be dust particles in the working gas, during the extraction and compression of the gas, the accumulation of corrosive gases or dust particles may cause corrosion or wear to the stator and rotor of the pump body, thereby causing the vacuum pump to become stuck. However, in the energy-saving structure of the present invention, high-speed fluid is introduced, and the high-speed fluid plays the role of purging the pipeline, which can dilute the working gas and thus reduce the corrosive effect of the working gas on the pump body. At the same time, the high-speed fluid can also purge the process materials and dust particles in the pipeline or pump body, thereby avoiding the occurrence of pump sticking and increasing the service life of the vacuum pump.

[0051] The structure of the vacuum pump will be described in detail below in conjunction with specific embodiments:

[0052] Example 1

[0053] This embodiment is described by taking Roots pump and screw pump as examples. Figure 1 As shown, the Roots pump or screw pump includes a stator and a rotor, which form a pump body 110 of the vacuum pump. The stator has a primary pumping chamber, and the rotor has a primary rotor component. The rotor component is accommodated in the pumping chamber and rotates and drives the pumping gas from the gas inlet of the pump body to the gas outlet. A first energy-saving structure 120 is arranged at the gas outlet end of the pump body 110.

[0054] Please continue to refer to Figure 1 The first energy-saving structure 120 includes a first high-speed fluid inlet pipeline 121, a first air intake pipeline 122, a first mixed gas exhaust pipeline 123, and a one-way valve 124. The one-way valve 124 is arranged between the inlet of the first air intake pipeline 122 and the outlet of the first mixed gas exhaust pipeline 123. The first air intake pipeline 122 is connected to the gas outlet of the pump body 110. When the high-speed fluid is introduced into the first high-speed fluid inlet pipeline 121, a negative pressure is formed at the connection between the first high-speed fluid inlet pipeline 121, the first air intake pipeline 122, and the first mixed gas exhaust pipeline 123, so that the air intake of the first air intake pipeline forms a vacuum, and the gas discharged from the pump body is discharged to the first mixed gas exhaust pipeline 123 through the first air intake pipeline 122, thereby reducing the tail discharge pressure of the pump body and further reducing the energy consumption of the vacuum pump.

[0055] Example 2

[0056] This embodiment is described by taking the stator of a claw pump or a multi-stage Roots pump as a split stator structure as an example. Figure 2 and Figure 3 As shown, the stator includes a plurality of stator components 141, and the rotor includes a multi-stage rotor component. Each stator component 141 includes a multi-stage pumping chamber 142 for accommodating the multi-stage rotor component, and an air inlet channel and an air outlet channel connecting the pumping chamber 142. A second energy-saving structure 130 is arranged on the second stator component 141 and other later-stage stator components.

[0057] Please continue to refer to Figure 2 and Figure 3 The second energy-saving structure 130 includes a second high-speed fluid inlet pipeline 131, a second air intake pipeline 132, and a second mixed gas exhaust pipeline 133 which are penetrated through the side wall of the stator component 141 and are connected to each other. At the same time, a high-speed fluid inlet structure 134 is arranged on the outer side of the side wall of the stator component 141, and the high-speed fluid inlet structure 134 is connected to the second high-speed fluid inlet pipeline 131. Among them, the second air inlet pipeline 132 is connected to the air outlet channel of the previous stage pumping chamber, and the second mixed gas exhaust pipeline 133 is connected to the air inlet channel of the pumping chamber 142 of this stage. When high-speed fluid is introduced into the second high-speed fluid inlet pipeline 131 through the high-speed fluid inlet structure 134, a negative pressure is formed at the connection between the second high-speed fluid inlet pipeline 131, the second air inlet pipeline 132, and the second mixed gas exhaust pipeline 133, and a vacuum is formed at the air inlet of the second air inlet pipeline, which helps to reduce the exhaust pressure of the previous stage pumping chamber and prompt the gas in the previous stage pumping chamber to be discharged into the pumping chamber of this stage through the second air inlet pipeline and the second mixed gas exhaust pipeline.

[0058] It should be noted that this embodiment is described by taking only one stator component as an example to set the second energy-saving structure. When multiple stator components are included, multiple second energy-saving structures can be set. Of course, in other embodiments, other numbers of second air intake pipelines and second mixed gas exhaust pipelines can be arranged according to the actual working characteristics of each level of pumping chambers, and the pressure of each level of pumping chambers can be adjusted by delivering different ratio parameters to effectively reduce the energy consumption of the vacuum pump.

[0059] Example 3

[0060] This embodiment is described by taking the stator of a claw pump or a multi-stage Roots pump as an example of an upper and lower shell integral stator structure. Figure 4As shown, the vacuum pump includes an upper shell and a lower shell 151, which are arranged to form five pumping chambers, namely a first pumping chamber 152, a second pumping chamber 153, a third pumping chamber 154, a fourth pumping chamber 155, a fifth pumping chamber 156, and an air inlet channel and an air outlet channel connected to each pumping chamber, and a second energy-saving structure 130 is provided in the lower shell corresponding to the connection area between the first pumping chamber 152 and the second pumping chamber 153.

[0061] Please continue to refer to Figure 4 The second energy-saving structure 130 includes a second high-speed fluid inlet pipeline 131, a second air intake pipeline 132, and a second mixed gas exhaust pipeline 133 which are arranged through the side wall of the lower shell 151 and are connected. The second air intake pipeline 132 is connected to the air outlet channel of the first pumping chamber 152, and the second mixed gas exhaust pipeline 133 is connected to the air intake channel of the second pumping chamber 153. When a high-speed fluid is introduced into the second high-speed fluid inlet pipeline 131, a negative pressure is formed at the connection between the second high-speed fluid inlet pipeline 131, the second air intake pipeline 132, and the second mixed gas exhaust pipeline 133. At this time, a vacuum is formed at the air inlet of the second air intake pipeline 132, which reduces the exhaust pressure of the previous stage pumping chamber, and causes the gas in the previous stage pumping chamber to be discharged to the pumping chamber of this stage through the second air intake pipeline and the second mixed gas exhaust pipeline.

[0062] It should be noted that, in this embodiment, a second energy-saving structure is set between the first pumping chamber and the second pumping chamber of the lower shell as an example. The second energy-saving structure can also be set in the connection area between the second pumping chamber and the third pumping chamber, the third pumping chamber and the fourth pumping chamber, and the fourth pumping chamber and the fifth pumping chamber of the lower shell. Of course, in other embodiments, other numbers of second air intake pipelines and second mixed gas exhaust pipelines can be arranged according to the actual working characteristics of each level of pumping chambers, and the pressure of each level of pumping chambers can be adjusted by conveying different ratio parameters to effectively reduce the energy consumption of the vacuum pump. In addition, in other preferred embodiments, a second energy-saving structure can also be set in the upper shell, which will not be listed one by one here.

[0063] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and substance of the present disclosure, and these modifications and improvements are also considered to be within the scope of protection of the present disclosure.

Claims

1. A vacuum pump, characterized in that: The vacuum pump comprises: A stator, the stator comprising at least one pumping chamber, the pumping chamber having a gas inlet and a gas outlet; a rotor, the rotor comprising at least one rotor component, the rotor component being accommodated in the corresponding pumping chamber and rotating to drive the gas to be pumped from the gas inlet to the gas outlet; At least one energy-saving structure is arranged in at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipeline, an air inlet pipeline, and a mixed gas outlet pipeline that are connected, and the air inlet pipeline is connected to the gas outlet of the pumping chamber; When high-speed fluid is introduced into the high-speed fluid inlet pipeline, negative pressure is formed at the connection of the three pipelines, so that the gas in the pumping chamber can be discharged to the mixed gas discharge pipeline through the air inlet pipeline.

2. The vacuum pump according to claim 1, characterized in that The outlet cross-sectional area of ​​the high-speed fluid entering the pipeline is smaller than the inlet cross-sectional area.

3. The vacuum pump according to claim 1, characterized in that When the stator includes a primary pumping chamber and the rotor includes a primary rotor component, the number of the energy-saving structure is one, and the energy-saving structure is arranged at the outlet end of the pumping chamber.

4. The vacuum pump according to claim 3, characterized in that A one-way valve is arranged between the inlet of the air intake pipeline and the outlet of the mixed gas exhaust pipeline.

5. The vacuum pump according to claim 1, characterized in that When the stator includes a multi-stage pumping chamber and the rotor includes a multi-stage rotor component, the number of the energy-saving structures is multiple, and each energy-saving structure corresponds to one pumping chamber; wherein, The air inlet pipeline is connected to the gas outlet of the previous stage pumping chamber, and the mixed gas discharge pipeline is connected to the gas inlet of the next stage pumping chamber.

6. The vacuum pump according to claim 5, characterized in that The energy-saving structure includes a plurality of air intake pipelines and / or a plurality of mixed gas exhaust pipelines; wherein, A plurality of gas inlet pipes are connected to the gas outlet of the previous stage pumping chamber; The plurality of mixed gas exhaust pipelines are connected to the gas inlet of the next-stage pumping chamber.

7. The vacuum pump according to claim 5, characterized in that The stator comprises a plurality of stator components, each of which has a pumping chamber disposed therein; The side wall of each stator component is penetrated by a connected high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline; The air inlet pipeline is connected to the gas outlet of the pumping chamber of the previous stage, and the mixed gas exhaust pipeline is connected to the gas inlet of the pumping chamber of the next stage.

8. The vacuum pump according to claim 7, characterized in that A high-speed fluid inlet structure communicating with the high-speed fluid inlet pipeline is arranged outside the side wall of the stator component.

9. The vacuum pump according to claim 5, characterized in that The stator is formed by an upper shell and a lower shell, and the upper shell and the lower shell are arranged to form a plurality of pumping chambers; The upper shell or the lower shell side wall corresponding to the pumping chamber is penetrated with a high-speed fluid inlet pipeline, an air intake pipeline, and a mixed gas exhaust pipeline; The air inlet pipeline is connected to the gas outlet of the pumping chamber of the previous stage, and the mixed gas exhaust pipeline is connected to the gas inlet of the pumping chamber of the next stage.

10. The vacuum pump according to claim 9, characterized in that A high-speed fluid inlet structure communicating with the high-speed fluid inlet pipeline is disposed outside the upper shell or the lower shell.

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