The invention discloses a multi-stage differential cavity structure, a vacuumizing
system and a vacuumizing method, and relates to the technical field of accelerators, the multi-stage differential cavity structure comprises a main
pipe, the main
pipe is communicated with at least three vacuumizing pipes, each vacuumizing
pipe is provided with a connecting section, and the
tail end, deviating from the main pipe, of each connecting section is connected with a
vacuum pump, so that the main pipe is vacuumized stage by stage by a plurality of vacuum pumps; the power and the size of each
vacuum pump are reduced; the connecting section is provided with a communicating section communicating with the main pipe, the inner
diameter of the communicating section and the inner
diameter of the connecting section are larger than the inner
diameter of the main pipe, and the vacuumizing efficiency can be improved; a first reinforcing component is arranged between every two adjacent evacuation pipes, and a second reinforcing component is arranged between each evacuation pipe and the main pipe, so that good structural strength between the evacuation pipes and the main pipe is guaranteed, clamping during
cutting is facilitated, and manufacturability is improved. The invention further comprises a vacuumizing
system and a vacuumizing method, so that the vacuumizing
system can accurately control the air pressure, and the
energy consumption can be reduced so as to reduce the cost.