Multi-stage differential cavity structure, vacuumizing system and vacuumizing method

Abstract

The invention discloses a multi-stage differential cavity structure, a vacuumizing system and a vacuumizing method, and relates to the technical field of accelerators, the multi-stage differential cavity structure comprises a main pipe, the main pipe is communicated with at least three vacuumizing pipes, each vacuumizing pipe is provided with a connecting section, and the tail end, deviating from the main pipe, of each connecting section is connected with a vacuum pump, so that the main pipe is vacuumized stage by stage by a plurality of vacuum pumps; the power and the size of each vacuum pump are reduced; the connecting section is provided with a communicating section communicating with the main pipe, the inner diameter of the communicating section and the inner diameter of the connecting section are larger than the inner diameter of the main pipe, and the vacuumizing efficiency can be improved; a first reinforcing component is arranged between every two adjacent evacuation pipes, and a second reinforcing component is arranged between each evacuation pipe and the main pipe, so that good structural strength between the evacuation pipes and the main pipe is guaranteed, clamping during cutting is facilitated, and manufacturability is improved. The invention further comprises a vacuumizing system and a vacuumizing method, so that the vacuumizing system can accurately control the air pressure, and the energy consumption can be reduced so as to reduce the cost.

Description

Technical Field

[0001] This invention relates to the field of accelerator technology, and in particular to a multi-stage differential cavity structure, a vacuum pumping system, and a vacuum pumping method. Background Technology

[0002] Vacuum differential technology is widely used in the accelerator field, especially in synchrotron radiation and free-electron laser facilities. Vacuum differential technology is primarily based on the principle of pressure difference, typically using vacuum pumps to create differences in vacuum levels between multiple chambers, thereby achieving staged vacuum evacuation. With the continuous development of accelerator technology, the magnitude of vacuum differential is constantly increasing, placing new demands on the performance of differential systems. Traditional vacuum differential systems generally use mechanical pumps, molecular pumps, and ion pumps to differentially evacuate to ultra-high vacuum in stages. Due to the extremely high charging pressure of the upstream equipment, the pumping speed of the first-stage mechanical pump is required to meet the differential operation of the subsequent molecular pumps. This results in the first-stage mechanical pump requiring exceptionally high power, and the differential piping of the system needs to be sufficiently long to meet the requirements of vacuum differential, leading to excessively high costs and space requirements for the entire differential system. Summary of the Invention

[0003] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a multi-stage differential cavity structure, a vacuum pumping system, and a vacuum pumping method, which can effectively reduce manufacturing costs and improve the spatial compactness of the differential system.

[0004] A multi-stage differential cavity structure according to a first aspect embodiment of the present invention includes: The main pipe is connected to at least three evacuation pipes, which are spaced apart along the central axis of the main pipe. The evacuation tube has a connecting section extending away from the central axis of the main tube. A vacuum pump is connected to the end of the connecting section away from the main tube. The connecting section has a connecting section that communicates with the main tube. The extension direction of the connecting section is parallel to the central axis of the main tube. The inner diameter of the connecting section and the connecting section is larger than the inner diameter of the main tube. There is a first reinforcing member between two adjacent evacuation tubes and a second reinforcing member between the evacuation tube and the main tube.

[0005] According to an embodiment of the present invention, a multi-stage differential cavity structure has at least the following advantages: This embodiment includes a main tube, which is connected to at least three evacuation tubes. The evacuation tubes are spaced apart along the central axis of the main tube. Each evacuation tube has a connecting section extending away from the central axis of the main tube. A vacuum pump is connected to the end of the connecting section away from the main tube, thereby enabling multiple vacuum pumps to evacuate the main tube stage by stage. This reduces the power and size of each vacuum pump, thus lowering costs. The connecting section has a connecting segment that communicates with the main tube. The extending direction of the connecting segment is parallel to the central axis of the main tube. The inner diameter of the connecting segment and the connecting segment is larger than the inner diameter of the main tube, which helps to quickly remove air from the connecting segment and the connecting segment, improving the vacuuming efficiency. A first reinforcing member is provided between two adjacent evacuation tubes, and a second reinforcing member is provided between the evacuation tube and the main tube. This helps to ensure good structural strength between the evacuation tube and the main tube, and the reinforcing members facilitate clamping during machining, improving manufacturability. Simultaneously, the integrated differential cavity structure helps to shorten the distance of the vacuuming pipeline, saving space.

[0006] According to an embodiment of the first aspect of the present invention, a connecting segment is provided between the connecting segment and the communicating segment, and the connecting segment has an arc-shaped inner wall surface.

[0007] According to an embodiment of the first aspect of the present invention, the connecting section and the airflow direction within the main pipe have an angle of less than 90°.

[0008] According to an embodiment of the first aspect of the present invention, the main pipe has an embedded end embedded in the connecting section, and the embedded end is located at the upstream end of the main pipe along the airflow direction within the main pipe.

[0009] According to an embodiment of the first aspect of the present invention, the length of the embedded end is not greater than half the inner diameter of the main tube.

[0010] According to an embodiment of the first aspect of the present invention, the inner diameter of the connecting segment is between 3 and 5 times the inner diameter of the main pipe, and the inner diameters of the connecting segment, the connecting section, and the connecting joint are equal.

[0011] According to an embodiment of the first aspect of the present invention, the main pipe, the evacuation pipe, the first reinforcing member and the second reinforcing member are integrally formed by 3D printing.

[0012] According to an embodiment of the first aspect of the present invention, the second reinforcing member includes a second horizontal rib and a second vertical rib, the second horizontal rib connecting two adjacent connecting segments, and the two ends of the second vertical rib connecting two adjacent connecting segments and one side of the vertical rib connecting to the outer side wall of the main tube.

[0013] According to a second aspect of the present invention, a vacuum pumping system is provided, comprising the aforementioned multi-stage differential cavity structure, the multi-stage differential cavity structure having a main pipe, including: Gas cylinder; The inflation chamber is connected to the gas tank at one end and to the main pipe at the other end. The inflation chamber is equipped with a pressure sensor for detecting air pressure. The air extraction assembly includes at least one mechanical pump and at least one molecular pump, the mechanical pump being connected to an inflation chamber and the molecular pump being connected to one end of the mechanical pump opposite to the inflation chamber. The control unit is electrically connected to the pressure sensor and the vacuum assembly. The air extraction assembly can extract the gas located in the inflation chamber, and it can also inject the gas from the gas tank into the inflation chamber and inject the gas from the inflation chamber into the main pipe.

[0014] The vacuum system according to a second aspect embodiment of the present invention has at least the following beneficial effects: In this embodiment, the vacuum system includes a gas tank, an inflation chamber, a pumping assembly, and a control assembly. The inflation chamber is equipped with a pressure sensor for detecting gas pressure. The pumping assembly includes at least one mechanical pump and at least one molecular pump. The mechanical pump is connected to the inflation chamber, and the molecular pump is connected to the end of the mechanical pump opposite to the inflation chamber. The control assembly is electrically connected to the pressure sensor and the pumping assembly. The pumping assembly can extract gas from the inflation chamber. The gas tank can inject gas into the inflation chamber, and the inflation chamber can inject gas into the main pipe. The pumping assembly can extract gas and impurities from the inflation chamber, thereby allowing the gas tank to inject gas into the inflation chamber and then inject the gas into the main pipe through the inflation chamber, thereby improving the purity of the gas in the vacuum system and enabling the vacuum system to accurately control the gas pressure in the main pipe.

[0015] According to an embodiment of a third aspect of the present invention, a vacuum pumping method is provided, applied to the aforementioned vacuum pumping system, the vacuum pumping system including a multi-stage differential cavity structure, comprising the following steps: Step 1: Activate the air extraction component. The air extraction component removes the air from the inflation chamber, reducing the air pressure inside the inflation chamber to 10. -4 Below Pa; Step 2: Turn off the air extraction component and inject gas into the inflation chamber from the gas tank; Step 3: Based on the air pressure value of the inflation chamber detected by the pressure sensor, control the number of vacuum pumps to be turned on through the control component. Specifically, when the pressure of the inflation chamber is 10 to 100 Pa, at least one vacuum pump is turned on; when the pressure of the inflation chamber is 100 to 500 Pa, at least two vacuum pumps are turned on; and when the pressure of the inflation chamber is above 500 Pa, at least three vacuum pumps are turned on.

[0016] The vacuuming method according to a third aspect of the present invention has at least the following beneficial effects: The method first activates the air extraction component to remove air from the inflation chamber, reducing the pressure inside the chamber to 10. -4The pressure is below 10 Pa, then the pumping assembly is shut off. Gas is injected into the filling chamber from the gas tank. Finally, the pressure value of the filling chamber detected by the pressure sensor is used to control the number of vacuum pumps activated by the control assembly. Specifically, when the pressure of the filling chamber is 10 to 100 Pa, at least one vacuum pump is activated; when the pressure of the filling chamber is 100 to 500 Pa, at least two vacuum pumps are activated; and when the pressure of the filling chamber is above 500 Pa, at least three vacuum pumps are activated. During the pre-vacuuming, gas and impurities in the filling chamber can be extracted. Gas is injected into the filling chamber from the gas tank, and the pressure of the filling chamber is detected by the pressure sensor, which can improve the accuracy of the gas pressure in the vacuuming system. Furthermore, controlling the number of vacuum pumps activated by the gas pressure value helps to improve the flexibility of the vacuuming system and helps to reduce energy consumption, thereby further reducing costs.

[0017] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is an isometric view of a multi-stage differential cavity structure according to an embodiment of the first aspect of the present invention; Figure 2 This is a cross-sectional view of a multi-stage differential cavity structure according to an embodiment of the first aspect of the present invention; Figure 3 for Figure 2 A magnified view of A in the middle; Figure 4 This is a schematic diagram illustrating the use of a first flange in an embodiment of the first aspect of the present invention; Figure 5 This is a schematic diagram illustrating the use of a second flange in an embodiment of the first aspect of the present invention; Figure 6 This is a schematic diagram of the vacuum system in an embodiment of the second aspect of the present invention.

[0019] Figure label: Main pipe 100; First reinforcing component 101; First horizontal rib 1011; First vertical rib 1012; Second reinforcing component 102; Second horizontal rib 1021; Second vertical rib 1022; Included angle 103; Embedded end 104; First flange 105; Second flange 106; Primary pump 107; Secondary pump 108; Tertiary pump 109; Evacuation pipe 110; connecting section 111; connecting section 112; connecting section 113; installation section 114; transition section 115; conical section 116; Vacuum system 120; gas tank 121; pressure reducer 122; inflation chamber 123; pressure sensor 124; mechanical pump 125; molecular pump 126; shut-off valve 127; flow meter 128; Detailed Implementation Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0021] In the description of this invention, "several" means one or more, "more than" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0022] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0023] Vacuum differential technology is widely used in the accelerator field, especially in synchrotron radiation and free-electron laser facilities. Vacuum differential technology is primarily based on the principle of pressure difference, typically using vacuum pumps to create differences in vacuum levels between multiple chambers, thereby achieving staged vacuum evacuation. With the continuous development of accelerator technology, the magnitude of vacuum differential is constantly increasing, placing new demands on the performance of differential systems. Traditional vacuum differential systems generally use mechanical pumps, molecular pumps, and ion pumps to differentially evacuate to ultra-high vacuum in stages. Due to the extremely high charging pressure of the upstream equipment, the pumping speed of the first-stage mechanical pump is required to meet the differential operation of the subsequent molecular pumps. This results in the first-stage mechanical pump requiring exceptionally high power, and the differential piping of the system needs to be sufficiently long to meet the requirements of vacuum differential, leading to excessively high costs and space requirements for the entire differential system.

[0024] To solve the above problems, refer to Figure 1In an embodiment of the first aspect of the present invention, a multi-stage differential cavity structure is provided, including a main pipe 100, which is connected to at least three evacuation pipes 110. The evacuation pipes 110 are spaced apart along the central axis of the main pipe 100. Each evacuation pipe 110 has a connecting section 111 extending away from the central axis of the main pipe 100. A vacuum pump is connected to the end of the connecting section 111 opposite to the main pipe 100, thereby enabling multiple vacuum pumps to evacuate the main pipe 100 in stages, which reduces the power and size of each vacuum pump and helps to reduce costs. It is understood that the coplanar arrangement of multiple evacuation pipes 110 helps to reduce the space occupied, thereby improving the compactness of the structure. In other embodiments, the multiple evacuation pipes 110 are arranged circumferentially around the main pipe 100.

[0025] Furthermore, mechanical pumps 125 are selected as the vacuum pumps. This means that multiple mechanical pumps 125 are connected to the main pipe 100, enabling staged vacuuming from the evacuation pipe 110 to the main pipe 100. Using multiple lower-power mechanical pumps 125 avoids the need for a high-power backing mechanical pump 125, effectively reducing equipment costs. On the other hand, the multiple mechanical pumps 125 can be selectively or all of them activated to adapt to different vacuuming conditions, improving operational flexibility. Simultaneously, the integrated differential chamber structure helps shorten the distance of the vacuuming pipeline, saving space.

[0026] It is understood that the connecting section 111 is provided with a connecting section 112 communicating with the main pipe 100. The extending direction of the connecting section 112 is parallel to the central axis of the main pipe 100. The inner diameter of the connecting section 112 and the connecting section 111 is larger than the inner diameter of the main pipe 100, which helps air to be quickly drawn away from the connecting section 112 and the connecting section 111, thereby improving the vacuuming efficiency. Furthermore, the central axis of the connecting section 111 is set to coincide with the central axis of the main pipe 100, which facilitates the integral molding of the main pipe 100 and the connecting section 112. In some other embodiments, the central axis of the connecting section 111 is set not to coincide with the central axis of the main pipe 100, which can also achieve the effect of improving the vacuuming efficiency.

[0027] Furthermore, a connecting section 113 is provided between the connecting section 111 and the connecting section 112. The connecting section 113 has an arc-shaped inner wall surface. It can be understood that, since the extension direction of the connecting section 112 has a certain angle with the central axis of the main pipe 100, the connecting section 113 with an arc-shaped inner wall surface helps to allow the airflow to flow more smoothly from the connecting section 112 to the connecting section 111 during vacuuming, thereby reducing airflow resistance and improving pumping efficiency. Furthermore, the inner diameters of the connecting section 111, the connecting section 112, and the connecting section 113 are equal, which helps to reduce pumping resistance and thus improve pumping efficiency, and simplifies the structure and facilitates pipe forming. Furthermore, a tapered section 116 is provided between the main pipe 100 and the connecting section 112. The end of the tapered section 116 with a smaller diameter connects to the end of the main pipe 100, and the other end of the tapered section 116 connects to the connecting section 112. This helps to connect the main pipe 100 and the connecting section 112, reducing airflow resistance and facilitating pipe forming. Furthermore, along the central axis of the main pipe 100, the length of the tapered segment 116 is greater than 1 times and not more than 2 times the inner diameter of the main pipe 100, in order to avoid excessive overall size and save space.

[0028] Reference Figure 3 It is understood that the main pipe 100 has an embedded end 104 embedded in the connecting section 113, and the embedded end 104 is located at the upstream end of the main pipe 100 along the airflow direction within the main pipe 100. Specifically, since the inner diameter of the connecting section 112 is larger than the inner diameter of the main pipe 100, and the central axis of the connecting section 112 coincides with the central axis of the main pipe 100, when multiple connecting sections 112 are provided on the main pipe 100, the connecting sections 112 divide the main pipe 100 into multiple independent segments. Therefore, the embedded end 104 is located at the upstream end of each segment. It is understood that the embedded end 104 is located on the side of the arc-shaped inner wall within the connecting section 112, and on the downstream side within the connecting section 112. During vacuuming, the gas flows through the arc-shaped inner wall of the connecting section 112 to the connecting section 111. When the gas passes through the embedded end 104, a portion of the gas can enter the next section of the main pipe 100 under the guidance of the embedded end 104, thereby achieving efficient gas flow within the main pipe 100. Furthermore, the length of the embedded end 104 is no greater than half the inner diameter of the main pipe 100, in order to ensure that the gas flow can reach the next section while reducing the resistance of the gas flowing from the connecting section 112 to the connecting section 111, thereby improving the pumping efficiency.

[0029] Reference Figure 2It is understandable that the connecting section 111 and the airflow direction within the main pipe 100 form an angle 103, which is less than 90°. This means the connecting section 111 and the main pipe 100 are inclined. Compared to a connecting section 111 perpendicular to the main pipe 100, this effectively reduces airflow resistance during extraction, thus ensuring good extraction efficiency. It is also understandable that adjacent connecting sections 111 are parallel to each other, which helps reduce structural complexity and facilitates manufacturing.

[0030] It is understandable that a mounting section 114 is provided at the end of the connecting section 111 away from the main pipe 100. The mounting section 114 is used for mounting and connecting with the vacuum pump. Since there is an angle 103 between the connecting section 111 and the airflow direction in the main pipe 100, and an inclined angle between the mounting section 114 and the connecting section 111, the extension direction of the mounting section 114 is perpendicular to the central axis of the main pipe 100. This facilitates clamping and reduces machining difficulty during machining such as cutting, thereby ensuring good product accuracy.

[0031] It is understandable that joints are provided at both ends of the main pipe 100 and at the end of the installation section 114. The joints include the first flange 105, as shown in the reference. Figure 4 The first flange 105 is a CF knife-edge flange. The CF knife-edge flange uses a metal gasket (usually an oxygen-free copper gasket) for sealing, which can adapt to high vacuum environments and withstand a wide temperature range; in other embodiments, refer to... Figure 5 The connector also includes a second flange 106, which is a KF quick-release flange. Unlike the CF knife-edge flange, it uses snap rings and O-rings for sealing, allowing for quick installation and disassembly without bolts and nuts, making operation more convenient. Furthermore, when the connector uses the first flange 105, the first flange 105 is machined to determine its shape and then welded to the upstream and downstream ends of the main pipe 100 and the end of the installation section 114. When the connector uses the second flange 106, the second flange 106 is 3D printed and then fixed to the upstream and downstream ends of the main pipe 100 and the end of the installation section 114, and then machined to ensure the accuracy of the preset dimensional load. It is understandable that the size of the two flange types can be adjusted according to different upstream and downstream equipment and different vacuum pump interface types, making them suitable for vacuum differential systems with different requirements and improving operational flexibility.

[0032] It is understood that a first reinforcing member 101 is provided between two adjacent evacuation pipes 110, and a second reinforcing member 102 is provided between the evacuation pipe 110 and the main pipe 100. This helps to ensure good structural strength between the evacuation pipe 110 and the main pipe 100, and the reinforcing members facilitate clamping during machining, thus improving manufacturability. Specifically, the first reinforcing member 101 includes a first horizontal rib 1011 and a first vertical rib 1012. Both ends of the first horizontal rib 1011 and the first vertical rib 1012 are connected to the two adjacent evacuation pipes 110 but not to the main pipe 100. Furthermore, the first horizontal rib 1011 and the first vertical rib 1012 are perpendicular to each other, which helps to improve the structural strength. Furthermore, the second reinforcing component 102 includes a second horizontal rib 1021 and a second vertical rib 1022. The second horizontal rib 1021 connects two adjacent connecting segments 111, and the two ends of the second vertical rib 1022 connect to two adjacent connecting segments 111, with one side connected to the outer wall of the main pipe 100. This helps to strengthen the connection between the main pipe 100 and the multiple evacuation pipes 110. During the evacuation process, the main pipe 100 and the evacuation pipes 110 need to withstand a large negative pressure. By setting the first reinforcing component 101 and the second reinforcing component 102, the stability of operation and a good service life can be ensured. It is understood that the main pipe 100, the evacuation pipe 110, the first reinforcing component 101, and the second reinforcing component 102 are integrally formed by 3D printing, which helps to improve manufacturing efficiency and reduce manufacturing difficulty. Moreover, setting the first reinforcing component 101 and the second reinforcing component 102 facilitates clamping for cutting and finishing after 3D printing, thereby improving the convenience of processing. Furthermore, the thickness of the first horizontal rib 1011, the first vertical rib 1012, the second horizontal rib 1021, and the second vertical rib 1022 is greater than 5 mm and does not exceed 10 mm, so as to save materials while ensuring improved structural strength and avoiding excessive weight.

[0033] It is understandable that the inner diameter of the connecting section 111 is between 3 and 5 times the inner diameter of the main pipe 100, and that the inner diameters of the connecting section 111, the connecting section 112, and the connecting section 113 are equal. This is beneficial for improving the evacuation efficiency of the main pipe 100, thereby improving the vacuuming efficiency. It is also understandable that if the inner diameter of the connecting section 111 is less than 3 times the inner diameter of the main pipe 100, the flow rate of the connecting section 111 will be insufficient, reducing evacuation efficiency and thus reducing vacuuming performance. On the other hand, if the inner diameter of the connecting section 111 is more than 5 times the inner diameter of the main pipe 100, the gas flow rate of the connecting section 111 will be too large, resulting in an excessive pressure difference between each stage of the evacuation pipe 110. This will significantly increase the load on the vacuum pump, making it difficult to reduce the power consumption and efficiency of the vacuum pump, thus failing to save costs.

[0034] Furthermore, in this embodiment, the wall thicknesses of the main pipe 100, connecting section 111, connecting section 112, connecting section 113, and tapered section 116 are equal, and the inner wall thickness is greater than 2mm and less than 5mm. Since 3D printing is used and the pipe has to withstand a large negative pressure during operation, it is easy to collapse during operation when the wall thickness is less than 2mm. If the wall thickness is greater than 5mm, the manufacturing cost is too high. Therefore, when the wall thickness is greater than 2mm and less than 5mm, good structural strength can be guaranteed while effectively controlling costs.

[0035] According to an embodiment of a second aspect of the present invention, a vacuum system is provided, including the multi-stage differential cavity structure described above, comprising a gas tank 121, a gas filling chamber 123, a vacuum pumping assembly, and a control assembly. The gas tank 121 is used to store gas, including but not limited to inert gases such as nitrogen, argon, and neon; one end of the gas filling chamber 123 is connected to the gas tank 121, and the other end is connected to a main pipe 100; the gas filling chamber 123 is provided with a pressure sensor 124 for detecting gas pressure; the vacuum pumping assembly includes at least one mechanical pump 125 and at least one molecular pump 126, the mechanical pump 125 being connected to the gas filling chamber 123, and the molecular pump 126 being connected to the end of the mechanical pump 125 facing away from the gas filling chamber 123, the mechanical pump 125 serving as a pre-pump for the molecular pump 126; the control assembly is electrically connected to the pressure sensor 124 and the vacuum pumping assembly. The connection is as follows: The vacuum pump assembly can extract the gas located in the inflation chamber 123. When the gas pressure in the inflation chamber 123 reaches a preset value, the vacuum pump assembly can inject the gas in the gas tank 121 into the inflation chamber 123 and inject the gas in the inflation chamber 123 into the main pipe 100. By pre-evacuating the inflation chamber 123, impurity gas can be extracted to improve the gas purity in the vacuum system 120. The inflation chamber 123 can be inflated by the gas tank 121, thereby accurately controlling the gas pressure in the inflation chamber 123, which is beneficial for the vacuum system 120 to accurately control the gas pressure in the main pipe 100.

[0036] Specifically, refer to Figure 6 A pressure reducer 122, a flow meter 128, and a shut-off valve 127 are installed between the gas tank 121 and the filling chamber 123. The pressure reducer 122 is used to reduce and stabilize the gas pressure, ensuring stable operation of the vacuum system 120. The flow meter 128 is used to adjust the pressure in the filling chamber 123. The shut-off valve 127 is used to open and close the gas passage between the gas pipe and the filling chamber 123. Furthermore, multiple connecting sections 111 on the main pipe 100 are connected to vacuum pumps. It is understood that the vacuum pumps are mechanical pumps 125, and shut-off valves 127 are provided between the vacuum pumps and the connecting sections 111. Different shut-off valves 127 can be flexibly opened and closed under different operating conditions to improve operational flexibility.

[0037] According to an embodiment of a third aspect of the present invention, a vacuuming method is provided, applied to the aforementioned vacuuming system 120, comprising the following steps: Step 1: Activate the air extraction assembly. The shut-off valve 127 between the air extraction assembly and the inflation chamber 123 opens, and the mechanical pump 125 and the molecular pump 126 start simultaneously, extracting the air from the inflation chamber 123 and reducing the air pressure in the inflation chamber 123 to 10. -4 Below 100 Pa, since the inflation chamber 123 is connected to the main pipe 100, the pressure in the main pipe 100 is equal; Step 2: Close the shut-off valve 127 between the air extraction assembly and the inflation chamber 123, the mechanical pump 125 and the molecular pump 126 stop working, the shut-off valve 127 between the gas tank 121 and the inflation chamber 123 opens, the gas tank 121 injects gas into the inflation chamber 123, and the pressure of the inflation chamber 123 and the main pipe 100 is adjusted by the flow meter 128. Step 3: Based on the air pressure value detected by the pressure sensor 124 on the air filling chamber 123, the number of vacuum pumps activated is controlled by the control component. It is understood that at least three connection sections 111 connected to vacuum pumps are provided on the main pipe 100, wherein the vacuum pumps include a primary pump 107, a secondary pump 108, and a tertiary pump 109 distributed along the gas flow direction within the main pipe 100. Specifically, when the pressure in the air filling chamber 123 is between 10 and 100 Pa, at least one vacuum pump is activated, and the tertiary pump 109 is also activated; when the pressure in the air filling chamber 123 is between 100 and 500 Pa, at least two vacuum pumps are activated, including the secondary pump 108 and the tertiary pump 109; when the pressure in the air filling chamber 123 is above 500 Pa, at least three vacuum pumps are activated, i.e., the primary pump 107, the secondary pump 108, and the tertiary pump 109 are all started. Understandably, as the air pressure in the filling chamber 123 increases, the number of vacuum pumps can be increased to 4 or 5 stages. Furthermore, a shut-off valve 127 is provided between the vacuum pump and the connecting section 111 to control the opening and closing of the air passages in each connecting section 111. Understandably, controlling the number of vacuum pumps activated by adjusting the air pressure helps improve the operational flexibility of the vacuum system 120 and reduces energy consumption, thereby further reducing costs.

[0038] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A multi-level differential cavity structure, It is characterized in that include: A main pipe connected to at least three evacuation pipes, wherein the evacuation pipes are arranged at intervals along the central axis of the main pipe; The evacuation tube has a connecting section extending away from the central axis of the main tube, the end of the connecting section facing away from the main tube is connected to a vacuum pump, the connecting section is provided with a connecting section connected to the main tube, the extending direction of the connecting section is parallel to the central axis of the main tube, the inner diameters of the connecting section and the connecting section are greater than the inner diameter of the main tube, a first reinforcing component is provided between two adjacent evacuation tubes, and a second reinforcing component is provided between the evacuation tube and the main tube.

2. A multi-stage differential cavity structure according to claim 1, It is characterized in that A connecting section is provided between the connecting section and the communicating section, and the connecting section has an arc-shaped inner wall surface.

3. The multi-stage differential cavity structure according to claim 1, It is characterized in that An angle is formed between the connecting section and the flow direction of the airflow in the main pipe, and the angle is less than 90°.

4. A multi-stage differential cavity structure according to claim 2, It is characterized in that The main pipe has an embedded end embedded in the connecting section, and along the flow direction of the airflow in the main pipe, the embedded end is located at an end of the main pipe close to the upstream.

5. A multi-stage differential cavity structure according to claim 4, It is characterized in that The length of the embedded end is no greater than half of the inner diameter of the main pipe.

6. A multi-stage differential cavity structure according to claim 4, It is characterized in that The inner diameter of the connecting section is between 3 and 5 times the inner diameter of the main pipe, and the inner diameters of the connecting section, the communicating section and the connecting section are equal.

7. The multi-stage differential cavity structure according to claim 2, It is characterized in that The main pipe, the evacuation pipe, the first reinforcement component and the second reinforcement component are integrally formed by 3D printing.

8. The multi-stage differential cavity structure according to claim 1, It is characterized in that The second reinforcing member includes a second transverse rib and a second vertical rib, wherein the second transverse rib connects two adjacent connecting segments, and both ends of the second vertical rib connect two adjacent connecting segments and one side of the second vertical rib is connected to the outer side wall of the main pipe.

9. Vacuum system, It is characterized in that A multi-stage differential cavity structure according to any one of claims 1 to 8, wherein the multi-stage differential cavity structure comprises a main tube, wherein: Gas tank; An air filling cavity, one end of which is connected to the gas tank and the other end of which is connected to the main pipe, and the air filling cavity is provided with a pressure sensor for detecting air pressure; A vacuum assembly, comprising at least one mechanical pump and at least one molecular pump, wherein the mechanical pump is connected to the inflation cavity, and the molecular pump is connected to an end of the mechanical pump away from the inflation cavity; A control component, electrically connected to the pressure sensor and the air extraction component; The gas extraction component can extract the gas in the gas-filled cavity, and can inject the gas in the gas tank into the gas-filled cavity, and can inject the gas in the gas-filled cavity into the main pipe.

10. Vacuuming method, It is characterized in that The vacuum pumping system according to claim 9 comprises a multi-stage differential chamber structure, the multi-stage differential chamber structure comprises a main pipe and a vacuum pump, the vacuum pumping system comprises a gas tank, an air filling chamber, an air pumping assembly and a control assembly, the air filling chamber is provided with a pressure sensor, wherein the following steps are included: Step 1: Start the vacuum assembly, which extracts the air in the inflation chamber to reduce the air pressure in the inflation chamber to 10 -4 Below Pa; Step 2: closing the vacuum assembly, and injecting gas into the inflation cavity by the gas tank; Step 3: According to the air pressure value of the inflation chamber detected by the pressure sensor, the number of vacuum pumps turned on is controlled by the control component, wherein, when the pressure of the inflation chamber is 10 to 100 Pa, at least one vacuum pump is turned on; when the pressure of the inflation chamber is 100 to 500 Pa, at least two vacuum pumps are turned on; when the pressure of the inflation chamber is above 500 Pa, at least three vacuum pumps are turned on.

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