Multi-aperture spectrum confocal measurement system

Abstract

The invention discloses a multi-aperture spectrum confocal measurement system, which comprises a light source, a plurality of probe assemblies, a switching device, a dispersion lens and a spectrum analysis device, one end of each probe assembly is arranged towards the dispersion lens; the probe assembly comprises a light outlet hole for transmitting detection light and a detection tube for transmitting measurement light, the light outlet hole is communicated with the light source, and the detection tube is connected with the spectrum analysis device; the diameters of the light emitting holes of each group of probe assemblies are arranged according to a first preset rule, and each group of probe assemblies is connected with the switching device; the corresponding light sources are controlled to emit detection light according to measurement requirements, the detection light is transmitted through the light outlet holes which are connected with the light sources and have different diameters, detection light spots with different sizes are formed, the probe assembly is dynamically driven to move relative to the dispersion lens so as to switch different light outlet holes, the probe assembly can be automatically switched according to a preset rule, and the detection efficiency is improved. Therefore, the switching of measurement light spots with different diameters is realized, and the measurement efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of spectrum measurement, and in particular to a multi-aperture spectrum confocal measurement system. Background Art

[0002] The spectral focus displacement measuring device is a device that uses spectral technology to perform optical non-contact displacement measurement. It uses the different wavelengths of light reflected or emitted by an object to determine the distance between the object and the measuring device. This device usually combines the principles of spectral analysis and laser ranging, and can accurately measure the distance by analyzing the spectrum of the reflected light.

[0003] The spot size of the spectral measurement device in the prior art is fixed after the light output aperture and the dispersion lens are selected, and spots of different diameters present different measurement performances. In many measurement scenarios, it is sometimes necessary to switch between multiple requirements of spots of different diameters. The conventional switching method is to manually replace the lens or the light source of the light output diameter to achieve control of the diameter size of the detection spot. However, this manual switching method is extremely inefficient and prone to installation errors.

[0004] In view of this, it is necessary to improve the spectral measurement device in the prior art to solve the technical problem of low measurement efficiency caused by the switching process. Summary of the invention

[0005] The purpose of the present invention is to provide a multi-aperture spectral confocal measurement system to solve the above technical problems.

[0006] To achieve this object, the present invention adopts the following technical solutions: A multi-aperture spectral confocal measurement system comprises a light source, a plurality of probe assemblies, a switching device, a dispersion lens and a spectrum analysis device; one end of each of the plurality of probe assemblies is respectively arranged toward the dispersion lens; The probe assembly includes a light exit hole for transmitting detection light and a detection tube for transmitting measurement light, the light exit hole is connected to the light source, and the detection tube is connected to the spectrum analysis device; The diameters of the light exit holes of each group of the probe assemblies are arranged according to a first preset rule; each group of the probe assemblies is connected to the switching device, and the switching device is used to drive the corresponding group of probe assemblies to move relative to the dispersion lens.

[0007] Optionally, the first preset rule is to increase linearly from small to large.

[0008] Optionally, the number of the probe assemblies is three groups, and the light exit holes of the three groups of the probe assemblies are respectively a first light exit hole, a second light exit hole and a third light exit hole.

[0009] Optionally, each group of the probe assemblies is respectively connected to a group of optical fiber assemblies, and the optical fiber assemblies are connected to the light source; The diameters of the three groups of optical fiber components are 35 μm, 50 μm and 65 μm respectively.

[0010] Optionally, the spectrum analysis device includes: A receiving module, wherein the receiving module has a plurality of input interfaces for receiving the measuring light transmitted through different detection tubes; A light splitting module, used to separate the received measurement light into multi-channel optical signals according to wavelength; An optical analysis module, used for performing spectral analysis on the optical signal of each channel separated by the optical splitting module; A processing module, used for calibrating, enhancing and suppressing noise of optical signals, and processing data transmitted by the optical analysis module; The output module is used to output the processed spectral analysis results to an external system or display.

[0011] Optionally, the switching device includes: A driving mechanism, used for driving the probe assembly to move; A connecting mechanism, used to connect the driving mechanism and the probe assembly; The control module is used to adjust the motion state of the driving mechanism.

[0012] Optionally, the multi-aperture spectral confocal measurement system further includes a position feedback system unit, which is used to detect the actual position of the probe assembly in real time and feed back the position information to the control module to adjust the motion state of the driving mechanism.

[0013] Optionally, the switching device further includes a protection module, and the protection module includes: A limit switch, arranged at a preset position on the peripheral side of the dispersion lens; A temperature sensor, used to detect the temperature of the probe assembly and the drive mechanism; The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply to the light source when the input light intensity exceeds the safety threshold.

[0014] Compared with the prior art, the present invention has the following beneficial effects: after starting the system, the corresponding light source is controlled to emit detection light according to measurement needs, and the detection light is transmitted through light exit holes of different diameters connected to the light source to form detection light spots of different sizes; and the position of the selected probe assembly is adjusted through a switching device so that it is correctly aligned relative to the dispersion lens, thereby realizing adjustment for different detection positions; the light spot is projected onto the sample through the dispersion lens for detection, and the generated measurement light is transmitted to the spectrum analysis device through the detection tube, and the spectrum analysis device analyzes the received measurement light to obtain spectral information; the switching device of the measurement system can dynamically drive the movement of the probe assembly relative to the dispersion lens as needed to switch different light exit holes, and can automatically switch the probe assembly according to preset rules, thereby realizing switching of measurement light spots of different diameters and improving measurement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0017] Figure 1 Schematic diagram of the structure of the multi-aperture spectral confocal measurement system in this embodiment; Figure 2 Schematic diagram of the structure of the probe part of the multi-aperture spectral confocal measurement system in this embodiment. DETAILED DESCRIPTION

[0018] In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time.

[0020] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0021] Combination Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a multi-aperture spectral confocal measurement system, including a light source, multiple probe assemblies 103, a switching device 106, a dispersion lens 104 and a spectrum analysis device 102; one end of the multiple probe assemblies 103 is respectively set toward the dispersion lens 104.

[0022] The probe assembly 103 includes a light exit hole for transmitting detection light and a detection tube 107 for transmitting measurement light, the light exit hole is connected to the light source, and the detection tube 107 is connected to the spectral analysis device 102; and the diameters of the light exit holes of each group of probe assemblies 103 are arranged according to a first preset rule; each group of probe assemblies 103 is connected to a switching device 106, and the switching device 106 is used to drive the corresponding group of probe assemblies 103 to move relative to the dispersion lens 104.

[0023] It should be noted that each probe assembly 103 is provided with a light exit hole and a detection tube 107 to facilitate adjustment of different measurement positions and generation of detection light spots of different sizes; by using light exit holes of different diameters, the detection light can generate light spots of different sizes as needed.

[0024] The working principle of the present invention is as follows: after starting the system, the corresponding light source is controlled to emit detection light according to the measurement needs, and the detection light is transmitted through light exit holes of different diameters connected to the light source to form detection light spots of different sizes; and the position of the selected probe assembly 103 is adjusted through the switching device 106 so that it is correctly aligned relative to the dispersion lens 104, thereby realizing the adjustment of different detection positions; the light spot is projected onto the sample through the dispersion lens 104 for detection, and the generated measurement light is transmitted to the spectrum analysis device 102 through the detection tube 107, and the spectrum analysis device 102 analyzes the received measurement light to obtain spectral information; compared with the spectral measurement device in the prior art, the switching device 106 of the measurement system can dynamically drive the movement of the probe assembly 103 relative to the dispersion lens 104 as needed to switch different light exit holes, and can automatically switch the probe assembly 103 according to preset rules, thereby realizing the switching of measurement light spots of different diameters and improving the measurement efficiency.

[0025] As an optional solution of this embodiment, the first preset rule is to increase linearly from small to large; this design has the following advantages: 1. Arranging the light-emitting holes according to a linear increase rule can make the control of the system more direct and simple; the switching device 106 only needs to move according to a preset fixed step size, and the control logic is clear and easy to understand.

[0026] Second, since the size of the light-emitting hole increases linearly, the system achieves linear measurement range adjustment when switching light-emitting holes of different diameters, and can provide linear resolution.

[0027] 3. The linear increase in the diameter of the light-emitting hole can make the transition from one measurement scale to another smoother, avoiding data mutations caused by abrupt switching and improving measurement quality.

[0028] Fourth, due to the linear increase rule, the system behavior and performance are more predictable, which facilitates system optimization.

[0029] In addition, it should be noted that the linear increase design has certain limitations; in some scenarios with specific requirements, a specific ratio or nonlinear increase or decrease of the aperture is required. It is necessary to adjust the system according to the specific application scenario, taking into account the versatility and adaptability of the system.

[0030] In this embodiment, there are three groups of probe assemblies 103 , and the light exit holes of the three groups of probe assemblies 103 are respectively a first light exit hole 201 , a second light exit hole 202 , and a third light exit hole 203 .

[0031] It is further explained that each set of probe components 103 is respectively connected to a set of optical fiber components 105, and the optical fiber components 105 are connected to the light source; The diameters of the three groups of optical fiber components 105 are 35 μm, 50 μm and 65 μm respectively.

[0032] Since the diameters of the three groups of optical fiber components 105 are 35 μm, 50 μm and 65 μm respectively, three detection light spots of different sizes can be generated and switched for use in a multi-aperture spectral confocal measurement system.

[0033] Large light spot (generated by 65μm optical fiber): Corresponding to the third light exit hole 203, a large light spot can obtain stronger return light, which can provide a more effective way to collect more light signals, especially in the case of low reflectivity on the surface of the target object or poor optical properties; collecting more light signals can improve the quality of the signal, thereby improving the accuracy of spectral analysis. Under this condition, although its lateral resolution is not as good as that of a small light spot, it can ensure that reliable measurement results can be obtained even when the light signal is weak.

[0034] Medium light spot (generated by 50μm optical fiber): corresponding to the second light exit hole 202, for occasions where both lateral resolution and light signal strength need to be considered, a medium-sized light spot can be selected; this light spot size provides a balance, so that the system can maintain a high lateral resolution to a certain extent while ensuring a certain light signal strength.

[0035] Small light spot (generated by 35μm fiber): Corresponding to the first light exit hole 201, the small light spot can provide higher lateral resolution, which enables the system to perform more precise measurements and accurately identify target objects in a small area, making the information analysis clearer. In this case, although the return signal may be weak, it can often provide more precise results in bright or strongly reflective samples.

[0036] In this embodiment, the spectrum analysis device 102 includes: The receiving module has multiple input interfaces for receiving measurement lights transmitted by different detection tubes 107; the receiving module is an access port for spectral analysis, has multiple input interfaces, can be connected to multiple detection tubes 107 at the same time, and receives different measurement lights, thereby increasing the adaptability and flexibility of the system and being able to receive different detection lights as needed.

[0037] The spectrometer module is used to separate the measurement light received from the receiving module and obtain multi-channel optical signals according to different wavelengths.

[0038] The optical analysis module is used to perform spectral analysis on the optical signal of each channel separated by the spectroscopic module; the optical analysis with high precision and high sensitivity can ensure the accuracy and reliability of the results, thereby providing accurate measurement data.

[0039] The processing module 101 is used to calibrate, enhance and suppress noise of the optical signal, and process the data transmitted by the optical analysis module. At the same time, the processing module 101 is used to control the operation of the spectrometer, and the data processing process includes signal conversion, data integration, and spectrum decoding. Among them, calibration ensures the accuracy of the measurement results, and signal enhancement and noise suppression ensure the clarity and reliability of the data. In addition, the processing module 101 is also responsible for switching, controlling and optimizing the operation of the spectrometer to ensure the best working performance.

[0040] The output module is used to output the processed spectral analysis results to an external system or display. The processed spectral analysis results are output to a device that displays them to the user or is connected to other systems or devices; the setting of the output module ensures versatility and user-friendliness because it allows users or other devices to access and use the results.

[0041] In this embodiment, the switching device 106 includes: The driving mechanism is used to drive the probe assembly 103 to move; the driving mechanism is the core part of the switching device 106, and is used to promote the movement of the probe assembly 103; it needs to have sufficient force and accuracy to change the position of the probe assembly 103 to adapt to various configurations and setting requirements.

[0042] The connecting mechanism is used to connect the driving mechanism and the probe assembly 103; the connecting mechanism plays a connecting role between the driving mechanism and the probe assembly 103, ensuring that the driving force is transmitted from the driving mechanism to the probe assembly 103, and also supports and fixes the probe assembly 103, ensuring the stability and accuracy of the moving process.

[0043] The control module is used to control the motion state of the drive mechanism. It is responsible for controlling the motion state of the drive mechanism; it involves changing the speed, direction, and the time points of starting and ending the movement of the drive mechanism. The control module needs to be connected to the main control board of the system to receive and process information from other parts.

[0044] The position feedback system unit is used to detect the actual position of the probe assembly 103 in real time and feed back the position information to the control module to adjust the motion state of the driving mechanism; through the feedback information, the control module is able to know the actual position and movement state of the probe, and then can adjust the motion of the driving mechanism as needed to ensure that the desired position is accurately reached.

[0045] It is further explained that the switching device 106 further includes a protection module, and the protection module includes: The limit switch is set at a preset position on the peripheral side of the dispersion lens 104; when the probe assembly 103 moves to the limit position, the limit switch will be triggered and send a signal to the control module; this signal will inform the control module that the probe assembly 103 has reached or is about to exceed its movement limit to prevent damage caused by excessive movement of the probe assembly 103.

[0046] The temperature sensor is used to detect the temperature of the probe assembly 103 and the drive mechanism; if the detected temperature exceeds the safety threshold, the sensor will send a warning signal to play the role of over-temperature protection, because excessively high temperature may cause damage to the functions of the probe assembly 103 and the drive mechanism.

[0047] The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply of the light source when the input light intensity exceeds the safety threshold; it can prevent the spectrum analysis from receiving excessively strong light signals, thereby ensuring the safety of equipment operation and the accuracy of analysis data.

[0048] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-aperture spectral confocal measurement system, characterized in that: It includes a light source, a plurality of probe assemblies, a switching device, a dispersion lens and a spectrum analysis device; one end of each of the plurality of probe assemblies is respectively arranged toward the dispersion lens; The probe assembly includes a light exit hole for transmitting detection light and a detection tube for transmitting measurement light, the light exit hole is connected to the light source, and the detection tube is connected to the spectrum analysis device; The diameters of the light exit holes of each group of the probe assemblies are arranged according to a first preset rule; each group of the probe assemblies is connected to the switching device, and the switching device is used to drive the corresponding group of probe assemblies to move relative to the dispersion lens.

2. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that: The first preset rule is to increase linearly from small to large.

3. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that: The number of the probe assemblies is three groups, and the light exit holes of the three groups of the probe assemblies are respectively a first light exit hole, a second light exit hole and a third light exit hole.

4. The multi-aperture spectral confocal measurement system according to claim 3, characterized in that: Each group of the probe assemblies is respectively connected to a group of optical fiber assemblies, and the optical fiber assemblies are connected to the light source; The diameters of the three groups of optical fiber components are 35 μm, 50 μm and 65 μm respectively.

5. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that: The spectrum analysis device comprises: A receiving module, wherein the receiving module has a plurality of input interfaces for receiving the measuring light transmitted through different detection tubes; A light splitting module, used to separate the received measurement light into multi-channel optical signals according to wavelength; An optical analysis module, used for performing spectral analysis on the optical signal of each channel separated by the optical splitting module; A processing module, used for calibrating, enhancing and suppressing noise of optical signals, and processing data transmitted by the optical analysis module; The output module is used to output the processed spectral analysis results to an external system or display.

6. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that: The switching device comprises: A driving mechanism, used for driving the probe assembly to move; A connecting mechanism, used to connect the driving mechanism and the probe assembly; The control module is used to adjust the motion state of the driving mechanism.

7. The multi-aperture spectral confocal measurement system according to claim 6, characterized in that: It also includes a position feedback system unit, which is used to detect the actual position of the probe assembly in real time and feed back the position information to the control module to adjust the motion state of the driving mechanism.

8. The multi-aperture spectral confocal measurement system according to claim 7, characterized in that: The switching device further includes a protection module, which includes: A limit switch, arranged at a preset position on the peripheral side of the dispersion lens; A temperature sensor, used to detect the temperature of the probe assembly and the drive mechanism; The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply to the light source when the input light intensity exceeds the safety threshold.

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