Alignment method for ldi exposure machine and ldi exposure machine

Abstract

The application discloses a kind of LDI exposure machine's alignment method and LDI exposure machine, LDI exposure machine includes the motion platform for pulling substrate movement and multiple alignment cameras, multiple alignment cameras are in line along the width direction of the substrate, motion platform is located below multiple alignment cameras, alignment method includes: obtaining GDS drawing information about positioning point;According to GDS drawing information, determine the optimal acquisition path corresponding to each alignment camera;According to the optimal acquisition path corresponding to each alignment camera, control each alignment camera;Control motion platform to move back and forth between the starting point of substrate and the terminal point of substrate, until alignment camera completes the image acquisition of all positioning points;According to all image information, determine the positioning point image information of each positioning point;According to the positioning point image information of each positioning point, alignment is carried out.Using the alignment method can position point partition more on substrate Maximum degree promotes the alignment speed of LDI exposure machine, avoid the problem of camera redundancy.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of LDI exposure, in particular to a positioning method of an LDI exposure machine and the LDI exposure machine. BACKGROUND

[0002] In the related art, an existing LDI (laser direct imaging) exposure machine searches the position of each positioning point in turn through a line distance, controls the vector motion of a camera and a motion platform relative to each other, so that the camera stops shooting a positioning point image after reaching above each positioning point, and then performs positioning through the positioning point image of each positioning point. However, this method can only position the positioning points one by one in the positioning process, thereby causing the problem of slow positioning speed when the positioning points are partitioned on the substrate, thereby reducing the productivity of the exposure machine. In addition, when multiple cameras are arranged to collect positioning point images for positioning, only one camera can collect images at the same time, thereby causing the problem of camera redundancy. SUMMARY

[0003] The present application aims to at least solve one of the technical problems in the prior art. To this end, one purpose of the present application is to provide a positioning method of an LDI exposure machine, which can maximize the positioning speed of the LDI exposure machine when the positioning points are partitioned on the substrate, and avoid the problem of camera redundancy.

[0004] A second purpose of the present application is to provide an LDI exposure machine.

[0005] In order to solve the above problems, the first aspect of the present application provides a positioning method of an LDI exposure machine, the LDI exposure machine comprising a motion platform for pulling the motion of a substrate and a plurality of alignment cameras, the plurality of alignment cameras being arranged in a line along the width direction of the substrate, the motion platform being located below the plurality of alignment cameras, the positioning method comprising: acquiring GDS drawing information about positioning points; determining an optimal collection path corresponding to each alignment camera according to the GDS drawing information; controlling each alignment camera according to the optimal collection path corresponding to each alignment camera; controlling the motion platform to perform reciprocating motion between the starting point of the substrate and the terminal point of the substrate until the alignment camera completes image collection of all positioning points, wherein an image collection signal is triggered once every time the real-time movement distance of the motion platform reaches a shooting interval distance, the image collection signal being used to indicate that the plurality of alignment cameras synchronously collect image information; determining positioning point image information of each positioning point according to all image information; and performing positioning according to the positioning point image information of each positioning point.

[0006] The alignment method of the LDI exposure machine according to the embodiment of the present application drives each alignment camera to move along the corresponding optimal acquisition path, and then drives the motion platform to move back and forth between the starting point and the ending point of the substrate. The multiple alignment cameras are triggered to capture images when the motion platform moves to the shooting interval distance each time. After all the image information of the alignment points is obtained at one time, the alignment point image information of each alignment point is screened to perform alignment. Thus, compared with the prior art in which the LDI exposure machine aligns each alignment point one by one by controlling the mutual vector motion of the control machine and the motion platform, the present application can screen the alignment point image information of each alignment point after all the alignment point image information is obtained at one time, and then perform alignment by using the alignment point image information of each alignment point, instead of obtaining the image of each alignment point one by one and then performing alignment. Instead, the motion platform is controlled to move along the length direction of the substrate, and the camera is controlled to move along the width direction of the substrate, so that the alignment speed of the LDI exposure machine can be maximally improved. In addition, the multiple alignment cameras can capture images synchronously at the same time, so that the problem of camera redundancy can be avoided.

[0007] In some embodiments, determining the optimal acquisition path corresponding to each alignment camera according to the GDS drawing information comprises: performing rasterization processing on the GDS drawing information to obtain the row-column relationship result of all the alignment points and the GDS coordinate information of each alignment point; determining the alignment camera corresponding to each column of alignment points in the row-column relationship result; and performing path planning on the GDS coordinate information of the first alignment point in each column of the row-column relationship result corresponding to each alignment camera to obtain the optimal acquisition path corresponding to each alignment camera, wherein the first alignment point in each column is the alignment point close to the starting point of the substrate.

[0008] In some embodiments, determining the alignment camera corresponding to each column of alignment points in the row-column relationship result comprises: obtaining the acquisition region limit of each alignment camera; and determining the alignment camera corresponding to each column of alignment points in the row-column relationship result according to the GDS coordinate information of the first alignment point in each column of the row-column relationship result and the acquisition region limit of each alignment camera.

[0009] In some embodiments, the path planning is performed according to GDS coordinate information of each first positioning point in each column in the row-column relationship result corresponding to each alignment camera to obtain an optimal acquisition path corresponding to each alignment camera, including: obtaining a path finder corresponding to each alignment camera; determining starting position information of each path finder according to the GDS coordinate information of each first positioning point in each column; determining an acquisition path corresponding to each alignment camera according to the starting position information of each path finder and the GDS coordinate information of each first positioning point in each column, and adding the acquisition path to a candidate path set corresponding to each alignment camera until the number of acquisition paths in the candidate path set corresponding to each alignment camera reaches a preset number; determining a shortest acquisition path in the candidate path set corresponding to each alignment camera; and taking the shortest acquisition path in the candidate path set corresponding to each alignment camera as the optimal acquisition path corresponding to each alignment camera.

[0010] In some embodiments, the end point of the motion platform is provided with a limit switch, and the motion platform is controlled to move back and forth between the start point of the substrate and the end point of the substrate, including: when it is determined that the alignment camera is above each first positioning point in each column in the optimal acquisition path, controlling the motion platform to move forward along the length direction of the substrate; and when it is determined that the motion platform triggers a limit signal of the limit switch, controlling the motion platform to move reversely along the length direction of the substrate.

[0011] In some embodiments, the positioning point image information of each positioning point is determined according to all image information, including: obtaining GDS coordinate mapping relationship of the positioning point, and obtaining acquisition image size information of the alignment camera; and screening the positioning point image information of each positioning point in all image information according to the GDS coordinate mapping relationship and the acquisition image size information.

[0012] In some embodiments, the alignment method further includes: determining an initial recognition position of each positioning point in corresponding positioning point image information; determining a mapping relationship function between positioning point image information about the same positioning point acquired by each adjacent two alignment cameras in the plurality of alignment cameras; determining a final recognition position of each positioning point in corresponding positioning point image information according to the mapping relationship function and the initial recognition position; and determining a substrate position recognition result of each positioning point according to the final recognition position of each positioning point.

[0013] In some embodiments, determining the mapping relationship function between the image information about the same positioning point collected by each two adjacent alignment cameras comprises: determining image coordinate information of each positioning point in corresponding positioning point image information collected by each alignment camera; and determining the mapping relationship function between the image information about the same positioning point collected by each two adjacent alignment cameras according to the image coordinate information of each positioning point.

[0014] In some embodiments, determining the substrate position recognition result of each positioning point according to the final recognition position of each positioning point comprises: determining a mapping relationship between image coordinate information and substrate coordinate information about the positioning point; and performing position conversion on the final recognition position of each positioning point according to the mapping relationship to determine the substrate position recognition result of each positioning point.

[0015] An embodiment of the second aspect of the present application provides an LDI exposure machine, comprising: a plurality of alignment cameras arranged in a line along a width direction of a substrate, each alignment camera being configured to collect image information of a positioning point on the substrate in response to an image collection signal; a motion platform located below the plurality of alignment cameras, the motion platform being configured to pull the substrate to move; and a controller connected to the motion platform and the plurality of alignment cameras, the controller being configured to perform the alignment method of the LDI exposure machine as described in the above embodiments.

[0016] The LDI exposure machine according to the embodiments of the present application can maximize the alignment speed of the LDI exposure machine when there are many positioning point partitions on the substrate by performing the alignment method of the LDI exposure machine as described in the above embodiments, and can avoid the problem of camera redundancy.

[0017] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be learned from the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0019] Figure 1 is a schematic diagram of an LDI exposure machine according to an embodiment of the present application;

[0020] Figure 2 is a flowchart of an alignment method of an LDI exposure machine according to an embodiment of the present application;

[0021] Figure 3 is a flowchart of a collection path planning according to an embodiment of the present application;

[0022] Fig. 4(a) is a schematic diagram of the motion direction of the motion platform according to one embodiment of the present application;

[0023] Fig. 4(b) is a schematic diagram of the motion direction of the motion platform according to another embodiment of the present application;

[0024] Figure 5 Fig. 5 is a flow chart of the alignment method of the LDI exposure machine according to another embodiment of the present application.

[0025] Reference signs:

[0026] Host computer 1; controller 2; shaft driver 3; PSO board card 4; light source 5; memory module 6; alignment camera 7; substrate 8. DETAILED DESCRIPTION

[0027] The embodiments of the present application are described in detail below, and the embodiments described with reference to the accompanying drawings are exemplary, and the embodiments of the present application are described in detail below.

[0028] To solve the above problems, the first aspect embodiment of the present application provides an alignment method of an LDI exposure machine, which can maximize the alignment speed of the LDI exposure machine when the point partition on the substrate is large, and avoid the problem of camera redundancy.

[0029] In the embodiments, the LDI exposure machine can be a high-order exposure machine, such as Figure 1 As shown in the figure, the LDI exposure machine 10 includes a motion platform (not shown in the figure) for pulling the substrate 8 to move and a plurality of alignment cameras 7, the alignment cameras 7 can be CCD (charge coupled device camera) cameras, the motion platform pulls the substrate 8 to move along the length direction Y of the substrate, the plurality of alignment cameras 7 are arranged in a line along the width direction X of the substrate, and the motion platform is located below the plurality of alignment cameras 7. In addition, the LDI exposure machine 10 further includes a host computer 1, a controller 2, a shaft driver 3, a PSO (position synchronized output) board card 4, a light source 5, and a memory module 6. Specifically, the host computer 1 is used to send control instructions to the controller 2 and process image acquisition signals, etc.; the controller 2 pulls the motion platform to move by controlling the shaft driver 3; the shaft driver 3 is used to drive the motion platform 8 to move, the PSO board card 4 is connected with the controller 2 and each alignment camera 7, and is used to split the image acquisition signal sent by the controller 2 into a plurality of image acquisition sub-signals, and send each image acquisition sub-signal to each alignment camera 7; the light source 5 is located below the plurality of alignment cameras 7, the light source 5 is connected with the PSO board card 4, and is used to flash according to the image acquisition signal; and the memory module 6 is used to store the image information acquired by the alignment camera 7.

[0030] Specifically, the PSO board card is configured to receive the image acquisition signal sent by the controller, and split the image acquisition signal sent by the controller into a plurality of image acquisition sub-signals correspondingly, and send the plurality of image acquisition sub-signals to each alignment camera, and each alignment camera performs image acquisition after receiving the image acquisition sub-signal.

[0031] Reference will be made to the following Figure 2 A method for alignment of an LDI exposure machine according to an embodiment of the present application is described as follows, as shown in the figure, the method comprises steps S1-S6. Figure 2

[0032] In step S1, GDS (Geodetic Coordinate System) drawing information about the positioning points is obtained.

[0033] The GDS drawing is a drawing for setting the positions of the positioning points on the substrate.

[0034] Specifically, the user inputs the GDS drawing into the host computer, and the host computer obtains the GDS drawing information about the positioning points.

[0035] In step S2, the optimal acquisition path corresponding to each alignment camera is determined according to the GDS drawing information.

[0036] The optimal acquisition path corresponding to each alignment camera refers to the shortest distance trajectory that the alignment camera needs to move when completing the multi-zone alignment task. In addition, the optimal acquisition path can also be referred to as a "shooting path", that is, the path with the least time for the alignment camera and the motion platform. The optimal acquisition path ensures that the alignment camera can efficiently cover all the positioning points within the minimum displacement range, thereby minimizing the motion time and mechanical loss and improving the overall alignment efficiency.

[0037] Specifically, all the positioning points on the substrate in the present application are regularly distributed, and the plurality of alignment cameras are arranged in a line along the width direction of the substrate, that is, the field of view range of the plurality of alignment cameras corresponds to the continuous region along the width direction of the substrate, and the distance between the plurality of alignment cameras and the positioning points in the width direction of the substrate is not required. Therefore, in order to ensure that the plurality of alignment cameras can quickly acquire part of the positioning points in the width direction of the substrate, the plurality of positioning points in the width direction of the substrate are allocated to each alignment camera, and the path of the positioning points allocated to each alignment camera is planned, that is, since the GDS drawing information contains the design position information of the positioning points on the substrate, the path of the positioning points allocated to each alignment camera can be planned according to the GDS drawing information to obtain the optimal acquisition path corresponding to each alignment camera. The optimal acquisition path can be understood as the path with the least movement and the shortest movement time of the alignment camera when acquiring the images corresponding to the allocated plurality of positioning points.

[0038] ​Step S3, controlling each alignment camera according to the optimal acquisition path corresponding to each alignment camera.

[0039] Specifically, the optimal acquisition path can assign a moving sequence or a moving path of the positioning points to each alignment camera, and then the moving of each alignment camera to the above of each assigned positioning point in the corresponding optimal acquisition path is controlled according to the optimal acquisition path corresponding to each alignment camera, so as to shorten the multi-partition alignment path distance, and enable each alignment camera to quickly acquire the substrate image and improve the alignment speed of the exposure machine.

[0040] Step S4, controlling the motion platform to move back and forth between the starting point of the substrate and the ending point of the substrate until the image acquisition of all the positioning points by the alignment camera is completed, wherein the image acquisition signal is triggered once when the real-time moving distance of the motion platform reaches the shooting interval distance each time, and the image acquisition signal is used to indicate the synchronous image acquisition by the multiple alignment cameras.

[0041] The shooting interval distance can be understood as the distance interval between the adjacent two times of image shooting by the alignment camera, and the shooting interval distance is determined by the shooting field of view range of the alignment camera. The shooting interval distance can be 3.5um, and the picture size shot by the alignment camera is 2064x1544.

[0042] Specifically, since all the positioning points on the substrate in the present application are regularly distributed, after the moving of each alignment camera to the above of each assigned positioning point in the corresponding optimal acquisition path is controlled, in order to obtain all the images of each assigned positioning point in the length direction of the substrate, the motion platform is controlled to move back and forth between the starting point of the substrate and the ending point of the substrate. During the moving of the motion platform from the starting point of the substrate to the ending point of the substrate, since the shooting field of view range of the alignment camera is fixed, the shooting interval distance is set according to the shooting field of view range of the alignment camera, all the positioning points on the substrate are divided into multiple substrate shooting areas in the length direction of the substrate with the shooting interval distance, and the image acquisition signal is triggered once when the real-time moving distance of the motion platform reaches the shooting interval distance each time, at this time, the motion platform loads the substrate to move to the substrate shooting area which has not been shot, so as to enable each alignment camera to synchronously acquire the image information in the substrate shooting area, until the motion platform moves to the ending point of the substrate, at this time, it is indicated that each alignment camera has acquired all the images of each assigned positioning point in the length direction of the substrate, and then the motion platform is controlled to return from the ending point of the substrate to the starting point of the substrate until all the images of each assigned positioning point in the length direction of the substrate by each alignment camera. Thus, the motion platform is controlled to move back and forth between the starting point of the substrate and the ending point of the substrate to acquire the positioning point image, so as to shorten the multi-partition alignment path distance, and enable each alignment camera to quickly acquire the substrate image and improve the alignment speed of the exposure machine.

[0043] Step S5, determining the positioning point image information of each positioning point according to all the image information.

[0044] Specifically, since the images taken by the plurality of alignment cameras contain positioning point images and non-positioning point images, the positioning point images need to be screened from all the taken images, that is, the host computer will receive all the positioning point image information about all the taken images, and the image information of each positioning point is screened from all the positioning point image information, so as to obtain the positioning point image information of each positioning point.

[0045] Step S6, alignment according to the positioning point image information of each positioning point.

[0046] Specifically, in the prior art, the positioning point image of each positioning point cannot be determined after all the images are obtained, and therefore each positioning point image can only be obtained and positioned one by one. Therefore, in the present application, the image recognition algorithm is used to recognize and process the positioning point image information of each positioning point to determine the position information of each positioning point in the positioning point image, and then the position information of each positioning point in the positioning point image is converted into the position information of each positioning point in the substrate, so as to realize the rapid alignment of the LDI exposure machine. Thus, compared with the prior art in which the LDI exposure machine aligns each positioning point one by one by controlling the vector motion of the machine and the motion platform, in the present application, after all the positioning point image information is obtained at one time, the positioning point image information of each positioning point is screened and obtained, and then the positioning of each positioning point is performed by using the positioning image information of each positioning point, instead of obtaining each positioning point image one by one and positioning it. Instead, the motion platform is controlled to move along the length direction of the substrate and the camera is controlled to move along the width direction of the substrate, so as to maximize the multi-zone alignment speed of the LDI exposure machine and avoid the problem of reduced production capacity of the LDI exposure machine. In addition, multiple alignment cameras can take images synchronously at the same time, thereby avoiding the problem of camera redundancy.

[0047] It should be noted that the alignment method of the LDI exposure machine in the present application is applicable to the alignment of all the positioning points regularly distributed on the substrate.

[0048] According to the alignment method of the LDI exposure machine of the present invention, each alignment camera is driven to move according to its corresponding optimal acquisition path, and then the motion platform is driven to move back and forth between the start and end points of the substrate. Each time the motion platform moves to the shooting interval distance, multiple alignment cameras are triggered to capture images, so that all image information is obtained at once. Then, the positioning point image information of each positioning point is selected for positioning. Therefore, compared with the existing LDI exposure machine that aligns each positioning point one by one through the mutual vector motion of the controller and the motion platform, this application obtains all positioning point image information at once, selects the positioning point image information of each positioning point, and then performs positioning based on the positioning image information of each positioning point, instead of obtaining each positioning point image one by one and then performing positioning. Instead, by controlling the motion platform to move along the length direction of the substrate and controlling the cameras to move along the width direction of the substrate, the alignment speed of the LDI exposure machine can be maximized. In addition, multiple alignment cameras can capture images simultaneously, thereby avoiding the problem of camera redundancy.

[0049] In some embodiments, determining the optimal acquisition path for each alignment camera based on GDS drawing information includes: rasterizing the GDS drawing information to obtain the row and column relationship results of all positioning points and the GDS coordinate information of each positioning point; determining the alignment camera corresponding to each column of positioning points in the row and column relationship results; and performing path planning based on the GDS coordinate information of each alignment camera for the first positioning point in each column of the row and column relationship results to obtain the optimal acquisition path for each alignment camera, wherein the first positioning point in each column is the positioning point on the substrate closest to the starting point of the substrate.

[0050] Specifically, the GDS drawing information is input into the host computer software for rasterization processing, that is, the host computer obtains the GDS coordinate information of each positioning point to obtain the row-column relationship result of all positioning points according to the GDS coordinate information of each positioning point, and then determines the alignment camera corresponding to each column of positioning points in the row-column relationship result, that is, determines which specific alignment camera is responsible for collecting the image of each column of positioning points in the row-column relationship result. For determining the alignment camera corresponding to each column of positioning points, the distance between each column of positioning points and each alignment camera can be determined by combining the shooting range, position information of each alignment camera and the GDS coordinate information of each column of positioning points, and then the alignment camera corresponding to each column of positioning points in the row-column relationship result is determined according to the distance between each column of positioning points and each alignment camera. Then, path planning is performed on all column positioning points allocated to each alignment camera. Specifically, since all positioning points on the substrate are regularly distributed, path planning can be performed by inputting the GDS coordinate information of the first positioning point in each column allocated by each alignment camera into a path planning algorithm to obtain the optimal collection path corresponding to each alignment camera, thereby reducing the number of movements and movement paths of the motion platform, thereby reducing the exposure machine positioning time and improving the production capacity of the exposure machine.

[0051] For example, three alignment cameras are described in this application, from left to right, the first alignment camera, the second alignment camera and the third alignment camera, and the row-column relationship result is nine columns. The first column of positioning points, the second column of positioning points and the third column of positioning points are closest to the first alignment camera, and the first column of positioning points, the second column of positioning points and the third column of positioning points are allocated to the first alignment camera. Then, the first positioning point in the first column of positioning points, the second column of positioning points and the third column of positioning points is path planned to obtain the optimal path planning corresponding to the first alignment camera. The fourth column of positioning points, the fifth column of positioning points and the sixth column of positioning points are closest to the second alignment camera, and the fourth column of positioning points, the fifth column of positioning points and the sixth column of positioning points are allocated to the second alignment camera. Then, the first positioning point in the fourth column of positioning points, the fifth column of positioning points and the sixth column of positioning points is path planned to obtain the optimal path planning corresponding to the second alignment camera. The seventh column of positioning points, the eighth column of positioning points and the ninth column of positioning points are closest to the third alignment camera, and the seventh column of positioning points, the eighth column of positioning points and the ninth column of positioning points are allocated to the third alignment camera. Then, the first positioning point in the seventh column of positioning points, the eighth column of positioning points and the ninth column of positioning points is path planned to obtain the optimal path planning corresponding to the third alignment camera.

[0052] In an embodiment, based on the coordinate information of the positioning points in the GDS drawing information in two directions, when the distance between two positioning points in two directions is less than a preset threshold, and the preset threshold can be 1 millimeter, it is determined that the two positioning points are adjacent positioning points, the adjacent positioning points are located in the same field of view range, that is, the same row and the same column, and the adjacent positioning points are collected by the same alignment camera.

[0053] In some embodiments, determining the alignment camera corresponding to each column of positioning points in the row-column relationship result comprises: obtaining the collection area limit of each alignment camera; and determining the alignment camera corresponding to each column of positioning points in the row-column relationship result according to the GDS coordinate information of the first positioning point in each column in the row-column relationship result and the collection area limit of each alignment camera.

[0054] The collection area limit refers to the image collection range of the alignment camera for the substrate. The collection area limit can be obtained by calculating the boundary and size of the collection area according to the camera parameters and geometric optical principles. The collection area limit can be represented by the substrate coordinate system. The collection area limit is obtained by calculation in advance before the alignment of the positioning points on the substrate.

[0055] Specifically, the collection area range can be obtained by calculation according to the camera parameters and geometric optical principles, and then the collection area range is converted to the substrate coordinate system according to the position of each alignment camera to obtain the collection area limit of each alignment camera. Alternatively, the collection area limit of the camera can be determined by observing the boundary position of the target area in the image captured by the alignment camera. The coordinate information of the first positioning point in each column in the substrate coordinate system is obtained according to the GDS coordinate information of the first positioning point in each column. Then, the relative distance between each first positioning point in each column and the collection area limit corresponding to each alignment camera is calculated according to the coordinate information of the first positioning point in each column in the substrate coordinate system and the collection area limit of each alignment camera, so as to determine the alignment camera with the shortest relative distance between the first positioning point in each column and the collection area limit, and the alignment camera is used as the alignment camera corresponding to each column of positioning points in the row-column relationship result. In addition, it should be noted that the substrate coordinate information of the first positioning point in each column in the substrate width direction can be used for relative distance calculation.

[0056] In some embodiments, the optimal collection path corresponding to each alignment camera is obtained by path planning according to the GDS coordinate information of each first positioning point in each column corresponding to each alignment camera in the row-column relationship result, comprising the following steps:

[0057] First, the path finder corresponding to each alignment camera is obtained.

[0058] The pathfinder can be a computer program for finding the best path from the starting point to the ending point in a space such as a graph, a map or a network. The path can be defined as the shortest path, the fastest path or the path that meets certain conditions. The number of pathfinders is consistent with the number of alignment cameras, for example, when the number of alignment cameras is 3, the number of pathfinders configured is also 3.

[0059] Specifically, the pathfinder corresponding to each alignment camera is obtained, and the pathfinder is used for path planning of the collection path corresponding to each alignment camera.

[0060] Secondly, the starting position information of each pathfinder is determined according to the GDS coordinate information of the first positioning point of each column.

[0061] Specifically, according to the GDS coordinate information of the first positioning point of each column in the result of the row-column relationship of each alignment camera, the first positioning point of the column closest to each alignment camera is determined, and the GDS coordinate information of the first positioning point is taken as the starting position information of each pathfinder.

[0062] Thirdly, the collection path corresponding to each alignment camera is determined according to the starting position information of each pathfinder and the GDS coordinate information of the first positioning point of each column, and the collection path is added to the candidate path set corresponding to each alignment camera until the number of collection paths in the candidate path set corresponding to each alignment camera reaches a preset number.

[0063] The preset number can be understood as the number of times of path iteration of the pathfinder preset in advance, and the preset number can be set according to the time of obtaining the final collection path. The setting of the preset number affects the depth of the algorithm search. More iteration times usually mean better collection paths, but may also increase the time of calculating the collection path. Therefore, reasonable setting of the preset number usually needs to balance the calculation resources and the path diversity, and the preset number can be adjusted according to the specific situation.

[0064] Specifically, each alignment camera corresponds to a pathfinder, which plans a path according to the starting position information of each pathfinder and the GDS coordinate information of the first positioning point in each column to determine the collection path of each alignment camera with respect to the first positioning point in each column, and adds the collection path to the candidate path set corresponding to each alignment camera, and then determines whether the number of collection paths in the candidate path set corresponding to each alignment camera reaches a preset number, if not, it means that the optimal collection path has not been obtained in the candidate path set corresponding to each alignment camera, that is, the path quality of the collection path obtained by the pathfinder corresponding to each alignment camera does not meet the standard, then the pathfinder corresponding to each alignment camera continues to plan a path, if yes, it means that the optimal collection path has been obtained in the candidate path set corresponding to each alignment camera, that is, the path quality of the collection path obtained by the pathfinder corresponding to each alignment camera meets the standard, and the efficiency of the pathfinder corresponding to each alignment camera is higher, then the pathfinder corresponding to each alignment camera stops planning a path.

[0065] Then, the shortest collection path in the candidate path set corresponding to each alignment camera is determined.

[0066] The shortest collection path is the shortest collection sequence or path of each alignment camera moving to the corresponding first positioning point in the corresponding row-column relationship result.

[0067] Finally, the shortest collection path in the candidate path set corresponding to each alignment camera is taken as the optimal collection path corresponding to each alignment camera to shorten the moving distance of each alignment camera, thereby effectively improving the moving speed of each alignment camera.

[0068] The alignment method of the LDI exposure machine of the embodiment of the present application will be described below with reference to the accompanying drawings. Figure 3

[0069] Step S7: Obtain the GDS coordinate information of all positioning points on the substrate.

[0070] Step S8: Set the initialization parameters such as the number of pathfinders and the preset number.

[0071] Step S9: Create a pathfinder for each alignment camera, and set and record the starting position information of each pathfinder.

[0072] Step S10: Determine the collection path corresponding to each alignment camera according to the starting position information of each pathfinder and the GDS coordinate information of the first positioning point in each column, and add the collection path to the candidate path set corresponding to each alignment camera to update the candidate path set and update the number of times each positioning point is passed by the path in real time.

[0073] ​In step S11, it is determined whether the number of the collection paths in the candidate path set corresponding to each alignment camera reaches a preset number. If yes, step S12 is performed; if no, step S9 is performed.

[0074] In step S12, the shortest collection path in the candidate path set is taken as the optimal collection path corresponding to each alignment camera.

[0075] Based on the above, in the present application, the shortest collection path in the candidate path set corresponding to each alignment camera is determined and taken as the optimal collection path corresponding to each alignment camera, which can significantly improve the collection efficiency of the positioning point images, effectively reduce the time and resources consumed in the collection process, avoid unnecessary path detours and repetitions, and make the alignment of the substrate positioning points more efficient.

[0076] In some embodiments, the end point of the motion platform is provided with a limit switch, and the motion platform is controlled to move back and forth between the start point of the substrate and the end point of the substrate, including: when it is determined that the alignment camera is located above the first positioning point of each column in the optimal collection path, controlling the motion platform to move forward along the length direction of the substrate; when it is determined that the limit switch of the motion platform triggers a limit signal, controlling the motion platform to move reversely along the length direction of the substrate.

[0077] Specifically, the optimal collection path is the moving sequence of the alignment camera for each column of the first positioning point in the row-column relationship result. When each alignment camera is driven to move to the top of each column of the first positioning point in the optimal collection path, in order to obtain the positioning point images of all the positioning points in the column of the first positioning point, as shown in FIG. 4(a) and FIG. 4(b), the motion platform is driven to move forward along the length direction of the substrate from the start point of the substrate. Since the shooting field of view range of the alignment camera relative to the substrate is fixed, the shooting interval distance is set according to the shooting field of view range of the alignment camera, and all the positioning points on the substrate are divided into a plurality of substrate shooting areas in the length direction of the substrate with the shooting interval distance. When the real-time moving distance of the motion platform reaches the shooting interval distance, the motion platform loads the substrate to move to the substrate shooting area that has not been shot, and then triggers an image collection signal once, so that each alignment camera synchronously collects the image information in the substrate shooting area. Until the limit signal of the limit switch is triggered, it means that each alignment camera has collected the image information in all the areas on the substrate, i.e., each alignment camera has obtained the positioning point images of all the positioning points in the column of the first positioning point. Then, the motion platform is controlled to move reversely along the length direction of the substrate, so that the motion platform returns to the start point of the substrate, and each alignment camera continues to shoot the positioning point images of all the positioning points in other columns of the first positioning point. In this way, each alignment camera shoots the positioning point images of each column of the positioning points allocated.

[0078] After each alignment camera takes the positioning point image of each column assigned, if the substrate still has unshot area, that is, there are other unassigned columns in the row-column relationship result, the multiple alignment cameras and the motion platform are controlled to move towards each other, so that the multiple alignment cameras move to the unshot area of the substrate, and the other unassigned columns in the row-column relationship result are re-assigned to each alignment camera.

[0079] For example, the first alignment camera collects the positioning point image of each column of positioning points assigned, the first column of positioning points, the second column of positioning points and the third column of positioning points are assigned to the first alignment camera, each column of positioning points includes three positioning points, the first positioning point of the first column of positioning points is positioning point A1, the first positioning point of the second column of positioning points is positioning point B1, and the first positioning point of the third column of positioning points is positioning point C1, and the optimal collection path of the first alignment camera for the three columns of positioning points is the shooting order of positioning point A1, positioning point B1 and positioning point C1, if the optimal collection path is to collect positioning point A1 first, then collect positioning point B1 and finally collect positioning point C, based on this, when the first alignment camera is driven to move above positioning point A1 in the optimal collection path, the motion platform is driven to move forward along the length direction of the substrate from the starting point of the substrate, and when the real-time moving distance of the motion platform monitored by the upper computer reaches the shooting interval distance, an image collection signal is triggered and sent to the first alignment camera, so that the first alignment camera collects image information within the shooting interval distance, until the motion platform triggers the limit signal of the limit switch, at this time, it is indicated that the first alignment camera collects the positioning point images of positioning point A1, positioning point A2 and positioning point A3, and then the motion platform is controlled to move reversely along the length direction of the substrate, so that the motion platform returns to the starting point of the substrate, so that the first alignment camera continues to shoot all positioning point images of the column where positioning point B1 is located, and so on, until the first alignment camera shoots the positioning point images of the assigned columns.

[0080] In addition, it should be noted that when the first alignment camera shoots the positioning point images of the assigned columns, the remaining alignment cameras synchronously collect the positioning point images of the corresponding columns.

[0081] Therefore, in the present application, the motion platform is controlled to move back and forth between the starting point of the substrate and the terminal point of the substrate, the multi-partition alignment path distance is shortened, each alignment camera can efficiently obtain the positioning point images of all columns assigned to it, the continuity and integrity of the positioning point image collection process are ensured, and the alignment speed of the LDI exposure machine can be maximized.

[0082] In some embodiments, determining the locating point image information of each locating point according to all image information comprises: obtaining a GDS coordinate mapping relationship of the locating points and obtaining acquisition image size information of the alignment camera; and screening the locating point image information of each locating point in all image information according to the GDS coordinate mapping relationship and the acquisition image size information.

[0083] Specifically, the GDS coordinate mapping relationship of the locating points and the acquisition image size information of the alignment camera are obtained. Since the GDS coordinate information of each locating point exists in the GDS drawing about the locating points, the GDS coordinate information of each locating point in the GDS drawing is obtained to determine the correlation information between each locating point by the GDS coordinate information of each locating point. For example, the correlation information can be the positional relationship between each locating point or the distance between each locating point. For example, the GDS coordinate information of one locating point is represented as (X1, Y1), and the GDS coordinate information of another locating point is represented as (X2, Y2). The positional relationship between each locating point is (X1-X2, Y1-Y2). The correlation information between each locating point is taken as the GDS coordinate mapping relationship of the locating points in the GDS drawing.

[0084] Then, the locating point image information of each locating point in all image information is screened according to the GDS coordinate mapping relationship and the acquisition image size information. That is, since the locating points on the substrate are prepared according to the GDS coordinate information of each locating point in the GDS drawing, the GDS coordinate mapping relationship of the locating points is the mapping relationship between the locating points on the substrate. Based on this, the correlation information between each locating point is determined by the GDS coordinate information of each locating point, that is, by the positional relationship between each locating point or the distance between each locating point. After the host computer obtains the multiple images collected by each alignment camera, the locating point image of the reference point is determined. According to the GDS coordinate mapping relationship, the distances of the reference point and other locating points in the length direction and the width direction are determined. Then, according to the acquisition image size information, the distances are converted into the number of pictures in the length direction and the width direction. The locating point image of each locating point is determined from all images collected by the multiple alignment cameras according to the number of pictures in the length direction and the width direction. In this application, the locating point image of each locating point is obtained by screening from all images captured by the multiple alignment cameras according to the GDS coordinate mapping relationship and the acquisition image size information. Therefore, the alignment can be performed by the image of each locating point after all image collection is completed, instead of obtaining each locating point image one by one and then positioning. Therefore, the positioning speed can be maximally improved, and the alignment speed of the LDI exposure machine can be improved.

[0085] In some embodiments, the alignment method further comprises: determining an initial recognition position of each positioning point in the corresponding positioning point image information; determining a mapping relationship function between the positioning point image information about the same positioning point collected by each two adjacent alignment cameras; determining a final recognition position of each positioning point in the corresponding positioning point image information according to the mapping relationship function and the initial recognition position; and determining the substrate position recognition result of each positioning point according to the final recognition position of each positioning point.

[0086] Specifically, in order to reflect the position relationship between the substrate positioning points in the position relationship between the positioning points in the images captured by all the alignment cameras, the image position information between the positioning points in the images captured by all the alignment cameras is associated by the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras. Specifically, the position relationship between the same positioning points in the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras is taken as the conversion relationship between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras, and then the conversion relationship between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras is taken as the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras. Then, the final recognition position of each positioning point in the corresponding positioning point image information is calculated through the initial recognition position of each positioning point in the corresponding positioning point image information and the mapping relationship function between the positioning point image information collected by the corresponding two adjacent alignment cameras. The final recognition position of all the positioning points in the corresponding positioning point image information can reflect the position relationship between all the positioning points on the substrate. The substrate coordinate information of the converted positioning points is taken as the substrate position recognition result of each positioning point, so as to realize the alignment of the LDI exposure machine.

[0087] In some embodiments, the determination of the mapping relationship function between the image information about the same positioning point collected by each two adjacent alignment cameras comprises: determining the image coordinate information of each positioning point in the corresponding positioning point image information collected by each alignment camera; and determining the mapping relationship function between the image information about the same positioning point collected by each two adjacent alignment cameras according to the image coordinate information of each positioning point.

[0088] Specifically, for each two adjacent alignment cameras, image coordinate information of each positioning point in the positioning point image information collected by each alignment camera is determined, that is, the positioning point image information collected by each of the two adjacent alignment cameras is acquired, and then image coordinate information of each positioning point in the positioning point image information is recognized through an image recognition algorithm to determine the image coordinate information of the same positioning point in the positioning point image collected by each of the two adjacent alignment cameras, and then a conversion relationship between the image coordinate information of the same positioning point collected by the two adjacent alignment cameras is calculated. The conversion relationship can be the image coordinate difference of the same positioning point collected by the adjacent alignment cameras, so as to calculate the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras through the conversion relationship between the image coordinate information of the same positioning point collected by the adjacent alignment cameras. For example, the conversion relationship between the image coordinate information of a certain same positioning point is taken as the mapping relationship function between the positioning point image information collected by the adjacent alignment cameras. The conversion relationship between the image coordinate information of a certain same positioning point can be the most accurate conversion relationship among the conversion relationships between the image coordinate information of all same positioning points. Alternatively, a final conversion relationship can also be calculated through the conversion relationships between the image coordinate information of all same positioning points, and the final conversion relationship is taken as the mapping relationship function between the positioning point image information collected by the adjacent alignment cameras.

[0089] For example, the first and second alignment cameras are two adjacent alignment cameras. A column of positioning points with equal spacing on the substrate is selected, and then the first and second alignment cameras are used to capture images of the selected column of positioning points to obtain positioning point images of the positioning points respectively. Then, an image recognition algorithm is used to identify the image coordinate information of the positioning point in the positioning point images of the same positioning point captured by the first and second alignment cameras, and to calculate the conversion relationship between the image coordinate information of the same positioning point captured by the first and second alignment cameras. The conversion relationship can be the difference in image coordinates between the first and second alignment cameras captured by the same positioning point. For example, the image captured by the first alignment camera... If the coordinates of a location point are identified as A(X3, Y3) from an image of the same location point captured by a first aligned camera, and the coordinates of the same location point are identified as B(X4, Y4), then the conversion relationship can be (X3-X4, Y3-Y4). This conversion relationship is used to determine the mapping function between the image coordinates of the same location point captured by the first and second aligned cameras. For example, the conversion relationship between the image coordinates of a certain location point can be used as the mapping function between the image coordinates of the location point captured by the first and second aligned cameras. This conversion relationship between the image coordinates of a certain location point can be considered the most accurate among all conversion relationships between the image coordinates of the same location points.

[0090] Furthermore, it should be noted that if there is another adjacent third alignment camera, then the mapping relationship function between the positioning point image information acquired by the second alignment camera and the third alignment camera is obtained in the manner described above.

[0091] Based on this, a mapping function is used between the positioning point image information acquired by two adjacent aligned cameras to correlate the positioning point image information acquired by all cameras.

[0092] In some embodiments, determining the substrate position recognition result of each positioning point based on the final identification position of each positioning point includes: determining the mapping relationship between the image coordinate information and the substrate coordinate information of the positioning point; and performing position conversion on the final identification position of each positioning point based on the mapping relationship to determine the substrate position recognition result of each positioning point.

[0093] Among them, the substrate coordinate information is the coordinate information of the positioning point in the substrate in the substrate coordinate system.

[0094] For example, one or more positioning points in the substrate that can be obviously distinguished from other positioning points are selected, which can be located at the upper left corner, lower left corner, upper right corner or lower right corner of the substrate. The user manually inputs the coordinate information of the positioning point in the substrate in the substrate coordinate system, or takes the GDS coordinate information of the positioning point as the substrate coordinate information of the positioning point, the controller obtains the substrate coordinate information of the positioning point, then uses the alignment camera to capture the image coordinate information of the positioning point, and then calculates the correlation information between the image coordinate information and the substrate coordinate information of the positioning point by using the image coordinate information and the substrate coordinate information of the positioning point, so as to take the correlation information between the image coordinate information and the substrate coordinate information of the positioning point as the mapping relationship between the image coordinate information and the substrate coordinate information of the positioning point, and then perform position conversion on the final recognition position of each positioning point according to the mapping relationship, so as to determine the substrate position recognition result of each positioning point, for example, the final recognition position of each positioning point minus the mapping relationship, so as to obtain the substrate position recognition result of each positioning point.

[0095] Finally, the controller can also calculate the rotation, translation and expansion information of each positioning point according to the substrate position recognition result of each positioning point and the GDS coordinate information of each positioning point.

[0096] Reference will now be made to the following description Figure 5 The alignment method of the LDI exposure machine according to the embodiment of the present application is described as follows.

[0097] In step S13, the host computer obtains the GDS coordinate information of all the positioning points.

[0098] In step S14, the GDS coordinate information of the first positioning point in each column in the row-column relationship result is used for path planning, so as to obtain the optimal acquisition path corresponding to each alignment camera.

[0099] In step S15, each alignment camera is controlled to move above the first positioning point in each column in the optimal acquisition path.

[0100] In step S16, the moving platform is controlled to start accelerating from the starting point of the substrate, and then start uniform motion along the length direction of the substrate after the moving platform moves to the trigger starting point.

[0101] In step S17, the image acquisition signal is triggered once when the controller detects that the real-time moving distance of the moving platform reaches the shooting interval distance, and the controller sends the image acquisition signal to the PSO board card.

[0102] In step S18, after the PSO board card receives the image acquisition signal, the image acquisition signal is boosted, and then transmitted to each light source controller synchronously.

[0103] In step S19, after receiving the image acquisition signal, the light source controller synchronizes the image acquisition signal to multiple aligned cameras and light sources, and executes steps S22 and S20.

[0104] Step S20: Each aligned camera captures all images of the motion platform during its movement along the length of the substrate and stores them in the image queue of the corresponding aligned camera. Then, step S23 is executed.

[0105] Step S21: When the motion platform moves to the limit switch, it triggers the limit signal to control the motion platform to move in the opposite direction along the length of the substrate, and triggers the image acquisition stop signal and sends the stop signal to the controller. The controller sends the image acquisition stop signal to the PSO board to control the multiple alignment cameras to stop acquiring images.

[0106] Step S22: Control the light source to flash according to the image acquisition signal.

[0107] Step S23: Based on the GDS coordinate mapping relationship and image size information, filter out the positioning point image information of each positioning point in all image information, and delete all images except those containing positioning points.

[0108] Step S24: Image recognition is performed on the positioning point image of each positioning point using an image recognition algorithm to obtain the initial recognition position of each positioning point in the corresponding positioning point image information. Then, based on the mapping relationship function between the positioning point image information of the same positioning point collected by each two adjacent alignment cameras in multiple alignment cameras, the final recognition position of each positioning point in the corresponding positioning point image information is obtained. The substrate position recognition result of each positioning point is determined based on the final recognition position of each positioning point, and the rotation, translation, and expansion / contraction information between the substrate position recognition result of each positioning point and the substrate coordinate information of each positioning point is calculated.

[0109] Step S25: Statistical analysis of substrate position identification results for each positioning point to complete LDI exposure machine alignment.

[0110] A second aspect of the present invention provides an LDI exposure machine, with reference to... Figure 1 As shown, the LDI exposure machine 10 includes a plurality of alignment cameras 7, a motion platform, and a controller 2. The plurality of alignment cameras 7 are arranged in a line along the width direction of the substrate 8. Each alignment camera 7 is used to acquire image information of a positioning point on the substrate 8 in response to an image acquisition signal. The motion platform is located below the plurality of alignment cameras 7 and is used to pull the substrate 8 to move. The controller 2 is connected to the motion platform and the plurality of alignment cameras 7 and is used to execute the alignment method of the LDI exposure machine in the above embodiment.

[0111] According to the LDI exposure machine 10 of the embodiment of the present application, by executing the alignment method of the LDI exposure machine of the above-described embodiment, the alignment speed of the LDI exposure machine can be maximized when the number of point division is large.

[0112] In the description of the specification, descriptions referring to the terms "one embodiment", "some embodiments", "an exemplary embodiment", "an example", "a specific example" or "some examples" etc. mean that the particular feature, structure, material or characteristic being described is included in at least one embodiment or example of the present application. The appearances of the above-described terms in various places in the specification do not necessarily refer to the same embodiment or example.

[0113] Although the embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, alternatives and variations can be made thereto without departing from the principles and spirit of the application, and that the scope of the present application is defined by the following claims and their equivalents.

Claims

1. A method for aligning an LDI exposure machine, characterized in that, The LDI exposure machine includes a motion platform for pulling the substrate and multiple alignment cameras. The multiple alignment cameras are arranged in a line along the width direction of the substrate. The motion platform is located below the multiple alignment cameras. The alignment method includes: Obtain GDS drawing information about the positioning points; The optimal acquisition path for each aligned camera is determined based on the GDS drawing information. Each alignment camera is controlled according to the optimal acquisition path corresponding to each alignment camera; The motion platform is controlled to move back and forth between the starting point and the ending point of the substrate until the alignment camera completes image acquisition of all positioning points. When the real-time moving distance of the motion platform reaches the shooting interval distance, an image acquisition signal is triggered. The image acquisition signal is used to instruct multiple alignment cameras to acquire image information synchronously. Determine the location point image information for each location point based on all image information; Alignment is performed based on the positioning point image information of each positioning point.

2. The alignment method for an LDI exposure machine according to claim 1, characterized in that, Based on the GDS drawing information, the optimal acquisition path for each aligned camera is determined, including: The GDS drawing information is rasterized to obtain the row and column relationship results of all positioning points and the GDS coordinate information of each positioning point; Determine the aligned camera corresponding to each column positioning point in the row-column relationship result; Path planning is performed based on the GDS coordinate information of the first positioning point in each column of the row and column relationship results for each alignment camera to obtain the optimal acquisition path for each alignment camera, wherein the first positioning point in each column is the positioning point on the substrate that is close to the starting point of the substrate.

3. The alignment method for an LDI exposure machine according to claim 2, characterized in that, Determining the aligned camera corresponding to each column positioning point in the row-column relationship result includes: Obtain the acquisition area boundaries for each aligned camera; Based on the GDS coordinate information of the first positioning point in each column of the row-column relationship result and the acquisition area boundary of each alignment camera, the alignment camera corresponding to each positioning point in the row-column relationship result is determined.

4. The alignment method for an LDI exposure machine according to claim 2, characterized in that, Based on the GDS coordinate information of the first positioning point in each column of the row-column relationship result for each aligned camera, path planning is performed to obtain the optimal acquisition path for each aligned camera, including: Obtain the pathfinder corresponding to each aligned camera; The starting position information of each pathfinder is determined based on the GDS coordinate information of the first positioning point in each column. Based on the starting position information of each pathfinder and the GDS coordinate information of the first positioning point of each column, the acquisition path corresponding to each alignment camera is determined, and the acquisition path is added to the alternative path set corresponding to each alignment camera until the number of acquisition paths in the alternative path set corresponding to each alignment camera reaches a preset number. Determine the shortest acquisition path from the set of alternative paths corresponding to each aligned camera; The shortest acquisition path in the set of alternative paths corresponding to each aligned camera is taken as the optimal acquisition path for each aligned camera.

5. The alignment method for an LDI exposure machine according to claim 1, characterized in that, The motion platform is equipped with a limit switch at its endpoint to control the motion platform to reciprocate between the starting point and the ending point of the substrate, including: When the alignment camera is determined to be above the first positioning point of each column in the optimal acquisition path, the motion platform is controlled to move forward along the length direction of the substrate; When the motion platform triggers the limit signal of the limit switch, the motion platform is controlled to move in the opposite direction along the length of the substrate.

6. The alignment method for an LDI exposure machine according to claim 1, characterized in that, The location point image information for each location point is determined based on all image information, including: Obtain the GDS coordinate mapping relationship of the positioning point, and obtain the image size information of the aligned camera; Based on the GDS coordinate mapping relationship and the acquired image size information, the positioning point image information of each positioning point in all image information is filtered out.

7. The alignment method for an LDI exposure machine according to any one of claims 1-6, characterized in that, The alignment method further includes: Determine the initial identification position of each positioning point in the corresponding positioning point image information; Determine the mapping relationship function between the positioning point image information about the same positioning point acquired by every two adjacent positioning cameras in a plurality of positioning cameras; The final identification position of each positioning point in the corresponding positioning point image information is determined based on the mapping relationship function and the initial identification position. The substrate position identification result of each positioning point is determined based on the final identification position of each positioning point.

8. The alignment method for an LDI exposure machine according to claim 7, characterized in that, Determine the mapping relationship function between image information about the same positioning point acquired by every two adjacent alignment cameras in a plurality of alignment cameras, including: For each positioning point image information acquired by the aligning camera, determine the image coordinate information of each positioning point in the corresponding positioning point image information; Based on the image coordinate information of each positioning point, a mapping function is determined between the image information of the same positioning point acquired by two adjacent aligned cameras.

9. The alignment method for an LDI exposure machine according to claim 8, characterized in that, The substrate position identification result for each positioning point is determined based on the final identified position of each positioning point, including: Determine the mapping relationship between the image coordinate information and the substrate coordinate information regarding the positioning points; Based on the mapping relationship, the final identified position of each positioning point is converted to determine the substrate position identification result of each positioning point.

10. An LDI exposure machine, characterized in that, include: Multiple alignment cameras are arranged in a line along the width direction of the substrate, and each alignment camera is used to acquire image information of a positioning point on the substrate in response to an image acquisition signal. A motion platform, located below a plurality of alignment cameras, is used to move the substrate. A controller, connected to the motion platform and the plurality of alignment cameras, is used to perform the alignment method of the LDI exposure machine according to any one of claims 1-9.

Images