Broadband electrostatic vibration energy collector with adjustable response bandwidth and test method thereof

Abstract

The invention discloses a broadband electrostatic vibration energy collector with an adjustable response bandwidth and a test method thereof, the electrostatic vibration energy collector is of a parallel plate structure, and the electrostatic vibration energy collector comprises a top plate; an insulating stopper; the suspension spring plate with the mass block is used as a movable electret electrode; the adjusting bolt is used for controlling a vertical gap between the suspension spring plate and the insulation stop block; the reset spring is used for resetting the insulation stop block; the bottom plate is used for supporting and fixing the electrode; the insulating support frame is used for supporting the bottom plate, the suspension spring plate, the insulating stop block and the top plate; wherein the suspension spring plate is composed of four same double-clamping gradient folding beams and is connected with the mass block; the electrostatic vibration energy collector realizes broadband energy collection under different vibration frequencies by adjusting the height of the adjusting bolt. According to the invention, the output voltage and the bandwidth can be optimized, so that energy storage devices such as a capacitor or a lithium battery can be charged more effectively.

Description

Technical Field

[0001] The present invention belongs to the technical field of energy collection, and in particular relates to a broadband electrostatic vibration energy collector with adjustable response bandwidth and a testing method thereof. Background Art

[0002] With the development of the Internet of Things (IoT), many potential sensor network applications involve a large number of sensor nodes in remote, widely spaced or inaccessible locations, which poses a challenge to the long-term power supply of wireless sensors and low-power devices. Traditionally, these devices are usually powered by batteries, but this approach has disadvantages such as limited life, difficult maintenance and environmental issues.

[0003] In order to solve these problems, technologies for harvesting energy from natural sources in the environment have been developed, among which vibration energy harvesting (VEH) has received particular attention. However, the problems existing in the prior art mainly include:

[0004] 1. Material selection issues: Although piezoelectric ceramics have a high energy conversion rate, they are fragile and difficult to withstand long-term vibration, while piezoelectric polymers are flexible but have low conversion efficiency.

[0005] 2. Limitations of electromagnetic VEH: Although electromagnetic VEH can generate relatively high current, the voltage is low, which makes it difficult to charge capacitors and lithium batteries. In addition, VEH based on MEMS technology is difficult to implement due to the performance limitations of magnets and coils and the limitation of vibration amplitude.

[0006] 3. Initial charging problem of electrostatic VEH: Although electrostatic VEHs are compatible with MEMS processes and are conducive to miniaturization, they require an initial voltage source for charging, which may not be a problem in some applications but can be a challenge in others.

[0007] 4. Structural design issues: The design of electrostatic VEH needs to consider mechanical stability and reliability, especially when using a comb structure, where small-scale misalignment may significantly reduce the output performance.

[0008] 5. Bandwidth issue: The maximum energy output of VEH usually occurs at its fundamental resonant frequency. If the resonant frequency of VEH does not match the ambient vibration, the power output will be significantly reduced, which limits the wide application of VEH.

[0009] 6. Limitations of tuning strategies: Although there are multiple tuning strategies such as resonant frequency tuning, multi-peak energy harvesting, nonlinear energy harvesting, and electrical damping tuning, these techniques are usually only applicable to specific transduction configurations, and there are few reports on the use of multiple nonlinear tuning mechanisms.

[0010] 7. Lack of nonlinear tuning mechanisms: For out-of-plane gap closure configurations, nonlinear tuning mechanisms based on nonlinear electrostatic forces and stopper impacts can be used to create effective broadband energy harvesting, but research and applications in this area are relatively limited. Summary of the invention

[0011] In order to solve the above technical problems, the present invention proposes a broadband electrostatic vibration energy harvester with adjustable response bandwidth and a testing method thereof to solve the problems existing in the above prior art.

[0012] To achieve the above object, the present invention provides a broadband electrostatic vibration energy collector with adjustable response bandwidth, wherein the electrostatic vibration energy collector is a parallel plate structure and comprises:

[0013] roof;

[0014] Insulation stop block;

[0015] A suspended spring plate with a mass block acts as a movable electret electrode;

[0016] An adjusting bolt, used to control the vertical gap between the suspension spring plate and the insulating stop block;

[0017] A reset spring, used for resetting the insulating stop block;

[0018] A bottom plate, used for supporting and fixing electrodes;

[0019] An insulating support frame, used for supporting the bottom plate, the suspension spring plate, the insulating stop block, and the top plate;

[0020] Wherein, the suspension spring plate is formed by four identical double-clamped gradual folded beams and connected to the mass block;

[0021] The electrostatic vibration energy collector realizes broadband energy collection at different vibration frequencies by adjusting the height of the adjusting bolt.

[0022] Preferably, the electrostatic vibration energy harvester operates in a free mode and a collision mode to accommodate vibrations within a wide frequency band.

[0023] Preferably, the double-clamped tapered folded beam structure of the suspension spring plate is designed to have an acoustic black hole effect and a nonlinear Duffing effect spring.

[0024] Preferably, it further comprises a high impedance buffer operational amplifier for maintaining signal integrity, wherein the high impedance buffer operational amplifier is connected between the measurement point and the data acquisition instrument.

[0025] Preferably, the electromechanical model of the electrostatic vibration energy harvester includes a displacement model of the vibration table, a total mechanical force model, and an electrostatic force model, wherein the electrostatic force model is based on a nonlinear tuning mechanism of nonlinear electrostatic force and stopper impact.

[0026] Preferably, the lumped parameter equations of the electromechanical model include: an output electrical port equation and an input mechanical port equation;

[0027] The lumped parameter equation of the electromechanical model is:

[0028] Where C(t) is the total capacitance between the movable electret electrode and the fixed electrode, Q(t) is the charge on the variable capacitor, and V d is a DC voltage source, R l is the external load, z b (t) is the displacement of the vibration table, F r is the total mechanical force, F e is the electrostatic force that provides feedback in the electromechanical system, b m is the damping constant, z(t) is the relative displacement of the inspection mass block M, and m is the mass.

[0029] The present invention also provides a testing method for a broadband electrostatic vibration energy harvester with adjustable response bandwidth. Based on the broadband electrostatic vibration energy harvester with adjustable response bandwidth, the testing method comprises the following steps:

[0030] Fixing the electrostatic vibration energy collector on a vibration table;

[0031] generating a vibration waveform using a corresponding software program;

[0032] The vibration table is driven by a power amplifier to output a DC biased sine wave;

[0033] Measuring the acceleration of the electrostatic vibration energy harvester using an accelerometer;

[0034] Connecting a load resistor to the output port of the electrostatic vibration energy harvester and measuring the output voltage across the load resistor through a high impedance buffer amplifier;

[0035] The output voltages of the electrostatic vibration energy harvester and the accelerometer are read using a data acquisition board and a corresponding software program.

[0036] Preferably, the testing method further comprises: calculating the relationship between the elastic restoring force of the spring plate and the displacement of the inspection mass block based on a finite element method;

[0037] Based on the MATLAB / Simulink model, the relationship between the dynamic power output characteristics and acceleration of the electrostatic vibration energy harvester is simulated.

[0038] Compared with the prior art, the present invention has the following advantages and technical effects:

[0039] The present invention provides a broadband electrostatic vibration energy collector with adjustable response bandwidth. By adjusting the height of the adjusting bolt to adjust the gap between the insulating stop block and the suspension spring plate, the electrostatic vibration energy collector can work in a free mode and a collision mode, providing adaptability to different vibration environments. The present invention enhances the mechanical stability and reliability of the electrostatic vibration energy collector, especially in large displacement and long-term vibration cycles, by designing a suspension spring plate with mass and an insulating stop block with adjustable height.

[0040] The present invention adopts a compact parallel plate structure with enhanced impact resistance, making it more suitable for deployment in actual application environments, especially in remote or difficult-to-access locations. The design of the electrostatic vibration energy harvester allows the output voltage and bandwidth to be optimized by adjusting the gap between the insulating stop block and the suspension spring plate, thereby more efficiently charging energy storage devices such as capacitors and lithium batteries; at the same time, it allows the use of a variety of nonlinear tuning mechanisms, including resonant frequency tuning, multi-peak energy harvesting, nonlinear energy harvesting, and electrical damping tuning to adapt to different environmental vibration conditions. As an alternative to traditional battery-powered power, the e-VEH provides an environmentally friendly sustainable power solution that reduces the need to replace and maintain batteries while reducing the risk of environmental pollution.

[0041] The present invention also provides a testing method for a wide-band electrostatic vibration energy harvester with adjustable response bandwidth. The dynamic power output characteristics of the electrostatic vibration energy harvester are verified, ensuring its performance and stability in practical applications.

[0042] The structure designed in the present invention can be used in cascade to form a dual nonlinear system or a multi-nonlinear system, and then carry out simulation research on coupled oscillators, such as the introduction of dual chaotic oscillators or multi-chaotic oscillators. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0044] Figure 1 (a) is a schematic diagram of the structure of an electrostatic vibration energy harvester according to an embodiment of the present invention, Figure 1 (b) is a structural diagram of the suspension spring plate and its compatible movable electret electrode. Figure 1 (c) is a diagram of the bottom plate and its compatible fixed electrode structure. Figure 1 (d) is a gradient folded beam with an acoustic black hole structure;

[0045] Figure 2 (a) is a configuration in which the gap between the suspension spring plate and the insulating stop block is sufficiently large in the embodiment of the present invention, Figure 2 (b) is a setting where the gap between the suspension spring plate and the insulating stop block is small. Figure 2 (c) Schematic diagram of the electromechanical coupling of the e-VEH when the gap between the suspension spring plate and the insulating stop block is small;

[0046] Figure 3 The mechanical restoring force F and the electrostatic force F of the embodiment of the present invention are e Schematic diagram of the simulation of displacement z;

[0047] Figure 4 A schematic diagram of output power of various resistors according to an embodiment of the present invention;

[0048] Figure 5 is a system simulation block diagram of an embodiment of the present invention;

[0049] Figure 6 The relationship between the gap between the suspension spring plate and the insulating stop block and the system driving force in the embodiment of the present invention;

[0050] Figure 7 It is an overall schematic diagram of a broadband electrostatic vibration energy harvester with adjustable response bandwidth according to an embodiment of the present invention. DETAILED DESCRIPTION

[0051] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0052] It should be noted that the steps shown in the flowcharts of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and that, although a logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0053] Embodiment 1

[0054] like Figure 7 As shown, in this embodiment, a broadband electrostatic vibration energy collector with adjustable response bandwidth is provided, and the electrostatic vibration energy collector is a parallel plate structure, comprising:

[0055] roof;

[0056] Insulation stop block;

[0057] A suspended spring plate with a mass block acts as a movable electret electrode;

[0058] An adjusting bolt, used to control the vertical gap between the suspension spring plate and the insulating stop block;

[0059] A reset spring, used for resetting the insulating stop block;

[0060] A bottom plate, used for supporting and fixing electrodes;

[0061] An insulating support frame, used for supporting the bottom plate, the suspension spring plate, the insulating stop block, and the top plate;

[0062] Wherein, the suspension spring plate is formed by four identical double-clamped gradual folded beams and connected to the mass block;

[0063] The electrostatic vibration energy collector realizes broadband energy collection at different vibration frequencies by adjusting the height of the adjusting bolt.

[0064] Specifically, the electrostatic vibration energy harvester (e-VEH) in this embodiment is designed as a parallel plate capacitor with an out-of-plane gap closure configuration, such as Figure 1 (a), consists of three parallel insulating plates (top plate with stopper, middle suspension spring plate with mass block and movable electret electrode, bottom plate with fixed electrode), insulating support frame and adjustment bolts. The middle movable electrode plate is designed with four identical double-clamped gradient folded beams, e.g. Figure 1 (b) A square bronze plate with a thickness of 0.2 mm and a length of 45 mm is hollow cut. The compact structural design not only increases the length of the flexible beam but also reduces the stiffness of the beam. Figure 1 (d) The folded beam design with a gradient structure not only reduces the stiffness of the beam, but also increases the acoustic black hole effect of the beam. As a result, a nonlinear Duffing spring effect and an acoustic black hole effect are generated in the vibration response. A mass block is installed on the bottom surface of the middle plate. Adjustable bolts are installed in holes in the top plate as distance adjustment elements between the insulating stop block and the suspension spring plate to adjust the suspension spring plate for free vibration or impact vibration and other scene adjustments. The various parts of the energy collector are connected and assembled together by resin glue. The front view of the movable electret electrode and the mass block, as shown in Figure 1 (b) The vertical gap (GBSS) between the suspension spring plate and the insulating stop block can be changed by adjusting the bolt. By changing the GBSS, the e-VEH can operate in two working states, namely, large GBSS gap and small GBSS gap, as shown in Figure 2 (a) Figure 2(b) When the device is driven by external vibration, the capacitance between the movable electret electrode and the fixed electrode changes as the GBSS gap changes. Due to the capacitance change, the induced current flows through the external load, as shown in Figure 2 (c) as shown.

[0065] The electromechanical model corresponding to the small GBSS case is as follows: Figure 2 (b) In this model, the proof mass M oscillates with a relative displacement z(t); K m and b m denote the stiffness and damping constant of the oscillator, respectively. The insulating stopper is modeled as having a stiffness constant K s and the damping constant b s Parallel spring damping system.

[0066] Furthermore, in terms of the collection circuit, it also includes a high-impedance buffer operational amplifier for maintaining signal integrity, and the high-impedance buffer operational amplifier is connected between the measurement point and the data acquisition instrument.

[0067] Specifically, a high impedance buffer op amp with unity gain is placed between the measurement point and the data acquisition instrument to maintain signal integrity. The capacitor is initially connected by a DC voltage source, V d Charging, the induced current flows through the external load R l A two-port representation of a mechanical transducer with an input mechanical port and an output electrical port is shown in Figure 2 (c) as shown.

[0068] Furthermore, the electromechanical model of the electrostatic vibration energy harvester includes a displacement model of the vibration table, a total mechanical force model, and an electrostatic force model, wherein the electrostatic force model is based on a nonlinear tuning mechanism of nonlinear electrostatic force and insulating stopper impact.

[0069] Further, the lumped parameter equations of the electromechanical model include: output electrical port equations and input mechanical port equations;

[0070] The lumped parameter equation of the electromechanical model is:

[0071]

[0072] Where C(t) is the total capacitance between the movable electrode and the fixed electrode, Q(t) is the charge on the variable capacitor, and V d is a DC voltage source, R l is the external load, z b (t) is the displacement of the vibration table, F r is the total mechanical force, F e is the electrostatic force that provides feedback in the electromechanical system, b mis the damping constant, z(t) is the relative displacement of the inspection mass block M, and m is the mass.

[0073] Specifically, the first equation is called the electrical output port and follows Kirchhoff's circuit law. Among them, C(t) can be expressed as:

[0074]

[0075] where z d is the initial gap between the insulating stopper and the movable electret electrode, ε0 and A are the vacuum dielectric constant and the overlapping area between the two electrodes, respectively.

[0076] The second vibration equation is called the input mechanical port, F r It can be expressed as F r =F k +F s . F k is the elastic restoring force generated by the suspension spring plate, F s is the impact force generated by the insulating stop. Based on the spring damping system, F s It can be expressed as:

[0077]

[0078] F e The calculation formula is as follows:

[0079]

[0080] Embodiment 2

[0081] This embodiment provides a test method for a broadband electrostatic vibration energy harvester with adjustable response bandwidth. Based on the broadband electrostatic vibration energy harvester with adjustable response bandwidth described in Embodiment 1, the test method includes the following steps:

[0082] Fixing the electrostatic vibration energy collector on a vibration table;

[0083] generating a vibration waveform using a corresponding software program;

[0084] The vibration table is driven by a power amplifier to output a DC biased sine wave;

[0085] Measuring the acceleration of the electrostatic vibration energy harvester using an accelerometer;

[0086] Connecting a load resistor to the output port of the electrostatic vibration energy harvester and measuring the output voltage across the load resistor through a high impedance buffer amplifier;

[0087] The output voltages of the electrostatic vibration energy harvester and the accelerometer are read using a data acquisition board and a corresponding software program.

[0088] Specifically, the system simulation block diagram is as follows: Figure 5 As shown, experimentally, the e-VEH prototype was fixed in a vibration table (TIRA exciter). The vibrator was driven using a power amplifier that output a DC biased sine wave. An accelerometer (Piezotronics Inc. Model 352A56A) was connected to the e-VEH prototype to measure the changing acceleration. The load resistor on the PCB board was connected to the output port of the e-VEH, and the output voltage (VR) across the resistor was measured through a high impedance buffer amplifier. The output voltages of the e-VEH prototype and the accelerometer were read using a data acquisition board (NI-USB-6211DAQ) and the LabView program of National Instruments.

[0089] The measurement sequence can be used to experimentally determine the optimum load resistance for maximum power output. Figure 4 As shown, for different bias voltages (95V, 65V and 35V respectively), the optimal loads are 3.02MΩ, 4.92MΩ and 5.0MΩ respectively.

[0090] The basic structure of the e-VEH includes two surfaces (electrodes). All or only a portion of each structure is arranged facing each other. One of the surfaces serves as a fixed electrode and the other as a movable electrode. When the electrostatic e-VEH is subjected to external vibration, the vertical gap or overlapping area between the movable electrode and the fixed electrode associated with the detection mass changes, resulting in a change in capacitance. In the case of applying a DC voltage to the electrostatic system, charging and discharging occur in the variable capacitor as the movable electrode vibrates. As a result, an AC current flows through the external load.

[0091] The out-of-plane configuration is usually designed as a parallel-plate structure with a volumetric micromachined mass suspended in a frame above a substrate, so it is very easy to manufacture at low cost. In order to avoid short circuits between the fixed and movable electrodes due to electrostatic forces or electrostatic stiction caused by strong vibrations, an insulating plug is used to limit the displacement of the movable electrode in the out-of-plane e-VEH.

[0092] Furthermore, the test method further includes: calculating the relationship between the elastic restoring force of the spring plate and the displacement of the inspection mass block based on the finite element method; the relationship between the gap between the spring plate and the plug plate and the system restoring force, such as Figure 6 shown.

[0093] Based on the MATLAB / Simulink model, the relationship between the dynamic power output characteristics and acceleration of the electrostatic vibration energy harvester is simulated.

[0094] Specifically, in order to analyze the behavior of the e-VEH, this embodiment uses the finite element method to calculate the relationship between the elastic restoring force of the suspension spring plate and the mass displacement. Figure 3 The COMSOL Multiphysics finite element model and the specific size parameters of the spring plate are shown. The mechanical restoring force F and the electrostatic force F are simulated respectively. e Dependence on the displacement z. Figure 3 As shown in the curve in, the suspension spring plate shows linear mechanical behavior with a constant stiffness k from -0.1 mm to 0.1 mm. l =611N / m, see Figure 1 Illustration of the spring plate. Outside this small displacement range, the suspension spring plate exhibits stiffening nonlinearity in both the positive and negative directions. The finite element simulation results are fitted using an odd polynomial function, and the elastic restoring force F k It can be expressed as:

[0095] F k =607.2709z+3.8127×10 8 z 3 (5)

[0096] When the vertical gap z d When is further adjusted to a small value, i.e., in the case of a small GBSS, the suspension spring plate will hit the stop block within its displacement in the applied frequency range. Since the effective mass of the insulating stop block is negligible compared to the mass of the mass block, the insulating stop block vibrates together with the spring-mass system during the impact. In this process, the effective restoring force of the system is replaced by the impact force F s At the impact point z = 0.025 mm, the restoring force is F k Suddenly changes to F s , after which the nonlinear vibration is caused by the impact force F s Introduction. Using an odd polynomial function to fit the finite element curve, the total restoring force of the small GBSS spring plate can be expressed as:

[0097]

[0098] It should be noted in the equation that the linear function in the case of z = -0.025 mm is obtained by fitting the experimental data based on the impact model given in Eq.

[0099] If the GBSS is adjusted to a negative value by increasing the number of shims in the insulating stopper, the tensile stress caused by the pre-deflection will be applied to the suspension spring plate when all the parts are assembled together, which means that the suspension spring plate is in a condition of excessive GBSS. In the case of an initial pre-deflection H1 = 0.005 mm in the suspension spring plate, the simulated elastic restoring force Fk exhibits a nonlinear dynamic behavior with a bistable characteristic. If the suspension spring plate is in an unstable position, such as the negative stiffness range from -0.03 mm to 0.03 mm, it will spontaneously move in the positive or negative direction to a stable equilibrium position. Due to the limitation of the insulating stopper, when the suspension spring plate moves toward the positive stable equilibrium position, the suspension spring plate hits the stopper at the pre-deflected position (z = -0.005 mm). As a result, the suspension spring plate is brought into a piecewise linear stiffness region. The total restoring force of the suspension spring plate exceeding the GBSS can be expressed as:

[0100]

[0101] By observing the first coefficient of the polynomial function in equation (7), it is found that the stiffness of the suspension spring plate with too large GBSS is twice that of the suspension spring plate with too small GBSS, which means that the main resonant frequency of the VEH with too small GBSS should be twice that of the one with small GBSS. This embodiment can simulate the dynamic power output characteristics of the VEH related to acceleration based on the MATLAB / Simulink model.

[0102] The above are only preferred specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A broadband electrostatic vibration energy harvester with adjustable response bandwidth, characterized in that: The electrostatic vibration energy collector is a parallel plate structure, comprising: roof; Insulation stop block; A suspended spring plate with a mass block acts as a movable electret electrode; An adjusting bolt, used to control the vertical gap between the suspension spring plate and the insulating stop block; A reset spring, used for resetting the insulating stop block; A bottom plate, used for supporting and fixing electrodes; An insulating support frame, used for supporting the bottom plate, the suspension spring plate, the insulating stop block, and the top plate; Wherein, the suspension spring plate is formed by four identical double-clamped gradual folded beams and connected to the mass block; The electrostatic vibration energy collector realizes broadband energy collection at different vibration frequencies by adjusting the height of the adjusting bolt.

2. The broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 1, characterized in that: The electrostatic vibration energy harvester operates in free mode and collision mode to accommodate vibrations in a wide frequency band.

3. The broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 1, characterized in that: The double-clamped tapered folded beam of the suspension spring plate is designed to have an acoustic black hole effect and a nonlinear Duffing effect spring.

4. The broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 1, characterized in that: A high impedance buffer operational amplifier is also included to maintain signal integrity. The high impedance buffer operational amplifier is connected between the measurement point and the data acquisition instrument.

5. The broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 1, characterized in that: The electromechanical model of the electrostatic vibration energy harvester includes a displacement model of the vibration table, a total mechanical force model and an electrostatic force model, wherein the electrostatic force model is based on a nonlinear tuning mechanism of nonlinear electrostatic force and an insulating stopper impact.

6. The broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 5, characterized in that: The lumped parameter equations of the electromechanical model include: output electrical port equations and input mechanical port equations; The lumped parameter equation of the electromechanical model is: Where C(t) is the total capacitance between the movable electrode and the fixed electrode, Q(t) is the charge on the variable capacitor, and V d is a DC voltage source, R l is the external load, z b (t) is the displacement of the vibration table, F r is the total mechanical force, F e is the electrostatic force that provides feedback in the electromechanical system, b m is the damping constant, z(t) is the relative displacement of the inspection mass block M, and m is the mass.

7. A test method for a broadband electrostatic vibration energy harvester with adjustable response bandwidth, characterized in that: Based on the broadband electrostatic vibration energy harvester with adjustable response bandwidth according to any one of claims 1 to 6, the testing method comprises the following steps: Fixing the electrostatic vibration energy harvester on a vibration table; generating a vibration waveform using a corresponding software program; The vibration table is driven by a power amplifier to output a DC biased sine wave; Measuring the acceleration of the electrostatic vibration energy harvester using an accelerometer; Connecting a load resistor to the output port of the electrostatic vibration energy harvester and measuring the output voltage across the load resistor through a high impedance buffer amplifier; The output voltages of the electrostatic vibration energy harvester and the accelerometer are read using a data acquisition board and a corresponding software program.

8. The testing method of the broadband electrostatic vibration energy harvester with adjustable response bandwidth according to claim 7, characterized in that: It also includes: calculating the relationship between the elastic restoring force of the spring plate and the displacement of the mass block based on the finite element method; Based on the MATLAB / Simulink model, the relationship between the dynamic power output characteristics and acceleration of the electrostatic vibration energy harvester is simulated.

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