A method for producing an aluminum evaporation source

Abstract

The application provides a preparation method of aluminum evaporation material, which comprises the following steps: providing aluminum blank, wherein the aluminum blank has at least two surfaces to be processed; sequentially performing first machining and second machining on any surface to be processed to form a cutting surface, and performing shielding treatment on the cutting surface; then sequentially performing the first machining and the second machining on the remaining surfaces to be processed until all the surfaces to be processed form cutting surfaces, thereby obtaining the aluminum evaporation material; the first machining adopts a wire cutting blade, and the second machining adopts a finishing tool. The application solves the problem of damage to the surface of low-hardness raw material in the lathe machining process, and meets the use requirements of the aluminum evaporation material.

Description

Technical Field

[0001] This invention belongs to the field of machining technology and relates to a method for preparing aluminum evaporation material. Background Technology

[0002] Evaporation materials used in semiconductor integrated circuits are indispensable raw materials for wafers. In recent years, with the rapid development of the integrated circuit industry, the demand for aluminum evaporation materials has been increasing, and the purity requirements for evaporation materials have also been rising. When performing surface treatment on high-purity (purity > 4N) aluminum raw materials, lathes are often used for processing. However, due to the low hardness of pure aluminum and the small size of the evaporation material, it is not easy to fix it. If it is not clamped properly, it is easy to create clamping marks on the surface of the raw material, and it may also cause the product to fall off during processing.

[0003] Traditional lathe machining of aluminum ingots can reduce fixture change time and shorten the machining cycle. However, this process can only process aluminum sheets of a certain thickness and is not suitable for smaller aluminum workpieces, thus having certain drawbacks and a limited range of applications. Furthermore, for aluminum raw materials with low hardness, scratches or clamping marks are easily generated during machining, making it impossible to guarantee product quality.

[0004] Therefore, avoiding damage to the surface of low-hardness raw materials during lathe machining is crucial for improving product quality and meeting the requirements for use of evaporation materials. Summary of the Invention

[0005] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a method for preparing aluminum evaporation material. Based on the selection of cutting tools and the adjustment of processing parameters, the method solves the problem of scratches on aluminum evaporation material with low hardness during the preparation process, prevents the appearance of clamp marks or tool marks on the surface of the evaporation material, and improves the product yield.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This invention provides a method for preparing aluminum evaporation material, the method comprising:

[0008] An aluminum billet is provided, the aluminum billet having at least two surfaces to be treated;

[0009] Any surface to be processed is subjected to a first machining operation and a second machining operation in sequence to form a cutting surface, and the cutting surface is then masked.

[0010] Subsequently, the remaining surfaces to be treated are subjected to the first machining and the second machining in sequence until all surfaces to be treated have a cutting surface, thus obtaining aluminum evaporation material;

[0011] The first machining operation uses a wire-opening insert, and the second machining operation uses a precision turning tool.

[0012] This invention uses two types of cutting tools to machine one side of the aluminum billet in sequence, and then the machined side is masked to avoid damaging the surface of the aluminum billet during subsequent machining. The resulting aluminum evaporation material has a smooth surface without scratches, which greatly improves the product yield.

[0013] It should be noted that the shape of the aluminum billet is not specifically limited in this invention. It can be sheet-like, columnar, block-like, regular polyhedron, or irregular polyhedron, etc. The number of surfaces to be treated on the aluminum billet can be two, three, four, five, six, etc., but is not limited to the listed values. After completing the first and second machining operations on the first surface to be treated, a first cutting surface is formed and then masked. Then, the second surface to be treated is machined to form a second cutting surface and then masked. Finally, the third surface to be treated is machined, and so on, until all surfaces to be treated are processed, thus obtaining the aluminum evaporation material.

[0014] As a preferred embodiment of the present invention, the purity of the aluminum billet is ≥99.99%.

[0015] Preferably, the Vickers hardness of the aluminum billet is 35 to 50 HV, for example, it can be 35 HV, 36 HV, 38 HV, 40 HV, 43 HV, 45 HV, 46 HV, 48 HV or 50 HV, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0016] Preferably, the aluminum billet has a block structure.

[0017] As a preferred embodiment of the present invention, in the first machining process, the rotational speed of the wire-opening blade is 500 to 700 rpm, for example, it can be 500 rpm, 520 rpm, 540 rpm, 550 rpm, 560 rpm, 600 rpm, 630 rpm, 650 rpm, 660 rpm, 680 rpm or 700 rpm, but it is not limited to the listed values, and other unlisted values ​​within this range are also applicable.

[0018] Preferably, the feed rate of the wire-opening blade is 0.1 to 0.2 mm / min, for example, it can be 0.1 mm / min, 0.11 mm / min, 0.12 mm / min, 0.13 mm / min, 0.14 mm / min, 0.15 mm / min, 0.16 mm / min, 0.17 mm / min, 0.18 mm / min, 0.19 mm / min or 0.2 mm / min, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0019] Preferably, the cutting depth of the wire-opening blade is 0.2–0.5 mm / cut, for example, it can be 0.2 mm / cut, 0.22 mm / cut, 0.24 mm / cut, 0.25 mm / cut, 0.28 mm / cut, 0.3 mm / cut, 0.32 mm / cut, 0.35 mm / cut, 0.36 mm / cut, 0.38 mm / cut, 0.4 mm / cut, 0.42 mm / cut, 0.45 mm / cut, 0.46 mm / cut, 0.48 mm / cut, or 0.5 mm / cut, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0020] Preferably, the material of the wire-opening blade is any one or a combination of at least two of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide, or diamond.

[0021] As a preferred embodiment of the present invention, in the second machining process, the rotational speed of the finishing tool is 600 to 800 rpm, for example, it can be 600 rpm, 620 rpm, 640 rpm, 650 rpm, 680 rpm, 700 rpm, 720 rpm, 740 rpm, 750 rpm, 780 rpm or 800 rpm, but it is not limited to the listed values, and other unlisted values ​​within this range are also applicable.

[0022] Preferably, the feed rate of the finishing tool is 0.05 to 0.07 mm / min, for example, it can be 0.05 mm / min, 0.052 mm / min, 0.053 mm / min, 0.054 mm / min, 0.055 mm / min, 0.056 mm / min, 0.058 mm / min, 0.06 mm / min, 0.062 mm / min, 0.063 mm / min, 0.064 mm / min, 0.065 mm / min, 0.066 mm / min, 0.068 mm / min or 0.07 mm / min, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0023] Preferably, the depth of cut of the finishing tool is 0.02 to 0.1 mm / cut, for example, it can be 0.02 mm / cut, 0.025 mm / cut, 0.03 mm / cut, 0.035 mm / cut, 0.04 mm / cut, 0.045 mm / cut, 0.05 mm / cut, 0.055 mm / cut, 0.06 mm / cut, 0.065 mm / cut, 0.07 mm / cut, 0.075 mm / cut, 0.08 mm / cut, 0.085 mm / cut, 0.09 mm / cut, or 0.1 mm / cut, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0024] Preferably, the material of the precision turning tool is any one or a combination of at least two of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide, or diamond.

[0025] As a preferred embodiment of the present invention, the masking process includes: covering the cutting surface with protective tape.

[0026] After processing one side of the surface, the present invention shields and protects that side surface to prevent scratches and ensure that the outer surface of the aluminum billet is smooth and flat.

[0027] As a preferred embodiment of the present invention, the width of the protective tape is ≤25mm.

[0028] Preferably, the thickness of the protective tape is 0.05 to 0.5 mm, for example, it can be 0.05 mm, 0.1 mm, 0.15 mm, 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm or 0.5 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0029] Preferably, the protective tape is Teflon tape.

[0030] The protective tape used in this invention is heat-resistant, not easily broken, and has appropriate adhesion, thus avoiding damage to the outer surface of the aluminum billet.

[0031] As a preferred embodiment of the present invention, the preparation method further includes: after the second machining is completed, removing the protective tape on the cutting surface and cleaning the aluminum evaporation material.

[0032] Preferably, the cleaning process is ultrasonic cleaning.

[0033] Preferably, the temperature of the cleaning process is 20 to 35°C, for example, 20°C, 23°C, 24°C, 25°C, 26°C, 28°C, 30°C, 32°C, 33°C, 34°C or 35°C, but is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0034] Preferably, the cleaning process takes 10 to 20 minutes, for example, 10 minutes, 11 minutes, 12 minutes, 13 minutes, 14 minutes, 15 minutes, 16 minutes, 17 minutes, 18 minutes, 19 minutes or 20 minutes, but is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0035] As a preferred embodiment of the present invention, the preparation method further includes: clamping and fixing the aluminum billet on a lathe using a fixture, and then performing the first machining and the second machining in sequence.

[0036] Preferably, the clamp is an aluminum clamp.

[0037] This invention selects clamps based on the dimensions of the aluminum billet. It aims to avoid not only excessive clamping force that could cause clamping marks on the surface of the aluminum billet, but also to prevent insufficient clamping force that could cause the billet to fall off during processing, thereby affecting the machining effect.

[0038] As a preferred embodiment of the present invention, the second machining process uses turning fluid.

[0039] Preferably, the volume concentration of the machining fluid is 5-10%, for example, it can be 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10%, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0040] The turning fluid of this invention has strong lubrication and cooling properties, reducing friction between the finishing tool and the aluminum blank, and cooling the heat generated by friction, thus effectively improving machining efficiency. This invention does not specifically limit the type of turning fluid; any type known to those skilled in the art for turning can be used. For example, an aqueous solution of an emulsion can be employed.

[0041] As a preferred embodiment of the present invention, the surface roughness Ra of the aluminum evaporation material is 0.1 to 0.5 μm, for example, it can be 0.1 μm, 0.15 μm, 0.2 μm, 0.25 μm, 0.3 μm, 0.35 μm, 0.4 μm, 0.45 μm or 0.5 μm, but is not limited to the listed values, other unlisted values ​​within this range are also applicable.

[0042] The numerical range described in this invention includes not only the point values ​​listed above, but also any point values ​​within the numerical ranges not listed above. Due to space limitations and for the sake of brevity, this invention will not exhaustively list all the specific point values ​​included in the range.

[0043] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0044] The present invention provides a method for preparing aluminum evaporation material, which improves the success rate of aluminum evaporation material processing by controlling the lathe processing parameters, and solves the problem of product scratches by shielding and protecting the cutting surface of the blank during the processing, so that the surface of the aluminum evaporation material is smooth and complete, with a wide range of applications, and improves the surface quality of the product while ensuring processing efficiency. Detailed Implementation

[0045] It should be understood that in the description of this invention, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0046] The technical solution of the present invention will be further illustrated below through specific embodiments.

[0047] This invention provides a method for preparing aluminum evaporation material, the method comprising:

[0048] (1) Provide aluminum billet, wherein the purity of the aluminum billet is ≥99.99% and its Vickers hardness is 35-50HV. The aluminum billet has at least two surfaces to be treated. Select an aluminum fixture that is suitable for the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on a lathe.

[0049] (2) The first machining is performed on any surface of the aluminum billet using a wire-cutting blade. The rotation speed of the wire-cutting blade is 500-700 rpm, the feed rate is 0.1-0.2 mm / min, and the depth of cut is 0.2-0.5 mm / cut. The material of the wire-cutting blade is any one or at least a combination of two of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide, or diamond.

[0050] (3) The surface to be processed in step (2) is then machined a second time using a precision turning tool to form a cutting surface. The rotation speed of the precision turning tool is 600-800 rpm, the feed rate is 0.05-0.07 mm / min, and the depth of cut is 0.02-0.1 mm / cut. The material of the precision turning tool is any one or at least a combination of two of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide, or diamond.

[0051] (4) Remove the finished aluminum billet and cover the cutting surface with protective tape for masking. The protective tape used is Teflon tape, with a width of ≤25mm and a thickness of 0.05~0.5mm.

[0052] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and second machining on the remaining surfaces to be processed of the aluminum billet in sequence until all surfaces to be processed form cutting surfaces.

[0053] (6) Remove the protective tape from the surface to obtain aluminum evaporation material, and the surface roughness Ra of the aluminum evaporation material is 0.1 to 0.5 μm.

[0054] In some embodiments, the preparation method further includes: removing the protective tape from the cutting surface and cleaning the aluminum evaporation material. Specifically, the cleaning process is ultrasonic cleaning, with a temperature of 20–35°C and a time of 10–20 minutes.

[0055] In some embodiments, the second machining operation uses a turning fluid with a volume concentration of 5-10%.

[0056] Example 1

[0057] This embodiment provides a method for preparing aluminum evaporation material, which specifically includes the following steps:

[0058] (1) Provide aluminum billet with a purity of 99.996% and a Vickers hardness of 45HV. The aluminum billet has a tetrahedral block structure with four surfaces to be processed. Select an aluminum fixture that matches the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on the lathe.

[0059] (2) The first machining is performed on any surface of the aluminum billet using a wire-cutting blade. The rotation speed of the wire-cutting blade is 600 rpm, the feed rate is 0.15 mm / min, the depth of cut is 0.4 mm / cut, and the material of the wire-cutting blade is diamond.

[0060] (3) The surface to be processed in step (2) is machined a second time using a precision turning tool to form a cutting surface. The speed of the precision turning tool is 700 rpm, the feed rate is 0.06 mm / min, the depth of cut is 0.05 mm / cut, the material of the precision turning tool is diamond, and a cutting fluid with a volume concentration of 8% is used in the second machining process.

[0061] (4) Remove the finished aluminum billet and cover the cutting surface with Teflon tape. The width of the Teflon tape is 22mm and the thickness is 0.3mm.

[0062] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and second machining on the remaining surfaces to be processed of the aluminum billet in sequence until all four surfaces to be processed are formed with cutting surfaces.

[0063] (6) Remove the protective tape from the surface to obtain aluminum evaporation material. Perform ultrasonic cleaning on the aluminum evaporation material at a temperature of 30°C for 15 minutes.

[0064] Example 2

[0065] This embodiment provides a method for preparing aluminum evaporation material, which specifically includes the following steps:

[0066] (1) Provide aluminum billet with a purity of 99.993% and a Vickers hardness of 35HV. The aluminum billet has a hexahedral block structure with six surfaces to be treated. Select an aluminum fixture that is compatible with the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on the lathe.

[0067] (2) The first machining is performed on any surface of the aluminum billet using a wire-cutting blade. The rotation speed of the wire-cutting blade is 500 rpm, the feed rate is 0.2 mm / min, the depth of cut is 0.2 mm / cut, and the material of the wire-cutting blade is diamond.

[0068] (3) The surface to be processed in step (2) is machined a second time using a precision turning tool to form a cutting surface. The speed of the precision turning tool is 600 rpm, the feed rate is 0.07 mm / min, the depth of cut is 0.02 mm / cut, the material of the precision turning tool is diamond, and a cutting fluid with a volume concentration of 5% is used in the second machining process.

[0069] (4) Remove the finished aluminum billet and wrap the cutting surface with Teflon tape. The width of the Teflon tape is 20mm and the thickness is 0.05mm.

[0070] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and second machining on the remaining surfaces to be processed of the aluminum billet in sequence until all six surfaces to be processed are formed with cutting surfaces.

[0071] (6) Remove the protective tape from the surface to obtain aluminum evaporation material. Perform ultrasonic cleaning on the aluminum evaporation material at a temperature of 25°C for 20 minutes.

[0072] Example 3

[0073] This embodiment provides a method for preparing aluminum evaporation material, which specifically includes the following steps:

[0074] (1) Provide aluminum billet with a purity of 99.998% and a Vickers hardness of 50HV. The aluminum billet has a tetrahedral block structure with four surfaces to be processed. Select an aluminum fixture that is compatible with the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on the lathe.

[0075] (2) The first machining is performed on any surface of the aluminum billet using a wire-cutting blade. The speed of the wire-cutting blade is 550 rpm, the feed rate is 0.12 mm / min, the depth of cut is 0.3 mm / cut, and the material of the wire-cutting blade is tungsten carbide-based cemented carbide.

[0076] (3) The surface to be processed in step (2) is machined a second time using a precision turning tool to form a cutting surface. The speed of the precision turning tool is 650 rpm, the feed rate is 0.06 mm / min, the depth of cut is 0.04 mm / cut, the material of the precision turning tool is tungsten carbide-based cemented carbide, and a cutting fluid with a volume concentration of 6% is used in the second machining process.

[0077] (4) Remove the finished aluminum billet and cover the cutting surface with Teflon tape. The width of the Teflon tape is 25mm and the thickness is 0.2mm.

[0078] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and second machining on the remaining surfaces to be processed of the aluminum billet in sequence until all four surfaces to be processed are formed with cutting surfaces.

[0079] (6) Remove the protective tape from the surface to obtain aluminum evaporation material. Perform ultrasonic cleaning on the aluminum evaporation material at a temperature of 28°C for 18 minutes.

[0080] Example 4

[0081] This embodiment provides a method for preparing aluminum evaporation material, which specifically includes the following steps:

[0082] (1) Provide aluminum billet with a purity of 99.995% and a Vickers hardness of 40HV. The aluminum billet has a hexahedral block structure with six surfaces to be treated. Select an aluminum fixture that matches the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on the lathe.

[0083] (2) The first machining is performed on any surface of the aluminum billet using a wire-cutting blade. The speed of the wire-cutting blade is 650 rpm, the feed rate is 0.18 mm / min, the depth of cut is 0.4 mm / cut, and the material of the wire-cutting blade is tungsten carbide-based cemented carbide.

[0084] (3) The surface to be processed in step (2) is machined a second time using a precision turning tool to form a cutting surface. The speed of the precision turning tool is 750 rpm, the feed rate is 0.065 mm / min, the depth of cut is 0.08 mm / cut, the material of the precision turning tool is tungsten carbide-based cemented carbide, and a cutting fluid with a volume concentration of 7% is used in the second machining process.

[0085] (4) Remove the finished aluminum billet and wrap the cutting surface with Teflon tape. The width of the Teflon tape is 24mm and the thickness is 0.4mm.

[0086] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and second machining on the remaining surfaces to be processed of the aluminum billet in sequence until all six surfaces to be processed are formed with cutting surfaces.

[0087] (6) Remove the protective tape from the surface to obtain aluminum evaporation material. Perform ultrasonic cleaning on the aluminum evaporation material at a temperature of 32°C for 12 minutes.

[0088] Example 5

[0089] This embodiment provides a method for preparing aluminum evaporation material, which specifically includes the following steps:

[0090] (1) Provide aluminum billet with a purity of 99.995% and a Vickers hardness of 45HV. The aluminum billet has a sheet structure with a first surface and a second surface. Select an aluminum fixture that is suitable for the size of the aluminum billet and use the aluminum fixture to clamp and fix the aluminum billet on the lathe.

[0091] (2) The first surface is machined by using a wire-cutting insert. The rotation speed of the wire-cutting insert is 700 rpm, the feed rate is 0.1 mm / min, the depth of cut is 0.5 mm / cut, and the material of the wire-cutting insert is tungsten carbide-based cemented carbide.

[0092] (3) The first surface in step (2) is machined a second time using a precision turning tool to form a cutting surface. The speed of the precision turning tool is 800 rpm, the feed rate is 0.065 mm / min, the depth of cut is 0.06 mm / cut, the material of the precision turning tool is tungsten carbide-based cemented carbide, and a cutting fluid with a volume concentration of 10% is used in the second machining process.

[0093] (4) Remove the finished aluminum billet and cover the cutting surface with Teflon tape. The width of the Teflon tape is 23mm and the thickness is 0.1mm.

[0094] (5) Then flip the aluminum billet over and use the aluminum clamp to clamp and fix the aluminum billet on the lathe again. Repeat steps (2) and (3) to perform the first machining and the second machining on the second surface of the aluminum billet in sequence to form the cutting surface.

[0095] (6) Remove the protective tape from the surface to obtain aluminum evaporation material. Perform ultrasonic cleaning on the aluminum evaporation material at a temperature of 35°C for 10 minutes.

[0096] Example 6

[0097] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (2), the rotation speed of the wire-opening blade is 450 rpm, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0098] Example 7

[0099] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (2), the rotation speed of the wire-opening blade is 750 rpm, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0100] Example 8

[0101] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (2), the feed rate of the wire-opening blade is 0.05 mm / min, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0102] Example 9

[0103] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (2), the feed rate of the wire-opening blade is 0.3 mm / min, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0104] Example 10

[0105] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (3), the rotation speed of the precision turning tool is 550 rpm, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0106] Example 11

[0107] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (3), the rotation speed of the precision turning tool is 850 rpm, and the other operation steps and process parameters are the same as in Embodiment 1.

[0108] Example 12

[0109] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (3), the feed rate of the precision turning tool is 0.03 mm / min, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0110] Example 13

[0111] This embodiment provides a method for preparing aluminum evaporation material. The difference from Embodiment 1 is that in step (3), the feed rate of the precision turning tool is 0.08 mm / min, and the remaining operation steps and process parameters are the same as in Embodiment 1.

[0112] Comparative Example 1

[0113] This comparative example provides a method for preparing aluminum evaporation material. The difference from Example 1 is that protective tape was not used for masking. The remaining operation steps and process parameters are the same as in Example 1.

[0114] Comparative Example 2

[0115] This comparative example provides a method for preparing aluminum evaporation material. The difference from Example 1 is that in step (2), a roughing tool is used to replace the wire-opening blade, while the remaining operation steps and process parameters are the same as in Example 1.

[0116] Comparative Example 3

[0117] This comparative example provides a method for preparing aluminum evaporation material. The difference from Example 1 is that in step (3), a wire-opening blade is used to replace the precision turning tool, while the remaining operation steps and process parameters are the same as in Example 1.

[0118] The surface roughness of the aluminum evaporation materials prepared in Examples 1-13 and Comparative Examples 1-3 of the present invention is shown in Table 1. At the same time, the appearance of scratches on the outer surface of the aluminum evaporation materials was observed, and the results are shown in Table 1.

[0119] Table 1

[0120]

[0121]

[0122] As can be seen from Table 1, by controlling the process parameters of the first and second machining processes in Embodiments 1 to 13 of the present invention, the roughness of the outer surface of the aluminum evaporation material can be effectively reduced, and the resulting aluminum evaporation material is smooth and flat without any scratches.

[0123] Compared to Example 1, Comparative Example 1 did not use protective tape to mask the cutting surface after the first machining process. During the second machining process, the precision turning tool scratched the cutting surface, forming scratches on the outer surface of the aluminum evaporation material and increasing the roughness of the product.

[0124] As can be seen from Example 1, Comparative Example 1 and Comparative Example 2, Example 1 uses a combination of a wire-opening blade and a precision turning tool to process aluminum billets, which can more effectively reduce the surface roughness of the product to meet the usage requirements.

[0125] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method of producing an aluminum evaporation charge, characterized by, The preparation method comprises the following steps: providing an aluminum blank, the aluminum blank having at least two surfaces to be processed; sequentially performing first machining and second machining on any surface to be processed to form a cutting surface, and performing shielding treatment on the cutting surface; then sequentially performing the first machining and the second machining on the remaining surfaces to be processed until all the surfaces to be processed form cutting surfaces, thereby obtaining an aluminum evaporation material; the first machining adopts a wire cutting blade, and the second machining adopts a finishing tool.

2. The production method according to claim 1, characterized by, The purity of the aluminum blank is greater than or equal to 99.99%; The Vickers hardness of the aluminum blank is 35-50 HV; The aluminum blank has a block structure.

3. The production method according to claim 1 or 2, characterized by, In the first machining, the rotating speed of the wire cutting blade is 500-700 rpm; The feeding amount of the wire cutting blade is 0.1-0.2 mm / min; The cutting amount of the wire cutting blade is 0.2-0.5 mm / tooth; The material of the wire cutting blade is any one or a combination of at least two of tungsten carbide-based hard alloy, titanium carbide-based hard alloy or diamond.

4. The production method according to claim 1 or 2, characterized by, In the second machining, the rotating speed of the finishing tool is 600-800 rpm; The feeding amount of the finishing tool is 0.05-0.07 mm / min; The cutting amount of the finishing tool is 0.02-0.1 mm / tooth; The material of the finishing tool is any one or a combination of at least two of tungsten carbide-based hard alloy, titanium carbide-based hard alloy or diamond.

5. The preparation method according to claim 1, characterized in that, The shielding treatment comprises: wrapping the cutting surface with a protective tape.

6. The production method according to claim 5, wherein The width of the protective tape is less than or equal to 25 mm; The thickness of the protective tape is 0.05-0.5 mm; The protective tape is a Teflon tape.

7. The production method according to claim 5 or 6, characterized by, The preparation method further comprises: after the second machining is completed, removing the protective tape on the cutting surface, and performing cleaning treatment on the aluminum evaporation material.

8. The production method according to claim 7, characterized by, The cleaning treatment is ultrasonic cleaning; The temperature of the cleaning treatment is 20-35 ℃; The time of the cleaning treatment is 10-20 min.

9. The method of claim 1, wherein, The preparation method further comprises: clamping and fixing the aluminum blank on a lathe by using a clamp, and then sequentially performing the first machining and the second machining; The clamp is an aluminum clamp.

10. The method of claim 1, wherein, The second machining adopts turning fluid; The volume concentration of the turning fluid is 5-10%.

11. The method of claim 1, wherein, The roughness Ra of the outer surface of the aluminum evaporation material is 0.1-0.5 μm.

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