Concentric shaft clamping assembly of quartz claw

Abstract

The invention relates to the technical field of quartz product processing, in particular to a concentric shaft clamping assembly of a quartz claw, and the quartz claw comprises a shaft rod and a plurality of supporting claws arranged on the shaft rod; the clamping assembly is characterized in that the clamping assembly comprises a mounting frame; the concentric shaft is of a hollow structure and is vertically arranged on the mounting frame; the two sets of clamping parts are arranged at the two ends of the concentric shaft correspondingly, and after the shaft rod is embedded into the concentric shaft, the two sets of clamping parts clamp the parts, located at the two ends of the concentric shaft, of the shaft rod correspondingly; wherein the concentric shaft can be rotationally arranged on the mounting frame by taking the axis of the concentric shaft as a rotating center. Through ingenious combination and accurate installation of the upper flange, the lower flange, the connecting column, the bearing and other parts, rotation of the concentric shaft can be achieved, and it can be ensured that the concentric shaft is kept stable, accurate and reliable in the rotating process.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz product processing, and more particularly to a concentric shaft clamping assembly for quartz claws. Background Art

[0002] With the rapid development of the chip industry, the semiconductor equipment industry has also developed rapidly. As an important component in semiconductor equipment, the demand for quartz products is also growing.

[0003] As a key component in semiconductor epitaxial equipment, the design, manufacturing and testing of quartz claws must meet extremely high precision standards to ensure that the wafer can maintain a relatively stable horizontal state in a complex process environment, which is crucial to ensuring product quality.

[0004] The structure of the quartz claw is mainly composed of two core parts: the shaft part and the support claw part. As the center of support and rotation, the shaft part needs to have excellent mechanical strength and meet precise dimensional tolerances; while the support claw part is responsible for carrying and fixing the wafer, and its design must fully consider the size, shape and weight distribution of the wafer to ensure balanced force and reduce vibration and deviation.

[0005] The processing method of quartz claws is to process the shaft and the support claws separately on the CNC machine tool, and then weld the shaft and the support claws together. After welding, annealing and grinding are required. After processing, the size of the product and the verticality of the support claws need to be repeatedly corrected.

[0006] A Chinese invention patent application with publication number CN115557683A discloses a quartz shaft product processing jig, and its specification records "angle adjustment fixture, high-precision rotary lifting platform". The shaft rod is clamped and its height can be adjusted through these two components. However, for the above-mentioned fixture, not only is the structure complex and many parts are used, but also the shaft rod cannot be rotated after clamping, and thus the verticality of the plane formed by the tops of the several supporting claws and the center line of the shaft rod cannot be guaranteed. Summary of the invention

[0007] The main purpose of the present invention is to provide a concentric shaft clamping assembly for quartz claws to solve the technical problems mentioned in the background technology.

[0008] In order to solve the above technical problems, the present invention proposes a concentric axis clamping assembly of a quartz claw, the quartz claw comprising: a shaft and a plurality of supporting claws arranged on the shaft; wherein the clamping assembly comprises:

[0009] Mounting frame;

[0010] The concentric shaft is a hollow structure and is vertically arranged on the mounting frame;

[0011] The clamping parts have two groups and are respectively arranged at the two ends of the concentric shaft. After the shaft rod is embedded in the concentric shaft, the two groups of clamping parts respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft.

[0012] The concentric shaft can be rotatably arranged on the mounting frame with its axis as the rotation center.

[0013] In this technical solution, the shaft of the quartz claw is inserted into the interior of the coaxial shaft; then, the clamping part is operated to clamp the inserted end of the shaft. Since the concentric shaft can rotate freely with its axis as the center of rotation, the processing and inspection of the quartz claw can be easily realized, which greatly improves work efficiency and processing accuracy.

[0014] In the above technical solution, further, the mounting frame includes: an upper flange; a lower flange; and a connecting column for connecting the upper flange and the lower flange;

[0015] Among them, bearings are arranged in the middle of the upper flange and the lower flange, and the coaxial shaft is rotatably arranged on the upper flange and the lower flange through the bearings, and its two ends pass through and extend out of the upper flange and the lower flange respectively.

[0016] By adopting the ingenious combination and precise installation of the upper flange, lower flange, connecting column and bearing, it can be ensured that the concentric shaft remains stable, precise and reliable during the rotation process.

[0017] In any of the above technical solutions, further, the connecting column is a hexagonal stud, and both ends of the hexagonal stud are connected to the upper flange and the lower flange by screws.

[0018] The design of using hexagonal studs as connecting columns and connecting with the upper flange and lower flange through screws can not only provide a stable connection and support, but also facilitate installation, disassembly and maintenance.

[0019] In any of the above technical solutions, further, both ends of the concentric shaft are provided with tapered grooves, and the diameter of the tapered grooves gradually decreases from the outside to the inside; the clamping part includes:

[0020] A collet having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove;

[0021] The nut has a threaded hole at one end and is threadedly connected to the outer wall of the end of the coaxial shaft, and a tapered hole at the other end and is adapted to the tapered structure of one end of the collet extending out of the coaxial shaft;

[0022] Wherein, both ends of the collet are provided with openings, so that when the collet is squeezed by the nut and the coaxial shaft, the diameter of the hollow chamber on the collet can be reduced to clamp the shaft.

[0023] Through the cooperation of the concentric shaft, tapered groove, collet and nut, the clamping part can effectively clamp the shaft rod. This design is not only simple in structure but also easy to operate. The shaft rod can be clamped or loosened by rotating the nut, which is very suitable for application scenarios of quartz claw processing and detection.

[0024] In any of the above technical solutions, further, there are multiple openings, which are distributed along the circumferential direction of the collet. By providing multiple openings, the outer wall of the collet can be easily deformed after being squeezed by the outside (nut) to clamp the shaft rod.

[0025] In any of the above technical solutions, further, an annular groove is provided radially inwardly on the outer wall of the collet, so that the collet can clamp the shaft more effectively.

[0026] In any of the above technical solutions, further, the outer wall of the nut is provided with knurling to facilitate the staff to rotate the nut.

[0027] Beneficial effects: Compared with the prior art, the concentric shaft can be ensured to remain stable, precise and reliable during rotation by adopting the ingenious combination and precise installation of the upper flange, the lower flange, the connecting column and the bearing. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a schematic diagram of the structure of the quartz claw;

[0030] Figure 2 yes Figure 1 The enlarged view of point A in the middle;

[0031] Figure 3 It is a schematic diagram of the explosion structure of the present invention;

[0032] Figure 4 It is a schematic structural diagram of the quartz clamping claw of the present invention;

[0033] Figure 5 It is a schematic diagram of the internal structure of the clamping quartz claw of the present invention.

[0034] The following are the descriptions of the reference numerals:

[0035] 100, quartz claw; 101, shaft; 102, supporting claw; 103, small hole; 110, mounting frame; 111, upper flange; 112, lower flange; 113, connecting column; 120, concentric axis; 130, clamping part; 131, collet; 1311, opening; 1312, annular groove; 132, nut. DETAILED DESCRIPTION

[0036] Below, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that, as shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not specifically refer to the singular, but may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0038] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0039] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0041] like Figure 1-Figure 2 As shown, the quartz claw 100 is mainly composed of a cylindrical shaft 101 and a supporting claw 102. Generally, there are three supporting claws 102, which are evenly distributed on the upper end of the shaft 101 along the circumferential direction. The three supporting claws 102 are used to carry and fix the wafer. A small hole 103 is also opened at the upper end of the supporting claw 102 to play a fixing role. In order to facilitate the processing and testing of the quartz claw, a coaxial axis clamping assembly is provided for this purpose. The coaxial axis clamping assembly can not only clamp quartz claws 100 of different specifications, but also enable them to rotate, and can also ensure that the rotation axis of the quartz claw 100 coincides with the axis of the shaft 101 of the quartz claw 100.

[0042] The following embodiments will be used to describe in detail a concentric axis clamping assembly of a quartz claw of the present application.

[0043] Embodiment 1:

[0044] like Figure 1-Figure 5 As shown, in this embodiment, a concentric shaft clamping assembly of a quartz claw includes: a mounting frame 110; a concentric shaft 120, which is a hollow structure and is vertically arranged on the mounting frame 110; a clamping part 130, which has two groups and is respectively arranged at both ends of the concentric shaft 120. After the shaft rod is embedded in the concentric shaft 120, the two groups of clamping parts 130 respectively clamp the parts of the shaft rod located at both ends of the concentric shaft 120;

[0045] The concentric shaft 120 can be rotatably disposed on the mounting frame 110 with its axis as the rotation center.

[0046] First, insert the shaft of the quartz claw into the concentric shaft 120; then, operate the clamping part 130 to clamp the inserted end of the shaft. Since the concentric shaft 120 can rotate freely with its axis as the center of rotation, the quartz claw can be easily processed and tested, which greatly improves work efficiency and processing accuracy.

[0047] In this embodiment, it should be noted that the mounting frame 110 includes: an upper flange 111; a lower flange 112; and a connecting column 113 for connecting the upper flange 111 and the lower flange 112;

[0048] Among them, bearings are provided in the middle of the upper flange 111 and the lower flange 112, and the coaxial shaft 120 is rotatably provided on the upper flange 111 and the lower flange 112 through the bearings, and its two ends pass through and extend out of the upper flange 111 and the lower flange 112 respectively.

[0049] The upper flange 111 and the lower flange 112 are the main load-bearing and positioning components of the mounting frame 110. They are located at the top and bottom of the mounting frame 110, respectively, and are tightly connected through the connecting column 113 to form a stable support frame. The bearing is a crucial component of the mounting frame 110, which is installed in the middle of the upper flange 111 and the lower flange 112, respectively, to support the concentric shaft 120 and allow it to rotate freely with the axis as the rotation center.

[0050] By adopting the ingenious combination and precise installation of the upper flange 111, the lower flange 112, the connecting column 113 and the bearing, it can be ensured that the coaxial shaft 120 remains stable, precise and reliable during the rotation process.

[0051] Embodiment 2:

[0052] This embodiment is a further improvement made on the basis of the first embodiment.

[0053] like Figure 3 and Figure 4 As shown, in this embodiment, the connecting column 113 is a hexagonal stud, and both ends of the hexagonal stud are connected to the upper flange 111 and the lower flange 112 by screws.

[0054] The design of using hexagonal studs as the connecting columns 113 and connecting the upper flange 111 and the lower flange 112 by screws can not only provide a stable connection and support function, but also facilitate installation, disassembly and maintenance work.

[0055] Embodiment three:

[0056] This embodiment is a further improvement made on the basis of the first and second embodiments.

[0057] like Figure 3-Figure 5As shown, in this embodiment, conical grooves are provided at both ends of the concentric shaft 120, and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping part 130 includes: a collet 131, which has a hollow chamber for the shaft to pass through, and the outer walls of both ends are conical structures, and the outer wall of one end is adapted to the conical groove, and the end is embedded in the conical groove, and the other end is located outside the conical groove; a nut 132, one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the concentric shaft 120, and the other end hole is a conical hole and is adapted to the conical structure of one end of the collet 131 extending out of the concentric shaft 120;

[0058] Both ends of the collet 131 are provided with openings 1311 , so that when the collet 131 is squeezed by the nut 132 and the coaxial shaft 120 , the diameter of the hollow chamber therein can be reduced to clamp the shaft.

[0059] In this embodiment, through the mutual cooperation of the concentric shaft 120, the tapered groove, the collet 131 and the nut 132, the clamping portion 130 can effectively clamp the shaft rod. Moreover, this design is not only simple in structure but also easy to operate. The shaft rod can be clamped or loosened by rotating the nut 132, which is very suitable for application scenarios of quartz claw processing and detection.

[0060] Specifically, after the shaft rod is inserted into the coaxial shaft 120, by rotating the nut 132, when the inner wall of the tapered hole on the nut 132 abuts against the tapered surface of the upper end of the collet 131 and an external force is applied, the collet 131 will move into the coaxial shaft 120. During the movement, the interior of the collet 131 gradually shrinks and abuts against the shaft rod, thereby clamping the shaft rod.

[0061] It should be noted that there are multiple openings 1311, which are distributed along the circumferential direction of the collet 131. By providing multiple openings 1311, the outer wall of the collet 131 can be easily deformed after being squeezed by the outside (nut 132) to clamp the shaft.

[0062] It should be noted that the outer wall of the nut 132 is provided with knurling to facilitate the staff to rotate the nut 132.

[0063] Embodiment 4:

[0064] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0065] like Figure 3 As shown, in this embodiment, an annular groove 1312 is arranged radially inward on the outer wall of the collet 131, and the annular groove 1312 is located between the two conical structures. This arrangement enables the collet 131 to clamp the shaft more effectively.

[0066] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A concentric axis clamping assembly for a quartz claw, the quartz claw comprising: A shaft and a plurality of supporting claws arranged on the shaft; characterized in that the clamping assembly comprises: A mounting frame (110); A concentric shaft (120) having a hollow structure and vertically disposed on the mounting frame (110); The clamping parts (130) have two groups and are respectively arranged at the two ends of the concentric shaft (120); after the shaft rod is embedded in the concentric shaft (120), the two groups of clamping parts (130) respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft (120); The concentric shaft (120) is rotatably arranged on the mounting frame (110) with its axis as the rotation center.

2. The concentric axis clamping assembly of the quartz claw according to claim 1, characterized in that: The mounting frame (110) comprises: Upper flange (111); Lower flange (112); and a connecting column (113) for connecting the upper flange (111) and the lower flange (112); The concentric shaft (120) is arranged on the upper flange (111) and the lower flange (112), and two ends thereof pass through and extend out of the upper flange (111) and the lower flange (112) respectively.

3. The concentric axis clamping assembly of the quartz claw according to claim 2, characterized in that: The middle parts of the upper flange (111) and the lower flange (112) are both provided with bearings, and the concentric shaft (120) is rotatably arranged on the upper flange (111) and the lower flange (112) through the bearings.

4. The concentric axis clamping assembly of the quartz claw according to claim 2, characterized in that: The connecting column (113) is a hexagonal stud, and both ends of the hexagonal stud are connected to the upper flange (111) and the lower flange (112) by screws.

5. The concentric axis clamping assembly of the quartz claw according to any one of claims 1 to 4, characterized in that: Conical grooves are provided at both ends of the concentric shaft (120), and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping portion (130) comprises: A collet (131) having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove; A nut (132), one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the coaxial shaft (120), and the other end hole of which is a tapered hole and is adapted to the tapered structure of one end of the collet (131) extending out of the coaxial shaft (120); Wherein, both ends of the collet (131) are provided with openings (1311), so that when the collet (131) is squeezed by the nut (132) and the coaxial shaft (120), the diameter of the hollow chamber thereon can be reduced to clamp the shaft.

6. The concentric axis clamping assembly of the quartz claw according to claim 5, characterized in that: There are a plurality of openings (1311), which are distributed along the circumferential direction of the collet (131).

7. The concentric axis clamping assembly of the quartz claw according to claim 5, characterized in that: The outer wall of the collet (131) is also provided with an annular groove (1312) arranged radially inwards.

8. The concentric axis clamping assembly of the quartz claw according to claim 5, characterized in that: The outer wall of the nut (132) is provided with knurling.

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