Length-adjustable line spot achromatic homogenization system

Abstract

The application discloses a length-adjustable line spot achromatic homogenization system and relates to the technical field of laser surface treatment devices.The length-adjustable line spot achromatic homogenization system comprises a light source shaping system, an off-axis reflection type micro-cylindrical mirror, an off-axis reflection type cylindrical mirror, a plano-concave cylindrical focusing lens and a plano-convex cylindrical focusing lens.Laser light emitted by a light source forms a collimated light beam after passing through the light source shaping system.The light beam is divided into multiple light beams by the off-axis reflection type micro-cylindrical mirror.The uniform superposition of the light beams is realized on the second focal plane of the off-axis reflection type aspherical cylindrical mirror and the plano-concave cylindrical focusing lens, so that the length direction of the light spot is homogenized.The light beam width direction is focused by the plano-convex cylindrical focusing lens, and a line spot with uniform energy distribution is finally obtained.The application solves the problems that the length of a line spot used for laser surface treatment cannot be flexibly adjusted and the energy uniformity is greatly affected by spherical aberration, and a uniform line spot with adjustable length and high homogenization quality is obtained.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser surface treatment devices, in particular to a length-adjustable line spot homogenization system. BACKGROUND

[0002] In recent years, with the rapid development of laser technology research, laser applications are also advancing towards high precision and low damage, especially in the field of laser surface treatment, as a new, green, efficient and non-damaging processing method, it is effectively applied to laser rust removal, laser paint removal, laser polishing and other industries, which meets the concept of efficient, energy-saving and environmental protection, and has received widespread attention from the society.

[0003] At present, laser surface treatment processing methods are usually divided into two types: point laser high-speed vibration to form a straight line scanning and direct shaping of the light source into a line spot scanning. The point laser high-speed vibration to form a straight line scanning is affected by the mechanical limitation of the vibration mirror and the high energy density of the point light source, and the average power is higher than 1kW, which is easy to cause point damage to the processed material, therefore, high-power lasers cannot be used as light sources, which limits the use efficiency. The light source is shaped into a line spot, and the length of the line spot can be changed according to the laser power and the characteristics of the processed material, so as to accurately control the energy density and maximize the processing efficiency. Since the laser light source belongs to Gaussian beam, the energy of the line spot obtained by direct shaping presents a state of strong in the middle and weak at both ends, therefore, in order to achieve a high-quality surface treatment effect, the line spot should be homogenized. In the conventional method, a microlens array combination can divide the Gaussian beam with uneven energy distribution into multiple small beams with different energy, and each small beam is recombined into an integral spot shape at the same position and size after passing through a plano-convex lens, thereby realizing the homogenization of the spot energy distribution. However, the final spot size obtained by this method is determined by the focal length of the microlens unit, the width of the microlens unit and the focal length of the plano-convex lens, that is, the final spot size cannot be adjusted, which limits the flexibility of its application. At the same time, using a lens system to shape the light beam will inevitably introduce spherical aberration, which will make the final spot shape deviate from the design requirements and reduce its homogenization effect. Therefore, a technical solution for a length-adjustable and high-homogenization-quality uniform line spot is needed. SUMMARY

[0004] The purpose of the present application is to provide a length-adjustable line spot homogenization system to solve the above problems.

[0005] The present application achieves the above-mentioned purposes by the following technical solutions:

[0006] The length-adjustable line spot achromatic homogenization system comprises a first light source shaping mirror and a second light source shaping mirror for receiving laser emitted by an incident light source and expanding and collimating the light beam, the first light source shaping mirror is close to the incident light source, and the first light source shaping mirror and the second light source shaping mirror are arranged in sequence.

[0007] The second light source shaping mirror is fixedly provided with an off-axis reflection type micro-cylindrical mirror for splitting the collimated light into multiple focused light beams at one end away from the first light source shaping mirror.

[0008] An off-axis reflection type cylindrical mirror is arranged at a position away from the off-axis reflection type micro-cylindrical mirror, one end of the off-axis reflection type cylindrical mirror is provided with a flat-concave cylindrical focusing lens, the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens form a focus-adjustable lens group, the focal plane of the multiple focused light beams coincides with the first focal plane of the focus-adjustable lens group, after the multiple focused light beams pass through the focus-adjustable lens group, the multiple focused light beams re-form collimated light and converge at the second focal plane of the focus-adjustable lens group, the converging light spot has uniform energy distribution in the length direction, forming a square light spot with uniform energy distribution in the length direction.

[0009] The flat-concave cylindrical focusing lens is provided with a flat-convex cylindrical focusing lens at one end away from the off-axis reflection type cylindrical mirror, for focusing the square light spot with uniform energy distribution in the length direction in the width direction and finally obtaining a line light spot with uniform energy distribution in the length direction.

[0010] The centers of the first light source shaping mirror, the second light source shaping mirror and the off-axis reflection type micro-cylindrical mirror are located on a first optical axis, the centers of the off-axis reflection type micro-cylindrical mirror and the off-axis reflection type cylindrical mirror are located on a second optical axis, and the centers of the off-axis reflection type cylindrical mirror, the flat-concave cylindrical focusing lens and the flat-convex cylindrical focusing lens are located on a third optical axis.

[0011] Changing the relative distance of the off-axis reflection type micro-cylindrical mirror and the off-axis reflection type cylindrical mirror on the second optical axis and the relative distance of the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens on the third optical axis can change the length of the line light spot under the condition of ensuring uniformity.

[0012] Preferably, the off-axis reflection type micro-cylindrical mirror is provided with a micro-concave cylindrical surface, and a plurality of micro-concave cylindrical surfaces are arranged in sequence and parallel on the off-axis reflection type micro-cylindrical mirror.

[0013] Preferably, the incident light source is a collimated light beam or a light beam with a divergence angle, and the light spot shape is a square light spot or a circular light spot; the optical axis of the incident light source coincides with the first optical axis on which the first light source shaping mirror, the second light source shaping mirror and the off-axis reflection type micro-cylindrical mirror are located.

[0014] Preferably, the first optical axis, the second optical axis and the third optical axis are in the same plane.

[0015] Preferably, the length of the linear light spot is adjusted in the range of 5-15 mm.

[0016] Preferably, the total length of the off-axis reflective micro-cylindrical mirror is L, the total width is M, the front surface of the off-axis reflective micro-cylindrical mirror has X identical micro-concave cylindrical surfaces arranged in parallel and coated with a reflective film of the same wavelength of laser, the length of each micro-concave cylindrical surface is L, the width is M / X, and the focal length is f1, the back surface of the off-axis reflective micro-cylindrical mirror is a plane, and the relative distance z between the off-axis reflective micro-cylindrical mirror and the off-axis reflective cylindrical mirror along the second optical axis is:

[0017] z = f1 + f, wherein f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror.

[0018] Preferably, the combined focal length f of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens is:

[0019] wherein f2 is the focal length of the off-axis reflective cylindrical mirror, f3 is the focal length of the plano-concave cylindrical focusing lens, and d is the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens along the third optical axis.

[0020] Preferably, the length l of the linear light spot is:

[0021] wherein f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror.

[0022] Preferably, the first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical mirror and forms an angle of 45° with the normal of the back surface thereof; and the second optical axis coincides with the center of the cylindrical surface of the off-axis reflective cylindrical mirror and forms an angle of 45° with the normal thereof.

[0023] Preferably, the third optical axis is parallel to the normals of the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens; the focal length of the plano-convex cylindrical focusing lens is f4, and the cylindrical length direction thereof is perpendicular to the cylindrical length directions of the off-axis reflective micro-cylindrical mirror, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens; the focal length f1 of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror is less than f, and the focal length f4 of the plano-convex cylindrical focusing lens is less than f.

[0024] The present application has the following beneficial effects: (1) The present application solves the problem that the line spot length for laser surface treatment cannot be flexibly adjusted and the energy uniformity is greatly affected by spherical aberration, and obtains a uniform line spot with adjustable length and high uniformity quality. (2) Through the adjustable focus lens group, the final output line spot can be freely adjusted in the length direction. (3) Through the off-axis reflective micro-cylindrical mirror and the off-axis reflective cylindrical mirror for beam shaping, the spherical aberration introduced by the lens shaping system can be avoided, and the spot energy uniformity is improved. (4) After the system of the present application, the beam energy can be converted from Gaussian distribution to uniform distribution. (5) The optical path system of the present application is simple, stable and easy to integrate, and can be practically applied to various industrial scenes. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a perspective view of the overall structure of the present application.

[0026] Figure 2 It is a side view of the overall structure of the present application.

[0027] Figure 3 It is a perspective view of the off-axis reflective micro-cylindrical mirror of the present application.

[0028] Figure 4 It is a side view of the off-axis reflective micro-cylindrical mirror of the present application.

[0029] Figure 5 It is a schematic diagram of the beam homogenization effect of the present application.

[0030] BRIEF DESCRIPTION OF DRAWINGS

[0031] 1, first light source shaping mirror; 2, second light source shaping mirror; 3, off-axis reflective micro-cylindrical mirror; 4, off-axis reflective cylindrical mirror; 5, plano-concave cylindrical focusing lens; 6, plano-convex cylindrical focusing lens. DETAILED DESCRIPTION

[0032] The present application will be further described below in conjunction with the drawings:

[0033] As Figure 1 and Figure 2As shown, the present application provides a length-adjustable line spot achromatic homogenization system, which comprises a first light source shaping mirror 1 and a second light source shaping mirror 2 for receiving laser emitted by an incident light source and expanding and collimating the light beam. The first light source shaping mirror 1 is close to the incident light source, and the first light source shaping mirror 1 and the second light source shaping mirror 2 are arranged in sequence. The first light source shaping mirror 1 and the second light source shaping mirror 2 collimate and expand the light beam to match the aperture of an off-axis reflective micro-cylindrical mirror 3. The second light source shaping mirror 2 is fixedly provided with the off-axis reflective micro-cylindrical mirror 3 at one end away from the first light source shaping mirror 1, which is used to split the collimated light into multiple focused light beams. The off-axis reflective micro-cylindrical mirror 3 can split the collimated Gaussian light source into multiple focused light beams in the homogenization direction. An off-axis reflective cylindrical mirror 4 is provided at a position away from the off-axis reflective micro-cylindrical mirror 3, and a flat-concave cylindrical focusing lens 5 is provided at one end of the off-axis reflective cylindrical mirror 4, and the off-axis reflective cylindrical mirror 4 and the flat-concave cylindrical focusing lens 5 form an adjustable focusing lens group. The focal plane of the multiple focused light beams generated by the off-axis reflective micro-cylindrical mirror 3 coincides with the first focal plane of the adjustable focusing lens group. After the multiple focused light beams pass through the adjustable focusing lens group, the multiple focused light beams reform collimated light and converge at the second focal plane of the adjustable focusing lens group. The converged light spot obtains uniform energy distribution in the length direction, forming a square light spot with uniform energy distribution in the length direction. The flat-concave cylindrical focusing lens 5 is provided with a flat-convex cylindrical focusing lens 6 at one end away from the off-axis reflective cylindrical mirror 4, which is used to focus the square light spot with uniform energy distribution in the length direction in the width direction and finally obtain a line light spot with uniform energy distribution in the length direction. In the embodiment, the centers of the first light source shaping mirror 1, the second light source shaping mirror 2 and the off-axis reflective micro-cylindrical mirror 3 are located on the first optical axis; the centers of the off-axis reflective micro-cylindrical mirror 3 and the off-axis reflective cylindrical mirror 4 are located on the second optical axis; the centers of the off-axis reflective cylindrical mirror 4, the flat-concave cylindrical focusing lens 5 and the flat-convex cylindrical focusing lens 6 are located on the third optical axis; and the first optical axis, the second optical axis and the third optical axis are in the same plane. By changing the relative distance of the off-axis reflective micro-cylindrical mirror 3 and the off-axis reflective cylindrical mirror 4 on the second optical axis and the relative distance of the off-axis reflective cylindrical mirror 4 and the flat-concave cylindrical focusing lens 5 on the third optical axis, the length of the line light spot can be changed under the condition of ensuring uniformity.

[0034] As shown in Figure 1 and Figure 3 On the basis of the above embodiment, further, the off-axis reflective micro-cylindrical mirror 3 is provided with a micro-concave cylindrical surface, and the micro-concave cylindrical surface has a plurality of micro-concave cylindrical surfaces, which are arranged in sequence and parallel on the off-axis reflective micro-cylindrical mirror 3. The collimated light is split into multiple focused light beams by the plurality of micro-concave cylindrical surfaces after passing through the off-axis reflective micro-cylindrical mirror 3, and the light beams perpendicular to the curved surface direction remain collimated.

[0035] On the basis of the above embodiment, further, the incident light source is a collimated light beam or a light beam with a divergence angle, and the light spot shape is a square light spot or a circular light spot. The optical axis of the incident light source coincides with the first optical axis on which the first light source shaping mirror 1, the second light source shaping mirror 2 and the off-axis reflective micro-cylindrical mirror 3 are located.

[0036] As shown in Figure 2 and Figure 4 On the basis of the above embodiment, further, the total length of the off-axis reflective micro-cylindrical mirror 3 is L, and the total width is M. The front surface of the off-axis reflective micro-cylindrical mirror 3 has X identical micro-concave cylindrical surfaces arranged in parallel and coated with a reflective film of the same wavelength of laser light. The length of each micro-concave cylindrical surface is L, the width is M / X, and the focal length is f1. The rear surface of the off-axis reflective micro-cylindrical mirror 3 is a plane. The relative distance z between the off-axis reflective micro-cylindrical mirror 3 and the off-axis reflective cylindrical mirror 4 along the second optical axis is:

[0037] z = f1 + f, where f is the combined focal length of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5, and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3.

[0038] The front surface of the off-axis reflective cylindrical mirror 4 is a concave cylindrical surface with a focal length f2. The cylindrical length direction of the off-axis reflective cylindrical mirror 4 is parallel to the micro-concave cylindrical surface of the off-axis reflective micro-cylindrical mirror 3 and the cylindrical length direction of the plano-concave cylindrical focusing lens 5. The focal length of the plano-concave cylindrical focusing lens 5 is f3.

[0039] The combined focal length f of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 is:

[0040] where f2 is the focal length of the off-axis reflective cylindrical mirror 4, f3 is the focal length of the plano-concave cylindrical focusing lens 5, and d is the relative distance between the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 along the third optical axis.

[0041] The length l of the line light spot is:

[0042] where f is the combined focal length of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3.

[0043] In specific use, by adjusting the relative distance d between the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 along the third optical axis and the relative distance z between the off-axis reflective micro-cylindrical mirror 3 and the off-axis reflective cylindrical mirror 4 along the second optical axis, the length of the final line light spot can be adjusted.

[0044] On the basis of the above-mentioned embodiment, further, the first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical mirror 3 and the angle between the first optical axis and the normal line of the back surface of the off-axis reflective micro-cylindrical mirror 3 is 45°. The second optical axis coincides with the center of the off-axis reflective cylindrical mirror 4 and the angle between the second optical axis and the normal line of the off-axis reflective cylindrical mirror 4 is 45°.

[0045] As shown in the above-mentioned embodiment, further, the third optical axis is parallel to the normal line of the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6. The focal length of the plano-convex cylindrical focusing lens 6 is f4, and the cylindrical length direction of the plano-convex cylindrical focusing lens 6 is perpendicular to the cylindrical length direction in the off-axis reflective micro-cylindrical mirror 3, the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5. The focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3 is f1 < f, and the focal length of the plano-convex cylindrical focusing lens 6 is f4 < f. Figure 2

[0046] Specifically, the focal length of the first light source shaping mirror 1 can be 30mm, and the focal length of the second light source shaping mirror 2 can be 90mm. The overall length of the off-axis reflective micro-cylindrical mirror 3 can be 60mm, and the overall width can be 60mm. The number of the micro-concave cylindrical surfaces on the off-axis reflective micro-cylindrical mirror 3 can be 60, the length of the micro-concave cylindrical surface can be 60mm, the width can be 1mm, and the focal length of the micro-concave cylindrical surface can be -100mm. The focal length of the off-axis reflective cylindrical mirror 4 can be -400mm, the focal length of the plano-concave cylindrical focusing lens 5 can be -266.7mm, and the focal length of the plano-convex cylindrical focusing lens 6 can be 222mm.

[0047] The focal lengths and sizes of the first light source shaping mirror 1, the second light source shaping mirror 2, the off-axis reflective micro-cylindrical mirror 3, the off-axis reflective cylindrical mirror 4, the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6 can be completed by the ZEMAX optical design software.

[0048] Through experiments, it can be obtained that the linear spot length of the laser beam after passing through the homogenization system of the present application can be adjusted in the range of 5-15mm, and the energy uniformity of the linear spot is ≥97%.

[0049] As shown in the above-mentioned embodiment, further, the third optical axis is parallel to the normal line of the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6. The focal length of the plano-convex cylindrical focusing lens 6 is f4, and the cylindrical length direction of the plano-convex cylindrical focusing lens 6 is perpendicular to the cylindrical length direction in the off-axis reflective micro-cylindrical mirror 3, the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5. The focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3 is f1 < f, and the focal length of the plano-convex cylindrical focusing lens 6 is f4 < f. Figure 5 As shown in the above-mentioned embodiment, further, the third optical axis is parallel to the normal line of the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6. The focal length of the plano-convex cylindrical focusing lens 6 is f4, and the cylindrical length direction of the plano-convex cylindrical focusing lens 6 is perpendicular to the cylindrical length direction in the off-axis reflective micro-cylindrical mirror 3, the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5. The focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror 3 is f1 < f, and the focal length of the plano-convex cylindrical focusing lens 6 is f4 < f.

[0050] The present application utilizes the reflective beam homogenization system, eliminates the spherical aberration introduced when the light beam passes through the lens homogenization, effectively improves the beam energy uniformity in the length direction of the linear spot, and can realize the change of the linear spot length by adjusting the relative distance between the lenses. The present application can be flexibly applied in the high-quality laser surface treatment industry such as laser cleaning and laser polishing.

[0051] ​The above merely describes the preferred embodiments of the present application, and is not intended to limit the patent scope of the present application. Those skilled in the art should understand that various changes, modifications, replacements and deformations can be made to the embodiments without departing from the principles and the spirit of the present application, and all of them should be covered in the protection scope of the present application. The protection scope of the present application is defined by the claims and their equivalents.

Claims

1. A length-adjustable line spot aplanatic homogenization system, characterized by: The application relates to a light source shaping device, which comprises a first light source shaping mirror and a second light source shaping mirror for receiving laser emitted by an incident light source and expanding and collimating the light beam, the first light source shaping mirror is close to the incident light source, and the first light source shaping mirror and the second light source shaping mirror are arranged in sequence. The second light source shaping mirror is fixedly provided with an off-axis reflection type micro-cylindrical mirror for splitting the collimated light into multiple focused light beams at one end away from the first light source shaping mirror. An off-axis reflection type cylindrical mirror is arranged at a position away from the off-axis reflection type micro-cylindrical mirror, one end of the off-axis reflection type cylindrical mirror is provided with a flat-concave cylindrical focusing lens, the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens form a focusing lens group, the focal plane of the multiple focused light beams is coincident with the first focal plane of the focusing lens group, after the multiple focused light beams pass through the focusing lens group, the multiple focused light beams are reformed into collimated light and are converged at the second focal plane of the focusing lens group, the converged light spot obtains uniform energy distribution in the length direction and forms a square light spot with uniform energy distribution in the length direction. The flat-concave cylindrical focusing lens is provided with a flat-convex cylindrical focusing lens at one end away from the off-axis reflection type cylindrical mirror, the flat-convex cylindrical focusing lens is used for focusing the square light spot with uniform energy distribution in the length direction in the width direction and finally obtaining a linear light spot with uniform energy distribution in the length direction. The centers of the first light source shaping mirror, the second light source shaping mirror and the off-axis reflection type micro-cylindrical mirror are located on a first optical axis, the centers of the off-axis reflection type micro-cylindrical mirror and the off-axis reflection type cylindrical mirror are located on a second optical axis, and the centers of the off-axis reflection type cylindrical mirror, the flat-concave cylindrical focusing lens and the flat-convex cylindrical focusing lens are located on a third optical axis. Changing the relative distance of the off-axis reflection type micro-cylindrical mirror and the off-axis reflection type cylindrical mirror on the second optical axis and the relative distance of the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens on the third optical axis can change the length of the linear light spot under the condition of ensuring uniformity. The first optical axis, the second optical axis and the third optical axis are in the same plane. The total length of the off-axis reflection type micro-cylindrical mirror is L, the total width is M, the front surface of the off-axis reflection type micro-cylindrical mirror has X same micro-concave cylindrical surfaces which are arranged in parallel and are coated with a reflection film of the same wavelength of laser, the length of each micro-concave cylindrical surface is L, the width is M / X, and the focal length is f1, the back surface of the off-axis reflection type micro-cylindrical mirror is a plane, the relative distance z between the off-axis reflection type micro-cylindrical mirror and the off-axis reflection type cylindrical mirror along the second optical axis is: z=f1+f, wherein f is the combined focal length of the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens, and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflection type micro-cylindrical mirror; The combined focal length f of the off-axis reflection type cylindrical mirror and the flat-concave cylindrical focusing lens is: wherein f2 is the focal length of the off-axis reflective cylindrical mirror, f3 is the focal length of the plano-concave cylindrical focusing lens, and d is the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens along the third optical axis. The length l of the linear light spot is: wherein f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror.

2. The adjustable length line spot homogenization system of claim 1, wherein: The off-axis reflection type micro-cylindrical mirror is provided with micro-concave cylindrical surfaces, and the micro-concave cylindrical surfaces are multiple and are arranged in sequence in parallel on the off-axis reflection type micro-cylindrical mirror.

3. The adjustable length line spot homogenization system of claim 1, wherein: The incident light source is a collimated light beam or a light beam with a divergence angle, and the light spot shape is a square light spot or a circular light spot; the optical axis of the incident light source coincides with the first optical axis on which the first light source shaping mirror, the second light source shaping mirror and the off-axis reflective micro-cylindrical mirror are located.

4. The adjustable length line spot homogenization system of claim 1, wherein: The length of the line light spot is adjusted in the range of 5-15 mm.

5. The adjustable length line spot homogenization system of claim 1, wherein: The first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical mirror and forms an angle of 45° with the normal line of the rear surface thereof; the second optical axis coincides with the cylindrical center of the off-axis reflective cylindrical mirror and forms an angle of 45° with the normal line thereof.

6. The adjustable length line spot homogenization system of claim 1, wherein: The third optical axis is parallel to the normal lines of the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens; the focal length of the plano-convex cylindrical focusing lens is f4, the cylindrical length direction thereof is perpendicular to the cylindrical length directions of the off-axis reflective micro-cylindrical mirror, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens; the focal length f1 of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical mirror is less than f, and the focal length f4 of the plano-convex cylindrical focusing lens is less than f.

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