Ultra-pure one-way valve with low opening pressure

Abstract

The invention relates to the technical field of one-way valves, in particular to a low-opening-pressure ultra-pure one-way valve which comprises a valve body, a first connecting sleeve and a second connecting sleeve and further comprises a valve sleeve, a reset spring, a driving assembly, a limiting sliding block, a valve seat assembly and a tension spring. Threaded rings are integrally formed at the end of the valve body and the end of the valve sleeve, an adjusting groove is formed in the inner circumference of the valve body, and a sliding groove extending to the inner side of the valve sleeve is formed in the valve body. The front section and the rear section of the reset spring are set to have different elastic coefficients, the periphery of the reset spring is set to be the radial plane, the mode that the reset spring is tightly attached to the inner wall of the valve sleeve to move after being compressed is ensured, and the problem that a one-way valve adopting a common thin spiral spring is damaged due to radial distortion of the spiral spring after repeated use is solved. The total length of the spiral spring is reduced, and the valve clack cannot be tightly attached to the valve body.

Description

Technical Field

[0001] The invention relates to the technical field of one-way valves, in particular to an ultra-pure one-way valve with low opening pressure. Background Art

[0002] The working principle of the check valve is based on a key component inside the valve, the valve disc. When the fluid flows in the correct direction, the valve disc will be pushed open to allow the fluid to pass freely. However, when the fluid tries to flow backwards, the valve disc will be closed, effectively preventing the reverse flow. This working principle is based on the principles of fluid dynamics and pressure difference. When the forward pressure is greater than the reverse pressure, the check valve will open and allow the fluid to pass; if the reverse pressure exceeds the forward pressure, the valve disc will quickly close to prevent unnecessary flow.

[0003] In the semiconductor manufacturing process, the one-way valves used need to have good sealing properties to prevent contaminants from entering the high-purity working environment. The one-way valve that can be opened at a lower pressure can be opened instantly, effectively preventing contaminants from entering the valve body, and can fully ensure the sealing performance of the valve. Therefore, in the semiconductor industry wet process equipment, low opening pressure one-way valves are required.

[0004] In the prior art, the return spring in the valve is mostly made of a metal coil spring with a relatively thin diameter to ensure that its elastic coefficient is low and meet the requirements of low opening pressure. However, it is found in actual production that when chemical liquid is used to remove particles, natural oxide layers, organic matter, metal pollution, sacrificial layers, polishing residues and other substances in the wafer manufacturing process, due to the large flow rate of the chemical liquid, it is necessary to flow through the one-way valve quickly with a large pressure, thereby causing the valve disc of the one-way valve to move a large stroke. Since the cross-section of the traditional metal coil spring is circular, there is a "line contact" between the metal coil spring and the inner wall of the valve body, so it is very easy to drive the thinner coil spring to rotate when the valve disc is reset. After repeated use, the return spring will be radially twisted, and the sealing effect between the valve disc and the valve body after the valve disc is reset cannot be guaranteed, causing pollutants to enter the one-way valve through the gap between the valve disc and the valve body, causing medium contamination.

[0005] Therefore, a low opening pressure ultrapure check valve is proposed. Summary of the invention

[0006] The object of the present invention is to provide an ultra-pure one-way valve with a low opening pressure. By setting different elastic coefficients for the front and rear sections of the return spring and setting the outer periphery of the return spring as a radial plane, it is ensured that the return spring moves closely to the inner wall of the valve sleeve after being compressed. This solves the problem that, for a one-way valve using an ordinary thinner coil spring, the coil spring is radially twisted after repeated use, resulting in a reduction in the total length of the coil spring and the inability to ensure that the valve disc and the valve body fit closely. The valve has the advantages of fully ensuring that the one-way valve can be opened at a lower pressure and effectively improving the fluid passing rate when the flow rate is large, while greatly reducing the deformation distance of the return spring, and avoiding radial twisting of the return spring by moving the radial plane close to the inner wall of the valve sleeve, thereby fully ensuring the sealing performance of the one-way valve.

[0007] To achieve the above-mentioned object, the present invention provides a low opening pressure ultrapure one-way valve, comprising a valve body, a first connecting sleeve, a second connecting sleeve, and a valve sleeve, a return spring, a drive assembly, a limit slider, a valve seat assembly and a tension spring, wherein the valve sleeve is connected to the valve body, a sealing ring is arranged on the outer periphery of the valve body and the outer periphery of the valve sleeve, and a threaded ring is integrally formed on the end of the valve body and the end of the valve sleeve, an adjusting groove is arranged on the outer periphery of the valve body, and a sliding groove extending to the inner side of the valve sleeve is arranged inside the valve body, the return spring is arranged inside the valve sleeve, the drive assembly is installed in the sliding groove, and the drive assembly is fitted with the outer periphery of the return spring, the limit slider and the tension spring are both installed in the adjusting groove, and the drive assembly is fitted with the limit slider, the tension spring is connected with the limit slider, the valve seat assembly is slidably arranged between the valve body and the inside of the valve sleeve, and the end of the valve seat assembly is fitted with the inner wall of the valve body, when the fluid pushes the valve seat assembly to squeeze the return spring to a set position, the drive assembly drives the limit slider to move toward the valve body axis side, and the limit slider applies pressure to the valve seat assembly to reduce the cross-section of the end of the valve seat assembly.

[0008] As mentioned above, the return spring maintains contact with the inner wall of the valve body during expansion and contraction deformation, so that the valve seat assembly only moves in a straight line along the inner wall of the valve body, avoiding the valve seat assembly from flipping over during movement and causing failure of the one-way valve; and the valve body, valve sleeve, first connecting sleeve, second connecting sleeve, return spring, drive assembly, limit slider and valve seat assembly and other components are all made of ultra-pure PTFE as raw material and are manufactured through machining. The PTFE surface has extremely low surface energy, and it is difficult for other substances to adhere to its surface. When the medium used in the wet process equipment in the semiconductor industry passes through the valve body, the residual medium in the valve body can be reduced as much as possible; considering the material properties, during processing, the grooved part is assembled by splicing, and the powder is molded into a suitable shape, which is then spliced ​​and sintered as a whole, and the corresponding components are integrated through the high viscosity of PTFE.

[0009] Preferably, the return spring includes a first spring body, a second spring body and a radial plane, the first spring body and the second spring body are fixedly connected, the radial plane is constructed on the outer periphery of the first spring body and the second spring body, the first spring body is located on the side of the second spring body close to the valve seat assembly, and the elastic coefficient of the first spring body is smaller than the elastic coefficient of the second spring body, the end of the first spring body is in contact with the valve seat assembly, and the end of the second spring body is in contact with the inner wall of the valve sleeve.

[0010] Preferably, the valve seat assembly includes a limit seat, an insertion rod, a valve disc, a sliding piece, an anti-slip piece and a micro spring. The limit seat is slidably fitted on the inner circumference of the valve sleeve, and the side wall of the limit seat is fitted with the end of the first spring body. The insertion rod is inserted at the center of the limit seat. The valve disc is installed at the end of the insertion rod. A plurality of sliding grooves are provided inside the valve disc. The sliding piece extends into the sliding groove. The anti-slip piece is installed on the outer circumference of the sliding piece, and the anti-slip piece is slidably fitted with the sliding groove. The micro spring is installed in the sliding groove, and the end of the micro spring abuts against the sliding piece.

[0011] Preferably, a plurality of flow holes are formed on the limit seat, and the plurality of flow holes are distributed in a ring array with respect to the insertion rod.

[0012] Preferably, the driving assembly includes a fitting sheet, a vertical bar and a horizontal bar, the fitting sheet is fitted on a radial plane at the center position of the second spring body, the vertical bar is installed on the side of the fitting sheet away from the second spring body, the horizontal bar is fixed to the end of the vertical bar, and the horizontal bar is slidably arranged in the sliding groove, and the end of the horizontal bar is fitted with the limiting slider.

[0013] Preferably, a second inclined surface is provided on a side of the limit slider close to the corresponding horizontal bar, a first inclined surface is provided on an end of the horizontal bar, and a docking groove is provided on a side wall of the limit slider.

[0014] Preferably, the valve flap is located inside the valve body, and the diameter of the valve flap is smaller than the diameter of the limit seat.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. Under the action of the return spring, due to structural reasons, the one-way valve of the present invention can only allow axial force inside, and the axial force cannot be too eccentric, otherwise other parts will be turned over or misplaced, so that the one-way valve will be completely ineffective. The return spring maintains clearance with the inner wall of the valve sleeve through the radial plane, and is combined with the drive assembly to further limit the movement trajectory of the return spring, so as to ensure that the force applied to the return spring is neither eccentric nor too eccentric, thereby avoiding the valve flap of other parts from turning over or misplaced, so that the one-way valve will be completely ineffective. Repeated use can also ensure the sealing performance of the one-way valve; and, under the action of the first spring body and the second spring body with different elastic coefficients, the first spring body with a lower elastic coefficient allows the valve flap to be displaced and the valve body to be opened when the fluid pressure is low. When the fluid pressure is high, the compression stroke of the second spring body with a higher elastic coefficient is small, which can effectively reduce the movement stroke of the valve flap, thereby facilitating the rapid resetting of the valve flap, and having the effect of fully ensuring the sealing performance of the one-way valve.

[0017] 2. Through the provided drive assembly and limit slider, when the pressure of the chemical liquid is high and causes the second spring body to be compressed and deformed, the second spring body drives the drive assembly to move horizontally, and with the help of the cooperation between the cross bar and the inclined surface of the docking groove, the limit slider moves toward the axis of the valve body. After the valve disc is horizontally displaced, the sliding piece on its outer periphery is blocked by the limit slider and moves toward the center of the valve disc, thereby effectively increasing the flow cross-sectional area inside the valve body, which is beneficial to improving the flow rate of the chemical liquid.

[0018] 3. By setting the valve seat assembly, when the pressure of the chemical liquid is low, the movement stroke of the valve disc is small, and the sliding piece does not contact the limit slider. When the pressure of the chemical liquid is high, the movement stroke of the valve disc increases, and at this time the limit slider moves toward the center of the valve disc. When the valve disc drives the sliding piece to contact the limit slider, the sliding piece slides toward the center of the valve disc due to the limiting effect of the horizontal bar, thereby increasing the fluid flow cross-sectional area inside the valve body, allowing the chemical liquid to pass quickly, thereby greatly improving the working efficiency of the one-way valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is an overall cross-sectional view of the present invention;

[0021] Figure 3 It is a schematic structural diagram of the return spring of the present invention;

[0022] Figure 4 It is a structural schematic diagram of the valve seat assembly of the present invention;

[0023] Figure 5 is a cross-sectional view of a valve seat assembly of the present invention;

[0024] Figure 6 is a cross-sectional view of a drive assembly of the present invention;

[0025] Figure 7 It is a cross-sectional view of the limit slider and the tension spring of the present invention;

[0026] Figure 8 It is a schematic diagram of the connection between the driving assembly and the limit slider of the present invention.

[0027] In the figure: 1. valve body; 2. valve sleeve; 3. first connecting sleeve; 4. second connecting sleeve; 5. return spring; 51. first spring body; 52. second spring body; 53. radial plane; 6. drive assembly; 61. fitting sheet; 62. vertical bar; 63. horizontal bar; 631. first inclined surface; 7. limit slider; 71. second inclined surface; 72. docking groove; 8. valve seat assembly; 81. limit seat; 811. flow hole; 82. plug rod; 83. valve disc; 831. slide groove; 84. sliding sheet; 85. anti-drop sheet; 86. micro spring; 9. tension spring; 11. sealing ring; 12. threaded ring; 13. adjusting groove; 14. sliding groove. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] See also Figures 1 to 8 The present invention provides a low opening pressure ultrapure one-way valve, and the technical solution is as follows:

[0030] A low opening pressure ultrapure one-way valve, comprising a valve body 1, a first connecting sleeve 3, a second connecting sleeve 4, a valve sleeve 2, a reset spring 5, a drive assembly 6, a limit slider 7, a valve seat assembly 8 and a tension spring 9, the valve sleeve 2 is connected to the valve body 1, the first connecting sleeve 3 and the second connecting sleeve 4 are respectively connected to the ends of the valve body 1 and the valve sleeve 2, the first connecting sleeve 3 and the second connecting sleeve 4 are used to connect with an external fluid pipeline, the outer periphery of the valve body 1 and the outer periphery of the valve sleeve 2 are both provided with a sealing ring 11, the sealing ring 11 is used to ensure that the valve body 1 and the first connecting sleeve 3 are connected. The sealing performance of the valve body 1 and the sealing performance between the valve sleeve 2 and the second connecting sleeve 4 are improved, and the ends of the valve body 1 and the valve sleeve 2 are integrally formed with a threaded ring 12, and the valve body 1 and the valve sleeve 2 are respectively connected to the first connecting sleeve 3 and the second connecting sleeve 4 through the threaded ring 12. An adjusting groove 13 is provided on the inner periphery of the valve body 1, and a sliding groove 14 extending to the inner side of the valve sleeve 2 is provided inside the valve body 1, and the two ends of the sliding groove 14 are respectively located inside the valve body 1 and inside the valve sleeve 2. The return spring 5 is arranged inside the valve sleeve 2, and the end of the return spring 5 in the static state, and the drive assembly 6 is installed on the sliding groove 14. The drive assembly 6 is in the movable groove 14, and the driving assembly 6 is in contact with the outer periphery of the return spring 5. When the return spring 5 is deformed to a certain length, the return spring 5 will drive the driving assembly 6 to translate. At the same time, since the driving assembly 6 can only move along the axial direction of the valve body 1, the moving trajectory of the return spring 5 is restricted to prevent the return spring 5 from axial deflection. The limit slider 7 and the tension spring 9 are both installed in the adjusting groove 13, and the driving assembly 6 is in contact with the limit slider 7. The tension spring 9 is set in the deep of the adjusting groove 13, and the tension spring 9 is connected to the limit slider 7. When the driving assembly 6 is deformed with the return spring 5, the return spring 5 can move in a horizontal direction. When the valve seat assembly 8 changes and moves horizontally, it will drive the limit slider 7 to perform corresponding actions. The valve seat assembly 8 is slidably arranged between the valve body 1 and the inside of the valve sleeve 2, and the end of the valve seat assembly 8 is in contact with the inner wall of the valve body 1. When the fluid pushes the valve seat assembly 8 to squeeze the reset spring 5 to the set position, the driving assembly 6 drives the limit slider 7 to move toward the axis side of the valve body 1. At this time, the valve seat assembly 8 produces a displacement with the same size as the deformation length of the reset spring 5 due to the action of the fluid. Therefore, the valve seat assembly 8 will contact the limit slider 7, and the limit slider 7 applies pressure on the valve seat assembly 8 to reduce the cross-section of the end of the valve seat assembly 8.

[0031] Reference Figure 2 and Figure 3As an embodiment of the present invention, specifically, the return spring 5 includes a first spring body 51, a second spring body 52 and a radial plane 53. The first spring body 51 and the second spring body 52 are fixedly connected. The radial plane 53 is constructed on the outer periphery of the first spring body 51 and the second spring body 52. ​​The first spring body 51 is located on the side of the second spring body 52 close to the valve seat assembly 8, and the elastic coefficient of the first spring body 51 is smaller than the elastic coefficient of the second spring body 52. ​​The first spring body 51 and the second spring body 52 are both made of ultra-pure PTFE material, and the elastic coefficient of the first spring body 51 is smaller than the elastic coefficient of the second spring body 52. ​​The end of the first spring body 51 is in contact with the valve seat assembly 8, and the second spring body The end of 52 fits with the inner wall of the valve sleeve 2. When the valve seat assembly 8 is slightly displaced, the first spring body 51 is deformed, while the second spring body 52 is not deformed, thereby ensuring that the one-way valve can be opened at a lower pressure. When the fluid pressure is large, the valve seat assembly 8 is displaced to a large extent, causing the second spring body 52 to also be deformed. Compared with the return spring 5 with a smaller elastic coefficient, the displacement distance of the valve seat assembly 8 can be reduced under the action of the second spring body 52, which is conducive to the rapid resetting of the valve seat assembly 8 to close the valve body 1. The radial plane 53 is matched with the clearance of the inner wall of the valve sleeve 2 to ensure that the force is not off-axis, thereby preventing the valve flap 83 from flipping or misalignment and causing the one-way valve to completely fail.

[0032] Reference Figure 4 and Figure 5 As an embodiment of the present invention, specifically, the valve seat assembly 8 includes a limit seat 81, a plug rod 82, a valve disc 83, a sliding piece 84, an anti-slip sheet 85 and a micro spring 86. The limit seat 81 is slidably fitted on the inner periphery of the valve sleeve 2, and the side wall of the limit seat 81 is fitted with the end of the first spring body 51. The plug rod 82 is inserted at the center of the limit seat 81. The valve disc 83 is installed at the end of the plug rod 82. A plurality of slide grooves 831 are opened inside the valve disc 83. The sliding piece 84 extends into the slide groove 831. The anti-slip sheet 85 is installed on the outer periphery of the sliding piece 84, and the anti-slip sheet 85 is slidably fitted with the slide groove 831. The micro spring 86 is installed in the slide groove. 831, and the end of the micro spring 86 is in contact with the sliding sheet 84. When the pressure exerted by the fluid on the valve disc 83 is transmitted to the first spring body 51 through the limit seat 81, due to the small elastic coefficient of the first spring body 51, compression deformation will occur first, and then the limit seat 81 and the valve disc 83 will be displaced together. The fluid enters the valve body 1 and the valve sleeve 2 through the gap between the outer periphery of the valve disc 83 and the valve body 1. A plurality of flow holes 811 are provided on the limit seat 81, and the plurality of flow holes 811 are distributed in a ring array about the insertion rod 82. The fluid entering the valve sleeve 2 passes through the valve sleeve 2 through the flow holes 811 and flows out of the one-way valve.

[0033] Reference Figure 6 and Figure 8As an embodiment of the present invention, specifically, the driving assembly 6 includes a fitting piece 61, a vertical bar 62 and a horizontal bar 63. The fitting piece 61 is fitted on the radial plane 53 at the center of the second spring body 52. ​​When the second spring body 52 is deformed, the fitting piece 61 will be driven to move together. The vertical bar 62 is installed on the side of the fitting piece 61 away from the second spring body 52. ​​The horizontal bar 63 is fixed to the end of the vertical bar 62, and the horizontal bar 63 is slidably arranged in the sliding groove 14. The end of the horizontal bar 63 fits with the limiting slider 7. When the fitting piece 61 moves with the second spring body 52, the vertical bar 62 and the horizontal bar 63 both move together with the fitting piece 61 toward the end of the valve sleeve 2 away from the valve body 1, and the horizontal bar 63 is displaced toward the side of the limiting slider 7. Through the cooperation of the first inclined surface 631 and the second inclined surface 71, the end of the horizontal bar 63 is inserted into the docking groove 72 of the limiting slider 7.

[0034] Reference Figure 7 and Figure 8 As an embodiment of the present invention, specifically, the limiting slider 7 is provided with a second inclined surface 71 on the side close to the corresponding horizontal bar 63, the end of the horizontal bar 63 is provided with a first inclined surface 631, and the side wall of the limiting slider 7 is provided with a docking groove 72; when the second spring body 52 is deformed, it means that the valve disc 83 reaches the set stroke value. At this time, the moving trajectory of the limiting slider 7 and the sliding piece 84 coincides. When the edge of the sliding piece 84 contacts the limiting slider 7, under the action of the second inclined surface 71 on the side wall of the limiting slider 7 and the first inclined surface 631 at the end of the horizontal bar 63, the end of the horizontal bar 63 is guided to be inserted into the docking groove 72, so that the limiting slider 7 protrudes from the inner wall of the valve body 1. After the sliding piece 84 contacts the limiting slider 7, it moves toward the center of the valve disc 83, thereby squeezing the micro spring 86, and increasing the fluid passing cross-sectional area of ​​the valve body 1 by squeezing the sliding piece 84 into the inner side of the valve disc 83.

[0035] Reference Figure 2 and Figure 5 As an embodiment of the present invention, specifically, the valve flap 83 is located inside the valve body 1, and the diameter of the valve flap 83 is smaller than the diameter of the limiting seat 81. When the valve flap 83 is separated from the inner wall of the valve body 1, the valve body 1 and the inside of the valve sleeve 2 are both in an open state. When the sliding piece 84 moves toward the center of the valve flap 83 under the action of the limiting slider 7, the sliding piece 84 is separated from the inner wall of the valve body 1, thereby further increasing the fluid passing cross-sectional area of ​​the valve body 1.

[0036] Working principle: Since the elastic coefficients of the first spring body 51 and the second spring body 52 are different, and the first spring body 51 with a small elastic coefficient is arranged close to one side of the valve body 1, when the fluid pressure is small, the first spring body 51 is deformed while the second spring body 52 is not deformed. At this time, the valve flap 83 is separated from the inner wall of the valve body 1, and the fluid passes through the gap between the valve flap 83 and the valve body 1, passes through the flow hole 811, enters the valve sleeve 2, and then flows out from the end of the valve sleeve 2;

[0037] When the fluid pressure is relatively large and the first spring body 51 reaches the maximum deformation value, the second spring body 52 gradually deforms. When the second spring body 52 is in a compressed state, the valve flap 83 separates from the inner wall of the valve body 1, and the second spring body 52 drives the fitting sheet 61 to move toward the end of the valve sleeve 2 away from the valve body 1. The vertical bar 62 and the horizontal bar 63 simultaneously move toward the end of the valve sleeve 2 away from the valve body 1 along with the fitting sheet 61. The end of the horizontal bar 63 is slowly inserted into the docking groove 72 under the cooperation of the first inclined surface 631 and the second inclined surface 71, so that the limit slider 7 moves toward the center of the valve flap 83.

[0038] When the second spring body 52 is deformed, the displacement of the valve disc 83 reaches the set stroke value, which means that the movement trajectory of the limit slider 7 coincides with that of the sliding piece 84. When the edge of the sliding piece 84 contacts the limit slider 7, the limit slider 7 pushes the sliding piece 84 to move toward the center of the valve disc 83, and the micro spring 86 is in a compressed state. The larger the area of ​​the sliding piece 84 entering the valve disc 83, the larger the cross-sectional area of ​​the fluid passing through the valve body 1.

[0039] When the fluid has passed through, the pressure of the fluid has gradually decreased, the second spring body 52 is reset first, and drives the vertical bar 62 and the horizontal bar 63 to reset through the fitting sheet 61, and the tension spring 9 pulls the limit slider 7 to reset. When the first spring body 51 is reset, the radial plane 53 and the inner wall clearance of the valve sleeve 2 are matched to prevent the valve disc 83 from flipping or misalignment and causing the one-way valve to fail completely.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A low opening pressure ultrapure one-way valve, comprising a valve body (1), a first connecting sleeve (3), and a second connecting sleeve (4), characterized in that: The valve sleeve (2) further comprises a valve sleeve (2), a return spring (5), a drive assembly (6), a limit slider (7), a valve seat assembly (8) and a tension spring (9); the valve sleeve (2) is connected to the valve body (1); a sealing ring (11) is arranged on the outer periphery of the valve body (1) and the outer periphery of the valve sleeve (2); and a threaded ring (12) is integrally formed at the end of the valve body (1) and the end of the valve sleeve (2); an adjusting groove (13) is arranged on the inner periphery of the valve body (1); and a sliding groove (14) extending to the inner side of the valve sleeve (2) is arranged inside the valve body (1); the return spring (5) is arranged inside the valve sleeve (2); the drive assembly (6) is installed in the sliding groove (14); and the drive assembly (6 ) is fitted with the outer periphery of the return spring (5), the limit slider (7) and the tension spring (9) are both installed in the adjustment groove (13), and the drive component (6) is fitted with the limit slider (7), the tension spring (9) is connected to the limit slider (7), the valve seat component (8) is slidably arranged between the valve body (1) and the inside of the valve sleeve (2), and the end of the valve seat component (8) is fitted with the inner wall of the valve body (1), when the fluid pushes the valve seat component (8) to squeeze the return spring (5) to the set position, the drive component (6) drives the limit slider (7) to move toward the axis side of the valve body (1), and the limit slider (7) applies pressure to the valve seat component (8) to reduce the cross-section of the end of the valve seat component (8).

2. A low opening pressure ultrapure one-way valve according to claim 1, characterized in that: The return spring (5) comprises a first spring body (51), a second spring body (52) and a radial plane (53); the first spring body (51) and the second spring body (52) are fixedly connected; the radial plane (53) is constructed on the outer periphery of the first spring body (51) and the second spring body (52); the first spring body (51) is located on the side of the second spring body (52) close to the valve seat assembly (8); the elastic coefficient of the first spring body (51) is smaller than the elastic coefficient of the second spring body (52); the end of the first spring body (51) is in contact with the valve seat assembly (8); and the end of the second spring body (52) is in contact with the inner wall of the valve sleeve (2).

3. A low opening pressure ultrapure one-way valve according to claim 2, characterized in that: The valve seat assembly (8) comprises a limit seat (81), an insert rod (82), a valve disc (83), a sliding sheet (84), an anti-slip sheet (85) and a micro spring (86). The limit seat (81) is slidably fitted on the inner circumference of the valve sleeve (2), and the side wall of the limit seat (81) is fitted on the end of the first spring body (51). The insert rod (82) is inserted at the center of the limit seat (81). The valve disc (83) is installed on the end of the insert rod (82). A plurality of sliding grooves (831) are provided inside the valve disc (83). The sliding sheet (84) extends into the sliding groove (831). The anti-slip sheet (85) is installed on the outer circumference of the sliding sheet (84), and the anti-slip sheet (85) is slidably fitted with the sliding groove (831). The micro spring (86) is installed in the sliding groove (831), and the end of the micro spring (86) is in contact with the sliding sheet (84).

4. A low opening pressure ultrapure one-way valve according to claim 3, characterized in that: The limiting seat (81) is provided with a plurality of flow holes (811), and the plurality of flow holes (811) are distributed in a ring array with respect to the insertion rod (82).

5. A low opening pressure ultrapure one-way valve according to claim 4, characterized in that: The driving assembly (6) comprises a fitting sheet (61), a vertical bar (62) and a horizontal bar (63); the fitting sheet (61) is fitted on a radial plane (53) at a central position of the second spring body (52); the vertical bar (62) is installed on a side of the fitting sheet (61) away from the second spring body (52); the horizontal bar (63) is fixed to an end of the vertical bar (62), and the horizontal bar (63) is slidably arranged in a sliding groove (14); and an end of the horizontal bar (63) is fitted with a limiting slider (7).

6. A low opening pressure ultrapure one-way valve according to claim 4, characterized in that: The limiting slider (7) is provided with a second inclined surface (71) on one side close to the corresponding horizontal bar (63), the end of the horizontal bar (63) is provided with a first inclined surface (631), and the side wall of the limiting slider (7) is provided with a docking groove (72).

7. A low opening pressure ultrapure one-way valve according to claim 4, characterized in that: The valve flap (83) is located inside the valve body (1), and the diameter of the valve flap (83) is smaller than the diameter of the limiting seat (81).

Images