A signal perturbation based micromachined gyroscope error compensation circuit

Abstract

The present invention discloses a micromechanical gyroscope error compensation circuit based on signal disturbance, which relates to the technical field of micro-electromechanical systems. The circuit comprises two disturbance signal output terminals, one of which is connected to an orthogonal loop, and the other of which is connected to a multiplication demodulator and a PID controller in sequence. The first disturbance signal output terminal controls the orthogonal signal to be a disturbance signal, the multiplication demodulator multiplies and demodulates the disturbance signal and the in-phase signal to obtain an error control signal, the PID controller controls the error control signal to be 0 to obtain a phase compensation phase shift, and inputs the phase compensation phase shift into the orthogonal loop to achieve real-time compensation of the phase error. The present invention applies a disturbance signal in the orthogonal loop, simultaneously demodulates a signal containing phase error information as a controlled variable, and then uses the PID controller to perform real-time control on the signal to achieve real-time and accurate compensation of the phase error, thereby improving the comprehensive performance and working stability of the gyroscope.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of micro-mechanical gyroscope error compensation circuit based on signal disturbance, belong to micro electro mechanical system technical field. BACKGROUND

[0002] Gyroscope is an important inertial sensor for measuring the angular velocity or angle of moving object relative to inertial space, and is widely used in civil fields such as smart phones, drones, intelligent robots, and military fields such as aerospace, aviation and weapons.

[0003] Based on different working principles, current gyroscopes are mainly divided into the following types: one is mechanical rotor type gyroscope, typical including three floating gyroscope, flexible gyroscope, electrostatic gyroscope, etc., which are essentially based on the fixed axis and precession of high-speed rotating rigid body to realize the angle measurement of carrier. This kind of gyroscope is the earliest to be studied, the most mature to be developed, and the highest in precision, but they also have the disadvantages of long start-up time and high processing cost.

[0004] The second is optical gyroscope based on Sagnac effect, typical including laser gyroscope, fiber optic gyroscope, etc. The overall precision of this type of gyroscope is high, and it has been applied in the fields of navigation and aerospace. But their high processing requirements also lead to high production cost.

[0005] The third is vibration type gyroscope based on Coriolis force principle, typical including tuning fork type gyroscope, cup type gyroscope, ring type gyroscope, hemispherical type gyroscope, etc. This type of gyroscope has long service life and simple processing. Especially the micro-mechanical gyroscope developed by combining micro-machining technology, which has the advantages of small size, low power consumption, low cost and batch production, is suitable for consumer electronics industry and new military field of small-sized military equipment which needs miniaturization, mass production and low cost, and has received high attention from domestic and foreign research institutions in recent years.

[0006] Micro-mechanical gyroscope has played an important role in some civil and military fields after years of rapid development. Civil fields need large quantities of medium and low precision gyroscopes to realize functions such as attitude measurement and control of stable system. And with the development of micro-mechanical gyroscope in structure design, signal detection and control, and processing technology, etc., medium and low precision micro-mechanical gyroscopes have launched many mature products and are widely used in smart home, Internet of Things and other fields.

[0007] The military field also has an increasing demand for such small volume, low power consumption, high precision micro-mechanical gyroscopes. At present, the important military fields such as single soldier navigation, micro unmanned combat platform and micro guided ammunition, as well as emerging military development directions such as weapon stable sighting platform, micro military intelligent robot and micro-nano satellite all put forward higher requirements for the comprehensive performance of micro-mechanical gyroscopes.

[0008] The micro-mechanical gyroscope mainly consists of two parts: a gyro mechanical structure part and a signal detection part. The mechanical structure of the gyroscope mainly vibrates under the driving mode, and when the angular velocity input is input, it will generate displacement in the detection direction; and the function of the signal detection circuit is to detect the displacement signal in the detection direction, so as to obtain the angular velocity information, and therefore the signal detection circuit is crucial to the improvement of the comprehensive performance of the gyroscope.

[0009] The driving signal and the detection signal of the micro-mechanical gyroscope are distinguished by high-frequency carrier modulation of different frequencies, and are input to the weak signal detection circuit through the common terminal for C / V conversion, filtering, demodulation and other signal processing, so as to separate the driving signal and the detection signal, wherein the detection signal is the key to affect the output and the comprehensive performance of the gyroscope.

[0010] After the detection signal is converted by an analog-to-digital converter, it is also subjected to quadrature demodulation, and the in-phase signal and the quadrature signal are obtained by demodulation. The in-phase signal becomes the output signal of the gyroscope after the high-frequency carrier and the high-frequency disturbance signal are filtered out by a low-pass filter, and determines the performance of the gyroscope. The quadrature signal is an error signal, which can be removed in an ideal case and does not affect the final output of the gyroscope. However, due to the use of filters and other components in the measurement and control circuit, a phase shift is inevitably generated. In addition, the parasitic capacitance introduced between the electrodes of the gyroscope and the substrate, and between the electrode leads, will also be coupled into the effective capacitance of the gyroscope, resulting in a phase shift.

[0011] Therefore, in the actual measurement and control circuit of the gyroscope, there will be a certain deviation in the phase of each signal, which is called phase error. When there is a phase error between the in-phase signal and the quadrature signal, the quadrature error signal and the in-phase signal will be coupled with each other, so that the quadrature error signal component is included in the zero bias output of the gyroscope, thereby affecting the performance of the gyroscope, and the coupling error is too large, which will cause the gyroscope system to work unstably. SUMMARY

[0012] The purpose of the present application is to overcome the shortcomings in the prior art, and to provide a micro-mechanical gyroscope error compensation circuit based on signal disturbance. A disturbance signal is applied in the quadrature loop, and a signal containing phase error information is demodulated as a controlled variable. Then, the signal is controlled in real time by a PID controller to realize real-time and accurate compensation of the phase error, thereby improving the comprehensive performance and working stability of the gyroscope.

[0013] To achieve the above object, the present application is realized by the following technical scheme:

[0014] The present application provides a kind of micro-mechanical gyroscope error compensation circuit based on signal disturbance, the micro-mechanical gyroscope includes drive electrode, detection electrode, tuning axis electrode and public end, the public end is connected with the input end of two demodulation units through charge amplifier, the output end of one demodulation unit is connected with the input end of drive loop through first analog-digital converter, the output end of another demodulation unit is connected with the input end of in-phase loop, quadrature loop through second analog-digital converter, the output end of drive loop, in-phase loop, quadrature loop is connected with drive electrode, detection electrode, tuning axis electrode in turn respectively;

[0015] Further include error compensation loop, the error compensation loop includes two disturbance signal output ends, wherein, first disturbance signal output end is connected with quadrature loop, second disturbance signal output end is connected with multiplication demodulator, PID controller in turn, the output end of PID controller is connected with quadrature loop, the input end of multiplication demodulator is also connected with in-phase loop, multiplication demodulator is used to obtain error control signal by multiplication demodulation of disturbance signal and in-phase signal, PID controller is used to control error control signal to be 0 and obtain phase compensation phase shift, and phase compensation phase shift is input into quadrature loop to realize real-time compensation of phase error.

[0016] Further, the disturbance signal is pre-set, and the setting condition is that quadrature loop still maintains signal stability after inputting disturbance signal.

[0017] Further, the demodulation unit includes high-pass filter, multiplication demodulator and low-pass filter connected in turn, and the multiplication demodulator in the demodulation unit connected with first analog-digital converter is used to obtain drive signal by multiplication demodulation of electrical signal and drive high-frequency carrier signal, and the multiplication demodulator in the demodulation unit connected with second analog-digital converter is used to obtain detection signal by multiplication demodulation of electrical signal and detection high-frequency carrier signal.

[0018] Further, the drive loop includes two branches, the input end of two branches is connected with the output end of first analog-digital converter, and first quadrature demodulator is arranged on two branches, and the first quadrature demodulator on one branch is used to obtain drive amplitude signal by quadrature demodulation of drive signal, and the first quadrature demodulator on another branch is used to obtain drive phase signal by quadrature demodulation of drive signal.

[0019] The drive phase signal generates sinusoidal signal through digital control oscillator, the sinusoidal signal is multiplied by drive amplitude signal to obtain drive output signal, and the drive output signal is input into drive electrode together with input drive high-frequency carrier signal and input drive alternating voltage signal after digital-analog converter, to realize resonance and constant amplitude control of gyroscope drive mode.

[0020] Further, the in-phase loop comprises a second quadrature demodulator, a low-pass filter and a first PID controller connected in sequence, the second quadrature demodulator is used for quadrature demodulating the detection signal to obtain an in-phase signal, the in-phase signal is filtered by the low-pass filter to remove high-frequency carrier signals and high-frequency disturbance signals, and then the in-phase signal is input into the first PID controller to control the detection alternating current signal to obtain a gyro output signal, the gyro output signal is multiplied by the sine signal to obtain the detection alternating current signal, and the controlled detection alternating current signal is converted by a digital-to-analog converter to become a detection alternating voltage signal which is input into the detection electrode together with the input detection direct current voltage signal to realize real-time suppression of the vibration of the gyro detection method.

[0021] Further, the quadrature loop comprises a third quadrature demodulator, a low-pass filter and a second PID controller connected in sequence, the third quadrature demodulator is used for quadrature demodulating the detection signal to obtain a quadrature signal, the quadrature signal is filtered by the low-pass filter to remove high-frequency carrier signals and high-frequency disturbance signals, and then the quadrature signal is input into the second PID controller as a controlled variable, and the PID controller controls the tuning shaft voltage signal to control the quadrature signal in real time, and the tuning shaft voltage signal is output to the tuning shaft electrode by the digital-to-analog converter to realize suppression of the quadrature error.

[0022] Further, the first disturbance signal output end is connected with the input end of the second PID controller, the input end of the multiplication demodulator is also connected with the output end of the first PID controller, and the output end of the PID controller is connected with the input end of the second quadrature demodulator and the input end of the third quadrature demodulator.

[0023] Further, the error compensation loop further comprises a low-pass filter connected with the output end of the first PID controller, and the low-pass filter is used for filtering the high-frequency carrier signals and high-frequency disturbance signals in the in-phase signal to obtain a gyro output signal.

[0024] Further, the PID controller is used for controlling the error control signal to be 0 to obtain a phase compensation phase shift, and the derivation process of the phase compensation phase shift which can realize real-time compensation of the phase error comprises:

[0025] When the micromechanical gyroscope is stably working, the in-phase signal and the quadrature signal of the detection signal are calculated according to the gyro system comprehensive error, the phase error and the compensation phase shift of the phase error;

[0026] The quadrature signal is controlled as the disturbance signal, the in-phase signal is controlled as 0, and the feedback force signal is solved according to the quadrature loop equation and the in-phase loop equation;

[0027] The error control signal is obtained by demodulating the feedback force signal by using the disturbance signal;

[0028] The real-time control error control signal is 0, so that the phase error is compensated in real time.

[0029] Further, the expression of the in-phase signal and the quadrature signal of the detection signal calculated according to the comprehensive error of the gyro system, the phase error and the compensation phase shift of the phase error is:

[0030] ;

[0031] wherein, the in-phase signal is represented by I, the quadrature signal is represented by Q, the signal output of the micro-mechanical gyro caused by the stiffness coupling error is represented by, the signal output of the micro-mechanical gyro caused by the damping coupling error is represented by, the phase error is represented by, the phase compensation phase shift is represented by, the feedback force of the micro-mechanical gyro signal output is represented by;

[0032] The expression of the feedback force signal solved according to the quadrature loop equation and the in-phase loop equation is:

[0033] ;

[0034] The simultaneous solution is:

[0035] ;

[0036] wherein, the feedback force signal is represented by, the disturbance signal is represented by, the amplitude of the disturbance signal is represented by, the frequency of the disturbance signal is represented by, the disturbance signal application time is represented by, the system gain is represented by, which is a fixed value;

[0037] The expression of the error control signal demodulated by the feedback force signal using the disturbance signal is:

[0038] ;

[0039] wherein, the error control signal is represented by.

[0040] Compared with the prior art, the present application has the beneficial effects that:

[0041] The present application inputs a low-frequency sinusoidal disturbance signal in the quadrature loop, when the phase error exists, the signal will be coupled to the output signal of the gyro, and through the multiplication demodulation, the phase error can be identified in real time and online, and the identification accuracy is high.

[0042] In order to compensate for the phase error in real time, the present invention designs a PID controller to perform real-time closed-loop control on the signal containing the phase error obtained by identification to 0, thereby achieving real-time compensation regardless of how the phase error changes, thereby improving the comprehensive performance and working stability of the gyroscope;

[0043] In order to eliminate the influence of input disturbance signal on the performance of micro-mechanical gyroscope, the present invention designs a low-pass filter before the gyroscope signal is output to filter out the disturbance signal and ensure that it does not interfere with the output signal of the gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 Schematic diagram of a micro-mechanical gyroscope error compensation circuit based on signal disturbance in one embodiment of the present invention;

[0045] Figure 2 2 is a schematic diagram of a closed-loop control process test for compensating phase and error control signals in an embodiment of the present invention. DETAILED DESCRIPTION

[0046] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention. Example 1

[0047] like Figure 1 As shown, an embodiment of the present invention provides a micromechanical gyroscope error compensation circuit based on signal disturbance. The micromechanical gyroscope includes a driving electrode, a detection electrode, an axis adjustment electrode and a common terminal. This is the internal structure of the micromechanical gyroscope and will not be described in detail here.

[0048] The micromechanical gyroscope error compensation circuit based on signal disturbance specifically includes:

[0049] The common end is connected to the input ends of the two demodulation units via a charge amplifier, and the common end outputs a capacitance variation signal, which is converted into an electrical signal via the charge amplifier.

[0050] The output of the charge amplifier is connected to the input of two demodulation units. Each demodulation unit includes a high-pass filter, a multiplication demodulator, and a low-pass filter connected in sequence. The high-pass filter is used to filter out some low-frequency disturbance signals in the electrical signal, and the low-pass filter is used to filter out high-frequency signals in the electrical signal. The multiplication demodulator in one demodulation unit is used to multiply and demodulate the electrical signal with the driving high-frequency carrier signal to obtain a driving signal. The driving signal is converted into a digital signal by a first analog-to-digital converter and then input into the driving loop. The multiplication demodulator in the other demodulation unit is used to multiply and demodulate the electrical signal with the detection high-frequency carrier signal to obtain a detection signal. The detection signal is converted into a digital signal by a second analog-to-digital converter and then input into the in-phase loop and the orthogonal loop.

[0051] The output end of the drive loop is connected with the drive electrode, the output end of the in-phase loop is connected with the detection electrode, and the output end of the quadrature loop is connected with the tuning electrode.

[0052] The error compensation loop further comprises two disturbance signal output ends, i.e., a first disturbance signal output end and a second disturbance signal output end. The disturbance signal is pre-set, and the disturbance signal satisfying the condition that the quadrature loop can remain stable after inputting the disturbance signal should be acceptable.

[0053] The first disturbance signal output end is connected with the input end of the second PID controller in the quadrature loop, the second disturbance signal output end is connected with the multiplicative demodulator and the PID controller in sequence, the input end of the multiplicative demodulator is further connected with the output end of the first PID controller, and the output end of the PID controller is connected with the input end of the second quadrature demodulator in the in-phase loop and the input end of the third quadrature demodulator in the quadrature loop.

[0054] The multiplicative demodulator is used to obtain an error control signal by multiplicative demodulation of the disturbance signal and the in-phase signal, the error control signal is input to the PID controller as a controlled variable, the phase compensation phase shift is obtained by controlling the error control signal to be 0, and the phase compensation phase shift is input to the third quadrature demodulator to realize real-time compensation of the phase error.

[0055] The specific structure of the drive loop, the in-phase loop and the quadrature loop is as follows:

[0056] The drive loop comprises two branches, the input ends of the two branches are connected with the output end of the first analog-to-digital converter, and the first quadrature demodulator is arranged on each of the two branches, wherein the drive signal is subjected to quadrature demodulation by the first quadrature demodulator on one branch to obtain a drive amplitude signal, and the drive signal is subjected to quadrature demodulation by the first quadrature demodulator on the other branch to obtain a drive phase signal.

[0057] In order to keep the drive vibration of the gyroscope in a resonant state, the drive phase signal is used to generate a sinusoidal signal by a digital control oscillator, the sinusoidal signal is multiplied by the drive amplitude signal to obtain a drive output signal, the drive output signal is input to the drive electrode together with an input drive high-frequency carrier signal and an input drive alternating voltage signal after being converted by a digital-to-analog converter, and finally the resonance and constant amplitude control of the drive mode of the gyroscope are realized.

[0058] The in-phase loop comprises a second quadrature demodulator, a low-pass filter and a first PID controller connected in sequence, the second quadrature demodulator is used to quadrature demodulate the detection signal to obtain an in-phase signal, the in-phase signal is input to the first PID controller after being filtered by the low-pass filter to remove the high-frequency carrier and the high-frequency disturbance signal, and the first PID controller is used to control the alternating signal to offset the detection signal to obtain a gyroscope output signal.

[0059] In order to prevent the disturbance signal from interfering with the output signal of the gyroscope, the output signal of the gyroscope needs to pass through a low-pass filter after being output by the first PID controller to filter out the disturbance signal.

[0060] The output signal of the gyroscope output by the first PID controller is multiplied by a sine signal to obtain a detected AC signal. The controlled detected AC voltage signal becomes a detected AC voltage signal after passing through a digital-to-analog converter, and is input to the detection electrode together with an input detected DC voltage signal to realize real-time suppression of the vibration of the gyroscope detection method.

[0061] In order to provide stability and working bandwidth of the micro-mechanical gyroscope detection output, the force balance control scheme is adopted in the in-phase loop. The principle of the force balance control scheme is to generate a detection feedback force for real-time suppression of the vibration of the gyroscope detection direction by inputting a fixed detection DC voltage and a controlled detection AC voltage into the gyroscope detection electrode, and then extracting the controlled detection AC voltage as the gyroscope output signal.

[0062] The quadrature loop includes a third quadrature demodulator, a low-pass filter and a second PID controller connected in sequence. The third quadrature demodulator performs quadrature demodulation on the detection signal to obtain a quadrature signal. The quadrature signal is usually caused by processing errors of the gyroscope and is also called quadrature error. In order to suppress the quadrature error, the electrostatic force axis adjustment scheme is adopted. That is, the quadrature signal enters the second PID controller after being filtered by the low-pass filter to filter out high-frequency carriers and high-frequency disturbance signals, and the second PID controller controls the axis adjustment voltage signal in real time to offset the quadrature signal. The axis adjustment voltage signal is output to the axis adjustment electrode through the digital-to-analog converter to realize suppression of the quadrature error. Embodiment 2

[0063] Based on embodiment 1, the present embodiment provides a derivation process of a PID controller for controlling the error control signal to be 0 to obtain a phase compensation phase shift, and inputting the phase compensation phase shift into the quadrature loop to realize real-time compensation of the phase error, which includes:

[0064] When the micro-mechanical gyroscope is stably working, the in-phase signal and the quadrature signal of the detection signal are calculated according to the gyroscope system comprehensive error, the phase error and the compensation phase shift of the phase error, and the expression is:

[0065] ;

[0066] Among them, indicates the in-phase signal, indicates the quadrature signal, indicates the signal output of the micro-mechanical gyroscope due to the stiffness coupling error, indicates the signal output of the micro-mechanical gyroscope due to the damping coupling error, φe represents phase error, φc represents phase compensation phase shift, φf represents micro-mechanical gyroscope signal output feedback force.

[0067] The disturbance signal is applied, the quadrature signal is controlled as the disturbance signal, the in-phase signal is controlled as 0, and the feedback force signal is solved according to the quadrature loop equation and the in-phase loop equation, and the expression is:

[0068]

[0069] The simultaneous solution is:

[0070]

[0071] wherein, φf represents feedback force signal, φd represents disturbance signal, φd represents disturbance signal amplitude, φd represents disturbance signal frequency, φd represents disturbance signal application time, K represents system gain, which is a fixed value.

[0072] The error control signal is obtained by demodulating the feedback force signal by using the disturbance signal, and the expression is:

[0073]

[0074] wherein, φe represents error control signal.

[0075] The error control signal is controlled to be 0 in real time, so that the phase error is compensated in real time. Embodiment 3

[0076] The embodiment provides a closed-loop test of phase error of a gyro output signal of a micro-mechanical gyroscope. After realizing stable phase closed-loop compensation, phase errors of ±3º, ±6º and ±9º are input respectively, so that whether the phase can be controlled to be accurate value is tested, and meanwhile, the change of a controlled quantity containing phase error information in the process is observed.

[0077] As Figure 2 ​​​As shown in the figure, the red curve reflects the phase change with error, while the blue curve reflects the change in the error control signal at the corresponding moment. The figure shows that when a phase error is input, the previously stable phase suddenly changes to a phase value that contains the corresponding error. The corresponding error control signal also suddenly changes from its initial value near 0. The phase error compensation phase shift, under the action of the PID controller, is continuously adjusted toward zero, until the error control signal is adjusted back to near zero, at which point the phase is also adjusted back to the correct phase. For a phase error of ±3°, the entire control process takes only approximately 8 seconds. This closed-loop control speed is sufficient to meet the gyro's real-time compensation requirements for phase error changes during temperature fluctuations and other processes.

[0078] Phase error in a micromechanical gyroscope is a significant factor affecting its performance and operational stability. However, currently used signal detection circuits for micromechanical gyroscopes can only provide a fixed error compensation value, requiring offline testing methods to identify this phase error. However, these identification methods are not very accurate, and because phase error is caused by complex factors and can change with environmental factors such as temperature, traditional methods are ineffective.

[0079] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A micro-mechanical gyroscope error compensation circuit based on signal disturbance, wherein the micro-mechanical gyroscope comprises a driving electrode, a detection electrode, an axis adjustment electrode and a common terminal, characterized in that: The common end is connected to the input ends of the two demodulation units via a charge amplifier, the output end of one demodulation unit is connected to the input end of the driving loop via a first analog-to-digital converter, and the output end of the other demodulation unit is connected to the input ends of the in-phase loop and the orthogonal loop via a second analog-to-digital converter, and the output ends of the driving loop, the in-phase loop, and the orthogonal loop are connected to the driving electrode, the detection electrode, and the axis adjustment electrode respectively in sequence; It also includes an error compensation loop, which includes two disturbance signal output ends, wherein the first disturbance signal output end is connected to the orthogonal loop, and the second disturbance signal output end is connected to the multiplication demodulator and the PID controller in sequence, the output end of the PID controller is connected to the orthogonal loop, and the input end of the multiplication demodulator is also connected to the in-phase loop, the multiplication demodulator is used to multiply and demodulate the disturbance signal and the in-phase signal to obtain an error control signal, the PID controller is used to control the error control signal to 0 to obtain a phase compensation phase shift, and input the phase compensation phase shift into the orthogonal loop and the in-phase loop to achieve real-time compensation of the phase error.

2. The signal perturbation-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The disturbance signal is pre-set, and the setting condition is that the orthogonal loop still maintains signal stability after the disturbance signal is input.

3. The signal perturbation-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The demodulation units each include a high-pass filter, a multiplication demodulator, and a low-pass filter connected in sequence. The high-pass filter is used to filter out some low-frequency disturbance signals in the electrical signal. The multiplication demodulator in the demodulation unit connected to the first analog-to-digital converter is used to multiply and demodulate the electrical signal with the driving high-frequency carrier signal to obtain a driving signal. The multiplication demodulator in the demodulation unit connected to the second analog-to-digital converter is used to multiply and demodulate the electrical signal with the detection high-frequency carrier signal to obtain a detection signal.

4. The signal perturbation-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The driving loop includes two branches, the input ends of the two branches are connected to the output end of the first analog-to-digital converter, and the two branches are each provided with a first orthogonal demodulator, the first orthogonal demodulator of one branch is used to perform orthogonal demodulation on the driving signal to obtain a driving amplitude signal, and the first orthogonal demodulator of the other branch is used to perform orthogonal demodulation on the driving signal to obtain a driving phase signal; The driving phase signal is generated into a sinusoidal signal by a digitally controlled oscillator, and the sinusoidal signal is multiplied by the driving amplitude signal to obtain a driving output signal. The driving output signal is input to the driving electrode together with the input driving high-frequency carrier signal and the input driving AC voltage signal after passing through a digital-to-analog converter to achieve resonance and constant amplitude control of the gyroscope driving mode.

5. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 4, characterized in that: The in-phase loop includes a second orthogonal demodulator, a low-pass filter and a first PID controller connected in sequence. The second orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an in-phase signal. After the in-phase signal is filtered out of the high-frequency carrier signal and the high-frequency disturbance signal by the low-pass filter, the detection AC signal is controlled by the first PID controller to offset the detection signal to obtain a gyroscope output signal. The gyroscope output signal is multiplied by the sinusoidal signal to obtain a detection AC signal. The detection AC signal is converted into a detection AC voltage signal after passing through a digital-to-analog converter and is input together with the input detection DC voltage signal to the detection electrode to achieve real-time vibration suppression of the gyroscope detection method.

6. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 5, characterized in that: The orthogonal loop includes a third orthogonal demodulator, a low-pass filter and a second PID controller connected in sequence. The third orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an orthogonal signal. The orthogonal signal is filtered out of the high-frequency carrier signal and the high-frequency disturbance signal by the low-pass filter and then passed through the second PID controller as the controlled variable. The second PID controller controls the shaft adjustment voltage signal so that the orthogonal signal is controlled in real time. The shaft adjustment voltage signal is output to the shaft adjustment electrode via the digital-to-analog converter to suppress the orthogonal error.

7. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 6, characterized in that: The first disturbance signal output end is connected to the input end of the second PID controller, the input end of the multiplication demodulator is also connected to the output end of the first PID controller, and the output end of the PID controller is connected to the input end of the second orthogonal demodulator and the input end of the third orthogonal demodulator.

8. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 1, characterized in that: The error compensation loop further includes a low-pass filter connected to the output end of the first PID controller, and the low-pass filter is used to filter out the high-frequency carrier signal and the high-frequency disturbance signal in the in-phase signal to obtain the gyroscope output signal.

9. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 1, characterized in that: The PID controller is used to control the error control signal to 0 to obtain a phase compensation phase shift, and the derivation process of the phase compensation phase shift that can achieve real-time compensation of the phase error includes: When the micro-mechanical gyroscope is working stably, the in-phase signal and the orthogonal signal of the detection signal are obtained according to the gyroscope system comprehensive error, phase error and the phase error compensation phase shift calculation; Apply a disturbance signal, control the orthogonal signal to the disturbance signal, and control the in-phase signal to 0. Solve the orthogonal loop equation and the in-phase loop equation to obtain the feedback force signal: Demodulating the feedback force signal using the disturbance signal to obtain an error control signal; The real-time control error control signal is 0, which means that the phase error is compensated in real time.

10. The signal perturbation-based micro-mechanical gyroscope error compensation circuit according to claim 9, characterized in that: The expressions for the in-phase signal and the quadrature signal of the detection signal obtained by calculating the in-phase signal and the quadrature signal of the detection signal according to the gyro system comprehensive error, the phase error and the compensated phase shift of the phase error are: ； in, represents the in-phase signal, represents the orthogonal signal, It represents the signal output of the micromechanical gyroscope due to the stiffness coupling error, It represents the signal output of the micromechanical gyroscope due to the damping coupling error, represents the phase error, represents the phase compensation phase shift, Represents the feedback force of the micro-mechanical gyroscope signal output; The expression of the feedback force signal obtained by solving the orthogonal loop equation and the in-phase loop equation is: ； Solving the equations together: ； in, represents the feedback force signal, represents the disturbance signal, represents the amplitude of the disturbance signal, represents the frequency of the disturbance signal, represents the disturbance signal application time, Represents the system gain, which is a fixed value; The expression of the error control signal obtained by demodulating the feedback force signal using the disturbance signal is: ； in, Represents the error control signal.

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