Steel cylinder passivation device and method capable of achieving uniform heating

Abstract

The steel cylinder passivation device comprises a cabinet body, a control panel, a first controller and a second controller are arranged on the right side of the cabinet body, and the first controller and the second controller are electrically connected with the control panel. A heat dissipation mechanism electrically connected with the first controller is arranged at the top of the cabinet body; a steel cylinder base is rotationally connected to the bottom in the cabinet body, a motor used for driving the steel cylinder base to rotate is arranged at the bottom of the cabinet body, a heat dissipation plate and a space heating mechanism are arranged on the inner side of the cabinet body, and the heat dissipation plate and the space heating mechanism are both electrically connected with the second controller. The steel cylinder base drives the steel cylinder to rotate, and the space heating mechanism heats the steel cylinder, so that passivation gas in the steel cylinder is in full contact with the inner wall of the steel cylinder, and a more uniform and compact passivation film is formed. Meanwhile, when the steel cylinder rotates, the heat dissipation plate can evenly and fully heat the outer wall of the steel cylinder, and therefore the passivation film is more even.

Description

Technical Field

[0001] The invention belongs to the field of electronic mixed gas cylinder passivation devices, and in particular relates to a cylinder passivation device and method with uniform heating. Background Art

[0002] Electronic mixed gas is widely used in the manufacturing fields of integrated circuits, display panels, etc., and is a vital gas material for the manufacture of electronic components in these fields. Electronic mixed gas is a mixed gas prepared by mixing two or more gases. Electronic mixed gas is mainly used as etching gas, doping gas, epitaxial gas, etc. in the manufacturing process of integrated circuits. The purity of the electronic mixed gas and the impurity content therein have a great influence on the yield rate of integrated circuits. Therefore, before filling the electronic mixed gas whose component gas is corrosive gas, it is often necessary to passivate the inner wall of the gas cylinder. The corrosive gas reacts chemically with the inner wall of the cylinder to form an inert passivation film to prevent the unpassivated inner wall of the cylinder from affecting the quality of the mixed gas product.

[0003] In the existing cylinder passivation device, the cylinder is fixed during passivation, so the temperature of the part close to the heat source is high, and the temperature of the part far from the heat source is low, resulting in uneven passivation of the cylinder. In addition, the temperature of the existing cylinder is low during passivation, and the passivation gas in the cylinder is not fully in contact with the inner wall of the cylinder. These factors will prolong the time required for cylinder passivation, reduce the effect of the passivation of the inner wall of the cylinder, and thus affect the quality of the mixed gas product.

[0004] The patent with publication number CN218321576U discloses an automatic cylinder passivation device, including a bottom plate, a heater is fixedly mounted on the bottom plate, a mounting frame is sleeved on the outer side of the heater, a plurality of slots are arranged in the heater, cylinders are inserted in the plurality of slots, a lifting plate is arranged on the upper part of the cylinder in the mounting frame, a three-hole gas distributor seat is fixedly mounted at the bottom end of the lifting plate corresponding to the plurality of cylinders, a sealing seat is fixedly mounted at the bottom end of the plurality of three-hole gas distributor seats, a plurality of sealing seats are sleeved on the corresponding cylinders respectively, a gas collecting seat is fixedly mounted on the top end of the mounting frame, a diverter seat is fixedly mounted at the rear end of the gas collecting seat, and a first connecting pipe is fixedly mounted at the front end of the plurality of three-hole gas distributor seats. The automatic cylinder passivation device can automatically perform passivation processing on a plurality of cylinders. However, since the size of the heater slot is fixed, only cylinders of one diameter and height can be passivated. The passivation device for a carbon monoxide storage cylinder disclosed in the patent with publication number CN216107157U also has the problem that it can only passivate cylinders of one diameter and height because the size of its insulation tank is fixed. Summary of the invention

[0005] The object of the present invention is to provide a uniformly heated steel cylinder passivation device and method, so that the steel cylinder is heated more uniformly during passivation and the passivation film formed is also more uniform, so as to ensure the quality of the mixed gas product.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is:

[0007] A steel cylinder passivation device with uniform heating comprises a cabinet, a control panel and a first controller and a second controller electrically connected to the control panel respectively are arranged on the right side of the cabinet; a heat dissipation mechanism electrically connected to the first controller is arranged on the top of the cabinet; a steel cylinder base is rotatably connected to the bottom of the cabinet, a motor for driving the steel cylinder base to rotate is arranged at the bottom of the cabinet, a heat dissipation plate and a space heating mechanism are arranged on the inside of the cabinet, and the heat dissipation plate and the space heating mechanism are electrically connected to the second controller.

[0008] Furthermore, an outer door is installed on the front of the cabinet, an observation window is provided on the outer door, the outer door and the cabinet are hinged, and a door pin is provided on the outer side of the outer door; the cabinet and the outer door are made of high-temperature resistant insulation material; the door pin is used to lock the outer door to the cabinet, and the observation window is used to observe the internal situation of the cabinet when the device is running. The cabinet and the outer door are hinged by a door hinge.

[0009] Furthermore, the heat dissipation mechanism includes an air hole arranged on the top of the cabinet, a mesh cover fixedly connected to the top of the cabinet, and a fan fixedly arranged in the mesh cover. The air hole is located in the mesh cover, and the air hole connects the inside and outside of the cabinet to balance the air pressure inside and outside the cabinet. The fan is used to make the air flow flow inside and outside the cabinet to achieve the purpose of regulating the internal temperature of the cabinet. The mesh cover is used to protect the fan.

[0010] Furthermore, the heat dissipation plate divides the interior of the cabinet into a first cavity and a second cavity, the space heating mechanism is arranged in the first cavity, and the cylinder base and the cylinder limiting mechanism are both arranged in the second cavity; temperature sensors are provided on the inner walls on the left and right sides of the cabinet in the second cavity.

[0011] Furthermore, the space heating mechanism includes a heating coil and coil holders arranged at both ends of the heating coil. When the heating coil is energized, it generates electromagnetic eddy currents, which heats up the first cavity and transfers the heat to the second cavity through the heat sink. The coil holders at both ends of the heating coil are fixedly connected to the top and bottom of the inner side of the cabinet, respectively.

[0012] Furthermore, an electromagnet is fixedly connected to the cylinder base for adsorbing the bottom of the cylinder; a cylinder limiting mechanism is provided in the middle of the inner side of the cabinet, and the cylinder limiting mechanism is located in the middle of the inner side of the cabinet. The cylinder limiting mechanism includes two arc-shaped clamping claws that are buckled together and telescopic mechanisms respectively arranged on the outside of the clamping claws.

[0013] Furthermore, fixing screws are fixedly connected to the upper side of the clamp at both ends, connecting gaskets are sleeved on the two corresponding fixing screws, and fixing nuts are screwed on the fixing screws.

[0014] Furthermore, the connection gasket is provided with two holes, which are respectively sleeved on the corresponding fixing screws, and the two clamping claws are locked after the nut is tightened.

[0015] Furthermore, the telescopic mechanism includes a telescopic slide groove fixedly connected to the middle part of the outer side of each clamping jaw and a connecting rod arranged on the telescopic slide groove, the telescopic slide groove is arranged along the radial direction of the clamping jaw, and the connecting rod includes a plurality of mutually parallel transverse connecting rods and an oblique connecting rod hinged in an X shape and arranged between two adjacent transverse connecting rods, the transverse connecting rod close to the clamping jaw is fixedly connected to the telescopic slide groove, and both ends of the remaining transverse connecting rods are fixedly provided with connecting rod connecting blocks that can slide along the telescopic slide groove; each transverse connecting rod is provided with a slide groove, and the ends of the oblique connecting rods are rotatably connected to pulleys that can roll along the slide groove; the transverse connecting rod close to the cabinet is fixedly connected to the cabinet body through a connecting rod, and the connecting rod is slidably connected to the telescopic slide groove.

[0016] A uniformly heated steel cylinder passivation method, using the uniformly heated steel cylinder passivation device, the steps are as follows:

[0017] S1, place the steel cylinder filled with passivation gas to be passivated on the steel cylinder base, and close the outer door on the cabinet;

[0018] S2, through the control panel, turn on the heat dissipation mechanism and the space heating mechanism in turn, the control panel controls the heating power of the space heating mechanism, thereby adjusting the temperature inside the cabinet. After the temperature inside the cabinet is stable, the control panel controls the motor to run, drive the cylinder base to rotate, and can adjust its speed;

[0019] S3, after the passivation is completed, the space heating mechanism is turned off through the control panel and the rotation of the cylinder base is stopped; the outer door set on the cabinet is opened to accelerate the heat dissipation inside the cabinet, and after the temperature drops to room temperature, the passivated cylinder is taken out.

[0020] The positive effects of the present invention are:

[0021] 1. The space heating mechanism of the present invention generates heat through electromagnetic eddy currents generated by the heating coil, which can make the inside of the cabinet reach a higher temperature level (such as >100°C). At the same time, the cabinet and the outer door are both made of high-temperature resistant insulation materials, so the heat will not be lost too quickly. At a higher temperature level, the reaction between the passivation gas and the inner wall of the cylinder can be accelerated to form a passivation film, shortening the passivation time.

[0022] 2. The cylinder base at the bottom of the inner side of the cabinet of the present invention can rotate under the drive of the motor. The cylinder base is provided with an electromagnet. The cylinder to be passivated can be easily adsorbed on the electromagnet, so that the cylinder rotates, and finally the passivation gas inside the cylinder is fully in contact with the inner wall of the cylinder, forming a more uniform and dense passivation film. At the same time, when the cylinder rotates, the heat sink will evenly and fully heat the outer wall of the cylinder, so that the passivation film is more uniform.

[0023] 3. The cabinet of the present invention is provided with a heat dissipation mechanism on the top, which can dissipate the heat inside the cabinet to the outside, so as to adjust the cabinet temperature. In addition, the heat dissipation plate inside the cabinet can also radiate the heat generated by the space heating mechanism to the cylinder placement area, so that the cylinder does not directly contact the space heating mechanism, thereby reducing the danger.

[0024] 4. The present invention is provided with a steel cylinder limiting mechanism, which is provided with two clamping claws, which hold the steel cylinder, and there is a gap between the clamping claws and the steel cylinder. When the steel cylinder rotates, the clamping claws can protect the steel cylinder and prevent the steel cylinder from accidentally tipping over. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a three-dimensional diagram of the passivation device of the present invention;

[0026] Figure 2 It is a schematic diagram of the internal structure of the passivation device of the present invention;

[0027] Figure 3 A top view of the heat dissipation mechanism of the passivation device of the present invention;

[0028] Figure 4 is a schematic diagram of a heating mechanism in a passivation device of the present invention;

[0029] Figure 5 It is a schematic diagram of the appearance of the steel cylinder fixing mechanism of the passivation device of the present invention;

[0030] Figure 6 It is a top view of the telescopic mechanism of the steel cylinder fixing mechanism of the present invention;

[0031] Figure 7 It is a schematic diagram of the clamping jaw connecting the gasket of the present invention;

[0032] In the figure:

[0033] 1. Cabinet; 11. External door; 111. Observation window; 112. Door hinge; 113. Door pin; 12. Control panel; 13. First controller; 14. Second controller; 2. Heat dissipation mechanism; 21. Air hole; 22. Fan; 23. Mesh cover; 3. Space heating mechanism; 31. Heating coil; 32. Coil holder; 4. Cylinder limiting mechanism; 41. Clamp; 42. Telescopic mechanism; 421. Connecting rod; 4211. Horizontal connecting rod; 4212. Oblique connecting rod; 4213. Slide; 422. Telescopic slide; 423. Pulley; 424. Connecting rod connecting block; 43. Fixing screw; 44. Fixing nut; 45. Connecting gasket; 451. Hole; 5. Cylinder base; 51. Electromagnet; 6. Heat sink; 7. Temperature sensor. DETAILED DESCRIPTION

[0034] Example 1

[0035] like Figures 1 to 4 As shown, a cylinder passivation device with uniform heating includes a cabinet 1, a control panel 12 and a first controller 13 and a second controller 14 electrically connected to the control panel 12 are provided on the right side of the cabinet 1, and the first controller 13 and the second controller 14 are both arranged above the control panel 12. The control panel 12 adopts a touch screen. A heat dissipation mechanism 2 electrically connected to the first controller 13 is provided on the top of the cabinet 1, a cylinder base 5 is rotatably connected to the bottom of the cabinet 1, a motor is provided at the bottom of the cabinet 1 that is transmission-connected to the cylinder base 5, and is used to drive the cylinder base 5 to rotate, a cylinder limiting mechanism 4 is provided at the middle of the inner side of the cabinet 1, a heat dissipation plate 6 is provided at the rear of the cabinet 1, a space heating mechanism 3 is provided behind the heat dissipation plate 6, and the heat dissipation plate 6 and the space heating mechanism 3 are both electrically connected to the second controller 14.

[0036] The cabinet 1 is provided with an outer door 11 on the front side (i.e., the front side), and an observation window 111 is provided on the outer door 11. The left side of the outer door 11 is hinged to the cabinet 1, and a door pin 113 is provided on the outer side of the outer door 11. The cabinet 1 and the outer door 11 are both made of high-temperature resistant heat-insulating materials. After the outer door 11 is closed, the door pin 113 locks the outer door 11 on the cabinet 1. The observation window 111 is used to observe the internal situation of the cabinet 1 when the present invention is in operation. The cabinet 1 and the outer door 11 are hinged by a door hinge 112.

[0037] The heat dissipation mechanism 2 includes an air hole 21 arranged on the top of the cabinet 1, a mesh cover 23 fixedly connected to the top of the cabinet 1, and a fan 22 fixedly arranged in the mesh cover 23. The air hole 21 is located in the mesh cover 23. The air hole 21 connects the inside and outside of the cabinet 11 to balance the air pressure inside and outside the cabinet 1. The fan 22 is used to make the air flow flow inside and outside the cabinet 11 to achieve the purpose of adjusting the internal temperature of the cabinet 11. The mesh cover 23 is used to protect the fan 22.

[0038] The heat dissipation plate 6 divides the interior of the cabinet 1 into a first cavity at the rear and a second cavity at the front. The space heating mechanism 3 is arranged in the first cavity, and the cylinder base 5 and the cylinder limiting mechanism 4 are arranged in the second cavity. Temperature sensors 7 are provided on the inner walls on the left and right sides of the cabinet 1 in the second cavity.

[0039] The space heating mechanism 3 includes a heating coil 31 and coil holders 32 arranged at both ends of the heating coil 31. When the heating coil 31 is energized, it generates electromagnetic eddy currents to heat up the first cavity and transfer the heat to the second cavity through the heat sink 6. The coil holders 32 at both ends of the heating coil 31 are fixedly connected to the top and bottom of the inner side of the cabinet 1 respectively.

[0040] The steel cylinder passivation method using the above-mentioned uniformly heated steel cylinder passivation device is as follows:

[0041] S1, placing the steel cylinder to be passivated filled with passivation gas on the steel cylinder base 5, and closing the outer door 11;

[0042] S2, through the control panel 12, the heat dissipation mechanism 2 and the space heating mechanism 3 are turned on in sequence. The control panel 12 can control the heating power of the space heating mechanism 3 by controlling the alternating current frequency of the heating coil 31 and the number of heating coils 31 in operation, thereby adjusting the temperature in the cabinet 1. After the temperature is stable, the control panel 12 starts the motor through the inverter, drives the cylinder to rotate through the cylinder base 5, and adjusts the rotation speed of the cylinder by changing the frequency;

[0043] S3, after the passivation is completed, the space heating mechanism 3 is turned off and the rotation of the cylinder base 5 is stopped through the control panel 12; the outer door 11 set on the cabinet 1 is opened to accelerate the heat dissipation inside the cabinet 1, and after the temperature drops to room temperature, the passivated cylinder is taken out.

[0044] The heating principle of the present invention is to make an alternating current of a certain frequency pass through the heating coil 31 to generate electromagnetic eddy current, thereby generating heat, providing a suitable passivation temperature for the passivation of the steel cylinder, and shortening the time for the formation of the passivation film. Since the steel cylinder base 5 can drive the steel cylinder to rotate, the passivation gas inside the steel cylinder is fully in contact with the inner wall of the steel cylinder, forming a more uniform and dense passivation film. At the same time, when the steel cylinder rotates, the heat sink 6 will evenly and fully heat the outer wall of the steel cylinder, so that the passivation film is more uniform. In this embodiment, the length and diameter of the steel cylinder are not limited, as long as it can be placed on the steel cylinder base 5 in the cabinet 1, it can be passivated.

[0045] Example 2

[0046] The difference between this embodiment and embodiment 1 is that:

[0047] The steel cylinder base 5 is fixedly connected with an electromagnet 51 for adsorbing the bottom of the ferromagnetic steel cylinder;

[0048] The electromagnet 51 is controlled by the control panel 12, so that the steel cylinder can be firmly adsorbed. By arranging the electromagnet 51, the steel cylinder can be taken and placed more conveniently and reliably, which saves time and improves work efficiency.

[0049] Example 3

[0050] Combination Figures 5 to 7 As shown, the difference between this embodiment and embodiment 2 is that:

[0051] A cylinder limiting mechanism 4 is provided in the middle of the second cavity in the cabinet 1. The cylinder limiting mechanism 4 includes two semicircular arc-shaped clamping jaws 41 buckled together and telescopic mechanisms 42 respectively provided on the outside of the clamping jaws 41. The clamping jaws 41 can be selected according to the diameter of the cylinder, and the axes of the two clamping jaws 41 are both vertical. Vertical fixing screws 43 are fixedly connected to the upper ends of the clamping jaws 41, and two corresponding fixing screws 43 are sleeved with connecting gaskets 45, each connecting gasket 45 is provided with two holes 451, and the two holes 451 are respectively sleeved on the corresponding fixing screws 43, and the fixing screws 43 are screwed with fixing nuts 44; after the nuts 44 are tightened, the connecting gaskets 45 are pressed against the clamping jaws 41, thereby locking the two clamping jaws 41 and locking the positions of the two clamping jaws 41.

[0052] The telescopic mechanism 42 includes a connecting rod 421 , a telescopic sliding slot 422 , a pulley 423 , and a connecting rod connecting block 424 .

[0053] The telescopic mechanism 42 includes a telescopic slot 422 fixedly arranged in the middle of the outer side of each clamping jaw 41 and a connecting rod 421 arranged on the telescopic slot 422. The telescopic slot 422 is arranged along the radial direction of the clamping jaw 41. The connecting rod 421 includes six mutually parallel transverse connecting rods 4211 and an oblique connecting rod 4212 arranged between two adjacent transverse connecting rods 4211 and hinged in an X shape. There are five pairs of oblique connecting rods 4212. The transverse connecting rods 4211 close to the clamping jaw 41 are fixedly connected to the telescopic slot 422, and the two ends of the remaining transverse connecting rods 4211 are fixedly provided with connecting rod connecting blocks 424 that can slide along the telescopic slot 422. Each transverse connecting rod 4211 is provided with a slot 4213, and the ends of the oblique connecting rods 4212 are rotatably connected with pulleys 423 that can roll along the slot 4213. The horizontal connecting rod 4211 close to the cabinet body 1 is fixedly connected to the cabinet body 1 via a connecting rod, and the connecting rod is slidably connected to the telescopic sliding groove 422 .

[0054] When the steel cylinder is attracted to the electromagnet 51, the two clamping jaws 41 are pulled inward, and then the two clamping jaws 41 are connected through the connecting gasket 45 and the fixing nut 44. The two clamping jaws 41 hold the steel cylinder, and there is a gap between the clamping jaws 41 and the steel cylinder. When the steel cylinder rotates, the clamping jaws 41 can protect the steel cylinder and prevent the steel cylinder from accidentally tipping over.

[0055] When the clamping jaw 41 is pulled, the pulley 423 rolls along the slide groove 4213, and the connecting rod connecting block 424 slides along the telescopic slide groove 422, thereby guiding the movement of the clamping jaw 41 to ensure that the clamping jaw 41 is accurately held outside the cylinder.

[0056] The above-mentioned embodiments are described in a relatively detailed and specific manner, expressing the preferred embodiments of the present invention, and are only used to illustrate the technical ideas and features of the present invention. The purpose is to enable technicians in this field to understand the contents of the present invention and implement them accordingly, but are not limited to the present invention. The patent scope of the present invention cannot be limited only by this embodiment, that is, any equivalent changes or modifications made to the spirit disclosed by the present invention, for researchers or technicians in this field, without departing from the structure of the present invention, local improvements within the system and changes and conversions between subsystems, etc., are still within the patent scope of the present invention.

Claims

1. A uniformly heated cylinder passivation device, characterized in that: The invention comprises a cabinet (1), wherein a control panel (12) and a first controller (13) and a second controller (14) which are respectively electrically connected to the control panel (12) are arranged on the right side of the cabinet (1); a heat dissipation mechanism (2) which is electrically connected to the first controller (13) is arranged on the top of the cabinet (1); a steel cylinder base (5) is rotatably connected to the bottom of the cabinet (1), a motor for driving the steel cylinder base (5) to rotate is arranged at the bottom of the cabinet (1), a heat dissipation plate (6) and a space heating mechanism (3) are arranged on the inside of the cabinet (1), and both the heat dissipation plate (6) and the space heating mechanism (3) are electrically connected to the second controller (14).

2. A uniformly heated cylinder passivation device according to claim 1, characterized in that: The cabinet (1) is provided with an outer door (11) on the front, and an observation window (111) is provided on the outer door (11). The outer door (11) and the cabinet (1) are hinged, and a door pin (113) is provided on the outer side of the outer door (11); the cabinet (1) and the outer door (11) are both made of high-temperature resistant heat-insulating material; the door pin (113) is used to lock the outer door (11) on the cabinet (1), and the observation window (111) is used to observe the internal situation of the cabinet (1) when the device is running; the cabinet (1) and the outer door (11) are hinged via a door hinge (112).

3. A uniformly heated cylinder passivation device according to claim 1, characterized in that: The heat dissipation mechanism (2) comprises an air hole (21) arranged on the top of the cabinet (1), a mesh cover (23) fixedly connected to the top of the cabinet (1), and a fan (22) fixedly arranged in the mesh cover (23); the air hole (21) is located in the mesh cover (23); the air hole (21) connects the inside and outside of the cabinet (11) and is used to balance the air pressure inside and outside the cabinet (11); the fan (22) is used to make the air flow flow inside and outside the cabinet (11) to achieve the purpose of adjusting the internal temperature of the cabinet (11); the mesh cover (23) is used to protect the fan (22).

4. A uniformly heated cylinder passivation device according to claim 1, characterized in that: The heat dissipation plate (6) divides the interior of the cabinet (1) into a first chamber and a second chamber, the space heating mechanism (3) is arranged in the first chamber, and the cylinder base (5) and the cylinder limiting mechanism (4) are both arranged in the second chamber; temperature sensors (7) are arranged on the inner walls on the left and right sides of the cabinet (1) in the second chamber.

5. A uniformly heated cylinder passivation device according to claim 4, characterized in that: The space heating mechanism (3) comprises a heating coil (31) and coil holders (32) arranged at both ends of the heating coil (31). When the heating coil (31) is energized, an electromagnetic eddy current is generated to heat the first cavity, and the heat is transferred to the second cavity through the heat dissipation plate (6). The coil holders (32) at both ends of the heating coil (31) are respectively fixedly connected to the top and bottom of the inner side of the cabinet (1).

6. A uniformly heated cylinder passivation device according to claim 4, characterized in that: An electromagnet (51) is fixedly connected to the steel cylinder base (5) for adsorbing the bottom of the steel cylinder; a steel cylinder limiting mechanism (4) is provided in the middle of the inner side of the cabinet (1); the steel cylinder limiting mechanism (4) is located in the middle of the inner side of the cabinet (1); the steel cylinder limiting mechanism (4) comprises two arc-shaped clamping claws (41) buckled together and telescopic mechanisms (42) respectively arranged on the outer sides of the clamping claws (41).

7. A uniformly heated cylinder passivation device according to claim 6, characterized in that: The upper side of the clamping jaw (41) is fixedly connected with fixing screws (43) at both ends, and connecting gaskets (45) are sleeved on the two corresponding fixing screws (43), and fixing nuts (44) are screwed on the fixing screws (43).

8. A uniformly heated cylinder passivation device according to claim 7, characterized in that: The connection gasket (45) is provided with two holes (451), and the two holes (451) are respectively sleeved on the corresponding fixing screws (43). After the nut (44) is tightened, the two clamping jaws (41) are locked.

9. A uniformly heated cylinder passivation device according to claim 8, characterized in that: The telescopic mechanism (42) comprises a telescopic slot (422) fixedly connected to the middle part of the outer side of each clamping jaw (41) and a connecting rod (421) arranged on the telescopic slot (422), wherein the telescopic slot (422) is arranged along the radial direction of the clamping jaw (41), and the connecting rod (421) comprises a plurality of mutually parallel transverse connecting rods (4211) and an oblique connecting rod (4212) arranged between two adjacent transverse connecting rods (4211) and hinged in an X shape, wherein the transverse connecting rod (4211) close to the clamping jaw (41) is connected to the telescopic slot (422). The cabinet body (1) is fixedly connected to the cabinet body (1) through a connecting rod, and both ends of the other transverse connecting rods (4211) are fixedly provided with connecting rod connecting blocks (424) that can slide along the telescopic sliding groove (422); each transverse connecting rod (4211) is provided with a sliding groove (4213), and the ends of the oblique connecting rods (4212) are rotatably connected to pulleys (423) that can roll along the sliding groove (4213); the transverse connecting rod (4211) close to the cabinet body (1) is fixedly connected to the cabinet body (1) through a connecting rod, and the connecting rod is slidably connected to the telescopic sliding groove (422).

10. A method for passivating a steel cylinder by uniform heating, characterized in that: The uniformly heated cylinder passivation device according to any one of claims 1 to 9 is used, and the steps are as follows: S1, placing a steel cylinder to be passivated filled with passivating gas on a steel cylinder base (5), and closing an outer door (11) on a cabinet (1); S2, through the control panel (12), the heat dissipation mechanism (2) and the space heating mechanism (3) are turned on in sequence, and the control panel (12) controls the heating power of the space heating mechanism (3), thereby adjusting the temperature in the cabinet (1). After the temperature in the cabinet (1) is stabilized, the control panel (12) controls the motor to operate, driving the cylinder base (5) to rotate, and the rotation speed thereof can be adjusted; S3, after the passivation is completed, the space heating mechanism (3) is turned off and the rotation of the cylinder base (5) is stopped through the control panel (12); the outer door (11) provided on the cabinet (1) is opened to accelerate the heat dissipation inside the cabinet (1); after the temperature drops to room temperature, the passivated cylinder is taken out.

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