Vacuum interface cavity

Abstract

The invention belongs to the technical field of vacuum cavities, and discloses a vacuum interface cavity which comprises a vacuum cavity body, a butt joint opening is formed in the front face of the vacuum cavity body, a negative pressure opening is formed in the side face of the vacuum cavity body, a three-way valve is fixedly communicated with one side of the bottom end of the negative pressure opening, and a temporary storage box is fixedly communicated with the bottom end of the three-way valve. And the rear side, close to the bottom end, of the temporary storage box fixedly communicates with a communicating pipe, side plates are installed on the left side and the right side of the bottom end of the vacuum cavity correspondingly, and a limiting assembly is movably installed at the bottom end of a butt joint opening. According to the invention, through the cooperation among the limiting assemblies, the side plates and the transverse guide rails, when the device is used, only the butt joint port needs to be in butt joint with an external device, after butt joint is completed, the indication process can be automatically realized through the cooperation of the limiting assemblies, the whole process can be automatically completed, it is ensured that the device can be rapidly indicated to be installed in place, and the efficiency is improved. The abrasion phenomenon caused by excessive butt joint is avoided, and the usability of the device is remarkably improved.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum chambers, in particular to a vacuum interface chamber. Background Art

[0002] The vacuum interface cavity is an intermediary structure used to connect the vacuum system with other equipment or devices. Its function is to provide an effective interface to ensure the gas exchange, pressure maintenance and mechanical connection stability between the external system and the vacuum environment. The vacuum interface cavity is widely used in many scientific experiments, industrial production and high-tech equipment, especially in occasions where the vacuum state needs to be controlled and maintained, such as semiconductor manufacturing, vacuum heat treatment, particle accelerators, electron beam microscopes, etc.

[0003] Conventional vacuum interface cavities generally include a docking port for connecting other devices. During normal use, such a docking port must remain completely sealed during docking due to high sealing requirements. However, after successful docking and in place, the current vacuum interface cavity does not have a certain indication function, resulting in an inability to judge whether the docking is in place. Excessive docking often occurs, causing certain wear and tear, and improvement is urgently needed.

[0004] At the same time, since the vacuum interface cavity is mainly used for gas exchange, it has high requirements for sealing. When the docking is completed and disassembly is required, it is difficult to pull out the interface cavity due to excessive pressure and contact of the sealing ring. The entire disassembly process requires a lot of effort and cannot be quickly disassembled. Summary of the invention

[0005] The purpose of the present invention is to provide a vacuum interface chamber to solve the problems raised in the above background technology.

[0006] In order to achieve the above-mentioned purpose, the present invention provides the following technical scheme: a vacuum interface cavity, comprising a vacuum cavity, the front side of the vacuum cavity is provided with a docking port, the side side of the vacuum cavity is provided with a negative pressure port, one side of the bottom end of the negative pressure port is fixedly connected with a three-way valve, the bottom end of the three-way valve is fixedly connected with a temporary storage box, the rear side of the temporary storage box near the bottom end is fixedly connected with a connecting pipe, side panels are installed on the left and right sides of the bottom end of the vacuum cavity, a limiting assembly is movably installed at the bottom end of the docking port, a transverse guide rail is fixedly installed at the bottom end of the vacuum cavity, the bottom end of the limiting assembly is movably engaged with the transverse guide rail, an auxiliary disassembly and assembly assembly is fixedly installed at a position near the rear side of the bottom end of the vacuum cavity, a linkage assembly is fixedly installed at the front end of the auxiliary disassembly and assembly assembly, the front end of the linkage assembly is connected to the rear end of the limiting assembly, and one side of the auxiliary disassembly and assembly assembly is fixedly connected with the connecting pipe.

[0007] During normal use, the docking port can be connected to the external device, and the negative pressure port can be connected to the external negative pressure pump for vacuuming the device. The output end of the negative pressure pump is connected to the top of the three-way valve through a pipeline to ensure that the air sucked out by the negative pressure can be transmitted to the inside of the three-way valve, completing the preparations before installation.

[0008] As a further technical solution of the present invention, the limiting assembly includes a guide block, which is movably connected to the bottom end of the docking port, and the guide block is displaced up and down relative to the docking port. The left and right sides of the bottom end of the guide block are fixedly installed with a first fixed seat, and the end of the first fixed seat away from the guide block is movably connected to a first connecting rod through a rotating shaft.

[0009] As a further technical solution of the present invention, one end of the first connecting rod away from the first fixed seat is movably connected to the second fixed seat through a rotating shaft, and a transverse guide block is fixedly installed on the bottom end of the second fixed seat, and the transverse guide block is movably connected to the transverse guide rail.

[0010] As a further technical solution of the present invention, an indicator rod is fixedly installed at one end of the two lateral guide blocks that are relatively far away, and when the distance between the two lateral guide blocks is at a maximum value, the two indicator rods penetrate one side of the side plate.

[0011] When the docking interface is docked with an external device and the external device is fully installed into the interior of the docking interface, a force can be applied to the guide block. At this time, the guide block moves downward under the force, and a force can be applied to the first connecting rod. The two first connecting rods are then deflected to the relatively distant side, and a thrust is applied to the two lateral guide blocks. At this time, the two lateral guide blocks are relatively distant from each other. At the same time, the lateral guide blocks can be relatively distant from each other under the guidance of the lateral guide rails, and drive the two indicator rods to be relatively distant from each other until the two indicator rods pass through one side of the side plate. At this time, the guide block no longer continues to move downward, and the docking interface is installed in place, completing the indication process after installation.

[0012] By utilizing the cooperation between the limit assembly and the side panels and transverse guide rails, when the device is in use, it is only necessary to dock the docking port with the external device. After the docking is completed, the indication process can be automatically realized through the cooperation of the limit assembly. The entire process can be completed automatically, ensuring that the device can be quickly indicated to be installed in place, avoiding wear caused by excessive docking, and significantly improving the ease of use of the device.

[0013] As a further technical solution of the present invention, the auxiliary disassembly and assembly component includes a locking frame, which is connected to the bottom end of the docking port, a gas storage pipe is fixedly sleeved in the middle of the locking frame, a piston plate is movably sleeved inside the gas storage pipe, and a piston rod is fixedly installed at one end of the piston plate away from the locking frame.

[0014] As a further technical solution of the present invention, the outer side surface of the piston rod is movably sleeved with a limit spring, the front and rear ends of the limit spring are connected to one end of the piston plate and one end of the inner cavity of the air storage tube, and the side of the air storage tube close to the front end is fixedly connected to an injection valve, and the other end of the injection valve is fixedly connected to the connecting pipe.

[0015] When the two lateral guide blocks move away from each other due to the descent of the guide blocks, the two fourth fixing frames move away from each other and exert a force on the second connecting rod, that is, drive the two second connecting rods to deflect in the direction away from the middle, drive the movable plate to move forward, and exert a force on the auxiliary disassembly and assembly assembly.

[0016] As a further technical solution of the present invention, the linkage assembly includes a movable plate, the movable plate is connected to the piston rod, and third fixing frames are fixedly installed on both left and right sides of the movable plate away from the piston rod.

[0017] As a further technical solution of the present invention, one end of the third fixed frame away from the movable plate is movably connected to the second connecting rod via a rotating shaft, and one end of the second connecting rod away from the third fixed frame is movably connected to the fourth fixed frame via a rotating shaft, and the front end of the fourth fixed frame is connected to the rear end of the transverse guide block.

[0018] When the movable plate moves forward, the piston plate and the piston rod can be driven to move forward, and the limit spring is compressed accordingly, and the device is in the installed position state; After installation, the inside of the device can be evacuated by an external negative pressure pump, and the gas inside the device is then introduced into the temporary storage box through a three-way valve for temporary storage; When the device needs to be disassembled, the valve at the rear end of the temporary storage box can be opened. At this time, compressed air enters the interior of the air injection valve through the connecting pipe and applies pressure to the piston plate. At this time, the limit spring is stretched, and at the same time, the piston rod is driven to move backward. At this time, the movable plate is displaced to the rear side. At this time, the two second connecting rods are deflected toward the middle, and at the same time, the two fourth fixed frames are driven to be relatively close. At this time, the two lateral guide blocks are relatively close, and the two first connecting rods are deflected toward the middle and apply an upward thrust to the guide blocks. At this time, the guide blocks rise and apply a force to the external equipment inside the docking interface, so that the docking interface and the external equipment are separated, completing the auxiliary separation process.

[0019] By utilizing the vacuuming process required when installing the device, the air exhausted by the vacuuming is temporarily stored and introduced into the interior of the auxiliary disassembly and assembly component when needed, and by utilizing the coordination of the limit component, the linkage component and the auxiliary disassembly and assembly component, a force is applied between the external device and the docking port to assist their separation and complete the separation process, thereby effectively avoiding the problem of difficulty in separation caused by sealing and pressure in traditional devices and improving the disassembly and assembly efficiency.

[0020] The beneficial effects of the present invention are as follows: (1) The present invention utilizes the cooperation between the limit assembly and the side plate and the transverse guide rail so that when the device is in use, it only needs to dock the docking port with the external device. After the docking is completed, the indication process can be automatically realized through the cooperation of the limit assembly. The entire process can be completed automatically, ensuring that the device can be quickly indicated to be installed in place, avoiding wear caused by excessive docking, and significantly improving the ease of use of the device.

[0021] (2) The present invention utilizes the vacuuming process required when installing the device, temporarily stores the air exhausted by the vacuuming, and introduces it into the interior of the auxiliary disassembly and assembly component when necessary. It also utilizes the coordination process of the limit assembly, the linkage assembly and the auxiliary disassembly and assembly component to apply a force between the external device and the docking port to assist in their separation and complete the separation process, thereby effectively avoiding the problem of difficulty in separation caused by sealing and pressure in traditional devices and improving the disassembly and assembly efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a front schematic diagram of the overall structure of the present invention; Figure 2 It is a back schematic diagram of the overall structure of the present invention; Figure 3 It is a schematic diagram of the coordination of the three-way valve and the temporary storage box structure of the present invention; Figure 4 It is a schematic diagram of the coordination of the transverse guide rail, the limit assembly, the linkage assembly and the auxiliary disassembly assembly structure of the present invention; Figure 5 It is a schematic diagram of the coordination structure of the linkage assembly and the auxiliary disassembly assembly assembly structure of the present invention; Figure 6 It is a cross-sectional schematic diagram of the internal structure of the auxiliary disassembly and assembly component of the present invention; Figure 7 It is a schematic diagram of the exploded structure of the side panels, transverse guide rails and limit assembly of the present invention.

[0023] In the figure: 1. vacuum chamber; 2. docking port; 3. negative pressure port; 4. three-way valve; 5. temporary storage box; 6. connecting pipe; 7. side plate; 8. transverse guide rail; 9. limit assembly; 901. guide block; 902. first fixed seat; 903. second fixed seat; 904. first connecting rod; 905. transverse guide block; 906. indicator rod; 10. linkage assembly; 101. movable plate; 102. third fixed seat; 103. fourth fixed seat; 104. second connecting rod; 11. auxiliary disassembly and assembly assembly; 111. locking frame; 112. gas storage pipe; 113. piston plate; 114. piston rod; 115. limit spring; 116. gas injection valve. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] like Figures 1 to 7 As shown, in an embodiment of the present invention, a vacuum interface cavity comprises a vacuum cavity 1, a docking port 2 is provided on the front of the vacuum cavity 1, a negative pressure port 3 is provided on the side of the vacuum cavity 1, a three-way valve 4 is fixedly connected to one side of the bottom end of the negative pressure port 3, a temporary storage box 5 is fixedly connected to the bottom end of the three-way valve 4, a connecting pipe 6 is fixedly connected to the rear side of the temporary storage box 5 near the bottom end, side panels 7 are installed on the left and right sides of the bottom end of the vacuum cavity 1, a limiting component 9 is movably installed at the bottom end of the docking port 2, a transverse guide rail 8 is fixedly installed at the bottom end of the vacuum cavity 1, and the bottom end of the limiting component 9 is movably connected to the transverse guide rail 8, an auxiliary disassembly and assembly component 11 is fixedly installed at a position near the rear side of the bottom end of the vacuum cavity 1, a linkage component 10 is fixedly installed at the front end of the auxiliary disassembly and assembly component 11, the front end of the linkage component 10 is connected to the rear end of the limiting component 9, and one side of the auxiliary disassembly and assembly component 11 is fixedly connected to the connecting pipe 6.

[0026] During normal use, the docking port 2 can be docked with external equipment, and the negative pressure port 3 can be connected to an external negative pressure pump for vacuuming the device, and the output end of the negative pressure pump can be connected to the top of the three-way valve 4 through a pipeline to ensure that the air sucked out by the negative pressure can be transmitted to the inside of the three-way valve 4, completing the preparations before installation.

[0027] like Figure 1 and Figure 4 as well as Figure 7As shown, the limit assembly 9 includes a guide block 901, which is movably sleeved with the bottom end of the docking port 2, and the guide block 901 moves up and down relative to the docking port 2. The left and right sides of the bottom end of the guide block 901 are fixedly installed with a first fixed seat 902, and the end of the first fixed seat 902 away from the guide block 901 is movably connected to the first connecting rod 904 through a rotating shaft, and the end of the first connecting rod 904 away from the first fixed seat 902 is movably connected to the second fixed seat 903 through a rotating shaft, and the bottom end of the second fixed seat 903 is fixedly installed with a transverse guide block 905, which is movably clamped with the transverse guide rail 8, and the ends of the two transverse guide blocks 905 that are relatively far away are fixedly installed with indicator rods 906. When the spacing between the two transverse guide blocks 905 is at a maximum, the two indicator rods 906 penetrate one side of the side plate 7.

[0028] Embodiment: When the docking interface 2 is docked with an external device and the external device is fully installed inside the docking interface 2, a force can be applied to the guide block 901. At this time, the guide block 901 moves downward under the force. At this time, a force can be applied to the first connecting rod 904. The two first connecting rods 904 are then deflected to the relatively distant side, and a thrust is applied to the two lateral guide blocks 905. At this time, the two lateral guide blocks 905 are relatively distant from each other. At the same time, the lateral guide blocks 905 can be relatively distant from each other under the guiding action of the lateral guide rail 8, and drive the two indicator rods 906 to be relatively distant from each other until the two indicator rods 906 pass through one side of the side plate 7. At this time, the guide block 901 no longer continues to move downward, and the docking interface 2 is installed in place, completing the indication process after installation.

[0029] By utilizing the cooperation between the limit assembly 9 and the side panel 7 and the transverse guide rail 8, when the device is in use, it is only necessary to dock the docking port 2 with the external device. After the docking is completed, the indication process can be automatically realized through the cooperation of the limit assembly 9. The whole process can be completed automatically, ensuring that the device can be quickly indicated to be installed in place, avoiding wear caused by excessive docking, and significantly improving the ease of use of the device.

[0030] like Figure 4 and Figure 5 as well as Figure 6As shown, the auxiliary disassembly and assembly component 11 includes a locking frame 111, which is connected to the bottom end of the docking port 2, and a gas storage pipe 112 is fixedly sleeved in the middle of the locking frame 111, and a piston plate 113 is movably sleeved inside the gas storage pipe 112, and a piston rod 114 is fixedly installed on the end of the piston plate 113 away from the locking frame 111, and a limiting spring 115 is movably sleeved on the outer side of the piston rod 114, and the front and rear ends of the limiting spring 115 are connected to one end of the piston plate 113 and one end of the inner cavity of the gas storage pipe 112, and a gas injection valve 116 is fixedly connected to one side of the gas storage pipe 112 near the front end, and the other end of the gas injection valve 116 is fixedly connected to the connecting pipe 6.

[0031] When the two lateral guide blocks 905 move away from each other due to the descent of the guide block 901, the two fourth fixing frames 103 move away from each other and exert a force on the second connecting rod 104, that is, drive the two second connecting rods 104 to deflect in the direction away from the middle, drive the movable plate 101 to move forward, and exert a force on the auxiliary disassembly and assembly component 11.

[0032] like Figure 2 and Figure 5 as well as Figure 6 As shown, the linkage assembly 10 includes a movable plate 101, which is connected to a piston rod 114, and a third fixing frame 102 is fixedly installed on both sides of the movable plate 101 away from the piston rod 114, and one end of the third fixing frame 102 away from the movable plate 101 is movably connected to the second connecting rod 104 through a rotating shaft, and one end of the second connecting rod 104 away from the third fixing frame 102 is movably connected to the fourth fixing frame 103 through a rotating shaft, and the front end of the fourth fixing frame 103 is connected to the rear end of the lateral guide block 905.

[0033] Embodiment: When the movable plate 101 moves forward, the piston plate 113 and the piston rod 114 can be driven to move forward, and the limit spring 115 is compressed accordingly, and the device is in the installed state; After installation, the interior of the device can be evacuated by an external negative pressure pump, and the gas inside the device is then introduced into the interior of the temporary storage box 5 through the three-way valve 4 for temporary storage; When the device needs to be disassembled, the valve at the rear end of the temporary storage box 5 can be opened. At this time, compressed air enters the interior of the air injection valve 116 through the connecting pipe 6 and applies pressure to the piston plate 113. At this time, the limit spring 115 is stretched, and at the same time, the piston rod 114 is driven to move backward. At this time, the movable plate 101 is displaced to the rear side. At this time, the two second connecting rods 104 are deflected toward the middle, and at the same time, the two fourth fixed frames 103 are driven to be relatively close. At this time, the two lateral guide blocks 905 are relatively close, and the two first connecting rods 904 are deflected toward the middle, and an upward thrust is applied to the guide block 901. At this time, the guide block 901 rises and applies a force to the external equipment inside the docking interface 2, so that the docking interface 2 and the external equipment are separated, completing the auxiliary separation process.

[0034] By utilizing the vacuuming process required when installing the device, the air exhausted by the vacuuming is temporarily stored and introduced into the interior of the auxiliary disassembly and assembly component 11 when needed, and utilizing the coordination process of the limit component 9, the linkage component 10 and the auxiliary disassembly and assembly component 11, a force is applied between the external device and the docking port 2 to assist their separation and complete the separation process, thereby effectively avoiding the problem of difficulty in separation caused by sealing and pressure in traditional devices and improving the disassembly and assembly efficiency.

[0035] Working principle and usage process: During normal use, the docking port 2 can be docked with an external device, and the negative pressure port 3 can be connected to an external negative pressure pump for vacuuming the device, and the output end of the negative pressure pump can be connected to the top of the three-way valve 4 through a pipeline to ensure that the air sucked out by the negative pressure can be transmitted to the inside of the three-way valve 4, thus completing the preparations before installation; When the docking interface 2 is docked with an external device and the external device is fully installed inside the docking interface 2, a force can be applied to the guide block 901. At this time, the guide block 901 moves downward under the force, and a force can be applied to the first connecting rod 904. The two first connecting rods 904 are then deflected to the relatively distant side, and a thrust is applied to the two transverse guide blocks 905. At this time, the two transverse guide blocks 905 are relatively distant from each other. At the same time, the transverse guide blocks 905 can be relatively distant from each other under the guidance of the transverse guide rail 8, and drive the two indicator rods 906 to be relatively distant from each other, until the two indicator rods 906 penetrate one side of the side plate 7. At this time, the guide block 901 no longer moves downward, and the docking interface 2 is installed in place, completing the indication process after installation. When the two lateral guide blocks 905 move away from each other due to the descending of the guide block 901, the two fourth fixing frames 103 move away from each other and exert a force on the second connecting rod 104, that is, the two second connecting rods 104 are driven to deflect in a direction away from the middle, and the movable plate 101 is driven to move forward, and a force is exerted on the auxiliary disassembly assembly 11; When the movable plate 101 moves forward, the piston plate 113 and the piston rod 114 can be driven to move forward, and the limit spring 115 is compressed accordingly. At this time, the device is in the installed state; After installation, the interior of the device can be evacuated by an external negative pressure pump, and the gas inside the device is then introduced into the interior of the temporary storage box 5 through the three-way valve 4 for temporary storage; When the device needs to be disassembled, the valve at the rear end of the temporary storage box 5 can be opened. At this time, compressed air enters the interior of the air injection valve 116 through the connecting pipe 6 and applies pressure to the piston plate 113. At this time, the limit spring 115 is stretched, and at the same time, the piston rod 114 is driven to move backward. At this time, the movable plate 101 is displaced to the rear side. At this time, the two second connecting rods 104 are deflected toward the middle, and at the same time, the two fourth fixed frames 103 are driven to be relatively close. At this time, the two lateral guide blocks 905 are relatively close, and the two first connecting rods 904 are deflected toward the middle, and an upward thrust is applied to the guide block 901. At this time, the guide block 901 rises and applies a force to the external equipment inside the docking interface 2, so that the docking interface 2 and the external equipment are separated, completing the auxiliary separation process.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum interface chamber, comprising a vacuum chamber (1), characterized in that: The front side of the vacuum chamber (1) is provided with a docking port (2), the side side of the vacuum chamber (1) is provided with a negative pressure port (3), one side of the bottom end of the negative pressure port (3) is fixedly connected to a three-way valve (4), the bottom end of the three-way valve (4) is fixedly connected to a temporary storage box (5), the rear side of the temporary storage box (5) near the bottom end is fixedly connected to a connecting pipe (6), the left and right sides of the bottom end of the vacuum chamber (1) are both installed with side panels (7), the bottom end of the docking port (2) is movably installed with a limit assembly (9), the A transverse guide rail (8) is fixedly mounted on the bottom end of the vacuum chamber (1), the bottom end of the limit assembly (9) is movably connected to the transverse guide rail (8), an auxiliary disassembly assembly (11) is fixedly mounted at a position close to the rear side of the bottom end of the vacuum chamber (1), a linkage assembly (10) is fixedly mounted on the front end of the auxiliary disassembly assembly (11), the front end of the linkage assembly (10) is connected to the rear end of the limit assembly (9), and one side of the auxiliary disassembly assembly (11) is fixedly connected to the connecting pipe (6).

2. A vacuum interface chamber according to claim 1, characterized in that: The limit assembly (9) comprises a guide block (901), the guide block (901) being movably sleeved with the bottom end of the docking port (2), the guide block (901) being displaced up and down relative to the docking port (2), first fixing seats (902) being fixedly mounted on both left and right sides of the bottom end of the guide block (901), and one end of the first fixing seat (902) away from the guide block (901) being movably connected to a first connecting rod (904) via a rotating shaft.

3. A vacuum interface chamber according to claim 2, characterized in that: One end of the first connecting rod (904) away from the first fixing seat (902) is movably connected to the second fixing seat (903) via a rotating shaft, and a transverse guide block (905) is fixedly installed at the bottom end of the second fixing seat (903), and the transverse guide block (905) is movably connected to the transverse guide rail (8).

4. A vacuum interface chamber according to claim 3, characterized in that: An indicator rod (906) is fixedly mounted on one end of the two lateral guide blocks (905) that is relatively far away from each other. When the distance between the two lateral guide blocks (905) is at a maximum value, the two indicator rods (906) penetrate one side of the side plate (7).

5. A vacuum interface chamber according to claim 4, characterized in that: The auxiliary disassembly and assembly component (11) comprises a locking frame (111), the locking frame (111) being connected to the bottom end of the docking port (2), a gas storage pipe (112) being fixedly sleeved in the middle of the locking frame (111), a piston plate (113) being movably sleeved inside the gas storage pipe (112), and a piston rod (114) being fixedly mounted on one end of the piston plate (113) away from the locking frame (111).

6. A vacuum interface chamber according to claim 5, characterized in that: The outer side surface of the piston rod (114) is movably sleeved with a limit spring (115); the front and rear ends of the limit spring (115) are connected to one end of the piston plate (113) and one end of the inner cavity of the gas storage pipe (112); a gas injection valve (116) is fixedly connected to one side of the gas storage pipe (112) near the front end; the other end of the gas injection valve (116) is fixedly connected to the connecting pipe (6).

7. A vacuum interface chamber according to claim 6, characterized in that: The linkage assembly (10) comprises a movable plate (101), the movable plate (101) being connected to a piston rod (114), and third fixing frames (102) being fixedly mounted on both left and right sides of the movable plate (101) away from the piston rod (114).

8. A vacuum interface chamber according to claim 7, characterized in that: One end of the third fixing frame (102) away from the movable plate (101) is movably connected to the second connecting rod (104) via a rotating shaft, and one end of the second connecting rod (104) away from the third fixing frame (102) is movably connected to the fourth fixing frame (103) via a rotating shaft, and the front end of the fourth fixing frame (103) is connected to the rear end of the transverse guide block (905).

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