Calibration target device and calibration system

Abstract

The invention relates to the technical field of precision detection, and discloses a calibration target device and a calibration system.The calibration target device comprises a target body, a light source assembly and a reticle assembly, the target body comprises a fixing table and an adjusting frame installed on the fixing table, the adjusting frame is used for adjusting the position and angle of the reticle assembly, and the light source assembly comprises a light source; the light source is arranged on the fixing table, the reticle assembly is arranged on the adjusting frame, the reticle assembly comprises a reticle, the reticle comprises a transparent material substrate, the side, facing the light source, of the transparent material substrate is plated with an antireflection film, and at least part of the side, away from the light source, of the transparent material substrate is plated with a reflecting film. The calibration target device is provided with an active light-emitting light source by arranging the side-arranged light source, an external light source does not need to be added during measurement, the measurement steps are simplified, the measurement precision is ensured, meanwhile, the side-arranged light source can reduce the size of the light source in the first direction, and the light source assembly is smaller and more portable as a whole.

Description

Technical Field

[0001] The present invention relates to the field of precision detection technology, and in particular to a target calibration device and a calibration system. Background Art

[0002] This section merely provides background information related to the present disclosure and is not necessarily prior art.

[0003] When the 3D non-destructive scanning measurement system performs 3D imaging scanning on the target part, it is necessary to determine the posture relationship between the stage surface and the detection equipment in order to determine the position and characteristic information of the defect in the test sample. Therefore, it is necessary to perform high-precision posture calibration on the detection probe and the stage surface.

[0004] At present, there are two main types of cooperative targets used for posture relationship calibration: one is the self-collimation target used with the self-collimation system, and the other is the imaging target. The above two types of targets require additional experimental operation steps under specific measurement environment conditions, which is easy to introduce process errors, thereby affecting the measurement accuracy. Summary of the invention

[0005] The purpose of the present invention is to at least solve the problem that the existing target needs to increase the experimental operation steps under specific measurement environment conditions, which is easy to introduce process errors and thus affect the measurement accuracy. This purpose is achieved through the following technical solutions:

[0006] The first aspect of the present invention provides a target calibration device, characterized in that it includes a target body, a light source assembly and a reticle assembly, wherein:

[0007] The target body comprises a fixing platform and an adjustment frame mounted on the fixing platform, wherein the adjustment frame is used to adjust the position and angle of the reticle assembly;

[0008] A light source assembly, comprising a light source, wherein the light source is disposed on the fixing platform;

[0009] A graticule assembly is arranged on the adjustment frame, the graticule assembly includes a graticule, and the graticule includes a transparent material substrate. The side of the transparent material substrate facing the light source is coated with an anti-reflection film, and the side of the transparent material substrate away from the light source is at least partially coated with a reflective film.

[0010] The target calibration device of the present invention is provided with a light source assembly, wherein the light source assembly includes a light source. By providing the light source on the target body, the target calibration device is provided with an active light source, and no external light source needs to be added during measurement, thereby simplifying the measurement steps and ensuring the measurement accuracy. Meanwhile, the side-mounted light source can also reduce the size of the light source along the first direction, making the light source assembly as a whole more compact and portable. In addition, through the graticule, the graticule includes a transparent material substrate, and the side of the transparent material substrate facing the light source is coated with an anti-reflection film, and the side of the transparent material substrate facing away from the light source is at least partially coated with a reflective film. By providing the anti-reflection film, the light intensity can be increased, thereby increasing the transmittance of the light emitted by the light source through the graticule, and improving the transmittance of the graticule. By coating at least partially the reflective film on the side of the graticule facing away from the light source, when measuring, in conjunction with a system having an optical autocollimation function, the reflected light intensity is enhanced, the contrast of the autocollimation image is improved, and the autocollimation measurement accuracy is improved.

[0011] In addition, the target calibration device according to the present invention may also have the following additional technical features:

[0012] In some embodiments of the present invention, the light source assembly further includes a filter, the light source includes a plurality of lamp beads, the plurality of lamp beads are arranged on the filter at intervals along the circumference of the filter, and the distance between two adjacent lamp beads is the same.

[0013] In some embodiments of the present invention, the side of the reticle facing away from the light source assembly has a plurality of dark field portions and a plurality of bright field portions, the dark field portions and the bright field portions are arranged alternately and spaced apart, and the dark field portions are coated with the reflective film.

[0014] In some embodiments of the present invention, the graticule plate assembly also includes a graticule plate frame and a positioning frame, the graticule plate is connected to the positioning frame via a first pressure ring, a first connecting structure is provided between the positioning frame and the graticule plate frame, and the first connecting structure is used to connect the positioning frame to the inner peripheral wall of the graticule plate frame.

[0015] In some embodiments of the present invention, the first connecting structure includes a first connecting portion and a first matching portion, the first connecting portion is disposed on one of the graticule frame and the positioning frame, the first matching portion is disposed on the other of the graticule frame and the positioning frame, and the first connecting portion and the first matching portion are detachably connected.

[0016] In some embodiments of the present invention, the first connecting portion includes a positioning pin arranged on the side wall of the positioning frame, and the first matching portion includes an avoidance groove and an annular positioning groove arranged on the inner wall of the scale plate frame, the avoidance groove extends along the axial direction of the scale plate frame to the upper end surface of the scale plate frame, the annular positioning groove is arranged on the inner circumferential wall of the scale plate frame and is connected with the avoidance groove, the positioning pin is inserted into the annular positioning groove through the avoidance groove, and rotates relative to the inner circumferential wall of the scale plate frame to connect the positioning frame with the scale plate frame.

[0017] In some embodiments of the present invention, the calibration target device also includes a first adjustment component, the first adjustment component includes a first adjustment rod and a first elastic member, the first adjustment rod is threadedly connected to the adjustment frame, the first elastic member and the first adjustment rod are relatively arranged on both sides of the reticle plate assembly, the two ends of the first elastic member are respectively abutted against the adjustment frame and the reticle plate assembly, the first adjustment component is used to adjust the position of the reticle plate assembly along a second direction, the second direction is perpendicular to the first direction, and the first direction is the arrangement direction from the fixed platform to the adjustment frame.

[0018] In some embodiments of the present invention, the calibration target device also includes a second adjustment component, the second adjustment component includes a second adjustment rod and a second elastic member, the second adjustment rod is threadedly connected to the adjustment frame, the second elastic member and the second adjustment rod are relatively arranged on both sides of the reticle plate assembly, the two ends of the second elastic member are respectively abutted against the adjustment frame and the reticle plate assembly, and the second adjustment component is used to adjust the position of the reticle plate assembly along a third direction, and the third direction, the first direction and the second direction are perpendicular to each other.

[0019] In some embodiments of the present invention, the target calibration device further includes an angle adjustment component, and the angle adjustment component includes a third adjustment rod, a fourth adjustment rod, a third elastic member, a fourth elastic member, and an isolation member;

[0020] The third adjusting rod and the fourth adjusting rod are arranged opposite to each other and are threadedly connected to the adjusting frame. The threaded ends of the third adjusting rod and the fourth adjusting rod are against the fixed platform. The isolating member is arranged between the fixed platform and the adjusting frame. The third adjusting rod, the fourth adjusting rod and the isolating member are distributed in a triangular shape. The third elastic member and the fourth elastic member are respectively arranged on both sides of the isolating member and are connected to the fixed platform and the adjusting frame. The angle adjustment assembly is used to adjust the angle of the reticle assembly.

[0021] Another aspect of the present invention proposes a calibration system, comprising a support platform, a measuring device and a calibration target device as described in any one of the above items, wherein the calibration target device is mounted on the support platform, and the measuring device is arranged on a side of the calibration target device away from the support platform along the normal direction of the graticule. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference numerals are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0023] Figure 1 The schematic diagram of the structure of the target calibration device according to the embodiment of the present invention is schematically shown;

[0024] Figure 2 A cross-sectional view of a target calibration device according to an embodiment of the present invention is schematically shown;

[0025] Figure 3 for Figure 2 The enlarged view of point A in the middle;

[0026] Figure 4 A partial exploded view of a target calibration device according to an embodiment of the present invention is schematically shown;

[0027] Figure 5 The structure diagram of the light source assembly of the target calibration device according to the embodiment of the present invention is schematically shown;

[0028] Figure 6 The structure diagram of the reticle assembly of the target calibration device according to the embodiment of the present invention is schematically shown;

[0029] Figure 7 The assembly diagram of the reticle assembly of the target calibration device according to the embodiment of the present invention is schematically shown;

[0030] Figure 8 The structural diagram of the battery assembly of the target calibration device according to the embodiment of the present invention is schematically shown.

[0031] The reference numerals are as follows:

[0032] 100. Target calibration device;

[0033] 1. Target body; 11. Fixing platform; 111. First flange; 12. Adjusting frame;

[0034] 21. light source assembly; 211. light source; 2111. lamp beads; 212. filter; 22. second pressing ring;

[0035] 3. Graticule assembly; 31. Graticule; 311. Dark field portion; 3111. Reflection film; 312. Bright field portion; 32. Graticule frame; 33. Positioning frame; 34. First pressure ring;

[0036] 41. first connecting portion; 411. positioning pin; 42. first matching portion; 421. avoidance groove; 422. annular positioning groove;

[0037] 51. first adjusting rod; 52. first elastic member;

[0038] 61. Second adjustment lever;

[0039] 71. third adjusting rod; 72. fourth adjusting rod; 73. third elastic member; 74. fourth elastic member; 75. isolation member;

[0040] 8. Battery assembly; 81. Battery compartment; 82. Battery compartment cover; 83. Toggle switch;

[0041] 91, second connecting portion; 911, clamping block; 92, second matching portion; 921, clamping slot;

[0042] X, first direction;

[0043] Y, second direction;

[0044] Z. The third direction. DETAILED DESCRIPTION

[0045] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0046] It should be understood that the terms used herein are only for the purpose of describing specific example embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used herein may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and / or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and / or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.

[0047] Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.

[0048] For ease of description, spatial relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figure, such as "inside", "outside", "inner side", "outer side", "below", "below", "above", "above", etc. Such spatial relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure. For example, if the device in the figure is turned over, then the elements described as "below other elements or features" or "below other elements or features" will subsequently be oriented as "above other elements or features" or "above other elements or features". Therefore, the example term "below..." can include both above and below orientations.

[0049] When the 3D non-destructive scanning measurement system performs 3D imaging scanning on the target part, it is necessary to determine the posture relationship between the stage surface and the detection equipment in order to determine the position and characteristic information of the defect in the test sample. Therefore, it is necessary to perform high-precision posture calibration on the detection probe and the stage surface.

[0050] In the related technology, there are mainly two types of cooperative targets used for posture relationship calibration. One is the autocollimation target used in conjunction with the autocollimation system. This type of target is generally a plane reflector, which can only measure angles but cannot complete displacement measurements. The other is an imaging target. Imaging targets generally use crosshairs or concentric circles as target imaging targets. This type of target can only reflect the spatial position relationship of the target center and cannot directly obtain the displacement offset of the rotation axis. The above two types of targets have the following problems: (1) The targets are not universal: whether it is a self-collimation target or an imaging target, it can only correspond to a single supporting instrument for measurement and cannot simultaneously meet the needs of multiple precision detection and measurement systems; (2) The measurement method is single: the existing targets can only measure a single error feature. For example, the reflective self-collimation target can only measure angle-related error features, and the imaging target can only be used to measure displacement error features, and does not have composite measurement capabilities; (3) There is no multi-degree-of-freedom adjustment capability: Most of the existing targets do not have a dedicated adjustment structure, and the four-dimensional adjustable graticule described in the above literature only has a displacement adjustment mechanism and lacks angle adjustment capability; (4) There is no active light source and adjustment capability: The existing imaging targets are all passive imaging targets, which have no active light source and no brightness adjustment measures, resulting in the need to add an external light source to ensure measurement accuracy under different measurement environment conditions.

[0051] In view of this, the present embodiment provides a calibration target device 100, which aims to set a light source 211 on the target body 1 so that the calibration target device 100 has an active light source 211, and there is no need to add an external light source 211 during measurement, thereby simplifying the measurement steps and ensuring measurement accuracy, thereby solving the above technical problems.

[0052] like Figures 1 to 8 As shown, according to an embodiment of the present invention, a calibration target device 100 is proposed, which includes a target body 1, a light source assembly 21 and a grating plate assembly 3, wherein the target body 1 includes a fixed platform 11 and an adjustment frame 12 installed on the fixed platform 11, the adjustment frame 12 is used to adjust the position and angle of the grating plate assembly 3, the light source assembly 21 includes a light source 211, the light source 211 is arranged on the fixed platform 11, the grating plate assembly 3 is arranged on the adjustment frame 12, the grating plate assembly 3 includes a grating plate 31, and the grating plate 31 includes a transparent material substrate, the side of the transparent material substrate facing the light source 211 is coated with an anti-reflection film, and the side of the transparent material substrate away from the light source 211 is at least partially coated with a reflective film 3111.

[0053] The target calibration device 100 of the present invention is provided with a light source assembly 21, and the light source assembly 21 includes a light source 211. By providing the light source 211, the target calibration device 100 is provided with an active light source 211, and there is no need to add an external light source 211 during measurement, thereby simplifying the measurement steps and ensuring the measurement accuracy. In addition, by providing a grating plate 31, the grating plate 31 includes a transparent material substrate, and the side of the transparent material substrate facing the light source assembly 21 is coated with an anti-reflection film, and the side of the transparent material substrate away from the light source assembly 21 is at least partially coated with a reflective film 3111. By providing the anti-reflection film, the light intensity can be increased, thereby increasing the transmittance of the light emitted by the light source 211 through the grating plate 31, and improving the transmittance of the grating plate 31. By at least partially coating the side of the grating plate 31 away from the light source assembly 21 with a reflective film 3111, when measuring, in conjunction with a system with an optical autocollimation function, the reflected light intensity is enhanced, the contrast of the autocollimation image is improved, and the autocollimation measurement accuracy is improved.

[0054] In some embodiments of the present invention, the light source assembly 21 further includes a filter 212, and the light source includes a plurality of lamp beads 2111, and the plurality of lamp beads 2111 are arranged on the filter 212 at intervals along the circumference of the filter 212, and the spacing between two adjacent lamp beads 2111 is the same.

[0055] Specifically, the lamp bead 2111 is an LED lamp bead. Since the LED lamp bead generates very little heat, using the LED lamp bead as the light source 211 will not affect the measurement accuracy, thereby ensuring the measurement accuracy. At the same time, by setting a side-mounted light source 211, the size of the light source assembly 21 along the arrangement direction from the fixed platform 11 to the adjustment frame 12 can also be reduced, making the light source assembly 21 as a whole more compact and portable.

[0056] In addition, multiple LED lamp beads are evenly arranged on the filter 212 along the circumference of the filter 212, and there is no need to install a light homogenizing device, which improves the utilization rate of the light source 211 and the uniformity of the light output surface. When installing the light source assembly 21, the light source assembly 21 is installed on the side of the fixed platform 11 close to the grating assembly 3 through the second pressing ring 22, which is convenient for the installation of the light source assembly 21. The filter 212 can accurately filter light of a specific wavelength, and different filters 212 can be selected according to actual application requirements.

[0057] In some embodiments of the present invention, the side of the graticule 31 away from the light source assembly 21 has a plurality of dark field portions 311 and a plurality of bright field portions 312 , the dark field portions 311 and the bright field portions 312 are arranged alternately, and the dark field portions 311 are coated with a reflective film 3111 .

[0058] It can be understood that multiple dark field parts 311 and multiple bright field parts 312 are arranged alternately and spaced apart, and the dark field parts 311 are coated with a reflective film 3111, and the bright field parts 312 are not coated, so as to form a checkerboard structure on the transparent material substrate. The checkerboard structure cooperates with the visual imaging system to accurately solve the data of the six degrees of freedom (x, y, z; α, β, γ) of the target. By coating the checkerboard structure on the side of the transparent material substrate away from the light source assembly 21, the additional aberration and chromatic aberration generated by the imaging optical system through the transparent material substrate can be eliminated. By coating the reflective film 3111 on the dark field part 311, it can adapt to the system with optical autocollimation function, enhance the reflected light intensity, improve the contrast of the autocollimation image, and improve the autocollimation measurement accuracy; the bright field part 312 is not coated, which can adapt to the ordinary visual imaging system, improve the light transmittance of the backlight plate, enhance the visual imaging contrast of the checkerboard structure, and improve the measurement accuracy.

[0059] In some embodiments of the present invention, the graticule plate assembly 3 also includes a graticule plate frame 32 and a positioning frame 33. A first connecting structure is provided between the positioning frame 33 and the graticule plate frame 32. The first connecting structure is used to connect the positioning frame 33 to the inner wall of the graticule plate frame 32. The graticule plate 31 is connected to the positioning frame 33 via a first pressure ring 34.

[0060] Specifically, the positioning frame 33 is provided with a stepped mounting surface along its inner peripheral wall. When installing the graticule plate 31, the graticule plate 31 is placed on the stepped mounting surface, and the first pressing ring 34 is installed on the side of the graticule plate 31 away from the stepped mounting surface to press the graticule plate 31 on the stepped mounting surface, limit the graticule plate 31, and then connect the pressing ring to the positioning frame 33 through the fixing pin. After the graticule plate 31 is installed, the positioning frame 33 is detachably connected to the graticule plate frame 32 through the first connecting structure. By providing the first connecting structure, the installation and disassembly of the positioning frame 33 and the graticule plate frame 32 are facilitated, and the disassembly efficiency is improved.

[0061] In some embodiments of the present invention, the first connecting structure includes a first connecting portion 41 and a first matching portion 42, the first connecting portion 41 is disposed on one of the grating plate frame 32 and the positioning frame 33, and the first matching portion 42 is disposed on the other of the grating plate frame 32 and the positioning frame 33, and the first connecting portion 41 and the first matching portion 42 are detachably connected.

[0062] Specifically, in this embodiment, the first connecting portion 41 includes a positioning pin 411 arranged on the side wall of the positioning frame 33, and positioning holes are respectively arranged on the opposite side walls of the positioning frame 33. The positioning pin 411 is installed on the positioning frame 33 through the positioning holes. The first matching portion 42 includes an avoidance groove 421 and an annular positioning groove 422 arranged on the inner wall of the scale plate frame 32. Avoidance grooves 421 are respectively arranged on the opposite side walls of the scale plate 31. The avoidance groove 421 extends axially along the scale plate frame 32 to the upper end surface of the scale plate frame 32. The avoidance groove 421 is adapted to the positioning pin 411, and the annular positioning groove 422 is arranged on the inner circumferential wall of the scale plate frame 32 and is connected with the avoidance groove 421. The positioning pin 411 is inserted into the annular positioning groove 422 through the avoidance groove 421, and rotates relative to the inner circumferential wall of the scale plate frame 32 to connect the positioning frame 33 with the scale plate frame 32.

[0063] When installing the positioning frame 33, place the positioning frame 33 inside the scale plate frame 32, and make the positioning pins 411 on both sides correspond to the avoidance grooves 421 on both sides one by one, place the positioning pins 411 in the avoidance grooves 421, and the positioning pins 411 slide along the avoidance grooves 421 toward the direction close to the annular positioning grooves 422. When the positioning frame 33 slides to the annular positioning grooves 422, rotate the positioning frame 33 relative to the scale plate frame 32 so that the positioning pins 411 are stuck in the annular positioning grooves 422. At this time, the positioning frame 33 and the scale plate frame 32 are switched from a separated state to a connected state. When disassembling the positioning frame 33, rotate the positioning frame 33 so that the positioning pins 411 are disengaged from the annular positioning grooves 422. At this time, the positioning frame 33 and the scale plate frame 32 are switched from a connected state to a separated state, which facilitates the disassembly and assembly of the positioning frame 33 and improves the disassembly and assembly efficiency.

[0064] In other embodiments, the positioning pin 411 may also be set on the inner wall of the scale plate frame 32, the avoidance groove 421 and the annular positioning groove 422 may also be set on the outer wall of the positioning frame 33, and the number of the positioning pins 411 and the avoidance groove 421 may also be three or four, etc. In addition, the first connecting portion 41 may also include a first thread, and the first thread is set on the outer surface of the positioning frame 33. The first matching portion 42 may also include a second thread, and the second thread is set on the inner circumference of the scale plate frame 32 and cooperates with the first thread, so that the positioning frame 33 is threadedly connected to the scale plate frame 32.

[0065] In some embodiments of the present invention, the target calibration device 100 also includes a first adjustment component, which includes a first adjustment rod 51 and a first elastic member 52. The first adjustment rod 51 is threadedly connected to the adjustment frame 12. The first elastic member 52 and the first adjustment rod 51 are arranged on both sides of the reticle assembly 3 opposite to each other. The two ends of the first elastic member 52 are respectively abutted against the adjustment frame 12 and the reticle assembly 3. The first adjustment component is used to adjust the position of the reticle assembly 3 along the second direction Y. The second direction Y is perpendicular to the first direction X. The first direction X is the arrangement direction from the fixed platform 11 to the adjustment frame 12.

[0066] Specifically, the fixed table 11 and the adjusting frame 12 are arranged along the first direction X, and the first elastic member 52 is one of a compression spring, a torsion spring and a leaf spring. In the present embodiment, the first elastic member 52 is a compression spring, and the first elastic member 52 is arranged between the grating plate frame 32 and the adjusting frame 12 along the second direction Y, and the two ends of the first elastic member 52 are respectively abutted against the adjusting frame 12 and the grating plate frame 32, and the outer side surface of the grating plate frame 32 is provided with a blind hole for the abutment of the first elastic member 52, and a threaded hole is provided on the side of the adjusting frame 12 opposite to the first elastic member 52 along the second direction Y, and a threaded hole is provided, and the outer surface of the first adjusting rod 51 is provided with a thread, and the first adjusting rod 51 is threadedly connected to the adjusting frame 12, and the outer peripheral surface of the grating plate frame 32 is provided with an annular groove, and the end of the first adjusting rod 51 close to the grating plate frame 32 is a first ball end, and the first ball end abuts in the annular groove. When adjusting the position of the grating plate assembly 3 along the second direction Y, the first adjusting rod 51 is rotated to move toward or away from the first elastic member 52, thereby driving the grating plate assembly 3 to move along the second direction Y, thereby facilitating the adjustment of the position of the grating plate assembly 3 in the second direction Y.

[0067] In some embodiments of the present invention, the target calibration device 100 also includes a second adjustment component, which includes a second adjustment rod 61 and a second elastic member (not shown in the figure). The second adjustment rod 61 is threadedly connected to the adjustment frame 12, and the second elastic member and the second adjustment rod 61 are arranged on both sides of the reticle assembly 3 opposite to each other. The two ends of the second elastic member are respectively against the adjustment frame 12 and the reticle assembly 3. The second adjustment component is used to adjust the position of the reticle assembly 3 along the third direction Z, and the third direction Z, the first direction X and the second direction Y are perpendicular to each other.

[0068] Specifically, the second elastic member is one of a compression spring, a torsion spring and a leaf spring. In the present embodiment, the second elastic member is a compression spring. The second elastic member is arranged between the grating frame 32 and the adjusting frame 12 along the third direction Z, and the two ends of the second elastic member are respectively in contact with the adjusting frame 12 and the grating frame 32. Along the third direction Z, a threaded hole is arranged on the side of the adjusting frame 12 opposite to the second elastic member. The outer surface of the second adjusting rod 61 is provided with a thread. The second adjusting rod 61 is threadedly connected with the adjusting frame 12. The end of the second adjusting rod 61 close to the grating frame 32 is a second ball end, and the second ball end is in contact with the annular groove. When adjusting the position of the grating assembly 3 along the third direction Z, the second adjusting rod 61 is rotated to move in the direction close to or away from the second elastic member, so as to drive the grating assembly 3 to move along the third direction Z, so as to facilitate the adjustment of the position of the grating assembly 3 in the third direction Z.

[0069] In some embodiments of the present invention, the calibration target device 100 also includes an angle adjustment assembly, which includes a third adjustment rod 71, a fourth adjustment rod 72, a third elastic member 73, a fourth elastic member 74 and an isolation member 75; the third adjustment rod 71 and the fourth adjustment rod 72 are arranged opposite to each other and are threadedly connected to the adjustment frame 12, the threaded ends of the third adjustment rod 71 and the fourth adjustment rod 72 are abutted against the fixed platform 11, the isolation member 75 is arranged between the fixed platform 11 and the adjustment frame 12, the third adjustment rod 71, the fourth adjustment rod 72 and the isolation member 75 are distributed in a triangular shape, the third elastic member 73 and the fourth elastic member 74 are respectively arranged on both sides of the isolation member 75, and are both connected to the fixed platform 11 and the adjustment frame 12, and the angle adjustment assembly is used to adjust the angle of the graticule assembly 3.

[0070] Specifically, two threaded holes are diagonally arranged on the adjustment frame 12, and a first groove and a second groove are arranged at positions on the fixed platform 11 corresponding to the two threaded holes. The outer surfaces of the third adjustment rod 71 and the fourth adjustment rod 72 are both provided with threads, and the third adjustment rod 71 and the fourth adjustment rod 72 are both abutted against the fixed platform 11 through the threaded holes on the adjustment frame 12. The end of the third adjustment rod 71 close to the fixed platform 11 is a third ball end, and the third ball end abuts against the first groove. The end of the fourth adjustment rod 72 close to the fixed platform 11 is a fourth ball end, and the fourth ball end abuts against the second groove. The third elastic member 73 and the fourth elastic member 74 are respectively arranged on both sides of the isolation member 75, and the third elastic member 73 and the fourth elastic member 74 include one of a tension spring or an elastic rope. In this embodiment, the third elastic member 73 and the fourth elastic member 74 are tension springs, and the isolation member 75 includes a ball. The two ends of the third elastic member 73 are respectively fixed to the fixed platform 11 and the adjustment frame 12 by fixing pins. Similarly, the fixing pins at both ends of the fourth elastic member 74 are respectively fixed to the fixed platform 11 and the adjustment frame 12. The fixing platform 11 and the adjustment frame 12 are both provided with mounting holes for installing the ball. The mounting grooves are respectively a first mounting groove and a second mounting groove, the second mounting groove and the second mounting groove are arranged opposite to each other, the distance between the bottom of the first mounting groove and the end face of the fixed platform 11 is smaller than the diameter of the ball, and the distance between the bottom of the second mounting groove and the end face of the adjustment frame 12 is smaller than the diameter of the ball, so that when the ball is placed in the first mounting groove and the second mounting groove, a certain distance is formed between the fixed platform 11 and the adjustment frame 12, and the third elastic member 73 and the fourth elastic member 74 arranged on both sides of the ball are cooperated to adjust the angle of the adjustment frame 12 relative to the fixed platform 11. For example, when the third adjustment rod 71 is rotated to move the adjustment frame 12 in the direction close to the fixed platform 11, the third elastic member 73 is compressed at this time, and cooperates with the support of the ball on one end of the adjustment frame 12, so that the adjustment frame 12 is offset in the direction close to the fixed platform 11 toward the end where the third adjustment rod 71 is arranged, thereby adjusting the angle of the adjustment frame 12 relative to the fixed platform 11.

[0071] In this embodiment, the target calibration device 100 further includes a battery assembly 8, which includes a battery compartment 81, a battery compartment cover 82 and a toggle switch 83. The battery compartment cover 82 is arranged on the rear side of the fixing platform 11, and the battery compartment 81 is arranged inside the battery compartment cover 82. A plurality of storage batteries are arranged inside the battery compartment 81. The light source assembly 21 is connected to the battery compartment 81 through a wire. The toggle switch 83 is arranged on the fixing platform 11. A second connection structure is arranged between the battery compartment 81 and the battery compartment cover 82. The second connection structure includes a second connection portion 91 and a second matching portion 92. The second connection portion 91 includes a card block 911 arranged on the battery compartment 81. The second matching portion 92 includes a card slot 921 arranged on the battery compartment cover 82. The number of the card slots 921 is two. The two card slots 921 are symmetrically arranged on the battery compartment cover 82. The card block 911 slides along the card slots 921 on both sides to install and remove the battery compartment 81 and the battery compartment cover 82, so as to facilitate the disassembly and assembly of the battery compartment 81 and improve the disassembly and assembly efficiency.

[0072] The second aspect of the present invention proposes a calibration system, including a carrier, a measuring device and the above-mentioned calibration target device 100, wherein the calibration target device 100 is mounted on the carrier, and the measuring device is arranged on a side of the calibration target device 100 away from the carrier along the normal direction of the graticule 31. Specifically, the carrier includes a rotatable base, and a second flange is arranged on the upper end surface of the rotatable base, and the size and shape of the second flange are adapted to the first flange 111, and a plurality of second flange holes are arranged on the second flange at intervals along the circumference thereof, and the plurality of second flange holes are arranged one-to-one correspondingly to the plurality of first flange 111 holes.

[0073] When performing posture detection of the supporting platform, the calibration target device 100 proposed in the first aspect of the present invention is first fixed to the supporting platform. Specifically, the calibration target device 100 is placed as a whole on the upper end surface of the supporting platform, and the multiple first flange 111 holes are made to correspond one by one with the multiple second flange holes, and then the first flange 111 and the second flange are fixed by bolts to install the calibration target device 100 on the supporting platform. Corresponding measuring equipment is placed in the normal direction of the graticule 31. Specifically, the normal direction of the graticule 31 is perpendicular to the plane where the graticule 31 is located. The measuring instrument may be an autocollimator or a camera. The autocollimator may be a photoelectric autocollimator, a micrometer collimator, an internal focusing autocollimator, a coaxial micrometer autocollimator, etc. The autocollimator or camera is arranged on the side of the calibration target device 100 away from the carrier along the normal direction of the graticule 31. The autocollimator or camera and the graticule 31 are in a straight line, and the shooting direction of the camera is toward the graticule 31 and perpendicular to the plane where the graticule 31 is located. The rotating stage is rotated, and the position of the graticule 31 is adjusted by the first adjustment component and the second adjustment component, and the angle of the graticule 31 is adjusted by the angle adjustment component, so that the graticule 31 can enter the field of view of the autocollimator or the camera. When the graticule plate 31 rotates around the axis, the graticule image draws a circle around the axis, and the position of the graticule plate 31 is continuously adjusted by the first adjustment assembly and the second adjustment assembly, so that the circle drawn by the graticule image around the axis is less than 2".

[0074] The calibration system proposed in the second aspect of the present invention includes the calibration target device 100 proposed in the first aspect of the present invention. The calibration target device 100 is provided with a light source component 21, and the light source component 21 includes a light source 211. By providing the light source 211, the calibration target device 100 is provided with an active light source 211, and there is no need to add an external light source 211 during measurement, thereby simplifying the measurement steps and ensuring the measurement accuracy.

[0075] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A target calibration device, characterized in that: It includes a target body, a light source assembly and a reticle assembly, wherein: The target body comprises a fixing platform and an adjustment frame mounted on the fixing platform, wherein the adjustment frame is used to adjust the position and angle of the reticle assembly; A light source assembly, comprising a light source, wherein the light source is disposed on the fixing platform; A graticule assembly is arranged on the adjustment frame, the graticule assembly includes a graticule, and the graticule includes a transparent material substrate. The side of the transparent material substrate facing the light source is coated with an anti-reflection film, and the side of the transparent material substrate away from the light source is at least partially coated with a reflective film.

2. The target calibration device according to claim 1, characterized in that: The light source assembly further includes a filter, and the light source includes a plurality of lamp beads, which are arranged on the filter at intervals along the circumference of the filter, and the intervals between two adjacent lamp beads are the same.

3. The target calibration device according to claim 1, characterized in that: The side of the reticle away from the light source assembly has a plurality of dark field portions and a plurality of bright field portions, the dark field portions and the bright field portions are arranged alternately and spaced apart, and the dark field portions are plated with the reflective film.

4. The target calibration device according to any one of claims 1 to 3, characterized in that: The graticule plate assembly also includes a graticule plate frame and a positioning frame. The graticule plate is connected to the positioning frame via a first pressure ring. A first connecting structure is provided between the positioning frame and the graticule plate frame. The first connecting structure is used to connect the positioning frame to the inner circumferential wall of the graticule plate frame.

5. The target calibration device according to claim 4, characterized in that: The first connecting structure includes a first connecting portion and a first matching portion, the first connecting portion is arranged on one of the graticule frame and the positioning frame, the first matching portion is arranged on the other of the graticule frame and the positioning frame, and the first connecting portion and the first matching portion are detachably connected.

6. The target calibration device according to claim 5, characterized in that: The first connecting portion includes a positioning pin arranged on the side wall of the positioning frame, and the first matching portion includes an avoidance groove and an annular positioning groove arranged on the inner wall of the scale plate frame, the avoidance groove extends along the axial direction of the scale plate frame to the upper end surface of the scale plate frame, and the annular positioning groove is arranged on the inner circumferential wall of the scale plate frame and is connected with the avoidance groove, and the positioning pin is inserted into the annular positioning groove through the avoidance groove and rotates relative to the inner circumferential wall of the scale plate frame to connect the positioning frame with the scale plate frame.

7. The target calibration device according to any one of claims 1 to 3, characterized in that: The calibration target device also includes a first adjustment component, which includes a first adjustment rod and a first elastic member. The first adjustment rod is threadedly connected to the adjustment frame. The first elastic member and the first adjustment rod are arranged on both sides of the reticle assembly opposite to each other. The two ends of the first elastic member are respectively against the adjustment frame and the reticle assembly. The first adjustment component is used to adjust the position of the reticle assembly along a second direction, which is perpendicular to the first direction. The first direction is the arrangement direction from the fixed platform to the adjustment frame.

8. The target calibration device according to claim 7, characterized in that: The calibration target device also includes a second adjustment component, which includes a second adjustment rod and a second elastic member. The second adjustment rod is threadedly connected to the adjustment frame, and the second elastic member and the second adjustment rod are arranged on both sides of the reticle assembly opposite to each other. The two ends of the second elastic member are respectively against the adjustment frame and the reticle assembly. The second adjustment component is used to adjust the position of the reticle assembly along a third direction, and the third direction, the first direction and the second direction are perpendicular to each other.

9. The target calibration device according to any one of claims 1 to 3, characterized in that: The target calibration device further includes an angle adjustment component, which includes a third adjustment rod, a fourth adjustment rod, a third elastic member, a fourth elastic member and an isolation member; The third adjusting rod and the fourth adjusting rod are arranged opposite to each other and are threadedly connected to the adjusting frame. The threaded ends of the third adjusting rod and the fourth adjusting rod are against the fixed platform. The isolating member is arranged between the fixed platform and the adjusting frame. The third adjusting rod, the fourth adjusting rod and the isolating member are distributed in a triangular shape. The third elastic member and the fourth elastic member are respectively arranged on both sides of the isolating member and are connected to the fixed platform and the adjusting frame. The angle adjustment assembly is used to adjust the angle of the reticle assembly.

10. A calibration system, characterized in that: include: A carrier platform, a measuring device and a calibration target device as described in any one of claims 1 to 9, wherein the calibration target device is mounted on the carrier platform, and the measuring device is arranged on a side of the calibration target device away from the carrier platform along the normal direction of the graticule.

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