Processing apparatus and semiconductor device

Abstract

The invention provides a processing device and semiconductor equipment. The machining device comprises a cavity, a lamp holder and a connector, a plurality of connecting shafts are arranged on the circumferential wall of the cavity, and the connecting shafts are arranged in the circumferential direction of the cavity at intervals and extend in the radial direction of the cavity. In the axial direction of the cavity, the lamp holder is located on one side of the cavity. The connecting body abuts against the lamp holder, the connecting body comprises a plurality of connecting pieces, the connecting pieces are located on the outer side of the cavity and arranged at intervals in the circumferential direction of the cavity, each connecting piece is provided with a matching groove, and the matching grooves penetrate through the connecting pieces; wherein the connecting body can rotate relative to the cavity and drive the lamp holder to move relative to the cavity, each connecting piece can move relative to the connecting shaft, and each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove. Under the condition that each connecting shaft abuts against the inner wall of the matching groove, the cavity and the lamp holder are assembled together through the connecting body, and the stability and reliability after the lamp holder and the cavity are assembled are improved.

Description

Technical Field

[0001] The present application relates to the technical field of integrated circuit manufacturing, and in particular to a processing device and a semiconductor equipment. Background Art

[0002] In the process of manufacturing various semiconductor products (such as chips), it is necessary to form an epitaxial (EPI) layer on the surface of the wafer through a processing device of a semiconductor device. The processing device includes a cavity and a lamp head, and the lamp head is installed on the cavity. The cavity is used to accommodate the wafer, and the lamp head is used to heat the wafer. During the growth of the epitaxial layer, the processing device adjusts the temperature of the wafer through the lamp head to control the crystal orientation and growth rate of the epitaxial layer formed on the surface of the wafer. The existing lamp head and the cavity are installed together by buckling. However, since the buckle is easy to deform, there are problems of insufficient installation accuracy and reliability after the lamp head and the cavity are assembled. Summary of the invention

[0003] The present application provides a processing device and a semiconductor device, aiming to solve the problem of insufficient installation accuracy and reliability after the lamp holder and the cavity are assembled.

[0004] In a first aspect, an embodiment of the present application provides a processing device, the processing device comprising:

[0005] A cavity, wherein a plurality of connecting shafts are arranged on the peripheral wall of the cavity, and the plurality of connecting shafts are arranged at intervals along the circumference of the cavity and extend along the radial direction of the cavity;

[0006] A lamp cap, located at one side of the cavity in the axial direction of the cavity; and

[0007] A connector, the connector abuts against the lamp holder, and includes a plurality of connectors, the plurality of connectors are located outside the cavity and are spaced apart along the circumference of the cavity, each connector is provided with a matching groove, and the matching groove runs through the connector;

[0008] The connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each connecting piece can move relative to the connecting shaft, and each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove.

[0009] The processing device provided by the present application can be applied to semiconductor equipment, and the processing device can be accommodated in the housing of the semiconductor equipment. In the processing device provided by the present application, the cavity is used to accommodate the wafer, the lamp head can emit heat-generating light to heat the wafer, and the operator can adjust the temperature of the wafer by controlling the luminous efficiency of the lamp head, so as to form an epitaxial layer on the surface of the wafer. Among them, the connector can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each connector can move relative to the connecting shaft, and each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove. In the case where each connecting shaft abuts against the inner wall of the matching groove, in the absence of external force, through the matching of the connecting shaft and the matching groove, the connector and the cavity are relatively fixed in the axial direction of the cavity, that is, the connector and the cavity cannot move relative to each other in the axial direction of the cavity, and the lamp head abutting against the connector and the cavity cannot move relative to each other in the axial direction of the cavity. That is, through the matching of the connecting shaft and the matching groove, the cavity and the lamp head cannot move relative to each other in the axial direction of the cavity, and the cavity is assembled together with the connector and the lamp head.

[0010] Compared with the existing solution of assembling the cavity and the lamp holder by buckling, this method, on the one hand, is not easy to deform, which is conducive to improving the installation accuracy after the lamp holder and the cavity are assembled, and is conducive to improving the stability and reliability of the lamp holder and the cavity after assembly, and thus is conducive to improving the structural stability of the processing device; on the other hand, the operator only needs to rotate the connector relative to the cavity to realize the assembly of the lamp holder and the cavity, which is not only simple to operate and easy to assemble, but also ensures that the processing device housed in the shell of the semiconductor device can be assembled on one side, avoiding the need to assemble the cavity and the lamp holder around the processing device, thereby avoiding reserving installation operation space in the shell for the assembly of the lamp holder and the cavity, which is conducive to the miniaturized design of the shell, and thus is conducive to the miniaturized design of the semiconductor device.

[0011] In a possible implementation manner, the matching groove includes an open groove and a clamping groove, the open groove and the clamping groove are sequentially connected along the circumference of the cavity, and the open groove extends along the circumference of the cavity and penetrates the connecting piece;

[0012] Each connecting shaft can enter the snap-in groove from the open groove and abut against the inner wall of the snap-in groove; wherein, when the connecting shaft is located in the open groove, the lamp head and the cavity have a spacing in the axial direction of the cavity, and in the process of each connecting shaft moving from the open groove to the snap-in groove, the connecting body drives the lamp head to move toward the cavity.

[0013] Since the connector drives the lamp head to move toward the cavity during the process of each connecting shaft moving from the opening groove to the clamping groove, the distance between the lamp head and the cavity in the axial direction of the cavity gradually decreases during the assembly process of the lamp head and the cavity. On the one hand, this is beneficial to reducing the axial size of the cavity after the lamp head and the cavity are assembled, which is beneficial to the miniaturization design of the processing device; on the other hand, it is beneficial to shorten the distance from the heating light emitted by the lamp head to the wafer accommodated in the cavity, which is beneficial to improving the heating efficiency of the lamp head to the wafer and facilitating the formation of an epitaxial layer on the surface of the wafer.

[0014] In a possible implementation manner, when the connecting shaft is located in the clamping groove, the lamp cap abuts against the cavity.

[0015] When the connecting axis is located in the clamping groove, that is, when the lamp head and the cavity are assembled together through the connector, the design of the abutment between the lamp head and the cavity is beneficial to improve the structural stability after the lamp head and the cavity are assembled, and thus is beneficial to improve the structural stability of the processing device.

[0016] In a possible embodiment, the inner wall of the snap-fit ​​groove includes a snap-fit ​​surface, which is perpendicular to the axial direction of the cavity, and the inner wall of the open groove includes a guide surface, which is connected to the snap-fit ​​surface, and the guide surface is inclined relative to the snap-fit ​​surface, so that the diameter of the matching groove tends to decrease from the open groove to the snap-fit ​​groove; wherein, when the connecting shaft is located in the open groove, the connecting shaft abuts against the guide surface, and when the connecting shaft is located in the snap-fit ​​groove, the connecting shaft abuts against the snap-fit ​​surface.

[0017] Since the guide surface is inclined relative to the snap-fit ​​surface in the axial direction of the cavity, the diameter of the matching groove tends to decrease from the opening groove to the snap-fit ​​groove, and when the connecting shaft is located in the opening groove, the connecting shaft abuts against the guide surface; in this way, the connecting shaft moves from the opening groove along the guide surface to the snap-fit ​​groove. In this process, through the cooperation between the guide surface and the connecting shaft, the connecting piece drives the lamp holder to move toward the cavity along the axial direction of the cavity.

[0018] In addition, since the snap-fit ​​surface is perpendicular to the axial direction of the cavity, and when the connecting shaft is located in the snap-fit ​​groove, the connecting shaft abuts against the snap-fit ​​surface; through the restriction of the connecting shaft and the snap-fit ​​surface, in the absence of external force, the connecting piece cannot drive the lamp holder to move along the axial direction of the cavity. In the axial direction of the cavity, the lamp holder and the cavity are relatively fixed. The lamp holder and the cavity are assembled together through the connector. The design of the guide surface is conducive to improving the movement accuracy of the lamp holder toward the cavity, and is conducive to improving the structural stability of the lamp holder and the cavity during the assembly process, which is convenient for assembly. The design of assembling the lamp holder and the cavity by cooperating with the snap-fit ​​surface and the connecting shaft is not only simple in structure and easy to design, but also not easy to deform, which is conducive to improving the structural stability and reliability of the cavity and the lamp holder after assembly.

[0019] In a possible implementation manner, the guide surface faces away from the lamp holder relative to the clamping surface.

[0020] In a possible implementation manner, the included angle between the guide surface and the engaging surface is greater than 0° and less than 60°.

[0021] In this way, it is ensured that when the connecting shaft is located in the open groove, the connecting shaft is not easy to separate from the matching groove from the open groove, which is beneficial to reduce the difficulty of moving the connecting shaft from the open groove to the clamping groove relative to the connecting part, and further helps to reduce the difficulty of assembling the lamp holder and the cavity, facilitating the assembly of the lamp holder and the cavity.

[0022] In a possible implementation, the connecting shaft includes a bearing, the bearing is located outside the cavity, the connecting body can rotate relative to the cavity, and the bearing of each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove.

[0023] The connecting body rotates relative to the cavity, and each connecting part moves relative to the connecting shaft. In this process, the connecting shaft abuts against the inner wall of the matching groove through the bearing. The design of the bearing can avoid direct contact between the connecting shaft and the connecting part, which is beneficial to converting the sliding friction of the relative movement between the connecting part and the connecting shaft into rolling friction, which is beneficial to reducing the friction force of the relative movement between the connecting part and the connecting shaft, and reducing the operational resistance of the connecting body relative to the cavity. The operation is labor-saving and easy to assemble.

[0024] In a possible embodiment, the connector includes a connecting ring, and a plurality of connecting parts are fixedly connected to the connecting ring and are arranged at intervals along the circumference of the connecting ring. In the axial direction of the cavity, the connecting ring is located on the side of the lamp holder facing away from the cavity and is mounted on the outside of the lamp holder.

[0025] In this way, multiple connectors are formed into a whole through the connecting ring, which is conducive to improving the overall structural stability of the connector. In addition, since the connecting ring is located on the side of the lamp holder facing away from the cavity in the axial direction of the cavity and is sleeved on the outside of the lamp holder, it is conducive to reducing the size of the connector and the lamp holder in the axial direction of the cavity, and further conducive to reducing the size of the processing device in the axial direction of the cavity, which is conducive to the miniaturization design of the processing device.

[0026] In a possible embodiment, the connecting member includes a first connecting portion and a second connecting portion, the first connecting portion includes a first wall surface and a second wall surface, in the radial direction of the cavity, the first wall surface faces the cavity, and the second wall surface faces away from the cavity, the first connecting portion is provided with a matching groove, the matching groove extends from the first wall surface along the radial direction of the cavity to the second wall surface, the second connecting portion is fixedly connected to the first wall surface, the connecting ring is located on the side of the second connecting portion facing away from the first wall surface, and is fixedly connected to the second connecting portion, and in the axial direction of the cavity, the second connecting portion is located on the side of the lamp holder facing away from the cavity, and abuts against the lamp holder.

[0027] In this way, since the second connecting portion abuts against the lamp holder, during the movement of the connecting shaft relative to the connecting member, the connecting member drives the lamp holder to move relative to the cavity through the second connecting portion.

[0028] In a possible implementation manner, a lubricating member is provided on a surface of the second connecting portion facing the cavity, and the lamp holder is mounted on the lubricating member.

[0029] It can be understood that during the process of the connection body rotating relative to the cavity and the connection shaft moving relative to the connection piece, that is, during the assembly process of the lamp holder and the cavity, the connection body rotates relative to the lamp holder, and there is friction resistance between the second connection part of the connection piece and the lamp holder. Since a lubricating piece is provided on the surface of the second connection part facing the cavity, the lamp holder is mounted on the lubricating piece, and the second connection part contacts the lamp holder through the lubricating piece, the design of the lubricating piece is conducive to reducing the friction resistance between the second connection part and the lamp holder, and is conducive to improving the smoothness of the rotation of the connection body relative to the cavity, and is conducive to the assembly of the lamp holder and the cavity.

[0030] In a possible embodiment, the lamp holder includes a main body and a mating portion, the mating portion is arranged around the main body, and in the axial direction of the cavity, the connecting ring is located on the side of the mating portion facing away from the cavity and is mounted on the outside of the main body, and the mating portion abuts against the surface of the lubricating part facing away from the second connecting portion.

[0031] In a possible implementation manner, the connecting piece is provided with an assembly hole, the assembly hole passes through the connecting piece, the cavity is provided with a fixing hole, the fixing hole extends along the radial direction of the cavity and has an opening, the opening of the fixing hole is located on the peripheral wall of the cavity, and the processing device further includes a locking shaft;

[0032] When the connecting shaft is located in the clamping groove, in the radial direction of the cavity, the projection of the fixing hole overlaps with the projection of the assembly hole of a connecting piece, and the locking shaft passes through the fixing hole and is installed in the assembly hole.

[0033] It can be understood that the connector rotates relative to the cavity, the connector rotates relative to the cavity, and the connecting shaft moves relative to the connecting shaft. When the connecting shaft is located in the clamping groove, that is, after the lamp holder and the cavity are assembled together, the locking shaft passes through the fixing hole and is installed in the assembly hole. When the lamp holder and the cavity are assembled together, the cooperation between the locking shaft and the fixing hole and the assembly hole can limit the rotation of the connector relative to the cavity, and further limit the movement of the connecting shaft relative to the connecting shaft, which is beneficial to improve the structural stability and reliability after the lamp holder and the cavity are assembled.

[0034] In a possible embodiment, the cavity is provided with a guide shaft, which extends from the cavity toward the surface of the lamp holder and extends axially along the cavity. The lamp holder is provided with a limiting hole, which passes through the lamp holder along the axial direction of the cavity, and the guide shaft is installed in the limiting hole of the lamp holder.

[0035] In this way, the cooperation between the guide shaft and the limiting hole of the lamp holder is conducive to improving the movement accuracy of the lamp holder relative to the cavity along the axial direction of the cavity, and is conducive to improving the structural stability of the lamp holder and the cavity during the assembly process, which is convenient for the assembly of the processing device. Moreover, the cooperation between multiple guide shafts and multiple limiting holes ensures that the lamp holder can only slide along the axial direction of the cavity relative to the cavity, further improving the movement accuracy of the lamp holder relative to the cavity along the axial direction of the cavity, avoiding large shaking of the lamp holder relative to the cavity during the sliding process, facilitating the assembly of the lamp holder and the cavity, and facilitating the assembly of the processing device.

[0036] In a possible implementation, the cavity includes a receiving cavity, a lamp group is embedded in the lamp holder, the lamp group is exposed outside the lamp holder from a surface of the lamp holder facing the cavity, and a projection of the lamp group is located in the receiving cavity in the axial direction of the cavity.

[0037] The cavity accommodates the wafer through the receiving cavity, and the lamp head emits heat light through the lamp group. In the axial direction of the cavity, the projection of the lamp group is located in the receiving cavity, so that the heat light emitted by the lamp group can be injected into the receiving cavity to heat the wafer accommodated in the receiving cavity, thereby facilitating the formation of an epitaxial layer on the surface of the wafer.

[0038] In a possible implementation manner, the processing device further includes a second lamp holder, which is located on a side of the cavity facing away from the lamp holder and is fixedly connected to the cavity.

[0039] In this way, on the basis of heating the wafer by the lamp head, the wafer can be further heated by the second lamp head, which is convenient for improving the heating efficiency and saving processing time. In addition, the temperature of the wafer can also be adjusted by controlling the luminous efficiency of the second lamp head to control the crystal orientation and growth rate of the epitaxial layer formed on the surface of the wafer, so as to form a target epitaxial layer on the surface of the wafer.

[0040] In a second aspect, an embodiment of the present application further provides a semiconductor device, the semiconductor device comprising the processing device described in any one of the first aspects and a shell, wherein the processing device is accommodated in the shell. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0042] Figure 1 is a structural block diagram of a semiconductor device provided in an embodiment of the present application;

[0043] Figure 2 It is a structural schematic diagram of a processing device provided in an embodiment of the present application;

[0044] Figure 3 yes Figure 2The structural schematic diagram of the processing device shown in another angle;

[0045] Figure 4 yes Figure 3 A cross-sectional view of the processing device shown along line AA;

[0046] Figure 5 yes Figure 4 A schematic structural diagram of a cavity of a processing device shown;

[0047] Figure 6 yes Figure 4 A schematic structural diagram of a lamp holder of a processing device shown;

[0048] Figure 7 yes Figure 3 The processing device shown omits the cavity, guide shaft, lamp holder, locking shaft and second lamp holder;

[0049] Figure 8 yes Figure 7 A cross-sectional view of the processing device shown along line BB;

[0050] Fig. 9 yes Figure 8 A schematic structural diagram of a connector of a processing device shown;

[0051] Fig.10 yes Figure 7 A schematic structural diagram of a connecting member (lubricating member omitted) of the connecting body shown in FIG. 1 at another angle;

[0052] Figures 11 to 13 yes Figure 3 A schematic diagram of the assembly process of the processing device shown at another angle;

[0053] Fig.14 yes Figure 3 The cross-sectional view of the second lamp cap of the processing device is shown along the AA line.

[0054] Description of reference numerals:

[0055] 10- cavity; 11- first surface; 12- second surface; 13- third surface; 14- receiving cavity; 15- receiving platform; 16- first channel; 17- second channel; 18- connecting hole; 19- fixing hole;

[0056] 10a-guide shaft; 100-processing device; 19a-mounting hole; 19b-matching hole;

[0057] 1000-Semiconductor equipment;

[0058] 20-connecting shaft;

[0059] 20a-shaft body; 20b-bearing;

[0060] 200-housing;

[0061] 30-lamp holder; 31-main body; 32-matching part; 33-receiving hole; 34-lamp group; 35-limiting hole;

[0062] 311 - first end surface; 312 - second end surface; 321 - first mating surface; 322 - second mating surface;

[0063] 40-connector; 41-connector; 42-connecting ring;

[0064] 411-first connecting portion; 412-second connecting portion; 413-lubricating member;

[0065] 4111-first wall surface; 4112-second wall surface; 4113-third wall surface; 4114-fourth wall surface; 4115-matching groove;

[0066] 4116-clip groove; 4117-opening groove; 4118-assembly hole; 4121-first layer; 4122-second layer; 4123-third layer; 4124-fourth layer; 4125-fifth layer; 4126-installation groove; 4131-first connection surface; 4132-second connection surface; 4133-third connection surface;

[0067] 4116a-card-joining surface; 4116b-second card-joining surface; 4116c-third card-joining surface; 4117a-opening; 4117b-guiding surface;

[0068] 4117c- second guide surface; 4117d- first side; 4117e- second side;

[0069] 50-locking shaft;

[0070] 60 - second lamp holder; 61 - second main body; 62 - second matching portion; 63 - second receiving hole; 64 - second lamp group; 65 - through hole;

[0071] 611-third end surface; 612-fourth end surface; 621-third mating surface; 622-fourth mating surface;

[0072] 70-Fasteners. DETAILED DESCRIPTION

[0073] The embodiments of the present application provide a processing device and a semiconductor device. The processing device is used in semiconductor devices. In the processing device and the semiconductor device provided in the embodiments of the present application, the assembly of the lamp holder and the cavity is achieved by rotating the connector. Compared with the existing assembly scheme by buckle, it is not only easy to assemble, but also conducive to improving the installation accuracy and installation reliability of the lamp holder and the cavity, and conducive to improving the structural stability of the processing device and the semiconductor device. It also ensures that the processing device applied to the semiconductor device can achieve single-side assembly, which is conducive to reducing the installation operation space of the semiconductor device and facilitating the miniaturization design of the semiconductor device.

[0074] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0075] See also Figure 1 , Figure 1 1 is a block diagram of a semiconductor device 1000 provided in an embodiment of the present application. Exemplarily, the semiconductor device 1000 is an epitaxial device, and the semiconductor device 1000 is used to form an epitaxial layer on a wafer.

[0076] In some embodiments, the semiconductor device 1000 includes a processing device 100 and a housing 200. The processing device 100 is accommodated in the housing 200. The processing device 100 is used to form an epitaxial layer on the surface of a wafer. The semiconductor device 1000 forms an epitaxial layer on the surface of a wafer through the processing device 100. Exemplarily, the housing 200 can be various shapes including but not limited to a cylindrical box or a rectangular box, and this application does not specifically limit this.

[0077] See also Figure 2 , Figure 3 , Figure 4 and Figure 5 , Figure 2 It is a structural schematic diagram of a processing device 100 provided in an embodiment of the present application. Figure 3 yes Figure 2 The structure schematic diagram of the processing device 100 shown is shown at another angle. Figure 4 yes Figure 3 The processing device 100 is shown in a cross-sectional view along line AA. Figure 5 yes Figure 4 A schematic structural diagram of a cavity 10 of a processing device 100 is shown.

[0078] like Figure 2 , Figure 3 and Figure 4As shown, in some embodiments, the processing device 100 includes a cavity 10, a guide shaft 10a, a plurality of connecting shafts 20, a lamp holder 30, a connector 40, a locking shaft 50 and a second lamp holder 60. Exemplarily, the cavity 10 is a column. Specifically, the cavity 10 is a cylinder. In the axial direction of the cavity 10, the guide shaft 10a is located on one side of the cavity 10 and is fixedly connected to the cavity 10. A plurality of connecting shafts 20 are arranged on the peripheral wall of the cavity 10 at intervals along the circumference of the cavity 10. In the axial direction of the cavity 10, the lamp holder 30 is located on the side of the cavity 10 facing the guide shaft 10a, and is sleeved on the outside of the guide shaft 10a. The lamp holder 30 can be closer to or farther from the cavity 10 along the guide shaft 10a relative to the cavity 10. In the axial direction of the cavity 10, the connector 40 is partially located on the side of the lamp holder 30 facing away from the cavity 10, and is sleeved on the outside of the lamp holder 30 and abuts against the lamp holder 30. The connector 40 is rotatably mounted on the cavity 10. The lamp holder 30 is mounted on the cavity 10 through the connector 40. The locking shaft 50 can pass through the connector 40 and be connected to the cavity 10. The locking shaft 50 is used to limit the rotation of the connector 40 relative to the cavity 10. The second lamp holder 60 is located on the side of the cavity 10 facing away from the lamp holder 30 and is connected to the cavity 10. The cavity 10 is used to accommodate a wafer. The lamp holder 30 and the second lamp holder 60 are used to heat the wafer so as to form an epitaxial layer on the surface of the wafer.

[0079] like Figure 3 , Figure 4 and Figure 5 As shown, illustratively, the cavity 10 is made of transparent quartz. In some other embodiments, the cavity 10 may also be made of other transparent materials such as glass, which is not specifically limited in the present application. In some embodiments, the cavity 10 includes a first surface 11, a second surface 12 and a third surface 13. The first surface 11 and the second surface 12 are planes, and the third surface 13 is a curved surface. In the axial direction of the cavity 10, the first surface 11 and the second surface 12 are arranged opposite to each other. The third surface 13 is connected between the first surface 11 and the second surface 12. It can be understood that the first surface 11 and the second surface 12 are opposite end surfaces of the cavity 10. The third surface 13 is the peripheral wall of the cavity 10.

[0080] In some embodiments, the cavity 10 is provided with a receiving cavity 14, and the receiving cavity 14 extends along the axial direction of the cavity 10. Among them, a receiving platform 15 is provided on the cavity wall of the receiving cavity 14 facing away from the first surface 11. The receiving platform 15 is used to carry the wafer. Specifically, the wafer is mounted on the surface of the receiving platform 15 facing away from the first surface 11. In other words, the wafer is received in the receiving cavity 14.

[0081] In some embodiments, the cavity 10 is provided with a first channel 16 and a second channel 17. In the radial direction of the cavity 10, the first channel 16 and the second channel 17 are located on both sides of the receiving cavity 14 and are both connected to the receiving cavity 14. The first channel 16 and the second channel 17 both extend in the radial direction of the cavity 10 and both have openings, and the openings of the first channel 16 and the second channel 17 are both located on the third surface 13. In the radial direction of the cavity 10, the opening of the first channel 16 and the opening of the second channel 17 are arranged opposite to each other.

[0082] The external processing gas can be transported from the outside of the chamber 10 to the receiving chamber 14 through the first channel 16, and then transported from the receiving chamber 14 to the outside of the chamber 10 through the second channel 17. The processing gas can include but is not limited to silicon tetrachloride, trichlorosilane, silane or dichlorosilane, etc., which is not specifically limited in this application. After being heated at high temperature, the processing gas can form an epitaxial layer on the surface of the wafer mounted on the receiving table 15.

[0083] In some embodiments, the cavity 10 is provided with a plurality of connecting holes 18. Exemplarily, the number of the connecting holes 18 is four, and the four connecting holes 18 are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four connecting holes 18 are spaced and evenly distributed around the receiving cavity 14, and are spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the four connecting holes 18 are all located on the side of the first channel 16 facing the first surface 11, and are spaced apart from the first channel 16; and the four connecting holes 18 are all located on the side of the second channel 17 facing the first surface 11, and are spaced apart from the second channel 17. Each connecting hole 18 extends radially along the cavity 10 and has an opening, and the opening is located on the third surface 13. In some other embodiments, the number of the connecting holes 18 may also be two, three or more, which is not specifically limited in the present application.

[0084] In some embodiments, the cavity 10 is provided with a fixing hole 19. Exemplarily, the number of the fixing holes 19 is four, and the four fixing holes 19 are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four fixing holes 19 are spaced and evenly distributed around the receiving cavity 14, and are spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the four fixing holes 19 are all located on the side of each connecting hole 18 facing the first surface 11, and are spaced apart from each connecting hole 18. Among them, each fixing hole 19 extends along the radial direction of the cavity 10 and has an opening, and the opening is located on the third surface 13. In other words, the cavity 10 is provided with a fixing hole 19, and the fixing hole 19 extends along the radial direction of the cavity 10 and has an opening, and the opening of the fixing hole 19 is located on the peripheral wall of the cavity 10. In the axial direction of the cavity 10, the projections of the four fixing holes 19 overlap with the projections of the four connecting holes 18 respectively. In some other embodiments, the number of the fixing holes 19 may also be one, three or more, and this application does not specifically limit this.

[0085] In some embodiments, the cavity 10 is provided with a plurality of mounting holes 19a. Exemplarily, the number of mounting holes 19a is four. The four mounting holes 19a are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four mounting holes 19a are spaced and evenly distributed around the receiving cavity 14, and are spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the four mounting holes 19a are all located on the side of the first channel 16 facing the first surface 11, and are spaced apart from the first channel 16; the four mounting holes 19a are all located on the side of the second channel 17 facing the first surface 11, and are spaced apart from the second channel 17. In the radial direction of the cavity 10, the four mounting holes 19a are respectively located between the receiving cavity 14 and the four fixing holes 19, and are spaced apart from the receiving cavity 14 and the four fixing holes 19, respectively. Each mounting hole 19a extends along the axial direction of the cavity 10 and has an opening, and the opening is located on the first surface 11. In some other embodiments, the number of the mounting holes 19a may be one, two, three or more, which is not specifically limited in the present application.

[0086] In some embodiments, the cavity 10 is provided with a plurality of matching holes 19b. Exemplarily, the number of matching holes 19b is two. The two matching holes 19b are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the two matching holes 19b are spaced and evenly distributed around the receiving cavity 14, and are both spaced apart from the receiving cavity 14. In the axial direction of the cavity 10, the two matching holes 19b are both located on the side of the first channel 16 facing away from the first surface 11, and are both spaced apart from the first channel 16; the two matching holes 19b are both located on the side of the second channel 17 facing away from the first surface 11, and are both spaced apart from the second channel 17. Among them, each matching hole 19b extends along the axial direction of the cavity 10 and has an opening, and the opening is located on the second surface 12. In some other embodiments, the number of matching holes 19b may also be one, three or more, and the present application does not specifically limit this.

[0087] Exemplarily, the number of guide shafts 10a is four. The four guide shafts 10a are fixedly mounted in the four mounting holes 19a respectively by means including but not limited to welding, gluing or threaded connection. Each guide shaft 10a extends along the axial direction of the cavity 10 and is exposed to the outside of the cavity 10. In other words, the cavity 10 is provided with guide shafts 10a, and each guide shaft 10a extends along the axial direction of the cavity 10 and extends from the first surface 11 of the cavity 10. In some other embodiments, the number of guide shafts 10a may also be one, two, three or more, which is not specifically limited in the present application.

[0088] In some embodiments, the connecting shaft 20 is embedded in the cavity 10, and the connecting shaft 20 extends in the radial direction of the cavity 10 and extends from the third surface 13 of the cavity 10. Specifically, the connecting shaft 20 is fixedly installed in the connecting hole 18 of the cavity 10, and the connecting shaft 20 extends in the radial direction of the cavity 10 and extends from the third surface 13 of the cavity 10. Exemplarily, the number of the connecting shafts 20 is multiple, and specifically, the number of the connecting shafts 20 is four. The four connecting shafts 20 are respectively fixedly installed in the four connecting holes 18 of the cavity 10, and the four connecting shafts 20 extend in the radial direction of the cavity 10 and extend from the third surface 13 of the cavity 10. It can be understood that the four connecting shafts 20 are arranged at intervals along the circumference of the cavity 10 and extend in the radial direction of the cavity 10. In other words, the peripheral wall of the cavity 10 is provided with a plurality of connecting shafts 20, and the plurality of connecting shafts 20 are arranged at intervals along the circumference of the cavity 10 and extend in the radial direction of the cavity 10.

[0089] In some embodiments, the connecting shaft 20 includes a shaft body 20a and a bearing 20b, and the bearing 20b is mounted on the outside of the shaft body 20a. Exemplarily, the number of bearings 20b is one. In some other embodiments, the number of bearings 20b may also be two, three or more, which is not specifically limited in the present application. Among them, the shaft body 20a is fixedly installed in the connecting hole 18 of the cavity 10 by means including but not limited to welding or gluing, the shaft body 20a extends radially along the cavity 10 and is partially exposed to the outside of the cavity 10, and the bearing 20b mounted on the outside of the shaft body 20a is located outside the cavity 10.

[0090] See also Figure 6 , and combined with Figure 4 and Figure 5 , Figure 6 yes Figure 4 A schematic structural diagram of a lamp holder 30 of a processing device 100 is shown.

[0091] like Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments, in the axial direction of the cavity 10, the lamp holder 30 is located on the side of the cavity 10 facing the guide axis 10a. Specifically, the lamp holder 30 is located on the side of the first surface 11 of the cavity 10 facing away from the second surface 12. In other words, in the axial direction of the cavity 10, the lamp holder 30 is located on one side of the cavity 10. The lamp holder 30 is sleeved on the outside of the guide axis 10a, and the lamp holder 30 can approach or move away from the cavity 10 along the guide axis 10a (i.e., the axial direction of the cavity 10). Specifically, the lamp holder 30 can approach or move away from the first surface 11 of the cavity 10 along the guide axis 10a (i.e., the axial direction of the cavity 10).

[0092] It can be understood that since the lamp holder 30 is located on the side of the first surface 11 of the cavity 10 facing away from the second surface 12, the first surface 11 of the cavity 10 is the surface of the cavity 10 facing the lamp holder 30; and since the guide shaft 10a extends along the axial direction of the cavity 10 and extends from the first surface 11 of the cavity 10, that is to say, the guide shaft 10a extends from the surface of the cavity 10 facing the lamp holder 30 (i.e., the first surface 11) and extends along the axial direction of the cavity 10.

[0093] In some embodiments, the lamp holder 30 includes a main body 31 and a matching portion 32. The matching portion 32 is arranged around the main body 31. Exemplarily, the main body 31 and the matching portion 32 are integrally formed. In this way, it is beneficial to improve the overall strength of the lamp holder 30 and to improve the structural stability of the lamp holder 30. Among them, the main body 31 is a cylinder. In some other embodiments, the main body 31 may also be various shapes including but not limited to a rectangular block or a rectangular cylinder, and the present application does not make specific limitations on this.

[0094] The main body 31 includes a first end surface 311 and a second end surface 312. In the axial direction of the cavity 10, the first end surface 311 and the second end surface 312 are arranged opposite to each other. The first end surface 311 faces the cavity 10, and the first end surface 311 faces the first surface 11 of the cavity 10. The second end surface 312 faces away from the cavity 10, and the second end surface 312 faces away from the first surface 11 of the cavity 10.

[0095] The mating portion 32 includes a first mating surface 321 and a second mating surface 322. In the axial direction of the cavity 10, the first mating surface 321 and the second mating surface 322 are arranged opposite to each other. In the axial direction of the cavity 10, the first mating surface 321 faces away from the first end surface 311, is located between the first end surface 311 and the second end surface 312, and is spaced apart from the first end surface 311 and the second end surface 312. The second mating surface 322 faces away from the second end surface 312, and in the radial direction of the cavity 10, the second mating surface 322 is flush with the first end surface 311. It can be understood that the surface of the lamp holder 30 facing away from the first mating surface 321 includes the second mating surface 322 and the first end surface 311. Among them, the first mating surface 321 faces away from the cavity 10, and the first mating surface 321 faces away from the first surface 11 of the cavity 10. The second mating surface 322 faces toward the cavity 10, and the second mating surface 322 faces toward the first surface 11 of the cavity 10.

[0096] In some embodiments, the lamp holder 30 is provided with a receiving hole 33. Specifically, the main body 31 is provided with a receiving hole 33, and the receiving hole 33 extends along the axial direction of the cavity 10 and has an opening, and the opening is located on the first end surface 311 of the main body 31. The receiving hole 33 is used to accommodate a lamp group 34. The lamp group 34 is used to emit heat-generating light. The lamp group 34 is accommodated in the receiving hole 33 by means including but not limited to welding or gluing, and the lamp group 34 is exposed to the outside of the lamp holder 30 from the first end surface 311 of the main body 31. In other words, the lamp holder 30 is embedded with the lamp group 34, and the lamp group 34 is exposed to the outside of the lamp holder 30 from the surface of the lamp holder 30 facing the cavity 10. In which, in the axial direction of the cavity 10, the projection of the lamp group 34 is located in the receiving cavity 14.

[0097] Exemplarily, the number of the receiving holes 33 is two, and correspondingly, the number of the lamp groups 34 is two, and the two lamp groups 34 are respectively received in the two receiving holes 33. The two receiving holes 33 are arranged at intervals along the circumference of the cavity 10. The two lamp groups 34 are arranged at intervals along the circumference of the cavity 10. In the axial direction of the cavity 10, the projections of the two lamp groups 34 are both located in the receiving cavity 14. In some other embodiments, the number of the receiving holes 33 and the lamp groups 34 may also be one, three or more, which is not specifically limited in the present application.

[0098] In this way, the cavity 10 receives the wafer through the receiving cavity 14, and the lamp head 30 emits heat light through the lamp group 34. In the axial direction of the cavity 10, the projection of the lamp group 34 is located in the receiving cavity 14, so that the heat light emitted by the lamp group 34 can be projected into the receiving cavity 14 to heat the wafer received in the receiving cavity 14, thereby facilitating the formation of an epitaxial layer on the surface of the wafer.

[0099] In some embodiments, the lamp holder 30 is provided with a limiting hole 35. Specifically, the main body 31 is provided with a limiting hole 35, which extends along the axial direction of the cavity 10 and has two openings, and the two openings are respectively located at the first end surface 311 and the second end surface 312 of the main body 31. In other words, the limiting hole 35 extends along the axial direction of the cavity 10 and passes through the lamp holder 30. Exemplarily, the number of the limiting holes 35 is four, and the four limiting holes 35 are spaced and evenly distributed along the circumference of the cavity 10. Specifically, the four limiting holes 35 are spaced and evenly distributed around the two receiving holes 33. In some other embodiments, the number of the limiting holes 35 may also be two, three or more, which is not specifically limited in the present application. Among them, the four guide shafts 10a are respectively installed in the four limiting holes 35. That is to say, the guide shaft 10a is installed in the limiting hole 35 of the lamp holder 30. The lamp holder 30 is sleeved on the outside of the guide shaft 10a through the limiting hole 35. The lamp holder 30 can slide relative to the cavity 10 along the four guide axes 10a (i.e. the axial direction of the cavity 10), so that the surface of the lamp holder 30 facing away from the first mating surface 321 (including the first end surface 311 and the second mating surface 322) approaches or moves away from the first surface 11 of the cavity 10.

[0100] The cooperation between the guide shaft 10a and the limiting hole 35 of the lamp holder 30 is conducive to improving the movement accuracy of the lamp holder 30 relative to the cavity 10 along the axial direction of the cavity 10, and is conducive to improving the structural stability of the lamp holder 30 and the cavity 10 during the assembly process, which is convenient for assembling the processing device 100. Moreover, the cooperation between the multiple guide shafts 10a and the multiple limiting holes 35 ensures that the lamp holder 30 can only slide along the axial direction of the cavity 10 relative to the cavity 10, further improving the movement accuracy of the lamp holder 30 relative to the cavity 10 along the axial direction of the cavity 10, avoiding the lamp holder 30 from shaking greatly during the sliding process relative to the cavity 10, facilitating the assembly of the lamp holder 30 and the cavity 10, and facilitating the assembly of the processing device 100.

[0101] See also Figure 7 , Figure 8 , Fig. 9 and Fig.10 , and combined with Figure 4 , Figure 5 and Figure 6 , Figure 7 yes Figure 3 The processing device 100 shown omits the cavity 10 , the guide shaft 10 a , the lamp holder 30 , the locking shaft 50 and the second lamp holder 60 . Figure 8 yes Figure 7 The processing device 100 is shown in a cross-sectional view along line BB. Fig. 9 yes Figure 8 The schematic structural diagram of the connecting member 41 of the connecting body 40 of the processing device 100 is shown. Fig.10 yes Figure 7 The connecting member 41 (lubricating member 413 omitted) of the connecting body 40 is shown as a schematic structural diagram at another angle.

[0102] like Figure 4 , Figure 7 and Figure 8 As shown, in some embodiments, in the axial direction of the cavity 10, the connector 40 is partially located on the side of the lamp holder 30 facing away from the cavity 10, abuts against the lamp holder 30, and is rotatably mounted on the cavity 10. Specifically, the connector 40 is sleeved on the outside of the main body 31, and the connector 40 is partially located on the side of the matching portion 32 facing away from the cavity 10, abuts against the matching portion 32, and is rotatably mounted on the cavity 10.

[0103] In some embodiments, the connector 40 includes a plurality of connectors 41 and a connecting ring 42. The plurality of connectors 41 are fixedly connected to the connecting ring 42, and are spaced and evenly distributed along the circumference of the connecting ring 42. In the axial direction of the cavity 10, the connecting ring 42 is located on the side of the lamp holder 30 that is away from the cavity 10, and is sleeved on the outside of the lamp holder 30. Specifically, in the axial direction of the cavity 10, the connecting ring 42 is located on the side of the matching portion 32 of the lamp holder 30 that is away from the cavity 10, and is sleeved on the outside of the main body 31 of the lamp holder 30. The plurality of connectors 41 are respectively mounted on the plurality of connecting shafts 20, and the plurality of connectors 41 are all in contact with the lamp holder 30. Specifically, each connector 41 is mounted on the bearing 20b of the connecting shaft 20, and each connector 41 is in contact with the matching portion 32 of the lamp holder 30.

[0104] Exemplarily, the number of the connecting members 41 is four, and the four connecting members 41 are all fixedly connected to the connecting ring 42, and are spaced and evenly distributed along the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10). The four connecting members 41 are respectively mounted on the four connecting shafts 20, and the four connecting members 41 are all in contact with the lamp holder 30. Specifically, each connecting member 41 is mounted on the bearing 20b of the connecting shaft 20, and is in contact with the matching portion 32 of the lamp holder 30. In some other embodiments, the number of the connecting members 41 may also be two, three or more, and this application does not specifically limit this.

[0105] In this way, the plurality of connectors 41 form a whole through the connecting ring 42, which is conducive to improving the overall structural stability of the connector 40. Moreover, since the connecting ring 42 is located on the side of the lamp holder 30 facing away from the cavity 10 in the axial direction of the cavity 10 and is sleeved on the outside of the lamp holder 30, it is conducive to reducing the axial size of the connector 40 and the lamp holder 30 in the cavity 10, and further conducive to reducing the axial size of the processing device 100 in the cavity 10, which is conducive to the miniaturization design of the processing device 100. It can be understood that the axial direction of the connecting ring 42 is the axial direction of the cavity 10, the circumferential direction of the connecting ring 42 is the circumferential direction of the cavity 10, and the radial direction of the connecting ring 42 is the radial direction of the cavity 10. The plurality of connectors 41 are located outside the cavity 10 and are arranged at intervals along the circumference of the cavity 10.

[0106] like Figure 8 , Fig. 9 and Fig.10 As shown, in some embodiments, the connecting member 41 includes a first connecting portion 411 and a second connecting portion 412. In the radial direction of the connecting ring 42 (i.e., in the radial direction of the cavity 10), the second connecting portion 412 is located on one side of the first connecting portion 411 and is fixedly connected to the first connecting portion 411. Exemplarily, the first connecting portion 411 and the second connecting portion 412 are integrally formed, which is beneficial to improving the overall strength of the connecting member 41 and improving the structural stability of the connecting member 41.

[0107] Exemplarily, the first connecting portion 411 is a rectangular plate. The first connecting portion 411 includes a first wall 4111, a second wall 4112, a third wall 4113 and a fourth wall 4114. In the radial direction of the connecting ring 42 (i.e., in the radial direction of the cavity 10), the first wall 4111 and the second wall 4112 are arranged opposite to each other. In the circumferential direction of the cavity 10 (i.e., in the circumferential direction of the cavity 10), the third wall 4113 and the fourth wall 4114 are arranged opposite to each other and are both connected between the first wall 4111 and the second wall 4112.

[0108] like Figure 8 , Fig. 9 and Fig.10 As shown, in some embodiments, the first connection portion 411 is provided with a matching groove 4115. The matching groove 4115 extends from the first wall surface 4111 along the radial direction of the connection ring 42 (i.e., the radial direction of the cavity 10) to the second wall surface 4112. The matching groove 4115 penetrates the first connection portion 411 along the radial direction of the connection ring 42 (i.e., the radial direction of the cavity 10). In other words, the connection member 41 is provided with a matching groove 4115, and the matching groove 4115 penetrates the connection member 41 along the radial direction of the connection ring 42 (i.e., the radial direction of the cavity 10).

[0109] The matching groove 4115 includes a snap-fit ​​groove 4116 and an open groove 4117. The open groove 4117 and the snap-fit ​​groove 4116 are sequentially connected along the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10). Specifically, in the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10), the open groove 4117 is located between the snap-fit ​​groove 4116 and the third wall surface 4113 of the first connecting portion 411, and is connected to the snap-fit ​​groove 4116. Among them, the open groove 4117 has an opening 4117a, and the opening 4117a is located on the third wall surface 4113. In other words, the opening 4117a passes through the connecting member 41 along the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10). In the circumference of the connecting ring 42 (i.e., the circumference of the cavity 10), the snap-fit ​​groove 4116 is located on the side of the open groove 4117 facing away from its opening 4117a, and is connected to the open groove 4117.

[0110] The inner wall of the clamping groove 4116 includes a clamping surface 4116a, a second clamping surface 4116b and a third clamping surface 4116c. Exemplarily, the clamping surface 4116a and the second clamping surface 4116b are planes. The third clamping surface 4116c is a curved surface. Specifically, the third clamping surface 4116c is an arc surface. In the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10), the clamping surface 4116a and the second clamping surface 4116b are spaced and parallel to each other. The third clamping surface 4116c is connected between the clamping surface 4116a and the second clamping surface 4116b. Among them, the clamping surface 4116a and the second clamping surface 4116b are both perpendicular to the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10).

[0111] The inner wall of the opening groove 4117 includes a guide surface 4117b and a second guide surface 4117c. In the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10), the guide surface 4117b and the second guide surface 4117c are spaced apart from each other. The guide surface 4117b is connected between the clamping surface 4116a and the third wall surface 4113 of the first connecting portion 411. The second guide surface 4117c is connected between the second clamping surface 4116b and the third wall surface 4113 of the first connecting portion 411. Among them, the second guide surface 4117c is vertically arranged with respect to the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10) (a small deviation is allowed). The guide surface 4117b is inclined relative to the second guide surface 4117c. The guide surface 4117b includes a first side 4117d and a second side 4117e. In the circumferential direction of the connecting ring 42 (i.e., in the circumferential direction of the cavity 10), the first side 4117d and the second side 4117e are arranged opposite to each other. The first side 4117d is connected to the clamping surface 4116a of the clamping groove 4116. The second side 4117e is connected to the third wall surface 4113 of the first connecting portion 411. In the axial direction of the connecting ring 42 (i.e., in the axial direction of the cavity 10), the distance between the guide surface 4117b and the second guide surface 4117c gradually increases from the first side 4117d to the second side 4117e. In some other embodiments, the guide surface 4117b may also be arranged in parallel with the second guide surface 4117c, which is not specifically limited in the present application.

[0112] It can be understood that the guide surface 4117b is tilted relative to the clamping surface 4116a, so that from the opening groove 4117 to the clamping groove 4116, the caliber of the matching groove 4115 (i.e., the size of the matching groove 4115 in the axial direction of the cavity 10) tends to decrease. In the axial direction of the connecting ring 42 (i.e., in the axial direction of the cavity 10), the guide surface 4117b is away from the second clamping surface 4116b relative to the clamping surface 4116a. The second guide surface 4117c is flush with the second clamping surface 4116b. Among them, the angle between the guide surface 4117b and the clamping surface 4116a is greater than 0° and less than 60°.

[0113] In some embodiments, the first connection portion 411 is provided with an assembly hole 4118. The assembly hole 4118 extends from the first wall surface 4111 to the second wall surface 4112 along the radial direction of the connection ring 42 (i.e., the radial direction of the cavity 10). In other words, the assembly hole 4118 passes through the first connection portion 411, and the assembly hole 4118 passes through the connection member 41. In the axial direction of the connection ring 42 (i.e., the axial direction of the cavity 10), the assembly hole 4118 is located on one side of the clamping groove 4116 and the opening groove 4117, and is spaced apart from the clamping groove 4116 and the opening groove 4117. Specifically, the assembly hole 4118 is located on the side of the second clamping surface 4116b of the clamping groove 4116 that is opposite to the clamping surface 4116a, and is spaced apart from the second clamping surface 4116b. The assembly hole 4118 is located on a side of the second guide surface 4117c of the opening groove 4117 opposite to the guide surface 4117b, and is spaced apart from the second guide surface 4117c.

[0114] In some embodiments, the second connection portion 412 is fixedly connected to the first wall surface 4111 of the first connection portion 411, and is located on the side of the assembly hole 4118 facing away from the clamping groove 4116 and the opening groove 4117 in the axial direction of the connection ring 42 (i.e., the axial direction of the cavity 10), and is spaced from the assembly hole 4118. Exemplarily, the second connection portion 412 is a rectangular plate. The second connection portion 412 includes a first layer 4121, a second layer 4122, a third layer 4123, a fourth layer 4124, and a fifth layer 4125. In the axial direction of the connection ring 42 (i.e., the axial direction of the cavity 10), the first layer 4121 and the second layer 4122 are arranged opposite to each other. In the circumferential direction of the connection ring 42 (i.e., the circumferential direction of the cavity 10), the third layer 4123 and the fourth layer 4124 are arranged opposite to each other. The third layer 4123 and the fourth layer 4124 are both connected between the first layer 4121 and the second layer 4122. The fifth layer 4125 is connected between the first layer 4121 and the second layer 4122, and between the third layer 4123 and the fourth layer 4124. The first layer 4121 faces the clamping groove 4116 and the opening groove 4117. The second layer 4122 faces away from the clamping groove 4116 and the opening groove 4117. The third layer 4123 is flush with the third wall surface 4113 of the first connecting portion 411. The fourth layer 4124 is flush with the fourth wall surface 4114 of the first connecting portion 411. The fifth layer 4125 faces away from the first wall surface 4111 of the first connecting portion 411.

[0115] The first plane 4121 and the second plane 4122 are parallel to the clamping surface 4116a of the clamping groove 4116, the second clamping surface 4116b of the clamping groove 4116, and the second guide surface 4117c of the opening groove 4117. It can be understood that the guide surface 4117b of the opening groove 4117 is inclined relative to the first plane 4121 of the second connecting portion 412. The guide surface 4117b of the opening groove 4117 is away from the second plane 4122 relative to the first plane 4121. In the axial direction of the connecting ring 42 (i.e., the axial direction of the cavity 10), the distance between the guide surface 4117b and the first plane 4121 gradually increases from the first side 4117d to the second side 4117e.

[0116] In some embodiments, the second connection portion 412 is provided with a mounting groove 4126. The mounting groove 4126 extends from the third plane 4123 of the second connection portion 412 along the circumference of the connection ring 42 (i.e., the circumference of the cavity 10) to the fourth plane 4124 and has an opening, and the opening is located at the fifth plane 4125. Among them, the mounting groove 4126 is used to be fixedly connected to the connection ring 42. Exemplarily, the connection ring 42 is partially fixedly connected to the mounting groove 4126 by means including but not limited to welding or gluing. It can be understood that the connection ring 42 is located on the side of the first wall 4111 of the second connection portion 412 facing away from the first connection portion 411, and is fixedly connected to the second connection portion 412. Through the mounting groove 4126, the connecting member 41 is fixedly connected to the connection ring 42.

[0117] In some embodiments, the connector 41 is provided with a lubricating member 413. Specifically, the second connector 412 is provided with a lubricating member 413, and the lubricating member 413 is fixedly connected to the first plane 4121 of the second connector 412. Exemplarily, the lubricating member 413 is a gasket. The lubricating member 413 is made of a material having lubricating properties including but not limited to PTFE (Poly tetrafluoroethylene).

[0118] In some embodiments, the lubricating member 413 is a rectangular block. The lubricating member 413 includes a first connecting surface 4131, a second connecting surface 4132 and a third connecting surface 4133. In the axial direction of the connecting ring 42 (i.e., in the axial direction of the cavity 10), the first connecting surface 4131 and the second connecting surface 4132 are arranged opposite to each other. The third connecting surface 4133 is connected between the first connecting surface 4131 and the second connecting surface 4132. Among them, by means including but not limited to welding or gluing, the second connecting surface 4132 is opposite to and connected to the first plane 4121 of the second connecting part 412, and the third connecting surface 4133 is opposite to and connected to the first wall surface 4111 of the first connecting part 411. The first connecting surface 4131 faces away from the first plane 4121 of the second connecting part 412. The lubricating member 413 is fixedly stacked on the first plane 4121 of the second connecting part 412 and fixedly connected to the first connecting part 411.

[0119] The design in which the lubricating component 413 is fixedly stacked on the first layer 4121 of the second connecting part 412 and fixedly connected to the first connecting part 411 is beneficial to improving the connection strength between the lubricating component 413 and the second connecting part 412, improving the structural stability of the connecting body 40, and improving the structural stability of the processing device 100.

[0120] like Figure 4 , Figure 6 and Figure 8 As shown, in the axial direction of the cavity 10, the connecting ring 42 of the connecting body 40 is mounted on the outside of the main body 31 of the lamp holder 30 from the side of the matching portion 32 of the lamp holder 30 facing away from the cavity 10. The connecting ring 42 is located on the side of the matching portion 32 facing away from the cavity 10 and is mounted on the outside of the main body 31. The first connecting surface 4131 of the lubricating member 413 of each connecting member 41 is opposite to and in contact with the first matching surface 321 of the matching portion 32 of the lamp holder 30. The matching portion 32 of the lamp holder 30 abuts against the lubricating member 413 of each connecting member 41. The matching portion 32 abuts against the surface of the lubricating member 413 facing away from the second connecting portion 412 (i.e., the first connecting surface 4131). In the radial direction of the connecting ring 42 (i.e., the radial direction of the cavity 10), the first wall surface 4111 of the first connecting portion 411 faces the lamp holder 30, and the second wall surface 4112 of the first connecting portion 411 faces away from the lamp holder 30.

[0121] Through the lubricating member 413, the matching portion 32 of the lamp holder 30 is stacked on the first plane 4121 of the second connecting portion 412 of each connecting member 41, and the matching portion 32 of the lamp holder 30 is mounted on the second connecting portion 412 of the connecting member 41. That is to say, in the axial direction of the cavity 10, the second connecting portion 412 of the connecting member 41 is located on the side of the matching portion 32 facing away from the cavity 10, and abuts against the matching portion 32. In the axial direction of the cavity 10, the second connecting portion 412 is located on the side of the lamp holder 30 facing away from the cavity 10, and abuts against the lamp holder 30. In the axial direction of the cavity 10, the first plane 4121 of the second connecting portion 412 faces the cavity 10, and the second plane 4122 of the second connecting portion 412 faces away from the cavity 10. In other words, the surface of the second connecting portion 412 facing the cavity 10 (i.e., the first plane 4121) is provided with the lubricating member 413, and the lamp holder 30 is mounted on the lubricating member 413.

[0122] See also Fig.11 , Fig.12 and Fig.13 , and combined with Figure 4 and Fig.10 , Figures 11 to 13 yes Figure 3 The illustrated schematic diagram is a schematic diagram of the assembly process of the processing device 100 (with the second lamp holder 60 omitted) at another angle.

[0123] like Fig.10 , Fig.11 and Fig.12 As shown, the connecting body 40 can rotate relative to the cavity 10, the multiple connecting members 41 can move relative to the multiple connecting shafts 20, and the multiple connecting shafts 20 can enter the matching grooves 4115 of the connecting members 41 from the openings 4117a of the opening grooves 4117 of the multiple connecting members 41, and abut against the inner wall of the matching grooves 4115. In other words, the connecting body 40 can rotate relative to the cavity 10, each connecting member 41 can move relative to the connecting shaft 20, and each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115.

[0124] Specifically, the connecting body 40 can rotate relative to the cavity 10, and the bearings 20b of the multiple connecting shafts 20 can enter the matching groove 4115 of the connecting member 41 from the openings 4117a of the opening grooves 4117 of the multiple connecting members 41, and abut against the inner wall of the matching groove 4115. That is, the connecting body 40 can rotate relative to the cavity 10, and the bearings 20b of each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115. Among them, in the radial direction of the cavity 10, the first wall surface 4111 of the first connecting portion 411 of the connecting member 41 faces the cavity 10, and the second wall surface 4112 of the first connecting portion 411 faces away from the cavity 10. The clamping surface 4116a of the clamping groove 4116 faces the lamp holder 30 and is perpendicular to the axial direction of the cavity 10 (a small deviation may also be allowed). The guide surface 4117b of the opening groove 4117 faces the lamp holder 30 and is connected to the clamping surface 4116a. In the axial direction of the cavity 10, the guide surface 4117b is inclined relative to the engaging surface 4116a, and the guide surface 4117b is away from the lamp holder 30. In the axial direction of the cavity 10, the first side 4117d of the guide surface 4117b is closer to the lamp holder 30 than the second side 4117e.

[0125] It can be understood that the connecting body 40 can rotate relative to the cavity 10, and each connecting shaft 20 can move from the opening groove 4117 of the matching groove 4115 to the clamping groove 4116 of the matching groove 4115 relative to the connecting member 41. When the connecting shaft 20 is located in the opening groove 4117, the bearing 20b of the connecting shaft 20 abuts against the guide surface 4117b of the opening groove 4117. Through the bearing 20b, when the connecting shaft 20 is located in the opening groove 4117, the connecting shaft 20 abuts against the guide surface 4117b of the opening groove 4117. Among them, in the axial direction of the cavity 10, the lamp holder 30 is spaced apart from the cavity 10. In other words, when the connecting shaft 20 is located in the opening groove 4117, the lamp holder 30 and the cavity 10 have a spacing in the axial direction of the cavity 10.

[0126] The connecting body 40 rotates relative to the cavity 10, and each connecting member 41 moves relative to the connecting shaft 20. Each connecting shaft 20 moves from the opening groove 4117 toward the clamping groove 4116, and the bearing 20b of the connecting shaft 20 moves from the second side 4117e toward the first side 4117d along the guide surface 4117b until the bearing 20b of the connecting shaft 20 moves from the opening groove 4117 to the clamping groove 4116. When the connecting shaft 20 is located in the clamping groove 4116, the bearing 20b of the connecting shaft 20 abuts against the clamping surface 4116a of the clamping groove 4116. Through the bearing 20b, when the connecting shaft 20 is located in the clamping groove 4116, the connecting shaft 20 abuts against the clamping surface 4116a. It can be understood that each connecting shaft 20 can enter the clamping groove 4116 from the opening groove 4117 and abut against the inner wall (i.e., the clamping surface 4116a) of the clamping groove 4116.

[0127] In the case where the connecting shaft 20 is located in the clamping groove 4116, the bearing 20b of the connecting shaft 20 is also in contact with the second clamping surface 4116b and the third clamping surface 4116c. In this way, under the restriction of the clamping surface 4116a and the second clamping surface 4116b of the clamping groove 4116, the bearing 20b is prevented from shaking greatly in the clamping groove 4116, and the bearing 20b can be stably accommodated in the clamping groove 4116. Under the cooperation of the third clamping surface 4116c of the clamping groove 4116 and the bearing 20b, the connecting body 40 can be restricted from continuing to rotate relative to the cavity 10, which plays a role of indication and facilitates the assembly of the processing device 100. In addition, the connecting body 40 rotates relative to the cavity 10, and each connecting part 41 moves relative to the connecting shaft 20. During this process, the connecting shaft 20 abuts against the inner wall of the matching groove 4115 (including the guide surface 4117b and the clamping surface 4116a) through the bearing 20b. The design of the bearing 20b can avoid direct contact between the connecting shaft 20 and the connecting part 41, which is beneficial to convert the sliding friction of the relative movement between the connecting part 41 and the connecting shaft 20 into rolling friction, which is beneficial to reduce the friction force of the relative movement between the connecting part 41 and the connecting shaft 20, and is beneficial to reduce the operational resistance of the connecting body 40 rotating relative to the cavity 10, which saves effort and is easy to assemble.

[0128] In addition, in the process of the bearing 20b of each connecting shaft 20 moving from the opening groove 4117 to the clamping groove 4116 along the guide surface 4117b, under the restriction of the guide surface 4117b, through the cooperation between the lubricating member 413 and the matching portion 32 of the lamp holder 30, in the axial direction of the cavity 10, the connecting member 41 drives the lamp holder 30 to move toward the cavity 10 along the guide shaft 10a until the bearing 20b of the connecting shaft 20 is located in the clamping groove 4116. Specifically, due to the lubricating member 413, the second connecting portion 412 of the connecting member 41 abuts against the lamp holder 30, and in the process of the connecting shaft 20 moving from the opening groove 4117 to the clamping groove 4116, the connecting member 41 drives the lamp holder 30 to approach the cavity 10 along the axial direction of the cavity 10 through the second connecting portion 412. It can be understood that in the process of each connecting shaft 20 moving from the opening groove 4117 to the clamping groove 4116, the connecting body 40 drives the lamp holder 30 to move toward the cavity 10. In some other embodiments, when the connecting shaft 20 moves from the opening groove 4117 toward the engaging groove 4116 , the connecting body 40 may also drive the lamp holder 30 to move away from the cavity 10 in the axial direction of the cavity 10 .

[0129] In which, when the connecting shaft 20 is located in the snap-in groove 4116, the surface of the first mating surface 321 of the lamp holder 30 facing away from the mating part 32 (including the first end surface 311 of the main body 31 and the second mating surface 322 of the mating part 32) abuts against the first surface 11 of the cavity 10, and the lamp holder 30 abuts against the cavity 10.

[0130] Since the guide surface 4117b is inclined relative to the snap-fit ​​surface 4116a in the axial direction of the cavity 10, the caliber of the matching groove 4115 (the size of the matching groove 4115 in the axial direction of the cavity 10) tends to decrease from the opening groove 4117 to the snap-fit ​​groove 4116, and when the connecting shaft 20 is located in the opening groove 4117, the connecting shaft 20 abuts against the guide surface 4117b; in this way, the connecting shaft 20 moves from the opening groove 4117 along the guide surface 4117b to the snap-fit ​​groove 4116. In this process, through the cooperation between the guide surface 4117b and the connecting shaft 20, the connecting piece 41 drives the lamp holder 30 to move toward the cavity 10 along the axial direction of the cavity 10.

[0131] In addition, since the clamping surface 4116a is perpendicular to the axial direction of the cavity 10, and when the connecting shaft 20 is located in the clamping groove 4116, the connecting shaft 20 abuts against the clamping surface 4116a; through the restriction of the connecting shaft 20 and the clamping surface 4116a, the connecting body 40 cannot drive the lamp holder 30 to move along the axial direction of the cavity 10 without the action of external force. In the axial direction of the cavity 10, the lamp holder 30 and the cavity 10 are relatively fixed. Through the connecting body 40, the lamp holder 30 and the cavity 10 are assembled together. The design of the guide surface 4117b is conducive to improving the movement accuracy of the lamp holder 30 moving toward the cavity 10, and is conducive to improving the structural stability of the lamp holder 30 and the cavity 10 during the assembly process, which is convenient for assembly. The design of assembling the lamp holder 30 and the cavity 10 by cooperating with the clamping surface 4116a and the connecting shaft 20 is not only simple in structure and easy to design, but also not easy to deform, which is conducive to improving the structural stability and reliability of the cavity 10 and the lamp holder 30 after assembly.

[0132] It can be understood that since the angle between the guide surface 4117b of the opening groove 4117 and the snap-fit ​​surface 4116a of the snap-fit ​​groove 4116 is greater than 0° and less than 60°, this ensures that when the connecting shaft 20 is located in the opening groove 4117, it is not easy for the connecting shaft 20 to disengage from the mating groove 4115 from the opening groove 4117, which helps to reduce the difficulty of moving the connecting shaft 20 relative to the connecting member 41 from the opening groove 4117 toward the snap-fit ​​groove 4116, and further helps to reduce the difficulty of assembling the lamp holder 30 and the cavity 10, and facilitates the assembly of the lamp holder 30 and the cavity 10.

[0133] It can be understood that when the connecting shaft 20 is located in the snap-in groove 4116, that is, when the lamp head 30 and the cavity 10 are assembled together through the connecting body 40, the design of the abutment between the lamp head 30 and the cavity 10 is beneficial to improve the structural stability of the lamp head 30 and the cavity 10 after assembly, and thus helps to improve the structural stability of the processing device 100.

[0134] It can be understood that during the process of the connection body 40 rotating relative to the cavity 10 and the connection shaft 20 moving relative to the connection member 41, that is, during the assembly process of the lamp holder 30 and the cavity 10, the connection body 40 rotates relative to the lamp holder 30, and there is friction resistance between the second connection part 412 of the connection member 41 and the lamp holder 30. Since the surface of the second connection part 412 facing the cavity 10 is provided with a lubricating member 413, the lamp holder 30 is mounted on the lubricating member 413, and the second connection part 412 is in contact with the lamp holder 30 through the lubricating member 413, the design of the lubricating member 413 is conducive to reducing the friction resistance between the second connection part 412 and the lamp holder 30, and is conducive to improving the smoothness of the rotation of the connection body 40 relative to the cavity 10, and is conducive to the assembly of the lamp holder 30 and the cavity 10.

[0135] like Figure 4 , Fig.11 and Fig.12 As shown, the external processing gas is transported from the outside of the cavity 10 to the receiving cavity 14 through the first channel 16, and is transported from the receiving cavity 14 to the outside of the cavity 10 through the second channel 17. The processing gas flows in the receiving cavity 14. When the lamp head 30 is assembled with the cavity 10 through the connector 40, the multiple lamp groups 34 of the lamp head 30 can emit heating light. The heating light emitted by the multiple lamp groups 34 is emitted from the openings of the multiple receiving holes 33 respectively, and irradiated onto the receiving platform 15 through the cavity wall of the receiving cavity 14 to heat the receiving platform 15. Thus, the heating light emitted by the multiple lamp groups 34 of the lamp head 30 heats the wafer mounted on the receiving platform 15 through the receiving platform 15, so that the processing gas forms an epitaxial layer on the surface of the wafer. In this way, the temperature of the wafer can be adjusted by controlling the luminous efficiency of the multiple lamp groups 34 of the lamp head 30 to control the crystal orientation and growth rate of the epitaxial layer formed on the surface of the wafer, so as to facilitate the formation of the target epitaxial layer on the surface of the wafer.

[0136] like Figure 4 , Fig.11 and Fig.12As shown, in the processing device 100 shown in the embodiment of the present application, the connecting body 40 can rotate relative to the cavity 10 and drive the lamp holder 30 to move relative to the cavity 10, each connecting member 41 can move relative to the connecting shaft 20, and each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115. Specifically, the connecting shaft 20 can enter the matching groove 4115 from the opening groove 4117 and abut against the inner wall of the opening groove 4117 (i.e., the guide surface 4117b); the connecting shaft 20 can enter the clamping groove 4116 from the opening groove 4117 and abut against the inner wall of the clamping groove 4116 (i.e., the clamping surface 4116a). In the process of each connecting shaft 20 moving from the opening groove 4117 to the clamping groove 4116, the connecting body 40 drives the lamp holder 30 to move toward the cavity 10. When the connecting shaft 20 is located in the clamping groove 4116, the lamp holder 30 abuts against the cavity 10. At this time, the heat light emitted by the lamp heads 30 through the multiple lamp heads 30 can be stably emitted into the receiving cavity 14 of the cavity body 10 to heat the wafer received in the receiving cavity 14, so as to form an epitaxial layer on the surface of the wafer.

[0137] It can be understood that when each connecting shaft 20 abuts against the inner wall of the matching groove 4115, in the absence of external force, the connecting body 40 and the cavity 10 are relatively fixed in the axial direction of the cavity 10 through the matching of the connecting shaft 20 and the matching groove 4115, that is, the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10, and the lamp holder 30 abutting against the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10. That is, through the matching of the connecting shaft 20 and the matching groove 4115, the cavity 10 and the lamp holder 30 cannot move relative to each other in the axial direction of the cavity 10, and the cavity 10 is assembled together with the lamp holder 30 through the connecting body 40. Compared with the existing solution of assembling the cavity 10 and the lamp holder 30 by buckling, this method is not easy to deform, which is beneficial to improving the installation accuracy after the lamp holder 30 and the cavity 10 are assembled, and is beneficial to improving the stability and reliability of the lamp holder 30 and the cavity 10 after assembly, and further helps to improve the structural stability of the processing device 100; on the other hand, the operator only needs to rotate the connecting body 40 relative to the cavity 10 to realize the assembly of the lamp holder 30 and the cavity 10, which is simple to operate and easy to assemble.

[0138] As each connecting shaft 20 moves from the opening groove 4117 toward the snap-in groove 4116, the connector 40 drives the lamp head 30 to move toward the cavity 10. During the assembly process of the lamp head 30 and the cavity 10, the axial distance between the lamp head 30 and the cavity 10 gradually decreases. On the one hand, this is beneficial to reducing the axial size of the cavity 10 after the lamp head 30 and the cavity 10 are assembled, which is beneficial to the miniaturized design of the processing device 100. On the other hand, it is beneficial to shorten the distance for the heating light emitted by the lamp head 30 to be focused to the wafer housed in the cavity 10, which is beneficial to improving the heating efficiency of the lamp head 30 on the wafer and facilitating the formation of an epitaxial layer on the surface of the wafer.

[0139] like Fig.10 , Fig.11 and Fig.12 As shown, when the connecting shaft 20 is located in the clamping groove 4116, that is, when the lamp holder 30 is assembled with the cavity 10 through the connecting body 40, in the radial direction of the cavity 10, the projection of the assembly hole 4118 of each connecting member 41 overlaps with the projection of one fixing hole 19 of the cavity 10. Specifically, in the radial direction of the cavity 10, the projections of the assembly holes 4118 of the four connecting members 41 overlap with the projections of the four fixing holes 19 of the cavity 10.

[0140] like Fig.11 , Fig.12 and Fig.13 As shown, illustratively, the number of locking shafts 50 is three. By means including but not limited to threads, the three locking shafts 50 respectively pass through the assembly holes 4118 of the three connecting members 41, and are respectively fixedly installed in the three fixing holes 19 of the cavity 10. In other words, when the connecting shaft 20 is located in the clamping groove 4116, the locking shaft 50 passes through the assembly hole 4118 of the connecting member 41, and is fixedly installed in the fixing hole 19 of the cavity 10. That is to say, when the connecting shaft 20 is located in the clamping groove 4116, in the radial direction of the cavity 10, the projection of the fixing hole 19 overlaps with the projection of the assembly hole 4118 of one connecting member 41, and the locking shaft 50 passes through the fixing hole 19 and is installed in the assembly hole 4118. In some other embodiments, the number of locking shafts 50 may also be one, two or more, which is not specifically limited in the present application.

[0141] It can be understood that when the connecting body 40 rotates relative to the cavity 10, the connecting piece 41 rotates relative to the cavity 10, and the connecting shaft 20 moves relative to the connecting piece 41. When the connecting shaft 20 is located in the clamping groove 4116, that is, after the lamp holder 30 and the cavity 10 are assembled together, the locking shaft 50 passes through the fixing hole 19 and is installed in the assembly hole 4118. When the lamp holder 30 and the cavity 10 are assembled together, the cooperation of the locking shaft 50, the fixing hole 19 and the assembly hole 4118 can limit the rotation of the connecting body 40 relative to the cavity 10, and further limit the movement of the connecting shaft 20 relative to the connecting piece 41, which is conducive to improving the structural stability and reliability of the lamp holder 30 and the cavity 10 after assembly.

[0142] See also Fig.14 , and combined with Figure 4 and Figure 5 , Fig.14 yes Figure 3 The second lamp holder 60 of the processing device 100 is shown in a cross-sectional view along line AA.

[0143] In some embodiments, in the axial direction of the cavity 10, the second lamp holder 60 is located on a side of the cavity 10 facing away from the lamp holder 30, and is fixedly connected to the cavity 10. Specifically, the second lamp holder 60 is located on a side of the second surface 12 of the cavity 10 facing away from the first surface 11, and the second lamp holder 60 is fixedly connected to the second surface 12.

[0144] In some embodiments, the second lamp holder 60 includes a second main body portion 61 and a second matching portion 62. The second matching portion 62 is disposed outside the second main body portion 61 and is fixedly connected to the second main body portion 61. Exemplarily, the second main body portion 61 and the second matching portion 62 are integrally formed. In this way, it is beneficial to improve the overall strength of the second lamp holder 60 and to improve the structural stability of the second lamp holder 60. Among them, the second main body portion 61 is a cylinder. In some other embodiments, the second main body portion 61 may also be various shapes including but not limited to a rectangular block or a rectangular cylinder, and the present application does not make specific limitations on this.

[0145] The second main body portion 61 includes a third end face 611 and a fourth end face 612. In the axial direction of the cavity 10, the third end face 611 and the fourth end face 612 are disposed opposite to each other. The second matching portion 62 includes a third matching surface 621 and a fourth matching surface 622. In the axial direction of the cavity 10, the third matching surface 621 and the fourth matching surface 622 are disposed opposite to each other. In the axial direction of the cavity 10, the third matching surface 621 is located between the third end face 611 and the fourth end face 612, and is spaced apart from the third end face 611 and the fourth end face 612. The fourth matching surface 622 faces away from the third end face 611, and in the radial direction of the cavity 10, the fourth matching surface 622 is flush with the fourth end face 612. Among them, the third end face 611 and the third matching surface 621 face away from the cavity 10, and the fourth end face 612 and the fourth matching surface 622 face toward the cavity 10.

[0146] In some embodiments, the second lamp holder 60 is provided with a second receiving hole 63. Specifically, the second main body 61 is provided with a second receiving hole 63. The second receiving hole 63 extends along the axial direction of the cavity 10 and has an opening, and the opening is located on the fourth end surface 612 of the second main body 61. The second receiving hole 63 is used to accommodate the second lamp group 64. The second lamp group 64 is accommodated in the second receiving hole 63 by means including but not limited to welding or gluing. In other words, the second main body 61 is embedded with the second lamp group 64, and the second lamp group 64 is exposed to the outside of the second lamp holder 60 from the fourth end surface 612 of the second main body 61. The second lamp holder 60 is embedded with the second lamp group 64, and the second lamp group 64 is exposed to the outside of the second lamp holder 60 from the surface of the second lamp holder 60 facing the cavity 10. The second lamp group 64 is used to emit heat-generating light.

[0147] Exemplarily, the number of the second receiving holes 63 is two, and correspondingly, the number of the second lamp groups 64 is two, and the two second lamp groups 64 are respectively received in the two second receiving holes 63. In the radial direction of the cavity 10, the two second receiving holes 63 are arranged at intervals. In the radial direction of the cavity 10, the two second lamp groups 64 are arranged at intervals. In some other embodiments, the number of the second receiving holes 63 and the second lamp groups 64 may also be one, three or more, which is not specifically limited in the present application.

[0148] In some embodiments, the second lamp holder 60 is provided with a through hole 65. Specifically, the second mating portion 62 is provided with a through hole 65. The through hole 65 extends along the axial direction of the cavity 10 and has two openings, one opening is located at the third mating surface 621, and the other opening is located at the fourth mating surface 622. Exemplarily, the number of the through holes 65 is two, and the two through holes 65 are arranged at intervals around the second main body 61. In some other embodiments, the number of the through holes 65 may also be one, three or more, which is not specifically limited in the present application.

[0149] In some embodiments, in the axial direction of the cavity 10, the second lamp holder 60 is located on the side of the second surface 12 of the cavity 10 facing away from the first surface 11, the fourth end surface 612 of the second main body 61 and the fourth mating surface 622 of the second mating portion 62 are opposite to and in contact with the second surface 12 of the cavity 10, and the third end surface 611 of the second main body 61 and the third mating surface 621 of the second mating portion 62 face away from the second surface 12 of the cavity 10. In the axial direction of the cavity 10, the projections of the two through holes 65 of the second mating portion 62 overlap with the projections of the two mating holes 19b of the cavity 10. The second lamp holder 60 is fixedly connected to the cavity 10 by a fastener 70. Specifically, the number of the fasteners 70 is two, and the two fasteners 70 pass through the two through holes 65 of the second lamp holder 60 respectively and are fixedly installed in the two mating holes 19b of the cavity 10 respectively by means including but not limited to threaded connection, adhesive connection, and interference fit. The second lamp holder 60 is fixedly stacked on the second surface 12 of the cavity 10 through the cooperation of the two fasteners 70, the two through holes 65 and the two matching holes 19b. The second lamp holder 60 is fixedly connected to the second surface 12 of the cavity 10.

[0150] It can be understood that the multiple second lamp groups 64 of the second lamp holder 60 can emit heat light, and the light emitted by the multiple second lamp groups 64 can be emitted from the openings of the multiple second receiving holes 63 respectively, and irradiated to the wafer mounted on the receiving platform 15 through the cavity wall of the receiving cavity 14 to heat the wafer, so that the processing gas flowing in the receiving cavity 14 forms an epitaxial layer on the surface of the wafer. In this way, on the basis of heating the wafer by the lamp holder 30, the wafer can be further heated by the second lamp holder 60, which is convenient for improving the heating efficiency and is conducive to saving processing time. In addition, the temperature of the wafer can also be adjusted by controlling the luminous efficiency of the second lamp holder 60 to control the crystal orientation and growth rate of the epitaxial layer formed on the surface of the wafer, so as to form a target epitaxial layer on the surface of the wafer.

[0151] Please refer again Figure 1 , Fig.11 and Fig.12The processing device 100 provided in the present application can be applied to a semiconductor device 1000, and the processing device 100 can be accommodated in a housing 200 of the semiconductor device 1000. In the processing device 100 provided in the present application, the cavity 10 is used to accommodate a wafer, and the lamp head 30 can emit a heat-generating light to heat the wafer. The operator can adjust the temperature of the wafer by controlling the luminous efficiency of the lamp head 30, so as to form an epitaxial layer on the surface of the wafer. Among them, the connector 40 can rotate relative to the cavity 10 and drive the lamp head 30 to move relative to the cavity 10, each connector 41 can move relative to the connecting shaft 20, and each connecting shaft 20 can enter the matching groove 4115 and abut against the inner wall of the matching groove 4115. When each connecting shaft 20 abuts against the inner wall of the matching groove 4115, in the absence of external force, the connecting body 40 and the cavity 10 are relatively fixed in the axial direction of the cavity 10 through the matching of the connecting shaft 20 and the matching groove 4115, that is, the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10, and the lamp holder 30 abutting against the connecting body 40 and the cavity 10 cannot move relative to each other in the axial direction of the cavity 10. That is, through the matching of the connecting shaft 20 and the matching groove 4115, the cavity 10 and the lamp holder 30 cannot move relative to each other in the axial direction of the cavity 10, and the cavity 10 is assembled together with the lamp holder 30 through the connecting body 40.

[0152] Compared with the existing solution of assembling the cavity 10 and the lamp holder 30 by buckling, this solution is not easy to deform, which is beneficial to improving the installation accuracy after the lamp holder 30 and the cavity 10 are assembled, and is beneficial to improving the stability and reliability of the lamp holder 30 and the cavity 10 after being assembled, thereby improving the structural stability of the processing device 100; on the other hand, the operator only needs to rotate the connecting body 40 relative to the cavity 10 to realize the assembly of the lamp holder 30 and the cavity 10, which is not only simple to operate and easy to assemble, but also ensures that the processing device 100 accommodated in the shell 200 of the semiconductor device 1000 can be assembled on one side, avoiding the assembly of the cavity 10 and the lamp holder 30 around the processing device 100, thereby avoiding reserving installation operation space in the shell 200 for the assembly of the lamp holder 30 and the cavity 10, which is beneficial to the miniaturized design of the shell 200, thereby facilitating the miniaturized design of the semiconductor device 1000.

[0153] The above are only some embodiments and implementation methods of the present application, and the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by any person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A processing device, characterized in that: The processing device comprises: A cavity, wherein a plurality of connecting shafts are arranged on a peripheral wall of the cavity, and the plurality of connecting shafts are arranged at intervals along the circumference of the cavity and extend along the radial direction of the cavity; a lamp cap, located at one side of the cavity in the axial direction of the cavity; and A connecting body, the connecting body abuts against the lamp holder, the connecting body comprising a plurality of connecting pieces, the plurality of connecting pieces are located outside the cavity and are arranged at intervals along the circumference of the cavity, each of the connecting pieces is provided with a matching groove, and the matching groove passes through the connecting piece; Among them, the connecting body can rotate relative to the cavity and drive the lamp head to move relative to the cavity, each of the connecting parts can move relative to the connecting shaft, and each of the connecting shafts can enter the matching groove and abut against the inner wall of the matching groove.

2. The processing device according to claim 1, characterized in that: The matching groove includes an open groove and a clamping groove, the open groove and the clamping groove are sequentially connected along the circumference of the cavity, and the open groove extends along the circumference of the cavity and penetrates the connecting piece; Each of the connecting shafts can enter the snap-fitting groove from the opening groove and abut against the inner wall of the snap-fitting groove; wherein, when the connecting shaft is located in the opening groove, the lamp head and the cavity have a spacing in the axial direction of the cavity, and in the process of each connecting shaft moving from the opening groove toward the snap-fitting groove, the connecting body drives the lamp head to move toward the cavity.

3. The processing device according to claim 2, characterized in that: When the connecting shaft is located in the clamping groove, the lamp holder abuts against the cavity.

4. The processing device according to claim 2, characterized in that: The inner wall of the snap-fit ​​groove includes a snap-fit ​​surface, which is perpendicular to the axial direction of the cavity. The inner wall of the open groove includes a guide surface, which is connected to the snap-fit ​​surface. The guide surface is inclined relative to the snap-fit ​​surface, so that the diameter of the matching groove tends to decrease from the open groove to the snap-fit ​​groove; wherein, when the connecting shaft is located in the open groove, the connecting shaft abuts against the guide surface, and when the connecting shaft is located in the snap-fit ​​groove, the connecting shaft abuts against the snap-fit ​​surface.

5. The processing device according to claim 4, characterized in that: The included angle between the guiding surface and the engaging surface is greater than 0° and less than 60°.

6. The processing device according to any one of claims 1 to 5, characterized in that: The connecting shaft includes a bearing, and the bearing is located outside the cavity. The connecting body can rotate relative to the cavity. The bearing of each connecting shaft can enter the matching groove and abut against the inner wall of the matching groove.

7. The processing device according to any one of claims 1 to 6, characterized in that: The connecting body includes a connecting ring, and the multiple connecting parts are fixedly connected to the connecting ring and arranged at intervals along the circumference of the connecting ring. In the axial direction of the cavity, the connecting ring is located on the side of the lamp holder facing away from the cavity and is mounted on the outside of the lamp holder.

8. The processing device according to claim 7, characterized in that: The connecting member includes a first connecting portion and a second connecting portion, the first connecting portion includes a first wall surface and a second wall surface, in the radial direction of the cavity, the first wall surface faces the cavity, and the second wall surface faces away from the cavity, the first connecting portion is provided with the matching groove, and the matching groove extends from the first wall surface along the radial direction of the cavity to the second wall surface, the second connecting portion is fixedly connected to the first wall surface, the connecting ring is located on the side of the second connecting portion facing away from the first wall surface, and is fixedly connected to the second connecting portion, and in the axial direction of the cavity, the second connecting portion is located on the side of the lamp holder facing away from the cavity, and abuts against the lamp holder.

9. The processing device according to claim 8, characterized in that: A lubricating member is provided on the surface of the second connecting portion facing the cavity, and the lamp holder is mounted on the lubricating member.

10. The processing device according to claim 9, characterized in that: The lamp holder includes a main body and a matching part, wherein the matching part is arranged around the main body. In the axial direction of the cavity, the connecting ring is located on the side of the matching part facing away from the cavity and is sleeved on the outside of the main body, and the matching part abuts against the surface of the lubricating part facing away from the second connecting part.

11. The processing device according to any one of claims 2 to 5, characterized in that: The connecting piece is provided with an assembly hole, the assembly hole passes through the connecting piece, the cavity is provided with a fixing hole, the fixing hole extends along the radial direction of the cavity and has an opening, the opening of the fixing hole is located on the peripheral wall of the cavity, and the processing device further includes a locking shaft; When the connecting shaft is located in the clamping groove, in the radial direction of the cavity, the projection of the fixing hole overlaps with the projection of the assembly hole of one of the connecting members, and the locking shaft passes through the fixing hole and is installed in the assembly hole.

12. The processing device according to any one of claims 1 to 11, characterized in that: The cavity is provided with a guide shaft, which extends from the cavity toward the surface of the lamp holder and extends along the axial direction of the cavity. The lamp holder is provided with a limiting hole, which passes through the lamp holder along the axial direction of the cavity, and the guide shaft is installed in the limiting hole of the lamp holder.

13. The processing device according to any one of claims 1 to 12, characterized in that: The cavity comprises a receiving cavity, the lamp head is embedded with a lamp group, the lamp group is exposed outside the lamp head from the surface of the lamp head facing the cavity, and in the axial direction of the cavity, the projection of the lamp group is located in the receiving cavity.

14. The processing device according to any one of claims 1 to 13, characterized in that: The processing device also includes a second lamp holder, which is located on a side of the cavity facing away from the lamp holder and is fixedly connected to the cavity.

15. A semiconductor device, characterized in that: The semiconductor device comprises the processing device according to any one of claims 1 to 14 and a housing, wherein the processing device is accommodated in the housing.

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