An upper arm of a robotic arm, a wiring arrangement method and a robotic arm

Abstract

The present invention discloses an upper arm of a robotic arm, a wiring arrangement method and a robotic arm, including: a mounting housing having a shoulder joint axis and an elbow joint axis at both ends, and forming a power input area and a power output area respectively; a power input part and a power output part coaxially butted to the power input area and the power output area respectively; a shoulder joint spindle and an elbow joint spindle integrally formed with the mounting housing, coaxially arranged along the shoulder joint axis and the elbow joint axis respectively, the shoulder joint spindle having an axially penetrating mounting area inside, the shoulder joint spindle and the mounting first accommodation area, the elbow joint spindle and the mounting housing forming a second accommodation area; a power transmission member forming a continuous transmission path along the power input area, the mounting area, the first accommodation area and the second accommodation area, for transmitting the torque of the power input part to the power output part. By adopting the above scheme, the concentricity deviation of the upper arm of the robotic arm is further reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and particularly to an upper arm of a robot arm, a wiring arrangement method, and a robot arm. Background Art

[0002] In the field of semiconductor wafer manufacturing, as the core execution mechanism for wafer transfer, the motion accuracy and stability of a robot arm directly affect the process yield and equipment reliability. A typical robot arm usually adopts a multi-joint series structure, which consists of an upper arm, a forearm, and an end effector, and realizes the precise transfer of wafers in a vacuum chamber through the coordinated movement of the shoulder, elbow, and wrist axes. Among them, as the load-bearing component connecting the shoulder joint and the elbow joint, the upper arm needs to integrate drive cables, gas paths, and sensor signal channels inside to support the power transmission and real-time feedback of each joint.

[0003] With the continuous miniaturization of semiconductor process nodes, the requirement for wafer positioning accuracy has been improved to the sub-micron level. In the existing robot arm design, the spindle component and the bearing housing in the upper arm joint area mostly adopt a split assembly structure, for example, mechanical connection is achieved through bolt fixation or interference fit. However, in such a split design, during long-term high-frequency reciprocating motion, due to factors such as differences in the thermal expansion coefficients of materials and residual assembly stress, microscopic gaps are likely to appear at the mating interface, resulting in cumulative deviation of the concentricity between the spindle and the housing. More critically, the manufacturing tolerances of the split structure will be superimposed on the transmission chain of the shoulder joint and the elbow joint, causing the trajectory deviation of the end effector to exceed the process window requirements, which is particularly significant in the high-speed motion state.

[0004] Therefore, it is necessary to provide an upper arm of a robot arm, a wiring arrangement method, and a robot arm to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide an upper arm of a robot arm, a wiring arrangement method, and a robot arm to avoid the cumulative deviation of concentricity caused by the split design of the spindle part and the housing of the shoulder joint and the elbow joint on the basis of realizing power transmission.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows:

[0007] In a first aspect, an upper arm of a robot arm includes:

[0008] A mounting housing, having a shoulder joint axis and an elbow joint axis at both ends respectively, and forming a power input area and a power output area around the shoulder joint axis and the elbow joint axis respectively;

[0009] A power input part and a power output part, coaxially docked to the power input area and the power output area respectively;

[0010] The shoulder joint spindle and the elbow joint spindle integrally formed with the installation housing are coaxially arranged along the shoulder joint axis and the elbow joint axis respectively. The interior of the shoulder joint spindle has an axially penetrating installation area. An annular gap-shaped first accommodation area is formed between the outer peripheral surface of the shoulder joint spindle and the inner wall of the installation housing. An annular gap-shaped second accommodation area is formed between the outer peripheral surface of the elbow joint spindle and the inner wall of the installation housing.

[0011] The power transmission member forms a continuous transmission path along the power input area, the installation area, the first accommodation area, and the second accommodation area, and is used to transmit the torque of the power input part to the power output part.

[0012] The beneficial effects of the upper arm of the robot provided by the present invention are as follows: By integrally forming the shoulder joint spindle and the elbow joint spindle with the installation housing, the microscopic gaps at the mating interfaces caused by factors such as differences in the coefficient of thermal expansion of materials and residual assembly stresses in the traditional split design are effectively avoided, thus significantly reducing the cumulative deviation of the concentricity between the spindle and the housing, and improving the motion accuracy and stability of the upper arm of the robot. The power transmission member is located inside the installation housing and can transmit the power of the power input part through the power input area, the installation area, the first accommodation area, and the second accommodation area to the power output area in sequence, ensuring that the power can still be effectively transmitted after the spindle and the housing are integrally formed. At the same time, the power transmission path is made more direct, improving the efficiency of power transmission.

[0013] Further, the power input area and the power output area are diagonally distributed along the height direction of the installation housing. The shoulder joint spindle is a cantilever extension structure, including a first root and a first extension part. The first root is integrally formed on the installation housing, and the first extension part coaxially penetrates the first accommodation area along the shoulder joint axis from the first root. The elbow joint spindle is an inverted cantilever structure, including a second root and a second extension part. The second root is integrally formed on the installation housing, and the second extension part coaxially penetrates the second accommodation area along the elbow joint axis from the first root.

[0014] Further, the power transmission member includes a first pulley coaxially arranged in the first accommodation area, a transmission belt wound around the inner wall of the installation housing, and a second pulley coaxially arranged in the second accommodation area. The first pulley and the second pulley are respectively rotatably sleeved on the shoulder joint spindle and the elbow joint spindle, and the transmission belt is wound between the first pulley and the second pulley to form a closed-loop power transmission path.

[0015] Furthermore, the power transmission component also includes an arm spindle and a torque transmission component. The arm spindle is located in the installation area and is fixedly connected to the output end of the power input part. The torque transmission component is used to transmit the power of the arm spindle to the shoulder joint spindle.

[0016] Furthermore, the mounting shell is provided with a transition zone between the shoulder joint axis and the elbow joint axis, and the transition zone is respectively connected to the first accommodating zone and the second accommodating zone.

[0017] Furthermore, a radial notch is provided at one end of the shoulder joint spindle away from the power input portion, and the notch is used to connect the installation area and the transition area.

[0018] Furthermore, a wire groove area is provided on the side of the elbow joint spindle away from the power output area, and the mounting shell is also provided with a sinking area, which is located between the wire groove area and the transition area, connecting the transition area and the wire groove area.

[0019] Furthermore, a pipeline support is installed in the transition area, and two ends of the pipeline support are respectively located at the notch and the sinking area.

[0020] Furthermore, a pulley base is fixedly connected to the bottom of the first pulley, the pulley base is fixedly arranged relative to the power input part, and a base is fixedly connected to the bottom of the pulley base.

[0021] Furthermore, the power output part includes a power output seat, a flange and a bearing, the second pulley is fixedly connected to the flange, the flange is fixedly connected to the power output seat, the flange is rotatably connected to the mounting shell through the bearing, and the surfaces of the flange and the power output seat facing each other are respectively provided with annular grooves for fastening the inner ring of the bearing.

[0022] In a second aspect, a robotic arm includes the above-mentioned robotic upper arm, and further includes: a forearm pivoted on the elbow joint axis, and an end effector pivotally connected to the forearm.

[0023] In a third aspect, a method for arranging circuits on an upper arm of a robot comprises the following steps:

[0024] The power input area and the power output area have hollow channels, and pipelines are provided, and pipelines including power supply cables and / or pneumatic pipelines are passed through the hollow channels of the power input area;

[0025] A notch is provided at one end of the shoulder joint spindle away from the power input area, and the pipeline is led out from the hollow channel to the notch;

[0026] A pipeline bracket is provided, a wire groove area is provided on the side of the elbow joint spindle away from the power output area, and a sinking area is provided on the mounting shell, and the sinking area is located between the wire groove area and the transition area, and the pipeline is led out from the notch and passes through the pipeline bracket into the sinking area;

[0027] It is led out from the sinking area through the hollow channels of the wire trough area and the power output area in sequence.

[0028] The beneficial effect of an upper arm circuit layout method provided by the present invention is that the circuit and pipeline channels formed by the circuit layout method avoid interference with the installation shell, extend the service life of the circuit and pipeline, and avoid wear during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the overall structure of an upper arm of a manipulator according to an embodiment of the present invention;

[0030] Figure 2 This is a structural cross-sectional view of an installation housing according to an embodiment of the present invention;

[0031] Figure 3 A cross-sectional view of an upper arm of a robot according to an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the overall structure of the housing installed in an embodiment of the present invention;

[0033] Figure 5 A bottom view of the housing installed in the embodiment of the present invention;

[0034] Figure 6 An axonometric view of an installation housing according to an embodiment of the present invention;

[0035] Figure 7 A top view of the housing installed in accordance with an embodiment of the present invention;

[0036] Figure 8 A side view of the upper arm of the manipulator according to an embodiment of the present invention;

[0037] Figure 9 The figure is a schematic diagram of the overall structure of a robotic arm according to an embodiment of the present invention.

[0038] Reference Numerals: 1, mounting housing; 11, shoulder joint axis; 12, elbow joint axis; 13, power input area; 14, power output area; 15, mounting area; 16, first accommodation area; 17, second accommodation area; 18, transition area; 181, pipeline support; 182, window; 19, sunken area; 191, wire groove area; 192, upper cover plate; 193, lower cover plate; 2, power input part; 21, pulley base; 3, power output part; 31, power output seat; 32, flange; 4, shoulder joint spindle; 41, notch; 5, elbow joint spindle; 51, wire protection sleeve; 6, power transmission member; 61, first pulley; 62, second pulley; 63, transmission belt; 64, arm spindle; 65, torque transmission member; 7, base body; 8, forearm; 9, end effector. Detailed Description of the Embodiment

[0039] In order to make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art to which the present invention pertains. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0040] The following combines with the attached Figure 1 -attached Figure 9 drawings to make a further detailed description of the specific embodiments of the present invention.

[0041] Referring to Figures 1-3 , in a first aspect, an upper arm of a robot arm includes a mounting housing 1, a power input part 2, a power output part 3, and a power transmission member 6.

[0042] Referring to Figure 2, in some embodiments, the mounting housing 1 has a shoulder joint axis 11 and an elbow joint axis 12 located at the left and right ends and parallel to each other. There are a power input area 13 and a power output area 14 around the shoulder joint axis 11 and the elbow joint axis 12 respectively. A power input part 2 and a power output part 3 are respectively installed in the power input area 13 and the power output area 14. The power input part 2 and the power output part 3 are respectively used for the input and output of kinetic energy. In some specific embodiments, the first direction and the second direction are perpendicular to each other. The power input area 13 is located at the bottom end on the left side of the mounting housing 1 and is opened along the first direction. The power output area 14 is located at the top end on the right side of the mounting housing 1 and is opened along the first direction. In some specific embodiments, partial areas on the upper side and the lower side of the mounting housing 1 are opened. The mounting housing 1 further includes an upper cover plate 192 and a lower cover plate 193, and the upper cover plate 192 and the lower cover plate 193 are used to close the opened part of the mounting housing 1. A transition area 18 is provided between the shoulder joint axis 11 and the elbow joint axis 12 of the mounting housing 1.

[0043] In some embodiments, the shoulder joint spindle 4 and the elbow joint spindle 5 are respectively located on the shoulder joint axis 11 and the elbow joint axis 12, and form an integral structure with the mounting housing 1. Specifically, the integral molding of the shoulder joint spindle 4 and the elbow joint spindle 5 with the mounting housing 1 effectively avoids the microscopic gaps at the mating interfaces caused by factors such as differences in the thermal expansion coefficients of materials and residual assembly stresses in the traditional split design. In this way, the cumulative deviation of the concentricity between the spindle and the housing can be significantly reduced, thereby improving the motion accuracy and stability of the upper arm of the robot. It ensures that during long-term high-frequency reciprocating motion, the robotic arm can maintain high positioning accuracy and reliability, meeting the requirements for high-precision transfer in the semiconductor wafer manufacturing field.

[0044] Referring to Figure 3 and Figure 4, in some embodiments, the shoulder joint spindle 4 has an installation area 15 inside for installing a power transmission component to achieve power transmission. An annular clearance-shaped first accommodation area 16 is formed between the outer peripheral surface of the shoulder joint spindle 4 and the inner wall of the installation housing 1, and an annular clearance-shaped second accommodation area 17 is formed between the outer peripheral surface of the elbow joint spindle 5 and the inner wall of the installation housing 1; the power input area 13 and the power output area 14 are diagonally distributed along the height direction of the installation housing 1. The shoulder joint spindle 4 is a cantilever extension structure, including a first root and a first extension part. The first root is integrally formed on the installation housing 1, and the first extension part coaxially penetrates the first accommodation area 16 from the first root along the shoulder joint axis 11. The elbow joint spindle 5 is an inverted cantilever structure, including a second root and a second extension part. The second root is integrally formed on the installation housing 1, and the second extension part coaxially penetrates the second accommodation area 17 from the first root along the elbow joint axis 12. The first accommodation area 16 and the second accommodation area 17 are used to leave installation space. In addition, a transition area 18 is provided on the installation housing 1 between the shoulder joint axis 11 and the elbow joint axis 12. The transition area 18 is respectively communicated with the first accommodation area 16 and the second accommodation area 17, so that the power transmission part 6 can smoothly transmit the power of the power input part 2 through the power input area 13, the installation area 15, the first accommodation area 16, and the second accommodation area 17 to the power output area 14 in the installation housing 1, thereby realizing efficient and stable power transmission and ensuring the power transmission and action execution stability of the robotic arm during operation.

[0045] Referring to Figures 4-8 , in some specific embodiments, the shoulder joint spindle 4 extends from the inner bottom wall of the installation housing 1 along the second direction towards the power input area 13, and the elbow joint spindle 5 extends from the inner bottom wall of the installation housing 1 along the second direction towards the power output area 14. Specifically, the left top of the installation housing 1 protrudes downward along the second direction to form a cylindrical shoulder joint spindle 4. The right bottom of the installation housing 1 protrudes upward along the second direction to form a cylindrical elbow joint spindle 5.

[0046] In some specific embodiments, the shoulder joint spindle 4 extends from the inner bottom wall of the installation housing 1 along the second direction towards the power input area 13, and the elbow joint spindle 5 extends from the inner bottom wall of the installation housing 1 along the second direction towards the power output area 14. Specifically, the left top of the installation housing 1 protrudes downward along the second direction to form a cylindrical shoulder joint spindle 4. This design makes the shoulder joint spindle 4 and the installation housing 1 form an integral structure, increasing the concentricity. Similarly, the right bottom of the installation housing 1 protrudes upward along the second direction to form a cylindrical elbow joint spindle 5. The above layout not only optimizes the space utilization, avoids the redundant space setting of the split installation, but also reduces the tolerance, improves the concentricity of the spindle and the housing, and further improves the transmission accuracy of the arm, meeting the requirements of high-precision transmission in the semiconductor wafer manufacturing field.

[0047] In some embodiments, the power transmission member 6 is located within the mounting housing 1. The power transmission member 6 includes an arm spindle 64 and a torque transmission member 65. The arm spindle 64 is located in the mounting area 15 and is fixedly connected to the output end of the power input portion 2. The torque transmission member 65 is used to transmit the power of the arm spindle 64 to the shoulder joint spindle 4. The arm spindle 64 is hollow inside along the axial direction, and the hollow part is used for the pipelines for power supply and air supply to pass through. This design not only realizes the effective transmission of power, but also cleverly utilizes the space, integrates the pipelines for power supply and air supply inside the arm spindle 64, avoids the interference of external pipelines, and improves the neatness of the robotic arm.

[0048] Referring to Figure 3 , in some specific embodiments, the torque transmission member 65 adopts a keyless bushing. The keyless bushing is located between the shoulder joint spindle 4 and the arm spindle 64, and it includes an outer sleeve and an inner sleeve. The outer sleeve of the keyless bushing is closely fitted with the inner wall of the shoulder joint spindle 4, while the inner sleeve is closely fitted with the arm spindle 64. The way of close fitting can be achieved by controlling tolerances, using thermal expansion and contraction, etc., which is not limited here. During the assembly process, the keyless bushing uses bolts or other fastening devices to fasten the outer sleeve and the inner sleeve together for transmitting torque and rotational force.

[0049] Referring to Figure 3 , in some embodiments, the power transmission member 6 further includes a first pulley 61, a transmission belt 63 and a second pulley 62. The first pulley 61 is located in the first receiving area 16 and is rotatably sleeved on the shoulder joint spindle 4. The second pulley 62 is located in the second receiving area 17 and is rotatably sleeved on the elbow joint spindle 5. The transmission belt 63 is drivingly connected between the first pulley 61 and the second pulley 62. Among them, a window 182 is opened between the second receiving area 17 and the transition area 18 to make them communicate with each other. The opened window 182 can allow the transmission belt 63 to pass through. The design of the window 182 not only ensures the smoothness of power transmission, but also optimizes the space layout, enabling the transmission belt 63 to efficiently complete the power transmission task within a limited space.

[0050] In some specific embodiments, the power input portion 2 includes a power input shaft. The power input shaft is fixedly connected to the arm shaft. A bearing is provided between the power input shaft and the mounting housing 1. A pulley base 21 is also fixedly connected to the bottom of the first pulley 61. The pulley base 21 is fixed relative to the power source of the power input portion 2. A base body 7 is fixedly connected to the bottom of the pulley base 21. A bearing is also provided between the pulley and the mounting housing 1.

[0051] In some specific embodiments, the power output part 3 includes a power output seat 31, a flange 32 and a bearing, the second pulley 62 is fixedly connected to the flange 32, the flange 32 is fixedly connected to the power output seat 31, and the flange 32 is rotatably connected to the mounting housing 1 through a bearing. The surfaces of the flange 32 and the power output seat 31 facing each other are respectively provided with an annular groove for fastening the inner ring of the bearing.

[0052] Reference Figures 2-4 , the specific working principle: when working, the power input part 2 drives the arm spindle 64 to rotate, and the arm spindle 64 transmits the power to the shoulder joint spindle 4 through the torque transmission part 65: the shoulder joint spindle 4 drives the installation shell 1 to rotate in the horizontal direction with the shoulder joint spindle 4 as the axis. The shell serves as the bearing body, and its rotation will inevitably synchronously drive the second pulley 62 thereon to produce circumferential displacement. The first pulley 61 is fixed to the base 7 through the pulley base 21 to form a stationary reference system. The second pulley 62 rotates with the shell to form a dynamic reference system. The rotation of the shell causes the second pulley 62 to produce circumferential displacement relative to the first pulley 61. When the shell rotates, the center of the second pulley 62 revolves around the shoulder axis, while the first pulley 61 remains stationary, and a dynamic phase difference is formed between the two pulleys. The synchronous belt is tensioned between the two pulleys by the preload force to form a closed-loop transmission path: when the second pulley 62 produces circumferential displacement with the rotation of the shell, the meshing contact point of the synchronous belt 63 migrates, and the fixed position of the first pulley 61 causes the synchronous belt 63 Being stretched on the inlet side, the displacement of the second pulley 62 causes the synchronous belt 63 to be compressed on the outlet side: the elastic deformation of the synchronous belt converts the circumferential displacement into the misalignment of the meshing tooth surface, forcing the second pulley 62 to produce adaptive rotation around its own axis to maintain the tension balance of the synchronous belt. The adaptive rotation of the second pulley 62 drives the power output seat of the elbow through the flange 32, driving the forearm to rotate around the axis of the elbow.

[0053] In some embodiments, a notch 41 is formed at one end of the shoulder joint spindle 4 away from the power input portion 2 , and the notch 41 is used to connect the installation area 15 and the transition area 18 .

[0054] In some embodiments, a wire trough area 191 is provided on the side of the elbow joint spindle 5 away from the power output area 14, which is used to accommodate and fix the pipelines for power supply, air supply or signal transmission, ensuring that the pipelines remain stable and are not interfered with by the outside world during the movement of the robotic arm. The mounting shell 1 also has a sinking area 19, and the cross-section of the sinking area 19 is L-shaped. The sinking area 19 is located between the wire trough area 191 and the transition area 18. The sinking area 19 can not only allow pipelines for power supply, air supply or signal transmission to pass through, but also provide a pipeline accommodating space to prevent excessively long pipelines from interfering with the rotation of the arm. The sinking area 19 is respectively interconnected with the transition area 18 and the wire trough area 191 to form a smooth pipeline flow path.

[0055] In some embodiments, a pipeline support 181 is installed in the transition region 18. Both ends of the pipeline support 181 are located in the notch 41 and the sinking region 19 respectively. The pipeline support 181 provides stable support for the pipeline. A wire protection sleeve 51 is coaxially arranged inside the elbow joint spindle 5 to further protect the internal pipeline from mechanical wear or the influence of the external environment, thereby extending the service life of the pipeline and improving the overall reliability of the robotic arm.

[0056] In a second aspect, referring to Figure 9 , a robotic arm includes the above-mentioned robotic arm upper arm, and further includes a forearm 8 pivoted on the elbow joint axis 12, and an end effector 9 pivotally connected to the forearm 8. The base 7 serves as the support and fixing part of the robotic arm, providing a stable installation foundation for the entire robotic arm. The forearm 8 is pivotally connected to the robotic arm upper arm through the elbow joint axis 12. The end effector 9 is pivotally connected to the forearm 8 and can perform grasping, operation or other specific actions according to different application scenarios and task requirements. This structural design enables the robotic arm to achieve high-precision and high-efficiency material transfer and operation tasks in fields such as semiconductor wafer manufacturing.

[0057] In a third aspect, a method for arranging pipelines on a robotic arm upper arm includes the following steps:

[0058] Provide pipelines, which include power supply cables and pneumatic pipelines, for transmitting electricity and gas to provide necessary power sources for various components of the robotic arm.

[0059] Hollow channels are formed inside the power input region 13 and the power output region 14, and the pipeline is led out from the hollow part of the power input region 13 to the notch 41 of the power input spindle. In this way, the pipeline can smoothly enter the power input spindle from the power input region 13 to ensure stable power transmission.

[0060] After the pipeline is led out from the notch 41, it passes through the pipeline support 181 and enters the sinking region 19. The pipeline support 181 provides stable support and guidance for the pipeline, ensuring the neat arrangement and safe transmission of the pipeline inside the robotic arm.

[0061] After the sinking region 19, it successively passes through the wire groove region 191 and the hollow part of the power output region 14 and then is led out. The wire groove region 191 provides a dedicated channel for the pipeline, avoiding interference between the pipeline and other components of the robotic arm, and ensuring the smooth transmission of the pipeline and the overall stability of the robotic arm.

[0062] The formed circuit and pipeline channels avoid interference with the installation housing 1, extend the service life of the circuit and pipeline, and prevent wear during use.

[0063] Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are all within the scope and spirit of the present invention. Moreover, the present invention described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. An upper arm of a manipulator, characterized in that, Comprising: An installation housing (1) having a shoulder joint axis (11) and an elbow joint axis (12) at both ends respectively, and a power input area (13) and a power output area (14) are formed around the shoulder joint axis (11) and the elbow joint axis (12) respectively; A power input part (2) and a power output part (3) are coaxially butted to the power input area (13) and the power output area (14) respectively; A shoulder joint spindle (4) and an elbow joint spindle (5) integrally formed with the installation housing (1) are coaxially arranged along the shoulder joint axis (11) and the elbow joint axis (12) respectively. An axially penetrating installation area (15) is provided inside the shoulder joint spindle (4). An annular gap-shaped first accommodation area (16) is formed between the outer peripheral surface of the shoulder joint spindle (4) and the inner wall of the installation housing (1). An annular gap-shaped second accommodation area (17) is formed between the outer peripheral surface of the elbow joint spindle (5) and the inner wall of the installation housing (1); A power transmission member (6) forms a continuous transmission path along the power input area (13), the installation area (15), the first accommodation area (16) and the second accommodation area (17) for transmitting the torque of the power input part (2) to the power output part (3); The power transmission member (6) includes a first pulley (61) coaxially arranged in the first accommodation area (16), a transmission belt (63) surrounding the inner wall of the installation housing (1), and a second pulley (62) coaxially arranged in the second accommodation area (17). The first pulley (61) and the second pulley (62) are respectively rotatably sleeved on the shoulder joint spindle (4) and the elbow joint spindle (5); The power transmission member (6) further includes an arm spindle (64) which is located in the installation area (15) and fixedly connected to the output end of the power input part (2); A pulley base (21) is fixedly connected to the bottom of the first pulley (61), and the pulley base (21) is fixedly arranged relative to the power input part (2).

2. The upper arm of a robot arm according to claim 1, characterized in that, The power input area (13) and the power output area (14) are diagonally distributed along the height direction of the installation housing (1). The shoulder joint spindle (4) is a cantilever extension structure, including a first root and a first extension part. The first root is integrally formed on the installation housing (1), and the first extension part coaxially penetrates the first accommodation area (16) along the shoulder joint axis (11) from the first root. The elbow joint spindle (5) is an inverted cantilever structure, including a second root and a second extension part. The second root is integrally formed on the installation housing (1), and the second extension part coaxially penetrates the second accommodation area (17) along the elbow joint axis (12) from the first root.

3. A mechanical arm upper arm according to claim 1, characterized in that, The transmission belt (63) is wound between the first pulley (61) and the second pulley (62) to form a closed-loop power transmission path.

4. A robotic upper arm according to claim 1, characterized in that, The power transmission component (6) further comprises a torque transmission component (65), wherein the torque transmission component (65) is used to transmit the power of the arm spindle (64) to the shoulder joint spindle (4).

5. A manipulator upper arm according to claim 1, characterized in that, The mounting housing (1) is provided with a transition area (18) between the shoulder joint axis (11) and the elbow joint axis (12), and the transition area (18) is respectively connected to the first accommodating area (16) and the second accommodating area (17).

6. The upper arm of a robot arm according to claim 5, characterized in that, A radial notch (41) is provided at one end of the shoulder joint spindle (4) away from the power input portion (2), and the notch (41) is used to connect the installation area (15) and the transition area (18).

7. The upper arm of a robot arm according to claim 6, characterized in that, A wire groove area (191) is provided on a side of the elbow joint spindle (5) facing away from the power output area (14), and the mounting housing (1) further has a sinking area (19), the sinking area (19) being located between the wire groove area (191) and the transition area (18), connecting the transition area (18) and the wire groove area (191).

8. The upper arm of a robot arm according to claim 7, characterized in that, A pipeline support (181) is installed in the transition zone (18), and two ends of the pipeline support (181) are respectively located at the notch (41) and the sinking zone (19).

9. The upper arm of a robot arm according to claim 3, characterized in that, The bottom of the pulley base (21) is fixedly connected to a base body (7).

10. The upper arm of a robot arm according to claim 3, characterized in that, The power output part (3) comprises a power output seat (31), a flange (32) and a bearing, the second pulley (62) is fixedly connected to the flange (32), the flange (32) is fixedly connected to the power output seat (31), the flange (32) is rotatably connected to the mounting housing (1) via the bearing, and the surfaces of the flange (32) and the power output seat (31) facing each other are respectively provided with an annular groove for fastening the inner ring of the bearing.

11. A robotic arm, comprising a robotic upper arm as described in any one of claims 1-10, characterized in that, Also includes: A forearm (8) pivoted on the elbow joint axis (12), and an end effector (9) pivotally connected to the forearm (8).

12. A method for arranging the wiring of the upper arm of a manipulator, which is used for wiring the upper arm of a manipulator as described in any one of claims 1-10, characterized in that, The following steps are involved: The power input area (13) and the power output area (14) have hollow channels, and pipelines are provided, and pipelines including power supply cables and / or pneumatic pipelines are passed through the hollow pipelines of the power input area (13); A notch (41) is formed at one end of the shoulder joint spindle (4) away from the power input area (13), and the pipeline is led out from the hollow channel to the notch (41); A pipeline support (181) is provided, a wire groove area (191) is provided on a side of the elbow joint spindle (5) away from the power output area (14), the installation housing (1) is further provided with a sinking area (19), the installation housing (1) is provided with a transition area (18) between the shoulder joint axis (11) and the elbow joint axis (12), the sinking area (19) is located between the wire groove area (191) and the transition area (18), and the pipeline is led out from the notch (41) and enters the sinking area (19) through the pipeline support (181); It is led out after passing through the hollow channel of the wire trough area (191) and the power output area (14) in sequence after the self-sinking area (19).

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