Article conveying device, trolley, and method for connecting trolley and traction device

Abstract

An article transport device includes a trolley, a traction device, and a connection portion. The trolley transports an article used in a substrate work machine that performs a predetermined substrate work on a substrate. The traction device pulls the trolley. The connection part electrically connects the trolley and the traction device along with positioning and connection between the trolley and the traction device.

Description

Technical Field

[0001] This specification discloses a technology related to an article transport device, a trolley, and a method for connecting the trolley and a traction device. Background Art

[0002] The transport vehicle described in Patent Document 1 includes a first transfer device and a travel device. The transport vehicle moves to a target station by means of the travel device, and delivers articles or storage boxes to the target station by means of the first transfer device. In addition, the transport vehicle can also receive articles or storage boxes from the target station by means of the first transfer device.

[0003] The lifting mechanism described in Patent Document 2 can include one or more couplers that provide electrical, optical or mechanical connection between the robot and the tool. In addition, the lifting mechanism enables the robot to communicate with the tool and supply power to the tool, thereby connecting with the tool.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: International Publication No. 2021 / 144866

[0007] Patent Document 2: Japanese Patent Application Publication No. 2018-513817 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, there is no description of a specific connection form between the first transfer device and the travel device in Patent Document 1. In addition, Patent Document 2 does not explicitly describe the linkage of positioning, connection, and electrical connection between the robot and the tool.

[0010] In view of such circumstances, the present specification discloses an article transport device, a trolley, and a method for connecting the trolley and the traction device, which enable linkage of positioning, connection, and electrical connection between the trolley and the traction device.

[0011] Means for solving problems

[0012] The present specification discloses an article transporting device having a trolley, a traction device, and a connecting portion. The trolley transports articles used in a substrate operation machine that performs a predetermined substrate operation on a substrate. The traction device pulls the trolley. The connecting portion electrically connects the trolley and the traction device as the trolley and the traction device are positioned and connected.

[0013] In addition, the present specification discloses a trolley having a handover mechanism, a connection mechanism, and a connection portion. The handover mechanism is used to handover items used in a substrate operation machine that performs a predetermined substrate operation on a substrate. The connection mechanism can be mechanically connected to a traction device. The connection portion can be electrically connected to the traction device and is electrically connected to the traction device as it is positioned and connected to the traction device.

[0014] Furthermore, the present specification discloses a method for connecting a trolley and a traction device, wherein the trolley carries articles used in a substrate operation machine that performs predetermined substrate operations on a substrate, and the traction device is capable of pulling the trolley and automatically moving along a travel path. The method for connecting the trolley and the traction device includes a first positioning step and a connection step. In the first positioning step, the trolley is positioned in a first stage. In the connection step, after the first positioning step is performed, a moving mechanism is operated to perform mechanical positioning and connection, and the trolley and the traction device are electrically connected as the trolley and the traction device are positioned and connected.

[0015] In addition, this specification discloses the technical idea of ​​changing the "article transport device described in the technical solution 2" to "the article transport device described in any one of the technical solutions 2 to 5" in the technical solution 6 described in the technical solution initially attached to the application (hereinafter referred to as the initial technical solution). In addition, this specification discloses the technical idea of ​​changing the "article transport device described in the technical solution 2" to "the article transport device described in any one of the technical solutions 2 to 7" in the technical solution 8 described in the initial technical solution.

[0016] Effects of the Invention

[0017] According to the above-mentioned article transport device, the trolley and the traction device can be electrically connected with the positioning and connection between the trolley and the traction device. The above-mentioned contents about the article transport device are also the same for the trolley and the connection method between the trolley and the traction device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a top view showing a structural example of a production facility.

[0019] Figure 2 It is a partial perspective view showing a structural example of a station and a carriage.

[0020] Figure 3 It means in Figure 2 A perspective view of a state in which a storage box capable of storing articles is mounted on a trolley.

[0021] Figure 4It is a partial perspective view showing a structural example of a connection mechanism.

[0022] Figure 5 This is a block diagram showing an example of a control module of the article transport device.

[0023] Figure 6 It is a top view showing an example of a positioned portion.

[0024] Fig. 7A Is magnification Figure 6 An enlarged view of the two positioned parts on the right side of the paper.

[0025] Figure 7B yes Figure 6 A cross-sectional view of the two positioned parts on the right side of the paper.

[0026] Figure 8 It is a top view showing an example of a positioning portion.

[0027] Fig. 9 Yes means Figure 8 A front view of an example of a positioning portion and a moving mechanism shown.

[0028] Fig.10 It is a plan view showing an example of a state before the protrusion is moved toward the hole.

[0029] Fig.11 It is a plan view showing an example of a state where a protrusion is fitted into a hole.

[0030] Fig.12 It is a plan view showing another example of the positioned portion.

[0031] Fig.13 It is a top view showing another example of the positioning portion.

[0032] Fig.14 It is a side view showing a structural example of a connection portion.

[0033] Fig.15 is a flowchart showing an example of the connection procedure. DETAILED DESCRIPTION

[0034] 1. Implementation Method

[0035] 1-1. Configuration example of production equipment 1

[0036] The article transport device 80, the trolley 60, and the method of connecting the trolley 60 and the traction device 70 can be applied to various production equipment 1 for producing substrate products. Figure 1As shown, the production equipment 1 of the embodiment includes at least one (four in this figure) component mounting machine 10, a replacement system 30, an article moving device 40, a station group 50, a trolley 60, a traction device 70, a production line control device LC0, a production management device WC0, and a conveying management device CC0. In the following description, the horizontal width direction of the component mounting machine 10 and the conveying direction of the substrate are set as the X direction. In addition, the horizontal depth direction of the component mounting machine 10 and the direction orthogonal to the X direction on the horizontal plane are set as the Y direction. Furthermore, the vertical direction orthogonal to the X direction and the Y direction is set as the Z direction.

[0037] At least one (four) component mounting machines 10 are arranged along the conveying direction (X direction) of the substrate. The component mounting machine 10 is included in a substrate mounting operation machine WM0 that performs predetermined substrate mounting operations on the substrate. The component mounting machine 10 carries in a substrate and positions it at a predetermined position, mounts a plurality of components on the positioned substrate, and carries out the substrate on which the components are mounted. That is, the substrate mounting operation of the component mounting machine 10 includes the carrying-in operation, positioning operation, and carrying-out operation of the substrate. In addition, the substrate mounting operation of the component mounting machine 10 includes the supplying operation, picking operation, and mounting operation of the components. It should be noted that the substrate mounting operation machine WM0 may be, but is not limited to, a printer that prints solder on a substrate, an inspection machine that inspects a substrate printed with solder and a substrate on which components are mounted, or a reflow furnace that heats a substrate on which components are mounted to combine the components with the substrate, etc., but is not limited to the component mounting machine 10.

[0038] For example, the component mounting machine 10 includes a component supply device for supplying components to be mounted on a substrate. A plurality of feeders 20 are provided in the component supply device in a detachable manner. The feeder 20 is included in the article AR0 used in the component supply operation performed by the component mounting machine 10. In addition, the component supply device includes at least one slot capable of equipping a plurality of feeders 20. The component supply device of the embodiment is provided at two positions, the first position and the second position.

[0039] The first position holds the equipped feeder 20 in an operable state. The feeder 20 equipped at the first position is controlled to operate during the substrate operation performed by the component mounting machine 10, and sequentially supplies components to the take-out section provided at a predetermined position of the feeder 20. The second position is arranged below the first position and stores the equipped feeder 20. That is, the second position holds the feeder 20 used for production in preparation and temporarily holds the feeder 20 used for production.

[0040] The replacement operation of the feeder 20 between the first position and the second position, the replenishment operation of the feeder 20, and the recovery operation are performed using the replacement system 30 and the article moving device 40. Specifically, Figure 1As shown, the replacement system 30 includes a first rail 31 and a second rail 32. The first rail 31 and the second rail 32 form a travel path of the article moving device 40. The first rail 31 and the second rail 32 are provided along the arrangement direction (the conveying direction (X direction) of the substrate) of at least one (four) component mounting machines 10. The first rail 31 and the second rail 32 extend over substantially the entire area in the conveying direction (X direction) of the substrate in the production equipment 1.

[0041] The article moving device 40 is configured to be able to travel along a travel path formed by the first rail 31 and the second rail 32. The article moving device 40 receives power supply from the power transmitting unit through contactless power supply, for example, via a power receiving unit provided opposite to the power transmitting unit provided on the first rail 31. The power received by the power receiving unit is used for the travel of the article moving device 40, predetermined operations, etc. via a power receiving circuit. In addition, the article moving device 40 detects the position (current position) on the travel path using, for example, a position detection device. The position detection device can detect the position (current position) of the article moving device 40 on the travel path by, for example, optical position detection, position detection using electromagnetic induction, etc.

[0042] In addition, the above-mentioned predetermined operation includes replacement operation of equipment such as the component mounting machine 10 that is detachably provided in the substrate operation machine WM0, etc., between the substrate operation machine WM0 and the component mounting machine 10. In the embodiment, the article moving device 40 uses the feeder 20 that supplies the components mounted on the substrate as equipment, and performs replacement operation of the feeder 20 between the article moving device 40 and the component mounting machine 10 that is the substrate operation machine WM0. In addition, the article moving device 40 can also perform replacement operation of the feeder 20 between the station group 50 and the station group 50.

[0043] Specifically, the article moving device 40 performs a replacement operation of the feeder 20 between the first position and the second position of the component supply device of the component mounting machine 10. In addition, the article moving device 40 carries the feeder 20 from the station group 50 to the first position or the second position of the component supply device to perform a replenishment operation of the feeder 20. Furthermore, the article moving device 40 carries the feeder 20 that is not needed in the component mounting machine 10 from the component supply device to the station group 50 to perform a recovery operation of the feeder 20.

[0044] The station group 50 is arranged on the substrate carrying side of the production equipment 1 ( Figure 1 on the left side of the paper). Figure 1 and Figure 2As shown, at least one (two in the figure) station 50s is provided in the station group 50, which can receive and deliver the article AR0 used by the feeder 20 or the like to the substrate working machine WM0. The station 50s can be in various forms as long as it can receive and deliver the article AR0. For example, the station 50s has a plurality of rollers, and can carry the article AR0 from the trolley 60 and can carry the article AR0 out of the trolley 60.

[0045] In addition, the station 50s can also store items that can accommodate AR0 Figure 3 The storage box AC0 shown. In this case, the station 50s can also carry the storage box AC0 from the trolley 60 through a plurality of rollers, and can carry the storage box AC0 out of the trolley 60. The storage box AC0, for example, has a plurality of slots, and can be equipped with a feeder 20 in each slot. The feeder 20 equipped in the slot of the storage box AC0 carried into the station 50s is supplied with power from the station 50s via the storage box AC0, and becomes a state capable of communicating with the production line control device LC0. As a result, the slot of the storage box AC0 is associated with the identification information of the feeder 20 equipped in the slot and recorded in the production line control device LC0.

[0046] The trolley 60 carries the article AR0 used in the substrate processing machine WM0. The trolley 60 of the embodiment carries the article AR0 in or out relative to the station 50s. The carrying of the article AR0 by the trolley 60 is not limited to the carrying relative to the station 50s, and if possible, it can also be carried in or out directly relative to the substrate processing machine WM0. The trolley 60 can be in various forms as long as it can carry the article AR0. For example, Figure 2 and Figure 3 As shown, the trolley 60 includes a trolley body 61, a loading platform 62, and a plurality of (for example, four) wheels 63. The loading platform 62 is provided on the upper portion of the trolley body 61 and can carry an article AR0. Figure 3 As shown, the loading platform 62 can also carry a storage box AC0 that can store an article AR0.

[0047] The loading platform 62 has a plurality of rollers 62a, and can carry the article AR0 into the station 50s, and can carry the article AR0 out of the station 50s. In addition, the loading platform 62 can carry the storage box AC0 into the station 50s, and can carry the storage box AC0 out of the station 50s. In addition, the loading platform 62 externally fixes the article AR0 or the storage box AC0 when carrying the article AR0 or the storage box AC0 in or out. When carrying the article AR0 or the storage box AC0 in or out, the loading platform 62 releases the fixation of the article AR0 or the storage box AC0.

[0048] A plurality of (four) wheels 63 are provided at the lower portion of the trolley body 61, and the trolley 60 is towed by a traction device 70 to travel. Specifically, when the traction device 70 is arranged at the lower portion of the trolley body 61, the traction device 70 is connected to the trolley body 61 in a manner capable of towing the trolley 60. The traction device 70 is not limited as long as it can travel automatically. For example, the traction device 70 can use a known unmanned guided vehicle (AGV: Automatic Guided Vehicle), an autonomous mobile robot (AMR: Autonomous Mobile Robot), etc.

[0049] The line control device LC0 is configured to be able to input and output various data with each device constituting the production equipment 1 via a network. The line control device LC0 monitors the operation status of the production equipment 1 and controls the substrate operation machine WM0, the replacement system 30, the article moving device 40, and the station group 50 such as the component mounting machine 10. Various data for controlling the substrate operation machine WM0, the replacement system 30, the article moving device 40, and the station group 50 are stored in the line control device LC0.

[0050] The production management device WC0 is capable of managing at least one (one in this figure) production equipment 1. The production management device WC0 is configured to be able to communicate with the production line control device LC0 of at least one (one) production equipment 1, and manage the production of substrate products performed by at least one (one) production equipment 1. The transport management device CC0 is capable of managing the trolley 60 and the traction device 70. The transport management device CC0 is configured to be able to communicate with the trolley 60, the traction device 70, the production line control device LC0, and the production management device WC0, and according to the production status of the substrate products in the production equipment 1, the trolley 60 and the traction device 70 are driven, and the trolley 60 is caused to transfer the item AR0.

[0051] For example, when the traction device 70 is an autonomous transport robot, the traction device 70 can use a known camera, sensor, etc. to recognize its own position in the production equipment 1 while moving. When the traction device 70 is an unmanned guided vehicle, the traction device 70 can be moved, for example, by the guide unit 85. The traction device 70 of the embodiment is an unmanned guided vehicle, such as Figure 1 As shown, a guide portion 85 is provided in the production equipment 1 .

[0052] The guide unit 85 is a component provided along the travel path of the vehicle 60 and the traction device 70, and guides the travel of the vehicle 60 and the traction device 70. Specifically, the traction device 70 that pulls the vehicle 60 travels while recognizing the guide unit 85. For example, the guide unit 85 includes a guide component M0 that indicates the travel path of the vehicle 60 and the traction device 70, and an identification component S0 that serves as an identification during travel. The guide component M0 and the identification component S0 improve the travel accuracy of the vehicle 60 and the traction device 70.

[0053] The guide member M0 and the identification member S0 can be in various forms. In the embodiment, the guide member M0 and the identification member S0 are formed of a magnetic tape. The traction device 70 that tractions the trolley 60 can prevent the trolley 60 and the traction device 70 from deviating from the travel path on which they should travel by detecting the guide member M0 while traveling. In addition, the traction device 70 can recognize the travel position of the trolley 60 and the traction device 70 by detecting the identification member S0.

[0054] For example, the identification component S0 includes a reference component indicating a reference position S10, a via component indicating a via position S20, and a target component indicating a target position S30. In addition, since the station group 50 of the embodiment includes two stations 50s, the via component includes a first via component indicating a first via position S21 and a second via component indicating a second via position S22. The target component includes a first target component indicating a first target position S31 and a second target component indicating a second target position S32.

[0055] For example, the traction device 70 of the traction dolly 60 recognizes that the dolly 60 and the traction device 70 are traveling at the first via position S21 by detecting the first via component. In addition, for example, when at least one of the dolly 60 and the traction device 70 communicates with the transport management device CC0 and the transport management device CC0 can recognize the travel position of at least one of the dolly 60 and the traction device 70, the identification component S0 can also be omitted.

[0056] The traction device 70 of the traction trolley 60 travels toward the target station 50s along a pre-programmed travel path or a travel path indicated by the transport management device CC0. Figure 1 The station 50s on the left side of the drawing is the target station 50s, and the traction device 70 of the traction vehicle 60 moves from the reference position S10 to the first target position S31. In this case, when the traction device 70 of the traction vehicle 60 detects the first passing component, it rotates 90 degrees to the right and moves straight. In addition, when the traction device 70 of the traction vehicle 60 detects the first target component, it stops.

[0057] Figure 1The station 50s on the right side of the drawing shown is the target station 50s, and the traction device 70 of the traction trolley 60 moves from the reference position S10 to the second target position S32. In this case, the traction device 70 of the traction trolley 60 rotates 90 degrees to the right and moves straight when the second passing component is detected. In addition, the traction device 70 of the traction trolley 60 stops when the second target component is detected. It should be noted that the traction device 70 of the traction trolley 60 can detect the station 50s when the distance between the traction device 70 and the station 50s becomes less than the predetermined distance, and can stop even when the first target component or the second target component is not detected.

[0058] When the trolley 60 reaches the target station 50s, the article AR0 or the storage box AC0 is sent to the station 50s, and the station 50s receives the article AR0 or the storage box AC0 from the trolley 60. In addition, the station 50s can also send the article AR0 or the storage box AC0 to the trolley 60, and the trolley 60 can also receive the article AR0 or the storage box AC0 from the station 50s.

[0059] Furthermore, the trolley 60 can also deliver the article AR0 or the storage box AC0 to one station 50s, move to another station 50s, and receive the article AR0 or the storage box AC0 from the station 50s. In addition, the trolley 60 can also receive the article AR0 or the storage box AC0 from one station 50s, move to another station 50s, and deliver the article AR0 or the storage box AC0 received from one station 50s to another station 50s. In addition, the article AR0 can be delivered in a state of being stored in the storage box AC0, and can also be delivered in a state of not being stored in the storage box AC0.

[0060] 1-2. Configuration Example Related to Positioning and Connection of Carriage 60 and Traction Device 70

[0061] like Figure 4 As shown, the connection mechanism 60b is arranged between the bottom plate 64 of the lower part of the loading platform 62 and the upper surface of the traction device 70. The connection mechanism 60b connects the trolley body 61 to the traction device 70 that enters under the trolley body 61 in a traction-capable manner. The connection mechanism 60b includes a plurality of (for example, three) connection pins provided on the upper surface of the traction device 70, a locking member 65 provided on the bottom plate 64 of the loading platform 62 on the travel direction side, a pair of switching mechanisms 66, 66, and a pair of guide members 67, 67. In addition, in Figure 4 In the figure, for the convenience of explanation, the bottom plate 64 is shown through.

[0062] like Figure 4As shown in the figure, a travel direction side connecting pin 71 is provided on the upper surface of the traction device 70 at a position closer to the travel direction side than the center in the width direction. The travel direction side connecting pin 71 is formed by, for example, embedding a cylindrical polyurethane rubber on the outer circumference of a metallic round bar. In addition, a pair of retreat direction side connecting pins 71 and 72 are provided on the upper surface of the traction device 70 at a position closer to the retreat direction side than both ends in the width direction. The retreat direction side connecting pin 72 is formed of the same material as the travel direction side connecting pin 71 and has the same shape. The retreat direction side connecting pin 72 is mounted on the upper surface of the traction device 70 via a spacer 73 and is arranged at a position higher than the travel direction side connecting pin 71.

[0063] The side edge of the bottom plate 64 of the stage 62 in the forward direction and the side edge in the backward direction are bent downward. A locking component 65 on the forward direction side is provided at a position closer to the forward direction side than the center in the width direction of the lower surface of the bottom plate 64. The locking component 65 on the forward direction side is formed in a crank shape when viewed from above, and has a receiving portion that opens in the backward direction. The receiving portion of the locking component 65 on the forward direction side has a narrowest portion at a predetermined height position, and has a tapered inner wall surface that expands in the vertical direction. The opening width dimension of the narrowest portion of the locking component 65 on the forward direction side is set to be substantially equal to the diameter of the connecting pin 71 on the forward direction side.

[0064] When the traction device 70 enters below the trolley main body 61, the traveling direction side connecting pin 71 enters from the retreating direction side of the traction device 70 to the traveling direction side toward the accommodation portion of the traveling direction side locking component 65. The traveling direction side connecting pin 71 is internally connected to the narrowest portion of the traveling direction side locking component 65 and hardly contacts the inner wall surface other than the narrowest portion. In addition, when the traveling direction side connecting pin 71 is internally connected to the narrowest portion, a slight deformation of the polyurethane rubber on the outer peripheral side is allowed. As a result, the accommodation portion of the traveling direction side locking component 65 locks the traveling direction side connecting pin 71 and restricts the movement in the width direction. Therefore, the position of the trolley main body 61 in the width direction relative to the traction device 70 is positioned.

[0065] In addition, the receiving portion of the traveling direction side locking member 65 allows the traveling direction side connecting pin 71 to tilt in the width direction and the traveling backward direction (a direction perpendicular to the width direction in a horizontal plane, the same applies hereinafter). Therefore, the traction device 70 and the carriage 60 can move smoothly even if the ground is undulating, for example. In addition, the traveling direction side connecting pin 71 can move relatively in the traveling backward direction within the receiving portion of the traveling direction side locking member 65.

[0066] Furthermore, a pair of guide members 67, 67 are provided below the bottom plate 64. The pair of guide members 67, 67 are formed in a rod shape or a plate shape, respectively. The pair of guide members 67, 67 are arranged so as to gradually approach the receiving portion of the traveling direction side locking member 65 as the pair of guide members 67, 67 advances from the retreating direction side to the advancing direction side of the stage 62. When the traction device 70 enters below the carriage main body 61, the pair of guide members 67, 67 guide the traveling direction side connecting pin 71 toward the receiving portion of the traveling direction side locking member 65 to eliminate the positional deviation between the carriage 60 and the traction device 70.

[0067] In addition, the bottom plate 64 includes a crank edge 64a and a pair of backward direction side edges 64b, 64b. The crank edge 64a is the edge of the bottom plate 64 on the backward direction side, and the central portion is cut into a crank shape. The pair of backward direction side edges 64b, 64b are uncut portions, and a pair of switching mechanisms 66, 66 are provided. The pair of switching mechanisms 66, 66 respectively include a mechanism body 66a, a backward direction side locking member 66b and an operation knob 66c.

[0068] The mechanism body 66a is fixed to the side edge portion 64b in the backward direction. The locking member 66b in the backward direction is a plate-shaped member bent into a mountain shape. Figure 4 As shown by arrow A1, the backward direction side locking component 66b is supported on the mechanism body 66a in a manner that allows sliding movement in the width direction. In other words, the backward direction side locking component 66b is supported to be movable between a locking position protruding from the mechanism body 66a toward the center side and a non-locking position accommodated in the mechanism body 66a. In the initial state of the pair of switching mechanisms 66, 66, the backward direction side locking component 66b is located at the non-locking position. The operating knob 66c is provided on the mechanism body 66a. By rotating the operating knob 66c, the backward direction side locking component 66b moves between the non-locking position and the locking position.

[0069] When the backward direction side locking member 66b is in the non-locking position, the backward direction side connecting pin 72 is allowed to pass through in the backward direction, and the traction device 70 is allowed to enter and exit from the bottom of the carriage body 61. Figure 4 As shown, when the traction device 70 enters under the trolley body 61 and the forward direction side connecting pin 71 is locked in the forward direction side locking component 65, a pair of backward direction side connecting pins 72, 72 enter into the crank shape of the crank edge 64a and protrude to the upper side of the crank edge 64a.

[0070] Furthermore, when the operator rotates the operating knob 66c, the backward direction side locking member 66b slides from the non-locking position to the locking position and is located behind the backward direction side connecting pin 72. When located at the locking position, the backward direction side locking member 66b restricts the backward direction side connecting pin 72 from passing in the backward direction, thereby restricting the traction device 70 from withdrawing from the bottom of the carriage body 61.

[0071] When the backward direction side locking member 66b is located at the locking position, a gap corresponding to the margin size in the forward and backward direction is generated between the backward direction side connecting pin 72 and the crank edge 64a and between the backward direction side connecting pin 72 and the backward direction side locking member 66b. That is, the crank edge 64a and the backward direction side locking member 66b lock the backward direction side connecting pin 72 within a predetermined margin size range so that it can move relatively in the forward and backward direction. Therefore, both the forward direction side connecting pin 71 and the backward direction side connecting pin 72 can move relatively in the forward and backward direction. As a result, the position of the carriage body 61 in the forward and backward direction relative to the traction device 70 is not positioned.

[0072] In addition, a gap corresponding to the margin in the width direction is generated between the backward direction side connecting pin 72 and the crank edge 64a. That is, the crank edge 64a functions as a locking member that can relatively moveably lock the backward direction side connecting pin 72 within the margin in the width direction. As a result, the backward direction side portion of the carriage body 61 can rotate in the width direction with the forward direction side connecting pin 71 as the rotation center. In other words, the posture of the carriage body 61 relative to the traction device 70 is allowed to change.

[0073] After that, the connection between the carriage 60 and the traction device 70 described later is performed, and the connection process between the carriage 60 and the traction device 70 is completed. In addition, when the traction device 70 moves in the advancing direction while pulling the carriage 60, the advancing direction side connection pin 71 pushes the advancing direction side locking member 65. When the traction device 70 moves in the backward direction while pulling the carriage 60, the backward direction side connection pin 72 pushes the backward direction side locking member 66b.

[0074] 1-3. Example of the structure of the article transport device 80

[0075] As described above, positioning between the trolley 60 and the traction device 70 is performed (positioning in the first stage). Then, the trolley 60 and the traction device 70 can be mechanically positioned and connected by the moving mechanism 100 described later. However, an electrical connection is required between the trolley 60 and the traction device 70. In the case where the operator performs the electrical connection operation, the operator's workload increases compared to the case where the connection operation is automated. In addition, in the case where the operator performs the electrical connection operation, there is a possibility that operational errors such as misconnection and poor connection may occur. In addition, in the case where the operator performs the connection operation between the trolley 60 and the traction device 70, there is a possibility that the operator only performs the connection operation and forgets the electrical connection operation.

[0076] Therefore, an article transport device 80 is provided in the production facility 1. The article transport device 80 electrically connects the trolley 60 and the traction device 70 as the trolley 60 and the traction device 70 are positioned and connected. Figure 5 As shown in FIG. 8 , the article transport device 80 includes a carriage 60 , a traction device 70 , and a connection portion 80 c . The dotted line shown in the figure schematically indicates the positioning and connection between the carriage 60 and the traction device 70 .

[0077] The trolley 60 can be in various forms as long as it can carry the article AR0 used in the substrate work machine WM0. Similarly, the traction device 70 can be in various forms as long as it can pull the trolley 60. The trolley 60 of the embodiment carries the feeder 20 or the storage box AC0 that stores the feeder 20. In addition, the trolley 60, for example, has a trolley that can carry a mask used in a printer that prints solder on a substrate. And, in the trolley 60, for example, there is a trolley that can carry tray components, chips, etc. arranged on a tray. The feeder 20, the mask, the tray component, and the chip are included in the article AR0.

[0078] The connection portion 80c electrically connects the trolley 60 and the traction device 70 as the trolley 60 and the traction device 70 are positioned and connected. The connection portion 80c can be in various forms as long as it can be electrically connected as described above. For example, one of the trolley 60 and the traction device 70 is set as the first device 81, and the other of the trolley 60 and the traction device 70 is set as the second device 82.

[0079] In this case, the first device 81 may include a positioning portion 91 for positioning the second device 82, and the second device 82 may include a positioned portion 92 positioned by the positioning portion 91 of the first device 81. In addition, the first device 81 or the second device 82 may include a moving mechanism 100 for positioning and connecting the positioned portion 92 by relatively moving the positioning portion 91 and the positioned portion 92 so as to move the positioned portion 92 along a contact surface 93 between the positioning portion 91 and the positioned portion 92.

[0080] In the embodiment, the first device 81 is a traction device 70, and the second device 82 is a trolley 60. Figure 6 , Fig. 7A and Figure 7B As shown, the positioned portion 92 provided on the trolley 60 is an outer plate (for example, Figure 4 The hole 92a of the bottom plate 64 of the trolley 60 shown in the figure is formed in a circular shape or a long hole shape. Figure 8 and Fig. 9 As shown, the positioning portion 91 provided on the pulling device 70 is a protrusion 91a that can be fitted into the circular hole 92a. The protrusion 91a is provided on a base member 95, and for example, the front end of a round pin is formed in a mountain shape. The base member 95 is provided at a portion on the first device 81 side facing the outer plate of the second device 82.

[0081] The moving mechanism 100 of the embodiment is provided in the traction device 70 as the first device 81. In addition, the moving mechanism 100 moves the protrusion 91a toward the hole 92a, and fits the protrusion 91a into the hole 92a, thereby positioning and connecting the carriage 60 and the traction device 70. For example, the moving mechanism 100 can use a known lifting mechanism, a sliding mechanism, etc. Fig.10 An example of a state before the protrusion 91a is moved toward the hole 92a is shown. Due to the positional deviation between the carriage 60 and the traction device 70, the center position of the protrusion 91a and the center position of the hole 92a are slightly offset.

[0082] The moving mechanism 100 raises the protrusion 91a and moves the protrusion 91a toward the hole 92a. When the protrusion 91a and the hole 92a are fitted, relative movement occurs between the protrusion 91a and the hole 92a. Specifically, the hole 92a moves along the contact surface 93 between the protrusion 91a and the hole 92a, that is, the front end of the protrusion 91a, and the carriage 60 moves together with the bottom plate 64. Fig.11 An example of a state after the protrusion 91a and the hole 92a are fitted is shown. When the protrusion 91a and the hole 92a are fitted, the center position of the protrusion 91a coincides with the center position of the hole 92a. Thus, the positioning and connection between the carriage 60 and the traction device 70 are completed.

[0083] The connecting portion 80c includes a first connecting portion 80a provided on the first device 81 and a second connecting portion 80b provided on the second device 82. In this case, the moving mechanism 100 can position and connect the first connecting portion 80a and the second connecting portion 80b by relative movement of the positioning portion 91 and the positioned portion 92. Fig.10As shown, in a state before the protrusion 91a moves toward the hole 92a, due to the positional deviation between the carriage 60 and the traction device 70, the center position of the first connection portion 80a and the center position of the second connection portion 80b are slightly offset.

[0084] The moving mechanism 100 and the rising of the protrusion 91a cause the first connecting portion 80a to rise. Fig.11 As shown, by the relative movement between the protrusion 91a and the hole 92a, the center position of the first connection part 80a coincides with the center position of the second connection part 80b. By the first connection part 80a rising in this state, the first connection part 80a and the second connection part 80b are connected in a state where the center positions of each other coincide. The moving mechanism 100 can also raise the first connection part 80a after the above relative movement.

[0085] Furthermore, the moving mechanism 100 can also move the base member 95 fixed to the protrusion 91a toward the hole 92a so that the protrusion 91a fits into the hole 92a, thereby positioning and connecting the carriage 60 and the traction device 70. In addition, the moving mechanism 100 can also be provided in the carriage 60 as the second device 82. In this case, the moving mechanism 100 moves the hole 92a toward the protrusion 91a or the base member 95 fixed to the protrusion 91a so that the protrusion 91a fits into the hole 92a, thereby positioning and connecting the carriage 60 and the traction device 70. The moving mechanism 100, for example, lowers the bottom plate 64 of the carriage 60 in which the hole 92a is formed.

[0086] In this way, the moving mechanism 100 can be provided in the first device 81 or the second device 82. In addition, the moving mechanism 100 moves one of the protrusion 91a or the base member 95 fixed to the protrusion 91a and the hole 92a toward the other, so that the protrusion 91a fits into the hole 92a, thereby positioning and connecting the carriage 60 and the traction device 70. In addition, the moving mechanism 100 can position and connect the first connection part 80a and the second connection part 80b through the relative movement of the protrusion 91a and the hole 92a.

[0087] In the embodiment, the hole 92a is formed in the bottom plate 64 of the carriage 60. However, the location where the hole 92a is formed is not limited to the bottom plate 64. For example, the hole 92a may also be formed in Figure 4 The pair of side plates 68, 68 are provided at both ends in the width direction of the carriage 60 shown in the figure. In this case, the protrusion 91a can be formed on the pair of side plates 74, 74 provided at both ends in the width direction of the traction device 70. In addition, the moving mechanism 100 can use a sliding mechanism that can slide in the width direction of the traction device 70.

[0088] Preferably, at least one of the positioning portion 91 and the positioned portion 92 is formed with an inclined surface 94 for guiding the relative movement of the positioning portion 91 and the positioned portion 92. Figure 7B and Fig. 9 As shown, in the embodiment, an inclined surface 94 is formed on both the protrusion 91a as the positioning portion 91 and the hole portion 92a as the positioned portion 92. The inclination angle of the inclined surface 94 of the protrusion 91a is consistent with the inclination angle of the inclined surface 94 of the hole portion 92a. As a result, the relative movement of the protrusion 91a and the hole portion 92a becomes smoother than when the inclined surface 94 is not provided.

[0089] like Fig.12 and Fig.13 As shown, the positioned portion 92 may be a recessed portion 92b provided on the outer periphery of the second device 82, and the positioning portion 91 may be a plate-shaped member 91b capable of surface contact with the recessed portion 92b. For example, the first device 81 is the traction device 70, and the second device 82 is the carriage 60. For example, the recessed portion 92b is provided near the center of the traveling backward direction at both ends in the width direction of the carriage 60. Similarly, the plate-shaped member 91b is provided near the center of the traveling backward direction at both ends in the width direction of the traction device 70. The plate-shaped member 91b is formed to extend in the vertical direction (the direction perpendicular to the paper surface of the figure).

[0090] It is preferable that the above-mentioned inclined surface 94 is formed on at least one of the plate-shaped member 91b and the recessed portion 92b. Fig.13 As shown in FIG. 8 , the plate-shaped member 91 b has an inclined surface 94 formed on the surface on the first connecting portion 80 a side. Fig.12 As shown, the surface of the recessed portion 92b on the second connecting portion 80b side is formed with an inclined surface 94. The moving mechanism 100 is provided, for example, in the traction device 70. The moving mechanism 100 moves the plate-like member 91b relative to the recessed portion 92b while making the plate-like member 91b contact the surface of the recessed portion 92b, thereby positioning and connecting the carriage 60 and the traction device 70. The moving mechanism 100, for example, raises the plate-like member 91b and moves the plate-like member 91b toward the recessed portion 92b.

[0091] When the plate-like member 91b further rises while in surface contact with the recessed portion 92b, relative movement occurs between the plate-like member 91b and the recessed portion 92b. Specifically, the recessed portion 92b moves along the contact surface 93 between the plate-like member 91b and the recessed portion 92b, that is, the plate-like member 91b, and the trolley 60 moves together with the recessed portion 92b. Thus, the positioning and connection between the trolley 60 and the traction device 70 are completed. In addition, the recessed portion 92b can be provided at any peripheral portion of the trolley 60, such as a corner portion or a leg portion of the trolley 60, and the plate-like member 91b can be provided at any position corresponding to the position of the recessed portion 92b.

[0092] In addition, the moving mechanism 100 can also position and connect the carriage 60 and the traction device 70 by moving the recessed portion 92b relative to the plate-shaped member 91b while making the plate-shaped member 91b and the recessed portion 92b in surface contact. In this way, the moving mechanism 100 can position and connect the carriage 60 and the traction device 70 by moving one of the plate-shaped member 91b and the recessed portion 92b relative to the other while making the plate-shaped member 91b and the recessed portion 92b in surface contact. In the above-mentioned embodiment, the moving mechanism 100 can also position and connect the first connection portion 80a and the second connection portion 80b by the relative movement of the plate-shaped member 91b and the recessed portion 92b.

[0093] like Figure 6 As shown, the carriage 60 as the second device 82 has a plurality of (for example, four) holes 92a as the positioned portion 92. The plurality of (four) holes 92a are evenly arranged around the second connecting portion 80b. Figure 8 As shown, the pulling device 70 as the first device 81 includes a plurality of (eg, four) protrusions 91a as the positioning portion 91. The plurality of (four) protrusions 91a are evenly arranged around the first connecting portion 80a. Fig.12 and Fig.13 The illustrated embodiment is different from the above-described embodiment in that two sets of positioning portions 91 and positioned portions 92 are provided; however, the arrangements of the positioning portions 91 and positioned portions 92 are the same.

[0094] In this way, multiple sets of positioning parts 91 and positioned parts 92 can be provided, and multiple sets of positioning parts 91 and positioned parts 92 can be evenly arranged around the connecting part 80c. As a result, relative movement of the positioning parts 91 and the positioned parts 92 can be generated at multiple locations around the connecting part 80c, and the positioning and connection between the first connecting part 80a and the second connecting part 80b become easy. In addition, the external force generated on the first connecting part 80a and the second connecting part 80b can be reduced.

[0095] In addition, when there are two sets of positioning parts 91 and positioned parts 92, rotational movement is likely to occur during the relative movement of positioning parts 91 and positioned parts 92. Therefore, three or more sets of positioning parts 91 and positioned parts 92 may be provided. In addition, the smaller the area of ​​contact surface 93 between positioning parts 91 and positioned parts 92, the more significant the above content is. Therefore, the method of having three or more sets of positioning parts 91 and positioned parts 92 can be applied to the method of having positioning parts 91 as protrusions 91a and positioned parts 92 as holes 92a ( Figure 6 and Figure 8 as shown).

[0096] It should be noted that the positioning portion 91 is a plate-shaped member 91b and the positioned portion 92 is a recessed portion 92b ( Fig.12and Fig.13 In the embodiment shown in the figure, three or more sets of plate-like members 91b and recessed portions 92b may be provided according to the area of ​​the contact surface 93. That is, when the area of ​​the contact surface 93 is smaller than the predetermined area, the article transporting device 80 may also include three or more sets of plate-like members 91b and recessed portions 92b.

[0097] In addition, in the embodiment where the positioning portion 91 is the protrusion 91a and the positioned portion 92 is the hole 92a ( Figure 6 and Figure 8 In the embodiment shown in the figure, due to manufacturing deviation, the outer dimensions of the protrusion 91a and the hole 92a are different from the assumed dimensions, and the assumed fitting becomes difficult. Therefore, for example, a predetermined group (for example, two groups) of protrusions 91a and holes 92a can be set to have the same outer dimensions as the designed dimensions. Fig. 7A and Figure 7B As shown, the other predetermined groups (for example, two groups) of protrusions 91 a and holes 92 a can form the holes 92 a in the shape of elongated holes, for example.

[0098] Similarly, in the embodiment where the positioning portion 91 is the plate-shaped member 91b and the positioned portion 92 is the recessed portion 92b ( Fig.12 and Fig.13 In the embodiment shown in the figure, due to manufacturing deviation, it is assumed that the contact surface 93 of the plate-like component 91b and the recessed portion 92b may not necessarily be a parallel plane. Therefore, for example, a predetermined group (for example, one group) of plate-like components 91b and recessed portions 92b can be set to have the same outer dimensions as the design dimensions. The plate-like components 91b and recessed portions 92b of other predetermined groups (for example, one group) can have the outer dimensions of the plate-like components 91b smaller than the design dimensions. In addition, the plate-like components 91b and recessed portions 92b of other predetermined groups (for example, one group) can also have the outer dimensions of the recessed portion 92b larger than the design dimensions.

[0099] As described above, the moving mechanism 100 can position and connect the first connecting portion 80a and the second connecting portion 80b by the relative movement of the positioning portion 91 and the positioned portion 92. However, the center position of the first connecting portion 80a and the center position of the second connecting portion 80b may not be completely consistent. Therefore, the connecting portion 80c can be a floating connector. Fig.14 As shown, the first connection part 80a of the floating connector is fixed to the first device 81 in a manner that it cannot move relatively, and the second connection part 80b is fixed to the second device 82 in a manner that it can move relatively with respect to a plane 80p that is orthogonal to the connection direction of the first connection part 80a. As a result, the connection part 80c can eliminate the positional deviation between the first connection part 80a and the second connection part 80b.

[0100] In addition, in this specification, the case where the first device 81 is the traction device 70 and the second device 82 is the carriage 60 is described as an example, but the matters described in this specification can also be applied to the case where the first device 81 is the carriage 60 and the second device 82 is the traction device 70. In addition, the matters described in this specification can be appropriately selected and applied, and a method of combining the selection and selection methods can also be adopted.

[0101] 1-4. Example of the structure of the carriage 60

[0102] As described above, the trolley 60 can be in various forms as long as it can carry the article AR0 used in the substrate operation machine WM0. For example, the trolley 60 includes a handover mechanism 60a, a connecting mechanism 60b, and a connecting portion 80c. The handover mechanism 60a performs handover of the article AR0 used in the substrate operation machine WM0 that performs a predetermined substrate operation on the substrate. The handover mechanism 60a is equivalent to the above-mentioned stage 62.

[0103] The loading platform 62 is provided on the upper part of the carriage main body 61, and can carry the article AR0. In addition, the loading platform 62 can also carry the storage box AC0 that can store the article AR0. The loading platform 62 has a plurality of rollers 62a, and can carry the article AR0 or the storage box AC0 into the station 50s, and can carry the article AR0 or the storage box AC0 out of the station 50s. The loading platform 62 can also directly carry the article AR0 or the storage box AC0 into the substrate operation machine WM0, and can also directly carry the article AR0 or the storage box AC0 out of the substrate operation machine WM0.

[0104] The connecting mechanism 60b is a mechanism capable of mechanically connecting with the traction device 70. For example, Figure 4 As shown in the figure, the connection mechanism 60b is arranged between the bottom plate 64 of the lower part of the stage 62 and the upper surface of the traction device 70. As described above, the connection mechanism 60b connects the carriage body 61 to the traction device 70 that enters under the carriage body 61 in a traction-capable manner. The connection mechanism 60b includes a plurality of (for example, three) connection pins provided on the upper surface of the traction device 70 and a locking member 65 on the travel direction side provided on the bottom plate 64 of the stage 62.

[0105] The plurality of connecting pins include, for example, one connecting pin 71 on the advancing direction side of the carriage 60 and the traction device 70 and two connecting pins 72 on the retreating direction side of the carriage 60 and the traction device 70. When the connecting pin 71 on the advancing direction side enters from the retreating direction side to the advancing direction side, the connecting pin 71 on the advancing direction side can be locked by the locking member 65 on the advancing direction side. Therefore, when the traction device 70 enters below the carriage main body 61, the traction device 70 is allowed to enter from the retreating direction side to the advancing direction side, but is restricted from entering from the advancing direction side to the retreating direction side.

[0106] As described above, the connection portion 80c is a mechanism that can be electrically connected to the traction device 70. The connection portion 80c is electrically connected to the traction device 70 as it is positioned and connected to the traction device 70. Fig.14 As shown, the connection part 80c includes a power connection part 80c1 and a signal connection part 80c2. The power connection part 80c1 is connected to a power line that can transmit power to and from the traction device 70. Thus, for example, the driving power can be supplied from the battery of the traction device 70 to the trolley 60, and the trolley 60 does not need to be equipped with a battery for driving power. The trolley 60 can operate various mechanisms using the driving power supplied from the traction device 70. For example, the trolley 60 can operate the handover mechanism 60a using the driving power supplied from the traction device 70.

[0107] The signal connection part 80c2 is connected to a signal line capable of transmitting a control signal to and from the traction device 70. By electrically connecting the signal connection part 80c2 to the traction device 70, the operator can operate the traction device 70. For example, the trolley 60 and the traction device 70 are respectively provided with an emergency stop button. When the signal connection part 80c2 is electrically connected to the traction device 70, the stop action of the emergency stop button of the traction device 70 works in conjunction with the operation of the emergency stop button of the trolley 60. In addition, the matters already described about the article handling device 80 are also the same for the trolley 60. In addition, the above-mentioned situation about the trolley 60 is also the same for the article handling device 80.

[0108] 1-5. Method of connecting the trolley 60 and the traction device 70

[0109] The method for connecting the trolley 60 and the traction device 70 is a method for connecting the trolley 60 for transporting the article AR0 used in the substrate processing machine WM0 for performing a predetermined substrate processing operation on the substrate and the traction device 70 capable of automatically moving along the travel path by pulling the trolley 60, and includes a first positioning step and a connection step. The method for connecting the trolley 60 and the traction device 70 is, for example, Fig.15 The first positioning step is performed by processing shown in step SP1. The connection step is performed by processing shown in step SP2.

[0110] The first positioning process performs the first stage positioning of the trolley 60 (step SP1). The first positioning process is performed, for example, by the connection mechanism 60b described above. Thus, the trolley 60 and the traction device 70 are roughly positioned. In the connection and connection process, after the first positioning process is performed, the moving mechanism 100 is operated to perform mechanical positioning and connection, and the trolley 60 and the traction device 70 are electrically connected along with the positioning and connection between the trolley 60 and the traction device 70 (step SP2). That is, the connection and connection process is the same as the control of the article conveying device 80. As described above, a slight positional offset between the first connection part 80a and the second connection part 80b can be eliminated by the floating connector.

[0111] In order to generate relative movement between the dolly 60 and the traction device 70, it is necessary to release the lock of the wheel on the second device 82 side. In the embodiment, the second device 82 is the dolly 60. Therefore, in the connection process, the lock of the multiple (for example, four) wheels 63 of the dolly 60 is released. After the connection process is completed, the multiple (for example, four) wheels 63 of the dolly 60 are locked. In addition, after the connection process is completed, the dolly 60 and the traction device 70 are clamped and can move as a whole. When the connection between the dolly 60 and the traction device 70 is released, the clamping of the dolly 60 and the traction device 70 is released, and the dolly 60 and the traction device 70 can move independently.

[0112] In addition, the matters already described about the article transport device 80 and the carriage 60 are also the same for the method of connecting the carriage 60 and the traction device 70. In addition, the above contents about the method of connecting the carriage 60 and the traction device 70 are also the same for the article transport device 80 and the carriage 60.

[0113] 2. Example of Effects of Implementation

[0114] According to the article transport device 80, the trolley 60 and the traction device 70 can be electrically connected with the positioning and connection between the trolley 60 and the traction device 70. The above contents about the article transport device 80 are also the same for the trolley 60 and the connection method between the trolley 60 and the traction device 70.

[0115] Description of Reference Numerals

[0116] 60: trolley, 60a: transfer mechanism, 60b: connecting mechanism, 70: traction device, 80: article transport device, 80a: first connecting part, 80b: second connecting part, 80c: connecting part, 80c1: power connecting part, 80c2: signal connecting part, 80p: plane, 81: first device, 82: second device, 91: positioning part, 91a: protrusion, 91b: plate-shaped part, 92: positioned part, 92a: hole part, 92b: recessed part, 93: contact surface, 94: inclined surface, 95: base part, 100: moving mechanism, AR0: article, WM0: substrate working machine.

Claims

1. An article transporting device, comprising: A trolley for transporting articles used in a substrate operation machine for performing predetermined substrate operations on a substrate; a traction device for traction of the trolley; and The connection portion electrically connects the trolley and the traction device as the trolley and the traction device are positioned and connected.

2. The article transporting device according to claim 1, wherein: The first device, which is one of the vehicle and the traction device, includes a positioning unit for positioning the second device, which is the other of the vehicle and the traction device. The second device includes a positioned portion positioned by the positioning portion of the first device, The first device or the second device includes a moving mechanism, and the moving mechanism performs the positioning and the connection by relatively moving the positioning portion and the positioned portion so that the positioned portion moves along a contact surface between the positioning portion and the positioned portion. The connection portion includes a first connection portion provided on the first device and a second connection portion provided on the second device. The moving mechanism positions and connects the first connecting portion and the second connecting portion through the relative movement of the positioning portion and the positioned portion.

3. The article transporting device according to claim 2, wherein: An inclined surface for guiding the relative movement between the positioning portion and the positioned portion is formed on at least one of the positioning portion and the positioned portion.

4. The article transporting device according to claim 3, wherein: The positioned portion is a hole provided on an outer plate of the second device, The positioning portion is a protrusion that can be engaged with the hole portion. The moving mechanism moves one of the protrusion or the base member fixed to the protrusion and the hole toward the other to fit the protrusion into the hole, thereby performing the positioning and the connection.

5. The article transporting device according to claim 3, wherein: The positioned portion is a recessed portion provided on the outer periphery of the second device, The positioning portion is a plate-shaped member capable of making surface contact with the recessed portion. The moving mechanism performs the positioning and the connection by moving one of the plate-shaped member and the recessed portion relative to the other while the plate-shaped member and the recessed portion are in surface contact with each other.

6. The article transporting device according to claim 2, wherein: The positioning part and the positioned part are provided in multiple groups. The plurality of groups of positioning portions and positioned portions are evenly arranged around the connecting portion.

7. The article transporting device according to claim 6, wherein: The positioning parts and the positioned parts are provided in three or more groups.

8. The article transporting device according to claim 2, wherein: The connection part is a floating connector in which the first connection part is fixed to the first device in a non-movable manner and the second connection part is fixed to the second device in a movable manner relative to a plane orthogonal to a connection direction of the first connection part.

9. A trolley comprising: A delivery mechanism for delivering articles used in a substrate operation machine that performs a predetermined substrate operation on a substrate; A coupling mechanism capable of mechanically coupling with the traction device; and A connecting portion capable of being electrically connected to the traction device, The connection portion is electrically connected to the traction device as it is positioned and coupled to the traction device.

10. The trolley according to claim 9, wherein: The connecting portion comprises: A power connection portion for connecting a power line capable of transmitting power between the traction device and the traction device; and A signal connection part, for connecting a signal line capable of transmitting a control signal between the traction device and the traction device, The signal connection portion is electrically connected to the traction device, so that an operator can operate the traction device.

11. A method for connecting a trolley and a traction device, wherein the trolley carries articles used in a substrate processing machine for performing a predetermined substrate processing operation on a substrate, and the traction device is capable of pulling the trolley and automatically moving along a travel path, The method for connecting the trolley and the traction device comprises: a first positioning step, performing a first stage of positioning relative to the trolley; and The connecting step is to operate the moving mechanism to perform mechanical positioning and connection after the first positioning step, and to electrically connect the carriage and the traction device in accordance with the positioning and connection between the carriage and the traction device.

Images