A manipulator forearm and a robotic arm

Abstract

The present invention discloses a forearm of a manipulator, which has a wrist joint axis and an elbow joint axis, and includes: a housing, which includes an integrally formed support portion and a main body portion, and the support portion has a first pressing end; a wrist pulley, which is coaxial with the wrist joint axis, and the wrist pulley and the housing form an installation space. The wrist pulley includes an integrally formed shaft portion and a pulley portion, and a second pressing end is formed at the connection between the shaft portion and the pulley portion; a bearing, which is arranged in the installation space, and the bearing has an inner ring and an outer ring; a pressing assembly, which is coaxial with the wrist joint axis and includes a first pressing member and a second pressing member; wherein, the first pressing member and the first pressing end form an axial constraint on the outer ring of the bearing, and the second pressing member and the second pressing end form an axial constraint on the inner ring of the bearing, so that the wrist pulley can rotate relative to the housing through the bearing. By adopting the above scheme, the concentricity of the forearm of the manipulator is improved and the axial installation space is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and particularly to a manipulator forearm and a robotic arm. Background Art

[0002] In the field of semiconductor wafer manufacturing, as the core actuator for wafer transfer, the motion accuracy and stability of a robotic arm directly affect the process yield and equipment reliability. Existing robotic arms mostly adopt a modular series structure, and achieve multi-degree-of-freedom motion through the coordination of the shoulder-elbow-wrist three axes. Among them, the forearm, as the key transmission unit connecting the upper arm and the end effector, needs to bear the complex loads of the wrist joint and synchronously coordinate the pulley drive system. However, the wrist joint design of traditional forearms shows the characteristics of functional modular dispersion. A split assembly structure is generally adopted between the bearing seat and the forearm housing, and between the wrist pulley and the drive spindle, resulting in a significant cumulative effect of tolerance chains, making it difficult to ensure the dynamic concentricity between components, thereby restricting the transmission accuracy.

[0003] The core contradiction brought by the existing structure lies in that the separate installation of the bearing seat and the forearm housing will introduce a radial fit clearance, and most of the wrist pulleys and spindles are independently assembled. The independent assembly of the pulley and the spindle relies on multiple fasteners and positioning pins, which are prone to radial runout deviation due to small deformations during high-speed start-stop and variable-direction movements, thereby affecting the transfer accuracy of the arm. In addition, the existing manipulator forearm needs to add a bearing seat to fix the bearing, resulting in redundant axial dimensions, that is, the forearm is too thick. The redundant axial dimensions not only limit the movement range of the robotic arm in a compact cavity, but also increase the load on the arm and affect the transmission stability.

[0004] Therefore, it is necessary to provide a manipulator forearm and a robotic arm to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a manipulator forearm and a robotic arm to improve the concentricity of the manipulator forearm and reduce the axial installation space.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows:

[0007] In a first aspect, a manipulator forearm having a wrist joint axis and an elbow joint axis includes:

[0008] A housing including an integrally formed support portion and a main body portion. The main body portion extends horizontally in the radial direction close to the wrist joint axis to form the support portion. The support portion and the main body portion enclose an accommodation space, and the support portion has a first pressing end;

[0009] The wrist pulley is arranged in the accommodation space and coaxial with the wrist joint axis. The wrist pulley and the housing form an installation space. The wrist pulley includes an integrally formed shaft portion and a pulley portion, and a second pressing end is formed at the connection of the shaft portion and the pulley portion;

[0010] The bearing is arranged in the installation space. The bearing has an inner ring and an outer ring. The inner ring abuts against the wrist pulley, and the outer ring abuts against the housing;

[0011] The pressing assembly is coaxial with the wrist joint axis and includes a first pressing member and a second pressing member;

[0012] Wherein, the first pressing member and the first pressing end form an axial constraint on the outer ring of the bearing, and the second pressing member and the second pressing end form an axial constraint on the inner ring of the bearing, so that the wrist pulley can rotate relative to the housing through the bearing.

[0013] The beneficial effects of the forearm of the manipulator provided by the present invention are as follows: By integrally molding the main body portion and the support portion, the wrist pulley is integrally formed with an integrated mandrel and pulley, effectively avoiding the cumulative concentricity deviation caused by assembly in the split structure of the bearing seat and the housing, and the wrist pulley and the mandrel in the prior art, significantly reducing the tolerance and improving the concentricity, thereby enhancing the transmission accuracy and stability of the robotic arm. The collaborative design of the bearing and the pressing assembly realizes the compact rotational connection between the wrist pulley and the housing. The inner ring of the bearing is locked with the wrist pulley through the second pressing member, and the outer ring is fixed to the housing by means of the first pressing member, forming a double axial constraint, which not only ensures the rotational flexibility but also reduces the number of parts. At the same time, the bearing is completely integrated in the installation space enclosed by the housing and the wrist pulley, optimizing the axial layout and making the forearm structure more compact, especially suitable for the robotic arm application scenarios with high requirements for space utilization. In addition, compared with the indirect contact between the bearing and the housing through the bearing seat in the prior art, the present invention directly contacts the bearing and the housing with the cooperation of the pressing assembly, further improving the transmission accuracy.

[0014] Further, the second pressing member includes an annular support seat, the annular support seat is fixedly connected with the wrist pulley, the circumferential outer edge of the annular support seat has an annular protrusion, and the support portion is correspondingly provided with an annular positioning groove, and the annular protrusion is rotatably fitted in the positioning groove.

[0015] By adopting the above technical solution, the bearing in the installation space can be sealed.

[0016] Further, the first pressing end is provided with an annular slot opening inward around the wrist joint axis, the first pressing member has a first pressing surface that cooperates with the annular slot, and a first fixing cavity for fixing the outer ring is formed between the annular slot and the first pressing surface.

[0017] By adopting the above technical solution, the outer ring of the bearing can be fixed through the formed first fixing cavity, and the first pressing end is a structure provided by the shell, avoiding an external split structure and increasing the concentricity of the overall structure.

[0018] Furthermore, the second pressing end is provided with a stepped groove, and the second pressing piece is formed with an annular flange in the direction close to the wrist joint axis, and the annular flange has a second clamping surface that cooperates with the stepped groove, and the stepped groove and the second clamping surface form a second fixing cavity for fixing the inner ring.

[0019] By adopting the above technical solution, the inner ring of the bearing can be fixed through the formed second fixing cavity, and the second pressing end is a self-contained structure of the wrist pulley, avoiding an external split structure and increasing the concentricity of the overall structure.

[0020] Furthermore, the pulley portion is further provided with a gear portion in a direction away from the wrist pulley axis, the stepped groove is provided on the shaft portion, and a sunken accommodation area is provided on the upper end surface of the pulley portion, and the sunken accommodation area is used to accommodate the first pressing member.

[0021] By adopting the above technical solution, the sunken accommodation area is used to accommodate the first pressing piece. By setting the sunken accommodation area, the internal space of the shell is saved and the weight of the elbow pulley is reduced.

[0022] Furthermore, the pulley portion is an annular structure, and a stress-reducing contour with a continuous arc transition is provided on the circumferential bottom edge thereof.

[0023] By adopting the above solution, it is avoided that the pipeline is worn due to friction between the pipeline and the inner side of the pulley when passing through the bottom of the wrist pulley.

[0024] Furthermore, an escape area is provided inside the pulley portion, and the escape area is communicated with the sinking accommodating area.

[0025] By adopting the above solution, weight reduction is facilitated.

[0026] Furthermore, it also includes a driving source, an elbow pulley and a transmission belt. The driving source is fixedly connected to the shell and can drive the shell to rotate in a horizontal direction. The elbow pulley and the wrist pulley are respectively arranged on opposite sides of the shell and are diagonally distributed. The wrist pulley and the elbow pulley are connected through the transmission belt.

[0027] By adopting the above scheme, when the housing rotates, the center of the wrist pulley revolves around the elbow joint axis, while the elbow pulley remains stationary. A dynamic phase difference is formed between the two pulleys. The transmission belt is tensioned between the two pulleys by a pre-tightening force to form a closed-loop transmission path. When the wrist pulley rotates with the housing to generate a circumferential displacement, the meshing contact point of the transmission belt migrates. The fixed position of the elbow pulley causes the transmission belt to be stretched on the inlet side, and the displacement of the wrist pulley causes the transmission belt to be compressed on the outlet side: the elastic deformation of the transmission belt converts the circumferential displacement into the misalignment amount of the meshing tooth surfaces, forcing the wrist pulley to adaptively rotate around its own wrist joint axis. By adopting the above scheme, the adaptive rotation of the wrist pulley is thus achieved.

[0028] Further, input ports and output ports for pipelines to pass through are respectively opened at both ends of the housing. The input port and the output port are respectively arranged on opposite sides of the housing and are diagonally distributed; a first hole and a second hole are opened at the bottom of the housing, and a Y-shaped pipe groove is arranged on the bottom wall of the housing. The Y-shaped pipe groove has two diversion ports and a guiding port. The two diversion ports are respectively communicated with the first hole and the second hole, and the guiding port is communicated with the output port.

[0029] By adopting the above scheme, the formed circuit and pipeline channels are isolated from each other, avoiding interference between the circuit pipelines and the gas pipeline, and at the same time avoiding interference between the circuit pipelines and the gas pipeline and the housing, extending the service life of the circuit and the pipeline, and avoiding wear during use.

[0030] Further, a diversion bracket is arranged inside the housing. The diversion bracket straddles the area where the input port is located. The diversion bracket includes a top bent section, a bottom horizontally reversely bent section and a vertical connecting section connecting the two. Notches are symmetrically opened on both sides of the middle of the vertical connecting section, and the notches are used for fixing pipelines.

[0031] By adopting the above scheme, the notches are preset pipeline fixing positions. The pipelines and the diversion bracket are tied together at the notches by cable ties. The notches can prevent the cable ties from shifting in position, thereby increasing the fixing stability of the pipelines.

[0032] In a second aspect, a robotic arm includes a robotic forearm as described above, having a shoulder joint axis, and further includes: an upper arm rotatable around the shoulder axis, and an end effector rotatably coupled to the end of the forearm around the wrist axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is an overall cross-sectional view of the robotic forearm according to an embodiment of the present invention;

[0034] Figure 2 It is a partial cross-sectional view of the robotic forearm according to an embodiment of the present invention;

[0035] Figure 3 This is a structural cross-sectional view of the wrist pulley in the embodiment of the present invention;

[0036] Figure 4 This is a schematic structural diagram of the housing in the embodiment of the present invention;

[0037] Figure 5 This is a schematic diagram of the overall structure of the robotic arm in the embodiment of the present invention.

[0038] Reference numerals: 1, housing; 101, wrist joint axis; 102, elbow joint axis; 103, upper cover plate; 104, lower cover plate; 11, support part; 111, first pressing end; 112, positioning groove; 113, annular clamping groove; 114, annular accommodating groove; 12, main body part; 13, input port; 14, output port; 15, first hole; 16, second hole; 17, Y-shaped pipe groove; 18, shunt bracket; 181, notch; 2, wrist pulley; 21, shaft part; 22, pulley part; 221, second pressing end; 222, stepped groove; 23, tooth part; 24, sunken accommodating area; 25, avoidance area; 3, bearing; 4, pressing assembly; 41, first pressing piece; 411, first pressing surface; 42, second pressing piece; 421, annular protrusion; 422, annular flange; 43, first fixing cavity; 44, second fixing cavity; 5, drive source; 6, elbow pulley; 7, transmission belt; 8, upper arm; 9, end effector. Detailed implementation manners

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art in the field to which the present invention belongs. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0040] The following Figure 1 - Figure 5 , a further detailed description will be made on the specific implementation manners of the present invention.

[0041] Refer to Figures 1 - 4, First aspect, in some embodiments of the present invention, the left and right ends of the forearm of the robotic arm respectively have a wrist joint axis 101 and an elbow joint axis 102. The forearm of the robotic arm includes a housing 1, a wrist pulley 2, an internal bearing 3, and a pressing assembly 4.

[0042] Referring to Figure 1 and Figure 2 , in some embodiments of the present invention, the housing 1 includes a support portion 11 and a main body portion 12. The main body portion 12 extends in the radial horizontal direction close to the wrist joint axis and integrally forms the support portion 11. The support portion 11 and the main body portion 12 enclose a receiving space for receiving the wrist pulley 2. By the integrated molding design of the main body portion 12 and the support portion 11, the cumulative deviation of concentricity caused by assembly in the split structure of the bearing 3 seat and the housing 1 in the prior art is effectively avoided, the tolerance is significantly reduced, and the concentricity is improved, thereby enhancing the transmission accuracy and stability of the robotic arm.

[0043] In some specific embodiments of the present invention, the housing 1 also has an upper opening and a lower opening. The housing 1 includes an upper cover plate 103 and a lower cover plate 104. The upper cover plate 103 and the lower cover plate 104 are respectively detachably connected to the upper opening and the lower opening of the housing 1 to close or open the housing 1, facilitating installation and maintenance.

[0044] In some embodiments of the present invention, the support portion 11 has a first pressing end 111 in the direction close to the wrist joint axis. The wrist pulley 2 is coaxially arranged at the wrist joint axis. An installation space is formed between the wrist pulley 2 and the housing 1 for receiving the bearing 3. The wrist pulley 2 includes a shaft portion 21 and a pulley portion 22 integrally formed in sequence along the direction away from the axis of the wrist pulley 2. The integration of the shaft portion 21 and the pulley portion 22 in the wrist pulley 2 reduces the cumulative deviation of concentricity caused by assembling the mandrel and the wrist pulley 2, thereby enhancing the transmission accuracy and stability of the robotic arm.

[0045] Referring to Figure 3 , in some embodiments of the present invention, the wrist pulley 2 includes a shaft portion 21 and a pulley portion 22 integrally formed in sequence along the direction away from the axis of the wrist pulley 2. The wrist pulley 2 is rotatably connected to the housing 1 through the bearing 3. The wrist pulley 2 has a second pressing end 221, and the second pressing end 221 is located above the shaft portion 21 of the wrist pulley 2. The bearing 3 is arranged in the installation space. The bearing 3 is a roller bearing 3 with an inner ring and an outer ring. Rollers and a cage are arranged between the inner ring and the outer ring, and a sealing treatment is performed between the inner ring and the outer ring. Because even extremely tiny dust will have an adverse effect on the bearing 3. Therefore, the sealing treatment keeps the bearing 3 clean and prevents dust from invading the bearing 3 and affecting its transmission accuracy.

[0046] In some embodiments of the present invention, the pressing assembly 4 is coaxial with the wrist joint axis and includes a first pressing member 41 and a second pressing member 42. The first pressing member 41 and the first pressing end 111 form an axial constraint on the outer ring of the bearing 3, and the second pressing member 42 and the second pressing end 221 form an axial constraint on the inner ring of the bearing 3, so that the wrist pulley 2 can rotate relative to the housing 1 through the bearing 3. Specifically, the first pressing member 41 can cooperate with the first pressing end 111 to fasten the outer ring to the housing 1, and the second pressing member 42 cooperates with the second pressing end 221 to fasten the inner ring to the wrist pulley 2. The collaborative design of the bearing 3 and the pressing assembly 4 realizes a compact rotational connection between the wrist pulley 2 and the housing 1. The inner ring of the bearing 3 is locked with the wrist pulley 2 through the second pressing member 42, and the outer ring is fixed to the housing 1 by means of the first pressing member 41, forming a double axial constraint, which not only ensures the rotational flexibility but also reduces the number of parts. At the same time, the bearing 3 is completely integrated in the installation space enclosed by the housing 1 and the wrist pulley 2, optimizing the axial layout and making the forearm structure more compact, which is particularly suitable for the application scenario of a robotic arm with high requirements for space utilization. In addition, compared with the indirect contact between the bearing 3 and the housing 1 through the bearing seat in the prior art, in this embodiment, the bearing 3 and the housing 1 are in direct contact with the cooperation of the pressing assembly 4, further improving the transmission accuracy.

[0047] Referring Figure 1 and Figure 2 , in some specific embodiments of the present invention, the first pressing member 41 is an annular gland, and the gland is detachably connected to the bottom of the support portion 11. Specifically, threaded holes are provided in the gland and the support portion 11, and the gland and the support portion 11 are fastened by bolts. The second pressing member 42 includes an annular support seat, the annular support seat is fixedly connected to the wrist pulley 2, and the annular support seat has an annular protrusion 421 in a direction away from the wrist joint axis. An annular positioning groove 112 is provided above the support portion 11, and the annular protrusion 421 is rotatably fitted in the annular positioning groove 112. A U-shaped annular sealing space is formed between the annular support seat and the support portion 11. The cooperation between the positioning groove 112 and the annular protrusion 421 can not only meet the rotational cooperation between the annular support seat and the housing 1, but also seal and protect the bearing 3 in the installation space, preventing external dust from entering the bearing 3 through the gap between the housing 1 and the wrist pulley 2 and affecting the transmission accuracy of the bearing 3.

[0048] In some specific embodiments of the present invention, the first pressing end 111 faces towards the inside of the housing 1 and is provided with an annular slot 113 that opens inwards around the wrist joint axis 101. The first pressing member 41 has a first pressing surface 411 that cooperates with the annular slot 113, and a first fixing cavity 43 for fixing the outer ring is formed between the annular slot 113 and the first pressing surface 411. A stepped groove 222 is formed on the second pressing end 221, and a ring-shaped flange 422 is formed on the second pressing member 42 in the direction close to the wrist joint axis. The ring-shaped flange 422 has a second pressing surface that cooperates with the stepped groove 222, and a second fixing cavity 44 for fixing the inner ring is formed between the stepped groove 222 and the second pressing surface.

[0049] In some specific embodiments of the present invention, a tooth portion 23 is further provided on the pulley portion 22 along the direction away from the axis of the wrist pulley 2. A clamping edge is provided at the bottom edge of the tooth portion 23, and the clamping edge is used to limit the transmission belt 7 to prevent deviation. The stepped groove 222 of the clamping block is formed above the shaft portion 21, and a sunken receiving area 24 is formed on the upper end surface of the pulley portion 22. The sunken receiving area 24 is used to receive the first pressing member 41. By providing the sunken receiving area 24, the internal space of the housing 1 is saved, and at the same time, the weight of the elbow pulley 6 is reduced.

[0050] In the existing design, the bottom edge of the pulley circumference often adopts a right angle or sharp edge structure, resulting in a concentrated hard extrusion force in the contact area between the pipeline and the pulley body when the pipeline bypasses the pulley. Under long-term reciprocating motion, the outer surface of the pipeline is prone to scratches or microcracks due to scratching by the edge corners, and at the same time, the high-frequency friction at the contact point will accelerate material fatigue. Especially when the pipeline has a radial offset due to the movement of the equipment, the traditional pulley lacks a contact surface structure for guiding and buffering, which is likely to cause abnormal bending or local deformation of the pipeline, increasing the risk of interface wear. This structural defect will also cause the temperature at the contact part of the pipeline and the pulley to rise abnormally, further shortening the service life of the pipeline.

[0051] Therefore, in some specific embodiments of the present invention, an annular receiving groove 114 is formed at the right bottom of the support portion 11, and the shaft portion 21 of the wrist pulley 2 is clamped with the annular receiving groove 114 of the support portion 11. The pulley portion 22 is an annular structure, and its circumferential bottom edge is provided with a stress-reducing profile with a continuous arc transition. Specifically, the inside of the pulley portion 22 is hollow, and the area close to the hollow is chamfered to prevent the pipeline passing through from being worn, and the weight of the elbow pulley 6 can also be reduced.

[0052] In some specific embodiments of the present invention, an avoidance area 25 is formed inside the pulley portion 22, and the avoidance area 25 communicates with the sunken receiving area 24. In some embodiments of the present invention, the avoidance area 25 is designed in a hole shape, and the avoidance area 25 can reduce the weight of the pulley.

[0053] In some embodiments of the present invention, the forearm of the manipulator further includes a drive source 5, an elbow pulley 6 and a transmission belt. The drive source 5 is fixedly connected to the housing 1, and thus can drive the housing 1 to rotate horizontally around the elbow joint axis.

[0054] Working principle of the forearm of the manipulator: The drive source 5 drives the housing 1 to rotate horizontally around the elbow joint axis. The housing 1 serves as a load-bearing body, and its rotation will inevitably drive the wrist pulley 2 thereon to generate a circumferential displacement synchronously. Specifically, a connecting bearing 3 is provided between the elbow pulley 6 and the housing 1. The elbow pulley 6 is fixed to the lower body (not shown in the figure), and it and the body form a stationary reference system. The wrist pulley 2 rotates with the housing 1 to form a moving reference system. When the housing 1 rotates, the center of the wrist pulley 2 revolves around the elbow joint axis, while the elbow pulley 6 remains stationary. A dynamic phase difference is formed between the two pulleys. The transmission belt 7 is tensioned between the two pulleys by a pre-tightening force to form a closed-loop transmission path. When the wrist pulley 2 rotates with the housing 1 to generate a circumferential displacement, the meshing contact point of the transmission belt 7 migrates. The fixed position of the elbow pulley 6 causes the transmission belt 7 to be stretched on the inlet side, and the displacement of the wrist pulley 2 causes the transmission belt 7 to be compressed on the outlet side: the elastic deformation of the transmission belt 7 converts the circumferential displacement into the misalignment amount of the meshing tooth surfaces, forcing the wrist pulley 2 to rotate adaptively around its own wrist joint axis to maintain the tension balance of the transmission belt 7. The wrist pulley 2 is fixedly connected to a support seat, and the support seat is connected to an end effector 9 (not shown in the figure). When the support seat rotates adaptively, it will cause the end effector 9 to rotate.

[0055] In the prior art, the internal pipeline layout of the robotic arm often lacks an effective flow splitting and isolation structure, resulting in easy cross-winding or frictional contact of pipelines with different functions in a limited space. During long-term operation, wear risks may be caused by mechanical vibration or motion interference. At the same time, the fixing method mostly relies on open binding, with problems of insufficient positioning stability, and it is easy for the pipelines to be displaced or loosened due to external forces. In addition, during maintenance, the overall structure needs to be disassembled, the operation is cumbersome and it is difficult to quickly replace a single pipeline, affecting the equipment maintenance efficiency. The lack of a dedicated guiding channel design between the pipeline and the housing 1 is also likely to cause local stress concentration, further exacerbating the pipeline aging problem.

[0056] Refer to Figure 4, for this purpose, in some embodiments of the present invention, input ports 13 and output ports 14 for pipeline input and output are respectively provided at both ends of the housing 1. The input port 13 and the output port 14 are respectively disposed on opposite sides of the housing 1 and are diagonally distributed. Both the wrist pulley 2 and the elbow pulley 6 are hollowed out in cooperation with the input port 13 and the output port 14. A first hole 15 and a second hole 16 are provided at the bottom of the housing 1. A Y-shaped pipe groove 17 is provided inside the housing 1. The Y-shaped pipe groove 17 has a guiding port and two diverging ports. The first hole 15 and the second hole 16 are respectively communicated with the diverging ports, and the guiding port is communicated with the output port 14. A shunt bracket 18 is provided inside the housing 1. The shunt bracket 18 straddles the area where the input port 13 is located. The shunt bracket 18 includes a top bent section, a bottom horizontally reversely bent section, and a vertical connecting section connecting the two. Notches 181 are symmetrically provided on both sides of the middle of the vertical connecting section. The notches 181 are used to fix the pipeline.

[0057] Specifically, after the circuit pipeline and the gas pipeline enter the interior of the housing 1 through the input port 13, they are shunted and isolated by the shunt bracket 18. Specifically, the circuit is sequentially led out through the first hole 15, a diverging port of the Y-shaped pipe groove 17, the guiding port, and the output port 14, and the gas circuit is sequentially led out through the second hole 16, the other diverging port of the Y-shaped pipe groove 17, the guiding port, and the output port 14, forming a shunt isolation structure based on the Y-shaped pipe groove 17; the two diverging ports of the Y-shaped pipe groove 17 are respectively communicated with the first hole 15 and the second hole 16, and the guiding port is communicated with the output port 14, constituting a Y-shaped pipeline channel provided at the bottom. A detachable lower cover plate is provided at the bottom of the housing 1 corresponding to the pipeline channel position, which is convenient for maintenance operations. The input port 13 and the output port 14 adopt a modular plug-in joint design, enhancing the convenience of maintenance. The notches 181 on both sides of the waist of the shunt bracket 18 serve as preset pipeline positioning structures. The pipeline and the bracket are tied and fixed at the notches 181 through a cable tie. The structure of the notches 181 can effectively prevent the displacement of the cable tie. Through the above arrangement of the circuit pipeline and the gas pipeline, the formed circuit and pipeline channels are isolated from each other, avoiding interference between the circuit pipeline and the gas pipeline, and at the same time avoiding interference between the circuit pipeline and the gas pipeline and the housing 1, extending the service life of the circuit and the pipeline, and at the same time avoiding wear during use.

[0058] In a second aspect, referring to Figure 5 , a robotic arm includes the above-mentioned robotic forearm and has a shoulder joint axis. It further includes: an upper arm 8 rotatable around the shoulder axis, and an end effector 9 rotatably connected to the end of the forearm around the wrist axis.

[0059] Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are all within the scope and spirit of the present invention as described in the claims. Moreover, the present invention as described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A forearm of a manipulator, having a wrist joint axis (101) and an elbow joint axis (102), characterized in that, Comprising: A housing (1), including an integrally formed support portion (11) and a main body portion (12), the main body portion (12) extends horizontally in the radial direction close to the wrist joint axis (101) to form the support portion (11), the support portion (11) and the main body portion (12) enclose an accommodation space, and the support portion (11) has a first pressing end (111); A wrist pulley (2), disposed in the accommodation space and coaxial with the wrist joint axis (101), the wrist pulley (2) and the housing (1) form an installation space, the wrist pulley (2) includes an integrally formed shaft portion (21) and a pulley portion (22), and a second pressing end (221) is formed at the connection of the shaft portion (21) and the pulley portion (22); A bearing (3), arranged in the installation space, the bearing (3) has an inner ring and an outer ring, the inner ring abuts against the wrist pulley (2), and the outer ring abuts against the housing (1); A pressing assembly (4), coaxial with the wrist joint axis (101), including a first pressing member (41) and a second pressing member (42); Wherein, the first pressing member (41) and the first pressing end (111) form an axial constraint on the outer ring of the bearing (3), and the second pressing member (42) and the second pressing end (221) form an axial constraint on the inner ring of the bearing (3), so that the wrist pulley (2) can rotate relative to the housing (1) through the bearing (3); The second pressing member (42) includes an annular support seat, the annular support seat is fixedly connected to the wrist pulley (2), the circumferential outer edge of the annular support seat has an annular protrusion (421), and the support portion (11) is correspondingly provided with an annular positioning groove (112), and the annular protrusion (421) is rotatably fitted in the positioning groove (112); The second pressing member (42) is formed with an annular flange (422) in the direction close to the wrist joint axis (101); The annular support seat is provided with an annular accommodation groove (114), the shaft portion (21) of the wrist pulley (2) is clamped with the annular accommodation groove (114) of the support portion (11), and the annular protrusion (421) and the annular flange (422) enclose an annular sealing space.

2. The manipulator forearm according to claim 1, characterized in that, The first pressing end (111) is provided with an annular clamping groove (113) opening inwards around the wrist joint axis, the first pressing member (41) has a first pressing surface (411) matching with the annular clamping groove (113), and the annular clamping groove (113) and the first pressing surface (411) form a first fixing cavity (43) for fixing the outer ring.

3. A forearm of a manipulator according to claim 1, characterized in that, The second pressing end (221) is provided with a stepped groove (222), the annular flange (422) has a second pressing surface matching with the stepped groove (222), and the stepped groove (222) and the second pressing surface form a second fixing cavity (44) for fixing the inner ring.

4. The forearm of a manipulator according to claim 3, characterized in that, The pulley portion (22) is further provided with a gear tooth portion (23) along a direction away from the axis of the wrist pulley (2); the stepped groove (222) is provided on the shaft portion (21); and a sunken accommodation area (24) is provided on the upper end surface of the pulley portion (22); the sunken accommodation area (24) is used to accommodate the first pressing member (41).

5. A forearm of a manipulator according to claim 1, characterized in that, The pulley portion (22) is an annular structure, and a stress-reducing contour with a continuous arc transition is provided on the circumferential bottom edge thereof.

6. The forearm of a manipulator according to claim 4, characterized in that, An escape area (25) is provided inside the pulley portion (22), and the escape area (25) is communicated with the sinking accommodation area (24).

7. A forearm of a manipulator according to claim 1, characterized in that, It also comprises a driving source (5), an elbow pulley (6) and a transmission belt (7); the driving source (5) is fixedly connected to the housing (1) and can drive the housing (1) to rotate in a horizontal direction; the elbow pulley (6) and the wrist pulley (2) are respectively arranged on opposite sides of the housing (1) and are diagonally distributed; the wrist pulley (2) and the elbow pulley (6) are connected in transmission via the transmission belt (7).

8. A forearm of a manipulator according to claim 1, characterized in that, An input port (13) and an output port (14) for pipelines to pass through are respectively provided at both ends of the shell (1), and the input port (13) and the output port (14) are respectively provided on opposite sides of the shell (1) and are diagonally distributed; a first hole (15) and a second hole (16) are provided at the bottom of the shell (1), and a Y-shaped pipe groove (17) is provided on the bottom wall of the shell (1), and the Y-shaped pipe groove (17) has two flow diversion ports and a guide port, the two flow diversion ports are respectively connected to the first hole (15) and the second hole (16), and the guide port is connected to the output port (14).

9. The manipulator forearm according to claim 8, characterized in that, A flow splitter bracket (18) is arranged in the shell (1), and the flow splitter bracket (18) is arranged across the area where the input port is located. The flow splitter bracket (18) comprises a top bending section, a bottom horizontal reverse bending section, and a vertical connecting section connecting the two. Notches (181) are symmetrically provided on both sides of the middle of the vertical connecting section, and the notches (181) are used to fix pipelines.

10. A robotic arm, comprising a forearm of a robotic hand as described in any one of claims 1-9, having a shoulder joint axis, characterized in that, It also includes: an upper arm (8) rotatable about the shoulder joint axis, and an end effector (9) rotatably connected to the forearm about the wrist joint axis (101).

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